CN103345994A - Electrostatic suppressing element and production method thereof - Google Patents
Electrostatic suppressing element and production method thereof Download PDFInfo
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- CN103345994A CN103345994A CN2013102857787A CN201310285778A CN103345994A CN 103345994 A CN103345994 A CN 103345994A CN 2013102857787 A CN2013102857787 A CN 2013102857787A CN 201310285778 A CN201310285778 A CN 201310285778A CN 103345994 A CN103345994 A CN 103345994A
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Abstract
The invention relates to an electrostatic suppressing element and a production method thereof. The electrostatic suppressing element comprises a ceramic substrate (1), a left outer electrode (2) and a right outer electrode (2'), wherein the left outer electrode (2) and the right outer electrode (2') are arranged at two ends of the ceramic substrate (1) respectively, and the electrostatic suppressing element is characterized in that the ceramic substrate (1) consists of an upper protective layer (112), at least one through hole layer (42) and a lower protective layer (111), the through hole layer (42) is provided with at leas one through hole, the upper surface and the lower surface of the through hole are covered by a printing electrode layer, a voltage-sensitive ceramic functional phase (41) is filled in the through hole in the through hole layer (42), the printing electrode layer is alternately led out from two ends of a product, and each printing electrode layer is only electrically connected with the outer electrode on one side. The voltage of the electrostatic suppressing element is stable under an over-temperature condition, the response time is shortened, the weaknesses of a piezoresistor are overcome, and the electrostatic suppressing element has the characteristics of low electric capacity and small leaked current.
Description
Technical field
The present invention relates to the manufacture method of a kind of static suppression element and this element, particularly relate to a kind of with the LTCC ceramic matrix pile up technology, pressure-sensitive ceramic material is static suppression element and the method that function is made mutually.
Background technology
The all substances of occurring in nature are all combined by atom, proton in the atom (positive charge) and electronics (negative electrical charge) are present in the every nook and cranny in our life, when after two kinds of different materials are in contact with one another, separating, will produce so-called " triboelectrification " effect, this phenomenon that electric charge is transferred to the low object of current potential subsequently is called as " Electrostatic Discharge ".It is difficult planning static is eliminated fully in the electrostatic defending process; but we can take safeguard measure; with the generation of static with gather control within the limit of minimum, therefore the important topic of pendulum before design, q﹠r tissue surface just becomes the transfer effect of how to tackle static on its electronic product.The designer has countless ready-made esd protection schemes to select at present, comprises buffer circuit, filter circuit and static suppression element (as varistor, Transient Voltage Suppressor, static suppressor and discharge tube etc.).
Except the protected data transmission line, the static suppression element must keep the integrality of its signal.Along with people provide urgent day by day that higher information throughput requires for circuit, a characteristic of static suppression element becomes extremely important, capacitance that Here it is.Although many kinds of static suppression elements all can provide effective esd protection function, can not be cost with the signal integrity of sacrificial system.Therefore, before the static suppression element is incorporated into design circuit, must consider to some extent its electric capacity.Static suppression element with extremely low capacitance can keep the integrality of high-speed data signal when the esd protection function is provided.
Varistor is a kind of votage limit type protection device; utilize the nonlinear characteristic of piezo-resistance; when overvoltage appears at two interpolars of piezo-resistance, piezo-resistance can be with voltage clamper to a relatively-stationary magnitude of voltage, thereby realizes that it is to the protection of late-class circuit.Compare with other static suppression elements, varistor has following outstanding advantage: thermal characteristics is good, the response time is short (ns level), all many-sides such as voltage is more stable under the high temperature, cost is low, this mainly is that this structure has better energy absorbability and surge withstand resistance because varistor is equivalent to be become by millions of P-N roped parties.But the capacitance of varistor generally in the order of magnitude scope of hundreds of to several thousand pF, should not directly be applied in the protection of high-frequency signal circuit; And because in the high temperature sintering process, the volatilization and cause and the change of composition will cause the increase of tracking current and the decline of anti-surge capacity easily of the composition of table, bottom.
In the at present common static suppression element manufacture method; Chinese patent CN101221847A, CN 103035623A and CN101079342B all disclosed a kind of in same plane, adopt the termination parallel relatively and between form narrow slit electrode pair as two electrodes, between two electrodes, realize the effect of electrostatic protection again by filled high polymer or ceramic pressure sensitive.But the formation of two relative electrodes need relate to photoetching, etching technique, production cost is higher, and the size of the length of narrow slit and width all is subjected to certain restriction between electrode, cause that easily the product trigger voltage is too high and scattered error is big, and excessive current density can cause also electrode end surface ablated between narrow slit.
