CN103241958B - A kind of engraving method of LCD glass substrate - Google Patents
A kind of engraving method of LCD glass substrate Download PDFInfo
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- CN103241958B CN103241958B CN201310202314.5A CN201310202314A CN103241958B CN 103241958 B CN103241958 B CN 103241958B CN 201310202314 A CN201310202314 A CN 201310202314A CN 103241958 B CN103241958 B CN 103241958B
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Abstract
The invention discloses a kind of engraving method of LCD glass substrate, this engraving method is successively by glass substrate clamping, a Ultrasonic Cleaning, an etching, twice ultrasonic ripple cleans, second etch, the step of three Ultrasonic Cleanings and oven dry completes glass substrate etching processing, a Ultrasonic Cleaning time is 1-1.5 minute, an etching period is 5-8 minute, twice ultrasonic ripple scavenging period is 2-3 minute, the second etch time is 3-5 minute, three Ultrasonic Cleaning times are 2-3 minute, wherein, the etchant that an etching is used comprises 20%-35% hydrofluoric acid, 10%-25% sulfuric acid and 45%-65% water, the etchant that second etch is used comprises 30%-40% hydrofluoric acid, 5%-10% sulfuric acid and 50%-65% water. this engraving method can improve the etching quality of LCD glass substrate, etching quality better effectively.
Description
Technical field
The present invention relates to LCD glass substrate processing technique field, relate in particular to a kind of engraving method of LCD glass substrate.
Background technology
Along with the degree of concern of the display effect of people to display is more and more higher, particularly the requirement of the resolution ratio of display constantly promotes; So in the glass substrate process of display, its line-spacing, that live width needs etching to obtain is more and more thinner, uniformity also requires more and more stricter.
In order to meet the requirement in market, must provide a kind of engraving method of high request.
Summary of the invention
The object of the present invention is to provide a kind of engraving method of LCD glass substrate, this LCD glass substrate engraving method can improve the etching quality of LCD glass substrate, etching quality better further.
For achieving the above object, the present invention is achieved through the following technical solutions.
An engraving method for LCD glass substrate, includes following processing step, is specially:
A, glass substrate is positioned over to hand basket;
B, the hand basket that installs glass substrate is positioned in the first ultrasonic cleaner, scavenging period is 1-1.5 minute;
C, will be positioned in the first etching bath with hand basket through the glass substrate after Ultrasonic Cleaning for the first time, the first etching bath is supplied with etchant continuously by the circulation pump housing, the etching period of glass substrate in the first etching bath is 5-8 minute, wherein, etchant in the first etching bath includes the component of following weight portion, is specially:
Hydrofluoric acid 20%-35%
Sulfuric acid 10%-25%
Water 45%-65%;
D, will be positioned in the second ultrasonic cleaner with hand basket through the glass substrate after etch processes for the first time, scavenging period is 2-3 minute;
E, will be positioned in the second etching bath with hand basket through the glass substrate after Ultrasonic Cleaning for the second time, the second etching bath is supplied with etchant continuously by the circulation pump housing, the etching period of glass substrate in the second etching bath is 3-5 minute, wherein, etchant in the second etching bath includes the component of following weight portion, is specially:
Hydrofluoric acid 30%-40%
Sulfuric acid 5%-10%
Water 50%-65%;
F, will be positioned in the 3rd ultrasonic cleaner with hand basket through the glass substrate after etch processes for the second time, scavenging period is 2-3 minute;
H, will be positioned in baker with hand basket through the glass substrate after Ultrasonic Cleaning for the third time, until glass substrate is dried.
Further, the etchant that described step c uses includes the component of following weight portion, is specially:
Hydrofluoric acid 25%-30%
Sulfuric acid 15%-20%
Water 50%-60%.
Further, the etchant that described step c uses includes the component of following weight portion, is specially:
Hydrofluoric acid 28%
Sulfuric acid 18%
Water 54%.
Further, the etchant that described step e uses includes the component of following weight portion, is specially:
Hydrofluoric acid 35%-40%
Sulfuric acid 5%-8%
Water 50%-60%.
Further, the etchant that described step e uses includes the component of following weight portion, is specially:
Hydrofluoric acid 40%
Sulfuric acid 5%
Water 55%.
