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CN103381522A - Optical system for processing laser dots - Google Patents

Optical system for processing laser dots Download PDF

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Publication number
CN103381522A
CN103381522A CN2012101315866A CN201210131586A CN103381522A CN 103381522 A CN103381522 A CN 103381522A CN 2012101315866 A CN2012101315866 A CN 2012101315866A CN 201210131586 A CN201210131586 A CN 201210131586A CN 103381522 A CN103381522 A CN 103381522A
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laser
mirror
optical system
transmitted light
processed
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陈柏洲
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Abstract

本发明涉及一种激光网点加工的光学系统,其包括一激光光源,一面对该激光光源的极化分光镜,一第一反射单元以及一第二反射单元。该激光光源用于发出具有一极化方向的激光。该极化分光镜的分光轴与该激光的极化方向相差45度,用于将该激光分成能量相等的一束透射光及一束反射光。该第一反射单元用于接收该反射光并将该反射光反射至待加工件的第一预定位置。该第二反射单元用于接收该透射光并将该透射光反射至该待加工件的第二预定位置。

Figure 201210131586

The invention relates to an optical system for laser dot processing, which includes a laser light source, a polarization beam splitter facing the laser light source, a first reflection unit and a second reflection unit. The laser light source is used to emit laser light with a polarization direction. The beam splitting axis of the polarization beam splitter is 45 degrees different from the polarization direction of the laser light, and is used to split the laser light into a beam of transmitted light and a beam of reflected light with equal energy. The first reflecting unit is used for receiving the reflected light and reflecting the reflected light to a first predetermined position of the workpiece to be processed. The second reflecting unit is used for receiving the transmitted light and reflecting the transmitted light to a second predetermined position of the workpiece to be processed.

Figure 201210131586

Description

激光网点加工的光学系统Optical system for laser dot processing

技术领域 technical field

本发明涉及激光网点加工,尤其涉及一种激光网点加工的光学系统。 The invention relates to laser dot processing, in particular to an optical system for laser dot processing.

背景技术 Background technique

使用激光加工金属钢板做为网点分布模仁块,例如导光板射出成型的网点分布模仁块,为替代湿式蚀刻制程的方式,其优点可降低蚀刻的不稳定性以及减少化学废液的问题,但加工时间的长短随着导光板尺寸越大网点数目越多时,会导致加工时间拉长降低生产速率。 Using laser-processed metal steel plates as dot distribution mold blocks, such as dot distribution mold blocks for light guide plate injection molding, is an alternative to wet etching processes. Its advantages can reduce the instability of etching and reduce the problem of chemical waste. However, the length of the processing time increases with the larger the size of the light guide plate and the more the number of dots, which will lead to longer processing time and lower production rate.

激光加工网点时多采用网点扫描式,也即先将网点分布的坐标位置分割成许多小区块,当激光移到某一区块的中心时,此区块内的网点加工是激光固定不动,但会有一扫描式光学系统,将激光导引至在网点分布的坐标位置文件给定的每一个位置上,而此一扫描系统常见的有反射镜扫描的方式。因此当网点数目增加时,必须扫描的次数便增加使得加工时间也拉长。 When laser processing dots, the dot scanning method is often used, that is, the coordinate position of the dot distribution is first divided into many small blocks. When the laser moves to the center of a certain block, the dot processing in this block is fixed by the laser. However, there will be a scanning optical system that guides the laser light to each position given by the coordinate position file of the dot distribution, and this scanning system usually has a mirror scanning method. Therefore, when the number of dots increases, the number of scans that must be scanned increases and the processing time is also lengthened.

发明内容 Contents of the invention

有鉴于此,有必要提供一种激光网点加工的光学系统,可以缩短网点加工的时间。 In view of this, it is necessary to provide an optical system for laser dot processing, which can shorten the time for dot processing.

一种激光网点加工的光学系统,其包括一激光光源,一面对该激光光源的极化分光镜,一第一反射单元以及一第二反射单元。该激光光源用于发出具有一极化方向的激光。该极化分光镜的分光轴与该激光的极化方向相差45度,用于将该激光分成能量相等的一束透射光及一束反射光。该第一反射单元用于接收该反射光并将该反射光反射至待加工件的第一预定位置。该第二反射单元用于接收该透射光并将该透射光反射至该待加工件的第二预定位置。 An optical system for laser dot processing, which includes a laser light source, a polarization beam splitter facing the laser light source, a first reflection unit and a second reflection unit. The laser light source is used to emit laser light with a polarization direction. The beam splitting axis of the polarization beam splitter is 45 degrees different from the polarization direction of the laser light, and is used to split the laser light into a beam of transmitted light and a beam of reflected light with equal energy. The first reflecting unit is used for receiving the reflected light and reflecting the reflected light to a first predetermined position of the workpiece to be processed. The second reflecting unit is used for receiving the transmitted light and reflecting the transmitted light to a second predetermined position of the workpiece to be processed.

