CN103278148B - Two-axis microgyroscope of magnetostrictive solid oscillator - Google Patents

Abstract

A magnetostrictive solid vibrator biaxial microgyroscope in the field of micro-electromechanical technology, comprising: a solid vibrator, a lower stator for driving the solid vibrator to vibrate, an upper stator, and three magnetic sensors, wherein: the lower stator and the upper stator are arranged symmetrically On the upper end surface and the lower end surface of the solid vibrator, three magnetic sensors are respectively arranged on the three sides of the solid vibrator and respectively sense the X-axis magnetic field change, the Y-axis magnetic field change and the Z-axis magnetic field change of the solid-state vibrator, and output Corresponding electrical signals are used to realize the measurement of the Y-axis input angular rate, the X-axis input angular rate and the monitoring of the Z-axis reference vibration of the microgyroscope. The microgyroscope of the present invention utilizes the solid vibrator of the integral magnetostrictive material to simultaneously realize the driving vibration and detection vibration of the Coriolis acceleration effect coupling microgyroscope, and can simultaneously measure the angular rate of the dual input shafts, with high sensitivity; it is manufactured by MEMS technology and has a small volume .

Description

Magnetostrictive Solid Vibrator Dual-Axis Micro Gyroscope

technical field

The invention relates to a device in the field of micro-electromechanical technology, in particular to a magnetostrictive solid vibrator biaxial micro-gyroscope.

Background technique

Most of the currently reported MEMS (micro-electromechanical systems) gyroscopes are vibrating micro-gyroscopes, which basically use elastic beams to support the detection mass, and are based on the structure-driven vibration mode and detection vibration caused by Coriolis acceleration. The transfer of energy between modes is used to detect angular velocity. This kind of vibrating micro-gyroscope whose detection quality is supported by a flexible support beam attached to the substrate, due to the existence of active mass, its working performance accuracy is easily affected by micro-manufacturing defects and changes in the working environment. In recent years, a new class of all-solid-state micro-gyroscopes has emerged, such as optical micro-gyroscopes, micro-surface wave gyroscopes, piezoelectric solid-mode micro-gyroscopes, etc. Strong shock and vibration resistance.

Giant magnetostrictive materials (GMM for short), represented by the rare earth-iron alloy Terfenol-D (terbium-dysprosium-iron alloy), are new functional materials developed in recent years that can realize efficient conversion of electromagnetic energy to mechanical energy. In addition to the high strain of 1500-2000ppm at room temperature, GMM also has the characteristics of high output power, high energy density, and fast response speed. It shows excellent application prospects in the fields of national defense, aerospace and high technology. The detection sensitivity of the vibrating micro-gyroscope can be improved by using the excellent characteristics of the magnetostrictive material, especially the large stretchability, to increase the amplitude of the driving vibration mode.

After literature search, Jin-Hyeong Yoo et al. published "Electromechanical Network Modeling for Magnetoelastic Gyro Sensor Design" (Proc.of SPIE, Vol.7647:76472s-1～9, Electromechanical Network Modeling Applied to Magnetoelastic Gyro Sensor Design) describes a vibrating tuning fork gyroscope that uses strip-shaped Galfenol (iron-gallium alloy) magnetostrictive materials for driving and detection. The two fingers of the gyroscope tuning fork (that is, the driving finger and the detecting finger) and their base are made of aluminum, and a permanent magnet is placed under the fingers to provide a bias magnetic field. The driving Galfenol magnetostrictive strip is attached to the inner surface of the driving fork finger, and the surrounding driving coil excites the tuning fork to drive the mode vibration in the plane. When the angular velocity is input along the main axis of the tuning fork, the Coriolis acceleration causes the tuning fork to detect the mode. State vibration, and strain deformation of the Galfenol magnetostrictive strip attached to the side of the detection finger, so that due to the piezomagnetic effect, a change in the magnetic field strength proportional to the input angular velocity is generated, and the change signal is sensitive to the detection coil. The gyroscope is a single-input-axis angular rate sensor; since two strips of magnetostrictive material are respectively pasted on the two aluminum tuning fork fingers, and the driving and detection coils adopt a winding structure, its overall size is relatively large, and it is not easy to micro Processing integrated manufacturing, limited impact and shock resistance during work.

