CN103368056B - Multi-wave-length laser switching and outputting device - Google Patents
Multi-wave-length laser switching and outputting device Download PDFInfo
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Abstract
本发明公开了一种多波长激光切换输出装置,其包括:基频激光源,其用于产生基频光;多个倍频装置,其用于产生多倍频光;多个电光装置,其在电压控制下旋转光的偏振方向;多个偏振片,其用于对预定偏振方向的光高反射,对垂直于预定方向偏振的光高透射;一个输出窗口,其用于输出基频光或多倍频光;其中,通过向所述其中一个或多个电光装置施加电压或不施加电压,使得输出窗口输出基频光或多倍频光中的一种。本发明提出的上述方案既不需要移动非线性晶体与分光镜片,又能保证多种波长沿着同一输出光路、经过同一出光孔输出,且能够最大限度地输出每一种波长激光的多波长激光切换输出装置。
The invention discloses a multi-wavelength laser switching output device, which includes: a fundamental-frequency laser source, which is used to generate fundamental-frequency light; a plurality of frequency-multiplying devices, which are used to generate multi-frequency-doubled light; Rotate the polarization direction of light under voltage control; a plurality of polarizers, which are used for high reflection of light in a predetermined polarization direction, and high transmission for light polarized perpendicular to the predetermined direction; an output window, which is used to output fundamental frequency light or Multiplied frequency light; wherein, by applying voltage or not applying voltage to one or more of the electro-optic devices, the output window outputs one of fundamental frequency light or multiplied frequency light. The above solution proposed by the present invention does not need to move the nonlinear crystal and the spectroscopic lens, but also can ensure that multiple wavelengths are output along the same output optical path and through the same light exit hole, and can output multi-wavelength lasers of each wavelength laser to the maximum Switch the output device.
Description
技术领域technical field
本发明涉及激光器技术领域,特别涉及一种多波长激光切换输出装置。The invention relates to the technical field of lasers, in particular to a multi-wavelength laser switching output device.
背景技术Background technique
伴随着激光技术的迅猛发展,各种各样的激光器分别在工业、科研、国防、医学、娱乐等领域得到了越来越广泛的应用。在这些领域内,对激光器的功能的全面性和使用的便利性有了更高的要求。本身具有同时或者交替输出多种波长激光的激光器,因其具有多种波长带来的多种应用功能,正在成为众多机构发展的对象。With the rapid development of laser technology, various lasers have been widely used in industry, scientific research, national defense, medicine, entertainment and other fields. In these fields, there are higher requirements for the comprehensiveness of functions and the convenience of use of lasers. Lasers that output lasers of multiple wavelengths simultaneously or alternately are becoming the development target of many institutions because of their multiple application functions brought by multiple wavelengths.
在现有的技术中,如图1所示,一种传统的激光器多波长输出方式包括基频激光光源11、其后的二倍频晶体121和三倍频晶体122、第一分光镜131、第二分光镜132以及激光吸收体14,第二分光镜132放置在第一分光镜131的反射光线路上,其它部件依次放置在激光光源11的入射光轴上。工作时,基频激光光源11发出的基频光经过二倍频晶体121和三倍频晶体122的非线性效应,部分转换为二倍频光和三倍频光,再经过第一分光镜131和第二分光镜132的分光,将三倍频光输出,基频激光和二倍频激光则入射到激光吸收体14内部。以此类推,通过更换非线性晶体和分光镜,可以分别输出基频光和二倍频光。基频光和二、三倍频光均可单独沿同一输出光路、经过同一出光孔输出。In the existing technology, as shown in Figure 1, a traditional laser multi-wavelength output mode includes a fundamental frequency laser source 11, followed by a double frequency crystal 121 and a triple frequency crystal 122, a first beam splitter 131, The second beam splitter 132 and the laser absorber 14 , the second beam splitter 132 is placed on the reflected light path of the first beam splitter 131 , and other components are sequentially placed on the incident light axis of the laser light source 11 . During operation, the fundamental-frequency light emitted by the fundamental-frequency laser light source 11 is partially converted into double-frequency light and triple-frequency light through the nonlinear effect of the double-frequency crystal 121 and the triple-frequency crystal 122, and then passes through the first beam splitter 131 and the second beam splitter 132 to output triple frequency light, and the fundamental frequency laser and double frequency laser are incident into the laser absorber 14 . By analogy, by replacing the nonlinear crystal and the beam splitter, the fundamental frequency light and the double frequency light can be output respectively. The fundamental frequency light and the double and triple frequency light can be output separately along the same output light path and through the same light exit hole.
