CN103374702B - A kind of Anti-splash device - Google Patents
A kind of Anti-splash device Download PDFInfo
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- CN103374702B CN103374702B CN201210120764.5A CN201210120764A CN103374702B CN 103374702 B CN103374702 B CN 103374702B CN 201210120764 A CN201210120764 A CN 201210120764A CN 103374702 B CN103374702 B CN 103374702B
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- sputtering
- face
- plates
- sputtering plates
- water
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- 238000004544 sputter deposition Methods 0.000 claims abstract description 119
- 238000001514 detection method Methods 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000002826 coolant Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005478 sputtering type Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The present invention discloses a kind of Anti-splash device, comprise the sputtering cavity that has inner chamber, and the bottom face of described sputtering chamber intracoelomic cavity has bearing support, wherein, the side end face of described sputtering chamber intracoelomic cavity and the bearing support of inner chamber bottom face are respectively equipped with some water-cooled tubes, the described water-cooled tube of described bearing support is connected with the sputtering plates transversely arranged, the described water-cooled tube of described lumen side end face is connected with the sputtering plates longitudinally arranged, and the described sputtering plates longitudinally arranged vertically bends near described bearing support, simultaneously, the described sputtering plates of relative both sides end face is interconnected.Use a kind of Anti-splash device of the present invention, because Anti-splash device is connected by flexible pipe with water-cooled tube, when each Anti-splash device being taken away sandblast, only need separately sputtering baffle plate to be disassembled, after having sandblasted in Anti-splash device, sputtering baffle plate is installed, effectively reduces the step connecting water-cooled tube and leak detection.
Description
Technical field
The present invention relates to a kind of baffle plate, particularly relate to a kind of Anti-splash device for magnetic control reaction.
Background technology
Fig. 1 is the front view of existing a kind of Anti-splash device, and Fig. 2 is the sectional view of existing a kind of Anti-splash device, refers to shown in Fig. 1 and Fig. 2.In reactive magnetron sputtering process, be splashed on cavity inner wall for preventing sputter material, need to arrange sputtering baffle plate 21 and 22 in the place of negative electrode position, sputter material is fallen on sputtering baffle plate 21 and 22, can be heat the Conversion of energy of self, sputtering baffle plate 21 and 22 temperature is caused to raise, at this moment in order to sputtering baffle plate 21 and 22 heat is taken away, all can lay water-cooled tube 11 and 12 under bottom sputtering baffle plate 21 and 22 and form cooling loop, the recirculated water of logical certain temperature in cooling loop, by water coolant do not stop circulation, thus realize the heat on sputtering baffle plate 21 and 22 to take away.The whole frame-type of sputtering baffle plate 21 and 22 in the past, water-cooled tube 11 and 12 and sputtering baffle plate 21 and 22 are fixed on framework, when frame installation, seal by self gravitation press seal circle, then the exterior cooling water fast plug that fast plug is connected to framework extraction gets on.Such structure just produces these problems: structure is too complicated, manufacturing cost is high, sling at every turn framework time all to disconnect water-cooled tube 11 and 12, all will hunt leak when hanging, and ferrule fitting easily leaks due to the collision of framework at every turn.This just increases the labour intensity of operator and the vulnerability of equipment.
Summary of the invention
The object of the present invention is to provide a kind of Anti-splash device for magnetic control reaction, to solve existing structure complexity, manufacturing cost is high, and operator hunt leak the problem of the large and equipment vulnerability of labour intensity.
To achieve these goals, the technical scheme that the present invention takes is:
A kind of Anti-splash device, comprise the sputtering cavity that has inner chamber, and the bottom face of described sputtering chamber intracoelomic cavity has bearing support, wherein, the side end face of described sputtering chamber intracoelomic cavity and the bearing support of inner chamber bottom face are respectively equipped with some water-cooled tubes, the described water-cooled tube of described bearing support is connected with the sputtering plates transversely arranged, the described water-cooled tube of described lumen side end face is connected with the sputtering plates longitudinally arranged, and the described sputtering plates longitudinally arranged vertically bends near described bearing support, simultaneously, the described sputtering plates of relative both sides end face is interconnected.
