CN103499308B - Independent five-degree-of-freedultra-precise ultra-precise material in-situ test microscopic observation platform - Google Patents

Abstract

The invention relates to an independent five-degree-of-freedom ultra-precision material in-situ testing microscopic observation platform, which belongs to the precision scientific microscopic observation instrument. The platform is composed of X, Y, Z-axis precision moving components, X, Z-axis rotation components, X, Y, Z-axis flexible hinged ultra-precision following components, and super depth-of-field lens. X, Y, Z-axis precision movement assembly, X, Z-axis rotation assembly can respectively finely adjust the relative position and relative angle of the X, Y, Z direction of the super depth-of-field lens distance observation test piece; X, Y, Z-axis flexible hinge The ultra-precise tracking component of the type can realize the active tracking of the specimen in the X, Y, and Z directions relative to the micro-vibration under the load, and the Y-axis ultra-precision following component can also assist the zooming of the ultra-depth-of-field lens. The ultra-depth-of-field lens is used for super-depth observation of the surface topography of the specimen onlookers. The advantages are: compact size, precise drive, good follow-up effect, high integration, strong practicability, and can be used independently or combined with other devices.

Description

Independent five-degree-of-freedom ultra-precision material in-situ testing microscopic observation platform

technical field

The invention relates to a precision scientific microscopic observation instrument, in particular to an independent five-degree-of-freedom ultra-precision material in-situ testing microscopic observation platform integrating ultra-depth-of-field microscopic observation, precision driving and active following. It can provide in-situ monitoring for various materials under different load states, and reveal the mechanical properties and damage mechanism of materials at the micro-nano scale. ) technology and other high-tech industries have an extremely important role in promoting the development.

Background technique

Material testing technology is an important means and method for material science and engineering applications. All parts are inevitably subjected to force or temperature in the actual use process. After certain use conditions and use time, the material will undergo deformation, wear, surface pitting and other failure phenomena. Microscopic observation is a technique widely used in failure analysis. By providing trace analysis, crack analysis and fracture analysis on material samples, the basic properties and mechanical laws of materials can be obtained.

In-situ mechanical performance testing refers to the process of testing the mechanical properties of specimen materials at the micro/nano scale, using optical microscopes, electron microscopes, and atomic force microscopes to measure the microscopic deformation of materials and their products under various loads. It is a mechanical testing method for dynamic online monitoring of the whole process of damage. This technology reveals the mechanical behavior of various materials and their products, the damage mechanism, and the correlation between the magnitude and type of load and material properties from the microscopic level.

There are still some deficiencies in the current in-situ observation equipment: (1) The current commercial microscopes are difficult to meet the large-stroke lens movement capability, which restricts the in-situ observation of large specimens; (2) Due to the influence of the external environment, in some The specimen under load is often in a state of micro-vibration, and it is difficult for the current commercial microscopes to follow the specimen synchronously to ensure stable imaging of the observed area; (3) the cavity of the scanning electron microscope and atomic force microscope The space is very limited, and it is difficult to conduct in-situ observations on the specimens at the macro scale.

Therefore, it is of great significance to design a microscopic observation platform for in-situ testing of ultra-precision materials with five degrees of freedom, large travel, active tracking, and easy integration.

Contents of the invention

The object of the present invention is to provide an independent five-degree-of-freedom ultra-precision material in-situ testing microscopic observation platform, which solves the above-mentioned problems in the prior art. The invention can be applied to the observation of the microscopic appearance of materials. The five-degree-of-freedom precise adjustment of the relative position between the ultra-depth-of-field lens and the observed test piece is realized through the five-degree-of-freedom precision driving component; the flexible hinge type X, Y, Z-axis ultra-precision following component can realize the relative position in the X, Y, and Z directions The ultra-precise tracking of the observed test piece in the micro-vibration keeps the ultra-depth-of-field lens and the observed test piece relatively still. The active following of the specimen in the micro-vibration under the load realizes the in-situ observation of the specimen under different loads; the Y-axis ultra-precision following component can also assist the zooming of the ultra-depth-of-field lens; through the observation of the ultra-depth-of-field lens, the stable position of the specimen can be obtained Microscopic 3D topography images. The invention can be independently used as an observation platform to realize the observation of the microscopic appearance of the test piece; it can also be installed on the testing machine and other testing equipment, and integrates and actively follows the tested piece in the micro-vibration under the load, and the microcosmic shape of the tested piece Real-time in-situ observation of the deformation, damage and fracture process; it can also be installed on the machine tool, try to follow the machine tool parts in work, observe and test online, and obtain the microscopic three-dimensional shape of the machine tool parts under the real stress state , to provide key data for the design improvement of machine tool components. High integration and strong practicability, it can be used independently or combined with other equipment.