上述装置在进行波长切换时,不仅需要不停地通过机械手段更换各种分光镜,要求带有精密的机械平移装置,还需要频繁的将非线性晶体移入与撤出光路。例如如果要输出基频激光,需要将二倍频晶体和三倍频晶体均撤出光路,再更换针对三倍频光的分光镜为针对基频光的分光镜;以此类推,如果需要输出二倍频激光,需要将三倍频晶体撤出光路,再更换三倍频分光镜为二倍频分光镜。由于通常情况下非线性晶体的频率变换效率对水平与俯仰角度敏感,故在晶体移入与撤出光路的过程中,需要具有极高精度的精密机械装置才能保证在移动前后,晶体的角度保持不变,否则会影响各晶体复位后的频率变换效率,而这种极高精度的精密机械装置往往非常昂贵并且难以保证长期工作的精确度稳定性。况且,要完成如此多的移入与撤出动作,需要附带许多精密机械装置与控制装置,大大增加了激光设备的成本,降低了设备的整体可靠性。When the above-mentioned device performs wavelength switching, it not only needs to continuously replace various beam splitters by mechanical means, but also requires a precise mechanical translation device, and also needs to frequently move the nonlinear crystal into and out of the optical path. For example, if you want to output the fundamental frequency laser, you need to withdraw both the double frequency crystal and the triple frequency crystal from the optical path, and then replace the beam splitter for the triple frequency light with the beam splitter for the fundamental frequency light; and so on, if you need to output For double-frequency laser, the triple-frequency crystal needs to be withdrawn from the optical path, and then the triple-frequency beam splitter should be replaced with a double-frequency beam splitter. Since the frequency conversion efficiency of nonlinear crystals is usually sensitive to the horizontal and pitch angles, a very high-precision precision mechanical device is required to ensure that the crystal angle remains the same before and after the movement when the crystal moves into and out of the optical path. Otherwise, it will affect the frequency conversion efficiency of each crystal after reset, and this kind of extremely high-precision precision mechanical device is often very expensive and it is difficult to ensure the accuracy and stability of long-term work. Moreover, to complete so many moving in and out actions, many precision mechanical devices and control devices are required, which greatly increases the cost of the laser equipment and reduces the overall reliability of the equipment.
在现有技术中,如图2所示,另外一种传统的激光器多波长输出方式包括基频激光光源21、其后的二倍频晶体221和三倍频晶体222、第一、第二分光镜231、232,以上部件依次放置在激光光源21的入射光轴上,第三分光镜233和第四分光镜234分别放置在第一分光镜231和第二分光镜232的反射光线路上。第一分光镜231对三倍频光高反射、对基频光和二倍频光高透射;第二分光镜232对二倍频光高反射、对基频光高透射。第三分光镜233对三倍频光高反射;第四分光镜234对二倍频光高反射。工作时,利用各分光镜的分光功能,同时输出基频光、二倍频光和三倍频光。各非线性晶体不需要被频繁的移入与撤出光路。但是基频光、倍频光和三倍频光却沿着不同的光轴输出,经过三个出光口。这在实际使用中更换出光波长时会较为麻烦,必须重新对准、重新调校激光器整个外部传输及控制光路。同时,得到的基频光是经历了二倍频和三倍频变换后的剩余激光,得到的二倍频光是经历了三倍频变换后的剩余激光,功率会比初始状态有大幅度的降低,减小了激光的应用范围,不利于激光设备的多功能应用。In the prior art, as shown in Figure 2, another traditional laser multi-wavelength output method includes a fundamental frequency laser source 21, followed by a double frequency crystal 221 and a frequency triple crystal 222, first and second splitters Mirrors 231, 232, the above components are sequentially placed on the incident optical axis of the laser light source 21, and the third beam splitter 233 and the fourth beam splitter 234 are respectively placed on the reflected light paths of the first beam splitter 231 and the second beam splitter 232. The first beam splitter 231 is highly reflective to triple-frequency light and highly transparent to fundamental-frequency light and double-frequency light; the second beam-splitter 232 is highly reflective to double-frequency light and highly transparent to fundamental frequency light. The third beam splitter 233 is highly reflective to triple frequency light; the fourth beam splitter 234 is highly reflective to double frequency light. When working, the beam splitting function of each beam splitter is used to simultaneously