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CN103359772A - Method for preparing antimony-doped zinc-oxide (ZnO) nanowire - Google Patents

Method for preparing antimony-doped zinc-oxide (ZnO) nanowire Download PDF

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CN103359772A
CN103359772A CN2012104339858A CN201210433985A CN103359772A CN 103359772 A CN103359772 A CN 103359772A CN 2012104339858 A CN2012104339858 A CN 2012104339858A CN 201210433985 A CN201210433985 A CN 201210433985A CN 103359772 A CN103359772 A CN 103359772A
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antimony
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zinc oxide
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CN103359772B (en
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王中林
武文倬
温肖楠
肯普拉德尔
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Beijing Institute of Nanoenergy and Nanosystems
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National Center for Nanosccience and Technology China
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Abstract

本发明提供了一种锑掺杂氧化锌纳米线的制备方法,其特征在于,该方法包括:配制锑掺杂溶液和水热合成溶液,其中,所述锑掺杂溶液为醋酸锑、羟基乙酸和氢氧化钠的水溶液,所述水热合成溶液为六水合硝酸锌、四氮六甲圜和聚乙烯亚胺的水溶液;根据锑掺杂比例量取所述锑掺杂溶液和水热合成溶液混合,并加入氨水获得混合溶液;最后在所述混合溶液中进行锑掺杂ZnO纳米线的水热合成,即将表面制备有氧化籽晶的衬底放置在所述混合溶液中进行水热法生长氧化锌纳米线。采用本发明的方法在水热反应中制备锑掺杂氧化锌纳米线,制备温度低,可以适用在有机物等柔性基底上。

Figure 201210433985

The invention provides a method for preparing antimony-doped zinc oxide nanowires, which is characterized in that the method comprises: preparing an antimony-doped solution and a hydrothermal synthesis solution, wherein the antimony-doped solution is antimony acetate, glycolic acid and an aqueous solution of sodium hydroxide, the hydrothermal synthesis solution is an aqueous solution of zinc nitrate hexahydrate, hexamethylene tetraazol and polyethyleneimine; measure the antimony-doped solution and the hydrothermal synthesis solution according to the antimony doping ratio , and ammonia water was added to obtain a mixed solution; finally, the hydrothermal synthesis of antimony-doped ZnO nanowires was carried out in the mixed solution, that is, the substrate prepared with oxidized seed crystals on the surface was placed in the mixed solution for hydrothermal growth and oxidation Zinc nanowires. The method of the invention is used to prepare antimony-doped zinc oxide nanowires in a hydrothermal reaction, the preparation temperature is low, and it can be applied on flexible substrates such as organic matter.

Figure 201210433985

Description

一种锑掺杂氧化锌纳米线的制备方法A kind of preparation method of antimony doped zinc oxide nanowire

技术领域 technical field

本发明涉及纳米材料制备领域,特别是涉及一种探锑掺杂的氧化锌纳米线制备方法。The invention relates to the field of nanomaterial preparation, in particular to a method for preparing antimony-doped zinc oxide nanowires.

背景技术 Background technique

掺杂的一维纳米材料在纳米电子学领域中有着重要的意义和广阔的前景。n型和p型掺杂的材料结合到一起可以制作p-n结,而p-n结在发光二级管、晶体管和光伏器件中有着重要应用。鉴于氧化锌是一种兼具半导体和压电效应的材料,并且其合成方法相对简单、稳定且有效,氧化锌成为了纳米发电机和压电电子学中的支柱材料。没有经过刻意掺杂的氧化锌天然为n型半导体,近年来,利用外来元素,诸如氮、磷、锑等对氧化锌进行掺杂被广泛研究。成功合成同质p-n结氧化锌纳米线的能力将使得基于单根纳米线的发光二级管和逻辑电路成为可能。Doped one-dimensional nanomaterials have great significance and broad prospects in the field of nanoelectronics. The combination of n-type and p-type doped materials can make p-n junctions, and p-n junctions have important applications in light-emitting diodes, transistors and photovoltaic devices. Given that ZnO is a material with both semiconductor and piezoelectric effects, and its synthesis method is relatively simple, stable and effective, ZnO has become a mainstay material in nanogenerators and piezoelectric electronics. Zinc oxide that has not been deliberately doped is naturally an n-type semiconductor. In recent years, doping zinc oxide with foreign elements such as nitrogen, phosphorus, and antimony has been extensively studied. The ability to successfully synthesize homogeneous p-n junction ZnO nanowires will enable light-emitting diodes and logic circuits based on single nanowires.

