[go: up one dir, main page]

CN103268000B - By corroding the interferometer that expanded core fiber is realized - Google Patents

By corroding the interferometer that expanded core fiber is realized Download PDF

Info

Publication number
CN103268000B
CN103268000B CN201310214491.5A CN201310214491A CN103268000B CN 103268000 B CN103268000 B CN 103268000B CN 201310214491 A CN201310214491 A CN 201310214491A CN 103268000 B CN103268000 B CN 103268000B
Authority
CN
China
Prior art keywords
optical fiber
interferometer
core
area
fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201310214491.5A
Other languages
Chinese (zh)
Other versions
CN103268000A (en
Inventor
油海东
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qingdao Agricultural University
Original Assignee
Qingdao Agricultural University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qingdao Agricultural University filed Critical Qingdao Agricultural University
Priority to CN201310214491.5A priority Critical patent/CN103268000B/en
Publication of CN103268000A publication Critical patent/CN103268000A/en
Application granted granted Critical
Publication of CN103268000B publication Critical patent/CN103268000B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

通过腐蚀扩芯光纤实现的干涉仪,特别适用于光纤传感领域。解决了目前基于光纤结构的干涉仪所面临的尺寸大、敏感性差、制作成本高的问题。该干涉仪包括在光纤(1)上制作的扩芯区(2)和腐蚀区(3)。制作方法:将光纤(1)去除涂覆,在对光纤(1)加热的同时将光纤(1)两端向中间推,制作扩芯区(2),然后以HF溶液沿径向腐蚀扩芯区(2)中部,形成腐蚀区(3)。加热的方法包括:电火花放电、CO2激光器聚焦或火焰加热。光纤(1)直径为D1,扩芯区(2)的最大直径为D2,长度为2L1+L2,腐蚀区(3)的长度为L2,深度为H。激光信号在传播的过程中被分成两路或多路,在干涉仪输出端干涉出干涉条纹。

The interferometer realized by corroding the expanded core fiber is especially suitable for the field of optical fiber sensing. It solves the problems of large size, poor sensitivity and high manufacturing cost faced by the current interferometer based on the fiber structure. The interferometer includes a core expansion area (2) and an erosion area (3) fabricated on an optical fiber (1). Production method: remove the coating from the optical fiber (1), push the two ends of the optical fiber (1) to the middle while heating the optical fiber (1) to make the core expansion area (2), and then corrode the core expansion in the radial direction with HF solution In the middle of zone (2), corrosion zone (3) is formed. Heating methods include: spark discharge, CO2 laser focusing or flame heating. The diameter of the optical fiber (1) is D 1 , the maximum diameter of the expanded core area (2) is D 2 , the length is 2L 1 +L 2 , the length of the corrosion area (3) is L 2 , and the depth is H. The laser signal is divided into two or more paths during propagation, and interference fringes are generated at the output end of the interferometer.

Description

通过腐蚀扩芯光纤实现的干涉仪Interferometer realized by corroding expanded core fiber

技术领域technical field

本发明涉及一种干涉仪,特别适用于光纤传感领域。The invention relates to an interferometer, which is especially suitable for the field of optical fiber sensing.

背景技术Background technique

随着光纤传感技术的进步,各类不同原理、不同结构的传感装置不断涌现,其中一类较为重要的基于光纤结构的无源光器件得到广泛应用,这就是MZ干涉仪,其工作原理是分光器将原本光信号分为两路或多路,使不同路的光信号通过不通的路径,从而产生光程差,在干涉仪末端的合束器再将不同路的光信号合束,出现干涉现象。With the advancement of optical fiber sensing technology, various sensing devices with different principles and structures are emerging. One of the more important passive optical devices based on optical fiber structure has been widely used. This is the MZ interferometer. Its working principle It is the optical splitter that divides the original optical signal into two or more channels, so that the optical signals of different channels pass through the unreasonable path, resulting in an optical path difference, and the beam combiner at the end of the interferometer combines the optical signals of different channels. Interference occurs.