Above-mentioned a kind of Anti-splash device, wherein, the junction of described water-cooled tube and described sputtering chamber intracoelomic cavity side end face also has web plate, and described web plate is fixedly arranged on the side end face of described sputtering chamber intracoelomic cavity, and described water-cooled tube is connected with described web plate.
Above-mentioned a kind of Anti-splash device, wherein, the described sputtering plates of described sputtering chamber intracoelomic cavity side end face comprises top sputtering plates, bottom sputtering plates and is connected sputtering plates, and described top sputtering plates is installed in the top of the described web plate of described lumen side end face by web members such as bolts; Described bottom sputtering plates is installed in the bottom of the described water-cooled tube of described lumen side end face by web members such as bolts, and described bottom sputtering plates vertically bends near the bottom face of described inner chamber; Described connection sputtering plates connects the described bottom sputtering plates of relative both sides end face, and described connection sputtering plates is fixedly arranged on the described water-cooled tube of described lumen side end face by web members such as bolts.
Above-mentioned a kind of Anti-splash device, wherein, described top sputtering plates, described bottom sputtering plates and described connection sputtering plates are covered in the described side end face of sputtering chamber intracoelomic cavity and the bottom face of inner chamber.
Above-mentioned a kind of Anti-splash device, wherein, described top sputtering plates, described bottom sputtering plates are connected respectively by the described water-cooled tube of flexible pipe with described sputtering plates lumen side end face with described connection sputtering plates.
Above-mentioned a kind of Anti-splash device, wherein, the described sputtering plates transversely arranged is positioned at the below of described connection sputtering plates.
Above-mentioned a kind of Anti-splash device, wherein, the described sputtering plates transversely arranged is connected with the described water-cooled tube of described bearing support by flexible pipe.
Above-mentioned a kind of Anti-splash device, wherein, the junction of described water-cooled tube and described bearing support also has supporting tube, and described supporting tube is fixedly arranged on described bearing support, and described water-cooled tube is connected with described supporting tube.
The present invention is owing to have employed above-mentioned technology, and the positively effect making it compared with prior art to have is:
Because Anti-splash device of the present invention is connected by flexible pipe with water-cooled tube, when each Anti-splash device being taken away sandblast, only need separately sputtering baffle plate to be disassembled, after having sandblasted in Anti-splash device, sputtering baffle plate is installed, effectively reduces the step connecting water-cooled tube and leak detection.
Accompanying drawing explanation
Fig. 1 is the front view of existing a kind of Anti-splash device;
Fig. 2 is the sectional view of existing a kind of Anti-splash device;
Fig. 3 is the front view of a kind of Anti-splash device of the present invention;
Fig. 4 is the sectional view of a kind of Anti-splash device of the present invention;
Fig. 5 is the vertical view of a kind of Anti-splash device of the present invention.
In accompanying drawing: 1. sputter cavity; 11. water-cooled tubes; 12. water-cooled tubes; 13. inner chambers; 14. bearing supports; 21. sputtering plates; 22. sputtering plates; 221. top sputtering plates; 222. bottom sputtering plates; 223. connect sputtering plates; 3. web plate; 4. supporting tube.
Embodiment
The embodiment of a kind of Anti-splash device of the present invention is provided below in conjunction with accompanying drawing.
Fig. 3 is the front view of a kind of Anti-splash device of the present invention, and Fig. 4 is the sectional view of a kind of Anti-splash device of the present invention, and Fig. 5 is the vertical view of a kind of Anti-splash device of the present invention, refers to shown in Fig. 3 to Fig. 5.A kind of Anti-splash device of the present invention, includes a sputtering cavity 1, and the inside of this sputtering cavity 1 has an inner chamber 13, and the bottom face sputtering cavity 1 inner chamber 13 is provided with bearing support 14.The side end face of sputtering cavity 1 inner chamber 13 is provided with some water-cooled tubes 12, the bearing support 14 of inner chamber 13 bottom face is provided with some water-cooled tubes 11, and on some water-cooled tubes 12 of inner chamber 13 side end face, be connected with the sputtering plates 22 longitudinally arranged, the water-cooled tube 11 of bearing support 14 is connected with the sputtering plates 21 transversely arranged.And the sputtering plates 22 longitudinally arranged vertically bends near bearing support 14 place, meanwhile, the sputtering plates 22 of relative both sides end face interconnects.