尽管先前已有报道成功的对氧化锌纳米线进行p型掺杂,但是所用的合成方法需借助固相-液相-气相(VLS)机制,需要在极高的温度下进行。这一点严重限制了生长氧化锌纳米线可用的衬底的种类,不适用在有机物等柔性基底上制备p型掺杂的氧化锌纳米线。Although the successful p-type doping of ZnO nanowires has been reported previously, the synthesis method used relies on the solid-liquid-gas (VLS) mechanism, which needs to be carried out at extremely high temperatures. This severely limits the types of substrates available for growing ZnO nanowires, and is not suitable for preparing p-type doped ZnO nanowires on flexible substrates such as organic matter.

发明内容 Contents of the invention

为了克服现有氧化锌纳米线p型掺杂需要在高温下进行的缺陷,本发明的目的在于提供一种在低温条件制备锑(Sb)掺杂氧化锌纳米线的方法。In order to overcome the defect that p-type doping of zinc oxide nanowires needs to be carried out at high temperature, the purpose of the present invention is to provide a method for preparing antimony (Sb) doped zinc oxide nanowires at low temperature.

为了达到上述目的,本发明提供一种锑掺杂氧化锌纳米线的制备方法,该方法包括:In order to achieve the above object, the present invention provides a method for preparing antimony-doped zinc oxide nanowires, the method comprising:

配制锑掺杂溶液和水热合成溶液,其中,所述锑掺杂溶液为醋酸锑、羟基乙酸和氢氧化钠的水溶液,所述水热合成溶液为六水合硝酸锌、四氮六甲圜和聚乙烯亚胺的水溶液;Prepare an antimony doping solution and a hydrothermal synthesis solution, wherein the antimony doping solution is an aqueous solution of antimony acetate, glycolic acid and sodium hydroxide, and the hydrothermal synthesis solution is zinc nitrate hexahydrate, hexamethylene tetraazide and poly Aqueous solution of ethyleneimine;

根据锑掺杂比例量取所述锑掺杂溶液和水热合成溶液混合,并加入氨水获得混合溶液;Measure the antimony doped solution according to the antimony doping ratio and mix it with the hydrothermal synthesis solution, and add ammonia water to obtain a mixed solution;

将表面制备有氧化锌籽晶的衬底放置在所述混合溶液中进行水热法生长氧化锌纳米线。The substrate prepared with zinc oxide seed crystals on the surface is placed in the mixed solution for hydrothermal growth of zinc oxide nanowires.

优选的,所述配制锑掺杂溶液的步骤包括:Preferably, the step of preparing the antimony doping solution comprises:

将所述羟基乙酸与氢氧化钠溶解于去离子水中形成羟基乙酸与氢氧化钠的水溶液;在匀速搅拌所述羟基乙酸与氢氧化钠的水溶液状态下缓慢加入醋酸锑形成锑掺杂溶液;其中,所述醋酸锑、羟基乙酸与氢氧化钠的摩尔比为1:12:12。Dissolving the glycolic acid and sodium hydroxide in deionized water to form an aqueous solution of glycolic acid and sodium hydroxide; slowly adding antimony acetate to form an antimony-doped solution while stirring the aqueous solution of glycolic acid and sodium hydroxide at a constant speed; wherein , the molar ratio of antimony acetate, glycolic acid and sodium hydroxide is 1:12:12.

优选的,所述配制水热合成溶液的步骤为在去离子水中依次加入六水合硝酸锌、四氮六甲圜和聚乙烯亚胺,其中,六水合硝酸锌、四氮六甲圜和聚乙烯亚胺的的摩尔比为10:5:2。Preferably, the step of preparing the hydrothermal synthesis solution is to sequentially add zinc nitrate hexahydrate, hexamethylene tetraazol and polyethyleneimine to deionized water, wherein, zinc nitrate hexahydrate, hexamethylene tetraazol and polyethyleneimine The molar ratio is 10:5:2.

