CN103197396B - Device fixed by picture frame - Google Patents
Device fixed by picture frame Download PDFInfo
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- CN103197396B CN103197396B CN201210005083.4A CN201210005083A CN103197396B CN 103197396 B CN103197396 B CN 103197396B CN 201210005083 A CN201210005083 A CN 201210005083A CN 103197396 B CN103197396 B CN 103197396B
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- picture frame
- screw
- fixing device
- sleeve
- screw sleeve
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- 238000001259 photo etching Methods 0.000 claims abstract description 5
- 238000012856 packing Methods 0.000 claims description 24
- 230000013011 mating Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 abstract description 6
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000008358 core component Substances 0.000 description 1
- 238000003306 harvesting Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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Abstract
nullThe present invention provides a kind of picture frame fixing device，It is for fixing upper picture frame in photo-etching machine objective lens picture frame and lower picture frame，The fixing device of described picture frame includes screw fixing device，Described screw fixing device includes screw sleeve and screw，Described screw sleeve is provided with sleeve external screw thread，Described upper picture frame is provided with the upper screwed hole with female thread corresponding to this sleeve external screw thread，The length of described screw sleeve is more than the thickness of described upper picture frame，Described screw sleeve is combined in the upper screwed hole of picture frame，The lower end of described screw sleeve contacts with the upper surface of described lower picture frame，Described screw is fixed in described lower picture frame through described screw sleeve，This picture frame fixture structure is simple，Easily install，Installation effectiveness is high，Stable firm，And the impact of the stress of generation when screw-driving will not be subject to and deform，Ensure that the quality of the face type of eyeglass and litho machine.
Description
Technical field
The present invention relates to litho machine and produce association area, particularly relate to the fixing device of a kind of picture frame.
Background technology
In the front end manufacture equipment of large-scale semiconductive integrated circuit, litho machine be the most complicated, require the highest equipment, and object lens are core components to its light harvesting mechanical & electrical technology in litho machine, are the hearts of litho machine, and therefore the designing requirement for object lens is significantly high.
Currently, the image quality of object lens requires more and more higher thus the requirement of eyeglass face type is also more and more higher, the fixed form of picture frame in objective lens design is just had higher requirement by this, object lens picture frame directly fixed by currently used screw is a common method, require over upper, increase packing ring between lower picture frame and carry out reconditioning to realize the adjustment of the angle of inclination of eyeglass and height in upper picture frame, the grinding of packing ring is required significantly high by such mode, but work efficiency is not high, assembling inconvenience, and easily eyeglass is produced stress to affect the quality of litho machine, therefore, this fixed form can not meet the fixed demand of modern object lens picture frame.
Summary of the invention
The present invention provides a kind of picture frame fixing device, can either meet the installation accuracy requirement of picture frame and eyeglass, not affect again the face type of eyeglass.
The present invention provides a kind of picture frame fixing device, it is for fixing upper picture frame in photo-etching machine objective lens picture frame and lower picture frame, the fixing device of described picture frame includes screw fixing device, described screw fixing device includes screw sleeve and screw, described screw sleeve is provided with sleeve external screw thread, described upper picture frame is provided with the upper screwed hole with female thread corresponding to this sleeve external screw thread, the length of described screw sleeve is more than the thickness of described upper picture frame, described screw sleeve is combined in the screwed hole of picture frame, the lower end of described screw sleeve contacts with the upper surface of described lower picture frame, described screw is fixed in described lower picture frame through described screw sleeve.
Further, described screw includes nut and threaded portion, one end of described threaded portion is connected with described nut, described threaded portion is provided with screw external screw thread, described lower picture frame is provided with and has and the lower screwed hole of this corresponding female thread of screw external screw thread, the other end of described threaded portion, after screw sleeve, by screwing with described lower screwed hole, is fixed in described lower picture frame.
Further, space is left between described threaded portion and described screw sleeve.
Further, described screw fixing device also includes bonded washer, and the other end of described threaded portion is fixed in described lower picture frame after sequentially passing through described bonded washer and screw sleeve.
Further, described bonded washer includes the first packing ring and the second packing ring, and a face of described first packing ring is concave surface, and a face of described second packing ring is convex surface, the mating shapes of described concave surface and convex surface.
Further, the quantity of described screw fixing device is three, and the equal angle in described three screw fixing device intervals is fixedly installed in described object lens picture frame.
Compared with prior art, the method have the advantages that
nullThe fixing device of this picture frame just can realize the angle of inclination of eyeglass in upper picture frame and upper by adjusting screw fixing device、The adjustment at lower eyeglass interval，When mounted，First screw sleeve is fixedly installed in upper picture frame，Get up to be positioned on screw sleeve by the first packing ring in bonded washer and the second washer combinations again，Then screw is connected through bonded washer and screw sleeve with lower picture frame，Screw sleeve in up-down adjustment screw fixing device，To adjust distance between upper picture frame and lower picture frame or angle of inclination，Finally screw-driving is fixed in lower picture frame，Complete the fixing work of object lens picture frame，This picture frame fixture structure is simple，Easily install，Installation effectiveness is high，Stable firm，And with the space between bonded washer and screw and screw sleeve，So on adjusting、Picture frame will not be produced too big torsional deformation when the distance of lower picture frame and angle of inclination，Thereby may be ensured that and picture frame will not be produced stress when screw-driving，Therefore the eyeglass in picture frame would not be subject to the impact of the stress of generation when screw-driving and deform，Ensure that the quality of the face type of eyeglass and litho machine.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the invention will be further described:
Structural representation when Fig. 1 is installed on picture frame for the fixing device of picture frame that the embodiment of the present invention provides.