The present invention also has following embodiment on the basis of the above:
Please continue see shown in Fig. 3 to Fig. 5.In the first embodiment of the present invention, water-cooled tube 12 is also provided with web plate 3 with the junction of sputtering cavity 1 inner chamber 13 side end face, web plate 3 has the bolt of suspension, makes web plate 3 be fixedly installed on inner chamber 13 by screw; Web plate 3 is close to by water-cooled tube 12, and water-cooled tube 12 is fixedly installed on inner chamber 13 simultaneously; Sputtering plates 22 is close to water-cooled tube 12, and is fixed by the bolt hung.
In the second embodiment of the present invention, the sputtering plates 22 of sputtering cavity 1 inner chamber 13 side end face specifically includes top sputtering plates 221, bottom sputtering plates 222 and is connected sputtering plates 223, and top sputtering plates 221 is fixedly installed on the top of the web plate 3 of inner chamber 13 side end face by web members such as bolts; Bottom sputtering plates 222 is fixedly installed on the bottom of the water-cooled tube 12 of inner chamber 13 side end face by web members such as bolts, and bottom sputtering plates 222 vertically bends near the bottom face of inner chamber 13, the two ends connecting sputtering plates 223 vertically bend, connected the bottom sputtering plates 222 of relative both sides end face by web members such as screws, and connect sputtering plates 223 and be fixedly installed on the water-cooled tube 12 of inner chamber 13 side end face by web members such as bolts.
In the third embodiment of the present invention, above-mentioned top sputtering plates 221, bottom sputtering plates 222 be connected sputtering plates 223 and be covered in the side end face of sputtering cavity 1 inner chamber 13 and the bottom face of inner chamber 13 completely, effectively prevent sputter material to be splashed on cavity inner wall.
In the fourth embodiment of the present invention, top sputtering plates 221, bottom sputtering plates 222 be connected sputtering plates 223 and be connected respectively by the water-cooled tube 12 of flexible pipe with sputtering plates 22 inner chamber 13 side end face.
In the fifth embodiment of the present invention, the above-mentioned sputtering plates 21 transversely arranged is positioned at the below connecting sputtering plates 223, and this sputtering plates 21 transversely arranged is connected with the water-cooled tube 11 on bearing support 14 by flexible pipe.
In the sixth embodiment of the present invention, be also provided with supporting tube 4 at water-cooled tube 11 and the junction of bearing support 14, supporting tube 4 is fixedly installed on bearing support 14, and water-cooled tube 11 is fixedly connected on supporting tube 4.
In sum, use a kind of Anti-splash device of the present invention, because Anti-splash device is connected by flexible pipe with water-cooled tube, when each Anti-splash device being taken away sandblast, only need separately sputtering baffle plate to be disassembled, after Anti-splash device sandblasted, sputtering baffle plate is installed, effectively reduced the step connecting water-cooled tube and leak detection.
The above is preferred embodiment of the present invention, and not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (8)
1. an Anti-splash device, comprise the sputtering cavity that has inner chamber, and the bottom face of described sputtering chamber intracoelomic cavity has bearing support, it is characterized in that, the side end face of described sputtering chamber intracoelomic cavity and the bearing support of inner chamber bottom face are respectively equipped with some water-cooled tubes, the described water-cooled tube of described bearing support is connected with the sputtering plates transversely arranged, the described water-cooled tube of described lumen side end face is connected with the sputtering plates longitudinally arranged, and the described sputtering plates longitudinally arranged vertically bends near described bearing support, simultaneously, the described sputtering plates of relative both sides end face is interconnected.
2. Anti-splash device according to claim 1, it is characterized in that, the junction of described water-cooled tube and described sputtering chamber intracoelomic cavity side end face also has web plate, and described web plate is fixedly arranged on the side end face of described sputtering chamber intracoelomic cavity, and described water-cooled tube is connected with described web plate.
3. Anti-splash device according to claim 2, it is characterized in that, the described sputtering plates of described sputtering chamber intracoelomic cavity side end face comprises top sputtering plates, bottom sputtering plates and is connected sputtering plates, and described top sputtering plates is bolted the top that part is installed in the described web plate of described lumen side end face; Described bottom sputtering plates is bolted the bottom that part is installed in the described water-cooled tube of described lumen side end face, and described bottom sputtering plates vertically bends near the bottom face of described inner chamber; Described connection sputtering plates connects the described bottom sputtering plates of relative both sides end face, and described connection sputtering plates is bolted part is fixedly arranged on the described water-cooled tube of described lumen side end face.
