CN103417212B - Bioprobe Components - Google Patents

Abstract

A biological probe assembly includes a flexible substrate, a probe array, and an adhesive. The flexible substrate has a surface. The probe array comprises a plurality of probes. The probe array is arranged on the surface of the flexible substrate. The protruding length of each probe is between 100 microns and 300 microns. The adhesive is arranged on the surface of the flexible substrate.

Description

Bioprobe Components

technical field

The present invention relates to a probe device, in particular to a biological probe device.

Background technique

In the 1950s, Dr. Reinhard Voll studied acupuncture points (Acupuncture Points) and found that the human body has nearly 2,000 acupuncture points on the surface of the skin, and these acupuncture points are distributed along some paths called Meridians. Acupoints are a special superficial anatomic location, and the DC resistance value of the skin at these locations is lower than that of the surrounding skin. Dr. Reinhard Voll also discovered that by measuring the impedance data of acupoints, it is possible to measure whether the corresponding organs are functioning normally or not. In addition, some electrical therapy methods have also discovered that therapeutic electrical signals (therapy signals) can be introduced into relevant acupoints with electrodes to treat the corresponding organs.

U.S. Patent No. 4,981,146, U.S. Patent No. 5,397,338, U.S. Patent No. 5,626,617, U.S. Patent No. 6,735,480, U.S. Patent Publication No. 2005/0197555, etc., are all about the use of acupuncture points for treatment or monitoring of human health patent. Traditionally, the impedance signal detection of acupoints is carried out with a biological impedance measuring instrument and its metal probe. Each time a measurement is made, the probe can only measure one acupoint, and the measurer or the treater needs to have a certain level of professional knowledge and experience on the acupoints in order to accurately measure or apply therapeutic signals, so the general experience Underprivileged users cannot take advantage of this scientific discovery at home.

In the traditional bioimpedance measuring instrument, the user needs to press the probe on the skin by hand. Due to the force of pressing by hand, it is difficult to maintain consistent measurements, which may lead to poor electrical contact and affect the measurement results. In addition, excessive pressing can also cause unpleasant sensations to the subject or the subject.

Contents of the invention

In view of the above problems, the present invention proposes a new biological probe assembly. A biological probe assembly according to an embodiment of the present invention includes a flexible substrate, a probe array, and an adhesive. The flexible substrate has a surface. A probe array contains a plurality of probes. The probe array is disposed on the surface of the flexible substrate. The protruding length of each probe is between 100 microns (μm) and 300 microns. Glue is disposed on the surface of the flexible substrate.

A biological probe assembly according to another embodiment of the present invention includes a flexible substrate, a first adhesive, a probe array, and a second adhesive. The flexible substrate has a surface. A probe array contains a plurality of probes. The first adhesive adheres the probes to the surface of the flexible substrate. The protruding length of each probe is between 100 microns and 300 microns. The second glue is disposed on the surface of the flexible substrate.

Description of drawings

1 is a schematic diagram of a biological probe system according to an embodiment of the present invention;

Fig. 2 is the top view of the biological probe assembly of an embodiment of the present invention;

Fig. 3 is a sectional view along section line 1-1 of Fig. 2;

4 is a schematic diagram of a probe array of a biological probe assembly according to an embodiment of the present invention;

Fig. 5 is a schematic diagram of sticking a biological probe assembly on a hand according to an embodiment of the present invention;

Fig. 6 is a top view of a removable biological probe assembly according to another embodiment of the present invention;

Fig. 7 is a sectional view along section line 2-2 of Fig. 6;

8 is a schematic diagram of a patterned polysilicon layer on a flexible substrate in the manufacturing process of a biological probe assembly according to an embodiment of the present invention;

Fig. 9 is a sectional view along section line 3-3 of Fig. 8;

Fig. 10 is a schematic top view of a biological probe assembly according to an embodiment of the present invention, after the production process steps of chrome plating, nickel plating and gold plating by using the stripping process;

Fig. 11 is a sectional view along section line 4-4 of Fig. 10;

12 is a schematic cross-sectional view of a biological probe assembly according to an embodiment of the present invention;

13 is a schematic diagram of a probe array formed on a conductive tape according to an embodiment of the present invention; and

FIG. 14 is a cross-sectional view of a film capacitor according to an embodiment of the present invention.