优选的,所述将表面制备有氧化锌籽晶的衬底放置在混合溶液中进行水热法生长氧化锌纳米线步骤前还包括:预热处理所述混合溶液的步骤。Preferably, before the step of placing the substrate prepared with zinc oxide seed crystals on the surface in the mixed solution for hydrothermal growth of zinc oxide nanowires, the step further includes: a step of preheating the mixed solution.

优选的,所述预热处理所述混合溶液步骤为在95℃保温1小时。Preferably, the step of preheating the mixed solution is to keep the temperature at 95° C. for 1 hour.

优选的,所述锑掺杂比例为0%-2%。Preferably, the antimony doping ratio is 0%-2%.

优选的,水热生长锑掺杂氧化锌纳米线后,还包括退火所述锑掺杂氧化锌纳米线步骤。Preferably, after the hydrothermal growth of the antimony-doped zinc oxide nanowires, the step of annealing the antimony-doped zinc oxide nanowires is further included.

与现有技术相比,本发明的振动探测器具有下列优点:Compared with the prior art, the vibration detector of the present invention has the following advantages:

本发明提供一种锑掺杂氧化锌纳米线的制备方法,首先配制锑掺杂溶液和水热合成溶液,其中,所述锑掺杂溶液为醋酸锑、羟基乙酸和氢氧化钠的水溶液,所述水热合成溶液为六水合硝酸锌、四氮六甲圜和聚乙烯亚胺的水溶液;然后根据锑掺杂比例量取所述锑掺杂溶液和水热合成溶液混合,并加入氨水获得混合溶液;最后在所述混合溶液中进行锑掺杂氧化锌纳米线的水热合成。采用本发明的方法在水热反应中制备锑掺杂氧化锌纳米线,制备温度低,可以适用在有机物等柔性基底上。The invention provides a method for preparing antimony-doped zinc oxide nanowires. First, an antimony-doped solution and a hydrothermal synthesis solution are prepared, wherein the antimony-doped solution is an aqueous solution of antimony acetate, glycolic acid and sodium hydroxide. The hydrothermal synthesis solution is an aqueous solution of zinc nitrate hexahydrate, hexamethylene tetraazol and polyethyleneimine; then measure the antimony-doped solution and the hydrothermal synthesis solution according to the antimony doping ratio and mix them, and add ammonia water to obtain a mixed solution ; Finally, carry out the hydrothermal synthesis of antimony-doped zinc oxide nanowires in the mixed solution. The method of the invention is used to prepare antimony-doped zinc oxide nanowires in a hydrothermal reaction, the preparation temperature is low, and it can be applied on flexible substrates such as organic matter.

另外,本发明的锑掺杂氧化锌纳米线的制备方法可以制备出超长的锑掺杂氧化锌纳米线阵列,长度可以达到60微米,可以满足在单根纳米线上制备发光二级管和逻辑电路等的要求。In addition, the method for preparing antimony-doped zinc oxide nanowires of the present invention can prepare ultra-long arrays of antimony-doped zinc oxide nanowires, the length of which can reach 60 microns, which can meet the requirements of preparing light-emitting diodes and LEDs on a single nanowire. requirements for logic circuits, etc.

附图说明 Description of drawings

通过附图所示,本发明的上述及其它目的、特征和优势将更加清晰。在全部附图中相同的附图标记指示相同的部分。并未刻意按实际尺寸等比例缩放绘制附图,重点在于示出本发明的主旨。The above and other objects, features and advantages of the present invention will be more clearly illustrated by the accompanying drawings. Like reference numerals designate like parts throughout the drawings. The drawings are not intentionally scaled according to the actual size, and the emphasis is on illustrating the gist of the present invention.

图1为本发明锑掺杂氧化锌纳米线的制备方法的流程图;Fig. 1 is the flow chart of the preparation method of antimony-doped zinc oxide nanowire of the present invention;

图2为本发明实施例中制备的锑掺杂氧化锌纳米线的扫描电子显微镜图像;Fig. 2 is the scanning electron microscope image of the antimony-doped zinc oxide nanowire prepared in the embodiment of the present invention;

图3为单根2%锑掺杂氧化锌纳米线的透射电子显微镜的能量色散X射线光谱图;Fig. 3 is the energy dispersive X-ray spectrogram of the transmission electron microscope of a single 2% antimony-doped zinc oxide nanowire;

图4为利用原子力显微镜对0.2%锑掺杂(a)和2%锑掺杂(b)氧化锌纳米线的电学表征;Figure 4 is the electrical characterization of 0.2% antimony doped (a) and 2% antimony doped (b) ZnO nanowires by atomic force microscopy;

图5为单根0.2%锑掺杂氧化锌纳米线制备的场效应晶体管进行的固定源漏偏压扫描门电压的电学测量结果。Fig. 5 is the electrical measurement result of the fixed source-drain bias scanning gate voltage of a field effect transistor prepared by a single 0.2% antimony-doped zinc oxide nanowire.

