CN103411557A - Angular spectrum scanning quasi-confocal annular microstructure measuring device and method of array illumination - Google Patents
Angular spectrum scanning quasi-confocal annular microstructure measuring device and method of array illumination Download PDFInfo
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Abstract
阵列照明的角谱扫描准共焦环形微结构测量装置与方法属于超精密三维微细结构表面形貌测量领域；该装置设计有角谱扫描照明光路，从同心圆环光源发出的光束依次经过成像透镜、分光棱镜、显微物镜后，平行照射到圆对称被测微结构样品表面；同心圆环光源的不同圆环对应不同的角谱照明；该方法首先获得所有像素在不同角谱扫描照明下的层析图像，然后利用共焦三维测量原理，判断每个像素的轴向坐标，最后拟合出被测微结构样品的三维形貌；这种设计使圆对称被测微结构样品的每一部分都能找到对应的最佳照明角度，避免圆对称被测微结构样品自身表面轮廓的高低起伏导致的某些区域无法照明或者发生复杂反射，提高探测信号强度，降低背景噪声，提高测量精度。
The angular spectrum scanning quasi-confocal annular microstructure measurement device and method of array illumination belong to the field of ultra-precise three-dimensional microstructure surface topography measurement; the device is designed with an angular spectral scanning illumination optical path, and the light beams emitted from the concentric circular light source pass through the imaging lens in sequence , beam-splitting prism, and microscope objective lens, and then irradiate the surface of the circularly symmetrical microstructure sample in parallel; different rings of the concentric ring light source correspond to different angular spectrum illuminations; the method first obtains all pixels under different angular spectrum scanning illuminations The tomographic image, and then use the confocal three-dimensional measurement principle to judge the axial coordinates of each pixel, and finally fit the three-dimensional shape of the microstructure sample to be tested; this design makes every part of the circularly symmetrical microstructure sample measured It can find the corresponding optimal lighting angle, avoid some areas that cannot be illuminated or have complex reflections caused by the ups and downs of the surface profile of the circularly symmetrical microstructure sample itself, improve the detection signal strength, reduce background noise, and improve measurement accuracy.
Description
Technical field
The accurate confocal annular microstructure measuring device of angular spectrum scanning and the method for matrix lamp belong to ultraprecise three-dimensional microstructure measuring surface form field.
Background technology
The processed and applied of microstructure is mainly reflected in microelectric technique, microsystems technology and three aspects of micro-optic technology, as typical case's application such as computer chip, biochip and microlens arrays.Its common trait of above-mentioned technology is to have three-dimensional structure, functional structure size in micron, sub-micron or nanometer scale, micro-nanoization of this structure not only brought the energy and raw-material saving, more promote the progress of modern science and technology, directly driven the development of related industry.Along with the develop rapidly of micro-processing technology, can carry out the three-dimensional instrument detected of quick nondestructive to such sample and will have huge application prospect.
U.S. Pat 3013467, a kind of confocal imaging technology is disclosed for the first time, the confocal imaging technology of 3 optical conjugates is surveyed in this invention by introducing pointolite, some illumination and point, obtained the axial detection ability to the sample profile, what coordinate the horizontal direction objective table moves and then realizes three-dimensional measurement.Chinese patent CN1395127A, disclose a kind of confocal micro-measurement system.This invention utilizes confocal technology, by confocal light path, introducing optical interference circuit, obtains highly sensitive interferometry signal, realizes the high-acruracy survey axial to sample.U.S. Pat 6282020B1, disclose a kind of confocal microscope system based on scanning galvanometer.This invention utilizes confocal principle, converges the ability of illumination hot spot in the sample surfaces high-speed mobile by introducing the vibration mirror scanning technology, having obtained, and has realized quick confocal detection, has improved measuring speed.But above-mentioned three kinds of methods are all parallel beam to be converged to sample surfaces by microcobjective throw light on, when carrying out the three-dimensional sample measurement, height fluctuating due to sample self surface profile, to converging illuminating bundle, block, can cause some zone can't throw light on or complex reflex occurs, and then cause the decay of signal strength detection and the enhancing of ground unrest, and make measuring accuracy reduce, even can't measure.
