CN103273687A - TiSiN+ZrSiN composite nanometer coated cutting tool and preparation method thereof - Google Patents
TiSiN+ZrSiN composite nanometer coated cutting tool and preparation method thereof Download PDFInfo
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- CN103273687A CN103273687A CN2013101754567A CN201310175456A CN103273687A CN 103273687 A CN103273687 A CN 103273687A CN 2013101754567 A CN2013101754567 A CN 2013101754567A CN 201310175456 A CN201310175456 A CN 201310175456A CN 103273687 A CN103273687 A CN 103273687A
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- 229910008482 TiSiN Inorganic materials 0.000 title claims abstract description 41
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 title claims abstract description 41
- 238000005520 cutting process Methods 0.000 title claims abstract description 29
- 238000002360 preparation method Methods 0.000 title claims abstract description 18
- 239000002131 composite material Substances 0.000 title claims abstract description 16
- 238000000576 coating method Methods 0.000 claims abstract description 38
- 239000011248 coating agent Substances 0.000 claims abstract description 36
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 17
- 230000007704 transition Effects 0.000 claims abstract description 15
- 229910000997 High-speed steel Inorganic materials 0.000 claims abstract description 5
- 239000000956 alloy Substances 0.000 claims abstract description 5
- 238000000151 deposition Methods 0.000 claims description 25
- 238000010891 electric arc Methods 0.000 claims description 20
- 239000011159 matrix material Substances 0.000 claims description 15
- 238000007747 plating Methods 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 238000010276 construction Methods 0.000 claims description 6
- KRQUFUKTQHISJB-YYADALCUSA-N 2-[(E)-N-[2-(4-chlorophenoxy)propoxy]-C-propylcarbonimidoyl]-3-hydroxy-5-(thian-3-yl)cyclohex-2-en-1-one Chemical compound CCC\C(=N/OCC(C)OC1=CC=C(Cl)C=C1)C1=C(O)CC(CC1=O)C1CCCSC1 KRQUFUKTQHISJB-YYADALCUSA-N 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 238000011109 contamination Methods 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 4
- 238000012805 post-processing Methods 0.000 claims description 4
- 238000002203 pretreatment Methods 0.000 claims description 4
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 abstract description 4
- 230000003647 oxidation Effects 0.000 abstract description 4
- 238000007254 oxidation reaction Methods 0.000 abstract description 4
- 229910000851 Alloy steel Inorganic materials 0.000 abstract 1
- 238000007733 ion plating Methods 0.000 abstract 1
- 239000002103 nanocoating Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 48
- 239000007789 gas Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000013517 stratification Methods 0.000 description 1
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- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
本发明提供的TiSiN+ZrSiN复合纳米涂层刀具及其制备方法，属于机械切削加工领域。该涂层刀具基体材料为硬质合金或高速钢，采用多弧离子镀+中频磁控溅射的方法制备，其结构为多层结构，刀具表面为ZrSiN层，ZrSiN层与TiSiN层之间有TiZrSiN过渡层，TiSiN层与基体间有Ti过渡层，其中TiSiN和ZrSiN层中Si含量的原子百分比为6～10%，本发明将TiSiN涂层高硬性及ZrSiN涂层低摩擦系数良好结合，刀具不仅具有高硬度，还有良好的摩擦磨损性能和优异的抗高温氧化性，切削过程中可减少粘结，减少刀具磨损，提高刀具寿命。该涂层刀具可广泛应用于干切削加工及难加工材料的切削加工。
The invention provides a TiSiN+ZrSiN composite nano-coating tool and a preparation method thereof, which belong to the field of mechanical cutting processing. The base material of the coating tool is hard alloy or high-speed steel, which is prepared by multi-arc ion plating + intermediate frequency magnetron sputtering. Its structure is a multi-layer structure. The surface of the tool is a ZrSiN layer, and there is TiZrSiN transition layer, there is a Ti transition layer between the TiSiN layer and the substrate, wherein the Si content in the TiSiN and ZrSiN layers is 6-10 atomic percent, the invention combines the high hardness of the TiSiN coating with the low friction coefficient of the ZrSiN coating, and the cutting tool Not only has high hardness, but also has good friction and wear properties and excellent high temperature oxidation resistance, which can reduce sticking during cutting, reduce tool wear and improve tool life. The coated tool can be widely used in dry cutting and cutting of difficult-to-machine materials.
