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CN103386679B - Multi-micro part coplane adjusting platform and method based on microscopic vision depth of field - Google Patents

Multi-micro part coplane adjusting platform and method based on microscopic vision depth of field Download PDF

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CN103386679B
CN103386679B CN201310292336.5A CN201310292336A CN103386679B CN 103386679 B CN103386679 B CN 103386679B CN 201310292336 A CN201310292336 A CN 201310292336A CN 103386679 B CN103386679 B CN 103386679B
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micro
platform
parts
vision system
field
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CN103386679A (en
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刘松
张大朋
李海鹏
张正涛
徐德
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Institute of Automation of Chinese Academy of Science
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Abstract

本发明公开了一种基于单路显微视觉的多微小零件共面调整工作平台及相应的方法。所述平台包括:运动平台A、运动平台B、显微视觉系统、夹持器基座、俯仰平台、夹持器、微零件和计算机。所述方法包括以下步骤:首先将显微视觉系统调整至最大视野,并调整各微小零件移入视野,使各零件在图像上清晰成像;然后对图像做出处理,得到各个零件在图像中的位置,计算得到使各个零件移动至视野中心夹持器所需的运动量;最后将某一个微小零件移至视野中心,将视觉系统调整至最小视野对该零件精确对焦;然后将各个零件依次移动至视野中心,使得各个微小零件均在视觉系统下得到清晰图像。本发明达到了微米量级的共面调整精度,且简单易行、执行效率高。

The invention discloses a multi-micro parts coplanar adjustment work platform based on single-channel microscopic vision and a corresponding method. The platform includes: a motion platform A, a motion platform B, a microscopic vision system, a holder base, a pitch platform, a holder, micro parts and a computer. The method includes the following steps: firstly adjust the microscopic vision system to the maximum field of view, and adjust each tiny part to move into the field of view, so that each part can be clearly imaged on the image; then process the image to obtain the position of each part in the image , calculate the amount of movement required to move each part to the gripper at the center of the field of view; finally move a tiny part to the center of the field of view, adjust the vision system to the minimum field of view to precisely focus on the part; then move each part to the field of view in turn Center, so that each tiny part can get a clear image under the vision system. The invention achieves the coplanar adjustment precision of micron level, is simple and easy to implement, and has high execution efficiency.

Description

一种基于显微视觉景深的多微小零件共面调整平台及方法A coplanar adjustment platform and method for multi-miniature parts based on microscopic vision depth of field

技术领域technical field

本发明属于微装配技术领域中的显微视觉测量和控制,具体地说是一种基于显微视觉景深的多微小零件共面调整平台及方法。The invention belongs to microscopic vision measurement and control in the field of micro-assembly technology, in particular to a coplanar adjustment platform and method for multi-miniature parts based on microscopic vision depth of field.

背景技术Background technique

随着微机电系统的快速发展,装配流程趋于复杂化,常常涉及对多个微小零件在某二维平面内共面调整的问题。先进的多微小零件共面调整技术对于缩短微小型产品的生产周期,降低成本等方面具有重要意义,同时显微视觉在微装配中应用广泛。本发明基于纤维视觉系统的特殊性,利用了显微视觉系统小景深的特点,提出了一种全新的多零件共面调整平台及方法,实现了微米级的共面调整精度,能够满足微装配系统的要求。With the rapid development of micro-electro-mechanical systems, the assembly process tends to become more complicated, often involving the coplanar adjustment of multiple tiny parts in a certain two-dimensional plane. The advanced coplanar adjustment technology of multiple micro-parts is of great significance for shortening the production cycle of micro-miniature products and reducing costs. At the same time, microscopic vision is widely used in micro-assembly. Based on the particularity of the fiber vision system, this invention utilizes the characteristics of the small depth of field of the microscopic vision system, and proposes a brand-new multi-part coplanar adjustment platform and method, which realizes micron-level coplanar adjustment accuracy and can meet the needs of micro-assembly system requirements.

