CN103487341A - Self-excited vibration principle-based microstructural fatigue test device - Google Patents
Self-excited vibration principle-based microstructural fatigue test device Download PDFInfo
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Abstract
一种基于自激振动原理的微结构疲劳试验装置，包括：一个绝缘支撑基座，一个微试件，两个直流驱动电极，一个衬底，其中：绝缘支撑基座不与任何电极相连，也不接地，处于电势浮动状态；微试件的一端固定在上述绝缘支撑基座上，另一端为水平悬空状；两个直流驱动电极保持一定间距，置于微试件两侧并与微试件平行，其中一个电极接入直流正电压，另一个电极接入直流负电压；衬底上固定有所述的绝缘支撑基座和直流驱动电极。本发明结构简单，不存在夹持和对中困难的问题；无需在微试件上预制缺口或将微试件置于真空环境中，就能够提供足够大的低周疲劳试验载荷；能够以较低成本同时进行多个微试件的疲劳试验，并方便地记录载荷循环数。
A microstructure fatigue test device based on the principle of self-excited vibration, comprising: an insulating support base, a micro-specimen, two DC drive electrodes, and a substrate, wherein: the insulating support base is not connected to any electrodes, and Not grounded, in a state of potential floating; one end of the micro-specimen is fixed on the above-mentioned insulating support base, and the other end is suspended horizontally; two DC drive electrodes are kept at a certain distance, placed on both sides of the micro-specimen and connected to the micro-specimen In parallel, one of the electrodes is connected to a DC positive voltage, and the other electrode is connected to a DC negative voltage; the insulating support base and the DC driving electrode are fixed on the substrate. The invention has a simple structure and does not have the problems of clamping and centering difficulties; it can provide a sufficiently large low-cycle fatigue test load without prefabricating a gap on the micro-specimen or placing the micro-specimen in a vacuum environment; Perform fatigue tests on multiple micro-specimen at the same time at low cost, and record the number of load cycles conveniently.
Description
Technical field
The present invention relates to a kind of microstructure fatigue experimental device based on the autovibration principle, belong to nanometer technique fundamental research field.
Background technology
Micro electro mechanical device stands the severe conditions of work such as large impact, large vibration, high-temperature gradient often, and now the mechanical parts such as the micro-beam in device, mems thin film can produce excessive distortion and ess-strain, thereby may cause low-cycle fatigue failure.Therefore, at the beginning of the micro electro mechanical device design, just should consider the low-cycle fatigue problem of its mechanical part, and carry out corresponding low cycle fatigue test.Yet, microstructure small-sized, traditional large-scale fatigue experimental device can't load, fatigue experimental device and method that therefore need to be new for microstructure study.
Existing microstructure fatigue experimental device can be divided into contact and contactless two classes.Contact refers to test unit must directly contact the transmission that just can complete load with micro-test specimen, this class test unit involving vibrations platform, atomic force microscope, nano-hardness tester etc.Although the contact fatigue experimental device can provide enough large load, to guarantee the smooth enforcement of low cycle fatigue test, also exist that test unit costliness and volume are large, the problems such as the clamping of micro-test specimen and centering difficulty.For addressing the above problem, contactless fatigue experimental device arises at the historic moment, and it mainly utilizes the contactless force such as electrostatic force to load, and the test unit cost is low and volume is little, and the clamping of micro-test specimen and centering are also easily controlled.Yet, existing contactless microstructure fatigue experimental device has problems equally, and they drive parallel-plate or comb structure by static mostly, and the load of alternation is delivered on micro-test specimen, drive micro-test specimen in resonance state, so that fatigure failure occurs at micro-test specimen examination position.But due to the existence of static destabilizing effect (Pull-in effect), electrostatic force load is subject to serious restriction, therefore the amplitude of micro-test specimen under this type of test unit is large not, usually only has 1/3 of electrode separation, cause the vibration stress strain amplitude at test specimen examination position to be not enough to carry out low cycle fatigue test, be embodied as the test period of single micro-test specimen often over one day.Thereby for the vibration stress that strengthens micro-test specimen examination position, improve low-cycle fatigue damage and lower test period, current method is design breach feature on micro-test specimen, or micro-test specimen is placed in to vacuum environment is tested.Although said method can shorten test period, but take, the anti-fatigue performance of the original microstructure of change (weakening) is cost, the difference of this test condition and actual operating conditions, can affect microstructure fatigue data reliability and validity, also just can't the life-span of accurately predicting microstructure under actual operating conditions.In sum, a kind of can either the test simply and easily (not having clamping and centering problem) needed in the tired field of microstructure badly, again can warranty test the fatigue experimental device of precision (not changing microstructure original structure feature and condition of work) as a result.
