CN103368447B - Electrostatic pulse generator and DC pulse generator - Google Patents

Abstract

The invention provides an electrostatic pulse generator, which sequentially comprises a first electrode layer, a first insulating layer, an insulating support, a second insulating layer and a second electrode layer, wherein the materials of the first insulating layer and the second insulating layer exist The triboelectric sequence difference; the insulating support body forms a gap between the first insulating layer and the second insulating layer, and under the action of external force, the first insulating layer and the second insulating layer are in contact with each other. The invention also provides a DC pulse generator combining the electrostatic pulse generator with a full-bridge rectifier. The electrostatic pulse generator of the present invention utilizes the contact charge generated when two insulating materials with frictional electrode sequence difference contact under external force to form a potential difference between the first electrode layer and the second electrode layer. Under the action of periodic external force, the first insulating layer and the second insulating layer undergo two processes of periodic contact and separation, respectively generating pulse currents in opposite directions.

Description

Electrostatic Pulse Generator and DC Pulse Generator

technical field

The invention relates to a generator, in particular to an electrostatic pulse generator and a DC pulse generator which convert naturally existing mechanical energy such as motion, vibration and fluid into electrical energy.

Background technique

Today, with the rapid development of microelectronics and material technology, a large number of new microelectronic devices with multiple functions and high integration have been developed continuously, and have shown unprecedented application prospects in various fields of people's daily life. However, the research on the power supply system matched with these microelectronic devices is relatively lagging behind. Generally speaking, the power supply of these microelectronic devices all comes from batteries directly or indirectly. Batteries have three insurmountable limitations. The first is the large size and heavy weight, which makes it difficult to miniaturize the entire electronic system; the second is limited life, especially for networks composed of a large number of dispersed sensors. , limited battery life will bring extremely high maintenance costs; the third is the potential harm of toxic chemicals to the environment and human body. Therefore, it is of great significance to develop a technology that can convert naturally occurring mechanical energy such as motion, vibration, and fluid into electrical energy to realize micro-devices that do not require an external power supply.

At present, the principles used by generators that convert mechanical energy into electrical energy mainly include electrostatic induction, electromagnetic induction, and piezoelectric properties of special materials. However, the electrostatic induction generators that have been invented have disadvantages such as large volume and narrow applicability, while electromagnetic induction generators and piezoelectric generators generally have defects such as complex structures, special requirements for materials, and high cost.

Contents of the invention

The object of the present invention is to provide a static pulse generator with a simple structure that converts naturally occurring mechanical energy such as motion, vibration, and fluid into electrical energy, so as to provide a matching power supply for microelectronic devices.

In order to achieve the above object, the present invention provides an electrostatic pulse generator, which has a layered structure, which sequentially includes a first electrode layer, a first insulating layer, an insulating support, a second insulating layer and a second electrode layer, in,

The material of the first insulating layer and the second insulating layer has a triboelectric sequence difference;

The insulating supporting body forms a gap between the first insulating layer and the second insulating layer, and the first insulating layer and the second insulating layer are in contact with each other under the action of external force.

Preferably, the surface of the first insulating layer or the second insulating layer facing the void comprises an array of nanowires or nanorods, and the nanowires or nanorods are substantially perpendicular to the surface of the first insulating layer or the second insulating layer. surface.

Preferably, the surface of the first insulating layer and/or the second insulating layer facing the gap is chemically modified, so that the surface of the thin film layer with positive polarity among the two insulating layers introduces electron-volatile functional groups, or The surface of materials with negative polarity introduces functional groups that are easy to obtain electrons.

Preferably, the first insulating layer and/or the second insulating layer is an insulating film layer.

Preferably, the first insulating layer and/or the second insulating layer are made of elastic material, and under the action of periodic external force, the first insulating layer and the second insulating layer are in periodic contact.

Preferably, the insulating support is made of an elastic material, and under the action of a periodic external force, the first insulating layer is in periodic contact with the second insulating layer.

Preferably, the first insulating layer, the second insulating layer and/or the insulating support are made of elastic material, and under the action of a periodic external force, the first insulating layer is in periodic contact with the second insulating layer.

