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CN103426971A - Sol-gel preparation method of copper-zinc-tin-sulfur solar cell film - Google Patents

Sol-gel preparation method of copper-zinc-tin-sulfur solar cell film Download PDF

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CN103426971A
CN103426971A CN2013103517369A CN201310351736A CN103426971A CN 103426971 A CN103426971 A CN 103426971A CN 2013103517369 A CN2013103517369 A CN 2013103517369A CN 201310351736 A CN201310351736 A CN 201310351736A CN 103426971 A CN103426971 A CN 103426971A
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zinc
copper
tin
sulfur
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张克智
孙琳
杨平雄
褚君浩
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East China Normal University
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Abstract

本发明公开了一种铜锌锡硫太阳电池薄膜的溶胶-凝胶制备方法,包括:步骤1,分别将含有铜、锌、锡、硫的化合物溶解在溶剂里,制成稳定的铜锌锡硫前驱体溶胶;步骤2,将制备的铜锌锡硫前驱体溶胶涂覆在基底上,经热处理,得到铜锌锡硫太阳电池吸收层薄膜。本发明方法对设备要求低、操作简单、制备成本低、组分易于调节;采用无毒或低毒溶剂,有利于环保及对工作人员的安全;本方法无需经过硫化过程,免除生产过程的污染。

The invention discloses a sol-gel preparation method of a copper-zinc-tin-sulfur solar cell film, comprising: step 1, respectively dissolving compounds containing copper, zinc, tin and sulfur in a solvent to prepare a stable copper-zinc-tin Sulfur precursor sol; step 2, coating the prepared copper-zinc-tin-sulfur precursor sol on the substrate, and heat-treating to obtain a copper-zinc-tin-sulfur solar cell absorber film. The method of the invention has low requirements on equipment, simple operation, low preparation cost, and easy adjustment of components; the use of non-toxic or low-toxic solvents is beneficial to environmental protection and the safety of workers; the method does not need to go through a vulcanization process, and avoids pollution in the production process .

Description

铜锌锡硫太阳电池薄膜的溶胶-凝胶制备方法Sol-gel preparation method of copper-zinc-tin-sulfur solar cell thin film

技术领域technical field

本发明涉及光电功能材料技术领域,具体是一种铜锌锡硫太阳电池薄膜的制备方法。The invention relates to the technical field of photoelectric functional materials, in particular to a method for preparing a copper-zinc-tin-sulfur solar battery thin film.

背景技术Background technique

近年来能源和环境维护问题越来越受到人们高度重视与关注,从而推进了太阳能电池发展,并且太阳能电池将成为未来重要替代能源。In recent years, the issue of energy and environmental maintenance has been paid more and more attention and attention by people, thus promoting the development of solar cells, and solar cells will become an important alternative energy source in the future.

铜锌锡硫四元化合物具有锌黄锡矿结构,其禁带宽度在1.2~1.6eV,与半导体太阳能电池所要求的最佳禁带宽度十分接近,并且其吸收系数高达104cm-1。铜锌锡硫化合物中含有的元素都是地球上储量非常丰富的,且不含有毒成分,对环境友好,已成为替代铜铟镓硒太阳能电池吸收层的最佳候选材料,有可能成为未来光伏电池的主流产品。Copper-zinc-tin-sulfur quaternary compound has kesterite structure, its bandgap is 1.2-1.6eV, which is very close to the optimum bandgap required by semiconductor solar cells, and its absorption coefficient is as high as 10 4 cm -1 . The elements contained in the copper-zinc-tin-sulfur compound are very abundant on the earth, and do not contain toxic components, and are environmentally friendly. The mainstream product of the battery.

