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CN103239761A - Silicon-nitride-coated medical magnesium alloy material and preparation method thereof - Google Patents

Silicon-nitride-coated medical magnesium alloy material and preparation method thereof Download PDF

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CN103239761A
CN103239761A CN2013101860284A CN201310186028A CN103239761A CN 103239761 A CN103239761 A CN 103239761A CN 2013101860284 A CN2013101860284 A CN 2013101860284A CN 201310186028 A CN201310186028 A CN 201310186028A CN 103239761 A CN103239761 A CN 103239761A
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magnesium alloy
silicon nitride
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刘德宝
唐怀超
宋融
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Tianjin University of Technology
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Abstract

一种氮化硅涂层医用镁合金材料,由镁合金基材和在其表面附有的氮化硅涂层构成;其制备方法是:1)将镁合金试样打磨、抛光、除油后,进行喷砂处理以去除表面氧化皮、增加表面粗糙度和涂层和增强镁合金基体与涂层接合的牢固度;2)将经上述处理后的镁合金试样采用射频等离子体增强化学气相沉积法或粒子束沉积法,在镁合金试样表面制备氮化硅陶瓷涂层。本发明的优点是:在镁合金表面制备的氮化硅陶瓷涂层致密,与基体结合强度大,提高了镁合金的耐腐蚀性;通过改变SiH4比例及沉积时间可调节涂层的耐腐蚀性能及降解时间;在制备镁合金涂层的过程中无有害物质的使用,具有工艺简单、涂层可控、无需对样品进行预制膜处理等优点。

Figure 201310186028

A silicon nitride-coated medical magnesium alloy material is composed of a magnesium alloy substrate and a silicon nitride coating attached to the surface; the preparation method is as follows: 1) after grinding, polishing and degreasing the magnesium alloy sample , carry out sand blasting treatment to remove surface scale, increase surface roughness and coating, and enhance the firmness of the magnesium alloy substrate and coating; 2) The magnesium alloy sample after the above treatment is enhanced by radio frequency plasma A deposition method or a particle beam deposition method is used to prepare a silicon nitride ceramic coating on the surface of a magnesium alloy sample. The advantages of the present invention are: the silicon nitride ceramic coating prepared on the surface of the magnesium alloy is compact, has a high bonding strength with the substrate, and improves the corrosion resistance of the magnesium alloy; the corrosion resistance of the coating can be adjusted by changing the SiH4 ratio and deposition time Performance and degradation time; no harmful substances are used in the process of preparing the magnesium alloy coating, and it has the advantages of simple process, controllable coating, and no need for prefabricated film treatment of samples.

Figure 201310186028

Description

一种氮化硅涂层医用镁合金材料及制备方法A kind of silicon nitride coating medical magnesium alloy material and preparation method

技术领域technical field

本发明属于生物医用材料领域,特别是一种氮化硅涂层医用镁合金材料及制备方法。The invention belongs to the field of biomedical materials, in particular to a silicon nitride-coated medical magnesium alloy material and a preparation method.

背景技术Background technique

目前临床应用的医用金属材料主要有不锈钢、钴基合金、钛合金等几大类。但其弹性模量远高于人骨,在使用过程中会产生“应力屏蔽”,且有害离子溶出现象往往导致严重炎症反应及引起组织损伤从而导致植入失败。特别是植入合金在体内不能被吸收、降解,当伤骨愈合后必需通过二次手术取出,大大增加了病人经济及心理负担和肉体上的痛苦。因此,在骨损伤手术中,用可降解材料代替传统医用金属材料越来越受到重视,已成为当前生物材料领域的国际研究前沿与热点。At present, the medical metal materials in clinical application mainly include stainless steel, cobalt-based alloy, titanium alloy and so on. However, its elastic modulus is much higher than that of human bone, which will produce "stress shielding" during use, and the dissolution of harmful ions often leads to severe inflammatory reactions and tissue damage, resulting in implant failure. In particular, implanted alloys cannot be absorbed and degraded in the body, and must be taken out through a second operation after the wounded bone heals, which greatly increases the patient's economic and psychological burden and physical pain. Therefore, in bone injury surgery, the use of degradable materials to replace traditional medical metal materials has attracted more and more attention, and has become an international research frontier and hot spot in the field of biomaterials.