Description
One, technical field
The invention belongs to technical field of mechanical cutting tool manufacture, particularly relate to a kind of TiSiN+ZrSiN composite Nano coated cutting tool and preparation method thereof.
Two, background technology
The TiSiN film is as a kind of nano superhard coating, and its hardness is very high, and oxidative resistance, wearability have greatly improved with respect to the binary nitride coatings, have obtained application at aspects such as cutter, moulds.Si content atomic percentage is in 6～10% scopes the time, the hardness maximum, but coefficient of friction higher (0.6～0.9) easily bonds in processes such as cutting, and energy loss is more.ZrSiN film crystal grain is also at nanoscale, and coefficient of friction is comparatively responsive to Si content, and it has lower coefficient of friction (0.2～0.5) in the time of in Si content atomic percentage 6～10% scopes, and high-temperature oxidation, wearability are better, but hardness is lower.In recent years, along with the development that is coated with layer deposition techniques, compoundization of coating material structure, multiple stratification can be integrated the function of different coating, become one of important directions of coating development.
Chinese patent " patent No.: 200910044474.5 " has been reported overbrushing layer cutter that the method for employing physical vapour deposition (PVD) periodically deposits and preparation method thereof, each cycle of this coating comprise the TiN layer to the TiSiN layer to the TiAlSiN layer to the TiSiN layer, coating was superposeed by a plurality of cycles; Chinese patent " patent No.: 201010274510.X " has been reported the method for preparing nanostructured ZrSiN coating at carbide surface, and it is to adopt the method for direct magnetic control and radio frequency magnetron cosputtering to deposit the ZrSiN coating in the atmosphere of argon gas and nitrogen; Chinese patent: " patent No.: 200880018340.X " reported a kind of surface-coated cutting tool, its overlay film is compound super plural layers, its structure can be divided into two big layers, first layer alternately is made up of one or more A1 layers and B layer, second largest layer is alternately piled up by one or more A2 layers and C layer, wherein A1 layer and A2 layer are respectively a kind of among TiN, TiCN, TiAlN and the TiAlCN, B layer and C layer are alternately piled up by one or more TiSiN or TiSiCN layer and AlCrN or AlCrCN layer respectively and form, its method complex process requires very high to equipment.
Three, summary of the invention
The objective of the invention is to overcome above-mentioned the deficiencies in the prior art, a kind of TiSiN+ZrSiN composite Nano coated cutting tool and preparation method thereof is provided.This cutter coat is sandwich construction, and tool surface is the ZrSiN layer, between ZrSiN layer and the TiSiN layer TiZrSiN transition zone is arranged, and the Ti transition zone is arranged between TiSiN layer and matrix.TiSiN+ZrSiN composite Nano coated cutting tool also is combined the high rigid and low-friction coefficient of ZrSiN of TiSiN in the high-temperature oxidation with siliceous nitride coatings excellence.This coated cutting tool is done when cutting, and can fall to reduce friction, reduces bonding, reduces cutting force, and raising cutter high temperature oxidative resistance reduces tool wear, improves cutter life.
The present invention realizes in the following manner.
TiSiN+ZrSiN composite Nano coated cutting tool and preparation method thereof, the tool matrix material is high-speed steel or carbide alloy, coating is sandwich construction, tool surface is the ZrSiN layer, between ZrSiN layer and the TiSiN layer TiZrSiN transition zone is arranged, the Ti transition zone is arranged between TiSiN layer and matrix, and wherein the atomic percentage of TiSiN layer, ZrSiN layer Si content is in 6～10% scopes.