目前,铜锌锡硫太阳薄膜电池的最高光电转换效率已达到8.4%(B.Shin,O.Gunawan,Y.Zhu,N.A.Bojarczuk,S.J.Chey and S.Guha.Thin film solar cell with8.4%power conversionefficiency using an earth-abundant Cu2ZnSnS4absorber.Prog.Photovolt.:Res.Appl.2011,DOI:10.1002/pip.1174);铜锌锡硫硒太阳薄膜电池的最高光电转换效率已达到11.1%(T.K.Todorov,J.Tang,S.Bag,O.Gunawan,T.Gokmen,Y.Zhu and D.B.Mitzi.Beyond11%efficiency:characteristics of state-of-the-art Cu2ZnSn(S,Se)4solar cells.Adv.Energy Mater.,2012,DOI:10.1002/aenm.201200348),达到或接近商业化的非晶硅薄膜太阳电池的效率,而这离理论光电转换效率32%还相差太远,需不断完善和发展CZTS(铜锌锡硫)薄膜与电池组件制备技术。At present, the highest photoelectric conversion efficiency of copper-zinc-tin-sulfur thin film solar cell has reached 8.4% (B.Shin, O.Gunawan, Y.Zhu, NA Bojarczuk, SJChey and S.Guha. Thin film solar cell with 8.4% power conversion efficiency using an earth-abundant Cu 2 ZnSnS 4 absorber.Prog.Photovolt.: Res.Appl.2011, DOI: 10.1002/pip.1174); the highest photoelectric conversion efficiency of copper-zinc-tin-sulfur-selenium thin-film solar cells has reached 11.1% (TKTodorov, J.Tang, S.Bag, O.Gunawan, T.Gokmen, Y.Zhu and DBMitzi.Beyond11%efficiency:characteristics of state-of-the-art Cu 2 ZnSn(S,Se) 4 solar cells.Adv.Energy Mater., 2012, DOI: 10.1002/aenm.201200348), reaching or approaching the efficiency of commercial amorphous silicon thin-film solar cells, but this is far from the theoretical photoelectric conversion efficiency of 32%, and it is necessary to continuously improve and develop CZTS ( Copper zinc tin sulfur) thin film and battery component preparation technology.

目前,制备铜锌锡硫化合物的方法主要包括真空法、非真空法,其中,真空法对设备的要求高、操作复杂、制备成本高,而非真空法操作简单、组分易于调节。目前,真空法和非真空法大部分都需要后续硫化(硫化:在含有硫或硫化氢的气氛中热处理),尤其是非真空法都需要硫化处理,因此存在环境污染问题。At present, the methods for preparing copper-zinc-tin-sulfur compounds mainly include vacuum method and non-vacuum method. Among them, the vacuum method has high requirements for equipment, complicated operation and high preparation cost, while the non-vacuum method is simple to operate and easy to adjust the components. At present, most of the vacuum method and the non-vacuum method require subsequent vulcanization (sulfurization: heat treatment in an atmosphere containing sulfur or hydrogen sulfide), especially the non-vacuum method requires vulcanization treatment, so there is an environmental pollution problem.

本发明提出一种铜锌锡硫光电材料新的制备方法,不需要采用硫化过程,免除生产过程的污染,并且本方法对设备的要求低,可进一步降低生产成本。The invention proposes a new preparation method of copper-zinc-tin-sulfur photoelectric material, which does not need a vulcanization process and avoids pollution in the production process, and the method has low requirements on equipment and can further reduce production costs.

发明内容Contents of the invention

为了克服现有技术的上述不足,本发明提供一种铜锌锡硫太阳电池吸收层薄膜的溶胶-凝胶制备方法,其溶剂均采用无毒或低毒有机物与水的混合物,本方法可以有效地降低制备太阳能电池吸收层的成本。In order to overcome the above-mentioned deficiencies of the prior art, the present invention provides a sol-gel preparation method of a copper-zinc-tin-sulfur solar cell absorbing layer film, the solvent of which is a mixture of non-toxic or low-toxic organic matter and water, and the method can effectively Reduce the cost of preparing solar cell absorber layer.