生物医用可降解高分子材料如PLLA、PGA已用于临床,但是由于其弹性模量较小,只能用于不承力的部位,且降解产物呈酸性易造成无菌性炎症,因而限制了其广泛应用。Biomedical degradable polymer materials such as PLLA and PGA have been used clinically, but due to their small elastic modulus, they can only be used in areas that are not bearing stress, and the degradation products are acidic and easy to cause aseptic inflammation, thus limiting Its wide application.

镁或镁合金是一种可在体内环境降解的金属材料,与上述金属植入材料如钛合金、不锈钢相比,其优势主要表现在:1)镁的密度为1.74g/cm3,并且与人骨的密质骨密度(1.80g/cm3)极为接近,其机械性能更接近天然骨,其适中的弹性模量能够有效缓解应力遮挡效应,对骨折愈合、种植体的稳定具有重要作用;2)镁是人体必需的元素,具有生物活性、介导成骨作用、生物相容性。镁在人体中总量约20多克,在生命过程中可以促进骨及细胞的形成、催化或激活机体300多种酶系、参与体内能量代谢,并且在能量的输送、贮存和利用中起关键作用;3)镁的标准平衡电位为-2.34V,低于其他合金,呈示出较高的化学和电化学活性,作为可降解材料具有其天然优势;4,资源丰富价格低廉。Magnesium or magnesium alloy is a metal material that can be degraded in the body environment. Compared with the above metal implant materials such as titanium alloy and stainless steel, its advantages are mainly manifested in: 1) The density of magnesium is 1.74g/cm 3 , and it is compatible with The compact bone density (1.80g/cm 3 ) of human bone is very close, its mechanical properties are closer to natural bone, and its moderate elastic modulus can effectively alleviate the stress shielding effect, which plays an important role in fracture healing and implant stability;2 ) Magnesium is an essential element for the human body, has biological activity, mediates osteogenesis, and biocompatibility. The total amount of magnesium in the human body is about 20 grams. During life, it can promote the formation of bones and cells, catalyze or activate more than 300 enzyme systems in the body, participate in energy metabolism in the body, and play a key role in the transportation, storage and utilization of energy. Function; 3) The standard equilibrium potential of magnesium is -2.34V, which is lower than other alloys, showing high chemical and electrochemical activity, and has its natural advantages as a degradable material; 4, rich in resources and low in price.

综上所述,镁或镁合金具有良好的医学安全性、力学性能、可控腐蚀性能和降解产物的最小副作用等优点,有望发展成新一代生物可降解材料。但是,在人体充满Cl-的腐蚀环境中,镁及镁合金会因为降解速率较快而提前失效。通常临时植入器件要求3个月到1年的服役时间,可推算出镁及镁合金作为植入材料降解速率应控制在0.1mm/a内,但研究发现纯镁在模拟体液内的降解速率为0.2-1.0mm/a,在动物实验中也发现纯镁在的腐蚀速率过快,产生大量的氢气,从而导致材料过早失效,限制了其临床应用。In summary, magnesium or magnesium alloys have the advantages of good medical safety, mechanical properties, controllable corrosion performance, and minimal side effects of degradation products, and are expected to develop into a new generation of biodegradable materials. However, in the corrosive environment where the human body is full of Cl - , magnesium and magnesium alloys will fail prematurely due to the faster degradation rate. Usually temporary implants require a service time of 3 months to 1 year. It can be estimated that the degradation rate of magnesium and magnesium alloys as implant materials should be controlled within 0.1mm/a, but the research found that the degradation rate of pure magnesium in simulated body fluids It is 0.2-1.0mm/a. In animal experiments, it is also found that the corrosion rate of pure magnesium is too fast, and a large amount of hydrogen gas is generated, which leads to premature failure of the material and limits its clinical application.

因此,要使镁或其合金真正用于临床,必须提高其耐腐蚀性,而通过表面涂层处理是有效提高镁及镁合金耐蚀性能的方法之一。采用生物相容性良好的氮化硅材料对镁合金进行表面处理是一种有效控制镁基材料降解速率重要途径。Therefore, in order to make magnesium or its alloys really used clinically, its corrosion resistance must be improved, and surface coating treatment is one of the methods to effectively improve the corrosion resistance of magnesium and magnesium alloys. Surface treatment of magnesium alloys with silicon nitride materials with good biocompatibility is an important way to effectively control the degradation rate of magnesium-based materials.