Contents of the invention

Aiming at the above-mentioned deficiencies in the prior art, the present invention provides a magnetostrictive solid vibrator biaxial micro-gyroscope, which uses the whole magnetostrictive material as a solid vibrator to generate reference vibration by means of the magnetostrictive effect (Joule effect), and utilizes The inverse magnetostrictive effect (Villari effect) detects the dual input shaft angular rate through a giant magnetoresistance (GMR) magnetosensitive sensor.

The present invention is achieved through the following technical solutions. The present invention includes: a cuboid solid vibrator whose upper and lower end surfaces are square, a lower stator for driving the solid vibrator to vibrate, an upper stator and three magnetic sensors, wherein: the lower stator Set symmetrically with the upper stator on the upper and lower end surfaces of the solid vibrator, set the center of the solid vibrator as the origin O of the inertial coordinate system OXYZ, the OZ direction is perpendicular to the plane where the upper stator or the lower stator is located, and the three magnetic sensors are respectively set on On the three sides of the solid vibrator, the X-axis magnetic field change, the Y-axis magnetic field change and the Z-axis magnetic field change of the solid vibrator are respectively sensed, and the corresponding electrical signals are output to correspond to the measurement of the Y-axis input angular rate of the micro gyroscope. , Measurement of X-axis input angular rate and monitoring of Z-axis reference vibration;

The lower stator and the upper stator have the same structure, including: a permanent magnet generating a bias static magnetic field to the solid oscillator and a driving planar coil generating a superimposed changing magnetic field to the solid oscillator.

The shape of the end faces of the lower stator and the upper stator is the same as that of the solid vibrator, and the solid vibrator can be used to maximize its function.

The solid vibrator is processed from a single crystal or polycrystalline magnetostrictive material Terfenol-D or Galfenol alloy, or is sintered from a magnetostrictive material through a powder metallurgy process. The solid vibrator has the characteristics of stretching and deforming under the excitation magnetic field and changing the magnetic permeability due to external stress deformation. The direction of the maximum magnetostriction is along the height direction of the solid vibrator, that is, the OZ direction.

As a preferred solution, the driving planar coil is arranged on a square substrate, and the permanent magnet is arranged outside the driving planar coil.

As another solution, the driving planar coil is integrated on the upper and lower end surfaces of the solid vibrator, and the permanent magnet is arranged outside the driving planar coil.

The permanent magnets are distributed on the outermost side of the Z-axis of the microgyroscope. The bias static magnetic field generated by the permanent magnets arranged on both sides ensures that the solid-state vibrator works in the linear vibration range, and the magnetic field attraction generated between the two permanent magnets can also generate vibration for the solid-state vibrator. A certain amount of preload.

The driving planar coil is excited by a high-frequency sinusoidal signal, which generates a superimposed and changing magnetic field on the solid oscillator. In this way, under the joint action of the bias magnetic field of the permanent magnet and the AC magnetic field of the coil, the solid vibrator performs stretching reference vibration at the frequency of the AC excitation signal.

The driving planar coil is a single-layer or multi-layer multi-turn spiral coil, including: bottom leads, connecting columns, single or several layers of coil layers arranged in parallel, pins and insulating media, wherein: the connecting columns are respectively connected to the bottom leads 1. The coil layers of each layer are connected to the pins, and the insulating medium is filled in the bottom lead, the connecting column and the coil layer; the driving planar coil is manufactured by MEMS processing technology, and the MEMS processing technology includes sputtering deposition, photolithography, etching , electroplating, slicing and other basic processes.

