CN103521491B - Cleaning fluid absorbing device and developing liquid washing equipment - Google Patents
Cleaning fluid absorbing device and developing liquid washing equipment Download PDFInfo
- Publication number
- CN103521491B CN103521491B CN201310446858.6A CN201310446858A CN103521491B CN 103521491 B CN103521491 B CN 103521491B CN 201310446858 A CN201310446858 A CN 201310446858A CN 103521491 B CN103521491 B CN 103521491B
- Authority
- CN
- China
- Prior art keywords
- cleaning fluid
- suction
- absorption heads
- base plate
- display base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 113
- 239000012530 fluid Substances 0.000 title claims abstract description 111
- 239000007788 liquid Substances 0.000 title abstract description 15
- 238000005406 washing Methods 0.000 title abstract 4
- 238000010521 absorption reaction Methods 0.000 claims abstract description 141
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 238000012546 transfer Methods 0.000 claims description 30
- 238000011010 flushing procedure Methods 0.000 claims description 29
- 238000012544 monitoring process Methods 0.000 claims description 6
- 238000005192 partition Methods 0.000 claims description 4
- 238000013461 design Methods 0.000 abstract description 15
- 230000007704 transition Effects 0.000 description 19
- 238000011161 development Methods 0.000 description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 16
- 230000000694 effects Effects 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 9
- 230000001447 compensatory effect Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention relates to the technical field of display, in particular to a cleaning fluid absorbing device which absorbs cleaning fluid mixed with developing liquid through absorption heads to achieve the uniform developing of a display substrate and developing liquid washing equipment with the cleaning fluid absorbing device. The cleaning fluid absorbing device comprises an absorption head arrangement rack arranged on a display substrate conveying platform and the absorption heads arranged on the absorption head arrangement rack, and the absorption heads are connected with an absorption pump. The design of the absorption heads is adopted, and the cleaning fluid washed by the developing liquid washing equipment can be absorbed timely to solve the problems that developing liquid on the surface of the display substrate is not uniformly washed by existing developing liquid washing equipment without the cleaning fluid absorbing device.
Description
Technical field
The present invention relates to Display Technique field, particularly a kind ofly by absorption heads, the cleaning fluid being mixed with developer solution is drawn to realize display base plate and to develop uniform cleaning fluid suction means and be provided with the developer solution flushing device of this cleaning fluid suction means.
Background technology
At present in display base plate manufacturing process, there is the problem of rinsing inequality in developer solution flushing device, and this can cause the critical size problem bigger than normal or less than normal of the local of display base plate development figure, and does not meet designing requirement.In addition, because the flow of flushing liquor is comparatively large, the developer solution that flushing liquor can promote to act on flows to display base plate edge, and this can cause the medicinal liquid flow at display base plate edge to increase, thus cause the development effect at edge to strengthen, the critical size of this fringe region development figure also can be caused uneven; This is because: the flusher of developer solution flushing device is generally spray clean water equably towards the direction that display base plate direction of advance is contrary, reaches and dilutes and rinse the object of the developer solution on display base plate; More than there is drawback in design, that is: in the process of factory production of reality, due to the existence of some unpredictable elements, the clean water of flusher ejection causes because of its speed sprayed with apart from restriction the non-uniform phenomenon occurring local at display base plate, and this critical size that can cause display base plate local that development figure occurs because not being rinsed changes; In addition, in display base plate developing process, due to the ejection of clean water, developer solution can be driven to display base plate edge flowing, and flowing out display base plate, this causes in flushing process, and the developer solution bulk flow of display base plate edge is large compared with the flow of middle position, cause the development effect of this display base plate edge to strengthen, cause the development of display base plate entirety uneven.
Therefore, need the developer solution flushing device providing a kind of cleaning fluid suction means and be provided with this cleaning fluid suction means to solve the problem.
Summary of the invention
Technical problem solved by the invention is to provide a kind of cleaning fluid suction means and developer solution flushing device; This cleaning fluid suction means is drawn to realize display base plate by absorption heads to the cleaning fluid being mixed with developer solution and to be developed uniform object.
The object of the invention is to be achieved through the following technical solutions: a kind of cleaning fluid suction means, comprise the absorption heads be arranged in display base plate transfer station and lay frame and be arranged on this absorption heads and lay multiple absorption heads on frame, described absorption heads is connected with lift suction pump.
