CN103282158B - For the method and apparatus delineating carborundum plate - Google Patents

Abstract

Scoring apparatus includes: horizontal table (3), and carborundum plate (2) is fixed on this horizontal table (3) under vacuum draw effect；Feeding screw thread (5) and Y-axis control motor (6), this feeding screw thread (5) and Y-axis control motor (6) and are used for making horizontal table (3) mobile along paired guide rail (4,4) under delineation is digital control；Guide rail device body (7), this guide rail device body (7) is arranged on horizontal table (3) top along X-direction；Support (8), this support (8) is arranged on guide rail device body (7), in order to move along X-direction while directed；Feeding screw thread and X-axis control motor (9), this feeding screw thread and X-axis and control motor (9) and be used for making support (8) lower to move along X-direction digital control；And delineation head (10), this delineation head (10) is arranged on support (8).

Description

For the method and apparatus delineating carborundum plate

Technical field

The present invention relates to a kind of method for delineating carborundum plate and equipment, wherein, by by Cutting wheel applies pressure to carborundum plate and makes this cutting wheel roll on carborundum plate, always in carbonization Score line is depicted on silicon plate.

Background technology

For in passing, carborundum plate (SiC plate) etc. is high due to case hardness, thus (carves carrying out delineating Mark score line) time cutting wheel be very easy to skid, and more difficult depict can from delineation starting point open Begin to obtain the score line of effective vertical fracture.If carborundum plates etc. are owing to applying bending along score line Stress and fracture, then delineation starting point and near start easily to produce from the discrete portions of vertical fracture Raw fragment etc..

Prior art literature

Patent documentation

Patent documentation 1: JP 2009-248267

Summary of the invention

The problem that the present invention need to solve

Therefore, it is an object of the invention to provide a kind of method and apparatus for delineating carborundum plate, should Method and apparatus allows to start to produce effective vertical fracture constantly from delineation starting point.

The means of solution problem

According to the present invention, it is provided that the rose method of a kind of carborundum plate, the method comprises the steps: First, depict indenture when delineation starts in delineation starting point, and proceed by this indenture Delineation.

According to the present invention, also providing for the rose method of a kind of carborundum plate, the method comprises the steps: First, when delineation starts, cause cutting wheel to be taken turns in delineation starting point and carborundum plate pressure in cutting Rotate subtly under the state connect or swing, thus to depict indenture in starting point；Subsequently from this Delineation is proceeded by indenture.

Additionally, according to the present invention, it is provided that the rose method of a kind of carborundum plate, the method includes as follows Step: when delineation starts, causes and cuts and take turns the diamond scribe pin being separately provided in starting point Stretch out and crimp with carborundum plate, thus to depict indenture；Cutting wheel is made to drop in indenture subsequently； And proceed by delineation in this indenture.

Additionally, according to the present invention, it is provided that a kind of scoring apparatus, this scoring apparatus includes: delineation head, This delineation head there is cutting wheel and be adapted to pass through when crimp rolling with carborundum plate and Depict score line；And diamond scriber unit, this diamond scriber unit has diamond scribe Pin, and cause diamond scribe pin to crimp with carborundum plate, in order to thus depict indenture.

It is noted that the size of aforementioned indenture (diameter) is preferably equal to or is less than score line Size, but it is also greater than the size of this score line.

Carborundum plate in the present invention is used for example as the substrate (wafer) of semiconductor device and electronics sets The substrate of standby device etc.

Invention effect

When delineation starts, first pass through and carry out delineation to form indenture in starting point, cause cutting wheel In this indenture, start delineation, thus start to produce effective vertical fracture constantly from this starting point. To this end, obtain the excellent effect that fractures in the whole score line include starting point.

Additionally, due to cutting wheel is from the beginning of in indenture, thus the center of indenture and score line are aligned with each other.