The main material of the bottom lead wires, connecting columns, coils and pins is metallic copper.

The magnetosensitive sensor is a giant magnetoresistive sensor sensitive to only one axial magnetic field, including: two magnetic field sensing resistors for inducing an external magnetic field in the same area, two reference resistors, and two external resistors respectively covering the reference resistors. Two magnetic flux concentrators, in which: the resistance values of the two magnetic field sensing resistors and the two reference resistors are the same, and the two resistors are arranged alternately and connected end to end to form a Wheatstone bridge, and the four connection terminals are respectively powered by the bridge Voltage terminal, two sense voltage output terminals and ground terminal.

The magnetic field sensing resistor is located in the middle of the entire magnetic sensor, and two pairs of reference resistors and flux concentrators are respectively located on both sides of the magnetic field sensing resistor.

Both the magnetic field sensing resistor and the reference resistor are made of multilayer film giant magnetoresistance material.

The magnetic flux concentrator is made of a thin film of soft magnetic material, so that the resistance of the reference resistor is not affected by the external magnetic field, and also has the effect of converging the magnetic flux on the magnetic field sensing resistor placed therein, thereby enhancing the detection of the external magnetic field by the magnetic sensor sensitivity. By adjusting the relative positions of the two magnetic flux concentrators and the two magnetic field sensing resistors, the magnetic field detection sensitivity of the magnetic sensor can be improved, for example, the sensitivity is related to the length L of the magnetic flux concentrator and the gap d between the two magnetic flux concentrators The ratio L/d is directly proportional, that is, magnetic sensors with different sensitivities can be designed through different L/d.

The electrical signal output by the magnetic sensitive sensor is: V _o2 -V _o1 =V _b δ/(2+δ), δ=△R/R, wherein: V _o2 and V _o1 are the voltage values of the induced voltage output terminals respectively , V _b is the voltage value of the power supply voltage terminal of the bridge, δ is the rate of change of reluctance, △R is the decrease of the resistance value of the magnetic field sensing resistor, R is the initial value of the magnetic field sensing resistor and the reference resistor under zero magnetic field.

The shape of the magnetic field sensing resistor and reference resistor is: a strip structure bent several times, which increases the initial resistance value under zero magnetic field to improve the resolution of magnetic field detection, and makes the resistor structure more compact .

The GMR magnetic sensitive sensor is manufactured by MEMS micromachining technology, and the MEMS micromachining technology includes sputtering deposition, photolithography, etching, electroplating, slicing and other basic procedures.

technical effect

Compared with the prior art, the present invention has the advantages of: using the solid vibrator of integral magnetostrictive material to simultaneously realize the driving vibration and detection vibration of the Coriolis acceleration effect coupled micro-gyroscope, and can simultaneously measure the angular rate of the dual input shafts ; Drive planar coil excitation structure and giant magnetoresistive magnetic sensor, and use MEMS micro-processing technology to manufacture; the micro gyroscope of the present invention has small overall volume, high detection sensitivity, and stronger shock and vibration resistance.

Description of drawings

Fig. 1 is the exploded three-dimensional structure schematic diagram of microgyroscope embodiment 1;

Fig. 2 is the XZ side schematic diagram of Fig. 1 microgyroscope assembly structure;

Fig. 3 is the schematic diagram of the microfabrication structure of driving planar coil;

Fig. 4 is the planar structure of magnetic sensitive sensor;

Fig. 5 is the Wheatstone bridge circuit schematic diagram of magnetic sensitive sensor;

Fig. 6 is a schematic diagram of an exploded three-dimensional structure of the second embodiment of the micro-gyroscope.

Detailed ways

The embodiments of the present invention are described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following implementation example.