Summary of the invention
The technology of the present invention is dealt with problems: overcome the deficiencies in the prior art, a kind of microstructure fatigue experimental device based on the autovibration principle is provided, it had both solved that contact test unit cost is high, the problem of clamping and centering difficulty, had improved again the problem of the loaded load deficiency of existing contactless test unit.
The technology of the present invention solution: the microstructure fatigue experimental device based on the autovibration principle specifically comprises:
An insulating supporting pedestal, this insulating supporting pedestal neither is connected with any electrode, also earth-free, in the electromotive force quick condition;
Micro-test specimen of a conduction, an end of this micro-test specimen is fixed on above-mentioned insulating supporting pedestal, and the other end is horizontal hanging shape, and micro-test specimen can keep its architectural feature original in micro electro mechanical device;
Two direct drive electrodes, be placed in micro-test specimen both sides and parallel with micro-test specimen, electrode height is a little less than the insulating supporting pedestal, and one of them direct drive electrode accesses direct-flow positive voltage, another direct drive electrode access negative DC voltage, keep certain spacing between two electrodes;
A substrate, described insulating supporting pedestal and direct drive electrode all are fixed on this substrate.
By a resistance of series connection between two direct drive electrodes, an oscillograph sum counter in parallel on resistance, realize monitoring and the record of load cycle number.
Described micro-test specimen can be the multi-form microstructures such as micro-cantilever, micro-free beam, mems thin film, xsect can be the difformity such as square, circular, oval, preparing material can be various conductive materials, as silicon, gold, aluminium, copper, marmem etc.
Described direct drive electrode is cylinder, and its xsect can be various shape, comprises rectangle, cylindrical or oval.
Described insulating supporting pedestal and backing material are multiple insulating material, comprise polyimide, silicon rubber or photoresist.
During micro-cantilever that described micro-test specimen is diameter 25-26 μ m, its length is 15-20mm.
Described direct drive electrode is that diameter is while being 3mm cylindrical, a direct drive electrode in electrode accesses positive DC voltage, and scope is 0～+ 3000V, another direct drive electrode accesses negative DC voltage, scope is 0～-3000V, the spacing kept between electrode is 8-15mm.
Described direct drive electrode is diameter while being 3mm cylindrical, and the height of its insulating supporting pedestal is 3-3.5mm.
Can, by the xsect, spacing and the direct supply output that change two electrodes, regulate the cyclic loading amplitude on micro-test specimen.
Through theoretical calculation and test research, when the length-diameter ratio (length-to-diameter) of micro-test specimen is 250-1000, when the ratio of electrode separation and micro-beam length is 0.3-0.6, the present invention can be in the situation that do not exchange the driving signal, only rely on DC voltage, drive near micro-test specimen resonance state first natural frequency all the time, the vibration amplitude of micro-test specimen can reach more than 2 times of electrode separation.From the Structural Dynamics angle, in the electrostatic field that micro-test specimen produces in the present invention, by the retroactive effect adjusting energy input of displacement state, belong to a kind of " autovibration ".
The present invention's advantage compared with prior art is:
(1) with existing contact fatigue experimental device, compare, loading structure of the present invention is simple in structure, and big or small and micro-test specimen is suitable, does not have the problem of clamping and centering difficulty.
(2) with existing contactless fatigue experimental device, compare, the present invention can make micro-test specimen in autovibration state significantly, loaded load is enough large, can meet the requirement of low cycle fatigue test, and do not need to adopt design breach feature, be placed in the method such as vacuum environment, guaranteed the precision of torture test.
(3) with existing contactless fatigue experimental device, compare, the present invention has greatly simplified load cycle monitoring and pen recorder.Existing contactless test unit is to carry out the indirect monitoring load cycle by surveying capacitance variations faint between micro-test specimen and electrode (output signal).Due to output signal with drive the AC signal that signal is same frequency, and output signal is very faint, often runs into a difficult problem that drives signal and the bad differentiation of output signal.And driving signal of the present invention is direct current, can produce and disturb alternating current output signal.In circuit between two direct drive electrodes, a resistance of series connection, can obtain signal output waveform, and record the load cycle number.
(4) the present invention can carry out the torture test of a plurality of test specimens at lower cost simultaneously.Existing fatigue experimental device often adopts the interchange type of drive, and by frequency detecting and feedback circuit, micro-test specimen is maintained to resonance state, if will carry out the torture test of N test specimen simultaneously, just must be equipped with the N cover and exchange driving and frequency detecting and feedback circuit.And the direct drive mode that the present invention adopts, microstructure is in the autovibration state, therefore be easy to N test unit is connected in parallel under a direct supply and tested, removed above-mentioned N cover from and exchanged driving and frequency detecting and feedback circuit, can save to greatest extent experimentation cost.