发明内容Contents of the invention

为了解决微装配过程中的多微小零件的共面调整问题,本发明的目的在于提供一种能够满足微小零件在二维平面内实现快速共面调整平台及方法。本发明利用了显微视觉景深小的特点,即小放大倍率大视野情况对应大景深,大放大倍率小视野情况对应小景深,但小视野下无法看到全部零件,因此本发明的调整方法分粗调和精调两步。In order to solve the problem of coplanar adjustment of multiple tiny parts in the micro-assembly process, the purpose of the present invention is to provide a platform and method that can meet the requirements of fast coplanar adjustment of tiny parts in a two-dimensional plane. The present invention utilizes the characteristics of small depth of field in microscopic vision, that is, a large field of view with a small magnification corresponds to a large depth of field, and a small field of view with a large magnification corresponds to a small depth of field, but all parts cannot be seen under a small field of view, so the adjustment method of the present invention is divided into There are two steps of coarse tuning and fine tuning.

为实现上述目的,根据本发明的一方面,提供一种基于显微视觉景深的多微小零件共面调整工作平台,该平台包括:运动平台A、运动平台B、显微视觉系统、夹持器基座、俯仰平台、夹持器、固定在夹持器夹持端的微零件以及计算机,其中:In order to achieve the above object, according to one aspect of the present invention, a coplanar adjustment work platform for multi-miniature parts based on microscopic vision depth of field is provided, the platform includes: motion platform A, motion platform B, microscopic vision system, gripper A base, a tilting platform, a gripper, a micropart secured to the clamping end of the gripper, and a computer, wherein:

所述运动平台A具有垂直方向的1个平移自由度,固定在隔振平台上;The motion platform A has one translational degree of freedom in the vertical direction and is fixed on the vibration isolation platform;

所述显微视觉系统包括CCD摄像机和显微镜头,所述CCD摄像机固定在所述运动平台A上;所述显微镜头安装在所述CCD摄像机上;The microscopic vision system includes a CCD camera and a microscope lens, and the CCD camera is fixed on the moving platform A; the microscope lens is installed on the CCD camera;

所述运动平台B具有3个平移自由度,固定在隔振平台上;所述夹持器基座安装在所述运动平台B上,并位于所述显微镜头的正下方;所述俯仰平台固定在所述夹持器基座上;所述夹持器固定在所述俯仰平台上;所述微零件固定在所述夹持器的夹持端上;The motion platform B has 3 translational degrees of freedom and is fixed on the vibration isolation platform; the holder base is installed on the motion platform B and is located directly below the microscope lens; the pitch platform is fixed on the holder base; the holder is fixed on the pitch platform; the micro parts are fixed on the clamping end of the holder;

所述计算机与所述CCD摄像机连接,用于从所述CCD摄像机中读取图像;The computer is connected with the CCD camera for reading images from the CCD camera;

所述平台工作时,通过移动运动平台A对基准微零件聚焦,通过移动运动平台B将各个微零件依次运动到显微镜头下,通过调整俯仰平台对运动到显微镜头下的微零件进行聚焦。When the platform is working, focus on the reference micro-parts by moving the motion platform A, move each micro-part under the microscope lens in turn by moving the motion platform B, and focus on the micro-parts moving under the microscope lens by adjusting the pitch platform.

根据本发明的另一方面,还提供一种基于所述平台、基于显微视觉景深对多微小零件进行共面调整的方法,该方法包括以下步骤:According to another aspect of the present invention, there is also provided a method for coplanar adjustment of multi-tiny parts based on the platform and based on the depth of field of microscopic vision, the method includes the following steps:

步骤S1:将各个微小零件安装到相应夹持器的夹持端上,移动运动平台B,使得所有微小零件均位于显微视觉系统的视野范围内;Step S1: Install each tiny part on the clamping end of the corresponding holder, and move the motion platform B so that all the tiny parts are within the field of view of the microscopic vision system;

步骤S2:调整各个微小零件所在夹持端的俯仰角自由度,使得各个微小零件处于一个平面内;Step S2: Adjust the degree of freedom of the pitch angle of the clamping end where each tiny part is located, so that each tiny part is in a plane;

步骤S3:将显微视觉系统调整到最大视野,对所述微小零件进行聚焦,获得所述微小零件的清晰图像;Step S3: adjusting the microscopic vision system to the maximum field of view, focusing on the tiny parts, and obtaining a clear image of the tiny parts;

步骤S4:调整未获得清晰图像的微小零件所在夹持器的夹持端的俯仰角自由度,使得所有微小零件均清晰成像,在大视野下可以看到所有的微小零件。Step S4: Adjust the degree of freedom of the pitch angle of the clamping end of the holder where the tiny parts that have not obtained a clear image are adjusted, so that all the tiny parts are clearly imaged, and all the tiny parts can be seen in a large field of view.