具体实施方式 Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述。显然,所描述的实施例仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

现有的对氧化锌纳米线进行p型掺杂方法需要借助固相-液相-气相(VLS)机制,需要极高的温度下进行,不适用在有机物等柔性基底上制备p型掺杂的ZnO纳米线,这严重限制了生长纳米线可用的衬底的种类。The existing p-type doping method for zinc oxide nanowires requires the use of a solid-liquid-gas (VLS) mechanism, which needs to be carried out at extremely high temperatures, and is not suitable for preparing p-type doped on flexible substrates such as organic substances. ZnO nanowires, which severely limits the types of substrates available for growing nanowires.

本发明提供了一种锑掺杂氧化锌纳米线的制备方法,其中,该方法包括:The invention provides a method for preparing antimony-doped zinc oxide nanowires, wherein the method comprises:

配制锑掺杂溶液和水热合成溶液,其中,所述锑掺杂溶液为醋酸锑、羟基乙酸和氢氧化钠的水溶液,所述水热合成溶液为六水合硝酸锌、四氮六甲圜和聚乙烯亚胺的水溶液;Prepare an antimony doping solution and a hydrothermal synthesis solution, wherein the antimony doping solution is an aqueous solution of antimony acetate, glycolic acid and sodium hydroxide, and the hydrothermal synthesis solution is zinc nitrate hexahydrate, hexamethylene tetraazide and poly Aqueous solution of ethyleneimine;

根据锑掺杂比例量取所述锑掺杂溶液和水热合成溶液混合,并加入氨水获得混合溶液;Measure the antimony doped solution according to the antimony doping ratio and mix it with the hydrothermal synthesis solution, and add ammonia water to obtain a mixed solution;

将表面制备有氧化锌籽晶的衬底放置在所述混合溶液中进行水热法生长氧化锌纳米线。The substrate prepared with zinc oxide seed crystals on the surface is placed in the mixed solution for hydrothermal growth of zinc oxide nanowires.

本发明的锑掺杂氧化锌纳米线的制备方法在水热反应中进行,制备温度低,可以适用在有机物等柔性基底上。另外,本发明的锑掺杂氧化锌纳米线的制备方法可以制备出超长的锑掺杂氧化锌纳米线阵列,长度可以达到60微米,可以满足在单根纳米线上制备发光二级管和逻辑电路等的要求。The preparation method of the antimony-doped zinc oxide nanowire of the present invention is carried out in a hydrothermal reaction, the preparation temperature is low, and it can be applied to flexible substrates such as organic matter. In addition, the method for preparing antimony-doped zinc oxide nanowires of the present invention can prepare ultra-long arrays of antimony-doped zinc oxide nanowires, the length of which can reach 60 microns, which can meet the requirements of preparing light-emitting diodes and LEDs on a single nanowire. requirements for logic circuits, etc.

下面结合附图详细介绍本发明的一个具体实施方式,本发明的锑掺杂氧化锌纳米线的制备方法的流程图参见图1,包括:A specific embodiment of the present invention will be described in detail below in conjunction with the accompanying drawings. The flow chart of the preparation method of the antimony-doped zinc oxide nanowire of the present invention is shown in Fig. 1, including:

步骤S1,配制锑掺杂溶液和水热合成溶液,其中,所述锑掺杂溶液为醋酸锑、羟基乙酸和氢氧化钠的水溶液,所述水热合成溶液为六水合硝酸锌、四氮六甲圜和聚乙烯亚胺的水溶液。Step S1, preparing an antimony-doped solution and a hydrothermal synthesis solution, wherein the antimony-doped solution is an aqueous solution of antimony acetate, glycolic acid and sodium hydroxide, and the hydrothermal synthesis solution is zinc nitrate hexahydrate, hexamethyl tetraazol Aqueous solutions of ketone and polyethyleneimine.