Preferably, the material of the first insulating layer and/or the second insulating layer is an inorganic non-metallic material, an organic polymer material or a combination thereof.

Preferably, the first insulating layer is a polymethyl methacrylate film layer with a thickness of 2 microns, the second insulating layer is a polymethyl methacrylate film with a thickness of 50 microns, and the second insulating layer The layer comprises, on the surface facing said void, an array of polyimide nanorods approximately 1.5 microns in length, said nanorods being substantially perpendicular to said second insulating layer.

Preferably, the insulating support is polyimide double-sided adhesive tape.

Preferably, the external force includes low-frequency mechanical shock and high-frequency mechanical vibration.

Correspondingly, the present invention also provides a DC pulse generator, comprising the electrostatic pulse generator and a full-bridge rectifier of the present invention, the output end of the electrostatic pulse generator is connected to the input end of the full-bridge rectifier.

Compared with prior art, the beneficial effect that the present invention has is:

The present invention provides an electrostatic pulse generator, the generator has a layered structure, which sequentially includes a first electrode layer, a first insulating layer, an insulating support, a second insulating layer and a second electrode layer, wherein the first The material of the first insulating layer and the second insulating layer has a triboelectric sequence difference; the insulating support forms a gap between the first insulating layer and the second insulating layer, and under the action of an external force, the first insulating layer and the second insulating layer The second insulating layers are in contact with each other. Because the material of the first insulating layer and the second insulating layer has a triboelectric sequence difference, the electrostatic pulse generator of the present invention utilizes the contact charge and the first insulating layer generated when the first insulating layer and the second insulating layer are in contact with an external force. The design of the hollow structure between the layer and the second insulating layer creates a potential difference between the first electrode layer and the second electrode layer. Under the action of periodic external force, the first insulating layer and the second insulating layer undergo two processes of periodic contact and separation, respectively generating pulse currents in opposite directions.

The electrostatic pulse generator of the invention has simple structure, simple preparation method, no special requirements on materials, and wide practical application. In addition, it can be combined with a full-bridge rectifier to form a DC pulse generator, which can be directly used in various applications in the electrochemical field. It can not only be directly used in the electrochemical field as a pulse power supply, but also charge capacitors or lithium-ion batteries. A small portable electronic device provides the required power.

Description of drawings

The above and other objects, features and advantages of the present invention will be more clearly illustrated by the accompanying drawings. Like reference numerals designate like parts throughout the drawings. The drawings are not intentionally scaled according to the actual size, and the emphasis is on illustrating the gist of the present invention.

Fig. 1 is the structural schematic diagram of the electrostatic pulse generator of embodiment one of the present invention;

Fig. 2 is a schematic structural view of an electrostatic pulse generator according to Embodiment 3 of the present invention;

Fig. 3 is the electron micrograph of the polymer nanorod array prepared on the surface of polyimide material;

Figure 4 is the measurement result of the open circuit voltage of the electrostatic pulse generator under the action of external force;

Fig. 5a is the short-circuit current measurement result of the electrostatic pulse generator under the action of external force; Fig. 5b is the short-circuit current measurement result of a pulse cycle under the action of external force in Fig. 5a;

Fig. 6 is a schematic diagram of the connection between the electrostatic pulse generator and the full-bridge rectifier in the DC pulse generator.

detailed description

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

Secondly, the present invention is described in detail with reference to the schematic diagrams. When describing the embodiments of the present invention in detail, for the convenience of explanation, the schematic diagrams are only examples, which should not limit the protection scope of the present invention.

Today, with the rapid development of microelectronics and material technology, a large number of new microelectronic devices with multiple functions and high integration have been developed continuously, and have shown unprecedented application prospects in various fields of people's daily life. It is of great significance to develop a technology that can convert naturally occurring mechanical energy such as motion, vibration, and fluid into electrical energy to realize micro-devices that do not require an external power supply. At present, the principles used by generators that convert mechanical energy into electrical energy mainly include electrostatic induction, electromagnetic induction, and piezoelectric properties of special materials. However, the electrostatic induction generators that have been invented have disadvantages such as large volume and narrow applicability, while electromagnetic induction generators and piezoelectric generators generally have defects such as complex structures, special requirements for materials, and high cost.

