CN103245807B - Probe unit structure and manufacturing method thereof - Google Patents

Abstract

The invention discloses a probe unit structure and a manufacturing method thereof, wherein the probe unit structure comprises a first positioning substrate, a second positioning substrate, a contact probe and a spacer, wherein the first positioning substrate is provided with a first pin hole; the second positioning substrate is provided with a second pinhole, the first positioning substrate and the second positioning substrate are mutually overlapped during assembly, and a space is formed between the first positioning substrate and the second positioning substrate by a lifting tool; the contact probe is connected with the first needle penetrating hole and the second needle penetrating hole in a penetrating way; the spacer is provided with a containing chamber for containing the contact probe through the space; the first positioning substrate slides relative to the second positioning substrate to make the first needle-penetrating hole and the second needle-penetrating hole generate deviation, so that two ends of the contact probe are clamped and positioned by the first positioning substrate and the second positioning substrate respectively. Thus, the probe unit can be easily manufactured even when the diameter of the contact probe is reduced.

Description

Probe unit structure and manufacturing method thereof

technical field

The invention relates to a probe structure for detection, in particular to a probe unit structure and a manufacturing method thereof.

Background technique

When manufacturing semiconductor integrated circuits such as IC chips, electrical characteristics are inspected to detect defective products; specifically, when inspecting semiconductor integrated circuits or liquid crystal panels, etc., it is possible to know the characteristics of the semiconductor integrated circuits to be inspected. Whether there is an electrical short circuit or disconnection in the wiring pattern; at the same time, in order to seek electrical connection between the inspection object and the signal processing device that outputs the inspection signal, a probe unit that accommodates multiple conductive contact probes will be used, To be electrically connected to the inspection object and the signal processing device respectively.

A traditional probe unit, as shown in Figures 1 to 2, mainly includes a corresponding upper positioning substrate 10 and a lower positioning substrate 20, and a fixing member 30 that is spaced apart from the upper positioning substrate 10 and the lower positioning substrate 20. And a contact probe 40 that passes through the upper positioning substrate 10 and the lower positioning substrate 20, wherein the upper positioning substrate 10 is provided with an upper hole groove 101, and the lower positioning substrate 20 is provided with a lower hole groove 201 corresponding to the upper hole groove 101. The probes 40 are first inserted into the upper slots 101 and positioned on the upper positioning substrate 10 , and then the lower positioning substrate 20 is installed so that the contact probes 40 are inserted and positioned corresponding to the upper and lower slots 201 . Thereby, the position of the contact probe 40 can be restricted.

However, in recent years, semiconductor integrated circuits have made remarkable progress in high integration and miniaturization. As far as the probe unit is concerned, in order to match the progress of this technology, the diameter of each contact probe will also be reduced. The distance between each contact probe is narrowed; however, the smaller the diameter of the above-mentioned contact probe 40, the smaller the upper hole groove 101 and the lower hole groove 201, so that the upper hole groove 101 and the lower hole groove 201 are smaller and smaller. There is a slight error in the alignment between them, which leads to the fact that the contact probe 40 is positioned on the upper positioning substrate 10, but cannot be positioned on the lower positioning substrate 20. At this time, forced assembly will damage the contact probe 40; therefore, contact When the diameter of the probe 40 shrinks, the existing probe unit has great difficulties in making and assembling and cannot break through.

Contents of the invention

An object of the present invention is to provide a probe unit structure and a manufacturing method thereof, which can easily and conveniently manufacture the probe unit while utilizing the reduced diameter of the contact probe.

In order to achieve the above object, the present invention provides a probe unit structure, comprising:

A probe unit structure, comprising:

A first positioning substrate, provided with a plurality of first pinholes;

A second positioning substrate, configured corresponding to the first positioning substrate, the second positioning substrate is provided with a plurality of second pin holes corresponding to the plurality of first pin holes;

a plurality of contact probes, the two ends of each of the contact probes are respectively pierced through each of the first pinholes and each of the second pinholes; and

a spacer connected between the first positioning substrate and the second positioning substrate, the spacer is provided with a chamber for accommodating the plurality of contact probes;

Wherein, the first positioning substrate slides relative to the second positioning substrate, so that the plurality of first pinholes and the plurality of second pinholes are offset, so that each of the contact probes The two ends are clamped and positioned by the first positioning substrate and the second positioning substrate respectively.