由于MZ干涉仪的干涉条纹宽度与分光器和合束器之间的光纤长度有直接关系,光纤越长,产生的干涉条纹越密,而通过将应力或是温度参数作用这段光纤可以实现应力或是温度的传感。传统基于光纤结构的MZ干涉仪一般是在光纤上相隔一定距离拉出两个锥,第一个锥相当于分光器,将纤芯中的光信号分一部分至包层中传输,第二个锥相当于合束器,可以将包层中的光信号重新合并至纤芯,最终出现干涉。这种结构的MZ干涉仪制作简单,但是由于两锥之间的光纤需要除去涂覆,并保持外表面清洁,而且这段光纤的长度通常都较长,用于传感器领域时敏感性低,使得在实际应用中受到限制。另外一种是将两个锥分别以长周期光纤光栅代替,其中的长周期光纤光栅起到了将光信号从纤芯耦合至包层和从包层耦合回纤芯的作用。这种MZ干涉仪需要光纤光栅的写入设备,成本很高。还有其它一些结构的光纤MZ干涉仪需要用到特种光纤,其制作成本更是大大提高。Since the width of the interference fringes of the MZ interferometer is directly related to the length of the fiber between the beam splitter and the beam combiner, the longer the fiber, the denser the interference fringes will be, and the stress or temperature parameters can be applied to this fiber to achieve stress or is a temperature sensor. The traditional MZ interferometer based on optical fiber structure generally pulls out two cones on the optical fiber at a certain distance. The first cone is equivalent to a beam splitter, which divides the optical signal in the fiber core into the cladding for transmission, and the second cone It is equivalent to a beam combiner, which can recombine the optical signals in the cladding to the core, and finally interfere. The MZ interferometer of this structure is simple to manufacture, but because the optical fiber between the two cones needs to be removed from the coating and keep the outer surface clean, and the length of this section of optical fiber is usually long, the sensitivity is low when used in the sensor field, making limited in practical applications. The other is to replace the two cones with long-period fiber gratings, in which the long-period fiber grating plays the role of coupling the optical signal from the core to the cladding and from the cladding back to the core. This MZ interferometer requires a fiber grating writing device, which is very expensive. There are other optical fiber MZ interferometers with other structures that need to use special optical fibers, and their production costs are greatly increased.

综上所述,目前基于光纤结构的干涉仪所面临的问题是:尺寸大、敏感性差、制作成本高。To sum up, the current problems faced by interferometers based on optical fiber structures are: large size, poor sensitivity, and high manufacturing cost.

发明内容Contents of the invention

本发明所要解决的技术问题是:The technical problem to be solved by this invention is:

目前基于光纤结构的干涉仪所面临的问题是:尺寸大、敏感性差、制作成本高。The problems faced by the interferometer based on fiber optic structure at present are: large size, poor sensitivity, and high manufacturing cost.

本发明的技术方案为:Technical scheme of the present invention is:

通过腐蚀扩芯光纤实现的干涉仪,该干涉仪包括在光纤1上制作的扩芯区2和腐蚀区3。An interferometer realized by corroding a core-expanded optical fiber, the interferometer includes a core-expanded area 2 and an etched area 3 fabricated on an optical fiber 1 .

制作方法:将光纤1去除涂覆,在对光纤1加热的同时将光纤1两端向中间推,制作扩芯区2,然后以HF溶液沿径向腐蚀扩芯区2中部,形成腐蚀区3。加热的方法包括:电火花放电、CO2激光器聚焦或火焰加热。Production method: remove the coating from the optical fiber 1, push the two ends of the optical fiber 1 toward the middle while heating the optical fiber 1 to make the core expansion area 2, and then corrode the middle of the core expansion area 2 in the radial direction with HF solution to form the corrosion area 3 . Heating methods include: spark discharge, CO2 laser focusing or flame heating.

光纤1直径为D1,扩芯区2的最大直径为D2,长度为2L1+L2,腐蚀区3的长度为L2,深度为H。The diameter of the optical fiber 1 is D 1 , the maximum diameter of the expanded core area 2 is D 2 , the length is 2L 1 +L 2 , the length of the corrosion area 3 is L 2 , and the depth is H.