The invention provides an electrostatic pulse generator with a simple structure that converts naturally existing mechanical energy such as motion, vibration, and fluid into electric energy, and can provide matching power for microelectronic devices. The electrostatic pulse generator of the present invention has a layered structure, which sequentially includes a first electrode layer, a first insulating layer, an insulating support, a second insulating layer and a second electrode layer, wherein the first insulating layer is insulated from the second insulating layer. The material of the layer has a triboelectric sequence difference; the insulating support forms a gap between the first insulating layer and the second insulating layer, and the first insulating layer and the second insulating layer are in contact with each other under the action of external force. Select the material of the first insulating layer and the second insulating layer with triboelectric sequence difference, and the surface charge transfer will occur through electrons or ions at the moment when the two are in contact with each other, that is, the contact charge, so that the surface of one of the insulating layers has a net positive charge, while the surface of the other insulating layer has a corresponding net negative charge. Under the action of periodic external force, the first insulating layer and the second insulating layer have two processes of periodic contact and separation, respectively generating pulse currents in opposite directions to realize pulse power generation.

Under the action of external force, the first insulating layer and the second insulating layer are in contact with each other, that is, at least one of the first insulating layer, the insulating support body and the second insulating film layer is an elastic material, so as to ensure that the second insulating layer is The first insulating layer and the second insulating layer can be in contact with each other.

The "triboelectric series" mentioned in the present invention refers to the sorting of materials according to the degree of attraction to charges. When two materials are in contact with each other, the positive charges on the contact surface are drawn from the triboelectric series with a higher polarity. The negative material surface is transferred to the more polar material surface in the triboelectric series. So far, there is no unified theory that can completely explain the mechanism of charge transfer. It is generally believed that this charge transfer is related to the surface work function of the material, and charge transfer is realized by the transfer of electrons or ions on the contact surface. It should be noted that the triboelectric series is only a statistical result based on experience, that is, the farther the two materials are in the series, the greater the probability that the positive and negative charges generated after contact will match the series, and Actual results are affected by many factors, such as material surface roughness, ambient humidity, and relative friction. The present inventors found that if the two materials are in closer positions in the triboelectric series, the positive or negative of the charge distribution after contact may not be as predicted by the series. It needs to be further explained that the transfer of charges does not require the relative friction between the two materials, as long as there is mutual contact. Therefore, in a strict sense, the expression of the triboelectric series is inaccurate, but due to historical reasons It is still in use today.

The "contact charge" mentioned in the present invention refers to the charge on the surface of two materials with different triboelectric sequence polarities after contact and separation. It is generally believed that the charge is only distributed on the surface of the material. The maximum depth of distribution is no more than about 10 nanometers. Studies have found that the charge can be kept for a long time, according to factors such as humidity in the environment, its retention time is several hours or even up to several days, and the amount of charge that has disappeared can be replenished by contacting again. Therefore, the inventor believes that , the electric quantity of the contact charge in the present invention can be approximately considered to remain constant. It should be noted that the sign of the contact charge is the sign of the net charge, that is, there may be a negative charge accumulation area in a local area of the material surface with a positive contact charge, but the sign of the net charge on the entire surface is positive.

In the electrostatic pulse generator of the present invention, the main size parameters affecting the output power of the generator are the thicknesses of the first insulating layer and the second insulating layer and the distance between them. The thinner the thickness of the two insulating materials and the greater the gap distance between the two insulating materials, the greater the output power of the generator.

Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

Embodiment one:

In the electrostatic pulse generator of this embodiment, both the first insulating layer and the second insulating layer are made of thin film materials. Referring to FIG. Including a first electrode layer 102, a first insulating film layer 103, an insulating support 104, a second insulating film layer 105 and a second electrode layer 106, wherein the first insulating film layer 103 and the second insulating film layer 105 The material has a triboelectric sequence difference; the insulating support 104 forms a gap 107 between the first insulating film layer 103 and the second insulating film layer 105, and under the action of an external force F, the first insulating film layer 103 and the second insulating film layer 105 The second insulating film layers 105 are in contact with each other.