Wherein, the reference signs are explained as follows:

1 Biological probe system

11 Biological probe components

11' Biological Probe Assembly

12 Host

21 flexible substrate

22 viscose

23 circuit

24 Conductive column

25 Pads

26 antenna

27 chips

28 Thin film resistors

29 film capacitor

30 power supply

71 viscose

81 Silicon oxide layer

82 Silicon oxide layer

83 protective layer

84 Amorphous silicon layer

85 through holes

86 photoresist layer

87 pad

88 photoresist layer

111 Receiver

112 Transmitter

113 processor

114 memory

115 Probe Array

121 Transmitter

122 Receiver

123 Controller

124 memory

125 Monitoring device

131 Conductive tape

141 lower electrode

142 Dielectric layer

143 Chromium layer

144 nickel layer

145 gold layers

211 Surface

1131 A/D converter

1132 D/A converter

1133 voltage amplifier

1151 Probe

Detailed ways

FIG. 1 is a schematic diagram of a biological probe system 1 according to an embodiment of the present invention. FIG. 2 is a top view of a biological probe assembly 11 according to an embodiment of the present invention. FIG. 3 is a cross-sectional view along section line 1-1 of FIG. 2 . Referring to FIGS. 1 to 3 , a bioprobe system (bioprobe system) 1 can be used for electrical measurement of acupoints and treatment through acupoints. The biological probe system 1 includes a biological probe component 11 and a host (host) 12 . The biological probe assembly 11 may include at least one probe array 115 , and each probe array 115 may touch the skin on an acupoint to measure or apply a therapeutic signal to the acupoint. In some embodiments, biological probe assembly 11 may include multiple probe arrays 115 . The host 12 can transmit the code (code) to the bioprobe assembly 11, so that the bioprobe assembly 11 can perform electrical measurement of acupoints (for example: measurement of acupoint impedance or electrical potential) according to the content of the code, or generate and apply appropriate Electrical healing signal. In some embodiments, the code may include an acupoint code, and the bioprobe assembly 11 may use the acupoint code to determine which acupoint the code belongs to. In some embodiments, the code may contain strength information of the therapy signal. In some embodiments, the code may include the frequency of the therapy signal. In addition, the biological probe assembly 11 can transmit the measurement value of the acupoint back to the host 12, and the host 12 can judge the health status of the organ corresponding to the acupoint or the effect of treatment according to the returned measurement value of the acupoint. The host computer 12 can also transmit new codes to change the intensity or frequency of the treatment signal according to the measurement value of the acupoints.

Preferably, the host 12 and the biological probe assembly 11 can communicate wirelessly. In some embodiments, the communication between the host 12 and the biological probe assembly 11 is based on the RFID (Radio Frequency IDentification) protocol. In some embodiments, the host 12 and the biological probe assembly 11 can communicate using other wireless communication protocols, such as ZIGBEE or Bluetooth technology. In some embodiments, wired communication can also be performed between the host 12 and the biological probe assembly 11 .

Referring to FIG. 1 , the host 12 may include a transmitter 121 and a receiver 122 . The transmitter 121 can modulate codes or instructions, and transmit the modulated codes or instructions to at least one biological probe assembly 11 . The transmitter 121 can perform signal modulation, such as pulse width modulation (PWM), pulse interval modulation (PIM), or other similar modulations. The receiver 122 can receive modulation data from the biological probe assembly 11 . The receiver 122 can demodulate the modulated data. For example, the receiver 122 can perform amplitude shift keying (ASK) demodulation, phase shift keying (PSK) demodulation, or other similar demodulation.

The host 12 may further include a controller 123 and a memory 124 . The controller 123 can control the transmitter 121 , the receiver 122 , and the memory 124 . The controller 123 can provide codes or commands to the transmitter 121 and can receive data from the receiver 122 . The controller 123 can store the received data in the memory 124 , or transmit the received data to the monitoring device 125 .