Above-mentioned purpose of the present invention is achieved through the following technical solutions:

Independent five-degree-of-freedom ultra-precision material in-situ testing microscopic observation table, including X-axis moving assembly 14, Y-axis moving assembly 12, Z-axis moving assembly 11, X-axis rotating assembly 7, Z-axis rotating assembly 6, X-Y-Z three-axis Following assembly, super depth-of-field lens 9; the Y-axis moving assembly 12 is installed on the X-axis moving assembly 14, and the Z-axis moving assembly 11 is installed on the Y-axis moving assembly 12; the following assembly base plate 1 is installed on the Z-axis moving assembly 11, the Y-Z axis follower assembly 2 of the X-Y-Z three-axis follower assembly is installed on the follower assembly base plate 1 through the hexagon socket head cap screw 3, and the X-axis follower assembly 5 is connected to the Y-Z axis follower assembly 2 through the follower assembly connecting plate (4); The Z-axis rotation assembly 6 is installed on the X-axis following assembly 5, and the X-axis rotation assembly 7 is installed on the Z-axis rotation assembly 6; the super depth-of-field lens 9 is fixed in the hole of the super-depth-of-field lens fixing block 10, and the super-depth-of-field lens is fixed The block 10 is connected with the X-axis rotating assembly 7 through the microscope connecting shaft 8 .

The X-axis moving assembly 14 provides precise displacement in the X-axis direction, and is powered by the servo motor 30. After being decelerated by the reducer 29, the ball screw 20 is driven to output a linear displacement. The X-axis moving assembly 14 passes through the double slides on both sides The linear guide rail 18 of the block supports and guides, and limit switches 15 are respectively installed on both sides of the linear guide rail 18, which are used for prompting to complete stroke control and limit protection; the servo motor 30 is connected with the reducer 29 through screws, and the reducer 29 is a planetary gear Reducer with a reduction ratio of 33 and an accuracy of 3 points; the reducer 29 is fixed on the motor base 28 by screws, and the motor base 28 is fixed in the corresponding threaded hole of the X-axis bottom plate 25; the output shaft of the reducer 29 passes through the coupling 27 is connected to the end of the ball screw 20, the two ends of the ball screw 20 are respectively supported by the EF screw seat 26 and the EK screw seat 19, and the EF screw seat 26 and the EK screw seat 19 are respectively fixed on the X-axis bottom plate 25 Above; the spring 23 is set on the ball screw 20, and the two ends are respectively connected with the screw nut 22 and the EF screw seat 26 by screws, and the screw nut 22 is installed in the hole of the nut seat 21 and fastened by screws; the linear guide rail 18 Two sliders 24 are installed on the top to increase the supporting force of the upper workbench; the linear guide rail 18 is fastened on the X-axis bottom plate 25 by screws; the limit switch 15 is installed in the threaded hole on the limit switch seat 16 Inside, use two front and rear nuts 17 to fix the limit switch 15 on the limit switch seat 16, and the limit switch seat 16 is fixed on the X-axis bottom plate 25 by screws.

The servo motor 30 has a 20-bit encoder and a holding brake, so that the motor can achieve nanoscale angular displacement resolution, and the relative moving assembly has self-locking ability; the Z-axis moving assembly 11 and the Y-axis moving assembly 12 The relative displacement between them is detected by the linear displacement grating ruler 13 to realize the closed-loop control of the Y-axis displacement; the displacement detection principle of the X and Z axes is the same as that of the Y-axis as mentioned above.