The materials of the first insulating film layer 103 and the second insulating film layer 105 in this embodiment may be inorganic non-metallic materials or organic polymer materials, both of which may be inorganic non-metallic materials or organic polymer materials. The material of the first insulating film layer 103 may be glass, and the material of the second insulating film layer 105 may be silicon. Materials of the first insulating film layer 103 and the second insulating film layer 105 may be polymethyl methacrylate and polyimide. The material of the first insulating film layer 103 and the second insulating film layer 105 can also be an inorganic non-metallic material, and the other can be an organic polymer material, for example, the material of the first insulating film layer 103 and the second insulating film layer 105 can be glass and polyimide. At least one of the first insulating film layer 103, the insulating support body 104 and the second insulating film layer 105 is an elastic material, to ensure that under the action of an external force F, the first insulating film layer 103 and the second insulating film layer 105 can contact each other .

The polarity difference between the materials of the first insulating film layer and the second insulating film layer in the triboelectric series directly affects the contact charge density, the greater the polarity difference, the greater the contact charge density, and more contact charges will be in both A larger potential difference is generated between the electrode layers, thereby improving the output power of the present invention. Therefore, it is necessary to select a group of insulating film materials with large polarity differences in the triboelectric series as much as possible.

The main dimensional parameters affecting the output power of the generator of the present invention are the thicknesses of the first insulating film layer and the second insulating film layer and the distance of the gap between them. Both experimental results and theoretical derivation can prove that the thinner the thickness of the film material, the greater the distance between the two film materials, and the greater the output power of the generator. Therefore, if conditions such as mechanical strength permit, in order to obtain higher output power, the first insulating film layer and the second insulating film layer need to select thinner materials and maintain a larger gap between them. It should be noted that the output power can also be increased by using a thin film material with a larger area, but this method cannot increase the density of the output power.

In this embodiment, the first insulating film layer 103 and the second insulating film layer 105 are supported by an insulating support 104 to form a gap 107, and the insulating support 104 may be supported on the edge of the first and second insulating film layers. The structural design and material selection of the insulating support body 104 need to consider the mechanical properties of the materials of the first insulating film layer 103 and the second insulating film layer 105, if the two insulating films of the first insulating film layer 103 and the second insulating film layer 105 If there is at least one kind of elastic polymer material in the material, the self-elasticity of the polymer material can ensure its recovery after deformation, so that the gap can be maintained. Therefore, in this case, the insulating support can be double-sided with a certain thickness. Insulating materials such as rubber strips; if the two insulating film materials are rigid inorganic non-metallic materials, the insulating support body needs to adopt a spring structure with restoring force, or use elastic materials to ensure that the two insulating film materials can withstand external forces. After contact, they can be separated and maintain a certain gap under the restoring force of the insulating support.

The specific process of power generation of the generator in this embodiment is: under the action of external force F, the two insulating film materials of the first insulating film layer 103 and the second insulating film layer 105 contact each other and charge transfer occurs on the contact surface. After the external force is removed, due to the elasticity of the two insulating film materials or the restoring force of the insulating support, the two insulating film materials are separated, and contact charges of opposite polarities are formed on their respective surfaces. Due to the existence of voids, there are differences in potentials generated on the first electrode layer 102 and the second electrode layer 106 by positively charged contact charges and negatively charged contact charges. In the case of an external load, the potential difference causes free electrons to redistribute between the two metal electrodes to balance the potential difference, thereby forming a pulse current through the load. When the external force is applied again, since the gap distance between the two insulating film materials is changed, the potential difference between the two metal electrodes reappears, so that the balanced charge distribution is changed, and the redistributed charge causes the pulse current to pass through the external load again. It should be noted that when the load is connected, the two insulating film materials generate opposite potential differences during the process of separation and approach, and therefore, the flow directions of the pulse currents in the two processes are opposite. To sum up, the generator of this embodiment can output pulsed alternating current with a corresponding frequency under the action of a periodic external force.

It should be noted that the shape of the insulating support body 104 is not limited to the shape in this embodiment, as long as the first insulating film layer and the second insulating film layer can be separated from each other. It may be a discontinuous dot-shaped insulating support, and its edge may also exceed the edge of the first insulating film layer and the second insulating film layer.