Accompanying drawing explanation

Fig. 1 is the schematic elevational view of scoring apparatus in an example, performs basis in this scoring apparatus One example of invention rose method；

Fig. 2 is the explanatory view utilizing scoring apparatus shown in Fig. 1 to perform rose method of the present invention；

Fig. 3 is the schematic plan of an example of score line in rose method of the present invention；

Fig. 4 is the schematic cross sectional views of main delineation part in rose method of the present invention；

Fig. 5 is the schematic elevational view of scoring apparatus in another example, performs basis in this scoring apparatus Another example of invention rose method；

Fig. 6 is delineation head and the diamond of the scoring apparatus performing rose method of the present invention shown in Fig. 5 The front view of scriber unit；

Fig. 7 is the schematic elevational view of scoring apparatus in another example, performs basis in this scoring apparatus The another example of invention rose method；

Fig. 8 is the schematic diagram of carborundum plate cutting equipment, performs basis in this carborundum plate cutting equipment The another example of invention rose method；And

Fig. 9 is the front view of the delineation head performing rose method of the present invention shown in Fig. 8.

Detailed description of the invention

Will be given below the description of the embodiment of the present invention referring to the drawings.Certainly, owing to utilizing engraving head Portion and scoring apparatus perform the rose method according to the present invention, thus by by the enforcement of scoring apparatus Example describes the rose method according to the present invention.

First embodiment

In Fig. 1 is to 4, scoring apparatus 1 has: horizontal table 3, and carborundum plate 2 is placed on this Fix on horizontal table 3 and under vacuum draw effect；Directed parallel track 4 in pairs, this is paired Directed parallel track 4 is used for guiding and support horizontal table 3 and moves horizontally along Y direction；Feeding Screw thread 5 and Y-axis control motor 6, this feeding screw thread 5 and Y-axis control motor 6 and are used for making water Flat workbench 3 moves along guide rail 4 under delineation is digital control；Guide rail device body 7, This guide rail device body 7 is arranged on above horizontal table 3 along X-direction；Support 8, This support 8 is arranged on guide rail device body 7 to move along X-direction while directed； Feeding screw thread 5 and X-axis control motor 9, this feeding screw thread and X-axis control motor 9 and are used for making Support 8 lower moves along X-direction digital control；And delineation head 10, this delineation head 10 It is arranged on the front surface of support 8.

Delineation head 10 includes: splined shaft 12, and this splined shaft 12 has cutting wheel at its lower end to be protected Gripping member 11；Rotating spline unit 13, this rotation spline unit 13 is for being maintained at this splined shaft 12 Center, so that this splined shaft 12 is vertically movable and the most rotatable；And piston-cylinder unit 15, should Piston-cylinder unit 15 is connected in the upper end of splined shaft 12 by freely rotatable joint 14.

Certainly, the main body of piston-cylinder unit 15 is arranged on support 8, and piston rod 16 is by freely turning Dynamic joint 14 is connected in splined shaft 12.

Cutting wheel 17 is arranged in cutting wheel keeper 11.Certainly, cutting wheel 17 axis relative to Eccentric axis ground (relative to direction of advance backward) of splined shaft 12 is arranged.

It is maintained at the splined shaft 12 rotated in spline unit 13 and rotates spline list by piston-cylinder unit 15 It is vertically movable along Z-direction (being perpendicular to the surface of carborundum plate 2) in unit 13.Additionally, carving During Huaing, along the direction with the surface normal of carborundum plate 2 for cutting wheel 17 applying air pressure.

Splined shaft 12 is driven rotation by rotating spline unit 13.

Angle ambiguity motor 19 is laterally disposed relative to rotating spline unit 13.

Rotate spline unit 13 and there is the driving gear 20 for making splined shaft 12 rotate.Owing to this drives Moving gear 20 engages connection with the gear 21 being arranged on Angle ambiguity motor 19, thus splined shaft 12 and thus cutting wheel 17 rotated under Angle ambiguity by this Angle ambiguity motor 19.Namely Saying, Angle ambiguity is stood with towards delineation direction in the blade face of cutting wheel 17.

Hereafter, will be given for the first reality of the rose method of the present invention performed by this scoring apparatus 1 Execute the description of example.