D1=50~500μm。D 1 =50-500 μm.

D2=1.1D1~10D1D 2 =1.1D 1 to 10D 1 .

L1=0.5D1~10D1L 1 =0.5D 1 to 10D 1 .

L2=0.5L1~5L1L 2 =0.5L 1 ~5L 1 .

0.1D2≤H<0.5D20.1D 2 ≤ H<0.5D 2 .

本发明和已有技术相比所具有的有益效果:Compared with the prior art, the present invention has the following beneficial effects:

以光纤上制作扩芯区然后腐蚀的方法制作出来的干涉仪无论在径向还是轴向尺寸都足够小,以至于对气态或是液态物质折射率的测量只需要很少的剂量。相比传统少则几厘米,多则数十厘米的传感结构,在尺寸上有较大幅度的减小。并且腐蚀出来的腐蚀区由于径向尺寸很小,光纤包层很薄或是完全没有了光纤包层,使得激光的传输状态对周围待测物的折射率变化十分敏感,增大了敏感度,并且制作过程简单,成本低。The interferometer manufactured by fabricating the expanded core region on the fiber and then corroding it is small enough in both radial and axial dimensions, so that only a small dose is required for the measurement of the refractive index of gaseous or liquid substances. Compared with the traditional sensing structure, which ranges from a few centimeters to tens of centimeters, the size is greatly reduced. In addition, due to the small radial size of the corroded corrosion area, the fiber cladding is very thin or there is no fiber cladding at all, so that the transmission state of the laser is very sensitive to the change of the refractive index of the surrounding object to be measured, which increases the sensitivity. Moreover, the manufacturing process is simple and the cost is low.

附图说明Description of drawings

图1腐蚀掉部分包层的干涉仪结构图。Figure 1 shows the structure of an interferometer with a part of the cladding etched away.

图2腐蚀掉部分包层的干涉仪信号的传播示意图。Fig. 2 Schematic diagram of propagation of the interferometer signal with a portion of the cladding etched away.

图3腐蚀掉全部包层的干涉仪结构图。Figure 3 shows the structure of the interferometer with the entire cladding removed.

图4腐蚀掉全部包层的干涉仪信号的传播示意图。Figure 4. Schematic diagram of propagation of the interferometer signal with the entire cladding removed.

图5腐蚀掉部分纤芯的干涉仪结构图。Figure 5 shows the structure of the interferometer with a part of the core etched away.

图6腐蚀掉部分纤芯的干涉仪信号的传播示意图。Fig. 6 is a schematic diagram of the propagation of the interferometer signal with a part of the core etched away.

具体实施方式detailed description

下面结合附图对本发明作进一步描述。The present invention will be further described below in conjunction with the accompanying drawings.

实施方式Implementation

通过腐蚀扩芯光纤实现的干涉仪,如图1所示,其特征在于:该干涉仪包括在光纤1上制作的扩芯区2和腐蚀区3。An interferometer realized by corroding a core-expanded optical fiber, as shown in FIG. 1 , is characterized in that the interferometer includes a core-expanded area 2 and an etched area 3 fabricated on an optical fiber 1 .

制作方法:将光纤1去除涂覆,在对光纤1加热的同时将光纤1两端向中间推,制作扩芯区2,然后以HF溶液沿径向腐蚀扩芯区2中部,形成腐蚀区3。加热的方法包括:电火花放电、CO2激光器聚焦或火焰加热。Production method: remove the coating from the optical fiber 1, push the two ends of the optical fiber 1 toward the middle while heating the optical fiber 1 to make the core expansion area 2, and then corrode the middle of the core expansion area 2 in the radial direction with HF solution to form the corrosion area 3 . Heating methods include: spark discharge, CO2 laser focusing or flame heating.

光纤1直径为D1,扩芯区2的最大直径为D2,长度为2L1+L2,腐蚀区3的长度为L2,深度为H。The diameter of the optical fiber 1 is D 1 , the maximum diameter of the expanded core area 2 is D 2 , the length is 2L 1 +L 2 , the length of the corrosion area 3 is L 2 , and the depth is H.