In this embodiment, the first electrode layer 102 and the second electrode layer 106 can use metal electrode layers, and the metal electrode layer in this embodiment is formed by respectively covering one surface of the first insulating film layer 103 and the second insulating film layer 105. It is made by depositing a metal film. In the actual assembly process of the generator, the surfaces of the first insulating film layer 103 and the second insulating film layer 105 without the metal electrode layer are placed oppositely, and the first insulating film layer is made A certain gap 107 is kept between the 103 and the second insulating film layer 105 . The preparation of metal electrode layer can adopt vapor deposition or sputtering method, and specific metal material can choose titanium or aluminum etc. good conductivity, cost is lower and good combination with the first insulating film layer 103 and the second insulating film layer 105 Material.

In the actual work of the electrostatic pulse generator of the present invention, the resistance value of the external load has a great influence on the actual output power. With the increase of the load resistance value, the voltage across the load increases, the current through the load decreases, and the actual output power first increases and then decreases, and a maximum value appears. The inventor found through many experiments that the resistance value corresponding to the maximum value of the output power is in the order of megohm, therefore, the present invention can exert its efficacy to the greatest extent when the resistance value of the load is in the order of megohm. It should be noted that the "output power" used in this article refers to the product of the maximum value of the pulse current and the maximum value of the pulse voltage formed at both ends of the load, that is, the instantaneous maximum power.

The output power of the generator of the present invention is not only affected by external environmental factors, including the size of the external force, the resistance value of the applied load, etc., but also by the design and manufacture of the generator itself, including the first insulating film layer and the second insulating film layer. The selection of materials, as well as the size of each part, and the physical and chemical properties of the insulating film layer material surface, etc.

Embodiment two:

In this embodiment, the structure of the electrostatic pulse generator is the same as that in Embodiment 1, and will not be repeated here. The difference from the first embodiment is that the material surface of the first insulating film layer 103 and/or the second insulating film layer 105 facing the gap 107 in the generator is chemically modified to effectively increase the output power. For the two insulating film materials of the first insulating film layer and the second insulating film layer, more electron-losing functional groups (that is, strong electron donating groups) are introduced on the surface of the material whose polarity is positive, or on the surface of the material whose polarity is negative The introduction of functional groups that are more likely to obtain electrons (strong electron-attracting groups) can further increase the amount of charge transfer at the moment of contact, thereby increasing the contact charge density and the output power of the generator.

Strong electron-donating groups include: amino group, hydroxyl group, alkoxy group, etc.; strong electron-withdrawing groups include: acyl group, carboxyl group, nitro group, etc.

In this embodiment, the first insulating film layer 103 is made of polymethyl methacrylate material, the second insulating film layer 105 is made of polyimide material, and a strong electron-donating group is introduced on the surface of the polymethyl methacrylate material, and Entering strong electron-withdrawing groups on the surface of polyimide materials will further increase the density of contact charges.

The method of introducing amino groups on the surface of polymethyl methacrylate materials is: using the method of plasma surface modification, the atmosphere is nitrogen, nitrogen and hydrogen gas mixture or ammonia, plasma is generated under a certain power, and polymethacrylic acid is realized. Introduction of amino groups on the surface of methyl ester materials.

The method of introducing nitro groups on the surface of polyimide materials is: using the method of plasma surface modification, the atmosphere is a mixed gas of oxygen and nitrogen, and plasma is generated under a certain power to realize the nitro groups on the surface of polyimide materials. introduce.

In other embodiments of the present invention, only the material surface of the first insulating layer or the second insulating layer of the electrostatic pulse motor can be chemically modified.

It is generally believed that the rougher the surface of the material, the smaller the area that can be effectively contacted when the two materials are in contact, and at the same time, less contact charges are generated, and correspondingly lower output power is obtained. But, the inventor of the present invention finds in research process, the roughness of the insulating film material surface of the first insulating film layer of electrostatic pulse generator or the second insulating film layer has bigger influence to output power, in insulating film material The introduction of special topography with a certain surface roughness can improve the output power of the generator.