Example 1

As shown in Fig. 1 and Fig. 2, the magnetostrictive solid vibrator biaxial micro-gyroscope of this embodiment includes: a cuboid solid vibrator 1, a lower stator 2 for driving the solid vibrator 1 to vibrate, an upper stator 3 and three magnets. Sensitive sensor, wherein: the lower stator 2 and the upper stator 3 are symmetrically arranged on the upper end surface and the lower end surface of the solid vibrator 1, the center of the solid vibrator 1 is set as the origin O of the inertial coordinate system OXYZ, and the OZ direction is perpendicular to the upper stator 3 or the lower stator 2, three magnetic sensors are respectively arranged on the three sides of the solid-state vibrator 1 and respectively sense the X-axis magnetic field change, the Y-axis magnetic field change and the Z-axis magnetic field change of the solid-state vibrator 1, and output corresponding electric currents. The signal corresponds to the measurement of the Y-axis input angular rate of the microgyroscope, the measurement of the X-axis input angular rate and the monitoring of the Z-axis reference vibration;

The structure of the lower stator 2 and the upper stator 3 is the same, including: a permanent magnet 7 that generates a bias static magnetic field for the solid state oscillator 1 and a driving planar coil 8 that generates a superimposed changing magnetic field for the solid state oscillator 1 .

The solid vibrator 1 is processed by single crystal or polycrystalline magnetostrictive alloy materials such as terbium dysprosium iron alloy Terfenol-D, iron gallium alloy Galfenol, etc., or by powder metallurgy sintering of magnetostrictive materials. The solid vibrator 1 has the characteristics of stretching and deforming under the excitation magnetic field and changing the magnetic permeability due to external stress deformation, and the direction of the maximum magnetostriction is along the height direction of the square vibrator, that is, the OZ direction.

The length and width of the two end faces of the solid vibrator 1 are equal, or the height of the solid vibrator 1 and the length and width of the two end faces of the solid vibrator 1 are equal.

The permanent magnet 7 is in the shape of a square block, and is distributed on the outermost side of the Z-axis of the micro-gyroscope. The bias static magnetic field generated by the permanent magnets 7 arranged on both sides ensures that the solid-state oscillator 1 works in the linear vibration range, and the magnetic field attraction generated between the two permanent magnets 7 can generate a certain pre-tightening force on the solid-state oscillator 1 .

In this embodiment, the driving planar coil 8 is arranged on the substrate 9 , which is square in shape and made of glass, silicon or ceramics, and located between the driving planar coil 8 and the permanent magnet 7 .

The driving planar coil 8 is excited by a high-frequency sinusoidal signal to generate a superimposed changing magnetic field on the solid vibrator 1 . In this way, the solid vibrator 1 performs stretching reference vibration at the frequency of the AC excitation signal under the joint action of the bias magnetic field of the permanent magnet 7 and the AC magnetic field of the coil.

As shown in Figure 3, the driving planar coil 8 is a single-layer or multi-layer multi-turn spiral coil, using MEMS processing technology, its structure includes: bottom leads, connecting columns, single-layer or several layers of coil layers arranged in parallel, Basic structural elements such as pins and insulating media, wherein the main material of the bottom leads, connecting columns, coils and pins is metallic copper, and the insulating media is filled therein. The MEMS processing technology includes basic procedures such as sputtering deposition, photolithography, etching, electroplating, and slicing. Taking the micro-manufactured structure of a two-layer square spiral coil as an example, the schematic cross-sectional view of the structure is shown in Figure 3, including: the bottom lead wire 81, the connecting column 82, the first layer coil 83, the connecting column 84, the second layer coil 85, the pin 86 and an insulating medium 87, wherein: the two ends of the connecting column 82 are respectively connected to the bottom lead wire 81 and the first layer coil 83, and the two ends of the connecting column 84 are respectively connected to the first layer coil 83 and the second layer coil 85, and the coil layers of each layer A number of connected spiral coils are respectively provided, and the insulating medium 87 is filled with the bottom lead wires 81, the connecting columns 82, 84 and the coils. The uppermost layer of the pins 86 is an electroplated metal gold or nickel material with good solderability, and the setting and insulation The outside of the medium 87 is either ground flat or exposed.