In order to achieve the above object, the present invention also provides a method for making a probe unit, the steps of which include:

a) disposing the second positioning substrate above the first positioning substrate, and making each of the contact probes penetrate each of the first pinholes and each of the second pinholes;

b) provide a lifting tool, the lifting tool lifts the second positioning substrate, so that a distance is formed between the first positioning substrate and the second positioning substrate;

c) placing the spacer into the gap and sandwiching it between the first positioning substrate and the second positioning substrate, so that the chamber is formed between the first positioning substrate and the second positioning substrate, and the The two ends of each contact probe are respectively pierced through each of the first needle holes and each of the second needle holes;

d) providing a plurality of screw fixing elements, the second positioning substrate is locked on the spacer by each of the screw fixing elements;

e) providing a plurality of locking elements, the first positioning substrate is locked on the spacer by each of the locking elements; and

f) Temporarily loosen the plurality of locking elements, and slide relative to the second positioning substrate from the first positioning substrate, so that the plurality of first needle-through holes and the plurality of second needle-through holes are offset. position relationship, so that the two ends of each contact probe are clamped and positioned by the first positioning substrate and the second positioning substrate respectively.

The present invention also has the following effects:

In the present invention, the contact probe with a reduced diameter is more likely to be bent under force, so that the first positioning substrate slides and moves relative to the second positioning substrate, so that the first needle hole and the second needle hole are displaced. relationship, so that the two ends of each contact probe are pressed and deformed by the first positioning substrate and the second positioning substrate respectively, so that each contact probe is clamped and fixed between the first positioning substrate and the second positioning substrate , and further achieve the reduction of the diameter of the contact probe, the probe unit still has the effect of simplicity, convenience and low cost.

In addition, the two ends of each contact probe are pressed and deformed by the first positioning substrate and the second positioning substrate respectively, so as to locate the contact probe and avoid poor contact or falling off of the contact probe during detection, thereby improving the structure of the probe unit of the present invention. use stability.

In addition, the first positioning substrate and the second positioning substrate are stacked on each other during production, and a distance is formed between the first positioning substrate and the second positioning substrate by raising the tool, and the spacer is inserted into the distance and clamped. Between the first positioning substrate and the second positioning substrate, a chamber for accommodating each contact probe is formed; compared with the existing ones, the probe unit structure of the present invention has simpler steps and easier assembly in fabrication and assembly. features.

The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

Description of drawings

Fig. 1 is a combined schematic diagram of the existing probe unit;

Figure 2 is a partial enlarged view of the existing probe unit;

Fig. 3 is an exploded perspective view of the probe unit structure of the present invention;

Fig. 4 is a three-dimensional schematic diagram of a contact probe of the present invention;

Fig. 5 combined schematic diagram of probe unit structure of the present invention;

Fig. 6 is a schematic cross-sectional view of the probe unit structure of the present invention;

Figure 7 is a flow chart of the steps of the probe unit manufacturing method of the present invention;

FIG. 8A is a schematic diagram of the first positioning substrate, the second positioning substrate and the contact probe to be placed on the first placement tool of the present invention;

Fig. 8B is a side sectional view of the raising tool of the present invention to be inserted with the first positioning tool and the first positioning substrate;

Fig. 8C is a side sectional view of the raising tool of the present invention having raised the second positioning substrate;

FIG. 8D is a schematic diagram of the half partition board of the present invention to be inserted into the first positioning substrate and the second positioning substrate;

FIG. 8E is a schematic diagram of the second placement tool of the present invention to be fixed on the second positioning substrate and the spacer;

Fig. 8F is a side sectional view of the second positioning tool of the present invention fixed on the second positioning substrate and the spacer;

Fig. 8G is a side cross-sectional view of the first positioning substrate flipped over the second positioning substrate of the present invention;