Embodiment three:

In this embodiment, the structure of the electrostatic pulse generator is the same as that in Embodiment 1, and will not be repeated here. The difference from Embodiment 1 is that one of the opposite surfaces of the first insulating film layer and the second insulating film layer is a physically modified rough surface, that is, under the action of an external force, the first insulating film layer and the second insulating film layer When the second insulating film layers are in contact, one of the surfaces in contact with each other is a physically modified rough surface.

Preferably, a nanowire or nanorod array can be prepared on the surface of the first insulating film layer or the second insulating film layer facing the gap, and the nanowires or nanorods are substantially perpendicular to the first insulating film layer or the second insulating film layer. The surface of the second insulating film layer, in order to achieve the purpose of increasing the surface roughness of the insulating film material.

Specifically, taking the polymer film material selected as the first insulating film layer or the second insulating film layer as an example, high-energy particles are directed to the surface of the rough polymer film and selectively etched to prepare polymer nanomaterials. Wire or nanorod arrays, in which the high-energy particles can be inductively coupled plasma, gasified high-energy ions generated by pulsed laser burning, etc. The physical modification method of the material surface can greatly improve the output power of the present invention.

The inventors believe that when the polymer film material modified by this method and another film material are in contact with each other, these polymer nanorods can bend and produce local relative sliding on another surface. Studies have shown that, The additional friction can effectively increase the contact charge density, therefore, the presence of these nanowire or nanorod arrays can increase the power output of the generator of the present invention.

Taking the first insulating film layer or the second insulating film layer using polymethyl methacrylate film material and polyimide film material to manufacture the electrostatic pulse generator as an example, the preparation process of the electrostatic pulse generator in this embodiment is specifically introduced.

Referring to Fig. 2, a 200 nm thick aluminum first electrode layer 202 is deposited on a glass substrate 201 with a size of 1.5 cm × 1.5 cm by electron beam evaporation, and a spin coating method is used on the surface of the aluminum first electrode layer 202 It is covered with a layer of polymethyl methacrylate (PMMA), and dried and hardened at 180° C. to form a first insulating film layer 203 with a thickness of 2 microns.

The second insulating thin film layer 205 uses the polyimide thin film material that the size that Du Pont Company produces is 1.5 centimeters * 1.5 centimeters * 50 microns, deposits the aluminum-electrode layer 206 of 200 nanometers thick with the method for electron beam evaporation on its one side, On the other side, gold was deposited with a thickness of about 10 nanometers using a sputtering apparatus. After that, put the polyimide film into an inductively coupled plasma etching machine, etch the side where the gold is deposited, and feed O ₂ , Ar and CF ₄ gases, and the flow rates are controlled at 10 sccm, 15 sccm and 30 sccm respectively, The pressure is controlled at 15mTorr, the working temperature is controlled at 55°C, a power of 400 watts is used to generate plasma, a power of 100 watts is used to accelerate the plasma, and etching is carried out for about 5 minutes to obtain a layer substantially perpendicular to the second insulating film layer 205 A polymer polyimide nanorod array 205 ′ with a length of about 1.5 microns is shown in FIG. 3 .

A hollow insulating support 204 was formed around the edge of the PMMA by using a polyimide double-sided tape with a size of 1.5 cm×0.1 cm×50 microns produced by DuPont. Afterwards, the side of the polyimide film prepared with the nanorod array 205' is pasted on the insulating support 204, so that a gap 207 is formed between the first insulating film layer 203 and the second insulating film layer 205, under the action of an external force F2 , the first insulating film layer 203 and the nanorod array 205' on the surface of the second insulating film layer 205 are in contact with each other. This forms a layered hollow structure based on two insulating film materials, polymethyl methacrylate (PMMA) and polyimide film material, as shown in Figure 2.