The most just beginning through making cutting wheel 17 roll while cutting wheel 17 applying air pressure every time Before depicting score line, first make cutting wheel 17 drop to delineate starting point A, and utilize such as From 0.1kg/cm²To 2kg/cm²Cutter edge load crimp with carborundum plate 2, wherein this cutting wheel 17 It is made up of sintered diamond wheel and preferably has from the cutting-tool angle of 90 ° to 140 ° and from 2mm Radius (cutting wheel diameter) to 3.5mm.Under this kind of crimped status, cutting wheel 17 turns subtly Move or swing, in order at this starting point A, thus form indenture B.As shown in Figures 1 to 4, from this Start in indenture B, cause cutting wheel 17 to start delineation under crimped status, thus depict from indenture Continuous score line C that B starts.

The method is a kind of following method: when forming score line C every time, by carving at starting point A Draw and form indenture B and proceed by delineation from this indenture B.

It is noted that the size of indenture B (diameter) is equal to or less than the size of score line C. In figure 3, this indenture is shown enlargedly in order to explain.

Accordingly, because perform delineation in the indenture B formed by carrying out delineating at starting point A, Thus continuous print vertical fracture can be produced from indenture (starting point A), and cut wheel and open from starting point A Beginning will not skid, and thus can obtain the excellent effect that fractures.

Additionally, due to cutting wheel 17 is from the beginning of indenture B, thus the center of indenture B and score line C Aligned with each other.

Second embodiment

In figs. 5 and 6, scoring apparatus 22 has diamond scriber unit 25, this diamond scriber list Unit 25 is arranged to and the engraving head being similarly disposed on this support front surface on the front surface of support 24 Portion 23 juxtaposition.

Diamond scriber unit 25 is exclusively used in when delineation starts to delineate on carborundum plate 2 and forms indenture B.Scoring apparatus 22 in this embodiment has: workbench 26, and carborundum plate 2 is placed on this work Fix on platform 26 and under vacuum draw effect, and this driving water level land rotates；The most parallel draw Guideway 27, this paired directed parallel track 27 is used for guiding supporting table 26 along Y direction Move horizontally；Feeding screw thread 28 and Y-axis control motor 29, this feeding screw thread 28 and Y-axis and control Motor 29 is used for making workbench 26 move along guide rail 27 under delineation is digital control；Guide Rail set body 30, this guide rail device body 30 is arranged on workbench 26 along X-direction Top；Support 24, this support 24 is arranged on guide rail device body 30 with directed same Time move along X-direction；Feeding screw thread and X-axis control motor 31, this feeding screw thread and X-axis Controlling motor 31 is used for making support 24 lower to move along X-direction digital control；Delineation head 23, This delineation head is arranged on the front surface of support 24；And diamond scriber unit 25, this diamond Scriber unit 25 be similarly disposed on the front surface of support 24 and with delineation head 23 juxtaposition.At this In scoring apparatus 22, delineation head 23 has cutting wheel 32 at its lower end, and this cutting is taken turns by sintering Diamond wheel constitute and preferably have from the cutting-tool angle of 90 ° to 140 ° and from 2mm to 3.5mm radius (cutting wheel diameter).But, this scoring apparatus 22 is not provided with Angle ambiguity list Unit, this angle control unit rotates around the axis being perpendicular to carborundum plate 2 in order to make cutting wheel 32.Should Scoring apparatus 22 performs the delineation along X-axis line direction along guide rail device body 30.

This delineation head 23 also causes cutting wheel 32 utilizing such as from 0.1kg/cm by air pressure²Extremely 2.0kg/cm²The state that crimps with carborundum plate 2 of cutter edge load under roll, thus to depict delineation Line.It is to say, delineation head 23 includes sliding sleeve body 33, vertically moves body 34, cutting wheel Keeper 35 and piston-cylinder unit 36, this sliding sleeve body is arranged on the front surface of support 24, and this hangs down Translation is moved body and is kept by sliding sleeve body 33 thus vertically movable, and this cutting wheel keeper is arranged on vertical The lower end of body 34 is moved in translation, and this piston-cylinder unit 36 is connected in the upper end vertically moving body 34.