Further, described absorption heads lays by being arranged on described absorption heads the partition that the multi-disc transverse slat of frame lower end and multi-disc riser transverse and longitudinal be staggered to form.
Further, described transverse slat is vertical with described display base plate transfer station length direction to be arranged, and the direction that each described transverse slat to the distance of described display base plate transfer station transmits along described display base plate increases progressively successively.
Further, described absorption heads is communicated with described lift suction pump by suction pipe; Described suction pipe comprises branch road suction pipe for connecting described absorption heads and the total road suction pipe for being connected described lift suction pump and described branch road suction pipe.
Further, described total road suction pipe is provided with the total road flow control valve for adjusting described total road suction pipe suction.
Further, described branch road suction pipe is provided with the branch road flow control valve for adjusting described branch road suction pipe suction.
Further, described total road flow control valve and described branch road flow control valve all adopt manual butterfly valve or automatically controlled butterfly valve.
Further, also comprise the total control circuit for automatically controlling described absorption heads suction, described total control circuit is electrically connected with described total road flow control valve and described branch road flow control valve respectively.
Further, also comprise the pressure sensor for absorption heads suction described in Real-Time Monitoring, described pressure sensor is electrically connected with described total control circuit.
A kind of developer solution flushing device, comprise above-mentioned according to any one of cleaning fluid suction means, described cleaning fluid suction means lays by described absorption heads that frame is corresponding with described display base plate transfer station to be installed.
Further, also comprise flusher, described flusher is arranged on the top of described substrate transfer station, and described cleaning fluid suction means and described flusher set gradually along display base plate direction of transfer.
The present invention compared with prior art has following advantage:
1, the present invention adopts the design of absorption heads, can draw in time the cleaning fluid after the flushing of developer solution flushing device, rinses uneven phenomenon to solve the existing developer solution flushing device not installing cleaning fluid suction means to display base plate surface development liquid; By the speed that multiple absorption heads coordinates display base plate transfer station to transmit display base plate, to reach the even absorption to display base plate surface cleaning liquid; Effectively inhibit clean water to also also not arriving the display base plate rinsing region rinse in development simultaneously; In addition, in display base plate developing process, absorption heads is drawn cleaning fluid and can effectively be avoided being driven developer solution to display base plate edge by the ejection of clean water and the glass substrate edge developer solution bulk flow flowing out glass substrate and cause is large compared with the flow of middle position, the situation appearance that the development effect at display base plate edge is increased; Thus effectively ensure the developing uniformity of display base plate.
2, the present invention adopts the partition of relative closure to design, and each absorption heads can be intercepted, and to avoid influencing each other between the cleaning fluid drawn by each absorption heads, thus causes drawing uneven problem and occurs; Effectively ensure that the absorption quality of cleaning fluid suction means; Objectively ensure that the development effect of display unit.
3, the present invention adopts absorption heads to comprise the design of multiple absorption heads, by cleaning fluid because uneven phenomenon is drawn from the reduction that influences each other between each absorption heads to only having an impact in each absorption heads in the local that fluid is compensatory brought, thus the uniformity that cleaning fluid suction means is drawn for whole display base plate cleaning fluid can be ensure that; Thus effectively ensure that the developing result of developer solution flushing device for display base plate.
4, the present invention adopts the design of total control circuit, pressure sensor and automatically controlled butterfly valve, can realize the automatic monitoring of cleaning fluid suction means to cleaning fluid suction; Ensure that absorption precision, save artificial, simplify suction process.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the invention will be further described.
Fig. 1 is the structural representation (front view) of cleaning fluid suction means described in the embodiment of the present invention one;
Fig. 2 is the structural representation (upward view) that described in the embodiment of the present invention one, absorption heads lays frame;
Fig. 3 is the structural representation (upward view) of absorption heads described in the embodiment of the present invention one;
Fig. 4 is the structural representation (sectional view) of absorption heads described in the embodiment of the present invention one;
Fig. 5 is the structural representation (top view) of display base plate transfer station described in the embodiment of the present invention one;
Fig. 6 is the circuit connection diagram (block diagram) of cleaning fluid suction means described in the embodiment of the present invention one;
Fig. 7 is the structural representation (front view) of cleaning fluid suction means described in the embodiment of the present invention two;
Fig. 8 is the structural representation (upward view) of absorption heads described in the embodiment of the present invention two.