Beneficial effect of the present invention is: the engraving method of a kind of LCD glass substrate of the present invention, and this engraving method includes following processing step, is specially: a, glass substrate is positioned over to hand basket; B, the hand basket that installs glass substrate is positioned in the first ultrasonic cleaner, scavenging period is 1-1.5 minute; C, will be positioned in the first etching bath with hand basket through the glass substrate after Ultrasonic Cleaning for the first time, the first etching bath is supplied with etchant continuously by the circulation pump housing, and the etching period of glass substrate in the first etching bath is 5-8 minute; D, will be positioned in the second ultrasonic cleaner with hand basket through the glass substrate after etch processes for the first time, scavenging period is 2-3 minute; E, will be positioned in the second etching bath with hand basket through the glass substrate after Ultrasonic Cleaning for the second time, the second etching bath is supplied with etchant continuously by the circulation pump housing, and the etching period of glass substrate in the second etching bath is 3-5 minute; F, will be positioned in the 3rd ultrasonic cleaner with hand basket through the glass substrate after etch processes for the second time, scavenging period is 2-3 minute; H, will be positioned in baker with hand basket through the glass substrate after Ultrasonic Cleaning for the third time, until glass substrate is dried. Wherein, the etchant in the first etching bath includes the component of following weight portion, is specially: hydrofluoric acid 20%-35%, sulfuric acid 10%-25%, water 45%-65%; Etchant in the second etching bath includes the component of following weight portion, is specially: hydrofluoric acid 30%-40%, sulfuric acid 5%-10%, water 50%-65%. By above-mentioned processing step, this engraving method can improve the etching quality of LCD glass substrate, etching quality better effectively.
Detailed description of the invention
Below in conjunction with concrete embodiment, the present invention will be described.
Embodiment mono-, a kind of engraving method of LCD glass substrate, includes following processing step, is specially:
A, glass substrate is positioned over to hand basket;
B, the hand basket that installs glass substrate is positioned in the first ultrasonic cleaner, scavenging period is 1-1.5 minute;
C, will be positioned in the first etching bath with hand basket through the glass substrate after Ultrasonic Cleaning for the first time, the first etching bath is supplied with etchant continuously by the circulation pump housing, the etching period of glass substrate in the first etching bath is 5-8 minute, wherein, etchant in the first etching bath includes the component of following weight portion, is specially:
Hydrofluoric acid 28%
Sulfuric acid 18%
Water 54%;
D, will be positioned in the second ultrasonic cleaner with hand basket through the glass substrate after etch processes for the first time, scavenging period is 2-3 minute;
E, will be positioned in the second etching bath with hand basket through the glass substrate after Ultrasonic Cleaning for the second time, the second etching bath is supplied with etchant continuously by the circulation pump housing, the etching period of glass substrate in the second etching bath is 3-5 minute, wherein, etchant in the second etching bath includes the component of following weight portion, is specially:
Hydrofluoric acid 40%
Sulfuric acid 5%
Water 55%;
F, will be positioned in the 3rd ultrasonic cleaner with hand basket through the glass substrate after etch processes for the second time, scavenging period is 2-3 minute;
H, will be positioned in baker with hand basket through the glass substrate after Ultrasonic Cleaning for the third time, until glass substrate is dried.
Wherein, the engraving method of the present embodiment one completes glass substrate etching processing by the step of glass substrate clamping, a Ultrasonic Cleaning, an etching, the cleaning of twice ultrasonic ripple, second etch, three Ultrasonic Cleanings and oven dry successively, this engraving method can improve the etching quality of LCD glass substrate, etching quality better effectively.
Embodiment bis-, a kind of engraving method of LCD glass substrate, includes following processing step, is specially:
A, glass substrate is positioned over to hand basket;
B, the hand basket that installs glass substrate is positioned in the first ultrasonic cleaner, scavenging period is 1-1.5 minute;
C, will be positioned in the first etching bath with hand basket through the glass substrate after Ultrasonic Cleaning for the first time, the first etching bath is supplied with etchant continuously by the circulation pump housing, the etching period of glass substrate in the first etching bath is 5-8 minute, wherein, etchant in the first etching bath includes the component of following weight portion, is specially:
Hydrofluoric acid 25%
Sulfuric acid 20%
Water 55%;
D, will be positioned in the second ultrasonic cleaner with hand basket through the glass substrate after etch processes for the first time, scavenging period is 2-3 minute;
E, will be positioned in the second etching bath with hand basket through the glass substrate after Ultrasonic Cleaning for the second time, the second etching bath is supplied with etchant continuously by the circulation pump housing, the etching period of glass substrate in the second etching bath is 3-5 minute, wherein, etchant in the second etching bath includes the component of following weight portion, is specially:
Hydrofluoric acid 35%
Sulfuric acid 8%
Water 57%;
F, will be positioned in the 3rd ultrasonic cleaner with hand basket through the glass substrate after etch processes for the second time, scavenging period is 2-3 minute;
H, will be positioned in baker with hand basket through the glass substrate after Ultrasonic Cleaning for the third time, until glass substrate is dried.