The connection mode of the Y-axis moving assembly 12 and the Z-axis moving assembly 11 is the same as that of the X-axis direction moving assembly 14; Fixed connection; the Z-axis bottom plate 34 is vertically connected to the Y-Z axis connecting plate 31 through screws, and the connecting plate 32 and the triangular plate 33 are respectively connected to the two ends of the Z-axis bottom plate 34 and the Y-Z axis connecting plate 31 to connect and support the Z-axis bottom plate 34 , The role of the Y-Z axis connecting plate 31, and the space for the arrangement of the transmission chain in the Z direction is reserved.

The X-Y-Z three-axis following assembly is composed of a Y-Z axis following assembly 2 and an X-axis following assembly 5. The Y-Z axis direction following assembly 2 and the X-axis following assembly 5 are connected by an L-shaped following assembly connecting plate 4, so that the X direction is flexible The hinge 42 and the Y-Z flexible hinge 35 are perpendicular to each other; combined with the capacitive displacement sensor installed near the observed test piece, the closed-loop control can be realized, and the Y-Z axis direction following component 2 and the X-axis following component 5 respond together to realize X-Y-Z three-axis linkage following .

The Y-Z axis following assembly 2 is composed of a Y-Z flexible hinge 35, a wedge block 36, and a piezoelectric ceramic 37. The Y-Z flexible hinge 35 is fixed on the bottom plate 1 of the following assembly by three connecting screws; the Y-Z flexible hinge 35 It is composed of two parallel four-bar linkages perpendicular to each other. The Y-direction parallel four-bar linkage is nested in the Z-direction parallel four-bar linkage; the driving force is provided by the piezoelectric effect of the piezoelectric ceramic 37, and the Z-direction parallel four-bar linkage The linkage mechanism is composed of two connecting rod parts I38 and the Y-direction parallel four-bar linkage mechanism; the Y-direction parallel four-bar linkage mechanism is composed of two connecting rod parts II40 and the moving part I39; the wedge block 36 is used to adjust the piezoelectric ceramic 37 The gap with the flexible hinge 35 in the Y-Z direction can pre-press the piezoelectric ceramic 37 at the same time.

The X-direction flexible hinge 42 in the X-axis following assembly 5 is fixed on the connecting plate 4 of the following assembly through two connecting screws. The driving principle is as described above, and the X-direction flexible hinge 42 includes an X-direction parallel four-bar linkage mechanism. , The X-direction parallel four-bar linkage mechanism is composed of two connecting rod parts Ⅲ43 and the moving part Ⅱ41, which can realize the X-axis following.

The nut seat 21 of the X-axis moving assembly 14 is always in a stretched state during the movement, and the balls of the ball screw 20 are pretreated with zero gap, so that the screw nut 22 eliminates the gap during the reciprocating motion. The precision of the X-axis moving assembly 14 is improved; the backlash elimination method of the ball screw of the Y and Z axes is the same as that of the X-axis as described above.

The multifunctional connecting plate 47 of the Z-axis rotating assembly 6 is connected with the moving part II 41 in the X-axis following assembly 5 through screws; the rotating assembly is powered by the steering gear 46, and the X-axis rotating assembly 7 and the Z-axis rotating assembly 6 pass through The U-shaped connecting plate 45 is connected, and the directions of the output shafts are perpendicular to each other; the microscope connecting shaft 8 is installed on the X-axis rotating assembly 7, the microscope connecting shaft 8 and the super depth-of-field lens fixed block 10 are connected through the shaft hole interference, and the super depth-of-field lens 9 and The super depth-of-field lens fixing block 10 is fixedly connected through the shaft hole.

The super-depth-of-field lens 9 is mounted on the top of the five-degree-of-freedom moving component, and the X, Y, and Z-axis moving components 14, 12, and 11 each have a stroke capacity of 100 mm, and the displacement accuracy is 0.1 μm, so that the super-depth-of-field lens 9 has Large range of movement; the X and Z axis rotation components 7 and 6 each have a 180° angular displacement capability, and the rotation angle accuracy is 0.18°, enabling the super depth-of-field lens 9 to observe different angles of the tested object; X, Y-Z axes follow The components 5 and 2 each have an ultra-precise micro-displacement capability with a stroke of 30 μm and an accuracy of 10 nm, so that the super depth-of-field lens 9 has a good following response when it is shaken by the external environment; Auxiliary zoom; the selected super depth-of-field lens 9 has a wide magnification range, and can be replaced with lenses with 100-1000 times zoom capability, 250-2500 times zoom capability, and 500-5000 times zoom capability; the super depth-of-field lens 9 has a larger depth of field Ability to obtain three-dimensional topography images of microscopic test pieces.