As shown in FIGS. 4 and 5 , the three magnetic sensors include an X-axis magnetic sensor 5 , a Y-axis magnetic sensor 4 and a Z-axis magnetic sensor 6 . Among them, the X-axis magnetic sensor 5 is sensitive to the magnetic field change in the X-axis of the solid-state oscillator 1, which is used to measure the input angular rate of the micro-gyroscope in the Y-axis; the Y-axis magnetic sensor 4 is sensitive to the magnetic field change in the Y-axis of the solid-state oscillator 1, using It is used to measure the input angular rate of the X-axis of the micro-gyroscope; the Z-axis magnetic sensor 6 is sensitive to the magnetic field change signal of the Z-axis of the solid-state oscillator 1, and is used for monitoring the reference vibration of the Z-axis of the micro-gyroscope to determine the reference resonance of the solid-state oscillator 1 frequency.

The magnetosensitive sensor is a giant magnetoresistive sensor sensitive to only one axial magnetic field, including: two magnetic field sensing resistors 41, 42 for sensing the external magnetic field in the same area, two reference resistors 43, 44 and The two magnetic flux concentrators 45, 46 covering the outside of the reference resistor, wherein: the resistance values of the two magnetic field sensing resistors 41, 42 and the two reference resistors 43, 44 are the same, and the two resistors are arranged alternately and interconnected The wires 47 are connected end to end to form a Wheatstone bridge, and the four connection terminals 48 are the bridge power supply voltage terminal V _b , two induced voltage output terminals V _o1 , V _o2 and the ground terminal GND.

The magnetic field sensing resistors 41, 42 are located in the middle of the entire magnetic sensor, and two pairs of reference resistors 43, 44 and magnetic flux concentrators 45, 46 are located on both sides of the magnetic field sensing resistors.

The two magnetic field sensing resistors 41, 42 and the two reference resistors 43, 44 are made of multilayer giant magnetoresistance GMR materials;

The magnetic flux concentrators 45 and 46 are thin films of magnetic shielding soft magnetic material, so that the resistance values of the reference resistors 43 and 44 are not affected by the external magnetic field. The magnetic flux concentrators 45 and 46 also have the effect of converging magnetic flux on the magnetic field sensing resistors 41 and 42 placed therebetween, enhancing the detection sensitivity of the magnetic sensor to an external magnetic field.

By adjusting the relative positions of two magnetic flux concentrators 45,46 and two magnetic field sensing resistors 41,42, the magnetic field detection sensitivity of the magnetic sensor can be improved, for example, the sensitivity and the length L of the magnetic flux converging devices 45,46 It is proportional to the ratio L/d of the gap d between the two magnetic flux concentrators 45, 46, that is, magnetic sensors with different sensitivities can be designed by using different L/d.

The electrical signal output by the magnetic sensitive sensor is: V _o2 -V _o1 =V _b δ/(2+δ), δ=△R/R, wherein: V _o2 and V _o1 are the voltage values of the induced voltage output terminals respectively , V _b is the voltage value of the power supply voltage terminal of the bridge, δ is the rate of change of reluctance, △R is the decrease of the resistance value of the magnetic field sensing resistor, R is the initial value of the magnetic field sensing resistor and the reference resistor under zero magnetic field.

The shapes of the magnetic field sensing resistors 41, 42 and reference resistors 43, 44 are: a strip structure bent several times, which increases the initial resistance value under zero magnetic field to improve the resolution of magnetic field detection, and makes The resistors are arranged more compactly.