Fig. 8H is a side sectional view of the present invention to disassemble the first placement tool and the second placement tool;

Fig. 8I is a side sectional view of the first positioning substrate to be slid relative to the second positioning substrate in the present invention;

Fig. 8J is a side sectional view of the first pinhole and the second pinhole of the present invention to be arranged in offset positions;

Fig. 8K is a side sectional view of the offset arrangement of the first needle hole and the second needle hole of the present invention;

Fig. 8L is a side sectional view of the first positioning substrate fixed on the spacer and the second positioning substrate of the present invention;

Fig. 9 is a schematic view of the use state of the probe unit structure of the present invention.

Among them, reference signs

current technology

10...upper positioning substrate

101…Large hole slot

102…Small hole slot

20...Lower positioning substrate

30...fixed member

40…contact probe

this invention

1...The first positioning substrate

11...the first inner insulation board

111...Keyhole

12...the first outer insulation board

121...Buried hole

13...the first pinhole

2...Second positioning substrate

21...Second inner insulation board

211...Keyhole

22…Second outer insulation board

221...Buried hole

23…Second needle hole

3…contact probe

31...Detection Department

32…Protrusion

4…Spacer

41…containment room

42…half partition

421...U-shaped groove

5...Screw fixing element

51...Head

6...Locking element

61...Head

100...first placement tool

200…Elevating tools

300…second placement tool

400…Signal processing device

S...spacing

Detailed ways

The detailed description and technical content of the present invention will be described as follows with the accompanying drawings, but the attached drawings are only for illustration purposes and are not intended to limit the present invention.

Please refer to FIG. 3 to FIG. 6, the present invention provides a probe unit structure and its manufacturing method, the probe unit structure mainly includes a first positioning substrate 1, a second positioning substrate 2, a plurality of contact probes 3 and a spacer 4.

The first positioning substrate 1 includes a first inner insulating plate 11 and a first outer insulating plate 12 bonded to the first inner insulating plate 11, the first inner insulating plate 11 and the first outer insulating plate 12 are jointly provided with a plurality of The first pin hole 13 ; moreover, the first inner insulating plate 11 is provided with a plurality of locking holes 111 , and the first outer insulating plate 12 is provided with a plurality of embedding holes 121 corresponding to the plurality of locking holes 111 .

The second positioning substrate 2 is configured corresponding to the first positioning substrate 1. The second positioning substrate 2 includes a second inner insulating plate 21 and a second outer insulating plate 22 bonded to the second inner insulating plate 21. The second inner insulating plate 21 and the second outer insulating plate 22 are jointly provided with multiple second pin holes 23 corresponding to the plurality of first pin holes 13; again, the second inner insulating plate 21 is provided with a plurality of lock holes 211, and the second outer insulating plate The board 22 is provided with a plurality of embedding holes 221 corresponding to the plurality of locking holes 211 .

The two ends of each contact probe 3 are connected to each first needle hole 13 and each second needle hole 23 respectively, and each contact probe 3 has a detection portion 31 at one end and a protruding portion 32 at the other end. The detection part 31 is exposed to the first positioning substrate 1 through each first needle-through hole 13 , and the protruding part 32 is locked to the second positioning substrate 2 through each second needle-through hole 23 .

The spacer 4 is connected between the first positioning substrate 1 and the second positioning substrate 2. The details are as follows. The first inner insulating plate 11 is sandwiched between the spacer 4 and the first outer insulating plate 12, and the second inner insulating plate 21 is sandwiched between the spacer 4 and the second outer insulating plate 22; the spacer 4 includes two half-spacers 42 that are symmetrically combined, and the two half-spacers 42 are sandwiched between the first positioning substrate 1 and the second positioning substrate 2 In between, each half of the partition plate 42 is provided with a U-shaped groove 421 , and the two U-shaped grooves 421 form a chamber 41 for accommodating the plurality of contact probes 3 .