output the fundamental frequency light, the double frequency light and the triple frequency light. Each nonlinear crystal does not need to be frequently moved in and out of the optical path. However, the fundamental frequency light, double frequency light and triple frequency light are output along different optical axes and pass through three light outlets. This will be more troublesome when changing the output wavelength in actual use, and the entire external transmission and control optical path of the laser must be re-aligned and re-adjusted. At the same time, the obtained fundamental frequency light is the remaining laser light after undergoing double frequency and triple frequency transformation, and the obtained double frequency light is the remaining laser light after undergoing triple frequency transformation, and the power will be significantly higher than the initial state. Reduced, reducing the application range of the laser, which is not conducive to the multi-functional application of laser equipment.
发明内容Contents of the invention
本发明的目的是提供一种既不需要移动非线性晶体与分光镜片,又能保证多种波长沿着同一输出光路、经过同一出光孔输出,且能够最大限度地输出每一种波长激光的多波长激光切换输出装置。The purpose of the present invention is to provide a multi-wavelength laser that does not need to move the nonlinear crystal and spectroscopic lens, but also can ensure that multiple wavelengths are output along the same output optical path and through the same light exit hole, and can output each wavelength laser to the maximum. Wavelength laser switching output device.
为此,本发明提出了一种多波长激光切换输出装置,其包括:For this reason, the present invention proposes a kind of multi-wavelength laser switching output device, which comprises:
基频激光源,其用于产生基频光;a fundamental frequency laser source for generating fundamental frequency light;
多个倍频装置,其用于产生多倍频光;a plurality of frequency doubling devices for generating multiplied frequency light;
多个电光装置,其在电压控制下旋转光的偏振方向;a plurality of electro-optic devices that rotate the polarization of light under voltage control;
多个偏振片,其用于对预定偏振方向的光高反射,对垂直于预定方向偏振的光高透射;一个输出窗口,其用于输出基频光或多倍频光;A plurality of polarizers, which are used for high reflection of light in a predetermined polarization direction, and high transmission of light polarized perpendicular to the predetermined direction; an output window, which is used to output fundamental frequency light or multiplied frequency light;
其中,通过向所述其中一个或多个电光装置施加电压或不施加电压,使得输出窗口输出基频光或多倍频光中的一种。Wherein, by applying voltage or not applying voltage to one or more of the electro-optic devices, the output window outputs one of fundamental frequency light or multiplied frequency light.
本发明的有益效果是提供一种既不需要移动非线性晶体与分光镜片,又能保证多种波长沿着同一输出光路、经过同一出光孔输出,且能够最大限度地输出每一种波长激光的多波长激光切换输出装置。使得多波长激光器在实际应用时,不需要使用具有极高精度的精密机械装置,大大降低了制造难度与成本;不需要再次对准、调校外部传输控制光路,可以方便地随时切换、充分地输出每一种波长的激光,用于各种工作状态与条件下。The beneficial effect of the present invention is to provide a laser beam that does not need to move the nonlinear crystal and spectroscopic lens, but also can ensure that multiple wavelengths are output along the same output optical path and through the same light exit hole, and can output each wavelength of laser light to the maximum. Multi-wavelength laser switching output device. The multi-wavelength laser does not need to use extremely high-precision precision mechanical devices in practical applications, which greatly reduces the difficulty and cost of manufacturing; it does not need to re-align and adjust the external transmission control optical path, and can be easily switched at any time and fully Laser output of each wavelength is used in various working states and conditions.