Cutting wheel keeper 35 is provided with cutting wheel 32.The upper end vertically moving body 34 is connected in cylinder The piston rod 37 of unit 36.

Vertically move body 34 to be vertically movable by piston-cylinder unit 36, and in scoring process, cut Cut wheel 32 by accepting to utilize such as from the pressure of piston-cylinder unit 36 by vertically moving body 34 From 0.1kg/cm²To 2.0kg/cm²Cutter edge load crimp with carborundum plate 2, and thus combine support The motion of 24 and roll to perform delineation.

Meanwhile, diamond scriber unit 25 has: DD motor 38, and this DD motor 38 has It is arranged on the quill shaft on the front surface of support 24；Splined shaft 39, this splined shaft is slidably retained at Quill shaft drives to accept to rotate；Diamond scribe pin 40, this diamond scribe pin is arranged on spline The lower end of axle 39；And piston-cylinder unit 42, this piston-cylinder unit connects by freely rotatable joint 41 In the upper end of splined shaft 39, and the piston rod 43 of piston-cylinder unit 42 is connected in splined shaft 39.

Operation diamond scriber unit 25 aspect, along with splined shaft 39 by piston-cylinder unit 42 towards Carborundum plate 2 extends, and the diamond scribe pin 40 of far-end crimps with carborundum plate 2.Meanwhile, logical DD motor 28 of overdriving makes the diamond scribe pin 40 of far-end rotate subtly, is consequently formed Indenture B.

As the replacement carrying out vertically moving by piston-cylinder unit 42, diamond scribe pin 40 or whole Diamond scriber unit 25 can be vertically movable by linear motor or servomotor.

Hereafter the rose method performed by this scoring apparatus 22 will be described.

When depicting score line on carborundum plate 2, when delineation starts, first by diamond every time Scriber unit 25 is positioned at delineation starting point A, and operates diamond scriber unit 25.By making Splined shaft 39 extends makes the diamond scribe pin 40 of far-end crimp at starting point A, and Buddha's warrior attendant Stone inscription scriber 40 rotates subtly or swings, and thus forms indenture B at this starting point A.

While forming indenture B, draw back diamond scribe pin 40.Then, then make cutting wheel 32 Move and be positioned at position (starting point A) place forming indenture B.Then, cutting wheel 32 stretches out also And utilize in indenture B such as from 0.1kg/cm²To 2.0kg/cm²Cutter edge load and carborundum plate 2 Crimping.In this condition, in indenture B, start delineation, and depict delineation continuously from indenture B Line C.

It is noted that the size of indenture B (diameter) is usually equal to or less than the chi of score line C Very little, but it is also greater than the size of this score line.

3rd embodiment

In the figure 7, in the scoring apparatus 45 according to this embodiment, delineation head 47 and diamond Scriber unit 48 manufactures and independently of one another respectively according on single support 49 and 50, this quarter Draw head be made up of sintered diamond wheel and preferably have from the cutting-tool angle of 90 ° to 140 ° and From the radius (cutting wheel diameter) of 2mm to 3.5mm, and it is adapted to pass through in utilization from 0.1kg/cm² To 2.0kg/cm²The state that crimps with carborundum plate 2 of cutter edge load under roll and depict score line C, on the other hand, this diamond scriber unit is exclusively used in and forms indenture B in carborundum plate 2 delineation.

Corresponding support 49 and 50 is separately mounted on guide rail body 52 and is suitable for each other Independently moving, this guide rail body 52 is arranged on above workbench 51.It is to say, delineation Head 47 and diamond scriber unit 48 move independently of one another.

Additionally, delineation head 47 and the corresponding construction of diamond scriber unit 48 and operation can be with aforementioned The delineation head 23 of the scoring apparatus 22 shown in the second embodiment and the knot of diamond scriber unit 25 Structure is identical with operation.