The accompanying drawing explanation
Fig. 1 is structure vertical view of the present invention;
Fig. 2 is structure right view of the present invention;
Fig. 3 is bulk testing system schematic of the present invention (comprises and drive and the cycle index device);
Fig. 4 is pulse output test data plot of the present invention;
Fig. 5 is torture test scheme schematic diagram of the present invention;
Fig. 6 is that the present invention carries out the schematic diagram of a plurality of micro-test specimen torture tests simultaneously.
Embodiment
As shown in Figure 1, 2, the invention provides a kind of microstructure fatigue experimental device based on the autovibration principle, comprise: in an insulating supporting pedestal 1(the present embodiment, be rectangular parallelepiped, the wide * height of long * is 6mm*3mm*3.3mm), this insulating supporting pedestal is not connected with any electrode, also earth-free, in the electromotive force quick condition; In micro-test specimen 2(the present embodiment of a conduction, be right cylinder, long 15-20mm, diameter 20-60 μ m), an end of this micro-test specimen 2 is fixed on above-mentioned insulating supporting pedestal 1, and the other end is horizontal hanging shape; In two direct drive electrode 3(the present embodiment, it is right cylinder, diameter is 3mm, long is 20mm), two electrodes 3 are parallel with micro-test specimen, and keep a determining deviation (8-10mm), one of them electrode accesses positive DC voltage (0～+ 3000V), and another electrode accesses negative DC voltage (0～-3000V); Long * of substrate 4(is wide is 30mm*30mm), above-mentioned an insulating supporting pedestal 1 and two direct drive electrodes 3 all are fixed on this substrate 4.
Principle of work of the present invention is based on the chattering of micro-test specimen in electrostatic field, is specially: two direct drive electrodes 3 are connected with negative pole with the positive pole of direct supply respectively, now between two electrodes 3, can produce a stable electrostatic field; In this electrostatic field, micro-test specimen 2 is subject to electrostatic force because of the electrostatic induction effect, and electrostatic force overcomes elastic-restoring force and makes micro-test specimen produce horizontal-shift; When DC voltage further increases, electrostatic force and horizontal-shift also increase thereupon, until elastic-restoring force be can't keep balance with electrostatic force the time, unstable phenomenon (pull-in) will occur micro-test specimen 2, and contact with the upper surface of direct drive electrode 3; Because micro-test specimen 2 is fixed on insulating supporting pedestal 1, both with any electrode, be not connected and there is no ground connection yet, in the electromotive force quick condition, therefore micro-test specimen 2 does not cause short circuit with contacting of direct drive electrode 3; What with above-mentioned contact process, carry out is that the charging and discharging process of 3 pairs of micro-test specimens 2 of direct drive electrode (makes the electromotive force of the electromotive force of micro-test specimen 2 and electrode 3 identical simultaneously, if contact is positive electrode, it is charging process, if contact is negative electrode, discharge process), because the electric capacity of micro-test specimen 2 is very little, this charge and discharge process can complete moment; Contact and discharged and recharged after, due to the opposite sex principle of repelling each other, the suffered electrostatic force of micro-test specimen 2 is reverse, electrostatic force and restoring force are common drives micro-test specimen 2 to moving, until come in contact and discharged and recharged with another direct drive electrode 3 in the other direction; So repeatedly, contacting and charge and discharge process of above-mentioned micro-test specimen 2 and direct drive electrode 3, just can make micro-test specimen 2 form a kind of stable resonance motion.
In the present invention, the height of micro-test specimen 2 place insulating supporting pedestals 1 is a little more than electrode 3, micro-like this test specimen 2 is in the contact process with electrode 3, will slip over from the surface of electrode 3 and move forward, and can not stopped by electrode 3 then reverse immediately, therefore vibration amplitude can reach more than 2 times of electrode separation, is enough to meet the demand of low cycle fatigue test.
Fig. 3 is bulk testing system schematic of the present invention (comprising direct drive and load cycle pen recorder).Wherein, 5 is direct supply, and 6 is resistance, and 7 is oscillograph, and 8 is counter.As described above, micro-test specimen 2 is two interelectrode contact processes back and forth of direct drive, it is also the charge and discharge process of micro-test specimen 2 own, figuratively: when micro-test specimen contacts with negative electrode, can absorb a certain amount of electronics, while then moving to positive electrode, can discharge these electronics, thereby formed a series of pulse signal between two electrodes.Therefore this pulse signal can characterize the vibration processes of micro-test specimen and the load cycle process of torture test.By a resistance 6 of series connection between electrode, and on resistance 6 oscillograph 7 sum counters 8 in parallel, can monitor above-mentioned pulse signal, and realize the record of load cycle, as shown in Figure 4.