附图说明Description of drawings
图1为现有技术中一种多波长激光输出方式的结构示意图;Fig. 1 is a structural schematic diagram of a multi-wavelength laser output mode in the prior art;
图2为现有技术中另一种多波长激光输出方式的结构示意图;FIG. 2 is a structural schematic diagram of another multi-wavelength laser output mode in the prior art;
图3为本发明多波长激光切换输出装置的结构示意图。FIG. 3 is a schematic structural diagram of a multi-wavelength laser switching output device of the present invention.
具体实施方式Detailed ways
为使本发明的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本发明作进一步的详细说明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
图3示出了本发明提出的多波长激光切换输出装置结构图。如图3所示,该多波长激光切换输出装置包括:Fig. 3 shows a structure diagram of a multi-wavelength laser switching output device proposed by the present invention. As shown in Figure 3, the multi-wavelength laser switching output device includes:
一基频激光源31,其用于得到偏振方向沿水平方向(平行于纸面且垂直于光线)的线偏振基频光,基频光波长为1064nm;A fundamental frequency laser source 31, which is used to obtain the linearly polarized fundamental frequency light whose polarization direction is along the horizontal direction (parallel to the paper and perpendicular to the light), and the wavelength of the fundamental frequency light is 1064nm;
第一电光装置321,其用于对所述线偏振基频光起到旋转偏振方向的作用,内含电光晶体KDP(磷酸二氢钾),两通光表面均镀制对1064nm基频光的高透射膜层,由机器外部驱动源通过对晶体施加电压控制(图中未示出),通过施加一定的电压,可以使入射的线偏振1064nm基频光的偏振方向旋转90°;The first electro-optic device 321, which is used to rotate the polarization direction of the linearly polarized fundamental frequency light, contains electro-optic crystal KDP (potassium dihydrogen phosphate), and the surfaces of the two light channels are all plated to 1064nm fundamental frequency light. The high-transmittance film layer is controlled by the external drive source of the machine by applying a voltage to the crystal (not shown in the figure). By applying a certain voltage, the polarization direction of the incident linearly polarized 1064nm fundamental frequency light can be rotated by 90°;
对于所述线偏振基频1064nm光进行偏振的第一偏振片331、第二偏振片332以及第三偏振片333,此三偏振片对偏振方向沿竖直方向(垂直于纸面)的线偏振1064nm光高反射,对偏振方向沿水平方向(平行于纸面且垂直于光线)的线偏振1064nm光高透射;For the first polarizer 331, the second polarizer 332, and the third polarizer 333 that polarize the linearly polarized fundamental frequency 1064nm light, the linear polarization of the three polarizers is along the vertical direction (perpendicular to the paper surface) High reflection of 1064nm light, high transmission of linearly polarized 1064nm light whose polarization direction is along the horizontal direction (parallel to the paper surface and perpendicular to the light);
第一分光镜351,对于基频1064nm光高反射;The first beam splitter 351 is highly reflective for light with a fundamental frequency of 1064nm;
用于产生二倍频532nm激光的二倍频装置341,其在接收到基频光后产生二倍频光,采用非临界型I类相位匹配LBO(三硼酸锂)晶体,两通光表面镀制基频1064nm、二倍频532nm激光高透射膜层。The frequency doubling device 341 for generating double frequency 532nm laser, which generates double frequency light after receiving the fundamental frequency light, adopts non-critical type I phase-matched LBO (lithium triborate) crystal, and the surface of the two passes is plated The base frequency 1064nm, double frequency 532nm laser high transmittance film layer.