The preparation method of TiSiN+ZrSiN composite Nano coated cutting tool adopts the mode of multi-arc ion coating+medium frequency magnetron sputtering codeposition, and its concrete preparation process is:
(1) pre-treatment: the tool matrix material is polished to minute surface, removes surface contamination layer, put into alcohol ultrasonic cleaning 15min, fully put into the coating machine vacuum chamber, vacuum chamber base vacuum 7.0 * 10 after the drying
-3Pa is heated to 200～250 ℃, insulation 30min;
(2) ion cleans: feed Ar gas, atmospheric pressure is 1.5Pa, and unbalanced pulse grid bias power supply, voltage are 800～900V, dutycycle 0.2, and aura cleans 15min; Bias voltage is down to 400～600V, opens ion gun, opens arc source Ti target, and electric current transfers to 65A, and ion cleans 1～2min;
(3) depositing Ti: adjusting Ar air pressure is 0.5Pa, and bias voltage is down to 150V, electric arc plating Ti5～7min;
(4) depositing Ti SiN: the adjustment operating air pressure is 0.4～0.5Pa, and bias voltage 150V, electric arc target Ti target current are 65A, opens N
2, adjust N
2Flow is 140～180sccm, opens intermediate frequency Si target current 3.5～4.5A, electric arc plating+medium frequency magnetron sputtering codeposition TiSiN90～100min;
(5) depositing Ti ZrSiN: open electric arc target Zr target, electric current transfers to 60A, and the Zr target current is 70A every the 1min 1A that raises until electric current then, multi-arc ion coating+medium frequency magnetron sputtering depositing Ti ZrSiN10min;
(6) deposition ZrSiN: adjust N
2Flow is 120～160sccm, closes the Ti target, electric arc plating+medium frequency magnetron sputtering deposition ZrSiN50～60min.
(7) post processing: close Zr target, Si target, close ion gun and gas source, close pulsed bias power supply, coating finishes.
By the TiSiN+ZrSiN composite Nano coated cutting tool of above-mentioned technology preparation, coating is sandwich construction, is respectively Ti, TiSiN, TiZrSiN and ZrSiN from inside to outside.Transition zone Ti can reduce matrix and the residual stress that is coated with interlayer, strengthens coating's adhesion; The TiZrSiN layer can reduce the adverse effect of TiSiN layer and the sudden change of ZrSiN composition of layer, helps two-layer good combination; Coating also is combined the high rigid and low-friction coefficient of ZrSiN of TiSiN except having excellent high-temperature oxidation, has improved the friction and wear behavior of coated cutting tool.This coated cutting tool can be widely used in doing the machining of machining and difficult-to-machine material.
Four, description of drawings
Accompanying drawing is the coating structure schematic diagram of TiSiN+ZrSiN composite Nano coated cutting tool of the present invention.Wherein: 1 is tool matrix, and 2 is the Ti transition zone, and 3 is the TiSiN layer, and 4 is the TiZrSiN layer, and 5 is the ZrSiN layer.
Five, the specific embodiment
Provide two most preferred embodiments of the present invention below:
Embodiment 1:
A kind of TiSiN+ZrSiN composite Nano coated cutting tool and preparation method thereof, the tool matrix material is the YS8 carbide alloy, and coating is sandwich construction, and tool surface is the ZrSiN layer, between ZrSiN layer and the TiSiN layer TiZrSiN transition zone is arranged, the Ti transition zone is arranged between TiSiN layer and matrix.The preparation method of TiSiN+ZrSiN composite Nano coated cutting tool adopts the mode of multi-arc ion coating+medium frequency magnetron sputtering codeposition, and its concrete preparation process is:
(1) pre-treatment: YS8 hard alloy cutter matrix material is polished to minute surface, removes surface contamination layer, put into alcohol ultrasonic cleaning 15min, fully put into the coating machine vacuum chamber, vacuum chamber base vacuum 7.0 * 10-after the drying
-3Pa is heated to 250 ℃, insulation 30min;
(2) ion cleans: feed Ar gas, atmospheric pressure is 1.5Pa, and unbalanced pulse grid bias power supply, voltage are 900V, dutycycle 0.2, and aura cleans 15min; Bias voltage is down to 600V, opens ion gun, opens arc source Ti target, and electric current transfers to 65A, and ion cleans 2min;
(3) depositing Ti: adjusting Ar air pressure is 0.5Pa, and bias voltage is down to 150V, electric arc plating Ti6min;
(4) depositing Ti SiN: the adjustment operating air pressure is 0.5Pa, and bias voltage 150V, electric arc target Ti target current are 65A, opens N
2, adjust N
2Flow is 180sccm, opens intermediate frequency Si target current 4.5A, electric arc plating+medium frequency magnetron sputtering codeposition TiSiN90min;
(5) depositing Ti ZrSiN: open electric arc target Zr target, electric current transfers to 60A, and the Zr target current is 70A every the 1min 1A that raises until electric current then, multi-arc ion coating+medium frequency magnetron sputtering depositing Ti ZrSiN10min;
(6) deposition ZrSiN: adjust N
2Flow is 160sccm, closes the Ti target, electric arc plating+medium frequency magnetron sputtering deposition ZrSiN60min.
