CN103336079A - Air quality detection device - Google Patents
Air quality detection device Download PDFInfo
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- CN103336079A CN103336079A CN2013102530332A CN201310253033A CN103336079A CN 103336079 A CN103336079 A CN 103336079A CN 2013102530332 A CN2013102530332 A CN 2013102530332A CN 201310253033 A CN201310253033 A CN 201310253033A CN 103336079 A CN103336079 A CN 103336079A
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- air quality
- gas
- detection device
- quality detection
- detected
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- 238000001514 detection method Methods 0.000 title claims abstract description 18
- 150000002500 ions Chemical class 0.000 claims description 11
- 150000001450 anions Chemical class 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 25
- 239000012498 ultrapure water Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910001423 beryllium ion Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
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- Sampling And Sample Adjustment (AREA)
Abstract
The invention discloses an air quality detection device. The air quality detection device comprises an ion chromatograph which comprises a mobile phase container; the mobile phase container is connected with an air inlet pipe; an air inlet end of the air inlet pipe is provided with a high-voltage arc generator or a negative ion generator. According to the air quality detection device disclosed by the invention, gas to be detected is pre-treated before a mobile phase is used for collecting the gas to be detected, so that the gas to be detected is ionized and is easily dissolved in water. The air quality detection device can be used for detecting foreign gas which cannot be detected by an existing ion chromatograph and includes CF4, NF3, SF6 and the like, and has the advantages of wide detection range, high precision, and capability of reducing the quantity and the variety of detection devices mounted in a production environment and reducing the production cost.
Description
Technical field
The present invention relates to the chip fabrication techniques field, particularly a kind of Detection of Air Quality device.
Background technology
Known, meeting elimination dust in air impurity influences the quality of chip to prevent it when producing electronic chip.But along with the progress of science and technology, the minimum feature of chip becomes more and more littler.When the minimum feature of chip arrived ten nanometers level, airborne foreign gas molecule also can have a negative impact to chip production, often in the production environment of superminiature chip in the air foreign gas concentration need remain on below the 1ppb.
In actual production environment, of a great variety to the foreign gas that chip quality is harmful.The disclosed way of prior art is to use different pick-up units to detect different types of gas respectively, for example: use ion chromatograph to detect NH
3, gas concentrations soluble in water such as HCL, HF, use infrared spectrometer to detect CF
4, NF
3, SF
6, C
3F
8Deng pfc gas concentration, use the analysis of total sulfur instrument to detect SO
2, H
2Gases such as S.Wherein detect degree of accuracy the highest be ion chromatograph.
Be subjected to above-mentioned existing equipment to detect the restriction of gaseous species, the foreign gas concentration that wants to detect all sidedly in the production environment just need be installed multiple checkout equipment simultaneously, and is with high costs.
Summary of the invention
For solving the problems of the technologies described above, the invention provides a kind of Detection of Air Quality device, use a table apparatus to detect different classes of foreign gas concentration simultaneously to reach, reduce the purpose of production cost.
For achieving the above object, technical scheme of the present invention is as follows:
A kind of Detection of Air Quality device comprises ion chromatograph, and described ion chromatograph comprises the phase container that flows, and described mobile phase container is connected with draft tube, and the inlet end of described draft tube is provided with high-voltage arc generator or anion generator.
Preferably, described mobile phase container is at least two groups.
By technique scheme, a kind of Detection of Air Quality device provided by the invention carries out pre-service to gas to be measured earlier before collecting gas to be measured mutually use flowing, and makes gas ionization to be measured (soluble in water), and this invention can detect CF
4, NF
3, SF
6Etc. the non-detectable foreign gas of existing ion chromatograph, have that sensing range is wide, precision is high, and can reduce the pick-up unit value volume and range of product of installing in the production environment, the advantage that can reduce production costs.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below.
Fig. 1 is the structural representation of the disclosed a kind of Detection of Air Quality device of the embodiment of the invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described.
According to Fig. 1, the invention provides a kind of Detection of Air Quality device, comprise ion chromatograph (1), ion chromatograph comprises the phase container (2) that flows, the phase container that flows is connected with draft tube (3), and the inlet end of draft tube is provided with gas to be measured is carried out pretreated high-voltage arc generator (4), through after the pre-service, gas to be measured is ionized, and is soluble in water.
Be equipped with in the mobile phase container for gathering gas flow phase to be measured, preferred, flowing is high purity water mutually.Use by turns for convenient, the phase container that flows is two groups.
Gas to be measured contacts with high purity water in the mobile compatible device of input, and is dissolved in high purity water through after the pre-service.The high purity water input ion chromatograph that will be dissolved with gas to be measured is afterwards analyzed, on the display screen that the component kind in the last gas to be measured and concentration are presented at ion chromatograph.
Wherein, being used for gas to be measured is carried out pretreated mechanism, also can be the mechanism that anion generator or plasma treatment device or flammenwerfer etc. can make gas ionization to be measured.
A kind of Detection of Air Quality device provided by the invention carries out pre-service to gas to be measured earlier before collecting gas to be measured mutually use flowing, and makes gas ionization to be measured (soluble in water), and this invention can detect CF
4, NF
3, SF
6Etc. the non-detectable foreign gas of existing ion chromatograph, have that sensing range is wide, precision is high, and can reduce the pick-up unit value volume and range of product of installing in the production environment, the advantage that can reduce production costs.