Detailed description of the invention
Embodiment one:
Shown in Fig. 1, Fig. 2, a kind of cleaning fluid suction means of the present embodiment, comprises the correspondence absorption heads be arranged in the display base plate transfer station 1 of developer solution flushing device and lays frame 2 and be arranged on this absorption heads and lay multiple absorption heads 3 on frame 2; Multiple described absorption heads 3 lays frame 2 length direction along described absorption heads and evenly arranges; Described absorption heads 3 is connected with lift suction pump 4 by suction pipe.Absorption heads described in the present embodiment lay frame 2 comprise level frame be located in described display base plate transfer station 1 for installing the installing plate 5 of described absorption heads 3 and being erected at the gripper shoe 6 that connect for described installing plate 5 carry out horizontal support corresponding to described display base plate transfer station 1 two ends at these installing plate 5 two ends; In order to ensure the uniformity drawn, closely adjacent between each described absorption heads 3.
The interface 8 that absorption heads 3 described in the present embodiment comprises suction inlet 7 and is arranged on this suction inlet 7, described suction inlet 7 is communicated with described interface 8; Described absorption heads 3 by described interface 8 be evenly laid in described absorption heads and lay that mounting hole (not shown) on the described installing plate 5 of frame 2 is corresponding to be installed; Arranging in closely cooperating between described interface 8 and described mounting hole, with this, described absorption heads 3 being arranged on described absorption heads and laying on frame 2; The shape of cross section of described suction inlet 7 can be circular discs, rectangular disk or regular polygon dish, adopts the design of circular discs in the present embodiment; Described interface 8 passes described mounting hole and correspondingly with described suction pipe to connect, for providing absorption power for described absorption heads 3.Absorption heads 3 described in the present embodiment is distributed in the lower end of described installing plate 5, and described interface 8 upwards correspondence passes described mounting hole, and is communicated with the described suction pipe be positioned at above described installing plate 5.Lift suction pump 4 described in the present embodiment by described suction pipe for described absorption heads 3 provides absorption power; This lift suction pump 4 can adopt conventional centrifugal pump, vacuum pumping pump etc.
Shown in Figure 3, absorption heads 3 described in the present embodiment is arranged in partition-type; Specifically described absorption heads 3 is that and the multi-disc transverse slat 14 be vertical setting with described installing plate 5 and multi-disc riser 15 transverse and longitudinal are crisscross arranged, the partition 16 formed is formed by being arranged on described installing plate 5 lower end.Wherein, preferably, each described transverse slat 14 is arranged along described installing plate 5 length direction, and each described transverse slat 14 is set in parallel; Each described riser 15 is arranged along described installing plate 5 width, and each described riser 15 is set in parallel.
The absorption heads design that the present invention adopts partition-type to arrange, influences each other between the cleaning fluid that each absorption heads not only can be avoided to draw, thus causes drawing uneven problem appearance; And it is closely adjacent to ensure that between each absorption heads; Thus effectively ensure that the absorption quality of cleaning fluid suction means; Objectively ensure that the development effect of display unit; And this kind is arranged, and structure is simple, low cost.
Shown in Figure 4, transverse slat 14 described in the present embodiment is vertical with described display base plate transfer station 1 length direction to be arranged, and the direction that each described transverse slat 14 to the distance of described display base plate transfer station 1 transmits along described display base plate increases progressively successively, that is, the height of each described transverse slat 14 is the setting successively decreased highly successively or increase progressively by same difference in height, specifically, the height of described transverse slat 14 refers to, described transverse slat 14 bottom is apart from the distance value of described installing plate 5 bottom face, arrange four transverse slats 14 for described installing plate 5 to be described, difference between the height of second described transverse slat 14 that the aspect ratio of first described transverse slat 14 is adjacent is difference in height, in like manner, difference between the height of the 3rd the described transverse slat 14 that the aspect ratio of second described transverse slat 14 is adjacent is difference in height, by that analogy, difference in height described in each adjacent two between transverse slat 14 is all equal, namely the difference in height of each described transverse slat 14 is uniform increments or evenly successively decreases, accordingly, the bottom face of described riser 15 is arranged to the inclined plane that adapts with the height of each described transverse slat 14.