Summary of the invention
1, technical problem to be solved:
Existing electric static discharge protector kind is a lot, but 1) most electrostatic protection element complex manufacturing, volume is big or cost is higher, and often is difficult to use in the high-frequency data transmission system because capacitance is bigger than normal; 2) technology over against forming narrow slit between electrode that relates in the existing paster electrostatic protection element technology of preparing has big limitation, and the product of preparation in use has the risk that increases gradually because of the ablated clamp voltage of electrode; 3) varistor is having plurality of advantages aspect electric static discharge protector, but have capacitance usually, the equal deficiency bigger than normal of leakage current.
2, technical scheme:
In order to overcome the above problems; the invention provides a kind of static suppression element; comprise ceramic matrix 1; left side outer electrode 2 and right outer electrode 2 '; a left side outer electrode 2 and right outer electrode 2 ' lay respectively at ceramic matrix 1 two ends; ceramic matrix 1 is by last protective layer 112; at least one deck contains at least one through hole and through hole upper and lower surface and all is printed via layer 42 and the lower protective layer 111 that electrode layer covers and forms; fill voltage-sensitive ceramic function phase 41 in the through hole in the described via layer 42; the described layer that prints electrode is alternately drawn at the two ends of product respectively, and each layer that prints electrode only forms with a side outer electrode and is electrically connected.。
Left side outer electrode 2 and right outer electrode 2 ' preferably adopt three layers of end-electrode structure of industry routine, be respectively Cu electrode 21, Ni electrode 22 and Sn electrode 23 from inside to outside.
Square, circular or other conventional shape of being shaped as of via layer 42 open surface, circular.
The voltage-sensitive ceramic function 41 is prepared from by voltage-sensitive ceramic powder, metal powder, organic bond, organic solvent, each composition of the dispersant ceramic size through mixing dispersion, having certain viscosity and a solid content mutually.
Described voltage-sensitive ceramic powder is for satisfying the ceramic powder that burns and have pressure-sensitive character with basis material altogether, be principal crystalline phase with the nano zine oxide, and being doped with the porcelain powder material of at least two kinds of additives in bismuth oxide, titanium dioxide, cobalt oxide, manganese oxide, the silicon dioxide, preferred average grain diameter is 50 ~ 500nm.
Described metal powder can be common metal, and as silver, copper, nickel, aluminium equal sphere particle, preferable alloy powder average grain diameter is 1 ~ 5um, and the mass ratio of preferred addition and voltage-sensitive ceramic powder is 0 ~ 10wt%.
A kind of in described organic bond preferred, ethyl, methylcellulose, polyvinyl alcohol, the polyvinyl butyral resin; At least a in described organic solvent preferred alcohol, toluene, terpinol, dibutyl phthalate, the butyl carbitol; Described dispersant is mainly polyesters, polyamine esters and phosphoric acid lipid, a kind of as among the BYK104S.
A kind of manufacture method of static suppression element, may further comprise the steps, the first step: the LTCC ceramic powder of selecting to have low-k, by ball milling or sand milling technology, be mixed with the ceramic size that is fit to flow casting molding, further obtain having the ceramic diaphragm 12 of certain width and thickness again by casting technique; Second step: the above-mentioned ceramic diaphragm that obtains 12 is stacked to the thickness that needs, has the via layer 42 of definite shape perforate by mechanical stamping or laser drilling formation then; The 3rd step: the via layer 42 of finishing perforate by the stencilization mode, 41 is filled into the voltage-sensitive ceramic function in the perforate mutually, get rid of its inner organic solvent through oven dry again after, the voltage-sensitive ceramic function mutually 41 with integral body of via layer 42 formation; The 4th step: the layer 31 that prints electrode that on the ceramic diaphragm 12 that curtain coating obtains, obtains to adhere to specification by technologies such as silk screen or steel mesh printings, layer 31 the size that print electrode will with a side can cover fully open surface, opposite side in the via layer 42 can be led to by the edge suitable, can not be excessive or too small; There is the ceramic diaphragm 12 of the layer 31 that prints electrode to carry out drying; The 5th step: by piling up technology, stack gradually: a) lower protective layer 111-〉 b) first the electrode layer 322-〉 c) fill voltage-sensitive ceramic function 41 via layer 42-〉 d mutually) the second electrode lay 321-〉 e) repeating step b) ~ d) require to designing the number of plies-f) go up protective layer 112, the product of finishing are that green compact cling to piece; The 6th step: the bar piece that will obtain cuts into single component products of the some of the specification that meets design requirement, and peels off from loading plate.After under uniform temperature, getting rid of the organic bond in the green compact, under certain sintering temperature, make the protection component product, form conventional Cu/Ni/Sn external electrode layer and obtained the static suppression element finally by ion sputtering or coating and electroplating technology.