To the above-mentioned explanation of disclosed a kind of Detection of Air Quality device embodiment, make this area professional and technical personnel can realize or use the present invention.Multiple modification to these embodiment will be apparent concerning those skilled in the art, and defined General Principle can realize under the situation that does not break away from the spirit or scope of the present invention in other embodiments herein.Therefore, the present invention will can not be restricted to these embodiment shown in this article, but will meet the wideest scope consistent with principle disclosed herein and features of novelty.
Claims (2)
1. a Detection of Air Quality device comprises ion chromatograph, it is characterized in that, described ion chromatograph comprises the phase container that flows, and described mobile phase container is connected with draft tube, and the inlet end of described draft tube is provided with high-voltage arc generator or anion generator.
2. a kind of Detection of Air Quality device according to claim 1 is characterized in that, described mobile phase container is at least two groups.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013102530332A CN103336079A (en) | 2013-06-24 | 2013-06-24 | Air quality detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013102530332A CN103336079A (en) | 2013-06-24 | 2013-06-24 | Air quality detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103336079A true CN103336079A (en) | 2013-10-02 |
Family
ID=49244283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013102530332A Pending CN103336079A (en) | 2013-06-24 | 2013-06-24 | Air quality detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103336079A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103575918A (en) * | 2013-10-28 | 2014-02-12 | 邯郸派瑞节能控制技术有限公司 | Device and method for detecting nitrogen trifluoride |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1397800A (en) * | 2001-06-27 | 2003-02-19 | 安第斯电气株式会社 | Air ion measurer |
| CN1664563A (en) * | 2004-12-31 | 2005-09-07 | 合肥东能光电科技有限公司 | Process for detecting sulfur hexafluoride (SF6) gas |
| CN1707241A (en) * | 2005-05-17 | 2005-12-14 | 北京大学 | Rotary Gas Collection Device |
| CN1801554A (en) * | 2005-01-06 | 2006-07-12 | 徐先 | Air negtive ion generator capable of digitally displaying ion concentration |
| CN201352190Y (en) * | 2008-12-17 | 2009-11-25 | 深圳易拓科技有限公司 | Negative ion sampling device for purifying indoor air |
| CN201536221U (en) * | 2008-08-28 | 2010-07-28 | 夏普株式会社 | Ion detecting device and ion generating device |
| CN201732047U (en) * | 2010-03-01 | 2011-02-02 | 中华人民共和国吴江出入境检验检疫局 | Textile negative ion generation quantity dynamic testing system |
| CN201903529U (en) * | 2010-11-30 | 2011-07-20 | 中国科学院大连化学物理研究所 | Continuous online ionic migration spectrum monitoring instrument for poisonous gases |
| CN102221576A (en) * | 2010-04-15 | 2011-10-19 | 岛津分析技术研发（上海）有限公司 | Method and device for generating and analyzing ions |
| CN102422498A (en) * | 2009-06-09 | 2012-04-18 | 夏普株式会社 | Ion generating device |
| CN203385701U (en) * | 2013-06-24 | 2014-01-08 | 亚翔系统集成科技（苏州）股份有限公司 | Air quality detecting device |
-
2013
- 2013-06-24 CN CN2013102530332A patent/CN103336079A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1397800A (en) * | 2001-06-27 | 2003-02-19 | 安第斯电气株式会社 | Air ion measurer |
| CN1664563A (en) * | 2004-12-31 | 2005-09-07 | 合肥东能光电科技有限公司 | Process for detecting sulfur hexafluoride (SF6) gas |
| CN1801554A (en) * | 2005-01-06 | 2006-07-12 | 徐先 | Air negtive ion generator capable of digitally displaying ion concentration |
| CN1707241A (en) * | 2005-05-17 | 2005-12-14 | 北京大学 | Rotary Gas Collection Device |
| CN201536221U (en) * | 2008-08-28 | 2010-07-28 | 夏普株式会社 | Ion detecting device and ion generating device |
| CN201352190Y (en) * | 2008-12-17 | 2009-11-25 | 深圳易拓科技有限公司 | Negative ion sampling device for purifying indoor air |
| CN102422498A (en) * | 2009-06-09 | 2012-04-18 | 夏普株式会社 | Ion generating device |
| CN201732047U (en) * | 2010-03-01 | 2011-02-02 | 中华人民共和国吴江出入境检验检疫局 | Textile negative ion generation quantity dynamic testing system |
| CN102221576A (en) * | 2010-04-15 | 2011-10-19 | 岛津分析技术研发（上海）有限公司 | Method and device for generating and analyzing ions |
| CN201903529U (en) * | 2010-11-30 | 2011-07-20 | 中国科学院大连化学物理研究所 | Continuous online ionic migration spectrum monitoring instrument for poisonous gases |
| CN203385701U (en) * | 2013-06-24 | 2014-01-08 | 亚翔系统集成科技（苏州）股份有限公司 | Air quality detecting device |
Non-Patent Citations (1)
| Title |
|---|
| 中华人民共和国国家质量监督检验检疫总局 等: "《GB/T 8905-2012 六氟化硫电气设备中气体管理和检测导则》", 31 May 2013 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103575918A (en) * | 2013-10-28 | 2014-02-12 | 邯郸派瑞节能控制技术有限公司 | Device and method for detecting nitrogen trifluoride |
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Application publication date: 20131002 |