The roughness of the surface of the insulating film material has a great influence on the output power. It is generally believed that the rougher the surface of the material, the smaller the area that can be effectively contacted, resulting in less contact charge, and correspondingly lower output power. However, the inventors unexpectedly found that the introduction of a special shape with a certain surface roughness can actually increase the output power. When selecting the polymer film material, the polymer nanorod array is prepared by directing high-energy particles to the surface of the rough polymer substrate and selectively etching it. The high-energy particles can be inductively coupled plasma, Gasified high-energy ions produced by pulsed laser burning, etc., this method of physical modification of the material surface can greatly improve the output power of the present invention. The inventors believe that when the polymer film material modified by this method and another film material are in contact with each other, these polymer nanorods can bend and produce local relative sliding on another surface. Studies have shown that, The extra friction can effectively increase the contact charge density, so the presence of these nanorod arrays is helpful to increase the output power of the generator.

It should be noted that the electrostatic pulse generator in Embodiment 1, 2 or 3 can directly adopt the first electrode layer with higher strength without the need of a substrate, such as using aluminum foil or aluminum plate as the first electrode layer, on which The material of the first insulating layer of the electrostatic pulse motor can be prepared directly.

Embodiment four:

In this embodiment, under the action of periodic external force, the open-circuit voltage and short-circuit current of the electrostatic pulse generator are measured, and the results are shown in Figure 4 and Figure 5 respectively, and Figure 4 shows the electrostatic pulse generator under the action of external force Figure 5a is the measurement result of the short-circuit current of the electrostatic pulse generator under the action of external force, and Figure 5b is the measurement result of the short-circuit current of a pulse cycle under the action of external force in Figure 5a. The illustrations in Figure 4 and Figure 5 are schematic diagrams of the connection between the electrostatic pulse generator and the measurement system corresponding to the test results. It can be seen from the experimental results that the connection mode of the two electrode layers of the generator and the positive and negative poles of the measurement system is directly related to the positive and negative of the measured electrical signal.

The inventors of the present invention have found that the influence of the magnitude of the external force on the output power of the electrostatic pulse generator of the present invention has a certain range. When the external force is small, its change can effectively affect the output power, because a larger external force will produce a larger contact area and more effective friction, thereby increasing the contact charge density; while when the external force is large, its The influence of the change on the output power is not obvious, because when the external force is large enough, its influence on the contact area and effective friction is already very limited. It should be noted that the size range is determined by the selection of materials for the first insulating film layer and the second insulating film layer, and quantitative results need to be measured through experiments.

Embodiment five:

Corresponding to the electrostatic pulse generator of the present invention, the inventor also proposes a DC pulse generator, including the electrostatic pulse generator and the full-bridge rectifier described in Embodiment 1, 2 or 3, see FIG. 5 , the static pulse generator The output end of the generator 300 (that is, the first electrode layer and the second electrode layer of the electrostatic pulse generator) is connected to the input end of the full bridge rectifier 310. When the output end of the full bridge rectifier 310 is connected to a load, the electrostatic pulse generator 300 The output AC pulse current can be rectified into a DC pulse current after passing through the full-bridge rectifier 310 and provided to the load. Experiments have proved that the DC pulse generator can be used as a DC pulse power supply for multiple applications in the field of electrochemistry, including metal electroplating, electrolysis of pollutants, and electrochemical corrosion of metals. It should be noted that since the actual pulse voltage at both ends of the load is related to the resistance value of the load, it is necessary to design related devices such as electrolyzers to ensure that the actual pulse voltage is greater than the critical voltage in the above-mentioned electrochemical applications.

When the DC pulse generator in this embodiment is applied in metal plating, a layer of gold with a thickness of 50 nanometers is deposited on a silicon wafer as a seed layer by means of electron beam evaporation, and then plasma-enhanced chemical vapor deposition is used on the silicon wafer. Deposit a layer of silicon dioxide with a thickness of 2 microns on the surface of the gold, and then spin-coat a layer of photoresist on the surface of the silicon dioxide, dry and cure, and use the photolithography process to open the window of the required pattern on the photoresist. The exposed silicon dioxide is directional etched by an inductively coupled plasma etching technique until the seed layer is exposed. After that, connect the silicon test piece as the cathode to the negative pole "-" of the DC pulse generator, and connect the pure metal silver as the sacrificial anode to the positive pole "+" of the DC pulse generator. Under the action of an external force with a frequency of 13 Hz, Electrodeposition was performed for 2 minutes. Take the cathode out of the electrolyte, remove all the remaining silicon dioxide with a buffer etching solution containing HF, and finally wash it with deionized water and dry it. The resulting three-dimensional deposits. Utilize the electrostatic pulse generator to carry out the deposition result after metal electroplating, through electron microscopic analysis, show to adopt DC pulse generator of the present invention to carry out deposit surface compactness after metal electroplating, and have very little grain size, the three-dimensional deposition that obtains The substance was confirmed to be metallic silver by energy spectrum analysis.