The monitoring device 125 can store the measured values of the acupoints and determine whether the measured values of the acupoints fall within a normal range. The monitoring device 125 may provide codes to the controller 123 . The monitoring device 125 can provide a new code to the controller 123 according to the measured value of the acupoint. The monitoring device 125 can change the information used to generate the therapeutic signal in the code according to the change trend of the measured value of the acupoint, so that the biological probe assembly 11 can generate therapeutic signals of different frequencies or different intensities. The monitoring device 125 can determine which acupoint the received data is related to according to the received data from the receiver 122, and compare the measured value of the acupoint in the data with the normal range value of the corresponding acupoint. The monitoring device 125 can also record data such as each biological probe assembly 11 and its corresponding measured acupoints for file analysis or output and print as a report.

The biological probe assembly 11 includes a receiver 111 and a transmitter 112 . The receiver 111 can demodulate the received modulation codes or commands. The transmitter 112 can adjust the data to be transmitted. Transmitter 112 may perform ASK modulation, PSK modulation, or other similar modulations. Processor 113 controls receiver 111 , transmitter 112 , memory 114 , and probe array 115 . The processor 113 can generate corresponding treatment signals or stimulation currents according to the received codes or instructions. The memory 114 can store the operating program of the biological probe assembly 11 and the required and generated data. For example, the memory 114 can store data to be transmitted, can store measured values of acupoints or data of acupoints corresponding to the probe array 115 , and the like.

Referring again to FIG. 1 , the processor 113 may include an A/D converter (analog-to-digital converter) 1131 , a D/A converter (digital-to-analog converter) 1132 , and a voltage amplifier 1133 . The D/A converter 1132 is used to generate the acupuncture point stimulation current, the voltage amplifier 1133 is used to amplify the response signals (response signals) generated after the acupuncture points receive the stimulation current, and the A/D converter 1131 converts the response signals into digital acupuncture point measurements value.

Referring to FIGS. 2 and 3 , the biological probe assembly 11 includes a flexible substrate 21 , at least one probe array 115 , and an adhesive 22 . The flexible substrate 21 includes a surface 211 . Each probe array 115 includes a plurality of probes 1151, and at least one probe array 115 is disposed on the surface 211 of the flexible substrate 21, wherein the protruding length L of each probe 1151 can be between 100 microns and 300 microns (μm )between. In addition, the adhesive 22 is disposed on the surface 211 of the flexible substrate 21 , and the adhesive 22 is used to fix the biological probe assembly 11 on the skin.

The flexible substrate 21 contains a polymer material. In some embodiments, the flexible substrate 21 may include plastic materials such as polyethylene terephthalate (PET) or polyimide (PI).

Probes 1151 may be arranged in an array. The area occupied by the probe array 115 may be approximately 0.25 square centimeters. The protruding length of the probe 1151 may be less than 300 micrometers (millimeter), preferably between 100 micrometers and 300 micrometers. The probe 1151 may not have a tip, so that its tip only touches the skin and does not penetrate the skin. Probe 1151 can be made of a biocompatible metal. Probe 1151 may comprise a conductive compound. In some embodiments, the probe 1151 may comprise polymer material and silver.

The glue 22 can be insulating glue. Glue 22 may be any glue used to adhere to the skin. The glue 22 can be medical glue. The adhesive 22 may include removable adhesive. In some embodiments, the adhesive 22 is included on a double-sided tape.

In some embodiments, the adhesive 22 covers the entire surface 211 of the flexible substrate 21 except where the probe array 115 is located, as shown in FIG. 4 .

Referring to FIG. 2 and FIG. 3 , in some embodiments, the biological probe assembly 11 further includes a circuit 23 formed on the surface 211 of the flexible substrate 21 , wherein the probe array 115 is electrically connected to the circuit 23 . In some embodiments, the probe array 115 is connected to the circuit 23 through at least one conductive post 24 penetrating the flexible substrate 21 . In some embodiments, the circuit 23 includes a pad 25 , wherein the pad 25 is connected to at least one conductive column 24 .

Referring to FIGS. 1 and 2 , the biological probe assembly 11 may include a chip 27 . The chip 27 is coupled to the circuit 23 and may include a receiver 111 , a transmitter 112 , a processor 113 , and a memory 114 . The circuit 23 may further include an antenna 26 , wherein the chip 27 may be coupled to the antenna 26 .