The beneficial effect of the present invention is that: compared with the prior art, the present invention has the advantages of compact size, precise driving, good follow-up effect, easy integration and the like. Through the five-degree-of-freedom precision drive component, five-degree-of-freedom precise adjustment of the relative position between the super-depth-of-field lens and the observed test piece is realized, so that the super-depth-of-field lens has a larger observation range; the X-Y-Z three-axis following component can realize X, Y, Z The ultra-precise follow-up of the three directions relative to the observation test piece is to obtain a clear microscopic image of the test piece in relative micro-vibration; through the observation of the ultra-depth-of-field lens, a stable microscopic three-dimensional topography image of the test piece is obtained. The invention can be independently used as an observation platform to realize the observation of the microscopic appearance of the test piece; it can also be installed on the testing machine and other testing equipment, and integrates and actively follows the tested piece in the micro-vibration under the load, and the microcosmic shape of the tested piece Real-time in-situ observation of the deformation, damage and fracture process; it can also be installed on the machine tool, try to follow the machine tool parts in work, observe and test online, and obtain the microscopic three-dimensional shape of the machine tool parts under the real stress state , to provide key data for the design improvement of machine tool components. High integration and strong practicability, it can be used independently or combined with other equipment.

Description of drawings

The accompanying drawings described here are used to provide a further understanding of the present invention, and constitute a part of the application. The schematic examples and descriptions of the present invention are used to explain the present invention, and do not constitute improper limitations to the present invention.

Fig. 1 is a schematic diagram of the main structure of the present invention;

Fig. 2 is a schematic structural view of the X-axis moving assembly of the present invention;

Fig. 3 is a schematic structural view of the Y-axis moving assembly of the present invention;

Fig. 4 is a schematic structural view of the Z-axis moving assembly of the present invention;

Fig. 5 is a schematic structural diagram of the Y-Z axis following assembly of the present invention;

Fig. 6 is a structural schematic diagram of the X-axis following assembly of the present invention;

FIG. 7 is a structural schematic diagram of the super depth-of-field lens and the X-axis and Z-axis rotating components of the present invention.

In the figure: 1. The bottom plate of the following component; 2. The Y-Z axis following the component; 3. The hexagon socket head screw; 4. The connecting plate of the following component; 5. The X-axis following component; 6. The Z-axis rotating component; 7. The X-axis rotating component; 8. Microscope connecting shaft; 9. Super depth of field lens; 10. Super depth of field lens fixed block; 11. Z-axis moving component; 12. Y-axis moving component; 13. Linear displacement grating ruler; 14. X-axis moving component; 15 , limit switch; 16, limit switch seat; 17, nut; 18, linear guide rail; 19, EK screw seat; 20, ball screw; 21, nut seat; 22, screw nut; 23, spring; 24 , slider; 25, X-axis bottom plate; 26, EF screw seat; 27, coupling; 28, motor seat; 29, reducer; 30, servo motor; 31, Y-Z axis connecting plate; 32, connecting plate; 33. Triangle plate; 34. Z-axis bottom plate; 35. Y-Z direction flexible hinge; 36. Wedge block; 37. Piezoelectric ceramics; 38. Connecting rod part I; 39. Moving part I; 40. Connecting rod part II; 41. Moving part II; 42, X-direction flexible hinge; 43, connecting rod part III; 44, output wheel; 45, U-shaped connecting plate; 46, steering gear; 47, multifunctional connecting plate.

Detailed ways

The detailed content of the present invention and its specific implementation will be further described below in conjunction with the accompanying drawings.

Referring to Fig. 1 to Fig. 7, the independent five-degree-of-freedom ultra-precision material in-situ testing microscopic observation platform of the present invention is mainly composed of X, Y, and Z-axis moving assemblies 14, 12, 11, and X, Z-axis rotating assemblies 7 , 6, X, Y-Z axis flexible hinged ultra-precision following components 5,2 and 9 super depth of field lens.