对于通过所述二倍频装置341后剩余的线偏振基频光起到旋转偏振作用的第二电光装置322,内含电光晶体KDP(磷酸二氢钾),两通光表面均镀制对基频1064nm激光的高透射膜层,由机器外部驱动源通过对晶体施加电压控制(图中未示出),通过施加一定的电压,可以使入射的通过二倍频装置341后剩余的线偏振基频1064nm激光的偏振方向旋转90°;The second electro-optic device 322, which plays the role of rotating polarization for the remaining linearly polarized fundamental frequency light after passing through the double frequency device 341, contains electro-optic crystal KDP (potassium dihydrogen phosphate), and the two optical surfaces are plated on the base The high-transmittance film layer of the 1064nm laser frequency is controlled by the external drive source of the machine by applying a voltage to the crystal (not shown in the figure). By applying a certain voltage, the remaining linearly polarized radicals after passing through the double frequency device 341 can be made The polarization direction of the frequency 1064nm laser is rotated by 90°;
第二分光镜352和第三分光镜353,其对于基频1064nm光高反射;The second beam splitter 352 and the third beam splitter 353, which are highly reflective for fundamental frequency 1064nm light;
第四分光镜354和第五分光镜355,其对于基频1064nm光高反射;对于二倍频532nm光高透射;The fourth beam splitter 354 and the fifth beam splitter 355, which are highly reflective for the fundamental frequency 1064nm light; high transmittance for the double frequency 532nm light;
用于产生三倍频355nm激光的三倍频装置342,其在接收到基频光和二倍频光后产生三倍频光,其用临界型II类相位匹配LBO(三硼酸锂)晶体,两通光表面镀制基频1064nm、二倍频532nm、三倍频355nm激光高透射膜层;The frequency-tripling device 342 for generating triple-frequency 355nm laser, which generates triple-frequency light after receiving the fundamental frequency light and the double-frequency light, uses a critical type II phase-matched LBO (lithium triborate) crystal, The surface of the two-pass light is plated with a high-transmittance film layer of fundamental frequency 1064nm, double frequency 532nm, and triple frequency 355nm;
第六分光镜356,对于基频1064nm光以及二倍频532nm光高反射,对三倍频355nm光高透射;The sixth beamsplitter 356 is highly reflective for light with a fundamental frequency of 1064nm and light with a double frequency of 532nm, and high transmittance for light with a triple frequency of 355nm;
对于所述二倍频532nm光起到旋转偏振作用的第三电光装置323,内含电光晶体KDP(磷酸二氢钾),两通光表面均镀制对二倍频532nm激光的高透射膜层,由机器外部驱动源通过对晶体施加电压控制(图中未示出),通过施加一定的电压,可以使入射的线偏振二倍频532nm激光的偏振方向旋转90°;The third electro-optic device 323, which plays the role of rotating polarization for the double frequency 532nm light, contains electro-optic crystal KDP (potassium dihydrogen phosphate), and the surfaces of the two light passes are coated with a high-transmittance film layer for the double frequency 532nm laser. , the external drive source of the machine is controlled by applying a voltage to the crystal (not shown in the figure), and by applying a certain voltage, the polarization direction of the incident linearly polarized double-frequency 532nm laser can be rotated by 90°;
对于所述二倍频532nm光进行偏振的第四偏振片334,此偏振片对偏振方向沿竖直方向(垂直于纸面)的线偏振532nm光高反射,对偏振方向沿水平方向(平行于纸面且垂直于光线)的线偏振二倍频532nm光高透射;For the fourth polarizer 334 that polarizes the double frequency 532nm light, this polarizer is highly reflective to the linearly polarized 532nm light whose polarization direction is along the vertical direction (perpendicular to the paper surface), and along the horizontal direction (parallel to the paper surface) to the polarization direction. High transmission of linearly polarized double frequency 532nm light on the paper surface and perpendicular to the light;
第七分光镜357,对于二倍频532nm光高反射,对于基频1064nm光高透射;The seventh beam splitter 357 is highly reflective for double frequency 532nm light and highly transparent for fundamental frequency 1064nm light;
第八分光镜358,对于二倍频532nm光高反射;The eighth beam splitter 358 is highly reflective for double frequency 532nm light;
第九分光镜359,对于二倍频532nm光高反射,对于基频1064nm光以及三倍频355nm光高透射;The ninth beam splitter 359 is highly reflective for double frequency 532nm light, and highly transparent for fundamental frequency 1064nm light and triple frequency 355nm light;
第一吸收体361,用于接收第三偏振片333反射的基频1064nm光;The first absorber 361 is used to receive the fundamental frequency 1064nm light reflected by the third polarizer 333;
第二吸收体362,用于接收第七分光镜357透射的基频1064nm光;The second absorber 362 is used to receive the fundamental frequency 1064nm light transmitted by the seventh beam splitter 357;
第三吸收体363,用于接收第四偏振片334反射的二倍频532nm光;此三个吸收体用来吸收剩余的激光,避免激光泄露造成危险。The third absorber 363 is used to receive the double frequency 532nm light reflected by the fourth polarizer 334; these three absorbers are used to absorb the remaining laser light to avoid danger caused by laser leakage.