本发明铜锌锡硫太阳电池薄膜的溶胶-凝胶制备方法,包括以下:The sol-gel preparation method of the copper-zinc-tin-sulfur solar cell film of the present invention comprises the following:

步骤1,分别将含有铜、锌、锡、硫的化合物溶解在有机溶剂或有机溶剂与水的混合溶剂里,制成稳定的铜锌锡硫前驱体溶胶液;具体地,溶剂可以是醇或水与醇的混合溶剂。Step 1, respectively dissolving compounds containing copper, zinc, tin, and sulfur in an organic solvent or a mixed solvent of an organic solvent and water to make a stable copper-zinc-tin-sulfur precursor sol; specifically, the solvent can be alcohol or A mixed solvent of water and alcohol.

步骤2,将制备的铜锌锡硫前驱体溶胶涂覆在基底上,并对其进行热处理,得到铜锌锡硫太阳电池吸收层薄膜。Step 2, coating the prepared copper-zinc-tin-sulfur precursor sol on the substrate, and heat-treating it to obtain a copper-zinc-tin-sulfur solar cell absorber film.

其中,“溶胶-凝胶法”是指,用含高化学活性组分的化合物作前驱体,在液相下将这些原料均匀混合,并进行水解、缩合化学反应,在溶液中形成稳定的透明溶胶体系,溶胶经陈化胶粒间缓慢聚合,形成三维空间网络结构的凝胶,凝胶网络间充满了失去流动性的溶剂,形成凝胶。凝胶经过干燥、烧结固化制备出分子乃至纳米亚结构的材料。Among them, the "sol-gel method" refers to the use of compounds containing highly chemically active components as precursors, uniform mixing of these raw materials in the liquid phase, and chemical reactions of hydrolysis and condensation to form a stable transparent solution in the solution. In the sol system, the sol slowly polymerizes between the aging colloidal particles to form a gel with a three-dimensional space network structure, and the gel network is filled with solvents that have lost fluidity to form a gel. The gel is dried, sintered and solidified to prepare molecular and even nano-substructure materials.

步骤1中,所述含有铜的化合物为硝酸铜、氯化铜、硫酸铜中的任意一种,所述含有锌的化合物为硝酸锌、氯化锌、硫酸锌中的任意一种,所述含有锡的化合物为氯化亚锡、硫酸亚锡、四氯化锡中的任意一种,所述含有硫的化合物为硫脲。In step 1, the compound containing copper is any one of copper nitrate, copper chloride, and copper sulfate, and the compound containing zinc is any one of zinc nitrate, zinc chloride, and zinc sulfate. The tin-containing compound is any one of stannous chloride, stannous sulfate, and tin tetrachloride, and the sulfur-containing compound is thiourea.

步骤1中,所含有述铜、锌、锡、硫的化合物的摩尔比为2∶(1~1.5)∶(1~1.5)∶(4~12)。In step 1, the molar ratio of the copper, zinc, tin and sulfur compounds is 2:(1-1.5):(1-1.5):(4-12).

步骤1中,所述溶剂为乙醇、甲醇、乙二醇、异丙醇、丙三醇中的任意一种或任意几种的混合,或乙醇、甲醇、乙二醇、异丙醇、丙三醇中的任意一种或多种与水的混合。其中,水与醇的摩尔比为(0~2)∶1。In step 1, the solvent is any one or any combination of ethanol, methanol, ethylene glycol, isopropanol, glycerol, or ethanol, methanol, ethylene glycol, isopropanol, glycerin Any one or more alcohols mixed with water. Wherein, the molar ratio of water to alcohol is (0-2):1.

步骤1中,所述铜锌锡硫前驱体溶胶的制备温度为25~180℃。In step 1, the preparation temperature of the copper-zinc-tin-sulfur precursor sol is 25-180°C.

步骤2中,所述涂覆为旋涂、浸涂、喷墨打印或丝网印刷.其中,旋涂的转速为500~6000转/分,持续10~50秒。In step 2, the coating is spin coating, dip coating, inkjet printing or screen printing. Wherein, the rotational speed of spin coating is 500-6000 rpm for 10-50 seconds.