In some embodiments, the circuit 23 may further include at least one thin film resistor 28 . In some embodiments, the thin film resistor 28 can be an external resistor of the chip 27 .

In some embodiments, the circuit 23 may further include a film capacitor 29 . In some embodiments, the film capacitor 29 can be an external capacitor of the chip 27 .

In some embodiments, the biological probe assembly 11 may include a power supply 30 , and the power supply 30 provides the power required for the operation of the biological probe assembly 11 . In some embodiments, power source 30 includes a battery.

In some embodiments, the biological probe assembly 11 is an RFID device, which may further include a rectification module and a clock wave generating oscillation module. The rectification module converts the microwave signal into electrical energy, so as to provide the electrical energy required by the biological probe assembly 11 when it operates in the passive mode (Passive Mode). The clock wave generating oscillating module can generate a clock wave signal (Clock). In some embodiments, the rectification module can be coupled to the film capacitor 29 . In some embodiments, the clock wave generator oscillating module may include a film capacitor 29 and a film resistor 28 . In some embodiments, the clock wave generating oscillating module may be a multi-vibrator.

Referring to Fig. 3 and Fig. 5, the biological probe assembly 11 is flexible, and can be attached to the surface of human skin through the adhesive 22 in Fig. 3 and Fig. Make a section of proper length so that when the biological probe assembly 11 is attached to the skin, the probe 1151 can apply consistent pressure, and can ensure that the probe 1151 has good and stable electrical properties with the skin when measuring at different times touch. Because the probe 1151 protrudes a certain length appropriately, it can prevent the subject or the subject from feeling unpleasant. In addition, the plurality of probes 1151 arranged in an array allows the user to perform measurements without knowing exactly where the acupoints are located.

FIG. 6 is a top view of a biological probe assembly 11 ′ according to another embodiment of the present invention, wherein the biological probe assembly 11 ′ includes a capacitor 29 . FIG. 7 is a cross-sectional view along section line 2-2 of FIG. 6 . Referring to Fig. 2, Fig. 3, Fig. 6 and Fig. 7, the biological probe assembly 11' is similar to the biological probe assembly 11 disclosed in the embodiment of Fig. 2 and Fig. 3, except that the probe of the biological probe assembly 11' Array 115 is replaceable. Therefore, in some embodiments, the biological probe assembly 11 ′ further includes an adhesive 71 , and the adhesive 71 can fix the probe array 115 on the flexible substrate 21 . In some embodiments, the probe array 115 can be detached after the glue 71 is heated. In some embodiments, the adhesive 71 is conductive paste, and the probe array 115 can be electrically connected to the circuit 23 through the conductive paste 71 . In some embodiments, the adhesive 71 includes removable adhesive. In some embodiments, the adhesive 71 includes a removable conductive adhesive. In some embodiments, the biological probe assembly 11' comprises an electrically conductive tape, and the conductive tape comprises a first conductive adhesive and a second conductive adhesive, wherein the first conductive adhesive is adhered to the flexible substrate 21 on the surface 211 , the second conductive adhesive is the conductive adhesive 71 .

The following examples illustrate the manufacturing process of the biological probe assembly, but the present invention is not limited to the following examples.

Referring to FIG. 8 and FIG. 9 , a silicon dioxide layer 81 or 82 is respectively formed on two opposite surfaces of the flexible substrate 21 . In some embodiments, the silicon dioxide layer may have a thickness of 1 to 10 microns. In some embodiments, the silicon dioxide layer can be formed by evaporation.

A protective layer 83 is formed on the silicon dioxide layer 82 , wherein the protective layer 83 can protect the silicon dioxide layer 82 or have the effect of preventing moisture. In some embodiments, protective layer 83 includes photoresist. In some embodiments, the passivation layer 83 includes a positive polarity photoresist. In some embodiments, the protective layer 83 has a thickness of 0.5 to 10 microns.