(7) post processing: close Zr target, Si target, close ion gun and gas source, close pulsed bias power supply, coating finishes.
Embodiment two:
A kind of TiSiN+ZrSiN composite Nano coated cutting tool and preparation method thereof, the tool matrix material is the W18Cr4V high-speed steel, and coating is sandwich construction, and tool surface is the ZrSiN layer, between ZrSiN layer and the TiSiN layer TiZrSiN transition zone is arranged, the Ti transition zone is arranged between TiSiN layer and matrix.The preparation method of TiSiN+ZrSiN composite Nano coated cutting tool adopts the mode of multi-arc ion coating+medium frequency magnetron sputtering codeposition, and its concrete preparation process is:
(1) pre-treatment: W18Cr4V high-speed steel tool matrix material is polished to minute surface, removes surface contamination layer, put into alcohol ultrasonic cleaning 15min, fully put into the coating machine vacuum chamber, vacuum chamber base vacuum 7.0 * 10 after the drying
-3Pa is heated to 200 ℃, insulation 30min;
(2) ion cleans: feed Ar gas, atmospheric pressure is 1.5Pa, and unbalanced pulse grid bias power supply, voltage are 800V, dutycycle 0.2, and aura cleans 15min; Bias voltage is down to 400V, opens ion gun, opens arc source Ti target, and electric current transfers to 65A, and ion cleans 1min;
(3) depositing Ti: adjusting Ar air pressure is 0.5Pa, and bias voltage is down to 150V, electric arc plating Ti7min;
(4) depositing Ti SiN: the adjustment operating air pressure is 0.45Pa, and bias voltage 150V, electric arc target Ti target current are 65A, opens N
2, adjust N
2Flow is 150sccm, opens intermediate frequency Si target current 4A, electric arc plating+medium frequency magnetron sputtering codeposition TiSiN120min;
(5) depositing Ti ZrSiN: open electric arc target Zr target, electric current transfers to 60A, and the Zr target current is 70A every the 1min 1A that raises until electric current then, multi-arc ion coating+medium frequency magnetron sputtering depositing Ti ZrSiN10min;
(6) deposition ZrSiN: adjust N
2Flow is 130sccm, closes the Ti target, electric arc plating+medium frequency magnetron sputtering deposition ZrSiN40min;
(7) post processing: close Zr target, Si target, close ion gun and gas source, close pulsed bias power supply, coating finishes.
Claims (3)
1.TiSiN+ZrSiN composite Nano coated cutting tool, the tool matrix material is high-speed steel or carbide alloy, it is characterized in that: coating is sandwich construction, and tool surface is the ZrSiN layer, between ZrSiN layer and the TiSiN layer TiZrSiN transition zone is arranged, the Ti transition zone is arranged between TiSiN layer and matrix.