所述锑掺杂溶液中醋酸锑、羟基乙酸和氢氧化钠的摩尔比为1:12:12,配制锑掺杂溶液的步骤包括:将羟基乙酸与氢氧化钠溶解于去离子水中形成羟基乙酸与氢氧化钠的水溶液;所述羟基乙酸与氢氧化钠的水溶液置于离心管中,并加入一枚磁转子,在匀速搅拌状态下缓慢加入醋酸锑形成锑掺杂溶液。最终得到体积为50mL,浓度为0.1M的锑掺杂溶液,该溶液在室温下可以长期稳定保存。The molar ratio of antimony acetate, glycolic acid and sodium hydroxide in the antimony-doped solution is 1:12:12, and the step of preparing the antimony-doped solution includes: dissolving glycolic acid and sodium hydroxide in deionized water to form glycolic acid and an aqueous solution of sodium hydroxide; the aqueous solution of glycolic acid and sodium hydroxide is placed in a centrifuge tube, and a magnetic rotor is added, and antimony acetate is slowly added under constant stirring to form an antimony-doped solution. Finally, an antimony-doped solution with a volume of 50 mL and a concentration of 0.1 M was obtained, which can be stored stably for a long time at room temperature.

所述水热合成溶液中六水合硝酸锌、四氮六甲圜和聚乙烯亚胺的摩尔比为10:5:2,配制水热合成溶液的步骤为在去离子水中依次加入六水合硝酸锌、四氮六甲圜和聚乙烯亚胺,具体为,在250ml去离子水中,依次加入六水合硝酸锌(Zn(NO3)2·6H2O)、四氮六甲圜(HMTA)和聚乙烯亚胺(PEI),使溶液中六水合硝酸锌(Zn(NO3)2·6H2O)的浓度为25mM(mM=1mmol/L,毫摩尔每升),四氮六甲圜(HMTA)的浓度为12.5mM和聚乙烯亚胺(PEI)的浓度为5mM,经过均匀混合后,用量筒量取50mL上述溶液并倒入反应器皿。The molar ratio of zinc nitrate hexahydrate, hexamethylene tetraazol and polyethyleneimine in the hydrothermal synthesis solution is 10:5:2, and the step of preparing the hydrothermal synthesis solution is to add zinc nitrate hexahydrate, zinc nitrate hexahydrate, Hexamethylene tetraazol and polyethyleneimine, specifically, in 250ml deionized water, add zinc nitrate hexahydrate (Zn(NO 3 ) 2 6H 2 O), hexamethylene tetraazol (HMTA) and polyethyleneimine in sequence (PEI), so that the concentration of zinc nitrate hexahydrate (Zn(NO 3 ) 2 6H 2 O) in the solution is 25mM (mM=1mmol/L, millimole per liter), and the concentration of hexamethylene tetraazol (HMTA) is The concentration of 12.5mM and polyethyleneimine (PEI) is 5mM. After uniform mixing, measure 50mL of the above solution with a graduated cylinder and pour it into the reaction vessel.

步骤S2,根据锑掺杂比例量取所述锑掺杂溶液和水热合成溶液混合,并加入氨水获得混合溶液。Step S2, mix the antimony doped solution with the hydrothermal synthesis solution according to the antimony doping ratio, and add ammonia water to obtain a mixed solution.

根据锑掺杂比例,在步骤S1中制备的水热合成溶液中加入适量的锑掺杂溶液混合均匀,掺杂比例的范围可以在0%到2%之间(锑锌原子比例)。本实施例中在50mL水热合成溶液中加入25μL锑掺杂溶液混合均匀,并加入2.7ml的质量比重为28%的氨水并均匀混合,密封反应器皿。According to the antimony doping ratio, add an appropriate amount of antimony doping solution to the hydrothermal synthesis solution prepared in step S1 and mix evenly. The doping ratio can range from 0% to 2% (atomic ratio of antimony and zinc). In this embodiment, 25 μL of antimony-doped solution was added to 50 mL of hydrothermal synthesis solution and mixed evenly, and 2.7 ml of ammonia water with a mass specific gravity of 28% was added and mixed evenly, and the reaction vessel was sealed.

步骤S3,将表面制备有氧化锌籽晶的衬底放置在所述混合溶液中进行水热法生长氧化锌纳米线。Step S3, placing the substrate prepared with zinc oxide seed crystals on the surface in the mixed solution for hydrothermal growth of zinc oxide nanowires.