相对于现有技术,本发明提供的激光网点加工的光学系统利用极化分光镜将入射的激光等分成多束激光,再利用反射单元将多束激光同时导引至需要激光网点加工的不同位置上,如此缩短网点加工的时间。 Compared with the prior art, the optical system for laser dot processing provided by the present invention uses a polarization beam splitter to divide the incident laser light into multiple beams, and then uses the reflection unit to simultaneously guide the multiple laser beams to different positions that require laser dot processing In this way, the time for dot processing is shortened.

附图说明 Description of drawings

图1是本发明实施例提供的激光网点加工的光学系统用于加工待加工件的示意图。 FIG. 1 is a schematic diagram of an optical system for laser dot processing provided by an embodiment of the present invention for processing a workpiece to be processed.

图2是本发明实施例提供的极化分光镜与激光的相对位置及光路示意图。 Fig. 2 is a schematic diagram of the relative position and optical path of the polarized beam splitter and the laser provided by the embodiment of the present invention.

主要元件符号说明 Description of main component symbols

激光网点加工的光学系统Optical system for laser dot processing 100100 激光光源Laser light source 1010 极化分光镜polarization beam splitter 2020 第一固定反射镜first fixed mirror 3030 第一旋转反射镜first rotating mirror 4040 第二固定反射镜second fixed mirror 5050 第三固定反射镜third fixed mirror 6060 第二旋转反射镜second rotating mirror 7070 待加工件Workpiece 200200 旋转机构Rotary mechanism 42, 7242, 72

如下具体实施方式将结合上述附图进一步说明本发明。 The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings.

具体实施方式 Detailed ways

请一并参阅图1及图2,本发明实施例提供一种激光网点加工的光学系统100,其包括一激光光源10,一极化分光镜20,一第一固定反射镜30,一第一旋转反射镜40,一第二固定反射镜50,一第三固定反射镜60,以及一第二旋转反射镜70。 Please refer to Fig. 1 and Fig. 2 together, the embodiment of the present invention provides a kind of optical system 100 of laser dot processing, and it comprises a laser light source 10, a polarization beam splitter 20, a first fixed mirror 30, a first A rotating mirror 40 , a second fixed mirror 50 , a third fixed mirror 60 , and a second rotating mirror 70 .

该激光光源10用于发出具有一极化方向(polarized direction)S的激光P。该激光光源10只需要在其激光管的光共振腔中设置偏极镜或其它极化装置,即可使输出的激光P沿需要的一个方向振动,即具有一个极化方向。该极化方向S代表着激光P的能量方向。该激光P的波长及能量可以依需要加工的网点的大小及深度而定。 The laser light source 10 is used to emit laser light P with a polarized direction S. The laser light source 10 only needs to install a polarizer or other polarization devices in the optical resonant cavity of its laser tube, so that the output laser P can vibrate in a desired direction, that is, have a polarization direction. The polarization direction S represents the energy direction of the laser light P. The wavelength and energy of the laser P can be determined according to the size and depth of dots to be processed.

该极化分光镜20面对该激光光源10,以该极化分光镜20建立一个坐标系,该极化分光镜20的分光轴E与该激光P的极化方向S具有一个45度的夹角θ。该激光P在该坐标系水平方向的X轴上的分量将穿透该极化分光镜20成为一透射光P1,该激光P在垂直方向的Y轴上的分量将被该极化分光镜20反射成为一反射光P2。假设该入射的激光P能量为I,该透射光P1及反射光P2的能量分别为I×cos(θ)2,I×sin(θ)2,该45度的夹角θ使该透射光P1及反射光P2能量相等,即均为0.5I。 The polarized beamsplitter 20 faces the laser light source 10, and a coordinate system is established with the polarized beamsplitter 20. The beam splitting axis E of the polarized beamsplitter 20 and the polarization direction S of the laser P have a 45-degree clip angle theta. The component of the laser P on the X axis in the horizontal direction of the coordinate system will pass through the polarized beam splitter 20 to become a transmitted light P 1 , and the component of the laser P on the Y axis in the vertical direction will be transmitted by the polarized beam splitter 20 is reflected as a reflected light P 2 . Assuming that the energy of the incident laser light P is I, the energy of the transmitted light P 1 and the reflected light P 2 are respectively I×cos(θ) 2 and I×sin(θ) 2 , the angle θ of 45 degrees makes the transmitted Light P 1 and reflected light P 2 have the same energy, that is, both are 0.5I.