The pulse current output by the DC pulse generator in this embodiment can also be used to charge energy storage elements, such as capacitors or lithium-ion batteries, and the stored electric energy can be used to provide power for portable small electronic devices, which has a wide range of applications. Application prospect.

The above descriptions are only preferred embodiments of the present invention, and do not limit the present invention in any form. Any person familiar with the art, without departing from the scope of the technical solution of the present invention, can use the methods and technical content disclosed above to make many possible changes and modifications to the technical solution of the present invention, or modify it into an equivalent of equivalent change Example. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention, which do not deviate from the technical solution of the present invention, still fall within the protection scope of the technical solution of the present invention.

Claims (12)

1. an electrostatic pulse generator, is characterized in that, described generator has layer structure, comprises the first electrode layer, the first insulating barrier, insulation support body, the second insulating barrier and the second electrode lay successively, wherein,

It is poor to there is the electrode sequence that rubs in the material of described first insulating barrier and the second insulating barrier;

Described insulation support body makes to form space between described first insulating barrier and the second insulating barrier, and under external force, described first insulating barrier and the second insulating barrier contact with each other.

2. electrostatic pulse generator according to claim 1, it is characterized in that, described first insulating barrier or the second insulating barrier comprise nano wire or nanometer stick array towards the surface in described space, and described nano wire or nanometer stick array are basically perpendicular to the surface of described first insulating barrier or the second insulating barrier.

3. electrostatic pulse generator according to claim 1, it is characterized in that, described first insulating barrier and/or the second insulating barrier towards the surface in described space through chemical modification, make two insulating barrier Semi-polarities be that positive thin-film surface introduces easy betatopic functional group, or be the functional group that negative material surface introduces the electronics that is easy to get in polarity.

4. the electrostatic pulse generator according to any one of claim 1-3, is characterized in that, described first insulating barrier and/or the second insulating barrier are insulating thin layer.

5. the electrostatic pulse generator according to any one of claim 1-3, is characterized in that, described first insulating barrier and/or the second insulating barrier are elastomeric material, under the effect of external periodic force, and described first insulating barrier and the second insulating barrier periodic contact.

6. the electrostatic pulse generator according to any one of claim 1-3, is characterized in that, described insulation support body is elastomeric material, under the effect of external periodic force, and described first insulating barrier and the second insulating barrier periodic contact.

7. the electrostatic pulse generator according to any one of claim 1-3, it is characterized in that, described first insulating barrier, the second insulating barrier and/or insulation support body are elastomeric material, under the effect of external periodic force, and described first insulating barrier and the second insulating barrier periodic contact.

8. the electrostatic pulse generator according to any one of claim 1-3, is characterized in that, the material of described first insulating barrier and/or the second insulating barrier is Inorganic Non-metallic Materials, high-molecular organic material or its combination.

9. electrostatic pulse generator according to claim 8, it is characterized in that, described first insulating barrier to be thickness the be polymethyl methacrylate film layer of 2 microns, described second insulating barrier to be thickness the be polymethyl methacrylate film of 50 microns, and described second insulating barrier is about the polyimide nano rod array of 1.5 microns comprising length towards the surface in described space, described nanometer stick array is basically perpendicular to described second insulating barrier.

10. the electrostatic pulse generator according to any one of claim 1-3, is characterized in that, described insulation support body is polyimides double faced adhesive tape.

11. electrostatic pulse generators according to any one of claim 1-3, is characterized in that, described external force comprises Low-Frequency Mechanical and impacts and high-frequency mechanical vibration.

12. 1 kinds of DC pulse generators, is characterized in that, comprise electrostatic pulse generator according to claim 1 and full-bridge rectifier, and the output of described electrostatic pulse generator is connected with the input of described full-bridge rectifier.