The Y-axis moving assembly 12 is installed on the X-axis moving assembly 14, and the Z-axis moving assembly 11 is installed on the Y-axis moving assembly 12; the following assembly base plate 1 is installed on the Z-axis moving assembly 11, and the Y-Z axis following assembly 2 is installed on the bottom plate 1 of the follower assembly through the hexagon socket head cap screw 3, and the X-axis follower assembly 5 is connected with the Y-Z axis follower assembly 2 through the follower assembly connecting plate (4); the Z-axis rotation assembly 6 is installed on the X-axis follower assembly 5 , the X-axis rotating assembly 7 is installed on the Z-axis rotating assembly 6; the super depth-of-field lens 9 is fixed in the hole of the super-depth-of-field lens fixed block 10, and the super-depth-of-field lens fixed block 10 is connected with the X-axis rotating assembly 7 through the microscope connecting shaft 8 .

The servo motor equipped in the X, Y, and Z-axis moving assemblies 14, 12, and 11 has a 20-bit encoder and a holding brake, so that the motor can reach nanometer-level angular displacement resolution, and the relative moving assembly has an automatic lock capability. The detection line displacement grating scale 13 is used to detect the relative displacement between the Z-axis moving assembly 11 and the Y-axis moving assembly 12, so as to realize the closed-loop control of the Y-axis displacement. The displacement detection principle of the X and Z axes is as mentioned above.

Referring to Fig. 2, the X-axis moving assembly 14 can provide precise displacement in the X-axis direction, powered by the servo motor 30, and after being decelerated by the reducer 29, it drives the ball screw 20 to output a linear displacement, and the X-axis direction is precise. The moving assembly 14 is supported and guided by the double-slider guide rails 18 on both sides, and limit switches 15 are respectively installed on both sides of the linear guide rail 18 for prompting to complete stroke control and limit protection. Described servo motor 30 is connected with speed reducer 29 by screw, and speed reducer 29 is planetary gear speed reducer, reduction ratio is 33, and precision is 3 points; Speed reducer 29 is fixed on motor base 28 by screw, and motor base 28 is fixed In the corresponding threaded hole of the X-axis bottom plate 25; the output shaft of the reducer 29 is connected to the end of the ball screw 20 through the coupling 27, and the two ends of the ball screw 20 are respectively passed through the EF screw seat 26 and the EK screw seat 19 Support, the EF screw seat 26 and the EK screw seat 19 are fixed on the X-axis bottom plate 25; the spring 23 is set on the ball screw 20, and the two ends are respectively connected with the screw nut 22 and the EF screw seat 26 by screws. The bar nut 22 is installed in the hole of the nut seat 21 and fastened by screws; two sliders 24 are installed on the linear guide rail 18 to increase the support force for the upper workbench; the linear guide rail 18 is fastened to the X-axis bottom plate by screws 25 above; the limit switch 15 is installed in the threaded hole on the limit switch seat 16, and the limit switch 15 is fixed on the limit switch seat 16 by using two front and rear nuts 17, and the limit switch seat 16 is fixed on the limit switch seat 16 by screws On the X-axis bottom plate 25.

The nut seat 21 of the X-axis moving assembly 14 is always in a stretched state during the movement, and the balls of the ball screw 20 are pretreated with zero gap, so that the screw nut 22 eliminates the gap during the reciprocating motion. The precision of the X-axis moving assembly 14 is improved. The backlash elimination method of the ball screw for the Y and Z axes is as described above.

Referring to FIG. 3 and FIG. 4 , the connection modes of the Y-axis moving assembly 12 and the Z-axis moving assembly 11 are similar to those of the X-axis moving assembly 14 . The Y-Z axis connecting plate 31 in the Z-axis moving assembly 11 is fastened and connected with the Y-axis moving assembly 12 through screws; the Z-axis bottom plate 34 is vertically connected with the Y-Z axis connecting plate 31 through screws, and the connecting plate 32 and the triangular plate 33 are respectively Connected to both ends of the Z-axis bottom plate 34 and the Y-Z axis connecting plate 31, it plays the role of connecting and supporting the Z-axis bottom plate 34 and the Y-Z axis connecting plate 31, and leaves space for the arrangement of the Z-direction transmission chain.