3, beneficial effect:
The present invention piles up technology by traditional LTCC pottery, and with the pressure-sensitive ceramic material function with the mode of through hole be filled into matrix mutually in, can be easily by through hole cross-sectional area and adjusted the capacitance of final products by the thickness of through hole diaphragm, producer mask at low capacity static suppression element has very big advantage, it is low that the product that obtains also has a leakage current, thermal characteristics is good, response time is short, advantages such as voltage is stable under the excess temperature, and production process equipment is simple, the raw material wide material sources, product cost is lower, is very suitable for industrial mass and produces continuously.
Description of drawings
Fig. 1 is the static suppression element three-dimensional appearance schematic diagram among the present invention.
Fig. 2 is the side sectional view of the static suppression element single-pass hole design among the present invention.
Fig. 3 is the side sectional view of the static suppression element doubled via design among the present invention.
Fig. 4 is the side sectional view of the static suppression element multiple-level stack design among the present invention.
Fig. 5 is the ceramic diaphragm sectional perspective schematic appearance that obtains by casting technique.
Fig. 6 is the sectional perspective schematic appearance after perforate on the ceramic diaphragm.
Fig. 7 fills the sectional perspective schematic appearance of voltage-sensitive ceramic function after mutually in the perforate.
Fig. 8 is the sectional perspective schematic appearance that obtains electrode pattern by typography at ceramic diaphragm.
Embodiment
The main method that the present invention adopts provides a kind of low cost, high performance static suppression element, this element is by LTCC ceramic matrix and the mutually low temperature co-fired formation of voltage-sensitive ceramic function, adopt multi-layer ceramics to pile up and typography forms two of static suppression element and has necessarily electrode layer over against area, and at two electrode layers over against the ceramic substrate place between part by the via process perforate and fill voltage-sensitive ceramic function phase, finally obtained having the ultra-low capacitance amount, low-leakage current, the good static suppression element of pressure-sensitive character.
The present invention is described in detail below by embodiment.
Embodiment 1
As shown in Figure 2; a kind of static suppression element; comprise ceramic matrix 1; left side outer electrode 2 and right outer electrode 2 '; a left side outer electrode 2 and right outer electrode 2 ' lay respectively at ceramic matrix 1 two ends; ceramic matrix 1 is by last protective layer 112; the second electrode lay 321; via layer 42; first electrode layer 322 and lower protective layer 111 are formed; be provided with a perforate in the via layer 42; and be filled with voltage-sensitive ceramic function mutually 41; the upper and lower surface of perforate all is printed electrode layer (322 in the via layer 42; 321) cover; the described layer that prints electrode is alternately drawn at the two ends of product respectively, and each layer that prints electrode only is connected with a side outer electrode.Print electrode the layer thickness and shape properties of product are not had obvious influence.
Left side outer electrode 2 and right outer electrode 2 ' preferably adopt three layers of end-electrode structure of industry routine, be respectively Cu electrode 21, Ni electrode 22 and Sn electrode 23 from inside to outside.
As shown in Figure 3; a kind of static suppression element; comprise ceramic matrix 1; left side outer electrode 2 and right outer electrode 2 '; a left side outer electrode 2 and right outer electrode 2 ' lay respectively at ceramic matrix 1 two ends; ceramic matrix 1 is by last protective layer 112; the second electrode lay 321; via layer 42; first electrode layer 322 and lower protective layer 111 are formed; be provided with two perforates in the via layer 42; and all be filled with voltage-sensitive ceramic function mutually 41; the upper and lower surface of perforate all is printed electrode layer (322 in the via layer 42; 321) cover; the described layer that prints electrode is alternately drawn at the two ends of product respectively, and each layer that prints electrode only is connected with a side outer electrode.
Other is similar with embodiment 1.