步骤2中,所述基底为玻璃基底、钼溅射玻璃基底或聚酰亚胺柔性基底。In step 2, the substrate is a glass substrate, a molybdenum sputtered glass substrate or a polyimide flexible substrate.

步骤2中,所述热处理方法为,空气中100~350℃预退火0.5~60min,然后惰性气氛(N2、Ar)中300~600℃度退火2~90min。In step 2, the heat treatment method is pre-annealing at 100-350° C. for 0.5-60 minutes in air, and then annealing at 300-600° C. for 2-90 minutes in an inert atmosphere (N 2 , Ar).

本发明的有益效果在于,本方法对设备的要求低、操作简单、制备成本低、易于实现四组分(含有铜、锌、锡、硫的化合物)比例的调节、进而利于制备出高效率铜锌锡硫太阳电池所需的吸收层材料;所用溶剂均为无毒或低毒,有利于环保及对工作人员的安全;本发明技术方案无需采用硫化过程,免除生产过程的污染,对设备的要求低,可以进一步降低生产成本。The beneficial effects of the present invention are that the method has low requirements on equipment, simple operation, low preparation cost, easy adjustment of the ratio of the four components (compounds containing copper, zinc, tin, sulfur), and is conducive to the preparation of high-efficiency copper The absorbing layer material required for zinc-tin-sulfur solar cells; the solvents used are non-toxic or low-toxic, which is beneficial to environmental protection and the safety of the staff; Low requirements can further reduce production costs.

附图说明Description of drawings

图1为实施例1制备的铜锌锡硫太阳电池薄膜的XRD物相分析图;Fig. 1 is the XRD phase analysis diagram of the copper-zinc-tin-sulfur solar cell thin film prepared in embodiment 1;

图2为实施例1制备的铜锌锡硫太阳电池薄膜的Raman图;Fig. 2 is the Raman diagram of the copper-zinc-tin-sulfur solar cell thin film prepared in embodiment 1;

图3为实施例1制备的铜锌锡硫太阳电池薄膜的SEM图;Fig. 3 is the SEM figure of the copper-zinc-tin-sulfur solar cell thin film prepared in embodiment 1;

图4为实施例2制备的铜锌锡硫太阳电池薄膜的XRD物相分析图。FIG. 4 is an XRD phase analysis diagram of the copper-zinc-tin-sulfur solar cell thin film prepared in Example 2. FIG.

具体实施方式Detailed ways

结合以下具体实施例和附图,对本发明作进一步的详细说明。实施本发明的过程、条件、试剂、实验方法等,除以下专门提及的内容之外,均为本领域的普遍知识和公知常识,本发明没有特别限制内容。The present invention will be further described in detail in conjunction with the following specific embodiments and accompanying drawings. The process, conditions, reagents, experimental methods, etc. for implementing the present invention are general knowledge and common knowledge in the art except for the content specifically mentioned below, and the present invention has no special limitation content.

实施例1:Example 1:

分别称取1.9398g Cu(NO3)2·3H2O、1.4303g Zn(NO3)2·6H2O、1.0381gSnCl2·2H2O、2.4453g硫脲(其摩尔比约为2∶1.3∶1.2∶8),然后加入到10ml乙醇与水的混合溶液(V/V=1∶3)中,室温下不断搅拌2h左右,形成淡黄色溶胶,得到铜锌锡硫前驱体溶胶。本方法中,含有铜、锌、锡、硫的化合物的加入顺序没有特别限制。将制备的铜锌锡硫前驱体溶胶旋涂在载玻片上,其转速为2000转/分,持续20秒;铜锌锡硫前驱体薄膜在空气中250℃预退火5min,然后N2气氛中550℃度退火10min,冷却后得到铜锌锡硫太阳电池吸收层薄膜。Weigh 1.9398g Cu(NO 3 ) 2 3H 2 O, 1.4303g Zn(NO 3 ) 2 6H 2 O, 1.0381g SnCl 2 2H 2 O, 2.4453g thiourea (the molar ratio is about 2:1.3 : 1.2: 8), then added to the mixed solution of 10ml ethanol and water (V water /V alcohol = 1: 3), stirred continuously at room temperature for about 2h to form a light yellow sol, and obtain the copper zinc tin sulfur precursor sol. In this method, the order of adding the compounds containing copper, zinc, tin and sulfur is not particularly limited. The prepared CuZnSnS precursor sol was spin-coated on a glass slide at a speed of 2000 rpm for 20 seconds; the CuZnSnS precursor film was pre-annealed in air at 250 °C for 5 min, and then N2 atmosphere Annealing at 550°C for 10 minutes, and cooling to obtain a thin film of the absorbing layer of a copper-zinc-tin-sulfur solar cell.