2.TiSiN+ZrSiN the preparation method of composite Nano coated cutting tool, the method that it is characterized in that adopting multi-arc ion coating+medium frequency magnetron sputtering codeposition is coated with Ti transition zone and TiSiN layer, TiZrSiN layer, ZrSiN layer at tool surface, and its concrete preparation process is:
(1) pre-treatment: the tool matrix material is polished to minute surface, removes surface contamination layer, put into alcohol ultrasonic cleaning 15min, fully put into the coating machine vacuum chamber, vacuum chamber base vacuum 7.0 * 10 after the drying
-3Pa is heated to 200～250 ℃, insulation 30min;
(2) ion cleans: feed Ar gas, air pressure is 1.5Pa, and unbalanced pulse grid bias power supply, voltage are 800～900V, dutycycle 0.2, and aura cleans 15min; Bias voltage is down to 400～600V, opens ion gun, opens arc source Ti target, and electric current transfers to 65A, and ion cleans 1～2min;
(3) depositing Ti: adjusting Ar air pressure is 0.5Pa, and bias voltage is down to 150V, electric arc plating Ti5～7min;
(4) depositing Ti SiN: the adjustment operating air pressure is 0.4～0.5Pa, and bias voltage 150V, electric arc target Ti target current are 65A, opens N
2, adjust N
2Flow is 140～180sccm, opens intermediate frequency Si target current 3.5～4.5A, electric arc plating+medium frequency magnetron sputtering codeposition TiSiN90～120min;
(5) depositing Ti ZrSiN: open electric arc target Zr target, electric current transfers to 60A, and the Zr target current is 70A every the 1min 1A that raises until electric current then, multi-arc ion coating+medium frequency magnetron sputtering depositing Ti ZrSiN10min;
(6) deposition ZrSiN: adjust N
2Flow is 120～160sccm, closes the Ti target, electric arc plating+medium frequency magnetron sputtering deposition ZrSiN50～60min;
(7) post processing: close Zr target, Si target, close ion gun and gas source, close pulsed bias power supply, coating finishes.
3. according to claim 1,2 described nanometer coating cutting tools, it is characterized in that: the atomic percentage of described TiSiN layer, ZrSiN layer Si content is in 6～10% scopes.
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Cited By (17)
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| CN103628024A (en) * | 2013-11-15 | 2014-03-12 | 桂林电子科技大学 | Technology for depositing titanium nitride film on surface of 4Cr13 stainless steel vernier caliper |
| CN104060222A (en) * | 2014-06-13 | 2014-09-24 | 山东大学 | TiSiN-WS2/Zr-WS2 Coated Cutting Tool and Its Preparation Technology |
| CN104593737A (en) * | 2015-01-13 | 2015-05-06 | 上海应用技术学院 | Preparation process for high-silicon super-hard PVD coating |
| CN104846340A (en) * | 2015-05-29 | 2015-08-19 | 山东大学 | Mo-S-N-Cr self-lubricating gradient-coated cutting tool and preparation process thereof |
| CN104846332A (en) * | 2015-04-17 | 2015-08-19 | 岭南师范学院 | Superlubricity multilayer nano composite coating and preparation method thereof |
| CN104878359A (en) * | 2015-06-12 | 2015-09-02 | 浙江金盾链条制造有限公司 | High-hardness and high-abrasion-resisting TiA1N/ZrSiN nano-structure protective coating and preparation method thereof |
| CN105063554A (en) * | 2015-07-31 | 2015-11-18 | 山东大学 | ZrSiCN nano-composite gradient coating cutter and preparation process thereof |
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| CN104060222B (en) * | 2014-06-13 | 2016-08-24 | 山东大学 | TiSiN-WS2/Zr-WS2 Coated Cutting Tool and Its Preparation Technology |
| CN104060222A (en) * | 2014-06-13 | 2014-09-24 | 山东大学 | TiSiN-WS2/Zr-WS2 Coated Cutting Tool and Its Preparation Technology |
| CN105312600A (en) * | 2014-07-29 | 2016-02-10 | 山特维克知识产权股份有限公司 | Coated cutting tool and method of producing coated cutting tool |
| CN104593737A (en) * | 2015-01-13 | 2015-05-06 | 上海应用技术学院 | Preparation process for high-silicon super-hard PVD coating |
| CN104846332A (en) * | 2015-04-17 | 2015-08-19 | 岭南师范学院 | Superlubricity multilayer nano composite coating and preparation method thereof |
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