窗口片37,各种波长激光均最终从该窗口片输出,该窗口片对于基频1064nm、二倍频532nm、三倍频355nm激光高透射。The window 37 , from which lasers of various wavelengths are finally output, the window has high transmittance to lasers with a fundamental frequency of 1064nm, a doubled frequency of 532nm, and a tripled frequency of 355nm.
上述多个器件中,第一电光装置321、第一偏振片331、二倍频装置341、第四分光镜354、第五分光镜355、三倍频装置342、第六分光镜356、第九分光镜359和窗口片37依次放置在所述基频激光源31出光的光路上;第二偏振片332放置于所述第一偏振片331的反射光路上;所述第一分光镜351放置在所述第二偏振片332的反射光路上,且第一分光镜351的反射光路入射至第六分光镜356上;所述第二分光镜352放置在所述第四分光镜354的反射光路上,第二电光装置322放置于所述第二分光镜352的反射光路上;第三偏振片333放置于所述第二电光装置322的出射光路上;第一吸收体361位于所述第三偏振片333的反射光路上;所述第三分光镜353放置于所述第三偏振片333的透射光路上,且其反射光路入射至第五分光镜355;所述第六分光镜356和所述第七分光镜357依次位于第一分光镜351的反射光路上;所述第二吸收体362位于所述第七分光镜357的透射光路上;所述第三电光装置323位于所述第七分光镜357的反射光路上,所述第四偏振片334位于所述第三电光装置的出射光路上,所述第三吸收体363位于所述第四偏振片334的反射光路上;所述第八分光镜358位于第四偏振片334的透射光路上,且其反射光路入射至第九分光镜359上。Among the above multiple devices, the first electro-optic device 321, the first polarizer 331, the double frequency device 341, the fourth beam splitter 354, the fifth beam splitter 355, the triple frequency device 342, the sixth beam splitter 356, the ninth The beam splitter 359 and the window plate 37 are sequentially placed on the light path of the fundamental frequency laser source 31; the second polarizer 332 is placed on the reflected light path of the first polarizer 331; the first beam splitter 351 is placed on the The reflection light path of the second polarizer 332, and the reflection light path of the first beam splitter 351 is incident on the sixth beam splitter 356; the second beam splitter 352 is placed on the reflection light path of the fourth beam splitter 354 , the second electro-optic device 322 is placed on the reflected light path of the second beam splitter 352; the third polarizer 333 is placed on the outgoing light path of the second electro-optic device 322; the first absorber 361 is located on the third polarization The reflected optical path of the sheet 333; the third beam splitter 353 is placed on the transmitted optical path of the third polarizer 333, and its reflected optical path is incident on the fifth beam splitter 355; the sixth beam splitter 356 and the The seventh beam splitter 357 is sequentially located on the reflected light path of the first beam splitter 351; the second absorber 362 is located on the transmitted light path of the seventh beam splitter 357; the third electro-optic device 323 is located on the seventh beam splitter On the reflective optical path of the mirror 357, the fourth polarizer 334 is located on the outgoing optical path of the third electro-optic device, and the third absorber 363 is located on the reflective optical path of the fourth polarizer 334; the eighth The beam splitter 358 is located on the transmitted light path of the fourth polarizer 334 , and its reflected light path is incident on the ninth beam splitter 359 .