Same identical with the second embodiment, scoring apparatus 45 has: workbench 51, carborundum plate 2 are placed on this workbench 51 and fixing under vacuum draw effect, and this driving water level land turns Dynamic；Directed parallel track 53 in pairs, this paired directed parallel track 53 is for guiding and supporting table 51 move horizontally along Y direction；Feeding screw thread 58 and Y-axis control motor 54, this feeding screw thread 58 and Y-axis control motor 53 be used for making workbench 51 along guide rail 53 under digital control Mobile；Guide rail device body 52, this guide rail device body 52 is installed along X-direction Above workbench 51；Two supports 49 and 50, this support 49 and 50 is arranged on guide rail dress Put on body 52 to move along X-direction while directed；Feeding screw thread and an X-axis control Motor 55 processed, this feeding screw thread and X-axis control motor 55 and are used for making a support 49 in numeral Move along X-direction under control；Feeding screw thread and another X-axis control motor 56, this feeding spiral shell Stricture of vagina and X-axis control motor 56 and are used for making another support 50 similarly digital control lower along X-axis Direction is moved；Aforementioned delineation head 47, this delineation head is arranged on the front surface of a support 49； And aforementioned diamond scriber unit 48, this diamond scriber unit 48 is arranged on another support 50 On front surface.

Identical with the diamond scriber unit 25 in the second embodiment, diamond scriber unit 48 is at it Rear end has diamond scribe pin 57, and this diamond scribe pin 57 is suitable for towards carborundum plate 2 Stretch out and crimp with this carborundum plate and rotate subtly or swing, thus to depict indenture B.

Hereafter the rose method performed by this scoring apparatus 45 will be described.

When depicting score line on carborundum plate 2, when delineation starts, first make diamond every time Scriber unit 48 moves and is positioned at delineation starting point A, and operation diamond scriber unit at once 48 to form indenture B from there through carrying out delineating at starting point A.After forming indenture B, Diamond scriber unit 48 is back to its home position at once.Then make delineation head 47 move then, And it is positioned at position (starting point A) place forming indenture B.Then, cutting wheel 46 stretch out and Utilize such as from 0.1kg/cm in indenture B²To 2.0kg/cm²Cutter edge load crimp with carborundum plate 2. In this condition, in indenture B, start delineation, and depict score line C continuously from indenture B.

Certainly, the size (diameter) of indenture B equals to or less than the size of score line C, but also can be big Size in this score line.

4th embodiment

In figs. 8 and 9, use this carborundum plate cutting equipment 60, be provided with the support of cutting wheel 61 62 move in plane coordinate system by standing NC control, in this scoring apparatus 9, and this cutting Take turns be made up of sintered diamond wheel and preferably have from the cutting-tool angle of 90 ° to 140 ° and from The radius (cutting wheel diameter) of 2mm to 3.5mm.Therefore, cutting wheel 61 is controlled by standing NC Make and move in orthogonal coordinate system.

As shown in Figure 8, paired guide rail 64 is arranged on base portion 63 along Y-axis, and motion base Portion 65 is moved along Y direction by guide rail 64.Additionally, along the paired guide rail of X-axis 66 are arranged on motion base portion 65.Support 63 can be moved along X-direction by these guide rails 66. Motion base portion 65 is controlled motor 67 and pinion rack device or feeding screw thread digital control by Y-axis Lower move along Y direction.

Support 62 on motion base portion 65 is controlled motor 68 and pinion rack device or feeding by X-axis Screw thread lower moves along X-direction digital control.

Therefore, support 62 is controlled along the location of X-direction and Y-axis line direction, and is arranged on support Cutting wheel 61 on 62 moves along with pre-programmed movement locus.Hereinafter, as it is shown in figure 9, cut Device head 69, also delineation head are arranged on the front surface of support 62.