The GMR magnetic sensitive sensor is manufactured by MEMS micromachining technology, and the MEMS micromachining technology includes sputtering deposition, photolithography, etching, electroplating, slicing and other basic procedures. The manufacturing method of the MEMS micromachining process of the GMR magnetic sensitive sensor is as follows:

1) Depositing a multi-layer giant magnetoresistive material film on the substrate 49 by magnetron sputtering;

2) Photoetching or dry etching the patterns of the magnetic field sensing resistors 41, 42 and reference resistors 43, 44;

3) photolithography or sputtering Cr/Au film, wet etching photoresist to obtain the underlying metal pattern of the interconnection wire 47 connecting the magnetic field sensing resistors 41, 42, the reference resistors 43, 44 and the connecting terminal 48;

4) Deposit the insulating layer, photolithography or wet etching the insulating layer to expose the pin metal;

5) Sputtering the metal seed layer, photolithography and electroplating soft magnetic materials to form magnetic flux concentrators 45 , 46 and connection ends 48 .

The material of the substrate 49 is a silicon wafer or a glass wafer.

The multilayer giant magnetoresistance material thin film is: [NiFeCo/Cu] multilayer film or [Fe/Cr] multilayer film.

The insulating layer is a silicon oxide or aluminum oxide insulating layer.

The electroplated soft magnetic material is permalloy.

6) Finally slice to obtain giant magnetoresistive magnetic sensor.

The working principle of the micro-gyroscope in this embodiment is: on the premise that the permanent magnet 7 provides the working point of the bias magnetic field, the alternating magnetic field generated by applying a sinusoidal AC signal to the driving planar coil 8 makes the solid vibrator 1 resonate in the Z-axis direction. The frequency is used as the stretching reference vibration. If the solid vibrator 1 stretches along the Z-axis direction, it will shrink along the X-axis and Y-axis directions; similarly, if the Z-axis shrinks along the Z-axis direction, it will elongate along the X-axis and Y-axis directions; Repeat stretching vibration in the Z-axis direction respectively. The reference resonant vibration of the micro-gyroscope is monitored by the magnetic sensor 6 in the Z-axis direction through the change of the output voltage signal of the bridge. When the angular rate is input in the direction of the integral axis perpendicular to the Z-axis reference vibration, such as the X-axis, due to the Coriolis force caused by the Coriolis acceleration, the vibration on the other axis of the solid vibrator 1, that is, the direction of the Y-axis The shape changes, according to the inverse magnetostrictive effect of the magnetostrictive body, the change of the magnetization intensity will be caused, that is, the change of the magnetic permeability. The change of the magnetic field in the Y axis is detected by the magnetic sensor 5 on the xz surface and converted into The output voltage of the Stone bridge. Similarly, when the angular rate is input in the other body axis direction, that is, the Y axis, the Coriolis acceleration effect changes the X-axis vibration form of the solid vibrator 1, and the reverse magnetostrictive effect causes the magnetostrictive vibrator X-axis magnetic The change of the conductivity is the change of the magnetic field in the X-axis, and is detected by converting the magnetic sensor 4 on the yz surface into the output voltage of the Wheatstone bridge. When the X-axis and Y-axis input the angular rate at the same time, the magnetic sensor 5 on the xz surface and the magnetic sensor 4 on the yz surface can respectively output the bridge output voltage proportional to the input angular rate, so as to realize this The two-axis gyroscope function of the micro gyroscope.

Example 2

The magnetostrictive solid state oscillator biaxial micro-gyroscope of the present invention is not limited to the structure involved in the first embodiment.

As shown in FIG. 6 , in this embodiment, the driving planar coil 8 is directly integrated and manufactured on the solid vibrator 1 made of magnetostrictive material. The driving planar coil 8 is the same as the embodiment 1, and is also a single-layer or multi-layer multi-turn spiral coil, using MEMS processing technology. Taking the two-layer square spiral coil microfabrication structure as an example, its MEMS manufacturing method is as follows: use the magnetostrictive material disc of the solid vibrator 1 as the base, and first deposit silicon oxide or aluminum oxide insulation on the wafer on one side of the base. layer, and then as shown in the cross-sectional schematic diagram of the manufacturing structure in Figure 3, the bottom lead 81, the connecting column 82, the first coil layer 83, the connecting column 84, the first Two-layer coil layer 85, pins 86 and insulating medium 87; the driving planar coils 8 on both end faces of the solid vibrator 1 are prepared by the same method, and the precision of the upper and lower driving planar coils 8 can be realized by double-sided alignment photolithography position alignment.