发明内容Contents of the invention

本发明的目的在于针对上述存在问题,提供一种氮化硅涂层医用镁合金材料及制备方法,该材料与涂层结合牢固且涂层致密,具有良好的热稳定性和生物稳定性,降解周期可通过涂层厚度及氢含量调控,适合作为中长期植入材料使用,尤其符合骨外科的临床需要。The purpose of the present invention is to address the above problems, to provide a silicon nitride coated medical magnesium alloy material and its preparation method, the material is firmly combined with the coating and the coating is dense, has good thermal stability and biological stability, and does not degrade The period can be regulated by coating thickness and hydrogen content, which is suitable for medium and long-term implant materials, especially in line with the clinical needs of orthopedic surgery.

本发明的技术方案:Technical scheme of the present invention:

一种氮化硅涂层医用镁合金材料,由镁合金基材和在其表面附有的氮化硅涂层构成。A silicon nitride coated medical magnesium alloy material is composed of a magnesium alloy substrate and a silicon nitride coating attached to the surface.

一种所述氮化硅涂层医用镁合金材料是制备方法,步骤如下:A kind of described silicon nitride coating medical magnesium alloy material is a preparation method, and the steps are as follows:

1)将镁合金试样打磨、抛光、除油后,进行喷砂处理以去除表面氧化皮、增加表面粗糙度和涂层和增强镁合金基体与涂层接合的牢固度;1) After grinding, polishing, and degreasing the magnesium alloy sample, perform sandblasting to remove surface oxide skin, increase surface roughness and coating, and enhance the firmness of the magnesium alloy substrate and coating;

2)将经上述处理后的镁合金试样采用射频等离子体增强化学气相沉积法或粒子束沉积法,在镁合金试样表面制备氮化硅陶瓷涂层。2) Using the above-mentioned treated magnesium alloy sample to prepare a silicon nitride ceramic coating on the surface of the magnesium alloy sample by radio frequency plasma enhanced chemical vapor deposition method or particle beam deposition method.

所述射频等离子体增强化学气相沉积法的工艺参数为:将镁合金试样放入射频等离子体增强化学气相沉积设备的内腔沉积室中,系统抽至真空度为1×10-4-1×10-5Pa,以SiH4和NH3或N2混合气为反应气源,沉积温度为150-450℃、射频功率为80-400W的条件下,沉积时间为10s-60min,冷却后在合金表面制得氮化硅陶瓷涂层。The process parameters of the radio frequency plasma enhanced chemical vapor deposition method are as follows: the magnesium alloy sample is placed in the inner cavity deposition chamber of the radio frequency plasma enhanced chemical vapor deposition equipment, and the system is pumped to a vacuum degree of 1×10 -4 -1 ×10 -5 Pa, with SiH 4 and NH 3 or N 2 mixed gas as the reaction gas source, deposition temperature at 150-450°C, RF power at 80-400W, deposition time at 10s-60min, after cooling A silicon nitride ceramic coating is prepared on the surface of the alloy.

所述SiH4和NH3或N2混合气中SiH4的流量为10-100sccm;SiH4和NH3或N2流量比l:0.2-1。The flow rate of SiH 4 in the SiH 4 and NH 3 or N 2 mixed gas is 10-100 sccm; the flow ratio of SiH 4 and NH 3 or N 2 is 1: 0.2-1.

所述粒子束沉积法的工艺参数为:将镁合金试样放入粒子束沉积设备中,以块状氮化硅作为靶材,在真空度为1×10-4-1×10-5Pa下,用氩离子轰击后再高温热处理,氩离子轰击电压为10-100KeV,氩离子的密度为(1-5)×1016ions/cm3,热处理温度为200-450℃,热处理时间为2-12h。The process parameters of the particle beam deposition method are as follows: the magnesium alloy sample is placed in the particle beam deposition equipment, with bulk silicon nitride as the target material, and the vacuum degree is 1×10 -4 -1×10 -5 Pa Next, after bombardment with argon ions, heat treatment at high temperature, the bombardment voltage of argon ions is 10-100KeV, the density of argon ions is (1-5)×10 16 ions/cm 3 , the heat treatment temperature is 200-450°C, and the heat treatment time is 2 -12h.