采用本发明的装置,实现多波长激光切换输出的方法如下:Using the device of the present invention, the method for realizing multi-wavelength laser switching output is as follows:
按照上述内容中的结构,依次摆放各器件,第一、第二、第三电光装置321、322、323上均不施加电压,使其不改变入射的线偏振基频1064nm光和二倍频532nm激光的偏振方向。此时开启激光源31,则其发射的偏振方向沿水平方向(平行于纸面且垂直于光线)的基频1064nm激光通过第一偏振片331后透射进入二倍频装置341,得到偏振方向沿竖直方向(垂直于纸面)的二倍频532nm激光。此时剩余的基频1064nm光由第四分光镜354、第二分光镜352高反射后,经过第二电光装置322后由第三偏振片333高透射,再经由第三分光镜353和第五分光镜355高反射后进入三倍频装置342,而二倍频532nm激光由第四分光镜354和第五分光镜355高透射后也进入三倍频装置342,基频1064nm光和二倍频532nm光在三倍频装置342中产生三倍频355nm光,经由第六分光镜356、第九分光镜359高透射后,通过窗口片37出射,而通过三倍频装置342后剩余的基频1064nm光,经由第六分光镜356高反射、第七分光镜357高透射进入第二吸收体362,剩余的二倍频532nm光经由第六分光镜356和第七分光镜357高反射后,经过第三电光装置323后被第四偏振片334高反射进入第三吸收体363,所以最终从窗口片37输出的是单纯的三倍频355nm光。According to the structure in the above content, each device is placed in sequence, and no voltage is applied to the first, second, and third electro-optical devices 321, 322, and 323, so that the incident linearly polarized fundamental frequency 1064nm light and the doubled frequency are not changed. The polarization direction of the 532nm laser. Turn on the laser source 31 at this time, then the fundamental frequency 1064nm laser with the polarization direction of its emission along the horizontal direction (parallel to the paper surface and perpendicular to the light) passes through the first polarizer 331 and then enters the double frequency device 341 to obtain the polarization direction along the horizontal direction. Double frequency 532nm laser in the vertical direction (perpendicular to the paper). At this time, the remaining light with a fundamental frequency of 1064nm is highly reflected by the fourth beam splitter 354 and the second beam splitter 352, passes through the second electro-optic device 322, is highly transmitted by the third polarizer 333, and then passes through the third beam splitter 353 and the fifth beam splitter. The beam splitter 355 enters the triple frequency device 342 after high reflection, and the double frequency 532nm laser also enters the triple frequency device 342 after being highly transmitted by the fourth beam splitter 354 and the fifth beam splitter 355, and the fundamental frequency 1064nm light and the double frequency The 532nm light generates triple frequency 355nm light in the triple frequency device 342, after passing through the sixth beam splitter 356 and the ninth beam splitter 359, it exits through the window plate 37, and the remaining fundamental frequency after passing through the triple frequency device 342 The 1064nm light enters the second absorber 362 through the sixth beamsplitter 356 with high reflection and the seventh beamsplitter 357 with high transmission, and the remaining double-frequency 532nm light is highly reflected by the sixth beamsplitter 356 and the seventh beamsplitter 357, and then passes through The third electro-optical device 323 is highly reflected by the fourth polarizer 334 and enters the third absorber 363 , so the output from the window 37 is pure tripled frequency 355nm light.