Wherein, the first positioning substrate 1 slides and moves relative to the second positioning substrate 2, so that the plurality of first needle holes 13 and the plurality of second needle holes 23 are offset, so that each contact probe The two ends of 3 are clamped and positioned by the first positioning substrate 1 and the second positioning substrate 2 respectively. The details are as follows. The two ends of each contact probe 3 are respectively pressed by the first positioning substrate 1 and the second positioning substrate 2 to generate deformation. , so that each contact probe 3 is locked and fixed between the first positioning substrate 1 and the second positioning substrate 2 .

The present invention also includes a plurality of screw fixing elements 5, each screw fixing element 5 has a head 51, the outer peripheral dimension of each head 51 is smaller than the aperture size of each embedding hole 221, and each screw fixing element 5 passes through each lock The holes 211 lock the second inner insulating plate 21 corresponding to the spacer 4 , and each head 51 is buried in each embedding hole 221 .

The present invention also includes a plurality of locking elements 6, each locking element 6 has a head 61, the outer peripheral dimension of each head 61 is smaller than the aperture size of each embedding hole 121, each locking element 6 passes through each lock The holes 111 lock the first inner insulating plate 11 corresponding to the spacer 4 , and each head 61 is embedded in each embedding hole 121 .

The combination of the probe unit structure of the present invention utilizes the first positioning substrate 1 to be provided with each first pin hole 13; the second positioning substrate 2 is configured corresponding to the first positioning substrate 1, and the second positioning substrate 2 is provided with corresponding first Each of the second needle holes 23 of the first needle hole 13; the two ends of each contact probe 3 are respectively connected to the first needle holes 13 and the second needle holes 23; the spacer 4 is sandwiched between the first needle holes 23 Between a positioning substrate 1 and a second positioning substrate 2; wherein, the first positioning substrate 1 slides relative to the second positioning substrate 2, so that the plurality of first needle holes 13 and the plurality of second needle holes 23 produces a bias relationship, so that the two ends of each contact probe 3 are respectively clamped and positioned by the first positioning substrate 1 and the second positioning substrate 2. The details are as follows, and the two ends of each contact probe 3 are respectively held by the second positioning substrate 2. The first positioning substrate 1 and the second positioning substrate 2 are deformed by pressing, so that each contact probe 3 is locked and fixed between the first positioning substrate 1 and the second positioning substrate 2 .

In this way, the diameter of each contact probe will also be reduced in order to cooperate with the progress of high integration and miniaturization of semiconductor integrated circuits in the probe unit, but when the diameter of the contact probe is reduced, the probe unit will not There are great difficulties in combination and cannot be broken through; in comparison, the present invention utilizes the contact probe 3 with a reduced diameter to bend easily under force, so that the first positioning substrate 1 slides relative to the second positioning substrate 2 position, so that the plurality of first needle holes 13 and the plurality of second needle holes 23 are arranged in offset positions, so that the two ends of each contact probe 3 are respectively positioned by the first positioning substrate 1 and the second positioning substrate 1. The positioning substrate 2 is pressed and deformed, so that each contact probe 3 is clamped and fixed between the first positioning substrate 1 and the second positioning substrate 2, and then the diameter of the contact probe 3 is reduced to make a probe. The needle unit still has the functions of simplicity, convenience and low cost.

Please refer to FIG. 7 and FIG. 8A to FIG. 8L for the manufacturing method steps of the above-mentioned probe unit structure.

As shown in step a of Figure 7 and Figure 8A, at first, provide a first placement tool 100, a first positioning substrate 1, a second positioning substrate 2 and a plurality of contact probes 3, the first placement tool 100 The first positioning substrate 1, the second positioning substrate 2 and a plurality of contact probes 3 are positioned sequentially. The first positioning substrate 1 is provided with a plurality of first needle holes 13, and the second positioning substrate 2 is provided with corresponding A plurality of second pin holes 23 of a pin hole 13, the second positioning substrate 2 is disposed above the first positioning substrate 1, and each contact probe 3 penetrates each first pin hole 13 and each second pin hole. Pinholes 23; wherein, one end of each contact probe 3 has a detection portion 31, and the other end has a protruding portion 32, the detection portion 31 is exposed to the first positioning substrate 1 through each first pin hole 13, and the protruding portion 32 passes through Each second pin hole 23 is locked on the second positioning substrate 2; the details are as follows, the first positioning tool 100 positions the second positioning substrate 2 above the first positioning substrate 1; moreover, each contact probe 3 When penetrating each first needle-through hole 13 and each second needle-through hole 23, the first placement tool 100 will provide a space so that each contact probe 3 will pass through each first needle-through hole 13 and each second needle-through hole 23. Two needle holes 23 are accommodated in the first placement tool 100, so that each protrusion 32 is locked to the second positioning substrate 2 through each second needle hole 23, thereby positioning the position of each contact probe 3 .

