CN103290373B - A kind of horizontal type multi-target vacuum sputtering or ion plating machine - Google Patents

Abstract

A horizontal multi-target vacuum sputtering or ion coating machine, comprising a coating machine furnace body, a transmission output part in the coating machine, an arc target, a sputtering target, a vacuum suction port and a workpiece frame, and the coating machine furnace body is divided into two parts. Multiple arc targets are arranged in zone 1, and multiple arc targets are arranged under the furnace body of the coating machine close to the inner wall of the furnace body of the coating machine. Multiple sputtering targets are arranged in zone 2, and multiple sputtering targets are arranged on the furnace body of the coating machine In the furnace body cavity of the coating machine corresponding to the hollow position of the workpiece rack above the center, the workpiece rack is provided with a rotating part and a power input mechanism for placing the workpiece. When the workpiece rack enters the furnace body of the coating machine, the rotating part can pass between the arc target and the sputtering target , the power input mechanism of the workpiece rack is coupled with the transmission output part in the coating machine to drive the rotating parts to rotate, and a vacuum suction port is provided at or near the center of the furnace body of the coating machine. The invention effectively prevents the mutual pollution of the arc target and the sputtering target, and improves the coating efficiency and coating quality.

Description

A horizontal multi-target vacuum sputtering or ion coating machine

technical field

The invention relates to the technical field of vacuum coating, in particular to a horizontal multi-target vacuum sputtering or ion coating machine for partially replacing the electroplating process.

Background technique

Electroplating has been used in industry for a long time, but due to the serious environmental pollution caused by the discharge of three wastes in the electroplating process, a large amount of investment is required to treat it and it is difficult to cure it. It is the vertical multi-target vacuum sputtering or ion coating machine that has been developed rapidly. It is mainly used for rack plating. Its disadvantage is that it is more suitable for the coating of specific workpieces. Realize the effect of barrel plating on the workpiece.

Horizontal multi-target vacuum sputtering or ion coating machines are currently under accelerated development, mainly used for barrel plating small workpieces, such as screws, nuts, polygonal sheets, rings, discs, various polygonal pieces and fragile workpieces such as magnetic Materials Polygonal blocks of various shapes, etc.

The barrel plating technology of horizontal multi-target vacuum sputtering or ion coating machine is mostly in the stage of small batch trial production. Compared with industrial application, there are still many technical problems to be overcome. To improve the horizontal multi-target vacuum sputtering or ion coating In order to improve the production efficiency of the machine, the number of arc targets and sputtering targets set in the coating machine should be as many as possible, so that the coating ions can be excited as much as possible in a unit time of the coating machine, and the mutual pollution of arc plating and sputtering plating should be prevented. It should be beneficial to the layout of the workpiece rack and the setting of the vacuum suction port, so that the structure of the workpiece rack can effectively avoid the constraints of various arc targets and sputtering targets, the amount of workpieces loaded at one time should be large, and the loading and unloading of workpieces should be fast Therefore, the industrial application of horizontal multi-target vacuum sputtering or ion coating machine needs further research and development.

Contents of the invention

The technical problem to be solved by the present invention is to provide a horizontal multi-target vacuum sputtering or ion coating machine for partially replacing the electroplating process. The coating machine makes it easy to enter and exit the workpiece frame as a whole, quick loading and unloading of the workpiece, and wide adaptability of the coating. High production efficiency, suitable for industrial application requirements.

The technical solution adopted by the present invention to solve the above-mentioned technical problems is: a horizontal multi-target vacuum sputtering or ion coating machine, including a coating machine furnace body, a transmission output part in the coating machine, an arc target, a sputtering target, a vacuum pump Suction port and workpiece holder, the furnace body of the coating machine is divided into two areas, multiple arc targets are arranged in the first area, and the multiple arc targets are set on the furnace body of the coating machine close to the inner wall of the furnace body of the coating machine, and multiple sputtering targets are arranged in the second area, A plurality of sputtering targets are set in the furnace body cavity of the coating machine corresponding to the hollow position of the workpiece rack. The workpiece rack is provided with a rotating part and a power input mechanism for placing the workpiece. When the workpiece rack enters the furnace body of the coating machine, the rotating part can The target and the sputtering target pass through, the power input mechanism of the workpiece holder is coupled with the transmission output part in the coating machine to drive the rotating part to rotate, and a vacuum suction port is provided at or near the center of the furnace body of the coating machine.