根据表1可知,本实施例1制备的CZTS薄膜其化学组分基本符合化学计量比。According to Table 1, it can be seen that the chemical composition of the CZTS thin film prepared in Example 1 basically conforms to the stoichiometric ratio.

表1实施例1制备的CZTS薄膜的化学组分The chemical composition of the CZTS film prepared in Table 1 Example 1

Figure BDA00003659669400031
Figure BDA00003659669400031

图1为制备的CZTS薄膜的XRD图,从图1中可看出,样品的XRD其2θ在18.2°、28.5°、33.0°、38.0°、47.5°和56.3°处均有衍射峰,分别对应于标准谱图卡JCPDF26-0575(锌黄锡矿相铜锌锡硫化合物)中的(101)、(112)、(200)、(211)、(220)和(312)衍射指标。另外,图1中没有发现其它杂相峰,说明制备的CZTS薄膜中没有杂相。图2为制备的CZTS薄膜的Raman图,发现有三个明显的峰,峰位分别在286、331、664cm-1处,此三个拉曼峰都是CZTS薄膜的峰。图3为制备的CZTS薄膜的SEM检测结果,由SEM图可见,CZTS薄膜表面平整而密实、无裂缝,平均粒径约150nm。实验结果表明,本实施例制备得到了具有锌黄锡矿结构的铜锌锡硫薄膜。Figure 1 is the XRD pattern of the prepared CZTS film. It can be seen from Figure 1 that the XRD of the sample has diffraction peaks at 18.2°, 28.5°, 33.0°, 38.0°, 47.5° and 56.3° at 2θ, corresponding to (101), (112), (200), (211), (220) and (312) diffraction indexes in the standard spectrum card JCPDF26-0575 (Kesterite Phase Copper-Zinc-Sn-Sulfur Compounds). In addition, no other impurity phase peaks are found in Figure 1, indicating that there is no impurity phase in the prepared CZTS film. Figure 2 is the Raman diagram of the prepared CZTS thin film. It is found that there are three obvious peaks at 286, 331, and 664 cm -1 respectively. These three Raman peaks are all peaks of the CZTS thin film. Fig. 3 is the SEM detection result of the prepared CZTS thin film. It can be seen from the SEM image that the surface of the CZTS thin film is flat and dense without cracks, and the average particle size is about 150nm. The experimental results show that, in this example, a copper-zinc-tin-sulfur thin film with a kesterite structure was prepared.

实施例2:Example 2:

分别称取2.0061gCuSO4·5H2O、1.5152g ZnSO4·7H2O、1.0984g SnCl2·2H2O、2.4437g硫脲(其摩尔比约为2∶1.3∶1.2∶8),然后依次加入到10ml乙醇中,室温下不断搅拌2h左右,形成淡黄色溶胶,得到铜锌锡硫前驱体溶胶。将制备的铜锌锡硫前驱体溶胶旋涂在载玻片上,其转速为2000转/分,持续20秒;铜锌锡硫前驱体薄膜在空气中300℃预退火5min,然后N2气氛中500℃度退火10min,冷却后得到铜锌锡硫太阳电池吸收层薄膜。Weigh 2.0061g CuSO 4 ·5H 2 O, 1.5152g ZnSO 4 ·7H 2 O, 1.0984g SnCl 2 ·2H 2 O, 2.4437g thiourea (the molar ratio is about 2:1.3:1.2:8), and then Add it into 10ml of ethanol, and stir continuously at room temperature for about 2 hours to form a light yellow sol, and obtain a copper-zinc-tin-sulfur precursor sol. The prepared CuZnSnS precursor sol was spin-coated on a glass slide at a speed of 2000 rpm for 20 seconds; the CuZnSnS precursor film was pre-annealed in air at 300 °C for 5 min, and then N2 atmosphere Annealing at 500°C for 10 minutes, and cooling to obtain a thin film of the absorbing layer of a copper-zinc-tin-sulfur solar cell.