As shown in step b of Figure 7 and Figures 8A to 8C, in addition, a lifting tool 200 is provided, and the lifting tool 200 lifts the second positioning substrate 2 from the bottom of the first placement tool 100, so that the first positioning substrate A distance S is formed between 1 and the second positioning substrate 2 .

As shown in step c of Fig. 7 and Fig. 8D, a spacer 4 is provided, and this spacer 4 is divided into two half partition plates 42 of symmetrical combination, each half partition plate 42 is provided with a U-shaped groove 421, two U-shaped grooves 421 A chamber 41 is formed together; then the two half-spacer plates 42 are placed in the distance S, and the two half-spacer plates 42 are combined into a spacer 4, so that the spacer 4 is sandwiched between the first positioning substrate 1 and the second positioning plate. Between the substrates 2, and between the first positioning substrate 1 and the second positioning substrate 2, a chamber 41 for accommodating the plurality of contact probes 3 is formed, and the two ends of each contact probe 3 are respectively pierced. In each first needle hole 13 and each second needle hole 23 .

As shown in step d of FIG. 7 and FIG. 8D, a plurality of screw fixing elements are provided, and the second positioning substrate 2 is locked on the spacer 4 through each of the screw fixing elements 5; detailed description is as follows, the second positioning substrate 2 It includes a second inner insulating board 21 and a second outer insulating board 22 bonded to the second inner insulating board 21, the second inner insulating board 21 is sandwiched between the spacer 4 and the second outer insulating board 22, the second The second inner insulating plate 21 and the second outer insulating plate 22 are jointly provided with the plurality of second needle holes 23; each screw element 5 has a head 51, and the second inner insulating plate 21 is provided with a plurality of locking holes 211 , the second outer insulating plate 22 is provided with a plurality of embedding holes 221 corresponding to each locking hole 211, the aperture size of each embedding hole 221 is larger than the outer peripheral dimension of each head 51, and each screw element 5 passes through each locking hole 211 The second inner insulating plate 21 is locked corresponding to the spacer 4 so that the heads 51 are buried in the embedding holes 221 .

As shown in step e of FIG. 7 and FIG. 8E to FIG. 8G, the present invention also includes a step e' before step e, wherein a second placement tool 300 is provided in the step e', and the second placement tool 300 corresponds to the second positioning substrate 2 and is fixed against the plurality of contact probes 3. The first positioning tool 100 and the second positioning tool 300 clamp the first positioning substrate 1, the second positioning substrate 2, the plurality of contact probes 3 together. a contact probe 3 and a spacer 4; the purpose of the second placing tool 300 is to turn the first positioning substrate 1 over the second positioning substrate 2 to be arranged on the second positioning substrate 2, and the second placing tool 300 prevents Each contact probe 3 falls off each first needle hole 13 and each second needle hole 23; therefore, after the second positioning tool 300 is installed and fixed on the second positioning substrate 2, it is turned over to make the first positioning substrate 1 set. On the top of the second positioning substrate 2 , the lifting tool 200 can be disengaged to perform the following steps.