Referring to FIGS. 5 and 6 , the X-Y-Z three-axis following assembly is composed of a Y-Z-axis following assembly 2 and an X-axis following assembly 5 . The Y-Z axis direction following component 2 and the X-axis following component 5 are connected through the L-shaped following component connecting plate 4, so that the X-direction flexible hinge 42 and the Y-Z direction flexible hinge 35 are perpendicular to each other; the Y-Z axis direction following component 2 and the X-axis follow Components 5 can respond together to realize X-Y-Z three-axis linkage follow-up.

The Y-Z axis following assembly 2 is composed of a Y-Z flexible hinge 35 , a wedge 36 and a piezoelectric ceramic 37 . The Y-Z direction flexible hinge 35 is fixed on the bottom plate 1 of the follower assembly through three connecting screws; the Y-Z direction flexible hinge 35 is composed of two parallel four-bar linkages perpendicular to each other, and the Y-direction parallel four-bar linkage is nested in the Z To the parallel four-bar linkage mechanism; the piezoelectric effect of the piezoelectric ceramic 37 is used to provide the driving force. The Z-direction parallel four-bar linkage mechanism is composed of two connecting rods Ⅰ38 and the Y-direction parallel four-bar linkage mechanism; The link mechanism is composed of two connecting rod parts II40 and moving part I39; the wedge block 36 is used to adjust the gap between the piezoelectric ceramic 37 and the Y-Z flexible hinge 35, and can pre-press the piezoelectric ceramic 37 at the same time.

The X-direction flexible hinge 42 in the X-axis following assembly 5 is fixed on the connecting plate 4 of the following assembly through two connecting screws. The driving principle is as described above, and the X-direction flexible hinge 42 includes an X-direction parallel four-bar linkage mechanism. , The X-direction parallel four-bar linkage mechanism is composed of two connecting rod parts Ⅲ43 and the moving part Ⅱ41, which can realize the X-axis following.

Referring to Fig. 7, the multifunctional connecting plate 47 of the Z-axis rotating assembly 6 is connected with the moving part II 41 in the X-axis following assembly 5 through screws; the rotating assembly is powered by the steering gear 46, and the X-axis rotating assembly 7 is connected with The Z-axis rotating assembly 6 is connected through a U-shaped connecting plate 45, and the directions of the output shafts are perpendicular to each other; the microscope connecting shaft 8 is installed on the X-axis rotating assembly 7, and the microscope connecting shaft 8 and the super depth-of-field lens fixed block 10 are connected through the shaft hole interference , the super depth of field lens 9 is fixedly connected with the super depth of field lens fixing block 10 through the shaft hole.

The super-depth-of-field lens 9 is mounted on the top of the five-degree-of-freedom moving component, and the X, Y, and Z-axis moving components 14, 12, and 11 each have a stroke capacity of 100 mm, and the displacement accuracy is 0.1 μm, so that the super-depth-of-field lens 9 has Large range of movement; the X and Z axis rotation components 7 and 6 each have a 180° angular displacement capability, and the rotation angle accuracy is 0.18°, enabling the super depth-of-field lens 9 to observe different angles of the tested object; X, Y, Z The axis following components 5 and 2 each have an ultra-precise micro-displacement capability with a stroke of 30 μm and an accuracy of 10 nm, so that the super depth-of-field lens 9 has a good following response when it is shaken by the external environment; at the same time, the Y-Z axis following component 2 can be a super-depth-of-field lens 9 provides auxiliary zoom; the selected super depth-of-field lens 9 has a very wide magnification range, and can be replaced with lenses with 100-1000 times zoom capability, 250-2500 times zoom capability, and 500-5000 times zoom capability; the super depth-of-field lens 9 has a larger With the depth of field capability, the three-dimensional topography image of the microscopic observed test piece can be obtained.

The above descriptions are only preferred examples of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made to the present invention shall be included within the protection scope of the present invention.