Wherein, the engraving method of the present embodiment two completes glass substrate etching processing by the step of glass substrate clamping, a Ultrasonic Cleaning, an etching, the cleaning of twice ultrasonic ripple, second etch, three Ultrasonic Cleanings and oven dry successively, this engraving method can improve the etching quality of LCD glass substrate, etching quality better effectively.
Embodiment tri-, a kind of engraving method of LCD glass substrate, includes following processing step, is specially:
A, glass substrate is positioned over to hand basket;
B, the hand basket that installs glass substrate is positioned in the first ultrasonic cleaner, scavenging period is 1-1.5 minute;
C, will be positioned in the first etching bath with hand basket through the glass substrate after Ultrasonic Cleaning for the first time, the first etching bath is supplied with etchant continuously by the circulation pump housing, the etching period of glass substrate in the first etching bath is 5-8 minute, wherein, etchant in the first etching bath includes the component of following weight portion, is specially:
Hydrofluoric acid 30%
Sulfuric acid 20%
Water 50%;
D, will be positioned in the second ultrasonic cleaner with hand basket through the glass substrate after etch processes for the first time, scavenging period is 2-3 minute;
E, will be positioned in the second etching bath with hand basket through the glass substrate after Ultrasonic Cleaning for the second time, the second etching bath is supplied with etchant continuously by the circulation pump housing, the etching period of glass substrate in the second etching bath is 3-5 minute, wherein, etchant in the second etching bath includes the component of following weight portion, is specially:
Hydrofluoric acid 40%
Sulfuric acid 8%
Water 52%;
F, will be positioned in the 3rd ultrasonic cleaner with hand basket through the glass substrate after etch processes for the second time, scavenging period is 2-3 minute;
H, will be positioned in baker with hand basket through the glass substrate after Ultrasonic Cleaning for the third time, until glass substrate is dried.
Wherein, the engraving method of the present embodiment three completes glass substrate etching processing by the step of glass substrate clamping, a Ultrasonic Cleaning, an etching, the cleaning of twice ultrasonic ripple, second etch, three Ultrasonic Cleanings and oven dry successively, this engraving method can improve the etching quality of LCD glass substrate, etching quality better effectively.
Above content is only preferred embodiment of the present invention, for those of ordinary skill in the art, according to thought of the present invention, all will change in specific embodiments and applications, and this description should not be construed as limitation of the present invention.
Claims (3)
1. an engraving method for LCD glass substrate, is characterized in that, includes following processing step, is specially:
A, glass substrate is positioned over to hand basket;
B, the hand basket that installs glass substrate is positioned in the first ultrasonic cleaner, scavenging period is 1-1.5 minute;
C, will be positioned in the first etching bath with hand basket through the glass substrate after Ultrasonic Cleaning for the first time, the first etching bath is supplied with etchant continuously by the circulation pump housing, the etching period of glass substrate in the first etching bath is 5-8 minute, wherein, etchant in the first etching bath includes the component of following weight portion, is specially:
Hydrofluoric acid 28%
Sulfuric acid 18%
Water 54%;
D, will be positioned in the second ultrasonic cleaner with hand basket through the glass substrate after etch processes for the first time, scavenging period is 2-3 minute;
E, will be positioned in the second etching bath with hand basket through the glass substrate after Ultrasonic Cleaning for the second time, the second etching bath is supplied with etchant continuously by the circulation pump housing, the etching period of glass substrate in the second etching bath is 3-5 minute, wherein, etchant in the second etching bath includes the component of following weight portion, is specially:
Hydrofluoric acid 30%-40%
Sulfuric acid 5%-10%
Water 50%-65%;
F, will be positioned in the 3rd ultrasonic cleaner with hand basket through the glass substrate after etch processes for the second time, scavenging period is 2-3 minute;
H, will be positioned in baker with hand basket through the glass substrate after Ultrasonic Cleaning for the third time, until glass substrate is dried.