Furthermore, a plurality of locking elements 6 are provided, and the first placing tool 100 is provided with a plurality of through holes, and each locking element 6 utilizes the through holes of the first placing tool 100 to lock the first positioning substrate 1 on the On the spacer 4; detailed description is as follows, the first positioning substrate 1 includes a first inner insulating plate 11 and a first outer insulating plate 12 bonded to the first inner insulating plate 11, the first inner insulating plate 11 is sandwiched between Between the spacer 4 and the first outer insulating plate 12, the first inner insulating plate 11 and the first outer insulating plate 12 are jointly provided with the plurality of first needle holes 13; each locking element 6 has a head 61 , the first inner insulating plate 11 is provided with a plurality of locking holes 111, the first outer insulating plate 12 is provided with a plurality of embedding holes 121 corresponding to each locking hole 111, and the diameter of each embedding hole 121 is larger than that of each head 61 Each locking element 6 locks the first inner insulating plate 11 to the spacer 4 through each locking hole 111 , and each head 61 is buried in each embedding hole 121 .

As shown in step f of FIG. 7 and FIG. 8H to FIG. 8L, the first positioning tool 100 is disassembled by using the lifting tool 200. At this time, the first positioning substrate 1 and the second positioning substrate 2 are respectively fixed by the locking element 6 and the screw. The element 5 is locked corresponding to the spacer 4; finally, the plurality of locking elements 6 are temporarily released, and the first positioning substrate 1 is slid to move relative to the second positioning substrate 2, so that the plurality of first needle holes 13 And the plurality of second pinholes 23 produce an offset relationship, so that the two ends of each contact probe 3 are respectively clamped and positioned by the first positioning substrate 1 and the second positioning substrate 2. The details are as follows. The two ends of the probes 3 are pressed and deformed by the first positioning substrate 1 and the second positioning substrate 2 respectively, so that each contact probe 3 is clamped and fixed between the first positioning substrate 1 and the second positioning substrate 2, Then the second placement tool 300 is disassembled to complete the structure of the probe unit.

Therefore, the probe unit structure of the present invention and its manufacturing method can be obtained through the above-mentioned structural composition. Thereby, the first positioning substrate 1 and the second positioning substrate 2 are stacked on each other during manufacture, and a space S is formed between the first positioning substrate 1 and the second positioning substrate 2 through the lifting tool 200, and the spacer 4. Then insert the spacing S and sandwich between the first positioning substrate 1 and the second positioning substrate 2 to form a chamber 41 for accommodating each contact probe 3; compared with the existing ones, the probe unit structure of the present invention It also has the characteristics of simple steps and easy assembly in production and combination.

As shown in Figure 9, the use state of the probe unit structure of the present invention, wherein, the detection part 31 of one end of the contact probe 3 is in contact with the corresponding inspection object, and the other end of the contact probe 3, that is, the end with the protruding part 32 corresponds to the signal The processing device 400 is electrically connected so that the probe unit is electrically connected to the inspection object and the signal processing device 400 respectively, so as to achieve the electrical connection between the inspection object and the signal processing device 400 that outputs inspection signals. In addition, the two ends of each contact probe 3 are pressed and deformed by the first positioning substrate 1 and the second positioning substrate 2 respectively; thereby, the contact probe 3 is positioned to avoid poor contact or falling off of the contact probe 3 during detection, Further, the use stability of the probe unit structure of the present invention is improved.

Certainly, the present invention also can have other multiple embodiments, without departing from the spirit and essence of the present invention, those skilled in the art can make various corresponding changes and deformations according to the present invention, but these corresponding Changes and deformations should belong to the scope of protection of the appended claims of the present invention.

Claims (11)

1. a method for making for probe unit, is characterized in that, step comprises:

A) one first positioning baseplate, one second positioning baseplate and multiple contact probe are provided, this first positioning baseplate is provided with multiple first and threads a needle hole, this second positioning baseplate is provided with the corresponding the plurality of first multiple second of hole of threading a needle and threads a needle hole, this second positioning baseplate is configured in above this first positioning baseplate, and this first to be threaded a needle hole and respectively this second to be threaded a needle hole to make each this contact probe penetrate respectively;

B) provide a rising instrument, this second positioning baseplate risen by this rising instrument, makes to be formed with a spacing between this first positioning baseplate and this second positioning baseplate;