通过外部驱动源,在第二电光装置322上施加电压,使其将通过的基频1064nm激光偏振方向旋转90°变为沿竖直方向(垂直于纸面),在第三电光装置323上施加电压,将通过的二倍频532nm激光偏振方向旋转90°变为沿水平方向(平行于纸面且垂直于光线),此时通过二倍频装置341后剩余的基频1064nm光经过第二电光装置322后由第三偏振片333高反射进入第一吸收体361,产生的二倍频532nm光单独经过三倍频装置342不产生频率变换,高透射通过后,经由第六分光镜356和第七分光镜357高反射后,经过第三电光装置323旋转偏振方向后被第四偏振片334高透射,经由第八分光镜358和第九分光镜359高反射后通过窗口片37出射,最终从窗口片37输出的是单纯的二倍频532nm光。Through an external driving source, a voltage is applied to the second electro-optic device 322 to rotate the polarization direction of the passing fundamental frequency 1064nm laser by 90° into a vertical direction (perpendicular to the paper), and a voltage is applied to the third electro-optic device 323. Voltage, rotate the polarization direction of the passing double frequency 532nm laser by 90° to be along the horizontal direction (parallel to the paper surface and perpendicular to the light), at this time, the remaining fundamental frequency 1064nm light after passing through the double frequency device 341 passes through the second electro-optic After the device 322, it is highly reflected by the third polarizer 333 and enters the first absorber 361. The generated double frequency 532nm light alone passes through the triple frequency device 342 without frequency conversion. After passing through the high transmission, it passes through the sixth beam splitter 356 and the second After being highly reflected by the seven beamsplitters 357, the polarization direction is rotated by the third electro-optic device 323 and then highly transmitted by the fourth polarizer 334. After being highly reflected by the eighth beamsplitter 358 and the ninth beamsplitter 359, it exits through the window plate 37, and finally from the What the window plate 37 outputs is pure double frequency 532nm light.
通过激光器外部的驱动源,在第一电光装置321上施加电压,使其将通过的基频1064nm激光偏振方向旋转90°变为沿竖直方向(垂直于纸面),则其发射的基频1064nm激光被第一偏振片331高反射,后经第二偏振片332、第一分光镜351、第六分光镜356高反射并由第九分光镜359高透射后,经由窗片37输出,从而由此装置得到单纯的基频1064nm激光输出;Through the driving source outside the laser, a voltage is applied to the first electro-optic device 321, so that it rotates the polarization direction of the passing fundamental frequency 1064nm laser by 90° to become along the vertical direction (perpendicular to the paper surface), then the emitted fundamental frequency The 1064nm laser is highly reflected by the first polarizer 331, then highly reflected by the second polarizer 332, the first beam splitter 351, and the sixth beam splitter 356, and highly transmitted by the ninth beam splitter 359, and output through the window 37, thereby From this device, a pure fundamental frequency 1064nm laser output is obtained;
光线对于所述第一分光镜351、第二分光镜352、第三分光镜353、第四分光镜354、第五分光镜355、第六分光镜356、第七分光镜357、第八分光镜358、第九分光镜359镜面的入射角均为45°,各分光镜镜面上镀制的高透射、高反射膜层均以光线入射角45°为前提条件。For the first beamsplitter 351, the second beamsplitter 352, the third beamsplitter 353, the fourth beamsplitter 354, the fifth beamsplitter 355, the sixth beamsplitter 356, the seventh beamsplitter 357, and the eighth beamsplitter The incident angles of the mirror surfaces of 358 and 9th beam splitter 359 are both 45°, and the high-transmission and high-reflection coatings plated on the mirror surfaces of each beam splitter are based on the premise that the light incident angle is 45°.
以上三种工作方式之间可以方便地实时通过控制激光器外部的驱动源来进行波长之间的切换,不需要移动任何非线性晶体与分光镜片,又能保证多种波长沿着同一输出光路、经过同一出光孔输出,且能够最大限度地输出每一种波长激光。The above three working modes can conveniently switch between the wavelengths by controlling the external driving source of the laser in real time, without moving any nonlinear crystals and spectroscopic lenses, and can ensure that multiple wavelengths pass through the same output optical path. Output from the same light hole, and can output each wavelength of laser light to the maximum.
以上所述的具体实施例,对本发明的目的、技术方案和有益效果进行了进一步详细说明,应理解的是,以上所述仅为本发明的具体实施例而已,并不用于限制本发明,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The specific embodiments described above have further described the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above descriptions are only specific embodiments of the present invention, and are not intended to limit the present invention. Within the spirit and principles of the present invention, any modifications, equivalent replacements, improvements, etc., shall be included in the protection scope of the present invention.
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