根据图4所示,样品的XRD其2θ在28.5°、33.0°、47.5°和56.3°处均有衍射峰,分别对应于锌黄锡矿相铜锌锡硫化合物的(112)、(200)、(220)和(312)衍射指标。实验结果表明,本实施例制备得到具有锌黄锡矿结构的铜锌锡硫薄膜。与实施例1相比,本实施例产物分析中未观察到小峰(101)、(211),可能是由于退火温度稍低,结晶程度略逊于实施例1。As shown in Figure 4, the XRD of the sample has diffraction peaks at 28.5°, 33.0°, 47.5° and 56.3°, which correspond to (112) and (200) of kesterite-phase copper-zinc-tin-sulfur compounds, respectively. , (220) and (312) diffraction indices. The experimental results show that the copper-zinc-tin-sulfur thin film with kesterite structure was prepared in this embodiment. Compared with Example 1, no small peaks (101) and (211) were observed in the analysis of the product of this example, probably because the annealing temperature was slightly lower and the degree of crystallization was slightly inferior to that of Example 1.

实施例3-8:Embodiment 3-8:

Figure BDA00003659669400051
Figure BDA00003659669400051

实施例3~8中制备的样品CZTS薄膜与实施例1中的基本一样,其组分、XRD图、Raman图及SEM图没有明显差别,在此不再赘述。The sample CZTS thin films prepared in Examples 3-8 are basically the same as those in Example 1, and there is no obvious difference in their composition, XRD pattern, Raman pattern and SEM pattern, and will not be repeated here.

以上实施例1~8中采用旋涂的涂覆方法进行铜锌锡硫薄膜制备,合适的旋涂转速为500~6000转/分,持续10~50秒为宜。结合实际操作条件,还可以采用浸涂、喷墨打印或丝网印刷等常用方式进行涂覆,根据本发明方法均制备得到与实施例1~8类似的铜锌锡硫薄膜制备。In the above embodiments 1-8, the copper-zinc-tin-sulfur thin film is prepared by the coating method of spin coating, and the suitable spin coating speed is 500-6000 r/min for 10-50 seconds. Combined with the actual operating conditions, common methods such as dip coating, inkjet printing or screen printing can also be used for coating. According to the method of the present invention, copper-zinc-tin-sulfur thin films similar to those in Examples 1-8 can be prepared.

本发明的保护内容不局限于以上实施例。在不背离发明构思的精神和范围下,本领域技术人员能够想到的变化和优点都被包括在本发明中,并且以所附的权利要求书为保护范围。The protection content of the present invention is not limited to the above embodiments. Without departing from the spirit and scope of the inventive concept, changes and advantages conceivable by those skilled in the art are all included in the present invention, and the appended claims are the protection scope.