The plurality of arc targets are arranged below the furnace body of the coating machine and close to the inner wall of the furnace body of the coating machine, and the plurality of sputtering targets are arranged in the inner cavity of the furnace body of the coating machine corresponding to the hollow position of the workpiece holder above the center of the furnace body of the coating machine.

The area of the above-mentioned vacuum suction port accounts for 20%-60% of the area enclosed by the inner wall of the coating machine furnace, preferably 30%-45%.

The above-mentioned sputtering target is a cylindrical structure and can rotate around the axis of the cylinder.

The above-mentioned sputtering targets are divided into two groups arranged oppositely. One group of sputtering targets is close to the inner wall of the furnace body of the coating machine, and the other group of sputtering targets is set in the inner cavity of the furnace body of the coating machine corresponding to the hollow position of the workpiece holder above the center of the furnace body of the coating machine. In this way, the sputtering effect is better.

The arc target area and the sputtering target area are separated by shielding baffles.

The above-mentioned rotating parts include a rotating cage planetary frame and a rotating cage. The rotating cage planetary frame is equipped with a plurality of rotating cage driving parts. Each rotating cage driving part is equipped with a rotating cage. The power input mechanism drives the rotating cage planetary frame to rotate, and the rotating cage planetary frame drives The power transmission part moves, and the power transmission part meshes with the sprocket installed on the outer bracket of the workpiece frame to drive multiple rotating cage driving parts to rotate, and the rotating cage driving part drives the rotating cage to rotate, so that the rotating cage planetary frame revolves and the rotating cage rotates .

The transmission of the above-mentioned rotating cage planet carrier and the rotating cage driving part is a sprocket, and the power transmission part is a chain, so that the power transmission structure is compact.

When in use, the workpiece is placed on the rotating cage of the workpiece holder, and the workpiece holder enters and exits the furnace body of the coating machine through a moving trolley or other moving parts to complete the work of workpiece unloading and loading. When the workpiece rack is moved into the furnace body of the coating machine, the transmission output part in the furnace body of the coating machine is coupled with the power input mechanism of the workpiece rack, driving the planetary cage to revolve and the cage to rotate, and the workpiece can be arc-plated and sputter-plated.

Beneficial effects of the present invention: the workpiece frame of the coating machine is easy to enter and exit as a whole, the loading and unloading operations of the workpiece are carried out outside the furnace body of the coating machine, and the loading and unloading of the workpiece is fast, which is beneficial to the overall workpiece loading of the workpiece frame and facilitates the workpiece to be placed outside the furnace body of the coating machine Carry out pretreatment before plating in other process furnaces to effectively improve the working efficiency of the coating machine and the coating quality of the workpiece.

The workpiece rack drives the rotating cage to pass through the arc plating area and the sputtering plating area, ensuring that the coating ions excited by the coating machine per unit time bombard the plated workpiece as much as possible, so that the plated workpiece is evenly distributed between the arc target and the sputtering target In one charge, the combined process of arc plating and sputtering plating is realized. Arc plating improves the deposition speed of the coating, and sputtering improves the quality of the coating, effectively improving the production efficiency and coating quality of the coating machine.

Due to the effect of gravity, the workpieces to be plated are generally piled up under the rotating cage, so multiple arc targets are arranged in area 1, and they are placed under the furnace body of the coating machine, so that the arc plating efficiency is higher. Multiple sputtering targets are arranged in area 2, which are set above the furnace body of the coating machine. The multiple sputtering targets are divided into two groups arranged oppositely. One group of sputtering targets is close to the inner wall of the coating machine furnace, and the other group of sputtering targets is set In the inner cavity of the coating machine furnace corresponding to the hollow position of the workpiece rack above the center of the coating machine furnace body, the rotating cage in the workpiece rack can pass between the two groups of sputtering targets, and the other group of sputtering target pairs is piled up under the rotating cage The workpiece sputtering plating efficiency is higher.