在完成锑掺杂溶液和水热合成溶液混合后进行步骤S3之前,还可以包括预热处理所述混合溶液的步骤。具体预热处理的条件可以为:将步骤S2中密封的反应器皿放在95℃的恒温箱中保温预热1小时。预热处理所述混合溶液可以使溶液均匀混合。对混合溶液进行预热处理之后,在该步骤中将表面制备有氧化锌籽晶的衬底放置在经过预热处理的混合溶液中进行水热法生长氧化锌纳米线。Before performing step S3 after the antimony doping solution and the hydrothermal synthesis solution are mixed, a step of preheating the mixed solution may also be included. The specific preheating conditions may be as follows: the sealed reaction vessel in step S2 is placed in a thermostat at 95° C. for 1 hour of heat preservation and preheating. Preheating the mixed solution can make the solution uniformly mixed. After the mixed solution is preheated, in this step, the substrate prepared with zinc oxide seed crystals on the surface is placed in the preheated mixed solution to grow zinc oxide nanowires by hydrothermal method.

以在玻璃衬底上生长锑掺杂氧化锌纳米线为例,首先在玻璃衬底上溅射氧化锌籽晶层,将该玻璃衬底置入步骤S2中的反应器皿中,经过24小时的水热生长后,取出衬底并用去离子水漂洗干净。至此,完成锑掺杂氧化锌纳米线的制备。Taking the growth of antimony-doped zinc oxide nanowires on a glass substrate as an example, first sputter a zinc oxide seed layer on the glass substrate, put the glass substrate into the reaction vessel in step S2, and after 24 hours After hydrothermal growth, the substrate was removed and rinsed with deionized water. So far, the preparation of antimony-doped zinc oxide nanowires is completed.

为了除去制备的锑掺杂氧化锌纳米线上的有机残留物,本发明的方法在步骤S4之后还可以包括退火锑掺杂氧化锌纳米线步骤,具体可以为,将制备有锑掺杂氧化锌纳米线的衬底在300℃下烘烤1小时,以去除有机物残留。In order to remove the organic residues on the prepared antimony-doped zinc oxide nanowires, the method of the present invention may also include the step of annealing the antimony-doped zinc oxide nanowires after step S4, specifically, the prepared antimony-doped zinc oxide nanowires The nanowire substrates were baked at 300 °C for 1 hour to remove organic residues.

对本实施例中制备的锑掺杂氧化锌纳米线进行了表征,扫描电子显微镜、透射电子显微镜、原子力显微镜(AFM)和场效应晶体管测量被用来表征合成的纳米线的形貌,化学构成和电学性质等等。The antimony-doped zinc oxide nanowires prepared in this example were characterized, and scanning electron microscopy, transmission electron microscopy, atomic force microscopy (AFM) and field-effect transistor measurements were used to characterize the morphology, chemical composition and electrical properties, etc.

图2所示的是扫描电子显微镜图像,其中,0.2%掺杂的纳米线(图2中a和b图)长度为60微米左右,直径在200纳米到1000纳米之间;2%掺杂的纳米线(图2中c和d图)长度在3微米左右,直径在250纳米左右。Figure 2 shows a scanning electron microscope image, in which the 0.2% doped nanowires (Figure 2 a and b panels) are about 60 microns in length and 200 nm to 1000 nm in diameter; 2% doped The nanowires (panels c and d in Figure 2) are around 3 microns in length and around 250 nm in diameter.

本发明的这种制备锑掺杂氧化锌纳米线的方法中,借助水热合成溶液中加入的聚乙烯亚胺(PEI)作为形貌控制剂以得到长达60微米的纳米线,同时借助乙醇酸盐离子,在氧化锌生长的过程中,将锑离子掺入其晶格之中。采用本发明的方法,超长的p型掺杂氧化锌纳米线可以重复地、稳定地被制备出来。In the method for preparing antimony-doped zinc oxide nanowires of the present invention, polyethyleneimine (PEI) added to the hydrothermal synthesis solution is used as a shape control agent to obtain nanowires up to 60 microns long, and at the same time, ethanol During the growth process of zinc oxide, antimony ions are incorporated into its crystal lattice. By adopting the method of the invention, ultra-long p-type doped zinc oxide nanowires can be repeatedly and stably prepared.