该第一固定反射镜30与该第一旋转反射镜40组成一第一反射单元,用于接收该反射光P2并将该反射光P2反射至待加工件的第一预定位置。具体地,该第一固定反射镜30固定设置于自该极化分光镜20反射的反射光光路上,用于接收及反射自该极化分光镜20反射的反射光P2。该第一旋转反射镜40用于接收自该第一固定反射镜30反射的反射光并将其旋转反射至待激光网点加工的待加工件200的第一预定位置。 The first fixed mirror 30 and the first rotating mirror 40 form a first reflection unit for receiving the reflected light P 2 and reflecting the reflected light P 2 to a first predetermined position of the workpiece to be processed. Specifically, the first fixed reflector 30 is fixedly disposed on the optical path of the reflected light reflected from the polarized beam splitter 20 for receiving and reflecting the reflected light P 2 reflected from the polarized beam splitter 20 . The first rotating reflector 40 is used to receive the reflected light reflected from the first fixed reflector 30 and rotate and reflect it to a first predetermined position of the workpiece 200 to be processed by laser dots.

该第二固定反射镜50,该第三固定反射镜60及该第二旋转反射镜70组成一第二反射单元,用于接收该透射光P1并将该透射光P1反射至该待加工件200的第二预定位置。 The second fixed mirror 50, the third fixed mirror 60 and the second rotating mirror 70 form a second reflection unit for receiving the transmitted light P1 and reflecting the transmitted light P1 to the to-be-processed The second predetermined position of the piece 200.

该第二固定反射镜50固定设置于自该极化分光镜20透射的透射光光路上,用于接收及反射自该极化分光镜20透射的透射光P1。该第二固定反射镜50可固定设置于一个可移动机构上,如此该第二固定反射镜50与极化分光镜20之间的间距可调节。该间距的调节有便于使待激光网点加工的待加工件200的不同位置得到加工。 The second fixed mirror 50 is fixedly disposed on the optical path of the transmitted light transmitted from the polarized beam splitter 20 for receiving and reflecting the transmitted light P 1 transmitted from the polarized beam splitter 20 . The second fixed reflector 50 can be fixedly arranged on a movable mechanism, so that the distance between the second fixed reflector 50 and the polarization beam splitter 20 can be adjusted. The adjustment of the spacing facilitates the processing of different positions of the workpiece 200 to be processed by laser dots.

该第三固定反射镜60固定设置于自该第二固定反射镜50反射的反射光路上,用于接收自该第二固定反射镜50反射的反射光并将其反射出。 The third fixed reflector 60 is fixedly arranged on the reflected light path reflected from the second fixed reflector 50 , and is used for receiving the reflected light reflected from the second fixed reflector 50 and reflecting it out.

该第二旋转反射镜70用于接收自该第三固定反射镜60反射的反射光并将其旋转反射至该待加工件200的第二预定位置。 The second rotating mirror 70 is used for receiving the reflected light reflected from the third fixed mirror 60 and rotating and reflecting it to a second predetermined position of the workpiece 200 to be processed.

该第一固定反射镜30与该第三固定反射镜60相背地位于同一条水平线。该第一旋转反射镜40与该第二旋转反射镜70位于同一条水平线,即距离待激光网点加工的待加工件200高度相等,如此极化分光镜20分出的两束激光可加工出大小及深度相同的网点201。本实施例中,该网点201为凹陷的圆点。 The first fixed reflector 30 and the third fixed reflector 60 are located on the same horizontal line opposite to each other. The first rotating mirror 40 and the second rotating mirror 70 are located on the same horizontal line, that is, the distance from the workpiece 200 to be processed by laser dots is at the same height, so that the two beams of laser light separated by the polarizing beam splitter 20 can be processed to a size And dot 201 with the same depth. In this embodiment, the dots 201 are sunken round dots.

该第一旋转反射镜40及该第二旋转反射镜70可分别设置于一旋转机构42, 72上。 The first rotating mirror 40 and the second rotating mirror 70 can be respectively arranged on a rotating mechanism 42, 72.

可以理解,上述第二反射单元可以仅需一旋转反射镜,而无需固定反射镜,即可将透射光P1旋转反射至该待加工件200的第二预定位置。 It can be understood that the above-mentioned second reflecting unit may only need a rotating reflector instead of a fixed reflector to rotatably reflect the transmitted light P 1 to the second predetermined position of the workpiece 200 to be processed.