On the silicon dioxide layer 81, an amorphous silicon layer 84 containing P (or N) type doping can be formed by vapor deposition. The doped amorphous silicon layer 84 is then annealed by laser to transform the amorphous silicon layer 84 into a polysilicon layer containing P (or N) type doping. After the polysilicon layer is patterned, a thin film resistor 28 is formed. In some embodiments, the amorphous silicon layer 84 is formed by vapor-depositing a mixture containing P (or N-Type Impurity) and silicon powder by using an electron gun. In some embodiments, the thickness of the amorphous silicon layer 84 is 1 to 25 microns.

Referring to FIG. 11 , a plurality of through holes 85 are formed on the flexible substrate 21 . In some embodiments, the plurality of vias 85 may be formed using a laser.

Then, metals such as chromium, nickel and electroless gold are sequentially vapor-deposited. In particular, since the diameter of the through hole 85 is large and the flexible substrate 21 is thin, the through hole 85 can be filled with metal conductors such as chromium, nickel, and gold. Then use the yellow light process and use photoresist protection to remove the unused metal conductors. Finally, the photoresist is removed to obtain the through hole area and the circuit 23 .

In other embodiments, after forming a plurality of through holes 85 on the flexible substrate 21 , a patterned photoresist layer 86 and 88 may be formed on both sides of the flexible substrate first (as shown in FIG. 11 ). In some embodiments, photoresist layers 86 and 88 include SU-8 photoresist. Then, chrome, nickel and electroless gold are evaporated. Finally, remove unnecessary chromium, nickel and gold layers by lift-off process. Finally, the photoresists 86 and 88 are removed.

Referring to FIG. 12 , the probes 1151 are directly formed on the pads 87 made of chrome, nickel and gold by screen printing. In some embodiments, the screen printing step may be repeated multiple times to form probe 1151 with multiple stacked segments. In some embodiments, the screen printing step may be repeated multiple times to form the probes 1151 with a protrusion length ranging from 100 microns to 300 microns. The protruding length of the probe 1151 between 100 microns and 300 microns can generate a more suitable contact pressure between the probe 1151 and the skin, thereby obtaining a good electrical contact effect. In some embodiments, the probe 1151 can be formed by screen printing a mixture of polymer material and silver (or other conductive material, such as conductive polymer).

Secondly, outside the area where the probe 1151 is located, glue 22 for fixing the biological probe assembly is applied. In some embodiments, the adhesive 22 includes a removable adhesive. In some embodiments, the glue 22 covers all areas except the area where the probe 1151 is located. In some embodiments, a double-sided adhesive tape is attached to the protective layer 83 , wherein the exposed adhesive layer of the double-sided adhesive tape is the adhesive 22 . In some embodiments, the glue 22 is an insulating glue.

Next, metal bumps (Metal Bumps) are formed on the bonding pads (Bonding Pads) of the circuit 23 (such as can be made by screen printing conductive glue), and then the chip 27 is fixed on the corresponding bonding pads in a flip-chip manner (such as It can be fixed by thermal compression), and filled with underfill (Underfill), so that the chip can be strengthened and fixed on the substrate without falling off easily. Finally, the base of the battery is welded on the flexible substrate 21, and the battery is put on, that is, the biological probe assembly is completed.

In some other embodiments, the probe array 115 is removable and replaceable, and related fabrication methods are exemplified as follows.

Referring to FIG. 13 , multiple sets of probe arrays 115 are formed on the conductive tape 131 by screen printing. In some embodiments, the screen printing step may be repeated multiple times to form the probes 1151 with a protrusion length ranging from 100 microns to 300 microns. In some embodiments, the probe 1151 is formed by screen printing a mixture of polymer material and silver (or conductive polymer). In some embodiments, the conductive tape 131 can be a conductive silver tape (Conductive Silver Tape), or a conductive mesh (Conductive Mesh). In some embodiments, the conductive tape 131 can be copper foil tape or aluminum foil tape. In some implementations, the base material of the conductive tape 131 includes copper, aluminum or insulating material.

Then, the conductive tape 131 is cut. In this way, after the photoresist layer 86 of the embodiment in FIG. 11 is removed, the probe array 115 can be directly attached to the pad 87 through the conductive tape 131 . Finally, the setting of the glue 22, the wafer 27, the base of the battery and the battery is completed. Due to the use of the conductive tape 131, the probe array 115 becomes removable. Therefore, if the probe array 115 is dirty, it can be replaced, so the number of times the biological probe assembly can be used can be increased and the cost can be reduced.