The present invention adopts the design of above-mentioned form, mainly because the height of water level of cleaning fluid is when being in zones of different on display base plate, liquid level change can be produced, therefore, adopt the height of described transverse slat by same difference in height in the setting of successively decreasing highly successively or increase progressively, correspondence can be carried out for the different liquid levels of cleaning fluid and draw; Described absorption heads is made to have the different absorption degree of depth, to ensure that cleaning fluid suction means is better drawn cleaning fluid; Effectively ensure that the absorption quality of cleaning fluid suction means; Objectively ensure that the development effect of display unit; And this kind is arranged, and structure is simple, low cost.
What the cleaning fluid described in the present invention referred to that the Flushing nozzle through developer solution flushing device rinses out is formerly attached on display base plate 9 for the developer solution defective material that develops and the mixed liquor for the clean water of wash-out developer.
The present invention adopts the design of absorption heads, can draw in time the cleaning fluid after the flushing of developer solution flushing device, rinses uneven phenomenon to solve the existing developer solution flushing device not installing cleaning fluid suction means to display base plate surface development liquid; By the speed that multiple absorption heads coordinates display base plate transfer station to transmit display base plate, to reach the even absorption to display base plate surface cleaning liquid; Effectively inhibit clean water to also also not arriving the display base plate rinsing region rinse in development simultaneously; In addition, in display base plate developing process, absorption heads is drawn cleaning fluid and can effectively be avoided being driven developer solution to display base plate edge by the ejection of clean water and the glass substrate edge developer solution bulk flow flowing out glass substrate and cause is large compared with the flow of middle position, the situation appearance that the development effect at display base plate edge is increased; Thus effectively ensure the developing uniformity of display base plate.
Absorption heads 3 described in the present embodiment is communicated with described lift suction pump 4 by suction pipe; Described suction pipe comprises branch road suction pipe 10 for connecting described absorption heads 3 and the total road suction pipe 11 for being connected described lift suction pump 4.In the present embodiment, each described absorption heads 3 is all in parallel with described total road suction pipe 11 by described branch road suction pipe 10; Realize described lift suction pump 4 with this and respectively each described absorption heads 3 is provided to the object drawing power; That is each described branch road suction pipe can be made to divide equally the suction transmitted from described total road suction pipe 11 by the structure of this parallel connection; The suction that each described absorption heads 3 pairs of cleaning fluids are produced is impartial.
In the present embodiment in a fairly large number of situation of described absorption heads 3, because needs correspondence connects a lot of described branch road suction pipe 10, therefore, multiple described absorption heads 3 blocking can be arranged; Specifically, a suction unit can be set to several along the tactic described absorption heads 3 of described installing plate 5 width; Three described absorption heads 3 are comprised for each suction unit; Three of suction unit described in each a described absorption heads 3 can be connected with a transition conduit (not shown) respectively by described branch road suction pipe 10; Be connected with described total road suction pipe 11 by this transition conduit again; That is each described suction unit is all connected with described total road suction pipe 11 by a described transition conduit, is relation in parallel between each described suction unit.Adopt the design of transition conduit, can ensure that the suction being delivered to absorption heads 3 described in each is average; More evenly fine and smooth during the cleaning fluid drawing on described display base plate 9 to make cleaning fluid suction means correspondence, cause on described display base plate 9 to avoid the suction because of some described absorption heads 3 relatively large or little and the situation of the flushing inequality of developer solution in described display unit is occurred; The uniformity of the development effect of described display base plate 9 entirety is ensure that with this.
The suction pipe of total road described in the present embodiment 11 is provided with the total road flow control valve 12 for adjusting described total road suction pipe suction; Described branch road suction pipe 10 is provided with the branch road flow control valve 13 for adjusting described branch road suction pipe suction; Described transition conduit is also arranged for controlling transition conduit pipe diameter size to adjust the transition conduit flow control valve of its suction.
Lift suction pump 4 described in the present embodiment connects a cleaning fluid collecting box (belong to prior art, do not show in figure) by discharging tube.This cleaning fluid collecting box is for collecting drawn cleaning fluid; When the cleaning fluid in cleaning fluid collecting box is collected full, by being connected to the excavationg pump (belong to prior art, do not show in figure) on described cleaning fluid collecting box, cleaning fluid is discharged to sewage disposal system; Cleaning fluid is avoided to produce secondary pollution to described display base plate in the develop region of relative closure with this.