Claims (10)

1. an independent five-degree-of-freedultra-precise ultra-precise material in-situ test microscopic observation platform, is characterized in that: comprise X-axis moving assembly (14), Y-axis moving assembly (12), Z axis moving assembly (11), X-axis runner assembly (7), Z axis runner assembly (6), X-Y-Z tri-axle follow assembly, super depth of field camera lens (9); Described Y-axis moving assembly (12) is installed on X-axis moving assembly (14), and Z axis moving assembly (11) is installed on Y-axis moving assembly (12); Following support plate (1) is installed on Z axis moving assembly (11), the Y-Z axle that X-Y-Z tri-axle follows assembly is followed assembly (2) and is installed on by socket head cap screw (3) and follows on support plate (1), and X-axis is followed assembly (5) and followed assembly (2) be connected by following assembly web joint (4) and Y-Z axle; Z axis runner assembly (6) is installed on X-axis and follows on assembly (5), and X-axis runner assembly (7) is installed on Z axis runner assembly (6); Super depth of field camera lens (9) is fixed in the hole of super depth of field camera lens fixed block (10), and super depth of field camera lens fixed block (10) is connected with X-axis runner assembly (7) by microscope coupling shaft (8).

2. independent five-degree-of-freedultra-precise ultra-precise material in-situ test microscopic observation platform according to claim 1, it is characterized in that: described X-axis moving assembly (14) provides accurate X-direction displacement, power is provided by servomotor (30), after speed reduction unit (29) slows down, ball-screw (20) is driven to export straight-line displacement, X-axis moving assembly (14) is by line slideway (18) support guide of the double-slider of both sides, line slideway (18) both sides are equipped with limit switch (15) respectively, for having pointed out Stroke Control and position limitation protection; Described servomotor (30) is connected with speed reduction unit (29) by screw, and speed reduction unit (29) is planetary reducer; Speed reduction unit (29) is fixed on motor cabinet (28) by screw, and motor cabinet (28) is fixed in the corresponding threaded hole of X-axis base plate (25); Speed reduction unit (29) output shaft is connected with the end of ball-screw (20) by shaft coupling (27), ball-screw (20) two ends support respectively by EF leading screw seat (26) and EK leading screw seat (19), and EF leading screw seat (26) and EK leading screw seat (19) are separately fixed on X-axis base plate (25); Spring (23) is enclosed within ball-screw (20), and two ends are connected by screw with feed screw nut (22) and EF leading screw seat (26) respectively, and feed screw nut (22) is installed in nut seat (21) hole, passes through screw fastening; Line slideway (18) is provided with two slide blocks (24), to strengthen the anchorage force to upper working table; Line slideway (18) by screw fastening on X-axis base plate (25); Limit switch (15) is installed in the threaded hole on limit switch base (16), and use former and later two nuts (17) to be fixed on limit switch base (16) by limit switch (15), limit switch base (16) is screwed on X-axis base plate (25).

3. independent five-degree-of-freedultra-precise ultra-precise material in-situ test microscopic observation platform according to claim 2, it is characterized in that: described servomotor (30) is with 20 scramblers and keep detent, enable motor reach nano level angular displacement resolution, and relative moving assembly have self-lock ability; Relative displacement between Z axis moving assembly (11) and Y-axis moving assembly (12) is detected by displacement of the lines formula grating scale (13), to realize the closed-loop control to Y-axis displacement; The displacement detecting of X, Z axis is identical with Y-axis.

4. independent five-degree-of-freedultra-precise ultra-precise material in-situ test microscopic observation platform according to claim 1, is characterized in that: the connected mode in described Y-axis moving assembly (12), Z axis moving assembly (11) is identical with X-direction moving assembly (14); Y-Z axle web joint (31) in described Z axis moving assembly (11) is connected by screw fastening with Y-axis moving assembly (12); Z axis base plate (34) is connected by screw and Y-Z axle web joint (31) are mutually vertical, web joint (32) and set square (33) are connected to Z axis base plate (34) and Y-Z axle web joint (31) two ends, play the effect connecting and support Z axis base plate (34), Y-Z axle web joint (31), and leave the space of Z-direction driving-chain layout.

5. independent five-degree-of-freedultra-precise ultra-precise material in-situ test microscopic observation platform according to claim 1, it is characterized in that: described X-Y-Z tri-axle is followed assembly and followed assembly (2) and X-axis by Y-Z axle and follow assembly (5) and form, described Y-Z direction of principal axis is followed assembly (2) and is followed assembly (5) with X-axis and be connected by following assembly web joint (4), makes X mutually vertical to flexible hinge (35) with Y-Z to flexible hinge (42); Can realize closed-loop control in conjunction with capacitive displacement transducer, Y-Z direction of principal axis is followed assembly (2) and X-axis and is followed to respond together with assembly (5) and can realize X-Y-Z three-shaft linkage and follow.