另外,可以通过设置更多的极化分光镜将透射光P1及反射光P2分别进一步等分,从而具有更多激光束同时加工待加工件200,使网点加工的时间进一步缩短。 In addition, the transmitted light P 1 and the reflected light P 2 can be further equally divided by setting more polarized beam splitters, so that more laser beams can be used to process the workpiece 200 to be processed at the same time, and the time for dot processing can be further shortened.

上述激光网点加工的光学系统100利用极化分光镜将入射的激光等分成多束激光,再利用固定反射镜与旋转反射镜的搭配将激光导引至需要激光网点加工的位置上,如此缩短网点加工的时间至少一半以上。 The above-mentioned optical system 100 for laser dot processing uses a polarization beam splitter to divide the incident laser light into multiple laser beams, and then uses the combination of a fixed mirror and a rotating mirror to guide the laser to the position where laser dot processing is required, thus shortening the dot length. At least half of the processing time.

可以理解的是,本领域技术人员还可于本发明精神内做其它变化,都应包含在本发明所要求保护的范围之内。 It can be understood that those skilled in the art can also make other changes within the spirit of the present invention, which should be included within the scope of the present invention.

Claims (9)

1. the optical system of a laser site processing, it comprises:
One LASER Light Source is used for sending the laser with a polarised direction;
The one polarization spectroscope in the face of this LASER Light Source; The polarised direction of spectroscopical minute optical axis of this polarization and this laser differs 45 degree, is used for this laser is divided into through Beam and a branch of reverberation that energy equates;
One first reflector element is used for receiving this reverberation and this reverberation being reflexed to first precalculated position of to be processed; And
One second reflector element is used for receiving this transmitted light and this transmitted light being reflexed to this second precalculated position of to be processed.
2. the optical system of laser as claimed in claim 1 site processing, it is characterized in that: this first reflector element comprises one first stationary mirror and one first rotating mirror, this first stationary mirror receives this reverberation and this reverberation is reflexed to this first rotating mirror, this first rotating mirror with this reverberation rotary reflection to this this first precalculated position of to be processed.
3. the optical system of laser as claimed in claim 2 site processing, it is characterized in that: this second reflector element comprises one second stationary mirror, one the 3rd stationary mirror and one second rotating mirror, this second stationary mirror receives this transmitted light and this transmitted light is reflexed to the 3rd stationary mirror, the 3rd stationary mirror reflexes to this second rotating mirror with this transmitted light, this second rotating mirror with this transmitted light rotary reflection to this this second precalculated position of to be processed.
4. the optical system of laser as claimed in claim 2 site processing, it is characterized in that: this second reflector element only comprises one second rotating mirror, this second rotating mirror with this transmitted light rotary reflection to this this second precalculated position of to be processed.
5. the optical system of laser as claimed in claim 3 site processing, it is characterized in that: this first stationary mirror and the 3rd stationary mirror are positioned at the same horizontal line opposingly.
6. the optical system of laser as claimed in claim 3 site processing, it is characterized in that: this first rotating mirror and this second rotating mirror are positioned at the same horizontal line.
7. the optical system of laser as claimed in claim 2 site processing, it is characterized in that: this first stationary mirror is fixedly installed on this catoptrical light path.
8. the optical system of laser as claimed in claim 3 site processing, it is characterized in that: this second stationary mirror is fixedly installed on the light path of this transmitted light, and the 3rd stationary mirror is fixedly installed on the reflected light path of this second stationary mirror reflection.
9. the optical system of laser as claimed in claim 3 site processing, it is characterized in that: this first rotating mirror and this second rotating mirror are arranged at respectively on a rotating mechanism.
CN2012101315866A 2012-05-02 2012-05-02 Optical system for processing laser dots Pending CN103381522A (en)

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Publication number Priority date Publication date Assignee Title
CN107953035A (en) * 2017-10-26 2018-04-24 青岛骐骥光电科技有限公司 A kind of light guide plate laser carries the device of effect

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Publication number Priority date Publication date Assignee Title
JPS59223187A (en) * 1983-06-03 1984-12-14 Mitsubishi Electric Corp Control system for distribution of laser light
JPH058072A (en) * 1991-07-04 1993-01-19 Nec Corp Laser beam machining method
CN1163177A (en) * 1996-04-24 1997-10-29 三菱电机株式会社 Laser processing apparatus
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107953035A (en) * 2017-10-26 2018-04-24 青岛骐骥光电科技有限公司 A kind of light guide plate laser carries the device of effect
CN107953035B (en) * 2017-10-26 2019-12-03 青岛骐骥光电科技有限公司 A kind of light guide plate laser mentions the device of effect

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