The present invention adopts the design arranging suction unit to be for hydromechanical principle; Due to the erratic behavior of cleaning fluid flowing, the amount of the cleaning fluid flowing to each absorption heads can be caused uneven; Below adopt and illustrate: when each described suction unit only has a described absorption heads; When a certain described absorption heads is not drawn to cleaning fluid, under the prerequisite of the suction equilibrium of each described absorption heads, because fluid has compensatory, that is now cleaning fluid can converge, till the described absorption heads at this place is drawn to cleaning fluid to the described absorption heads place not being drawn to cleaning fluid; In cleaning fluid convergence process, relatively will reduce for uptake other described absorption heads; This can cause described cleaning fluid suction means uneven to the absorption of cleaning fluid; Thus make the developer solution in described some place of display base plate can not get abundant cleaning, described display base plate can be produced with this and to develop uneven situation, thus the critical size of display unit regional imaging is changed.When each described suction unit has three described absorption heads; As long as have the situation that a described absorption heads is not drawn to cleaning fluid in three described absorption heads, then under the prerequisite of the suction equilibrium of each described absorption heads, also can there is because of the compensatory of cleaning fluid the situation that uptake reduces in other two the described absorption heads in suction unit described in this; For the described absorption heads in each described suction unit, owing to all providing suction by same described transition conduit, identical with the suction of this each described absorption heads; When in this suction unit, a described absorption heads is inhaled less than water, then the suction of absorption heads described in other can be caused to reduce, this is because the weight of cleaning fluid is greater than air, therefore described absorption heads has drawn large quantity of air.Cause described absorption heads in each described suction unit can not normal extraction cleaning fluid like this, cleaning fluid have just flowed to the low position of liquid level (corresponding absorption heads of inhaling less than water) from the position that liquid level is high; Until the described absorption heads at this place is drawn to cleaning fluid, then the uptake for other two described absorption heads just can be tending towards normal; So just can alleviate the phenomenon that described in certain, absorption heads place cleaning fluid is on the low side;
In cleaning fluid convergence process, relatively will reduce for uptake other two described absorption heads in described suction unit; But have an impact hardly for the described absorption heads drawing cleaning fluid in suction unit described in other; Therefore the design of suction unit is adopted, by cleaning fluid because uneven phenomenon is drawn from the reduction that influences each other between each suction unit to only having an impact in each suction unit in the local that fluid is compensatory brought, thus the uniformity that cleaning fluid suction means is drawn for whole display base plate cleaning fluid can be ensure that; Thus effectively ensure that the developing result of developer solution flushing device for display base plate.
The flow control valve of total road described in the present embodiment 12, transition conduit flow control valve and branch road flow control valve 13 all can adopt manual butterfly valve; Manually regulate the pipe diameter size of described total road suction pipe 11, transition conduit and branch road suction pipe 10 to adjust its suction.
Shown in Figure 6, the flow control valve of total road described in the present embodiment 12, transition conduit flow control valve and branch road flow control valve 13 also can all adopt automatically controlled butterfly valve.Described flushing liquor suction means also comprises the total control circuit for automatically controlling described absorption heads 3 suction, and described total control circuit is electrically connected with described total road flow control valve 12, transition conduit flow control valve and branch road flow control valve 13 respectively by electric wire.
Also comprise the pressure sensor for Real-Time Monitoring each absorption heads 3 suction in the present embodiment, this pressure sensor is arranged in the described interface 8 of described absorption heads 3, and this pressure sensor is electrically connected with described total control circuit by electric wire.
When described total road flow control valve 12, transition conduit flow control valve and branch road flow control valve 13 all adopt automatically controlled butterfly valve to arrange, suction in each described interface of the Real-Time Monitoring of pressure sensor described in the present embodiment, and suction value is returned to described total control circuit, suction value is carried out contrast with the target suction value preset and automatically writes control instruction by described total control circuit, send to described total road flow control valve 12, transition conduit flow control valve and branch road flow control valve 13, in order to control the suction in described total road suction pipe 11, transition conduit and branch road suction pipe 10; To adjust the suction of described absorption heads 3, ensure the absorption effect of described cleaning fluid suction means for cleaning fluid with this; Adopt the design of described total control circuit, pressure sensor and automatically controlled butterfly valve, the automatic monitoring of cleaning fluid suction means to cleaning fluid suction can be realized; Ensure that absorption precision, save artificial, simplify suction process.