Embodiment 3
As shown in Figure 4; a kind of static suppression element; comprise ceramic matrix 1; left side outer electrode 2 and right outer electrode 2 '; a left side outer electrode 2 and right outer electrode 2 ' lay respectively at ceramic matrix 1 two ends; contain three layers of via layer 42 in the ceramic matrix 1; and be positioned at and outermostly go up protective layer 112 and lower protective layer 111 is formed; be equipped with a perforate in each via layer 42 and be filled with voltage-sensitive ceramic function phase 41; the upper and lower surface of perforate all is printed electrode layer and covers in the via layer 42; the layer that prints electrode of via layer 42 upper and lower surfaces is alternately arranged; the described layer that prints electrode is alternately drawn at the two ends of product respectively, and each layer that prints electrode only is connected with a side outer electrode.
Other is similar with embodiment 1.
In the described via layer 42 of these 3 embodiment the shape of open surface can for square, circular or other conventional shape etc. all can, be preferably formed the circular port surface.Open surface is long-pending to be reached by internal structure design and the capacitance decision of the thickness of perforate diaphragm by final products, is designed to example with circular surface, single-pass pore structure, and it determines that formula is:
In the formula, D is open surface diameter (unit is mm), and T is that C is product capacitance (unit is pF) by the thickness of perforate diaphragm (unit is um), and K is the dielectric constant of Zinc-oxide piezoresistor, and N is the electrode number of plies of product printing.
Voltage-sensitive ceramic function phase 41 is by the voltage-sensitive ceramic powder, and each composition such as metal powder, organic bond, organic solvent, dispersant is prepared from through mixing ceramic size dispersion, that have certain viscosity and solid content.Wherein, the voltage-sensitive ceramic powder is for can satisfy the ceramic powder that burns and have pressure-sensitive character with basis material altogether, it preferably is principal crystalline phase with the nano zine oxide, and be doped with the porcelain powder material of at least two kinds of additives such as bismuth oxide, titanium dioxide, cobalt oxide, manganese oxide, silicon dioxide, preferred average grain diameter is 50 ~ 500nm, its sintering temperature will be between 800 ~ 950 ℃, and require this porcelain powder material can be ceramic co-fired with LTCC with matrix, and the sintering post-shrinkage ratio will mate.The voltage-sensitive ceramic powder will evenly disperse and wrap metallic particles in the ceramic size, metal powder can be common metal, as silver, copper, nickel, aluminium equal sphere particle, preferable alloy powder average grain diameter is 1 ~ 5um, and the mass ratio of preferred addition and voltage-sensitive ceramic powder is 0 ~ 10wt%.The effect that metallic particles adds, one side does not reach sintering temperature owing to metallic and can not shrink when low temperature co-fired with ceramic matrix, thereby reduced the shrinkage of filling paste, be conducive to the matching that voltage-sensitive ceramic function and LTCC ceramic matrix shrink, and the rising of the static suppression element trigger voltage that causes owing to the increase of filling thickness of buffering; On the other hand, metallic forms certain contact berrier with after voltage-sensitive ceramic crystal grain contacts, reduced the leakage current in the voltage-sensitive ceramic body, and when pressure-sensitive resistance value reduced under the high pressure, metallic can form low-resistance channel again, has improved the response speed of piezo-resistance.A kind of in organic bond preferred, ethyl, methylcellulose, polyvinyl alcohol, the polyvinyl butyral resin etc.; At least a in organic solvent preferred alcohol, toluene, terpinol, dibutyl phthalate, the butyl carbitol etc.; Dispersant is mainly polyesters, polyamine esters and phosphoric acid lipid, a kind of as among BYK104S etc.
A kind of manufacture method of static suppression element at first, selects to have the LTCC ceramic powder of low-k, by ball milling or sand milling technology, be mixed with the ceramic size that is fit to flow casting molding, further obtain having the ceramic diaphragm 12 of certain width and thickness again by casting technique, as shown in Figure 5.
Second step as shown in Figure 6, was stacked to the thickness that needs by designing requirement with the above-mentioned ceramic diaphragm that obtains 12, formed the via layer 42 of the perforate with definite shape then by technology such as mechanical stamping or laser drillings.
The 3rd step, to finish the via layer 42 of perforate by modes such as stencilizations, the ceramic size that will have pressure-sensitive character is filled in the perforate, via layer 42 after the filling as shown in Figure 7, after getting rid of the interior organic solvent of slurry through the oven dry under the uniform temperature again, voltage-sensitive ceramic function phase 41 forms an integral body with via layer 42, and the appearance requirement perforate after the oven dry is filled up fully, surfacing can not have depression.