图3是利用透射电子显微镜的能量色散X射线光谱仪来测定单根纳米线的化学构成,如表1所示,尽管加入了2%的锑进行掺杂,由于合成过程中的材料损失,实际的纳米线的掺杂浓度为0.55%。Figure 3 uses the energy dispersive X-ray spectrometer of the transmission electron microscope to determine the chemical composition of a single nanowire, as shown in Table 1, although 2% antimony is added for doping, due to the material loss during the synthesis process, the actual The doping concentration of the nanowires is 0.55%.

表1.2%锑掺杂纳米线中的不同元素的平均的重量和原子百分比。Table 1. Average weight and atomic percentages of different elements in 2% antimony doped nanowires.

  元素 elements   重量% weight%   原子% Atomic %   O(K) O(K)   16.53 16.53   44.82 44.82   Zn(K) Zn(K)   81.91 81.91   54.61 54.61   Sb(L) Sb(L)   1.54 1.54   0.55 0.55

本实施例中制备的氧化锌纳米线的压电输出特性利用原子力显微镜进行了测量,如图4所示。在形变之后,输出电流为负值,表明氧化锌纳米线是p型掺杂。原因在于,AFM针尖与氧化锌纳米线形成肖特基结为单向导通,氧化锌纳米线受力弯曲后,拉伸面与压缩面产生的电荷符号相反,肖特基结的单向导通性使得当针尖与两个面分别前后接触时,只有其中一个会有输出电流。对于n型掺杂,当针尖与压缩面接触时才会导通,对应于测量系统中的正电流;对于p型掺杂,当针尖与压缩面接触时才会导通,对应于测量系统中的负电流。对于0.2%锑掺杂(图4中a)和2%锑掺杂(图4中b)的氧化锌纳米线,其最大输出电流分别为30pA和80pA,其最大输出电压分别为7mV和15mV。The piezoelectric output characteristics of the zinc oxide nanowires prepared in this example were measured using an atomic force microscope, as shown in FIG. 4 . After deformation, the output current is negative, indicating that the ZnO nanowires are p-type doped. The reason is that the AFM tip and the zinc oxide nanowire form a Schottky junction, which is unidirectional conduction. After the zinc oxide nanowire is bent by force, the signs of the charges generated on the stretched surface and the compressed surface are opposite, and the unidirectional conductivity of the Schottky junction So that when the tip of the needle touches the two surfaces back and forth, only one of them will output current. For n-type doping, it will be turned on when the needle tip is in contact with the compression surface, corresponding to the positive current in the measurement system; for p-type doping, it will be turned on when the needle tip is in contact with the compression surface, corresponding to the positive current in the measurement system negative current. For ZnO nanowires doped with 0.2% antimony (a in Figure 4) and 2% antimony (b in Figure 4), the maximum output currents are 30 pA and 80 pA, and the maximum output voltages are 7 mV and 15 mV, respectively.

最后,基于0.2%锑掺杂的单根氧化锌纳米线的场效应晶体管被制备,并进行了源漏固定偏压,扫描门电压的电学测量,相关测量结果见图5。该结果进一步严格的证明了所合成的氧化锌纳米线为p型掺杂。Finally, a field-effect transistor based on a single ZnO nanowire doped with 0.2% antimony was prepared, and the source-drain fixed bias and the electrical measurement of the scanning gate voltage were performed. The relevant measurement results are shown in Figure 5. This result further strictly proves that the synthesized ZnO nanowires are p-type doped.

以上所述,仅为本发明的优选的实施例,并不对本发明作任何形式上的限制。任何本领域技术人员在不脱离本发明技术方案范围的情况下,都可利用上述公开的方法和技术内容对本发明的技术方案作出多种可能的变型和修饰,或修改为等同变化的等效实施例。因此,凡是未脱离本发明技术方案的内容,依据本发明的技术方案对以上实施例所做的任何简单修改、等同变型及修饰,均属于本发明技术方案保护的范围。The above descriptions are only preferred embodiments of the present invention, and do not limit the present invention in any form. Without departing from the scope of the technical solution of the present invention, any person skilled in the art can use the methods and technical content disclosed above to make various possible variations and modifications to the technical solution of the present invention, or modify it into an equivalent implementation of equivalent changes example. Therefore, any simple modifications, equivalent variations and modifications made to the above embodiments according to the technical solution of the present invention, which do not deviate from the technical solution of the present invention, all belong to the scope of protection of the technical solution of the present invention.