本发明在粗调阶段合理的利用较大视野获得各个微小零件的位置,并实现初步调平;在精调阶段,通过移动夹持器所在运动平台依次将各个微小零件移动到视野内,然后通过调整各微小零件对应的夹持器的夹持端的俯仰角自由度实现对各个微小零件的精确对焦。通过上述步骤,可以快速自动地实现多微小零件的共面调整,并达到很高的调整精度,提高了操作效率。In the coarse adjustment stage, the present invention rationally uses a large field of view to obtain the position of each tiny part, and realizes preliminary leveling; The degree of freedom of the pitch angle of the clamping end of the holder corresponding to each tiny part is adjusted to realize precise focusing on each tiny part. Through the above steps, the coplanar adjustment of many tiny parts can be realized quickly and automatically, and high adjustment accuracy can be achieved, thereby improving the operation efficiency.

本发明的有益效果是:1)实现了多微小零件在二维平面的自动共面调整;2)通过对工作平台的合理设计实现了对多微小零件的快速自动共面调整,并且达到微米量级的共面调整精度;3)方法简单易行、执行效率高。The beneficial effects of the present invention are: 1) realize the automatic coplanar adjustment of multi-miniature parts on a two-dimensional plane; Level coplanar adjustment accuracy; 3) The method is simple and easy to implement, and the execution efficiency is high.

附图说明Description of drawings

图1为本发明基于显微视觉景深的多微小零件共面调整工作平台结构示意图。Fig. 1 is a schematic diagram of the structure of the multi-miniature parts coplanar adjustment work platform based on the microscopic vision depth of field of the present invention.

图2为本发明基于显微视觉景深的多微小零件共面调整方法的流程图。FIG. 2 is a flow chart of the method for coplanar adjustment of multiple tiny parts based on microscopic vision depth of field in the present invention.

具体实施方式Detailed ways

为使本发明的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本发明进一步详细说明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

请参阅图1示出的本发明基于显微视觉景深的多微小零件共面调整工作平台结构示意图,如图1所示,所述工作平台包括:运动平台A、运动平台B、显微视觉系统、夹持器基座、俯仰平台、夹持器、固定在夹持器夹持端的微零件以及计算机,其中:Please refer to the schematic diagram of the structure of the multi-miniature parts coplanar adjustment working platform based on the microscopic vision depth of field of the present invention shown in Fig. 1. As shown in Fig. 1, the working platform includes: a motion platform A, a motion platform B, and a microscopic vision system , a gripper base, a tilting platform, a gripper, micro parts fixed on the clamping end of the gripper, and a computer, wherein:

所述运动平台A具有垂直方向的1个平移自由度,固定在隔振平台上;The motion platform A has one translational degree of freedom in the vertical direction and is fixed on the vibration isolation platform;

所述显微视觉系统包括CCD摄像机和显微镜头,所述CCD摄像机固定在所述运动平台A上;所述显微镜头安装在所述CCD摄像机上;The microscopic vision system includes a CCD camera and a microscope lens, and the CCD camera is fixed on the moving platform A; the microscope lens is installed on the CCD camera;

所述运动平台B具有3个平移自由度,固定在隔振平台上;所述夹持器基座安装在所述运动平台B上,并位于所述显微镜头的正下方;所述俯仰平台固定在所述夹持器基座上;所述夹持器固定在所述俯仰平台上;所述微零件固定在所述夹持器的夹持端上;其中,所述俯仰平台和夹持器的数目取决于需要共面调整的微零件的数目;The motion platform B has 3 translational degrees of freedom and is fixed on the vibration isolation platform; the holder base is installed on the motion platform B and is located directly below the microscope lens; the pitch platform is fixed On the holder base; the holder is fixed on the pitching platform; the micro parts are fixed on the clamping end of the holder; wherein, the pitching platform and the holder The number of depends on the number of microparts requiring coplanar adjustment;

所述计算机与所述CCD摄像机连接,用于从所述CCD摄像机中读取图像。The computer is connected with the CCD camera for reading images from the CCD camera.