D1=50~500μm。D 1 =50-500 μm.

D2=1.1D1~10D1D 2 =1.1D 1 to 10D 1 .

L1=0.5D1~10D1L 1 =0.5D 1 to 10D 1 .

L2=0.5L1~5L1L 2 =0.5L 1 ~5L 1 .

0.1D2≤H<0.5D20.1D 2 ≤ H<0.5D 2 .

当腐蚀的深度小于扩芯区2的包层厚度时,如图1所示,干涉仪中光的传播路径如图2所示,激光信号进入扩芯区2后被分为两路,其中一路保持纤芯中传播,另一路在包层中传播,继续传播后,包层中的光信号又被分为两路,一路继续在包层中传播,另一路被耦合到光纤外的腐蚀区3。当光继续传播时经历与进入干涉仪相反的过程,最终在干涉仪的另一端进行干涉,产生干涉条纹。When the depth of corrosion is less than the cladding thickness of the expanded core area 2, as shown in Figure 1, the propagation path of the light in the interferometer is shown in Figure 2. After the laser signal enters the expanded core area 2, it is divided into two paths, one of which is Keep propagating in the fiber core, and the other path propagates in the cladding layer. After continuing to propagate, the optical signal in the cladding layer is divided into two paths, one path continues to propagate in the cladding layer, and the other path is coupled to the corrosion area outside the fiber 3 . As the light continues to propagate, it goes through the opposite process of entering the interferometer, and finally interferes at the other end of the interferometer, producing interference fringes.

当腐蚀的深度等于扩芯区2的包层厚度时,如图3所示,干涉仪中光的传播路径如图4所示,激光信号进入扩芯区2后被分为两路,其中一路保持纤芯中传播,另一路在包层中传播,继续传播后,包层中的光信号被耦合到腐蚀区3。当光继续传播时经历与进入干涉仪相反的过程,最终在干涉仪的另一端进行干涉,产生干涉条纹。When the depth of corrosion is equal to the cladding thickness of the expanded core area 2, as shown in Figure 3, the propagation path of the light in the interferometer is shown in Figure 4. After the laser signal enters the expanded core area 2, it is divided into two paths, one of which is Keep propagating in the core, and the other path propagates in the cladding. After continuing to propagate, the optical signal in the cladding is coupled to the corrosion area 3 . As the light continues to propagate, it goes through the opposite process of entering the interferometer, and finally interferes at the other end of the interferometer, producing interference fringes.

当腐蚀的深度大于扩芯区2的包层厚度时,如图5所示,干涉仪中光的传播路径如图6所示,激光信号进入扩芯区2后被分为两路,其中一路保持纤芯中传播,另一路在包层中传播,继续传播后,包层中的光信号被耦合到腐蚀区3,纤芯中的光信号分为两路,一路被耦合到腐蚀区3,另一路继续在纤芯中传播。当光继续传播时经历与进入干涉仪相反的过程,最终在干涉仪的另一端进行干涉,产生干涉条纹。When the depth of corrosion is greater than the cladding thickness of the expanded core area 2, as shown in Figure 5, the light propagation path in the interferometer is shown in Figure 6, and the laser signal is divided into two paths after entering the expanded core area 2, one of which is Keep propagating in the fiber core, and the other path propagates in the cladding. After continuing to propagate, the optical signal in the cladding is coupled to the corrosion area 3, and the optical signal in the fiber core is divided into two paths, and one path is coupled to the corrosion area 3. The other way continues to propagate in the fiber core. As the light continues to propagate, it goes through the opposite process of entering the interferometer, and finally interferes at the other end of the interferometer, producing interference fringes.