本发明具有以下优点和积极效果:The present invention has the following advantages and positive effects:

1)在镁合金表面制备的氮化硅陶瓷涂层致密,与基体结合强度大,提高了镁合金的耐腐蚀性;1) The silicon nitride ceramic coating prepared on the surface of the magnesium alloy is dense and has a strong bond with the substrate, which improves the corrosion resistance of the magnesium alloy;

2)通过改变SiH4比例及沉积时间可调节涂层的耐腐蚀性能及降解时间;2) The corrosion resistance and degradation time of the coating can be adjusted by changing the SiH 4 ratio and deposition time;

3)在制备镁合金涂层的过程中无有害物质的使用,具有工艺简单、涂层可控、无需对样品进行预制膜处理等优点。3) There is no use of harmful substances in the process of preparing the magnesium alloy coating, and it has the advantages of simple process, controllable coating, and no need for prefabricated film treatment of samples.

附图说明Description of drawings

附图为在AZ31镁合金表面采用不同方式氮化硅涂层与未涂层的AZ31镁合金在模拟体液中的极化曲线。The accompanying drawing shows the polarization curves of AZ31 magnesium alloys with silicon nitride coating and uncoated AZ31 magnesium alloys in simulated body fluids on the surface of AZ31 magnesium alloys in different ways.

具体实施方式Detailed ways

下面结合实施例对本发明做进一步描述。The present invention will be further described below in conjunction with the examples.

实施例1:Example 1:

一种氮化硅涂层医用镁合金材料是制备方法,步骤如下:A silicon nitride coating medical magnesium alloy material is a preparation method, the steps are as follows:

1)将AZ91D镁合金基体打磨、在PG-1型抛光机上抛光后切割为长10mm、宽10mm、厚2mm的试样,在丙酮溶液中超声清洗除油10min,再在乙醇中超声清洗10min,最后在去离子水中超声清洗10min,干燥后进行喷砂处理3min;1) Grind the AZ91D magnesium alloy substrate, polish it on a PG-1 polishing machine, cut it into a sample with a length of 10 mm, a width of 10 mm, and a thickness of 2 mm, ultrasonically clean it in acetone solution for 10 minutes, and then ultrasonically clean it in ethanol for 10 minutes. Finally, it was ultrasonically cleaned in deionized water for 10 minutes, and then sandblasted for 3 minutes after drying;

2)把上述镁合金片放入RF-PECVD等离子体化学气相淀积台,沉积面朝上,系统抽空至真空度为1×10-5Pa,设定温度为250℃,频率13.56MHz,打开加热器,待沉积室温度稳定在250℃时开始沉积。选用的射频功率为200w,通过调节质量流量计(MFC)使硅烷和氨气的流量分别为SiH4和N2流量分别为50sccm和10sccm,淀积5min后,关闭反应气源、射频源和加热器,停止沉积,待试样冷却后取出,得到均匀致密的氮化硅涂层。2) Put the above-mentioned magnesium alloy sheet into the RF-PECVD plasma chemical vapor deposition station, with the deposition side facing up, evacuate the system to a vacuum of 1×10 -5 Pa, set the temperature at 250°C, and the frequency at 13.56MHz, and turn on Heater, start deposition when the temperature of the deposition chamber is stable at 250°C. The selected radio frequency power is 200w, by adjusting the mass flow meter (MFC) so that the flow of silane and ammonia are respectively SiH 4 and N 2 The flow rate is 50 sccm and 10 sccm respectively, after deposition for 5min, turn off the reaction gas source, radio frequency source and heating The device was used to stop the deposition, and the sample was taken out after cooling to obtain a uniform and dense silicon nitride coating.

该氮化硅涂层与未涂层的模拟体液中的极化曲线如附图所示,图中表明:采用该方法的氮化硅涂层,试样的极化电位升高,耐蚀性增强,证明氮化硅涂层增加镁合金基体耐蚀性的有效性。The polarization curves of the silicon nitride coating and the uncoated simulated body fluid are as shown in the attached figure, which shows that: the silicon nitride coating adopts this method, the polarization potential of the sample increases, and the corrosion resistance Enhancement, demonstrating the effectiveness of silicon nitride coatings in increasing the corrosion resistance of magnesium alloy substrates.