基于上述平台,通过移动运动平台A、运动平台B以及俯仰平台都可以调整微零件到显微镜头之间的距离,直至在CCD摄像机中得到清晰聚焦的图像。Based on the above platform, the distance between the micro parts and the microscope lens can be adjusted by moving the moving platform A, moving platform B and tilting platform until a clearly focused image is obtained in the CCD camera.

所述平台工作时,通过移动运动平台A对基准微零件聚焦,通过移动运动平台B将各个微零件依次运动到显微镜头下,通过调整俯仰平台对运动到显微镜头下的微零件进行聚焦。When the platform is working, focus on the reference micro-parts by moving the motion platform A, move each micro-part under the microscope lens in turn by moving the motion platform B, and focus on the micro-parts moving under the microscope lens by adjusting the pitch platform.

请参阅图2示出的本发明基于所述工作平台的基于显微视觉景深的多微小零件共面调整方法的流程图,如图2所示,该方法包括以下步骤:Please refer to the flow chart of the present invention shown in FIG. 2 based on the microscopic vision depth of field based on the microscopic vision depth of field of the present invention. As shown in FIG. 2, the method includes the following steps:

步骤S1:将各个微小零件安装到相应夹持器的夹持端上,移动运动平台B,使得所有微小零件均位于显微视觉系统的视野范围内;Step S1: Install each tiny part on the clamping end of the corresponding holder, and move the motion platform B so that all the tiny parts are within the field of view of the microscopic vision system;

步骤S2:调整各个微小零件所在夹持端的俯仰角自由度,使得各个微小零件处于一个平面内;Step S2: Adjust the degree of freedom of the pitch angle of the clamping end where each tiny part is located, so that each tiny part is in a plane;

步骤S3:将显微视觉系统调整到最大视野,对所述微小零件进行聚焦,获得所述微小零件的清晰图像;Step S3: adjusting the microscopic vision system to the maximum field of view, focusing on the tiny parts, and obtaining a clear image of the tiny parts;

步骤S4:调整未获得清晰图像的微小零件所在夹持器的夹持端的俯仰角自由度,使得所有微小零件均清晰成像,在大视野下可以看到所有的微小零件;Step S4: Adjust the degree of freedom of the pitch angle of the clamping end of the holder where the tiny parts that have not obtained a clear image are adjusted, so that all the tiny parts are clearly imaged, and all the tiny parts can be seen in a large field of view;

步骤S5:通过清晰成像的微小零件图像获取各个微小零件在图像中的位置,并计算得到将各个微小零件运动到显微视觉系统的视野中心所需要的运动平台B的运动量;Step S5: Obtain the position of each tiny part in the image through the clearly imaged image of the tiny part, and calculate the movement amount of the motion platform B required to move each tiny part to the center of the field of view of the microscopic vision system;

步骤S6:将显微视觉系统调整到最大放大倍率,并适当增加曝光时间作为曝光补偿;Step S6: Adjust the microscopic vision system to the maximum magnification, and appropriately increase the exposure time as exposure compensation;

步骤S7:通过移动运动平台A使得所述显微视觉系统对某一个微小零件对焦,获得清晰图像;Step S7: Make the microscopic vision system focus on a certain tiny part by moving the motion platform A to obtain a clear image;

步骤S8:所述显微视觉系统保持固定不动,依次将各个微小零件运动到显微视觉系统的视野中心,通过调整各微小零件所在夹持端的俯仰角自由度,使各个微小零件分别清晰聚焦,也就是说,此时在最大放大倍率下仅能看到该零件,其余零件不在视野内;Step S8: The microscopic vision system remains fixed, and each tiny part is moved to the center of the field of view of the microscopic vision system in turn, and each tiny part is clearly focused by adjusting the degree of freedom of the pitch angle of the clamping end where each tiny part is located , that is to say, only this part can be seen under the maximum magnification at this time, and the rest of the parts are out of view;