The shielding baffle separates the arc plating area from the sputtering plating area, which can effectively prevent the mutual contamination of arc plating and sputtering plating, and improve the reliability of equipment operation.

A vacuum suction port is installed near the center of the furnace body of the coating machine to effectively improve the vacuum suction efficiency and improve the production efficiency of the coating machine system.

Description of drawings

Fig. 1 is a schematic layout diagram of multiple arc targets, sputtering targets and a rotating cage in a horizontal multi-target vacuum sputtering or ion coating machine according to an embodiment of the present invention.

Fig. 2 is the installation relationship between the horizontal multi-target vacuum sputtering or ion coating machine and the workpiece holder according to the embodiment of the present invention.

Fig. 3 is the structure of the workpiece rack of the embodiment of the present invention.

Fig. 4 The manner in which the workpiece rack enters and exits the coating machine according to the embodiment of the present invention.

The marks in the figure are as follows: 1 Coating machine furnace body; 2 Coating machine furnace inner wall; 3 Arc target; 4 Sputtering target; Transmission output parts in the furnace body of the coating machine; 9 Guide rails on the inner wall of the furnace; 10 Supporting wheels of the workpiece rack; 11 Power transmission chain; 12 Chain tensioner; 13 Sprocket; 14 Vacuum suction port in the furnace body of the coating machine; ; 16 trolley guide rail; 17 workpiece rack outer support; 18 rotating cage planetary frame; 19 rotating cage drive components; 20 power input mechanism;

detailed description

The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

As shown in Figure 1 and Figure 2, the inner wall 2 of the coating machine furnace is divided into two areas, a plurality of arc targets 3 are arranged in area 1 H, which is arranged under the furnace body 1 of the coating machine, and multiple sputtering targets are arranged in area 2 Z 4. Set above the furnace body 1 of the coating machine.

The sputtering target 4 is a cylindrical structure and can rotate around the axis of the cylinder.

The sputtering targets 4 are divided into two groups arranged oppositely, one group of sputtering targets 4a is close to the inner wall 2 of the furnace body of the coating machine, and the other group of sputtering targets 4b is set on the coating machine corresponding to the hollow position of the workpiece holder 22 above the center of the coating machine furnace body In the inner cavity of the furnace, the rotating cage 5 in the workpiece holder 22 can pass between one group of sputtering targets 4a and another group of sputtering targets 4b.

The shielding baffle 7 separates the arc target area H from the sputtering target area Z, and the shielding baffle 7 separates the arc target area H from the sputtering target area Z.

A vacuum suction port 14 is provided near the center of the coating machine furnace body 1, and the area of the vacuum suction port 14 accounts for 20% to 60% of the area surrounded by the coating machine furnace body wall 2, preferably 30% to 45%.

As shown in FIG. 3 , the workpiece carrier 22 includes a rotating cage 5 with a rotating cage driving part 1 , a workpiece carrier support wheel 10 , a rotating cage planet carrier 18 , and a power input mechanism 20 of the workpiece carrier.

As shown in FIG. 4 , the workpiece frame 22 is mounted on the moving trolley 15 , and can move toward the A direction or the B direction on the moving trolley 15 .

When the workpiece rack 22 enters and exits the furnace body 1 of the coating machine as a whole, the trolley guide rails 16 on both sides of the moving trolley 15 are respectively aligned with the guide rails 9 on the inner wall of the furnace. The plated workpiece 6 is unloaded outside the coating machine furnace body 1. After the blanking is completed, the rotating cage 5 and the coated workpiece 6 are loaded, and the workpiece rack A moves to enter the coating machine furnace body 1 to complete the workpiece blanking and processing. Loading work.