The present invention also provides a kind of developer solution flushing device, shown in Fig. 5 (in figure, the direction of arrow is that display base plate transfer station transmits the direction of display base plate), this developer solution flushing device comprise above-mentioned described in cleaning fluid suction means; This cleaning fluid suction means lays by described absorption heads that frame 101 is corresponding with described display base plate transfer station 102 to be installed.
Above-mentioned developer solution flushing device also comprises flusher 103, and flusher 103 is arranged on the top of substrate transfer station 102, and cleaning fluid suction means and flusher 103 set gradually along display base plate direction of transfer.
Relative to Fig. 5, along the direction that display base plate transmits in the present embodiment, described display base plate transfer station 1 was provided with cleaning fluid suction means before this, and then flusher 103 is installed, described cleaning fluid suction means be arranged on arranging for the flusher 103 that sprays clean water is corresponding of described display base plate transfer station 1 upper end; The direction that described flusher 103 sprays clean water is relative with the direction that described display base plate transfer station 1 transmits described display base plate; It display base plate transfer station 1 described in this region between described cleaning fluid suction means and described flusher 103 is the actual developer solution cleaning area of display base plate; Prevent too much cleaning fluid by described cleaning fluid suction means with this and flow to containing developer solution region to be cleaned; Effectively reduce the impact of cleaning fluid on the developing uniformity and cleaning performance that are positioned at the described display base plate in region to be cleaned.Distance between the suction means of cleaning fluid described in the present embodiment and described flusher 103 can according to described flusher to the spouting velocity of clean water, spray the actual parameters such as distance and freely adjust; Flusher described in the present embodiment comprises a strip nozzle, and this nozzle is provided with along the horizontally disposed rectangle delivery port of described display base plate transfer station width; The clean water adopting this kind of described flusher ejection is that water cloth-like is evenly injected on described display base plate; The concrete structure of this flusher belongs to prior art, no longer too much repeats herein.
Embodiment two:
Cleaning fluid suction means in the present embodiment is the improvement on embodiment one basis, and the no longer repeated description of technology contents disclosed in embodiment one, disclosed in embodiment one, content also belongs to content disclosed in the present embodiment.
Shown in Fig. 7 and Fig. 8, the suction means of cleaning fluid described in the present embodiment, comprise the absorption heads be arranged in display base plate transfer station 201 to lay frame 202 and be arranged on this absorption heads and lay an absorption heads 203 on frame 202, this absorption heads 203 connects lift suction pump 204.Described absorption heads 203 comprises the bar shaped suction nozzle 205 being arranged on installing plate 207 lower end and the multiple interfaces 206 be arranged on this bar shaped suction nozzle 205, and described bar shaped suction nozzle 205 is communicated with each described interface 206; Described interface 206 correspondence is installed on described installing plate 207.In order to ensure the uniformity drawn, closely adjacent between each described interface 206.Described bar shaped suction nozzle 205 in the present embodiment is a strip through-hole, for drawing cleaning fluid; Described absorption heads 203 by described interface 206 be evenly laid in described absorption heads and lay that mounting hole (not shown) on the described installing plate 207 of frame 202 is corresponding to be installed; Arranging in closely cooperating between described interface 206 and described mounting hole, with this, described absorption heads 203 being arranged on described absorption heads and laying on frame 202; Described interface 206 passes described mounting hole and correspondingly with described suction pipe to connect, for providing absorption power for described absorption heads 203.Strip through-hole length direction in absorption heads 203 described in the present embodiment and described installing plate 207 length direction adapt; And the width of the length of strip through-hole and described display base plate adapts; Described bar shaped suction nozzle is communicated with the suction pipe be positioned at above described installing plate 207 by described interface 206.Lift suction pump 204 described in the present embodiment by described suction pipe for absorption heads 203 provides absorption power; This lift suction pump 204 can adopt conventional centrifugal pump, vacuum pumping pump etc.