Summary of the invention
In order to address the above problem, the invention discloses a kind of accurate confocal annular microstructure measuring device of angular spectrum scanning and method of matrix lamp, make the circle symmetry can be found corresponding optimal illumination angle by every part of micro-measuring structure sample, avoid symmetrical some zone caused by the fluctuating of the height of micro-measuring structure sample self surface profile of circle can't throw light on or complex reflex occurs, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.
The object of the present invention is achieved like this:
The accurate confocal annular microstructure measuring device of angular spectrum scanning of matrix lamp, comprise angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: donut light source, imaging len, Amici prism, the first diaphragm and microcobjective; The light beam sent from the donut light source is successively after imaging len, Amici prism, microcobjective, and parallel radiation is to symmetrical by the micro-measuring structure sample surfaces with the axially movable circle of Three Degree Of Freedom objective table; Described Three Degree Of Freedom objective table moves along three coordinate axis of cartesian coordinate system, and wherein, the z axle is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table, microcobjective, the first diaphragm, Amici prism, Guan Jing, the second diaphragm, scanning lens, one-dimensional scanning galvanometer, condenser lens, pin hole and detector; With the symmetrical light beam reflected by the micro-measuring structure sample surfaces of the axially movable circle of Three Degree Of Freedom objective table, pass through successively microcobjective, the first diaphragm, Amici prism, Guan Jing, the second diaphragm, scanning lens, one-dimensional scanning galvanometer, condenser lens, be imaged onto the pin hole position, and by detector image-forming; Described one-dimensional scanning galvanometer be take the direction vertical with plane, optical axis place and is that rotating shaft rotates;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism, the first diaphragm and microcobjective;
Described donut light source is positioned at the object plane of imaging len, and the back focal plane as plane and microcobjective of imaging len coincides with the first plane, diaphragm place; The front focal plane of Guan Jing and the back focal plane of scanning lens coincide with the second plane, diaphragm place; Pin hole is positioned at the front focal plane of condenser lens, is close to detector.
The accurate confocal annular microstructure measuring device of angular spectrum scanning of above-mentioned matrix lamp, described donut light source is LED array.
The semidiameter of adjacent two annulus of described donut light source is constant or is not constant.
The accurate confocal annular microstructure measuring device of angular spectrum scanning of above-mentioned matrix lamp, deviate from direction of beam propagation at the one-dimensional scanning galvanometer, is provided with rotating shaft.
The accurate confocal annular microstructure measuring method of angular spectrum scanning of matrix lamp comprises the following steps:
Step a, will justify and symmetrical by the thickness of micro-measuring structure sample, be divided into the N layer;
Step b, total P the locus of setting one-dimensional scanning galvanometer;
Step c, adjustment Three Degree Of Freedom objective table, make the circle symmetry be centered close on optical axis by the micro-measuring structure sample;
The order interchangeable of described step a, step b, step c;
Steps d, according to the donut quantity M in the donut light source, circle is symmetrical by the thickness layering N of micro-measuring structure sample, the locus P of one-dimensional scanning galvanometer forms M * N subtended angle spectrum illumination image, every subtended angle spectrum illumination image number of pixels is P;
Angular spectrum illumination image between different layers under step e, the identical angular spectrum illumination of definition is tomographic map, the axial envelope curve of contrast same spatial location between the tomographic map under M angular spectrum illumination, pick out near the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, the axial coordinate of P locus point of judgement;
Step f, according to P locus point and axial coordinate thereof, simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample.
The accurate confocal annular microstructure measuring method of angular spectrum scanning of above-mentioned matrix lamp, described steps d is specially:
Steps d 1: symmetrical by the micro-measuring structure sample by Three Degree Of Freedom objective table adjustment circle, make every one deck in the N layer be placed in successively the front focal plane of microcobjective;
Steps d 2: by lighting successively M annulus in the donut light source, form and thrown light on by the M of a micro-measuring structure sample angular spectrum to circle is symmetrical;
Steps d 3: by adjusting P locus of one-dimensional scanning galvanometer, realize the collection of detector to illumination image;
Described steps d 1, steps d 2, steps d 3 form three and recirculate, and circular order from outside to inside is followed successively by following order:
Steps d 1, steps d 2, steps d 3;
Steps d 1, steps d 3, steps d 2;
Steps d 2, steps d 1, steps d 3;
Steps d 2, steps d 3, steps d 1;
Final M * N subtended angle spectrum the illumination image that forms, every subtended angle spectrum illumination image number of pixels is P.