2. the engraving method of a kind of LCD glass substrate according to claim 1, is characterized in that: the etchant that described step e uses includes the component of following weight portion, is specially:
Hydrofluoric acid 35%-40%
Sulfuric acid 5%-8%
Water 50%-60%.
3. the engraving method of a kind of LCD glass substrate according to claim 2, is characterized in that: the etchant that described step e uses includes the component of following weight portion, is specially:
Hydrofluoric acid 40%
Sulfuric acid 5%
Water 55%.
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| CN201310202314.5A CN103241958B (en) | 2013-05-28 | 2013-05-28 | A kind of engraving method of LCD glass substrate |
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| CN103241958B true CN103241958B (en) | 2016-05-04 |
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| CN103553349A (en) * | 2013-10-11 | 2014-02-05 | 苏州安洁科技股份有限公司 | Manufacturing method of glass touchpad with different hand feel |
| CN103708736A (en) * | 2013-12-13 | 2014-04-09 | 汕头市拓捷科技有限公司 | Strength recovery method of one-glass solution (OGS) glass and equipment of using method |
| CN103880295B (en) * | 2014-02-26 | 2017-01-11 | 江西沃格光电股份有限公司 | Glass thinning equipment and glass thinning method |
| CN105293934B (en) * | 2014-07-11 | 2019-11-29 | 东京应化工业株式会社 | Glass processing method, glass etching liquid and glass substrate |
| JP6535226B2 (en) * | 2014-07-11 | 2019-06-26 | 東京応化工業株式会社 | Glass processing method, glass etching solution, and glass substrate |
| CN104238824A (en) * | 2014-09-30 | 2014-12-24 | 江西省平波电子有限公司 | Manufacturing technology for touch screen of improved GFF structure |
| CN104298401A (en) * | 2014-09-30 | 2015-01-21 | 江西省平波电子有限公司 | Manufacturing process of improved touch screen of GG structure |
| CN104238825B (en) * | 2014-09-30 | 2018-05-01 | 江西省平波电子有限公司 | A kind of manufacture craft of the touch-screen of improved PG structures |
| CN104267851A (en) * | 2014-09-30 | 2015-01-07 | 江西省平波电子有限公司 | Manufacturing technology for improved touch module with GF2 double-surface conductive film structure |
| CN104267850A (en) * | 2014-09-30 | 2015-01-07 | 江西省平波电子有限公司 | Production technique of improved touch modules of GF2 two-sided conductive films and elargol wiring |
| CN107755388A (en) * | 2016-08-18 | 2018-03-06 | 宁波创润新材料有限公司 | The cleaning method of optical glass |
| CN108687025A (en) * | 2018-05-16 | 2018-10-23 | 安徽宏实自动化装备有限公司 | A kind of piece leaf formula wafer cleaning machine |
| CN115849725A (en) * | 2022-12-26 | 2023-03-28 | 重庆象征科技有限公司 | Local thinning process for mobile phone glass cover plate |
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| JP3749909B2 (en) * | 2004-06-03 | 2006-03-01 | 西山ステンレスケミカル株式会社 | Method for polishing glass plate surface, glass substrate for flat panel display, and flat panel display |
| CN101062838A (en) * | 2006-04-28 | 2007-10-31 | 夏普株式会社 | Method for manufacturing grinding glass substrate |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2001089191A (en) * | 1999-09-27 | 2001-04-03 | Nippon Sheet Glass Co Ltd | Production process for display glass substrate and display glass substrate produced by the same |
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| JP3749909B2 (en) * | 2004-06-03 | 2006-03-01 | 西山ステンレスケミカル株式会社 | Method for polishing glass plate surface, glass substrate for flat panel display, and flat panel display |
| CN101062838A (en) * | 2006-04-28 | 2007-10-31 | 夏普株式会社 | Method for manufacturing grinding glass substrate |
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Address after: The North Industrial Park of Xiaogan city in 432500 Hubei County of Yunmeng province Hubei optoelectronic technology Limited by Share Ltd Unocal Applicant after: UNITECH OPTRONICS TECHNOLOGY (HUBEI) CO., LTD. Address before: The North Industrial Park of Xiaogan city in 432500 Hubei County of Yunmeng province Hubei youniko Photoelectric Technology Co Ltd Applicant before: Unitech Optronics Technology (Hubei) Co., Ltd. |
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