Absorption heads 203 described in the present embodiment is communicated with described lift suction pump 204 by suction pipe; This suction pipe comprises branch road suction pipe 208 for connecting described interface 206 and the total road suction pipe 209 for being connected described lift suction pump 204.Absorption heads 203 described in the present embodiment is communicated with described total road suction pipe 209 by multiple described branch road suction pipe 208, in parallel between each described branch road suction pipe 208; Realize described lift suction pump 204 with this and respectively by multiple described branch road suction pipe 208, described absorption heads 203 is provided to the object drawing power; That is each described branch road suction pipe 208 can be made to divide equally the suction transmitted from described total road suction pipe 209 by the structure of this parallel connection; The suction that described absorption heads 203 pairs of cleaning fluids are produced is impartial.
In the present embodiment in a fairly large number of situation of described branch road suction pipe 208, multiple described branch road suction pipe 208 blocking can be arranged; Specifically, a suction unit can be set to several along the tactic described branch road suction pipe 208 of described installing plate 207 width; Three described branch road suction pipes 208 are comprised for each described suction unit; Three of suction unit described in each a described branch road suction pipe 208 can be connected with a transition conduit (not shown) respectively; Be connected with described total road suction pipe 209 by this transition conduit again; That is each described suction unit is all connected with described total road suction pipe 209 by a described transition conduit, is relation in parallel between each described suction unit.Adopt the design of transition conduit, can ensure that the suction being delivered to branch road suction pipe 208 described in each is average; More evenly fine and smooth during the cleaning fluid drawing on display base plate to make cleaning fluid suction means correspondence, cause on display base plate to avoid the suction because of some described branch road suction pipes 208 relatively large or little and the situation of the flushing inequality of developer solution in display unit is occurred; The uniformity of the development effect of display base plate entirety is ensure that with this.
Finally it should be noted that, above embodiment is only in order to illustrate technical scheme of the present invention and unrestricted, although with reference to preferred embodiment to invention has been detailed description, those skilled in the art are to be understood that, can modify to technical scheme of the present invention or equivalent replacement, and not departing from the spirit and scope of technical solution of the present invention, it all should be encompassed in the middle of right of the present invention.
Claims (10)
1. a cleaning fluid suction means, it is characterized in that, comprise the absorption heads be arranged in display base plate transfer station to lay frame and be arranged on this absorption heads and lay multiple absorption heads on frame, described absorption heads is connected with lift suction pump, and described absorption heads lays by being arranged on described absorption heads the partition that the multi-disc transverse slat of frame lower end and multi-disc riser transverse and longitudinal be staggered to form.
2. cleaning fluid suction means according to claim 1, it is characterized in that, described transverse slat is vertical with described display base plate transfer station length direction to be arranged, and the direction that each described transverse slat to the distance of described display base plate transfer station transmits along described display base plate increases progressively successively.
3. cleaning fluid suction means according to claim 1 and 2, is characterized in that, described absorption heads is communicated with described lift suction pump by suction pipe; Described suction pipe comprises branch road suction pipe for connecting described absorption heads and the total road suction pipe for being connected described lift suction pump and described branch road suction pipe.
4. cleaning fluid suction means according to claim 3, is characterized in that, described total road suction pipe is provided with the total road flow control valve for adjusting described total road suction pipe suction.
5. cleaning fluid suction means according to claim 4, is characterized in that, described branch road suction pipe is provided with the branch road flow control valve for adjusting described branch road suction pipe suction.
6. cleaning fluid suction means according to claim 5, is characterized in that, described total road flow control valve and described branch road flow control valve all adopt manual butterfly valve or automatically controlled butterfly valve.
7. the cleaning fluid suction means according to any one of claim 5 or 6, it is characterized in that, also comprise the total control circuit for automatically controlling described absorption heads suction, described total control circuit is electrically connected with described total road flow control valve and described branch road flow control valve respectively.
8. cleaning fluid suction means according to claim 7, is characterized in that, also comprises the pressure sensor for absorption heads suction described in Real-Time Monitoring, and described pressure sensor is electrically connected with described total control circuit.
9. a developer solution flushing device, is characterized in that, comprises the cleaning fluid suction means described in any one of claim 1-8, and described cleaning fluid suction means lays by described absorption heads that frame is corresponding with described display base plate transfer station to be installed.