When the workpiece frame 22 is moved into the furnace body 1 of the coating machine, the transmission output part 8 in the furnace body of the coating machine is coupled with the power input mechanism 20 of the workpiece frame to drive the planetary carrier 18 to revolve, as shown in Figure 2, the planetary carrier 18 is installed There are a plurality of tumbler drive parts 19, as shown in Fig. 3, each tumbler drive part 19 is equipped with a sprocket 13, and the power transmission chain 11 is fixed outside the workpiece frame while engaging with the sprocket 13 of a plurality of tumbler drive parts The sprocket 21 on the bracket 17 is engaged, and the chain tensioner 12 tensions the power transmission chain 11 to realize the revolution of the planet carrier 18 and the rotation of the cage 5, as shown in FIG. 2 .

Claims (8)

1. null1. a horizontal type multi-target vacuum sputtering or ion plating machine，It is characterized in that: include coater body of heater、Transmission output member in coater、Arc target、Sputtering target、Vacuum draw mouth and a work rest，It is divided into Two Areas in coater body of heater，Multiple arc target is arranged in region one，Multiple arc targets are arranged on coater body of heater near coater inboard wall of furnace body，Multiple sputtering target is arranged in region two，Multiple sputtering targets are arranged in the coater body of heater inner chamber of the corresponding described work rest inner hollow position of coater body of heater，Work rest arranges tumbler and the power input mechanism placing workpiece，Time in work rest entrance coater body of heater, tumbler can pass through between arc target and sputtering target，And sputtering target enters into the inner hollow position of work rest，The power input mechanism of work rest couples with the transmission output member in coater and drives tumbler to rotate，Coater body of heater center or close center are provided with vacuum draw mouth；Described tumbler includes rotating cage planet carrier and rotating cage, rotating cage planet carrier installs multiple rotating cage driver parts, each rotating cage driver part is equipped with rotating cage, power input mechanism drives rotating cage planet carrier to rotate, rotating cage planet carrier drives power transmission part motion, driving multiple rotating cage driver part to rotate while power transmission part and the sprocket engagement being arranged on work rest support arm, rotating cage driver part drives rotating cage to rotate, and makes the revolution of rotating cage planet carrier and rotating cage rotation.
2. 2. according to the horizontal type multi-target vacuum sputtering or ion plating machine described in claim l, it is characterized in that: the plurality of arc target is arranged on the lower section of coater body of heater near coater inboard wall of furnace body, in the coater body of heater inner chamber of the corresponding work rest hollow position that multiple sputtering targets are arranged on coater body of heater overcentre.
3. 3. according to the horizontal type multi-target vacuum sputtering or ion plating machine described in claim l, it is characterised in that: described vacuum draw open area accounts for the 20% ~ 60% of the area that coater inboard wall of furnace body surrounds.
4. Horizontal type multi-target vacuum sputtering or ion plating machine the most according to claim 3, it is characterised in that: described vacuum draw open area accounts for the 30% ~ 45% of the area that coater inboard wall of furnace body surrounds.
5. 5. according to the horizontal type multi-target vacuum sputtering or ion plating machine described in claim l, it is characterised in that: described sputtering target is cylindrical structure, and can rotate around cylinder axle center.
6. 6. according to the horizontal type multi-target vacuum sputtering or ion plating machine described in claim l, it is characterized in that: described sputtering target is divided into two groups of arranged opposite, one group of sputtering target is in coater inboard wall of furnace body, the coater body of heater inner chamber of the corresponding work rest hollow position that another group sputtering target is arranged on coater body of heater overcentre.
7. 7. according to the horizontal type multi-target vacuum sputtering or ion plating machine described in claim l, it is characterised in that: arc target region and sputtering target region are provided with shielding barrier partitions.
8. Horizontal type multi-target vacuum sputtering or ion plating machine the most according to claim 1, it is characterised in that: described rotating cage planet carrier is sprocket wheel with the transmission of rotating cage driver part, and power transmission part is chain.