实施例2:Example 2:

一种氮化硅涂层医用镁合金材料是制备方法,步骤如下:A silicon nitride coating medical magnesium alloy material is a preparation method, the steps are as follows:

1)将AZ31镁合金基体打磨、在PG-1型抛光机上抛光后切割为长10mm、宽10mm、厚2mm的试样,在丙酮中超声清洗除油10min,再在乙醇中超声清洗10min,最后在去离子水中超声清洗10min,干燥后进行喷砂处理3min;1) Grind the AZ31 magnesium alloy substrate, polish it on a PG-1 polishing machine, cut it into a sample with a length of 10mm, a width of 10mm, and a thickness of 2mm, ultrasonically clean and remove oil in acetone for 10min, then ultrasonically clean in ethanol for 10min, and finally Ultrasonic cleaning in deionized water for 10 minutes, followed by sandblasting for 3 minutes after drying;

2)将上述镁合金片放入RF-PECVD设备的内腔沉积室,系统抽至真空度为1×10-4,设定温度为300℃,打开加热器,待沉积室温度稳定在300℃时开始沉积。选用的射频功率为80W,通过调节质量流量计(MFC)使硅烷和氨气的流量分别为30sccm和10sccm。沉积时间达到5min后,关闭反应气源、射频源和加热器,停止沉积,待合金片冷却后取出,得到均匀致密的氮化硅涂层。2) Put the above-mentioned magnesium alloy sheet into the inner cavity deposition chamber of the RF-PECVD equipment, pump the system to a vacuum of 1×10 -4 , set the temperature at 300°C, turn on the heater, and wait until the temperature of the deposition chamber is stabilized at 300°C start to deposit. The selected radio frequency power is 80W, and the flow rates of silane and ammonia are respectively 30 sccm and 10 sccm by adjusting a mass flow meter (MFC). After the deposition time reaches 5 minutes, turn off the reaction gas source, the radio frequency source and the heater, stop the deposition, and take out the alloy sheet after cooling to obtain a uniform and dense silicon nitride coating.

该氮化硅涂层与未涂层的模拟体液中的极化曲线如附图所示,图中表明:采用该方法的氮化硅涂层,试样的极化电位升高,耐蚀性增强,证明氮化硅涂层增加镁合金基体耐蚀性的有效性。The polarization curves of the silicon nitride coating and the uncoated simulated body fluid are as shown in the attached figure, which shows that: the silicon nitride coating adopts this method, the polarization potential of the sample increases, and the corrosion resistance Enhancement, demonstrating the effectiveness of silicon nitride coatings in increasing the corrosion resistance of magnesium alloy substrates.

实施例3:Example 3:

一种氮化硅涂层医用镁合金材料是制备方法,步骤如下:A silicon nitride coating medical magnesium alloy material is a preparation method, the steps are as follows:

1)将AZ31镁合金基体打磨、在PG-1型抛光机上抛光后切割为长10mm、宽10mm、厚2mm的试样,在丙酮中超声清洗除油10min,再在乙醇中超声清洗10min,最后在去离子水中超声清洗10min,干燥后进行喷砂处理3min;1) Grind the AZ31 magnesium alloy substrate, polish it on a PG-1 polishing machine, cut it into a sample with a length of 10mm, a width of 10mm, and a thickness of 2mm, ultrasonically clean and remove oil in acetone for 10min, then ultrasonically clean in ethanol for 10min, and finally Ultrasonic cleaning in deionized water for 10 minutes, followed by sandblasting for 3 minutes after drying;

2)将镁合金试样放入粒子束沉积设备中,以块状氮化硅作为靶材,在真空度为1×10-5Pa下,用氩离子轰击后再高温热处理,氩离子轰击电压为在60KeV,氩离子的密度为3×1016ions/cm3,将经氩离子轰击处理后的镁合金试样放入高温炉中,加热到300℃,保温2h,冷却后得到均匀致密的氮化硅涂层。2) Put the magnesium alloy sample into the particle beam deposition equipment, use bulk silicon nitride as the target, and bombard it with argon ions at a vacuum of 1×10 -5 Pa, then heat it at high temperature, and the argon ion bombardment voltage At 60KeV, the density of argon ions is 3×10 16 ions/cm 3 . Put the magnesium alloy sample bombarded by argon ions into a high-temperature furnace, heat it to 300°C, keep it for 2 hours, and obtain a uniform and dense Silicon nitride coating.

该氮化硅涂层与未涂层的模拟体液中的极化曲线如附图所示,图中表明:采用该方法的氮化硅涂层,试样的极化电位升高,耐蚀性增强,证明氮化硅涂层增加镁合金基体耐蚀性的有效性。The polarization curves of the silicon nitride coating and the uncoated simulated body fluid are as shown in the attached figure, which shows that: the silicon nitride coating adopts this method, the polarization potential of the sample increases, and the corrosion resistance Enhancement, demonstrating the effectiveness of silicon nitride coatings in increasing the corrosion resistance of magnesium alloy substrates.