The 4th step, as Fig. 8, the layer 31 that prints electrode that on the ceramic diaphragm 12 of flow casting molding, obtains to adhere to specification by technologies such as silk screen or steel mesh printings, first electrode layer 322 that obtains after also namely cutting, with the second electrode lay 321, layer 31 the size that print electrode will can be led to suitable by the edge with open surface, the opposite side that a side can cover in the via layer 42 fully, can not be excessive or too small, the ceramic diaphragm 12 after the printing will carry out drying under uniform temperature (relevant with used electric slurry).
The 5th step; by piling up technology; stack gradually: a) lower protective layer 111-〉 b) first the electrode layer 322-〉 c) fill voltage-sensitive ceramic function 41 via layer 42-〉 d mutually) the second electrode lay 321-〉 e) repeating step b) ~ d) require to designing the number of plies-f) go up protective layer 112, the product of finishing cling to piece for the green compact that adhere to specification.
The 6th step cut into single component products of the some of the specification that meets design requirement (as specification such as made in Great Britain 0402,0603) with the bar piece that obtains, and peeled off from loading plate.After under uniform temperature, getting rid of the organic bond in the green compact; under 800 ~ 950 ℃ sintering temperature, make the protection component product; outer electrode through knowing in the industry formation technology obtains conventional three layers of outer electrode of Cu/Ni/Sn or has the structure of correlation function again; to satisfy the requirement of surface soldered, finally obtained needed static suppression element.
Owing to directly obtain to print electrode layer in via layer 42, but effect and performance are not fine, so the layer that will print electrode obtains at ceramic diaphragm 12, in the middle of the making, ceramic diaphragm 12 to be covered on via layer 42, the aligned through holes that prints electrode covers through hole.
Embodiment 4
Testing used voltage-sensitive ceramic function phase dielectric constant is 10, when the preparation capacitance is the static suppression element of 0.05pF, can adopt diameter is the manhole of 0.2mm, the through hole ceramic diaphragm thickness of 56um, the design of single-pass hole just needing can obtain the product of capacity section, the thickness of curtain coating ceramic diaphragm can be controlled very easily, and the product capacity scattered error is reduced as much as possible.In addition, continue to increase the thickness of ceramic diaphragm or adopt more that the through hole mould of minor diameter just can drop to the capacitance of static suppression element below the 0.05pF, to preparation technology's not influence of complexity, this is the not available distinct advantages of other static suppression element production technology; In addition, the voltage-sensitive ceramic function that the increase of diaphragm thickness causes is filled increasing of demand mutually, can adjust by the addition of metal powder, so that the trigger voltage of product is unlikely to too high and loses protective effect.
Static suppression element among the present invention can bring into play not only that the piezoresistive material thermal characteristics is good, the stable advantage of voltage under the excess temperature, and its response time is further shortened, and has also overcome the shortcoming of piezo-resistance, and it is low to have capacitance, the characteristic that leakage current is little.The production process equipment of this static suppression element is simple, and cost is low, is very suitable for production operation continuously in enormous quantities.
The various changes and the modification that are understandable that embodiment as described herein are apparent to those skilled in the art, in the spirit and scope that do not break away from theme of the present invention, can make other change but when not exceeding the advantage of its expection, can think that such change is covered by the appended claims.
Claims (10)
1. plant the static suppression element; comprise ceramic matrix (1); left side outer electrode (2) and right outer electrode (2 '); left side outer electrode (2) and right outer electrode (2 ') lay respectively at ceramic matrix (1) two ends; it is characterized in that: ceramic matrix (1) is by last protective layer (112); at least one deck contains at least one through hole and through hole upper and lower surface and all is printed via layer (42) and lower protective layer (111) composition that electrode layer covers; fill voltage-sensitive ceramic function phase (41) in the through hole in the described via layer (42); the described layer that prints electrode is alternately drawn at the two ends of product respectively, and each layer that prints electrode only forms with a side outer electrode and is electrically connected.
2. static suppression element as claimed in claim 1 is characterized in that: left outer electrode (2) and conventional three layers of termination electrode Cu (21)/Ni (22)/Sn (23) structure of right outer electrode (2 ') employing.
3. static suppression element as claimed in claim 1 is characterized in that: square, circular or other conventional shape of being shaped as of via layer (42) open surface, circular.
4. as claim 1 or 3 described static suppression elements, it is characterized in that: voltage-sensitive ceramic function phase (41) is by the voltage-sensitive ceramic powder, each composition such as metal powder, organic bond, organic solvent, dispersant through mix dispersion, have a certain viscosity.