10. developer solution flushing device according to claim 9, it is characterized in that, also comprise flusher, described flusher is arranged on the top of described substrate transfer station, and described cleaning fluid suction means and described flusher set gradually along display base plate direction of transfer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310446858.6A CN103521491B (en) | 2013-09-25 | 2013-09-25 | Cleaning fluid absorbing device and developing liquid washing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310446858.6A CN103521491B (en) | 2013-09-25 | 2013-09-25 | Cleaning fluid absorbing device and developing liquid washing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103521491A CN103521491A (en) | 2014-01-22 |
| CN103521491B true CN103521491B (en) | 2015-05-20 |
Family
ID=49924048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310446858.6A Expired - Fee Related CN103521491B (en) | 2013-09-25 | 2013-09-25 | Cleaning fluid absorbing device and developing liquid washing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103521491B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102410435B1 (en) * | 2017-07-21 | 2022-06-17 | 코닝 인코포레이티드 | Pressure mapping apparatus and method of cleaning a glass substrate using the same |
| CN110711751B (en) * | 2018-07-11 | 2022-02-18 | 深圳迈瑞生物医疗电子股份有限公司 | Automatic cleaning apparatus, control method of automatic cleaning apparatus, and storage medium |
| US11693435B2 (en) * | 2020-06-25 | 2023-07-04 | Applied Materials, Inc. | Ethercat liquid flow controller communication for substrate processing systems |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1690860A (en) * | 2004-04-22 | 2005-11-02 | 鸿富锦精密工业（深圳）有限公司 | Apparatus for removing developer |
| CN101118837A (en) * | 2006-07-31 | 2008-02-06 | 株式会社细美事 | Process device for executing leaching, suction and drying process |
| CN101907834A (en) * | 2009-06-03 | 2010-12-08 | 沈阳芯源微电子设备有限公司 | Vacuum developing mechanism |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0862856A (en) * | 1994-08-24 | 1996-03-08 | Konica Corp | Developing device for planographic printing plate |
| JP4042179B2 (en) * | 1997-05-08 | 2008-02-06 | 東レ株式会社 | Chemical treatment equipment |
| TWI245578B (en) * | 2001-12-31 | 2005-12-11 | Ritdisplay Corp | Developing apparatus and method for developing organic electroluminescent display panels |
-
2013
- 2013-09-25 CN CN201310446858.6A patent/CN103521491B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1690860A (en) * | 2004-04-22 | 2005-11-02 | 鸿富锦精密工业（深圳）有限公司 | Apparatus for removing developer |
| CN101118837A (en) * | 2006-07-31 | 2008-02-06 | 株式会社细美事 | Process device for executing leaching, suction and drying process |
| CN101907834A (en) * | 2009-06-03 | 2010-12-08 | 沈阳芯源微电子设备有限公司 | Vacuum developing mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103521491A (en) | 2014-01-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103521491B (en) | Cleaning fluid absorbing device and developing liquid washing equipment | |
| CN205351888U (en) | A moisture piping and subassembly for ice machine | |
| CN201644252U (en) | A dust suppression sprinkler device for railway coal transportation | |
| CN207792013U (en) | A kind of quick-fried pearl material collecting device of cigarette | |
| CN201658274U (en) | Vegetable washing machine | |
| CN204295858U (en) | Defense equipment door leaf spray equipment | |
| CN207371933U (en) | Web plate spraying and cleaning apparatus and press wash machine | |
| CN212925209U (en) | Electroplating diamond wire sand blasting device | |
| CN202030075U (en) | Cleaning device of circulating water for jelly filling machine | |
| CN101327394A (en) | Liquid dehumidification packed tower pipe-type liquid distributor | |
| CN208390530U (en) | A kind of steel bead wire water washing device | |
| CN209020637U (en) | Lead agent automatic spraying system | |
| CN204034913U (en) | A kind of steam glue system that can improve uniformity of size application | |
| CN203140244U (en) | Coating system | |
| CN211051782U (en) | 3D flush coater with residual photoresist circulation clean water system | |
| CN204167277U (en) | A kind of liquid cutter cleaning device | |
| CN210275378U (en) | A irrigation equipment for rice planting | |
| CN207793751U (en) | A kind of spray equipment and paper machine | |
| CN209238232U (en) | A kind of automatic glue-spraying mechanism | |
| CN202232411U (en) | Drop irrigation system | |
| CN210876665U (en) | Novel tableware box cleaning machine | |
| CN211510210U (en) | Pet water dispenser | |
| CN209218814U (en) | A kind of rainer | |
| RU2336688C1 (en) | Laboratory-field water sprinkler | |
| CN205949366U (en) | Tunnel washing medicine machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150520 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |