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CN103454283A - Line detection system and method - Google Patents

Line detection system and method Download PDF

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Publication number
CN103454283A
CN103454283A CN2013104167199A CN201310416719A CN103454283A CN 103454283 A CN103454283 A CN 103454283A CN 2013104167199 A CN2013104167199 A CN 2013104167199A CN 201310416719 A CN201310416719 A CN 201310416719A CN 103454283 A CN103454283 A CN 103454283A
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axis
image
image acquisition
line detection
detection system
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刘霖
赵津
刘平
刘娟秀
杨先明
谭良
陈镇龙
罗颖
宋昀岑
代君
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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Abstract

The invention discloses a line detection system and method. The line detection system comprises an image acquisition system and a motion control system which is used for adjusting the position of a detected object and focusing the image acquisition system, wherein the motion control system comprises a z-axis stepping motor, a z-axis screw rod and a z-axis objective table; the z-axis screw rod is driven to rotate through the z-axis stepping motor; the z-axis objective table is connected with the z-axis screw rod; the z-axis objective table is used for bearing the image acquisition system; an x-axis screw rod is driven to rotate through an x-axis stepping motor; an x-axis objective table is connected with the x-axis screw rod and is used for bearing the object to be detected. According to the line detection system and method, the scheme of automatically detecting the appearance and characteristics of a ceramic substrate at a high speed and high precision can be achieved, the human cost of enterprises is saved, and the detection efficiency and precision are improved.

Description

线路检测系统及其方法Line detection system and method

技术领域technical field

本发明涉及对检测物体外形、尺寸的技术领域,根据本发明的一个实施例,具体涉及一种用于陶瓷基片的线路检测系统及其方法。The present invention relates to the technical field of detecting the shape and size of objects. According to an embodiment of the present invention, it specifically relates to a circuit detection system and method for ceramic substrates.

背景技术Background technique

陶瓷基片材料在电子陶瓷中占有最重要位置的是绝缘体,特别是高度集成电路用绝缘体或封装材料,随着电子工业的不断发展,对陶瓷基片的加工精度和工艺都有了很大的提高,但是现阶段陶瓷基片的检测仍然以人工检测为主,通过使用千分尺、放大镜等工具来检测基片的外形和尺寸,严重降低了生产速度。现阶段的检测手段主要面临的问题有以下几点:Ceramic substrate materials occupy the most important position in electronic ceramics, especially insulators or packaging materials for highly integrated circuits. With the continuous development of the electronics industry, the processing accuracy and technology of ceramic substrates have greatly improved. However, at this stage, the detection of ceramic substrates is still dominated by manual detection. The shape and size of the substrates are detected by using tools such as micrometers and magnifying glasses, which seriously reduces the production speed. The main problems faced by the current detection methods are as follows:

1、检测速度慢。对于每一个基片都要通过人工使用千分尺或者放大镜来检测,手工检测的速度相当低下,并且对精度要求比较高、孔径比较小的圆或者其他图形,使用千分尺没办法检测。1. The detection speed is slow. For each substrate, it must be detected manually using a micrometer or a magnifying glass. The speed of manual detection is quite low, and for circles or other graphics with high precision requirements and small apertures, it is impossible to use a micrometer to detect them.

2、对特殊图形没有办法进行检测。对于基片上面印刷的复杂几何图形,使用千分尺的办法是不可行的,如果使用带有刻度的放大镜,则又会导致检测的速度慢,精度底,因为对于同一个基片,不同的人来检测可能都会得到不同的结果。2. There is no way to detect special graphics. For complex geometric figures printed on the substrate, it is not feasible to use a micrometer. If a magnifying glass with a scale is used, the detection speed will be slow and the accuracy will be low, because for the same substrate, different people will Tests may all yield different results.

3、人工检测不方便进行统计过程控制。3. Manual detection is inconvenient for statistical process control.

发明内容Contents of the invention

本发明克服了现有技术的不足,提供一种检测成本低,且具有效率、精度高的线路检测系统;The present invention overcomes the deficiencies of the prior art, and provides a line detection system with low detection cost, high efficiency and high precision;

以及实现线路检测系统的方法。And the method for realizing the line detection system.

考虑到现有技术的上述问题,根据本发明公开的一个方面,本发明采用以下技术方案:Considering the above-mentioned problems of the prior art, according to one aspect disclosed by the present invention, the present invention adopts the following technical solutions:

一种线路检测系统,包括:A line detection system, comprising:

图像采集系统,用于被检测物的成像、以及采集所成的图像;An image acquisition system, used for imaging of the detected object and the acquired image;

运动控制系统,用于调节被检测物位置以及图像采集系统的对焦;该运动控制系统包括:The motion control system is used to adjust the position of the detected object and the focus of the image acquisition system; the motion control system includes:

z轴步进电机;z-axis stepper motor;

z轴丝杆,所述z轴丝杆由z轴步进电机驱动旋转;A z-axis screw rod, the z-axis screw rod is driven to rotate by a z-axis stepping motor;

z轴载物台,该z轴载物台与所述z轴丝杆连接,z轴载物台用于承载图像采集系统;A z-axis stage, the z-axis stage is connected to the z-axis screw, and the z-axis stage is used to carry the image acquisition system;

x轴伺服电机;x-axis servo motor;

x轴丝杆,所述x轴丝杆由x轴步进电机驱动旋转;An x-axis screw rod, the x-axis screw rod is driven to rotate by an x-axis stepping motor;

x轴载物台,该x轴载物台与所述x轴丝杆连接,x轴载物台用于承载被检测物体。An x-axis stage, the x-axis stage is connected to the x-axis screw, and the x-axis stage is used to carry the object to be detected.

为了更好地实现本发明,进一步的技术方案是:In order to realize the present invention better, further technical scheme is:

根据本发明的一个实施方案,所述图像采集系统包括:According to one embodiment of the present invention, the image acquisition system includes:

光源,用于对被检测物进行打光,使被检测物的轮廓和线路清晰;以及用于成像的The light source is used to illuminate the object to be detected, so that the outline and lines of the object to be detected are clear;

光学镜头和相机;Optical lenses and cameras;

图像采集卡,用于图像采集。Image acquisition card for image acquisition.

根据本发明的一个实施方案,所述光学镜头和相机之间设置有调焦筒。According to one embodiment of the present invention, a focusing barrel is arranged between the optical lens and the camera.

根据本发明的一个实施方案,所述图像采集系统还包括:According to one embodiment of the present invention, the image acquisition system also includes:

接收模块,用于接收相机帧数据;A receiving module, configured to receive camera frame data;

拼图模块,用于将采集到的多幅目标图像合并为一张完整的图片;A jigsaw module for merging multiple target images collected into a complete picture;

发送模块,用于发送图像。The sending module is used to send images.

根据本发明的一个实施方案,还包括图像分析系统,该图像分析系统包括:According to an embodiment of the present invention, also comprise image analysis system, this image analysis system comprises:

图像预处理模块,用于对所采集的图像进行分析,以判断所采集的图像是否有效;An image preprocessing module is used to analyze the collected images to determine whether the collected images are valid;

阈值处理模块,对局部图像进行基于局部直方图的动态阈值处理;因为陶瓷基片的整体印刷情况不一,所以需要对不同的位置采用不同的阈值,以提高轮廓提取的精度;The threshold processing module performs dynamic threshold processing based on local histograms on local images; because the overall printing conditions of ceramic substrates are different, different thresholds need to be used for different positions to improve the accuracy of contour extraction;

轮廓提取模块,用于提取图像轮廓;Contour extraction module, is used for extracting image contour;

轮廓匹配模块,用于将提取的图像轮廓与预先设定好的标准文档进行配准;Contour matching module, used for registering the extracted image contour with the preset standard document;

检测缺陷模块,用于提取的图像轮廓与配准的标准文档进行对照分析,以得出图像参数的缺陷。The defect detection module is used to compare and analyze the extracted image outline with the registered standard document to obtain the defect of image parameters.

本发明还可以是:The present invention can also be:

一种实现如上所述线路检测系统的方法,包括:A method for implementing the above-mentioned line detection system, comprising:

通过z轴步进电机驱动z轴丝杆旋转;Drive the z-axis screw to rotate through the z-axis stepping motor;

z轴丝杆的旋转带动z轴载物台以及与该z轴载物台连接的图像采集系统上下移动;The rotation of the z-axis screw drives the z-axis stage and the image acquisition system connected to the z-axis stage to move up and down;

通过x轴步进电机驱动x轴丝杆旋转;Drive the x-axis screw to rotate through the x-axis stepping motor;

x轴丝杆的旋转带动x轴载物台以及与该x轴载物台连接的被检测物在水平方向移动;The rotation of the x-axis screw drives the x-axis stage and the detected object connected to the x-axis stage to move in the horizontal direction;

通过所述z轴载物台、x轴载物台各自的运动以调节被检测物位置以及图像采集系统的对焦;adjusting the position of the detected object and the focus of the image acquisition system through the respective movements of the z-axis stage and the x-axis stage;

对焦后,通过图像采集系统对被检测物进行成像、以及采集。After focusing, the detected object is imaged and collected by the image acquisition system.

根据本发明的一个实施方案,所述图像采集系统中:According to one embodiment of the present invention, in the image acquisition system:

用光源对被检测物进行打光,使被检测物的轮廓和线路清晰;以及Use a light source to illuminate the detected object to make the outline and lines of the detected object clear; and

用光学镜头和相机对被检测物成像;Image the detected object with optical lens and camera;

用图像采集卡进行图像采集。Image acquisition was performed with a frame grabber.

根据本发明的一个实施方案,所述被检测物运动方向和相机的拍摄方向垂直,并且被检测物的运动速度和相机采集行频相匹配。According to an embodiment of the present invention, the moving direction of the object to be detected is perpendicular to the shooting direction of the camera, and the moving speed of the object to be detected matches the acquisition line frequency of the camera.

根据本发明的一个实施方案,包括:According to one embodiment of the present invention, comprising:

接收相机帧数据;Receive camera frame data;

在未接收到相机帧数据的情况下,继续接收相机帧数据;Continue to receive camera frame data without receiving camera frame data;

在接收到收相机帧数据后,结束采集,并进行拼图;After receiving the receiver frame data, end the collection and make a puzzle;

将拼图后的图像进行发送。Send the collaged images.

根据本发明的一个实施方案,包括:According to one embodiment of the present invention, comprising:

对所采集的图像进行分析,以判断所采集的图像是否有效;Analyze the collected images to determine whether the collected images are valid;

阈值处理;Thresholding;

提取图像轮廓;Extract image contours;

将提取的图像轮廓与预先设定好的标准文档进行配准;Register the extracted image outline with the preset standard document;

对提取的图像轮廓与配准的标准文档进行对照分析,以得出图像参数的缺陷。The extracted image contours are compared with the registered standard documents to find out the defects of the image parameters.

与现有技术相比,本发明的有益效果之一是:Compared with the prior art, one of the beneficial effects of the present invention is:

本发明的线路检测系统及其方法,可实现对陶瓷基片外形、特征进行高速高精度自动检测功能的方案,节约了企业人力成本,提高了检测效率与精度。The line detection system and method thereof of the present invention can realize a high-speed and high-precision automatic detection function scheme for the shape and characteristics of the ceramic substrate, save the labor cost of the enterprise, and improve the detection efficiency and precision.

附图说明Description of drawings

为了更清楚的说明本申请文件实施例或现有技术中的技术方案,下面将对实施例或现有技术的描述中所需要使用的附图作简单的介绍,显而易见地,下面描述中的附图仅是对本申请文件中一些实施例的参考,对于本领域技术人员来讲,在不付出创造性劳动的情况下,还可以根据这些附图得到其它的附图。In order to more clearly illustrate the technical solutions in the embodiment of the present application document or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiment or the prior art. Apparently, the accompanying drawings in the following description The drawings are only references to some embodiments in the present application documents, and those skilled in the art can also obtain other drawings based on these drawings without creative efforts.

图1为根据本发明一个实施例的线路检测系统的结构示意图;FIG. 1 is a schematic structural diagram of a line detection system according to an embodiment of the present invention;

图2为根据本发明一个实施例的线路检测系统的俯视示意图;2 is a schematic top view of a line detection system according to an embodiment of the present invention;

图3为根据本发明一个实施例的线路检测系统的实现方法框图;3 is a block diagram of an implementation method of a line detection system according to an embodiment of the present invention;

图4为根据本发明一个实施例的线路检测系统的实现方法框图。Fig. 4 is a block diagram of an implementation method of a line detection system according to an embodiment of the present invention.

具体实施方式Detailed ways

下面结合实施例对本发明作进一步地详细说明,但本发明的实施方式不限于此。The present invention will be further described in detail below in conjunction with examples, but the embodiments of the present invention are not limited thereto.

如图1所示,图1为根据本发明一个实施例的线路检测系统的结构示意图,一种线路检测系统,包括图像采集系统10、运动控制系统20;图像采集系统10用于被检测物的成像、以及采集所成的图像。所述图像采集系统10包括光源11、光学镜头12、相机13、图像采集卡(图1未示出);光源11用于对被检测物进行打光,使被检测物的轮廓和线路清晰;光学镜头12和相机13用于成像;图像采集卡用于图像采集。光学镜头12和相机13之间可设置有调焦筒14,以便于调焦,即光学镜头12与调焦筒14一端连接,调焦筒14另一端再与相机13连接,图像采集卡可位于相机13内部。调焦筒14竖直安装,以及与之连接的光学镜头12、相机13在拍摄图像时,其在竖直方向移动,与被检测物垂直;光源11可以是组合光源,通过组和光源的调节,以得到最理想的图像数据。相机13可以是线阵CCD相机。As shown in FIG. 1, FIG. 1 is a schematic structural diagram of a line detection system according to an embodiment of the present invention. A line detection system includes an image acquisition system 10 and a motion control system 20; the image acquisition system 10 is used for detecting objects Imaging, and capturing the resulting image. The image acquisition system 10 includes a light source 11, an optical lens 12, a camera 13, and an image acquisition card (not shown in FIG. 1); the light source 11 is used to illuminate the detected object, so that the outline and lines of the detected object are clear; The optical lens 12 and the camera 13 are used for imaging; the image acquisition card is used for image acquisition. A focusing tube 14 can be arranged between the optical lens 12 and the camera 13, so as to facilitate focusing, that is, the optical lens 12 is connected with one end of the focusing tube 14, and the other end of the focusing tube 14 is connected with the camera 13, and the image acquisition card can be located at Camera 13 interior. The focusing cylinder 14 is vertically installed, and when the optical lens 12 and the camera 13 connected thereto are used to take pictures, it moves in the vertical direction and is perpendicular to the object to be detected; the light source 11 can be a combined light source, through the adjustment of the group and light source , to get the ideal image data. The camera 13 may be a line scan CCD camera.

运动控制系统20用于调节被检测物位置以及图像采集系统的对焦;该运动控制系统20包括:The motion control system 20 is used to adjust the focus of the detected object position and the image acquisition system; the motion control system 20 includes:

z轴步进电机21;z-axis stepping motor 21;

z轴丝杆22,所述z轴丝杆22由z轴步进电机21驱动旋转;A z-axis screw rod 22, the z-axis screw rod 22 is driven to rotate by a z-axis stepping motor 21;

z轴载物台23,该z轴载物台23与所述z轴丝杆22连接,z轴载物台23用于承载图像采集系统10;A z-axis stage 23, the z-axis stage 23 is connected to the z-axis screw 22, and the z-axis stage 23 is used to carry the image acquisition system 10;

x轴伺服电机24,如图2所示,图2为根据本发明一个实施例的线路检测系统的俯视示意图;The x-axis servo motor 24, as shown in Figure 2, is a schematic top view of a line detection system according to an embodiment of the present invention;

x轴丝杆(图中未示出),所述x轴丝杆由x轴步进电机24驱动旋转;x-axis screw (not shown in the figure), the x-axis screw is driven by the x-axis stepping motor 24 to rotate;

继续如图1所示,x轴载物台25,该x轴载物台25与所述x轴丝杆连接,x轴载物台25用于承载被检测物体。Continue as shown in FIG. 1 , the x-axis stage 25 is connected with the x-axis screw, and the x-axis stage 25 is used to carry the detected object.

图像采集系统10还可包括:The image acquisition system 10 may also include:

接收模块,用于接收相机帧数据;A receiving module, configured to receive camera frame data;

拼图模块,用于将采集到的多幅目标图像合并为一张完整的图片;A jigsaw module for merging multiple target images collected into a complete picture;

发送模块,用于发送图像。The sending module is used to send images.

与图像采集系统10连接的还有图像分析系统,该图像分析系统包括:Also connected with the image acquisition system 10 is an image analysis system, which includes:

图像预处理模块,用于对所采集的图像进行分析,以判断所采集的图像是否有效;An image preprocessing module is used to analyze the collected images to determine whether the collected images are valid;

阈值处理模块,用于对局部图像进行动态阈值处理,以提高轮廓提取的精度;The threshold processing module is used to perform dynamic threshold processing on the local image to improve the accuracy of contour extraction;

轮廓提取模块,用于提取图像轮廓;Contour extraction module, is used for extracting image contour;

轮廓匹配模块,用于将提取的图像轮廓与预先设定好的标准文档进行配准;Contour matching module, used for registering the extracted image contour with the preset standard document;

检测缺陷模块,用于提取的图像轮廓与配准的标准文档进行对照分析,以得出图像参数的缺陷。The defect detection module is used to compare and analyze the extracted image outline with the registered standard document to obtain the defect of image parameters.

一种实现线路检测系统的方法,包括:A method for implementing a line detection system, comprising:

通过z轴步进电机21驱动z轴丝杆22旋转;Drive the z-axis screw rod 22 to rotate through the z-axis stepping motor 21;

z轴丝杆22的旋转带动z轴载物台23以及与该z轴载物台23连接的图像采集系统10上下移动;The rotation of the z-axis screw 22 drives the z-axis stage 23 and the image acquisition system 10 connected to the z-axis stage 23 to move up and down;

通过x轴步进电机24驱动x轴丝杆旋转;The x-axis screw rod is driven to rotate by the x-axis stepping motor 24;

x轴丝杆的旋转带动x轴载物台25以及与该x轴载物台25连接的被检测物在水平方向移动;The rotation of the x-axis screw drives the x-axis stage 25 and the detected object connected to the x-axis stage 25 to move in the horizontal direction;

通过所述z轴载物台23、x轴载物台25各自的运动以调节被检测物位置以及图像采集系统10的对焦;Adjust the position of the detected object and the focus of the image acquisition system 10 through the respective movements of the z-axis stage 23 and the x-axis stage 25;

对焦后,通过图像采集系统10对被检测物进行成像、以及采集图像。After focusing, the object to be detected is imaged and the image is collected by the image acquisition system 10 .

所述图像采集系统10中:In the image acquisition system 10:

用光源11对被检测物进行打光,使被检测物的轮廓和线路清晰;以及Lighting the detected object with light source 11 to make the outline and lines of the detected object clear; and

用光学镜头12和相机13对被检测物成像;Imaging the detected object with optical lens 12 and camera 13;

用图像采集卡进行图像采集。Image acquisition was performed with a frame grabber.

所述被检测物运动方向和相机13的拍摄方向垂直,并且被检测物的运动速度和相机采集行频相匹配。The moving direction of the detected object is perpendicular to the shooting direction of the camera 13 , and the moving speed of the detected object matches the acquisition line frequency of the camera.

如图3所示,图3为根据本发明一个实施例的线路检测系统的实现方法框图,线路检测系统的实现方法中包括:As shown in FIG. 3, FIG. 3 is a block diagram of an implementation method of a line detection system according to an embodiment of the present invention, and the implementation method of the line detection system includes:

采集系统的初始化S31;Initialization of the acquisition system S31;

触发运动采集系统S32;Trigger motion acquisition system S32;

接收相机帧数据S33;Receive camera frame data S33;

在未接收到相机帧数据的情况下,返回接收相机帧数据S33;If the camera frame data is not received, return to receive camera frame data S33;

在接收到收相机帧数据后,结束采集,并进行拼图S34;After receiving the receiver frame data, end the collection and perform puzzle S34;

将拼图后的图像进行发送S35。Sending the collaged image S35.

如图4所示,图4为根据本发明一个实施例的线路检测系统的实现方法框图,包括:As shown in FIG. 4, FIG. 4 is a block diagram of an implementation method of a line detection system according to an embodiment of the present invention, including:

图像分析系统初始化S41;Image analysis system initialization S41;

等待图像采集完成S42;Wait for the image acquisition to complete S42;

对所采集的图像进行分析,以判断所采集的图像是否有效,在图像无效的情况下,返回S42,在图像有效的情况下,进入下一步骤;The collected image is analyzed to determine whether the collected image is valid, and if the image is invalid, return to S42, and if the image is valid, enter the next step;

阈值处理S43;Threshold processing S43;

提取图像轮廓S44;Extract image contour S44;

将提取的图像轮廓与预先设定好的标准文档进行配准S45;Registering the extracted image outline with a preset standard document S45;

对提取的图像轮廓与配准的标准文档进行对照分析,以得出图像参数的缺陷S46。Perform comparative analysis on the extracted image profile and the registered standard document to obtain the defect S46 of the image parameter.

综上所述,运动控制系统20主要用于把陶瓷基片移动到相机13视场成像和控制相机13对焦。设备可包括以下几个部分:运动控制卡、伺服驱动器、伺服电机以及高精度螺杆。为了保证陶瓷基片成像不变形,必须保证陶瓷基片的运动方向和线阵相机CCD垂直,并且运动速度和线阵相机采集行频相匹配,因此可采用了运动精度高的伺服电机和驱动器,并且使用螺距比较小,精度高的螺杆,以提高运动控制精度。运动控制系统20通过一个载物台将基片运动到相机13视场,载物台由一个连接到伺服电机的螺杆来带动,保证基片运动的精度。To sum up, the motion control system 20 is mainly used to move the ceramic substrate to the field of view of the camera 13 for imaging and control the camera 13 to focus. The equipment can include the following parts: motion control card, servo driver, servo motor and high-precision screw. In order to ensure that the imaging of the ceramic substrate is not deformed, it is necessary to ensure that the motion direction of the ceramic substrate is perpendicular to the CCD of the line scan camera, and the motion speed matches the acquisition line frequency of the line scan camera. Therefore, a servo motor and driver with high motion accuracy can be used. And use a screw with a relatively small pitch and high precision to improve the precision of motion control. The motion control system 20 moves the substrate to the field of view of the camera 13 through a stage, and the stage is driven by a screw connected to a servo motor to ensure the precision of the movement of the substrate.

图像采集系统10主要用于对陶瓷基片成象,通过打光使得陶瓷基片的轮廓及基片的线路的边缘清晰,并把图像数据传输到图像分析系统。该设备主要包含组和光源、光学镜头12、ccd线阵相机、图像采集卡几个部分。其中组合光源用于对运动系统带过来的基片进行打光,使基片的轮廓和线路清晰,相机对陶瓷基片成像,并把图像数据通过CAMLINK线传输到图像采集卡。为了保证相机成像不变形,相机13的固定装置需要能够上下移动对焦、在水平面上左右旋转CCD保证运动方向和CCD垂直,绕运动方向旋转CCD保证CCD每一个感光元到陶瓷基片的距离相等,绕运动方向的垂线旋转,改变相机13视场位置,配合组和光源的调节,得到最理想的图像数据。The image acquisition system 10 is mainly used for imaging the ceramic substrate, making the outline of the ceramic substrate and the edge of the circuit of the substrate clear by lighting, and transmitting the image data to the image analysis system. The device mainly includes a group and a light source, an optical lens 12, a ccd line scan camera, and an image acquisition card. The combined light source is used to illuminate the substrate brought by the motion system to make the outline and lines of the substrate clear. The camera images the ceramic substrate and transmits the image data to the image acquisition card through the CAMLINK line. In order to ensure that the camera image is not deformed, the fixing device of the camera 13 needs to be able to move the focus up and down, rotate the CCD left and right on the horizontal plane to ensure that the direction of motion is perpendicular to the CCD, and rotate the CCD around the direction of motion to ensure that the distance between each photosensitive element of the CCD and the ceramic substrate is equal. Rotate around the vertical line of the moving direction, change the field of view position of the camera 13, cooperate with the adjustment of the group and the light source, and obtain the most ideal image data.

图像分析系统主要用于对成像系统采集到的图像数据进行处理分析,并根据用户事先设定好的标准文档进行配准、对照,得到陶瓷基片上的各种需要检测的参数和缺陷,并对检测结果进行统计、分析和存储,根据历史存储信息还可进行统计过程分析,以方便厂家分析、调整生产线,使整个生产线达到最优。The image analysis system is mainly used to process and analyze the image data collected by the imaging system, and to register and compare according to the standard documents set by the user in advance, to obtain various parameters and defects on the ceramic substrate that need to be detected, and to The test results are counted, analyzed and stored, and the statistical process analysis can also be carried out according to the historical storage information, so as to facilitate the manufacturer to analyze and adjust the production line, so that the entire production line can be optimized.

本说明书中各个实施例采用递进的方式描述,每个实施例重点说明的都是与其它实施例的不同之处,各个实施例之间相同相似部分相互参见即可。Each embodiment in this specification is described in a progressive manner, each embodiment focuses on the difference from other embodiments, and the same and similar parts of each embodiment can be referred to each other.

在本说明书中所谈到的“一个实施例”、“另一个实施例”、“实施例”、等,指的是结合该实施例描述的具体特征、结构或者特点包括在本申请概括性描述的至少一个实施例中。在说明书中多个地方出现同种表述不是一定指的是同一个实施例。进一步来说,结合任一实施例描述一个具体特征、结构或者特点时,所要主张的是结合其他实施例来实现这种特征、结构或者特点也落在本发明的范围内。References in this specification to "one embodiment", "another embodiment", "embodiment", etc. refer to the specific features, structures or characteristics described in conjunction with the embodiment included in the general description of this application. In at least one embodiment of . The appearance of the same expression in multiple places in the specification does not necessarily refer to the same embodiment. Furthermore, when a specific feature, structure or characteristic is described in combination with any embodiment, it is claimed that implementing such feature, structure or characteristic in combination with other embodiments also falls within the scope of the present invention.

尽管这里参照本发明的多个解释性实施例对本发明进行了描述,但是,应该理解,本领域技术人员可以设计出很多其他的修改和实施方式,这些修改和实施方式将落在本申请公开的原则范围和精神之内。更具体地说,在本申请公开、附图和权利要求的范围内,可以对主题组合布局的组成部件和/或布局进行多种变型和改进。除了对组成部件和/或布局进行的变型和改进外,对于本领域技术人员来说,其他的用途也将是明显的。Although the invention has been described herein with reference to a number of illustrative embodiments thereof, it is to be understood that numerous other modifications and implementations can be devised by those skilled in the art which will fall within the scope of the disclosure disclosed in this application. within the scope and spirit of the principles. More specifically, within the scope of the disclosure, drawings and claims of the present application, various modifications and improvements can be made to the components and/or layout of the subject combination layout. In addition to modifications and improvements in component parts and/or layout, other uses will be apparent to those skilled in the art.

Claims (10)

1.一种线路检测系统,其特征在于,包括:1. A line detection system, characterized in that, comprising: 图像采集系统,用于被检测物的成像、以及采集所成的图像;An image acquisition system, used for imaging of the detected object and the acquired image; 运动控制系统,用于调节被检测物位置以及图像采集系统的对焦;该运动控制系统包括:The motion control system is used to adjust the position of the detected object and the focus of the image acquisition system; the motion control system includes: z轴步进电机;z-axis stepper motor; z轴丝杆,所述z轴丝杆由z轴步进电机驱动旋转;A z-axis screw rod, the z-axis screw rod is driven to rotate by a z-axis stepping motor; z轴载物台,该z轴载物台与所述z轴丝杆连接,z轴载物台用于承载图像采集系统;A z-axis stage, the z-axis stage is connected to the z-axis screw, and the z-axis stage is used to carry the image acquisition system; x轴伺服电机;x-axis servo motor; x轴丝杆,所述x轴丝杆由x轴步进电机驱动旋转;An x-axis screw rod, the x-axis screw rod is driven to rotate by an x-axis stepping motor; x轴载物台,该x轴载物台与所述x轴丝杆连接,x轴载物台用于承载被检测物体。An x-axis stage, the x-axis stage is connected to the x-axis screw, and the x-axis stage is used to carry the object to be detected. 2.根据权利要求1所述的线路检测系统,其特征在于,所述图像采集系统包括:2. The line detection system according to claim 1, wherein the image acquisition system comprises: 光源,用于对被检测物进行打光,使被检测物的轮廓和线路清晰;以及用于成像的The light source is used to illuminate the object to be detected, so that the outline and lines of the object to be detected are clear; 光学镜头和相机;Optical lenses and cameras; 图像采集卡,用于图像采集。Image acquisition card for image acquisition. 3.根据权利要求2所述的线路检测系统,其特征在于,所述光学镜头和相机之间设置有调焦筒。3. The line inspection system according to claim 2, characterized in that a focusing tube is arranged between the optical lens and the camera. 4.根据权利要求1所述的线路检测系统,其特征在于,所述图像采集系统还包括:4. The line detection system according to claim 1, wherein the image acquisition system further comprises: 接收模块,用于接收相机帧数据;A receiving module, configured to receive camera frame data; 拼图模块,用于将采集到的多幅目标图像合并为一张完整的图片;A jigsaw module for merging multiple target images collected into a complete picture; 发送模块,用于发送图像。The sending module is used to send images. 5.根据权利要求1所述的线路检测系统,其特征在于,还包括图像分析系统,该图像分析系统包括:5. The line detection system according to claim 1, further comprising an image analysis system, the image analysis system comprising: 图像预处理模块,用于对所采集的图像进行分析,以判断所采集的图像是否有效;An image preprocessing module is used to analyze the collected images to determine whether the collected images are valid; 阈值处理模块,用于对局部图像进行动态阈值处理;Threshold processing module, for performing dynamic threshold processing on local images; 轮廓提取模块,用于提取图像轮廓;Contour extraction module, is used for extracting image contour; 轮廓匹配模块,用于将提取的图像轮廓与预先设定好的标准文档进行配准;Contour matching module, used for registering the extracted image contour with the preset standard document; 检测缺陷模块,用于将提取的图像轮廓与配准的标准文档进行对照分析,以得出图像参数的缺陷。The defect detection module is used for comparing and analyzing the extracted image outline with the registered standard document to obtain the defect of image parameters. 6.一种实现如权利要求1所述线路检测系统的方法,其特征在于,包括:6. A method for realizing the line detection system as claimed in claim 1, characterized in that, comprising: 通过z轴步进电机驱动z轴丝杆旋转;Drive the z-axis screw to rotate through the z-axis stepping motor; z轴丝杆的旋转带动z轴载物台以及与该z轴载物台连接的图像采集系统上下移动;The rotation of the z-axis screw drives the z-axis stage and the image acquisition system connected to the z-axis stage to move up and down; 通过x轴步进电机驱动x轴丝杆旋转;Drive the x-axis screw to rotate through the x-axis stepping motor; x轴丝杆的旋转带动x轴载物台以及与该x轴载物台连接的被检测物在水平方向移动;The rotation of the x-axis screw drives the x-axis stage and the detected object connected to the x-axis stage to move in the horizontal direction; 通过所述z轴载物台、x轴载物台各自的运动以调节被检测物位置以及图像采集系统的对焦;adjusting the position of the detected object and the focus of the image acquisition system through the respective movements of the z-axis stage and the x-axis stage; 对焦后,通过图像采集系统对被检测物进行成像、以及采集。After focusing, the detected object is imaged and collected by the image acquisition system. 7.根据权利要求6所述的线路检测系统的方法,其特征在于,所述图像采集系统中:7. The method of the line detection system according to claim 6, characterized in that, in the image acquisition system: 用光源对被检测物进行打光,使被检测物的轮廓和线路清晰;以及Use a light source to illuminate the detected object to make the outline and lines of the detected object clear; and 用光学镜头和相机对被检测物成像;Image the detected object with optical lens and camera; 用图像采集卡进行图像采集。Image acquisition is performed with a frame grabber. 8.根据权利要求7所述的线路检测系统的方法,其特征在于,所述被检测物运动方向和相机的拍摄方向垂直,并且被检测物的运动速度和相机采集行频相匹配。8 . The method of the line detection system according to claim 7 , wherein the moving direction of the detected object is perpendicular to the shooting direction of the camera, and the moving speed of the detected object matches the acquisition line frequency of the camera. 9.根据权利要求6所述的线路检测系统的方法,其特征在于,包括:9. The method of the line detection system according to claim 6, characterized in that, comprising: 接收相机帧数据;Receive camera frame data; 在未接收到相机帧数据的情况下,继续接收相机帧数据;Continue to receive camera frame data without receiving camera frame data; 在接收到收相机帧数据后,结束采集,并进行拼图;After receiving the receiver frame data, end the collection and make a puzzle; 将拼图后的图像进行发送。Send the collaged images. 10.根据权利要求6所述的线路检测系统的方法,其特征在于,包括:10. The method of the line detection system according to claim 6, characterized in that, comprising: 对所采集的图像进行分析,以判断所采集的图像是否有效;Analyze the collected images to determine whether the collected images are valid; 阈值处理;Thresholding; 提取图像轮廓;Extract image contours; 将提取的图像轮廓与预先设定好的标准文档进行配准;Register the extracted image outline with the preset standard document; 对提取的图像轮廓与配准的标准文档进行对照分析,以得出图像参数的缺陷。The extracted image contours are compared with the registered standard documents to find out the defects of the image parameters.
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Application publication date: 20131218