Because the present invention is designed with illumination path, make the parallel circle symmetry that incides of illuminating bundle by the micro-measuring structure sample surfaces, and by the different annular of lighting the donut light source, change the irradiating angle of illuminating bundle, and utilize confocal three-dimensional measurement principle, simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample; This design makes the circle symmetry can be found corresponding optimal illumination angle by every part of micro-measuring structure sample, avoid symmetrical some zone caused by the fluctuating of the height of micro-measuring structure sample self surface profile of circle can't throw light on or complex reflex occurs, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.
The accompanying drawing explanation
Fig. 1 is the accurate confocal annular microstructure measuring device structural representation of angular spectrum scanning of matrix lamp of the present invention.
Fig. 2 is the accurate confocal annular microstructure measuring device angular spectrum scanning illumination path figure of the angular spectrum scanning of matrix lamp of the present invention.
Fig. 3 is the accurate confocal measurement index path of the accurate confocal annular microstructure measuring device of angular spectrum scanning of matrix lamp of the present invention.
Fig. 4 is the accurate confocal annular microstructure measuring method process flow diagram of angular spectrum scanning of matrix lamp of the present invention.
In figure: 1 donut light source, 2 imaging lens, 3 Amici prisms, 4 first diaphragms, 5 microcobjectives, 6 Three Degree Of Freedom objective tables, 7 pipe mirrors, 8 second diaphragms, 9 scanning lenses, 10 one-dimensional scanning galvanometers, 11 condenser lenses, 12 pin holes, 13 detectors.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
So-called angular spectrum scanning illumination, be to realize continuously changing or the incident angle of discrete change directional light by the micro-measuring structure sample surfaces and by scanning mechanism or other technological means with parallel beam illumination, the description of this kind lighting system in frequency domain is angular spectrum scanning illumination.
Confocal measurement method is: the method for utilizing some illumination, some thing and point to survey 3 optical conjugates realizes the measurement capability of optical axis direction, and then completes three-dimensional measurement.The accurate confocal measurement method of mentioning in this patent is: utilize angular spectrum scanning illumination to replace the some illumination, retention point thing and point are surveyed the method for 2 optical conjugates simultaneously.The method had both retained the three-dimensional measurement ability of confocal measurement, introduced simultaneously angular spectrum scanning illumination, improved signal strength detection, reduced ground unrest, and then improved measuring accuracy.
Specific embodiment one:
As shown in Figure 1, as shown in Figure 2, accurate confocal measurement index path as shown in Figure 3 for angular spectrum scanning illumination path figure for the accurate confocal annular microstructure measuring device structural representation of angular spectrum scanning of the matrix lamp of the present embodiment.
This measurement mechanism comprises angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: donut light source 1, imaging len 2, Amici prism 3, the first diaphragm 4 and microcobjective 5; The light beam sent from donut light source 1 is successively after imaging len 2, Amici prism 3, microcobjective 5, and parallel radiation is to symmetrical by the micro-measuring structure sample surfaces with the axially movable circle of Three Degree Of Freedom objective table 6; Described Three Degree Of Freedom objective table 6 moves along three coordinate axis of cartesian coordinate system, and wherein, the z axle is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table 6, microcobjective 5, the first diaphragm 4, Amici prism 3, pipe mirror 7, the second diaphragm 8, scanning lens 9, one-dimensional scanning galvanometer 10, condenser lens 11, pin hole 12 and detector 13; With the symmetrical light beam reflected by the micro-measuring structure sample surfaces of the axially movable circle of Three Degree Of Freedom objective table 6 process microcobjective 5, the first diaphragm 4, Amici prism 3, pipe mirror 7, the second diaphragm 8, scanning lens 9, one-dimensional scanning galvanometer 10, condenser lens 11 successively, be imaged onto pin hole 12 positions, and by detector 13 imagings; Described one-dimensional scanning galvanometer 10 be take the direction vertical with plane, optical axis place and is that rotating shaft rotates;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism 3, the first diaphragm 4 and microcobjective 5;
Described donut light source 1 is positioned at the object plane of imaging len 2, and the back focal plane as plane and microcobjective 5 of imaging len 2 coincides with the first diaphragm 4 planes, place; The front focal plane of pipe mirror 7 and the back focal plane of scanning lens 9 coincide with the second diaphragm 8 planes, place; Pin hole 12 is positioned at the front focal plane of condenser lens 11, is close to detector 13.
The accurate confocal annular microstructure measuring device of angular spectrum scanning of above-mentioned matrix lamp, described donut light source 1 is LED array, the left view of donut light source 1 has been drawn in the top of the donut light source 1 in Fig. 1; The semidiameter of adjacent two annulus of donut light source 1 is constant.
The accurate confocal annular microstructure measuring device of angular spectrum scanning of above-mentioned matrix lamp, deviate from direction of beam propagation at one-dimensional scanning galvanometer 10, is provided with electric rotation shaft, realizes the position to one-dimensional scanning galvanometer 10 locus.
As shown in Figure 4, the method comprises the following steps the accurate confocal annular microstructure measuring method process flow diagram of angular spectrum scanning of the matrix lamp of the present embodiment:
Step a, will justify and symmetrical by the thickness of micro-measuring structure sample, be divided into the N layer;
Step b, setting one-dimensional scanning galvanometer 10 total P locus;
Step c, adjustment Three Degree Of Freedom objective table 6, make the circle symmetry be centered close on optical axis by the micro-measuring structure sample;
The order interchangeable of described step a, step b, step c;
Steps d, according to the donut quantity M in donut light source 1, circle is symmetrical by the thickness layering N of micro-measuring structure sample, the locus P of one-dimensional scanning galvanometer 10 forms M * N subtended angle spectrum illumination image, every subtended angle spectrum illumination image number of pixels is P;
Angular spectrum illumination image between different layers under step e, the identical angular spectrum illumination of definition is tomographic map, the axial envelope curve of contrast same spatial location between the tomographic map under M angular spectrum illumination, pick out near the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, the axial coordinate of P locus point of judgement;
Step f, according to P locus point and axial coordinate thereof, simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample.
Wherein steps d is specially:
Steps d 1: adjust circle by Three Degree Of Freedom objective table 6 symmetrical by the micro-measuring structure sample, make every one deck in the N layer be placed in successively the front focal plane of microcobjective 5;
Steps d 2: by lighting successively M annulus in donut light source 1, form and thrown light on by the M of a micro-measuring structure sample angular spectrum to circle is symmetrical;
Steps d 3: by adjusting P locus of one-dimensional scanning galvanometer 10, realize the collection of 13 pairs of illumination images of detector;
Described steps d 1, steps d 2, steps d 3 form three and recirculate, and circular order from outside to inside is followed successively by: steps d 1, steps d 2, steps d 3, finally form M * N subtended angle spectrum illumination image, and every subtended angle spectrum illumination image number of pixels is P.
Specific embodiment two
The present embodiment is from the different of specific embodiment one, and the semidiameter of adjacent two annulus of described donut light source 1 is not constant, and its beneficial effect is can be to accurate adjustment more in certain illumination angle spectral limit.
Specific embodiment three
The present embodiment is from the different of specific embodiment one, and in the accurate confocal annular microstructure measuring method of angular spectrum scanning of described matrix lamp, steps d preferably three orders that recirculate is steps d 3, steps d 1, steps d 2; Make the fastest steps d of execution speed 2 be placed on innermost layer, the slowest steps d 3 of execution speed is placed on outermost layer, and its beneficial effect is to reduce the used time of angular spectrum illumination image, improves circle symmetrical by the three-dimensional appearance reconstruct efficiency of micro-measuring structure sample.
Claims (6)
1. the accurate confocal annular microstructure measuring device of the angular spectrum of matrix lamp scanning, is characterized in that: comprise angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: donut light source (1), imaging len (2), Amici prism (3), the first diaphragm (4) and microcobjective (5); The light beam sent from donut light source (1) is successively after imaging len (2), Amici prism (3), microcobjective (5), and parallel radiation is to symmetrical by the micro-measuring structure sample surfaces with the axially movable circle of Three Degree Of Freedom objective table (6); Described Three Degree Of Freedom objective table (6) moves along three coordinate axis of cartesian coordinate system, and wherein, the z axle is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table (6), microcobjective (5), the first diaphragm (4), Amici prism (3), Guan Jing (7), the second diaphragm (8), scanning lens (9), one-dimensional scanning galvanometer (10), condenser lens (11), pin hole (12) and detector (13); With the symmetrical light beam reflected by the micro-measuring structure sample surfaces of the axially movable circle of Three Degree Of Freedom objective table (6), pass through successively microcobjective (5), the first diaphragm (4), Amici prism (3), Guan Jing (7), the second diaphragm (8), scanning lens (9), one-dimensional scanning galvanometer (10), condenser lens (11), be imaged onto pin hole (12) position, and by detector (13) imaging; Described one-dimensional scanning galvanometer (10) be take the direction vertical with plane, optical axis place and is that rotating shaft rotates;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism (3), the first diaphragm (4) and microcobjective (5);
Described donut light source (1) is positioned at the object plane of imaging len (2), and the picture plane of imaging len (2) and the back focal plane of microcobjective (5) coincide with the first diaphragm (4) plane, place; The back focal plane of the front focal plane of Guan Jing (7) and scanning lens (9) coincides with the second diaphragm (8) plane, place; Pin hole (12) is positioned at the front focal plane of condenser lens (11), is close to detector (13).
2. the angular spectrum of matrix lamp according to claim 1 scans accurate confocal annular microstructure measuring device, and it is characterized in that: described donut light source (1) is LED array.
3. the angular spectrum of matrix lamp according to claim 2 scans accurate confocal annular microstructure measuring device, it is characterized in that: the semidiameter of adjacent two annulus of described donut light source (1) is constant or is not constant.
4. the accurate confocal annular microstructure measuring device of the angular spectrum of matrix lamp according to claim 1 scanning, is characterized in that: at one-dimensional scanning galvanometer (10), deviate from direction of beam propagation, be provided with rotating shaft.
5. the angular spectrum of matrix lamp scans accurate confocal annular microstructure measuring method, it is characterized in that: said method comprising the steps of:
Step a, will justify and symmetrical by the thickness of micro-measuring structure sample, be divided into the N layer;
Step b, total P the locus of setting one-dimensional scanning galvanometer (10);
Step c, adjustment Three Degree Of Freedom objective table (6), make the circle symmetry be centered close on optical axis by the micro-measuring structure sample;
The order interchangeable of described step a, step b, step c;
Steps d, according to the donut quantity M in donut light source (1), circle is symmetrical by the thickness layering N of micro-measuring structure sample, the locus P of one-dimensional scanning galvanometer (10), form M * N subtended angle spectrum illumination image, and every subtended angle spectrum illumination image number of pixels is P;
Angular spectrum illumination image between different layers under step e, the identical angular spectrum illumination of definition is tomographic map, the axial envelope curve of contrast same spatial location between the tomographic map under M angular spectrum illumination, pick out near the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, the axial coordinate of P locus point of judgement;
Step f, according to P locus point and axial coordinate thereof, simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample.