4. Anti-splash device according to claim 3, it is characterized in that, described top sputtering plates, described bottom sputtering plates and described connection sputtering plates are covered in the described side end face of sputtering chamber intracoelomic cavity and the bottom face of inner chamber.
5. Anti-splash device according to claim 3, it is characterized in that, described top sputtering plates, described bottom sputtering plates are connected respectively by the described water-cooled tube of flexible pipe with described sputtering chamber intracoelomic cavity side end face with described connection sputtering plates.
6. Anti-splash device according to claim 3, it is characterized in that, the described sputtering plates transversely arranged is positioned at the below of described connection sputtering plates.
7. Anti-splash device according to claim 6, it is characterized in that, the described sputtering plates transversely arranged is connected with the described water-cooled tube of described bearing support by flexible pipe.
8. Anti-splash device according to claim 1, it is characterized in that, the junction of described water-cooled tube and described bearing support also has supporting tube, and described supporting tube is fixedly arranged on described bearing support, and described water-cooled tube is connected with described supporting tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210120764.5A CN103374702B (en) | 2012-04-24 | 2012-04-24 | A kind of Anti-splash device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210120764.5A CN103374702B (en) | 2012-04-24 | 2012-04-24 | A kind of Anti-splash device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103374702A CN103374702A (en) | 2013-10-30 |
| CN103374702B true CN103374702B (en) | 2015-08-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210120764.5A Active CN103374702B (en) | 2012-04-24 | 2012-04-24 | A kind of Anti-splash device |
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| Country | Link |
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| CN (1) | CN103374702B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101100741A (en) * | 2006-06-23 | 2008-01-09 | 应用材料股份有限公司 | PVD target |
| CN101688291A (en) * | 2007-04-23 | 2010-03-31 | 应用材料股份有限公司 | Cooling shield for substrate processing chamber |
| CN101736301A (en) * | 2008-11-19 | 2010-06-16 | 苏州新爱可镀膜设备有限公司 | Shielding device in vacuum magnetic control film coating chamber |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5252831B2 (en) * | 2007-05-14 | 2013-07-31 | 株式会社アルバック | Dielectric multilayer filter manufacturing method and dielectric multilayer filter manufacturing apparatus |
-
2012
- 2012-04-24 CN CN201210120764.5A patent/CN103374702B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101100741A (en) * | 2006-06-23 | 2008-01-09 | 应用材料股份有限公司 | PVD target |
| CN101688291A (en) * | 2007-04-23 | 2010-03-31 | 应用材料股份有限公司 | Cooling shield for substrate processing chamber |
| CN101736301A (en) * | 2008-11-19 | 2010-06-16 | 苏州新爱可镀膜设备有限公司 | Shielding device in vacuum magnetic control film coating chamber |
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| Publication number | Publication date |
|---|---|
| CN103374702A (en) | 2013-10-30 |
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Effective date of registration: 20170406 Address after: 201600 Songjiang science and Technology Park, Guanghua Road, Shanghai, No. 3, layer 328 Patentee after: SHANGHAI NORTHGLASS COATING TECHNOLOGY INDUSTRIAL Co.,Ltd. Address before: 201108 Songjiang District science and Technology Park Guanghua Road, Shanghai, No. 328 Patentee before: SHANGHAI NORTHGLASS COATING TECHNOLOGY INDUSTRIAL Co.,Ltd. Patentee before: SHANGHAI NORTHGLASS TECHNOLOGY INDUSTRIAL Co.,Ltd. Patentee before: LUOYANG NORTHGLASS TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20240101 Address after: Zone C, 4th Floor, Building 1, No. 328 Guanghua Road, Xiaokunshan Town, Songjiang District, Shanghai, 200000 Patentee after: Shanghai Beibo Vacuum Coating Technology Co.,Ltd. Address before: Floor 3, No. 328 Guanghua Road, Songjiang Science and Technology Park, Shanghai, 201600 Patentee before: SHANGHAI NORTHGLASS COATING TECHNOLOGY INDUSTRIAL Co.,Ltd. |
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| TR01 | Transfer of patent right |