5. static suppression element as claimed in claim 4, it is characterized in that: described voltage-sensitive ceramic powder is for satisfying the ceramic powder that burns and have pressure-sensitive character with matrix LTCC material altogether, be principal crystalline phase with the nano zine oxide, be doped with the porcelain powder material of at least two kinds of additives in bismuth oxide, titanium dioxide, cobalt oxide, manganese oxide, the silicon dioxide, average grain diameter is 50 ~ 500nm.
6. static suppression element as claimed in claim 4, it is characterized in that: described metal powder can be common metal, and the metal powder average grain diameter is 1 ~ 5um, and the mass ratio of addition and voltage-sensitive ceramic powder is 0 ~ 10wt%.
7. static suppression element as claimed in claim 4 is characterized in that: described organic bond is a kind of in ethyl cellulose, methylcellulose, polyvinyl alcohol, the polyvinyl butyral resin; Described organic solvent is at least a in ethanol, toluene, terpinol, dibutyl phthalate, the butyl carbitol; Described dispersant is a kind of in polyesters, polyamine esters and the phosphoric acid lipid.
8. manufacture method as the described static suppression element of the arbitrary claim of claim 1-7, may further comprise the steps, the first step: the LTCC ceramic powder of selecting to have low-k, by ball milling or sand milling technology, be mixed with the ceramic size that is fit to flow casting molding, further obtain having the ceramic diaphragm (12) of certain width and thickness again by casting technique; Second step: the above-mentioned ceramic diaphragm that obtains (12) is stacked to the thickness that needs, has the via layer (42) of definite shape perforate by mechanical stamping or laser drilling formation then; The 3rd step: to the via layer (42) of finishing perforate by the stencilization mode, voltage-sensitive ceramic function phase (41) is filled in the perforate, after getting rid of its inner organic solvent through oven dry again, voltage-sensitive ceramic function phase (41) forms an integral body with via layer (42); The 4th step: go up the layer (31) that prints electrode that obtains to adhere to specification by technologies such as silk screen or steel mesh printings at the ceramic diaphragm (12) that curtain coating obtains, the size of the layer (31) that prints electrode will can be led to suitable by the edge with open surface, the opposite side that a side can cover in the via layer (42) fully; There is the ceramic diaphragm (12) of the layer (31) that prints electrode to carry out drying; The 5th step: by piling up technology, stack gradually: repeating step b the second electrode lay (321)-〉 e via layer (42)-〉 d that first electrode layer (322)-〉 c a) lower protective layer (111)-〉 b)) fills voltage-sensitive ceramic function phase (41)))) ~ d) require to designing the number of plies-f) go up protective layer (112), the product of finishing are green compact bar piece; The 6th step: the bar piece that will obtain cuts into single component products of the some of the specification that meets design requirement; and peel off from loading plate; after under uniform temperature, getting rid of the organic bond in the green compact; under certain sintering temperature, make the protection component product, form conventional Cu(21 finally by ion sputtering or coating and electroplating technology)/Ni(22)/Sn(23) external electrode layer and obtained the static suppression element.
9. the manufacture method of static suppression element as claimed in claim 8, it is characterized in that: first electrode layer (322) in the 5th step and the second electrode lay (321) are respectively left and right two parts of arbitrary electrode in the layer (31) that printed electrode in the 4th step, through forming from the centre cut-out.
10. the manufacture method of static suppression element as claimed in claim 8 is characterized in that: the sintering temperature in the 6th step is the 800-950 degree, depends on used LTCC ceramic matrix and voltage-sensitive ceramic function common burning temperature mutually.
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| CN109637764A (en) * | 2018-12-29 | 2019-04-16 | 广东爱晟电子科技有限公司 | Highly reliable multilayer low-resistance heat sensitive chip and preparation method thereof in high precision |
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| CN110556220A (en) * | 2018-06-04 | 2019-12-10 | 成都铁达电子股份有限公司 | Ceramic chip and low-limiting-voltage piezoresistor |
| CN110556220B (en) * | 2018-06-04 | 2022-08-26 | 成都铁达电子股份有限公司 | Ceramic chip and low-limiting-voltage piezoresistor |
| CN109637764A (en) * | 2018-12-29 | 2019-04-16 | 广东爱晟电子科技有限公司 | Highly reliable multilayer low-resistance heat sensitive chip and preparation method thereof in high precision |
| CN113272922A (en) * | 2019-01-16 | 2021-08-17 | 松下知识产权经营株式会社 | Varistor assembly |
| CN113272922B (en) * | 2019-01-16 | 2023-09-05 | 松下知识产权经营株式会社 | Varistor assembly |
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