6. the angular spectrum of matrix lamp according to claim 5 scans accurate confocal annular microstructure measuring method, and it is characterized in that: described steps d is specially:
Steps d 1: adjust circle by Three Degree Of Freedom objective table (6) symmetrical by the micro-measuring structure sample, make every one deck in the N layer be placed in successively the front focal plane of microcobjective (5);
Steps d 2: by lighting successively M annulus in donut light source (1), form and thrown light on by the M of a micro-measuring structure sample angular spectrum to circle is symmetrical;
Steps d 3: by adjusting P locus of one-dimensional scanning galvanometer (10), realize the collection of detector (13) to illumination image;
Described steps d 1, steps d 2, steps d 3 form three and recirculate, and circular order from outside to inside is followed successively by following order:
Steps d 1, steps d 2, steps d 3;
Steps d 1, steps d 3, steps d 2;
Steps d 2, steps d 1, steps d 3;
Steps d 2, steps d 3, steps d 1;
Steps d 3, steps d 1, steps d 2;
Steps d 3, steps d 2, steps d 1;
Final M * N subtended angle spectrum the illumination image that forms, every subtended angle spectrum illumination image number of pixels is P.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104359424A (en) * | 2014-10-09 | 2015-02-18 | 无锡中科光电技术有限公司 | Ellipsoid mirror surface shape detection device and method |
| CN105043988A (en) * | 2015-09-21 | 2015-11-11 | 哈尔滨工业大学 | Single-point deconvolution microscopic system and imaging method based on scanning galvanometers |
| CN106949969A (en) * | 2017-03-29 | 2017-07-14 | 长春理工大学 | Multispectral interferometer based on homocentric sphere concentrating element |
| CN107037016A (en) * | 2016-02-04 | 2017-08-11 | 北京世纪桑尼科技有限公司 | A kind of confocal optical scanner |
| CN107479189A (en) * | 2017-08-14 | 2017-12-15 | 中国科学院西安光学精密机械研究所 | Non-paraxial self-acceleration light beam generation method and device based on angular spectrum regulation |
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| CN112859540A (en) * | 2015-05-19 | 2021-05-28 | 科磊股份有限公司 | Imaging metrology targets and methods |
| CN113834439A (en) * | 2021-09-15 | 2021-12-24 | 清华大学深圳国际研究生院 | Fresnel grating micro-lens array, spectrometer and spectrum confocal surface type measuring system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05248830A (en) * | 1992-03-03 | 1993-09-28 | Koyo Seiko Co Ltd | Three-dimensional shape measuring apparatus |
| JP2004325355A (en) * | 2003-04-25 | 2004-11-18 | Topcon Corp | Three-dimensional coordinate measuring device and method |
| CN1815137A (en) * | 2006-03-14 | 2006-08-09 | 清华大学 | Array vertical cavity-surface transmission laser confocal microscopic system |
| CN101050949A (en) * | 2007-05-22 | 2007-10-10 | 天津大学 | Measuring system and its measuring method for large field object micro surface three dimension topography |
| CN103190889A (en) * | 2013-04-17 | 2013-07-10 | 北京大学 | Real-time tunable confocal microscopic imaging system |
-
2013
- 2013-08-15 CN CN201310355081.2A patent/CN103411557B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05248830A (en) * | 1992-03-03 | 1993-09-28 | Koyo Seiko Co Ltd | Three-dimensional shape measuring apparatus |
| JP2004325355A (en) * | 2003-04-25 | 2004-11-18 | Topcon Corp | Three-dimensional coordinate measuring device and method |
| CN1815137A (en) * | 2006-03-14 | 2006-08-09 | 清华大学 | Array vertical cavity-surface transmission laser confocal microscopic system |
| CN101050949A (en) * | 2007-05-22 | 2007-10-10 | 天津大学 | Measuring system and its measuring method for large field object micro surface three dimension topography |
| CN103190889A (en) * | 2013-04-17 | 2013-07-10 | 北京大学 | Real-time tunable confocal microscopic imaging system |
Non-Patent Citations (1)
| Title |
|---|
| 刘俭: "《超分辨移相共焦和复色差动共焦扫描显微技术及理论》", 《中国博士学位论文全文数据库 工程科技Ⅱ辑 》 * |
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| CN104359424B (en) * | 2014-10-09 | 2017-04-19 | 无锡中科光电技术有限公司 | Ellipsoid mirror surface shape detection device and method |
| CN112859540A (en) * | 2015-05-19 | 2021-05-28 | 科磊股份有限公司 | Imaging metrology targets and methods |
| CN105043988A (en) * | 2015-09-21 | 2015-11-11 | 哈尔滨工业大学 | Single-point deconvolution microscopic system and imaging method based on scanning galvanometers |
| CN105043988B (en) * | 2015-09-21 | 2017-10-13 | 哈尔滨工业大学 | Single-point based on scanning galvanometer deconvolutes microscopic system and imaging method |
| CN107037016A (en) * | 2016-02-04 | 2017-08-11 | 北京世纪桑尼科技有限公司 | A kind of confocal optical scanner |
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