Claims (7)

1.一种锑掺杂氧化锌纳米线的制备方法,其特征在于,该方法包括:1. A preparation method for antimony-doped zinc oxide nanowires, characterized in that the method comprises: 配制锑掺杂溶液和水热合成溶液,其中,所述锑掺杂溶液为醋酸锑、羟基乙酸和氢氧化钠的水溶液,所述水热合成溶液为六水合硝酸锌、四氮六甲圜和聚乙烯亚胺的水溶液;Prepare an antimony doping solution and a hydrothermal synthesis solution, wherein the antimony doping solution is an aqueous solution of antimony acetate, glycolic acid and sodium hydroxide, and the hydrothermal synthesis solution is zinc nitrate hexahydrate, hexamethylene tetraazide and poly Aqueous solution of ethyleneimine; 根据锑掺杂比例量取所述锑掺杂溶液和水热合成溶液混合,并加入氨水获得混合溶液;Measure the antimony doped solution according to the antimony doping ratio and mix it with the hydrothermal synthesis solution, and add ammonia water to obtain a mixed solution; 将表面制备有氧化锌籽晶的衬底放置在所述混合溶液中进行水热法生长氧化锌纳米线。The substrate prepared with zinc oxide seed crystals on the surface is placed in the mixed solution for hydrothermal growth of zinc oxide nanowires. 2.根据权利要求1所述的制备方法,其中,配制锑掺杂溶液的步骤为:2. preparation method according to claim 1, wherein, the step of preparing antimony doping solution is: 将所述羟基乙酸与氢氧化钠溶解于去离子水中形成羟基乙酸与氢氧化钠的水溶液;在匀速搅拌所述羟基乙酸与氢氧化钠的水溶液状态下缓慢加入醋酸锑形成锑掺杂溶液;所述醋酸锑、羟基乙酸与氢氧化钠的摩尔比为1:12:12。Dissolving the glycolic acid and sodium hydroxide in deionized water to form an aqueous solution of glycolic acid and sodium hydroxide; slowly adding antimony acetate to form an antimony-doped solution while stirring the aqueous solution of glycolic acid and sodium hydroxide at a constant speed; The molar ratio of antimony acetate, glycolic acid and sodium hydroxide is 1:12:12. 3.根据权利要求1所述的制备方法,其中,所述配制水热合成溶液的步骤为:在去离子水中依次加入六水合硝酸锌、四氮六甲圜和聚乙烯亚胺;六水合硝酸锌、四氮六甲圜和聚乙烯亚胺的的摩尔比为10:5:2。3. The preparation method according to claim 1, wherein, the step of preparing the hydrothermal synthesis solution is: sequentially adding zinc nitrate hexahydrate, hexamethylene tetraazol and polyethyleneimine in deionized water; zinc nitrate hexahydrate The molar ratio of hexamethylene tetraazol to polyethyleneimine is 10:5:2. 4.根据权利要求1-3中任意一项所述的制备方法,其中,该方法还包括:将表面制备有氧化锌籽晶的衬底放置在所述混合溶液中进行水热法生长氧化锌纳米线前:对所述混合溶液进行预热处理的步骤。4. The preparation method according to any one of claims 1-3, wherein the method further comprises: placing the substrate prepared with zinc oxide seed crystals on the surface in the mixed solution for hydrothermal growth of zinc oxide Before nanowires: a step of preheating the mixed solution. 5.根据权利要求4所述的制备方法,其中,对所述混合溶液进行预热处理的步骤为在95℃保温1小时。5. The preparation method according to claim 4, wherein the step of preheating the mixed solution is to keep the temperature at 95° C. for 1 hour. 6.根据权利要求1所述的制备方法,其中,所述锑掺杂比例为0%-2%。6. The preparation method according to claim 1, wherein the antimony doping ratio is 0%-2%. 7.根据权利要求1所述的制备方法,其中,该方法还包括将得到的水热生长的锑掺杂氧化锌纳米线进行退火的步骤。7. The preparation method according to claim 1, wherein the method further comprises the step of annealing the obtained hydrothermally grown antimony-doped zinc oxide nanowires.
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