Claims (1)

1.通过腐蚀扩芯光纤实现的干涉仪,其特征在于:该干涉仪包括在光纤(1)上制作的扩芯区(2)和腐蚀区(3);1. The interferometer realized by corroding the core-expanding optical fiber is characterized in that: the interferometer includes a core-expanding area (2) and an etching area (3) made on the optical fiber (1); 制作方法:将光纤(1)去除涂覆,在对光纤(1)加热的同时将光纤(1)两端向中间推,制作扩芯区(2),然后以HF溶液沿径向腐蚀扩芯区(2)中部,形成腐蚀区(3);加热的方法包括:电火花放电、CO2激光器聚焦或火焰加热;Production method: remove the coating from the optical fiber (1), push the two ends of the optical fiber (1) to the middle while heating the optical fiber (1) to make the core expansion area (2), and then corrode the core expansion in the radial direction with HF solution In the middle of the zone (2), a corrosion zone (3) is formed; heating methods include: electric spark discharge, CO 2 laser focusing or flame heating; 光纤(1)直径为D1,扩芯区(2)的最大直径为D2,扩芯区(2)长度为2L1+L2,腐蚀区(3)的长度为L2,深度为H;The diameter of the optical fiber (1) is D 1 , the maximum diameter of the core expansion zone (2) is D 2 , the length of the core expansion zone (2) is 2L 1 +L 2 , the length of the corrosion zone (3) is L 2 , and the depth is H ; D1=50~500μm;D 1 =50~500μm; D2=1.1D1~10D1D 2 =1.1D 1 ~10D 1 ; L1=0.5D1~10D1L 1 = 0.5D 1 ~ 10D 1 ; L2=0.5L1~5L1L 2 =0.5L 1 ~5L 1 ; 0.1D2≤H<0.5D20.1D 2 ≤ H<0.5D 2 .
CN201310214491.5A 2013-06-01 2013-06-01 By corroding the interferometer that expanded core fiber is realized Expired - Fee Related CN103268000B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310214491.5A CN103268000B (en) 2013-06-01 2013-06-01 By corroding the interferometer that expanded core fiber is realized

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310214491.5A CN103268000B (en) 2013-06-01 2013-06-01 By corroding the interferometer that expanded core fiber is realized

Publications (2)

Publication Number Publication Date
CN103268000A CN103268000A (en) 2013-08-28
CN103268000B true CN103268000B (en) 2017-10-31

Family

ID=49011639

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310214491.5A Expired - Fee Related CN103268000B (en) 2013-06-01 2013-06-01 By corroding the interferometer that expanded core fiber is realized

Country Status (1)

Country Link
CN (1) CN103268000B (en)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0588022A (en) * 1991-09-26 1993-04-09 Kyocera Corp Optical fixed attenuator
CN2282180Y (en) * 1996-10-05 1998-05-20 冯越 Optical fiber temperature sensor
CA2306305A1 (en) * 1999-04-23 2000-10-23 Jds Uniphase Inc. Optical attenuator and method of making same
KR20070102087A (en) * 2006-04-13 2007-10-18 김광택 Short-wave pass filter using side polished thermal diffusion core fiber
CN101963683A (en) * 2010-08-09 2011-02-02 电子科技大学 Band-pass filtering method of mechanical adjustable pi-phase shift period structure and band-pass filter adopting same
CN101979963A (en) * 2010-09-14 2011-02-23 北京理工大学 Integral optical fiber microsensor and manufacturing method thereof
CN102436030A (en) * 2010-09-29 2012-05-02 日立电线株式会社 Optical fiber end processing method and optical fiber end processing apparatus
JP2012118276A (en) * 2010-11-30 2012-06-21 Sumitomo Electric Ind Ltd Optical semiconductor device
CN102662218A (en) * 2012-05-31 2012-09-12 东南大学 Wrinkle type apodization waveguide Bragg grating filter and manufacturing method thereof