FIG. 14 is a cross-sectional view of a film capacitor 29 according to an embodiment of the present invention. As shown in FIG. 14 , the film capacitor 29 may include a lower electrode 141 , an upper electrode 145 , and a dielectric layer 142 . The lower electrode 141 may include P (or N) type doped polysilicon. The upper electrode includes a chrome layer 143 , a nickel layer 144 and a gold layer 145 . The dielectric layer 142 may include silicon dioxide or other insulating materials.

The technical content and technical features of the present invention have been disclosed above. However, those who are familiar with this technology may still make various substitutions and modifications based on the teaching and disclosure of the present invention without departing from the spirit of the present invention. Therefore, the protection scope of the present invention should not be limited to the content disclosed in the embodiments, but should include various replacements and modifications that do not deviate from the present invention, and are covered by the protection scope of the claims of the following applications.

Claims (21)

1. A biological probe assembly, comprising: A flexible substrate having a surface; A probe array, comprising a plurality of probes, the probe array is arranged on the surface of the flexible substrate, wherein the protruding length of each of the probes is between 100 microns and 300 microns, so that the tops of the probes only touch the on the skin without being inserted into the skin, wherein each of the probes comprises a mixture of a polymer material and silver, or each of the probes comprises a polymer conductive gel; and A sticky glue is arranged on the surface of the flexible substrate. 2. The biological probe assembly of claim 1, further comprising a circuit formed on the flexible substrate opposite to the surface, wherein the probe array is electrically connected to the circuit. 3. The biological probe assembly of claim 2, wherein the circuit includes an antenna. 4. The biological probe assembly according to claim 1, which communicates with RFID protocol, ZIGBEE protocol or Bluetooth protocol. 5. The biological probe assembly of claim 1, wherein each probe comprises a plurality of stacked segments. 6. The biological probe assembly as claimed in claim 1, further comprising a double-sided tape, wherein the double-sided tape comprises the glue. 7. The biological probe assembly of claim 1, wherein the glue covers the surface except where the probe array is located. 8. The biological probe assembly of claim 1, wherein the adhesive comprises peelable adhesive. 9. The biological probe assembly of claim 1, wherein the biological probe assembly measures the impedance or potential of an acupoint through the probe array. 10. A biological probe assembly comprising: A flexible substrate having a surface; - the first glue; A probe array, comprising a plurality of probes, wherein the first adhesive adheres the probe array to the surface of the flexible substrate, and the protruding length of each probe is between 100 microns and 300 microns , so that the tip only touches the skin without being inserted into the skin, wherein each of the probes contains a mixture of polymer materials and silver, or each of the probes contains a polymer conductive glue; and A second adhesive is disposed on the surface of the flexible substrate. 11. The biological probe assembly of claim 10, further comprising a circuit formed on the flexible substrate opposite to the surface, wherein the probe array is electrically connected to the circuit. 12. The biological probe assembly of claim 11, wherein the circuit includes an antenna. 13. The biological probe assembly according to claim 10, which communicates with RFID protocol, ZIGBEE protocol or Bluetooth protocol. 14. The biological probe assembly of claim 10, wherein each of the probes comprises a plurality of stacked sections. 15. The biological probe assembly of claim 10, wherein the first adhesive is conductive. 16. The biological probe assembly of claim 10, wherein the first adhesive comprises a peelable adhesive. 17. The biological probe assembly as claimed in claim 10, further comprising a conductive tape, the conductive tape includes a conductive adhesive, wherein the probe array is disposed on the conductive tape, and the conductive adhesive is the first Viscose. 18. The biological probe assembly of claim 10, further comprising a double-sided tape, wherein the double-sided tape includes the second adhesive. 19. The biological probe assembly of claim 10, wherein the second adhesive comprises a peelable adhesive. 20. The biological probe assembly of claim 10, wherein the second adhesive covers the surface except where the probe array is located. 21. The bioprobe assembly of claim 10, wherein the bioprobe assembly measures the impedance or potential of an acupoint through the probe array.