在实施中,步骤S1到步骤S4是粗调过程,通过步骤S1到步骤S4,各个微小零件的共面精度能限制在显微视觉系统的最大景深范围内,如果此时满足装配要求,则精调步骤可以省略;步骤S5到步骤S8是精调过程,由于显微视觉系统在小视野下无法看到全部的微小零件,因此需要提取各个微小零件在图像中的位置,以便于依次将各个微小零件移动到视野中心,通过精调过程就能够把共面调整的精度限制在视觉系统的最小景深范围内。In practice, steps S1 to S4 are rough adjustment processes. Through steps S1 to S4, the coplanar accuracy of each tiny part can be limited within the maximum depth of field of the microscopic vision system. If the assembly requirements are met at this time, then fine The adjustment step can be omitted; step S5 to step S8 is a fine adjustment process, because the microscopic vision system cannot see all the tiny parts in a small field of view, so it is necessary to extract the position of each tiny part in the image, so that each tiny part can be sequentially The part moves to the center of the field of view, and through the fine adjustment process, the accuracy of the coplanar adjustment can be limited to the minimum depth of field of the vision system.

可见,本发明能够在显微视觉的引导下,快速而且有效地实现多微小零件的共面调整。It can be seen that the present invention can quickly and effectively realize the coplanar adjustment of multiple tiny parts under the guidance of microscopic vision.

以上所述的具体实施例,对本发明的目的、技术方案和有益效果进行了进一步详细说明,所应理解的是,以上所述仅为本发明的具体实施例而已,并不用于限制本发明,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The specific embodiments described above have further described the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above descriptions are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims (5)

1. the coplanar adjustment workbench of the many micro parts based on the micro-vision depth of field, it is characterized in that, this workbench comprises: motion platform A, motion platform B, micro-vision system, holder seat, pitching platform, clamper, the micro-part being fixed on gripper end and computer, wherein:
Described motion platform A has 1 translation freedoms of vertical direction, is fixed on vibration-isolating platform;
Described micro-vision system comprises ccd video camera and microlens, and described ccd video camera is fixed on described motion platform A; Described microlens is arranged on described ccd video camera;
Described motion platform B has 3 translation freedoms, is fixed on vibration-isolating platform; Described holder seat is arranged on described motion platform B, and is positioned at immediately below described microlens; Described pitching platform is fixed on described holder seat; Described clamper is fixed on described pitching platform; Described micro-part is fixed on the bare terminal end of described clamper;
Described computer is connected with described ccd video camera, for reading images from described ccd video camera;
During described workbench work, by moving movement platform A, the micro-part of benchmark is focused on, under each micro-part being moved to microlens successively by moving movement platform B, by adjustment pitching platform, the micro-part moved under microlens is focused on.
2. workbench according to claim 1, is characterized in that, the number of described pitching platform and clamper depends on the number of micro-part of the coplanar adjustment of needs.
3. based on the micro-vision depth of field, many micro parts are carried out to a method for coplanar adjustment, the method adopts workbench according to claim 1, it is characterized in that, the method comprises the following steps:
Step S1: be installed to by each micro parts on the bare terminal end of respective clamp device, moving movement platform B, make all micro parts all be positioned at micro-vision system within sweep of the eye;
Step S2: the angle of pitch free degree adjusting each micro parts place bare terminal end, makes each micro parts be in a plane;
Step S3: micro-vision system is adjusted to absolute visual field, focuses on described micro parts, obtains the picture rich in detail of described micro parts;
Step S4: the angle of pitch free degree adjusting the bare terminal end of the micro parts place clamper do not got a distinct image, makes the equal blur-free imaging of all micro parts, can see all micro parts under absolute visual field.
4. method according to claim 3, is characterized in that, if also do not meet matching requirements for the adjustment of described micro parts, then described method is further comprising the steps of:
Step S5: by each micro parts of micro parts Image Acquisition position in the picture of blur-free imaging, and calculate the amount of exercise of the motion platform B required for the central region each micro parts being moved to micro-vision system;
Step S6: micro-vision system is adjusted to maximum amplification times yield;
Step S7: by moving movement platform A, described micro-vision system is focused to some micro parts, get a distinct image;
Step S8: described micro-vision system keeps maintaining static, and successively each micro parts is moved to the central region of micro-vision system, by adjusting the angle of pitch free degree of each micro parts place bare terminal end, makes the clear focusing respectively of each micro parts.
5. method according to claim 4, is characterized in that, described step S6 also comprises increases the step of time for exposure as exposure compensating.
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