Other structures are the same as in Embodiment 1.

Claims (8)

1. A magnetostrictive solid vibrator biaxial micro-gyroscope, characterized in that it comprises: a solid vibrator with a square cuboid shape on the upper and lower end faces, a lower stator for driving the vibration of the solid vibrator, an upper stator and three magnetosensitive The sensor, wherein: the lower stator and the upper stator are symmetrically arranged on the upper end surface and the lower end surface of the solid vibrator, the center of the solid vibrator is set as the origin O of the inertial coordinate system OXYZ, and the OZ direction is perpendicular to the plane where the upper stator or the lower stator is located, three Magnetic sensors are respectively arranged on the three sides of the solid vibrator and respectively sense the X-axis magnetic field change, the Y-axis magnetic field change and the Z-axis magnetic field change of the solid vibrator, and output corresponding electrical signals to correspond to the Y-axis of the micro gyroscope. The measurement of the input angular rate, the measurement of the input angular rate of the X axis and the monitoring of the reference vibration of the Z axis; The lower stator and the upper stator have the same structure, including: a permanent magnet that generates a bias static magnetic field for the solid oscillator and a driving planar coil that generates a superimposed changing magnetic field for the solid oscillator; The magnetosensitive sensor is a giant magnetoresistive sensor sensitive to only one axial magnetic field, including: two magnetic field sensing resistors for inducing an external magnetic field in the same area, two reference resistors, and two external resistors respectively covering the reference resistors. Two magnetic flux concentrators, in which: the resistance values of the two magnetic field sensing resistors and the two reference resistors are the same, and the shape of the two resistors is a strip structure bent several times, which are arranged in a staggered manner and connected end to end to form a benefit In the Stone bridge, the four connection terminals are respectively the power supply voltage terminal of the bridge, two induced voltage output terminals and the ground terminal. 2. The micro-gyroscope according to claim 1, characterized in that, the cuboid-shaped solid vibrator is processed from single crystal or polycrystalline magnetostrictive material terbium-dysprosium-iron alloy or iron-gallium alloy, or is made of magnetostrictive material Sintered by powder metallurgy process. 3. The microgyroscope according to claim 1, wherein the driving planar coil is arranged on a square substrate, and the permanent magnet is arranged outside the driving planar coil. 4. The micro-gyroscope according to claim 1, wherein the driving planar coil is integrated on the upper and lower end surfaces of the solid vibrator, and the permanent magnet is arranged outside the driving planar coil. 5. The microgyroscope according to any one of claims 1-4, characterized in that, the driving planar coil is a single-layer or multi-layer multi-turn spiral coil, including: bottom leads, connecting columns, single-layer or multi-layer Coil layers, pins and insulating medium arranged in parallel, wherein: the connecting posts are respectively connected to the bottom lead wires, coil layers and pins of each layer, and the insulating medium is filled in the bottom lead wires, connecting posts and coil layers. 6. The micro-gyroscope according to claim 1, wherein the magnetic field sensing resistor is located in the middle of the entire magnetosensitive sensor, and two pairs of reference resistors and flux concentrators are respectively located on both sides of the magnetic field sensing resistor. 7. micro-gyro according to claim 1, is characterized in that, described magnetic field sensing resistor and reference resistor are all made of multilayer film giant magnetoresistive material, and described magnetic flux concentrator is made of soft magnetic material thin film . 8. The microgyroscope according to any one of claims 3, 4, 6 or 7, characterized in that, said driving planar coil and said magnetic sensor are manufactured by MEMS processing technology, and said MEMS processing technology includes sputtering deposition, photolithography, etching, electroplating, and slicing processes.