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0588022A (en) * 1991-09-26 1993-04-09 Kyocera Corp Optical fixed attenuator
CN2282180Y (en) * 1996-10-05 1998-05-20 冯越 Optical fiber temperature sensor
CA2306305A1 (en) * 1999-04-23 2000-10-23 Jds Uniphase Inc. Optical attenuator and method of making same
KR20070102087A (en) * 2006-04-13 2007-10-18 김광택 Short-wave pass filter using side polished thermal diffusion core fiber
CN101963683A (en) * 2010-08-09 2011-02-02 电子科技大学 Band-pass filtering method of mechanical adjustable pi-phase shift period structure and band-pass filter adopting same
CN101979963A (en) * 2010-09-14 2011-02-23 北京理工大学 Integral optical fiber microsensor and manufacturing method thereof
CN102436030A (en) * 2010-09-29 2012-05-02 日立电线株式会社 Optical fiber end processing method and optical fiber end processing apparatus
JP2012118276A (en) * 2010-11-30 2012-06-21 Sumitomo Electric Ind Ltd Optical semiconductor device
CN102662218A (en) * 2012-05-31 2012-09-12 东南大学 Wrinkle type apodization waveguide Bragg grating filter and manufacturing method thereof

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
包层腐蚀长周期光纤光栅对的光谱特性研究;丁金妃等;《浙江大学学报(工学版)》;20070330;第41卷(第03期);537-539 *
飞秒激光加工的微型光纤法布里-珀罗干涉传感器;王维等;《中国激光》;20071210;第34卷(第12期);1660-1664 *

Also Published As

Publication number Publication date
CN103268000A (en) 2013-08-28

Similar Documents

Publication Publication Date Title
CN101832832B (en) Optical fiber Fabry-Perot pressure sensor and its manufacturing method
CN103217124B (en) A kind of Fibre Optical Sensor based on Mach-Zahnder interference
CN100458448C (en) Variable diameter micro optical fiber ring based optical micromechanical acceleration sensor and its method
CN103344277B (en) A kind of Fabry-Perot sensor and pick-up unit that simultaneously can detect two parameter
An et al. Relative humidity sensor based on SMS fiber structure with two waist-enlarged tapers
CN103852191B (en) The fibre optic temperature sensor that a kind of refractive index is insensitive
CN102778306A (en) Refractive index and temperature sensor of photonic crystal fiber, manufacturing method and measuring system
CN105865614B (en) A kind of novel optical fiber enamel amber ultrasonic hydrophone and preparation method thereof
CN102419221A (en) Non-polarization interference high-sensitivity photonic crystal fiber temperature sensor and manufacturing method thereof
CN112945284A (en) High-sensitivity high-temperature sensor based on suspension optical fiber dislocation welding
CN103884364A (en) Optical fiber interferometric sensor based on cascade connection between tapered structure and spherical structure
CN110031146A (en) Based on capillary splice type fibre-optical microstructure transducer production method and measuring principle
CN204964060U (en) Temperature sensing device based on optic fibre mach -Zehnder that receives a little interferes
CN103323143A (en) Quasi-distributed fiber sensor capable of measuring temperature and vibration simultaneously and manufacturing method
Fang et al. Diaphragm-free fiber-optic Fabry–Perot interferometer based on tapered hollow silica tube
CN105181170B (en) A kind of temperature sensor of the photonic crystal fiber Mach-Zehnder interferometer based on corrosion treatment
CN203083927U (en) Optical fiber refraction index sensor based on single mode, fine core, multi-mode and single mode structure
CN107449471A (en) A kind of magnetic field and temperature simultaneously measuring device based on highly doped germanium fibre-optical probe
CN106949916A (en) A kind of temperature and strain testing method of the corrosion of use fiber end face
CN103364105A (en) Optical fiber refractive index and temperature sensor based on multiple-mode interference and measuring method thereof
CN103268000B (en) By corroding the interferometer that expanded core fiber is realized
CN105136336B (en) A kind of optical fiber air ring cavity temperature sensor based on femto-second laser
CN117537853A (en) Double-parameter measurement sensing method and sensor based on 19-core 4-mode optical fiber
Xue et al. Cost-effective optical fiber curvature sensor with ultrahigh sensitivity based on two microcollapses in silica capillary
CN205748617U (en) A kind of novel optical fiber enamel amber ultrasonic hydrophone

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20171031

Termination date: 20180601