Cutter head 69 includes: splined shaft 71, and this splined shaft 71 has cutting wheel at its lower end Keeper 70；Rotating spline unit 72, this rotation spline unit 72 is for keeping this splined shaft 71 At center so that this splined shaft 71 is vertically movable and the most rotatable；And piston-cylinder unit, this gas Cylinder unit is connected in the upper end of splined shaft 71 by freely rotatable joint 73.The main body of piston-cylinder unit 74 It is arranged on support 62, and piston rod 75 is connected in splined shaft 71 by freely rotatable joint 73.

Cutting wheel 61 is arranged in cutting wheel keeper 70.The axis of cutting wheel 61 is relative to splined shaft Eccentric axis ground (relative to direction of advance backward) of 71 is arranged.

It is maintained at the splined shaft 71 rotated in spline unit 72 and rotates spline list by piston-cylinder unit 74 It is vertically movable along Z-direction (being perpendicular to the surface of carborundum plate 2) in unit 72.

In scoring process, along the direction with the surface normal of carborundum plate 2 for cutting wheel 61 applying Air pressure.Additionally, splined shaft 71 is driven rotation by rotating spline unit 72.Angle ambiguity motor 76 Laterally arrange relative to rotating spline unit 72.

Rotate spline unit 72 and there is the driving gear 77 for making splined shaft 71 rotate.Owing to this drives Moving gear 77 engages connection with the gear 78 being arranged on Angle ambiguity motor 76, thus splined shaft 71 and thus cutting wheel 61 rotated under Angle ambiguity by this Angle ambiguity motor 76.

It is to say, Angle ambiguity is stood with towards delineation direction in the blade face of cutting wheel 61.Carborundum Plate 2 is placed on the workbench 79 on base portion 63, and holds as desired and fix.

Hereafter, will be given for the description of the rose method of the present invention performed by this scoring apparatus 1.

The most just beginning through making cutting wheel 61 roll while cutting wheel 61 applying air pressure every time Before depicting score line, first make cutting wheel 61 drop to delineate starting point A and utilize such as from 0.1kg/cm²To 2kg/cm²Cutter edge load crimp with carborundum plate 2.Under this kind of crimped status, Cutting wheel 61 rotates or swings thus to form indenture B at this starting point A subtly.Then, from Start in this indenture B, cause cutting wheel 61 to start delineation under crimped status, thus depict from recessed Continuous score line C that trace B starts.

The method is a kind of following method: when forming score line C every time, by carving at starting point A Draw and form indenture B and proceed by delineation from this indenture B.

Accordingly, because perform delineation in the indenture B formed by carrying out delineating at starting point A, Thus continuous print vertical fracture can be produced from indenture (starting point A), and cut wheel and open from starting point A Beginning will not skid, and thus can obtain the excellent effect that fractures.

Additionally, due to cutting wheel 61 is from the beginning of indenture B, thus the center of indenture B and score line C Aligned with each other.

Claims (3)

1. a carborundum plate rose method, described method comprises the steps: when delineation starts, First cutting wheel is caused to be taken turns in delineation starting point in described cutting with from 0.1kg/cm²To 2kg/cm²'s Rotate or swing under the state that cutter edge load crimps with carborundum plate, thus delineate in described starting point Go out indenture；Delineation is started subsequently in described indenture.

2. a carborundum plate rose method, described method comprises the steps: when delineation starts, First cause and cut the diamond scribe pin that is separately provided of wheel at described diamond scribe pin in delineation Initial point is sentenced from 0.1kg/cm²To 2kg/cm²The state that crimps with carborundum plate of cutter edge load under rotate Or swing, thus depict indenture；Cause described cutting wheel with described subsequently at the indenture formed Carborundum plate crimps；Delineation is started in described indenture.

3. a scoring apparatus, including: delineation head, described delineation head has cutting wheel, and It is adapted to pass through and makes described cutting wheel with from 0.1kg/cm²To 2kg/cm²Cutter edge load with carborundum Roll under the state of plate crimping and delineate place's score line；And diamond scriber unit, described diamond Scriber unit has diamond scribe pin, and causes described diamond scribe pin and described carborundum plate Crimping, in order to thus depict indenture.