Claims (10)

1. the process for preparing sol-gel of a copper-zinc-tin-sulfur thin film, is characterized in that, comprises following:
Step 1, the compound that will contain respectively copper, zinc, tin, sulphur is dissolved in solvent, makes stable copper-zinc-tin-sulfur precursor sol; Described solvent is alcohol or water and pure mixed solvent;
Step 2, be coated in described copper-zinc-tin-sulfur precursor sol in substrate, through heat treatment, obtains ormolu sulfur solar energy absorbing layer film.
2. the process for preparing sol-gel of copper-zinc-tin-sulfur thin film according to claim 1, it is characterized in that, in step 1, the described compound that contains copper is any one of copper nitrate, copper chloride, copper sulphate, the described compound that contains zinc is any one of zinc nitrate, zinc chloride, zinc sulfate, the described compound that contains tin is any one of stannous chloride, stannous sulfate, butter of tin, and the described compound that contains sulphur is thiocarbamide.
3. the process for preparing sol-gel of copper-zinc-tin-sulfur thin film according to claim 1, it is characterized in that, in step 1, the mol ratio of the described compound that contains copper, zinc, tin, sulphur is 2: (1~1.5): (1~1.5): (4~12).
4. the process for preparing sol-gel of copper-zinc-tin-sulfur thin film according to claim 1, it is characterized in that, in step 1, described solvent be in ethanol, methyl alcohol, ethylene glycol, isopropyl alcohol, glycerol any one or mix arbitrarily, in ethanol, methyl alcohol, ethylene glycol, isopropyl alcohol, glycerol any one or mix arbitrarily and the mixing of water.
5. the process for preparing sol-gel of copper-zinc-tin-sulfur thin film according to claim 4, is characterized in that, water and pure mol ratio are (0~2): 1.
6. the process for preparing sol-gel of copper-zinc-tin-sulfur thin film according to claim 1, is characterized in that, in step 1, the preparation temperature of described copper-zinc-tin-sulfur precursor sol is 25~180 ℃.
7. the process for preparing sol-gel of copper-zinc-tin-sulfur thin film according to claim 1, is characterized in that, in step 2, described painting method is spin coating, dip-coating, inkjet printing or silk screen printing.
8. the process for preparing sol-gel of copper-zinc-tin-sulfur thin film according to claim 7, is characterized in that, the rotating speed of described spin coating is 500~6000 rev/mins, continues 10~50 seconds.
9. the process for preparing sol-gel of copper-zinc-tin-sulfur thin film according to claim 1, is characterized in that, in step 2, described substrate is substrate of glass, the substrate of molybdenum sputtering glass or polyimides flexible substrates.
10. the process for preparing sol-gel of copper-zinc-tin-sulfur thin film according to claim 1, it is characterized in that, in step 2, described heat treatment method is, 100~350 ℃ of preannealing 0.5~60min in air, then 300~600 ℃ of degree annealing 2~90min in inert atmosphere; Wherein, described inert atmosphere is N 2Or Ar.
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CN105552171A (en) * 2016-02-01 2016-05-04 上海理工大学 Method for preparing Cu2ZnSnS4 ultra-thin solar light absorbing layer by spraying one-step method
CN107195697A (en) * 2017-06-01 2017-09-22 中南大学 A kind of preparation method of copper barium (strontium/calcium) tin sulphur (selenium) film
CN107195697B (en) * 2017-06-01 2019-05-03 中南大学 A kind of preparation method of copper barium (strontium/calcium) tin sulfur (selenium) thin film
CN107968041A (en) * 2017-11-22 2018-04-27 杨晓艳 A kind of preparation method of copper-zinc-tin-sulfur film
CN108022987A (en) * 2017-12-04 2018-05-11 暨南大学 A kind of preparation method of copper-zinc-tin-sulfur film material
CN108922927A (en) * 2018-06-21 2018-11-30 华南师范大学 A kind of stable compound semiconductor sun photodegradation aquatic products hydrogen electronic device, electrode system and preparation method thereof
CN113363332A (en) * 2021-04-28 2021-09-07 东北大学秦皇岛分校 Transition group element single-doped CZTS film and preparation method thereof
CN114899279A (en) * 2022-05-11 2022-08-12 中南大学 Preparation method of modified copper-zinc-tin-sulfur precursor solution and thin film solar cell
CN114899279B (en) * 2022-05-11 2023-11-10 中南大学 Preparation method of modified copper zinc tin sulfur precursor solution and thin film solar cell

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