Fig. 5 has set forth torture test scheme of the present invention.At first, after the DC voltage of direct supply 5 outputs is applied to two electrodes 3 of the present invention, micro-test specimen 2 is in the autovibration state, and counter starts to record the load cycle number; Utilize microscope 9 and high-speed CCD 10, can obtain true vibration frequency and the vibration amplitude of micro-test specimen 2, true vibration frequency wherein can be used for the calibration of counter, and true vibration amplitude can be converted into by finite element software the vibration stress strain amplitude at micro-test specimen 2 examination positions; After micro-test specimen generation fatigure failure (micro-test specimen of this example even within a few minutes, fatigue break will occur at several hours usually), autovibration will stop, counter also stops counting automatically, and load cycle number now is exactly the test life of micro-test specimen under this vibration stress level; Then change a new micro-test specimen, and adjust the output of direct supply, can carry out the torture test under another vibration stress strain level to new test specimen with said method.
In order further to save test period, N above-mentioned test unit can be connected in parallel under same direct supply, and, at an other resistance 6 sum counters 8 that arrange of each test unit, N micro-test specimen be carried out to torture test, as shown in Figure 6 simultaneously.Each test unit and supporting resistance thereof on branch road separately, therefore for the autovibration state of each micro-test specimen 2, pulse signal that vibration is brought out and the registration of counter 8, all can the phase mutual interference,
Microstructure fatigue experimental device based on the autovibration principle of the present invention, wherein micro-test specimen 2 can be the multi-form microstructures such as micro-cantilever, micro-free beam, mems thin film, xsect can be the difformity such as square, circular, oval, preparing material can be various conductive materials, as silicon, gold, aluminium, copper, marmem etc.; Direct drive electrode 3 cylinders, its xsect can be various shape, comprises rectangle, cylindrical or oval; The material for preparing of insulating supporting pedestal 1 and substrate 4 can be multiple insulating material, comprises polyimide, silicon rubber or photoresist.
Microstructure fatigue experimental device based on the autovibration principle of the present invention, can, by changing the methods such as xsect, spacing and direct supply output of two electrodes 3, regulate the cyclic loading amplitude on micro-test specimen 2.
In a word, the present invention is simple in structure, and charger and micro-test specimen sizableness do not exist clamping and the problem of centering difficulty; Can be at gap not, be not interposing under the condition of vacuum and carry out low cycle fatigue test for micro-test specimen provides enough large test load; Can carry out at lower cost the torture test of a plurality of micro-test specimens simultaneously, and record easily the load cycle number.
The present invention shows to elaborate and belongs to techniques well known.
The above; it is only embodiments of the invention; not the present invention is done to any pro forma restriction; every any simple modification, equivalent variations and modification of above examples of implementation being done according to the principle of the invention and technical spirit; within all still belonging to the technical solution of the present invention scope, so protection scope of the present invention is when being as the criterion with claims.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104865141A (en) * | 2015-05-07 | 2015-08-26 | 北京航空航天大学 | Surface strength testing apparatus |
| CN108254251A (en) * | 2018-01-10 | 2018-07-06 | 北京航空航天大学 | A kind of controllable carbon fiber symmetric curvature high-cycle fatigue test device of atmosphere |
| CN109617435A (en) * | 2019-01-28 | 2019-04-12 | 北京航空航天大学 | A kind of electric energy conversion circuit and conversion method based on mechanical vibration |
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| JP3595849B1 (en) * | 2003-06-30 | 2004-12-02 | 関西ティー・エル・オー株式会社 | Fatigue test equipment for micro / nano materials |
| CN2878348Y (en) * | 2005-12-16 | 2007-03-14 | 北京工业大学 | Microstructure single direction bending pulling fatigue experimental device |
| CN103338021A (en) * | 2013-07-04 | 2013-10-02 | 北京航空航天大学 | Micro electromechanical resonator based on structural self-excited vibration principle |
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| JP3595849B1 (en) * | 2003-06-30 | 2004-12-02 | 関西ティー・エル・オー株式会社 | Fatigue test equipment for micro / nano materials |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104865141A (en) * | 2015-05-07 | 2015-08-26 | 北京航空航天大学 | Surface strength testing apparatus |
| CN104865141B (en) * | 2015-05-07 | 2017-06-23 | 北京航空航天大学 | A kind of surface strength test device |
| CN108254251A (en) * | 2018-01-10 | 2018-07-06 | 北京航空航天大学 | A kind of controllable carbon fiber symmetric curvature high-cycle fatigue test device of atmosphere |
| CN109617435A (en) * | 2019-01-28 | 2019-04-12 | 北京航空航天大学 | A kind of electric energy conversion circuit and conversion method based on mechanical vibration |
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