6. independent five-degree-of-freedultra-precise ultra-precise material in-situ test microscopic observation platform according to claim 5, it is characterized in that: described Y-Z axle is followed assembly (2) and is made up of to flexible hinge (35), wedge (36), piezoelectric ceramics (37) Y-Z, described Y-Z to be fixed on by three attachment screws to flexible hinge (35) and to follow on support plate (1); Y-Z is made up of to flexible hinge (35) two orthogonal parallel four-bar linkages, and Y-direction parallel four-bar linkage is nested within Z-direction parallel four-bar linkage; There is provided driving force by the piezoelectric effect of piezoelectric ceramics (37), Z-direction parallel four-bar linkage is made up of with Y-direction parallel four-bar linkage two connecting link portions I (38); Y-direction parallel four-bar linkage is made up of with mobile position I (39) two connecting link portions II (40); Wedge (36), for adjusting piezoelectric ceramics (37) and the gap of Y-Z to flexible hinge (35), can carry out precompressed to piezoelectric ceramics (37) simultaneously.

7. independent five-degree-of-freedultra-precise ultra-precise material in-situ test microscopic observation platform according to claim 5, it is characterized in that: described X-axis is followed X in assembly (5) and to be fixed on by two attachment screws to flexible hinge (42) and to follow on assembly web joint (4), X comprises an X to parallel four-bar linkage to flexible hinge (42), X is made up of with mobile position II (41) to parallel four-bar linkage two connecting link portions III (43), can realize X-axis and follow.

8. independent five-degree-of-freedultra-precise ultra-precise material in-situ test microscopic observation platform according to claim 1, it is characterized in that: nut seat (21) spring (23) in motion process of described X-axis moving assembly (14) is in extended state all the time, be aided with the ball of ball-screw (20) through zero stand-off pre-service, make feed screw nut (22) eliminate gap in to-and-fro movement, improve the precision of X-axis moving assembly (14); The ball-screw of Y, the Z axis gap method that disappears is identical with X-axis.

9. independent five-degree-of-freedultra-precise ultra-precise material in-situ test microscopic observation platform according to claim 1, is characterized in that: the mobile position II (41) that the multi-functional web joint (47) of described Z axis runner assembly (6) is followed in assembly (5) by screw and X-axis is connected; Runner assembly provides power by steering wheel (46), and X-axis runner assembly (7) is connected by U-shaped web joint (45) with Z axis runner assembly (6), and output shaft direction is mutually vertical; Microscope coupling shaft (8) is installed on X-axis runner assembly (7), and microscope coupling shaft (8) is connected by axis hole interference with super depth of field camera lens fixed block (10), and super depth of field camera lens (9) is fixedly connected with by axis hole with super depth of field camera lens fixed block (10).

10. independent five-degree-of-freedultra-precise ultra-precise material in-situ test microscopic observation platform according to claim 1, it is characterized in that: described super depth of field camera lens (9) is installed on the top of five degree of freedom moving link, X, Y, Z axis moving assembly (14,12,11) respectively has the stroke capability of 100mm, displacement accuracy is 0.1 μm, X, Z axis runner assembly (7,6) respectively have 180 ° of angular displacement abilities, corner accuracy is 0.18 °, and super depth of field camera lens (9) can be observed the different angles of test specimen; X, Y-Z axle is followed assembly (5,2) and is respectively had the ultraprecise micrometric displacement ability that stroke is 30 μm, precision is 10nm, when making super depth of field camera lens (9) be subject to external environment vibrations, has and good follows response; Y-Z axle follows assembly (2) simultaneously can provide auxiliary zoom for super depth of field camera lens (9); The super depth of field camera lens (9) of selecting has amplification range, the camera lens of replaceable 100 ~ 1000 times of zoom capabilities, 250 ~ 2500 times of zoom capabilities, 500 ~ 5000 times of zoom capabilities; Super depth of field camera lens (9) has depth of field ability, can obtain microcosmic and be observed test piece three-dimensional feature image.