Claims (5)

1.一种氮化硅涂层医用镁合金材料,其特征在于:由镁合金基材和在其表面附有的氮化硅涂层构成。1. A silicon nitride coating medical magnesium alloy material, characterized in that: it is made of a magnesium alloy base material and a silicon nitride coating attached on its surface. 2.一种如权利要求1所述氮化硅涂层医用镁合金材料是制备方法,其特征在于步骤如下:2. a silicon nitride coating medical magnesium alloy material as claimed in claim 1 is a preparation method, characterized in that the steps are as follows: 1)将镁合金试样打磨、抛光、除油后,进行喷砂处理以去除表面氧化皮、增加表面粗糙度和涂层和增强镁合金基体与涂层接合的牢固度;1) After grinding, polishing, and degreasing the magnesium alloy sample, perform sandblasting to remove surface oxide skin, increase surface roughness and coating, and enhance the firmness of the magnesium alloy substrate and coating; 2)将经上述处理后的镁合金试样采用射频等离子体增强化学气相沉积法或粒子束沉积法,在镁合金试样表面制备氮化硅陶瓷涂层。2) Using the above-mentioned treated magnesium alloy sample to prepare a silicon nitride ceramic coating on the surface of the magnesium alloy sample by radio frequency plasma enhanced chemical vapor deposition method or particle beam deposition method. 3.根据权利要求2所述氮化硅涂层医用镁合金材料是制备方法,其特征在于:所述射频等离子体增强化学气相沉积法的工艺参数为:将镁合金试样放入射频等离子体增强化学气相沉积设备的内腔沉积室中,系统抽至真空度为1×10-4-1×10-5Pa,以SiH4和NH3或N2混合气为反应气源,沉积温度为150-450℃、射频功率为80-400W的条件下,沉积时间为10s-60min,冷却后在合金表面制得氮化硅陶瓷涂层。3. according to the described silicon nitride coating medical magnesium alloy material of claim 2 is preparation method, it is characterized in that: the process parameter of described radio frequency plasma enhanced chemical vapor deposition method is: put magnesium alloy sample into radio frequency plasma In the inner cavity deposition chamber of the enhanced chemical vapor deposition equipment, the system is evacuated to a vacuum of 1×10 -4 -1×10 -5 Pa, with SiH 4 and NH 3 or N 2 mixed gas as the reaction gas source, and the deposition temperature is Under the conditions of 150-450°C and radio frequency power of 80-400W, the deposition time is 10s-60min, and silicon nitride ceramic coating is prepared on the alloy surface after cooling. 4.根据权利要求2所述氮化硅涂层医用镁合金材料是制备方法,其特征在于:所述SiH4和NH3或N2混合气中SiH4的流量为10-100sccm;SiH4和NH3或N2流量比l:0.2-1。4. according to the described silicon nitride coating medical magnesium alloy material of claim 2 is preparation method, it is characterized in that: described SiH 4 and NH 3 or N 2 The flow rate of SiH 4 in the mixed gas is 10-100sccm; SiH 4 and NH 3 or N 2 flow ratio l: 0.2-1. 5.根据权利要求2所述氮化硅涂层医用镁合金材料是制备方法,其特征在于:所述粒子束沉积法的工艺参数为:将镁合金试样放入粒子束沉积设备中,以块状氮化硅作为靶材,在真空度为1×10-5Pa下,用氩离子轰击后再高温热处理,氩离子轰击电压为10-100KeV,氩离子的密度为(1-5)×1016ions/cm3,热处理温度为200-450℃,热处理时间为2-12h。5. according to the described silicon nitride coating medical magnesium alloy material of claim 2 is preparation method, it is characterized in that: the process parameter of described particle beam deposition method is: magnesium alloy sample is put into particle beam deposition equipment, with Block silicon nitride is used as the target material, under the vacuum degree of 1×10 -5 Pa, it is bombarded with argon ions and then heat treated at high temperature. The bombardment voltage of argon ions is 10-100KeV, and the density of argon ions is (1-5)× 10 16 ions/cm 3 , the heat treatment temperature is 200-450°C, and the heat treatment time is 2-12h.
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