C) one distance piece is provided, this distance piece is inserted this spacing and is folded between this first positioning baseplate and this second positioning baseplate, make to be formed with a room between this distance piece, this first positioning baseplate and this second positioning baseplate, the plurality of contact probe is placed in this room, and this first to be threaded a needle hole and respectively this second to be threaded a needle hole to make the two ends of each this contact probe be connected to respectively respectively;

D) provide multiple bolting element, this second positioning baseplate by each this bolting element with locking at this distance piece;

E) provide multiple lock member, this first positioning baseplate by each this lock member with locking at this distance piece; And

F) by the plurality of lock member temporary release, from this first positioning baseplate, the sliding displacement of this second positioning baseplate is dynamic relatively, thus make the plurality of first hole of threading a needle, hole and the plurality of second of threading a needle produce off normal relation, to be pulled location by this first positioning baseplate and this second positioning baseplate folder respectively to make the two ends of each this contact probe.

2. the method for making of probe unit according to claim 1, it is characterized in that, one first is also provided to put instrument in a step, this first puts instrument for this second positioning baseplate being arranged on the top of this first positioning baseplate, and this first is put each this contact probe of tool positioned and be arranged in respectively that this first to be threaded a needle hole and respectively this second to be threaded a needle hole.

3. the method for making of probe unit according to claim 2, it is characterized in that, each this contact probe one end has a test section, the other end has a teat, this test section is exposed to this first positioning baseplate via each this first hole of threading a needle, and this teat is via respectively this second threads a needle hole clip in this second positioning baseplate.

4. the method for making of probe unit according to claim 1, is characterized in that, in step c, this distance piece is divided into 2 half space bars of Symmetric Composite, makes this 2 half space bar insert this spacing.

5. the method for making of probe unit according to claim 4, is characterized in that, each this half space bar is provided with a U-shaped tank, and this two U-shapeds tank forms this room.

6. the method for making of probe unit according to claim 1, it is characterized in that, in Step d, this second positioning baseplate comprises insulcrete and gluing in one second in one second external insulation plate of this insulcrete in second, this in second insulcrete be interposed between this distance piece and this second external insulation plate, this in second insulcrete and this second external insulation plate be jointly provided with the plurality of second and thread a needle hole.

7. the method for making of probe unit according to claim 6, it is characterized in that, each this bolting element has a head, this in second insulcrete be provided with multiple lockhole, this the second external insulation plate is provided with corresponding the multiple of the plurality of lockhole and buries hole underground, each this aperture size burying hole underground is greater than the outside peripheral dimension of each this head, and respectively by this, insulcrete is to should distance piece locking in second via each this lockhole for this bolting element, and respectively this head is embedded in respectively, and this buries hole underground.

8. the method for making of probe unit according to claim 1, it is characterized in that, a step e ' before being also included in step e, one second is wherein provided to put instrument in e ' step, this first positioning baseplate second puts instrument upset to be arranged on above this second positioning baseplate via this, and this second is put instrument and prevent the plurality of contact probe from coming off in respectively this first to be threaded a needle hole and respectively this second to be threaded a needle hole.

9. the method for making of probe unit according to claim 1, it is characterized in that, in step e, this first positioning baseplate comprises insulcrete and gluing in one first in one first external insulation plate of this insulcrete in first, this in first insulcrete be interposed between this distance piece and this first external insulation plate, this in first insulcrete and this first external insulation plate be jointly provided with the plurality of first and thread a needle hole.

10. the method for making of probe unit according to claim 9, it is characterized in that, each this lock member has a head, this in first insulcrete be provided with multiple lockhole, this the first external insulation plate is provided with corresponding the multiple of the plurality of lockhole and buries hole underground, each this aperture size burying hole underground is greater than the outside peripheral dimension of each this head, respectively this lock member via each this lockhole by this in first insulcrete be locked in this distance piece and this second positioning baseplate, respectively this head is embedded in respectively that this buries hole underground.

The method for making of 11. probe units according to claim 1, it is characterized in that, in f step, the two ends of each this contact probe are produced distortion by this first positioning baseplate and the compacting of this second positioning baseplate respectively, thus each this contact probe is fixed between this first positioning baseplate and this second positioning baseplate by clip.