The structural representation of the fixing device screw sleeve of picture frame that Fig. 2 provides for the embodiment of the present invention.
The sectional view of the fixing device screw sleeve of picture frame that Fig. 3 provides for the embodiment of the present invention.
The structural representation of the picture frame fixing device combination packing ring that Fig. 4 provides for the embodiment of the present invention.
The structural representation of the fixing device of picture frame that Fig. 5 provides for the embodiment of the present invention.
Partial section when Fig. 6 is installed on picture frame for the fixing device of picture frame that the embodiment of the present invention provides.
In Fig. 1 to Fig. 6,
100: screw fixing device；110: screw sleeve；120: screw；121: nut；122: threaded portion；200: bonded washer；210: the first packing rings；220: the second packing rings；300: picture frame；310: upper picture frame；311: upper screwed hole；320: lower picture frame；321: lower screwed hole；400: eyeglass.
Detailed description of the invention
The fixing device of the picture frame present invention proposed below in conjunction with the drawings and specific embodiments is described in further detail.According to the following describes and claims, advantages and features of the invention will be apparent from.It should be noted that, accompanying drawing all adopts the form simplified very much and all uses non-ratio accurately, only in order to convenience, the purpose aiding in illustrating the embodiment of the present invention lucidly.
nullThe core concept of the present invention is in that，There is provided a kind of picture frame fixing device，It is for fixing upper picture frame in photo-etching machine objective lens picture frame and lower picture frame，The fixing device of described picture frame includes screw fixing device，Described screw fixing device includes screw sleeve and screw，Described screw sleeve is provided with sleeve external screw thread，Described upper picture frame is provided with the screwed hole with female thread corresponding to this sleeve external screw thread，The length of described screw sleeve is more than the thickness of described upper picture frame，Described screw sleeve is combined in the upper screwed hole of picture frame，The lower end of described screw sleeve contacts with the upper surface of described lower picture frame，Described screw is fixed in described lower picture frame through described screw sleeve，The fixing device of this picture frame just can realize the angle of inclination of eyeglass in upper picture frame and upper by adjusting screw fixing device、The adjustment at lower eyeglass interval，When mounted，First screw sleeve is fixedly installed in upper picture frame，Get up to be positioned on screw sleeve by the first packing ring in bonded washer and the second washer combinations again，Then screw is connected through bonded washer and screw sleeve with lower picture frame，Screw sleeve in up-down adjustment screw fixing device，To adjust distance between upper picture frame and lower picture frame or angle of inclination，Finally screw-driving is fixed in lower picture frame，Complete the fixing work of object lens picture frame，This picture frame fixture structure is simple，Easily install，Installation effectiveness is high，Stable firm，And with the space between bonded washer and screw and screw sleeve，So on adjusting、Picture frame will not be produced too big torsional deformation when the distance of lower picture frame and angle of inclination，Thereby may be ensured that and picture frame will not be produced stress when screw-driving，Therefore the eyeglass in picture frame would not be subject to the impact of the stress of generation when screw-driving and deform，Ensure that the quality of the face type of eyeglass and litho machine.
Refer to Fig. 1 to Fig. 6, structural representation when Fig. 1 is installed on picture frame for the fixing device of picture frame that the embodiment of the present invention provides, the structural representation of the fixing device screw sleeve of picture frame that Fig. 2 provides for the embodiment of the present invention, the sectional view of the fixing device screw sleeve of picture frame that Fig. 3 provides for the embodiment of the present invention, the structural representation of the picture frame fixing device combination packing ring that Fig. 4 provides for the embodiment of the present invention, the structural representation of the fixing device of picture frame that Fig. 5 provides for the embodiment of the present invention, partial section when Fig. 6 is installed on picture frame for the fixing device of picture frame that the embodiment of the present invention provides.
nullThe present invention provides a kind of picture frame fixing device，It is for fixing upper picture frame in photo-etching machine objective lens picture frame 300 310 and lower picture frame 320，The fixing device of described picture frame includes screw fixing device 100，Described screw fixing device 100 includes screw sleeve 110 and screw 120，Described screw sleeve 110 is provided with sleeve external screw thread，Described upper picture frame 310 is provided with the upper screwed hole 311 with female thread corresponding to this sleeve external screw thread，The length of described screw sleeve 110 is more than the thickness of described upper picture frame 310，Described screw sleeve 110 is combined in the upper screwed hole 311 of picture frame 310，The lower end of described screw sleeve 110 contacts with the upper surface of described lower picture frame 320，Described screw 120 is fixed in described lower picture frame 320 through described screw sleeve 110.
Further, described screw 120 includes nut 121 and threaded portion 122 i.e. screw rod, one end of described threaded portion 122 is connected with described nut 121, described threaded portion 122 is provided with screw external screw thread, described lower picture frame 320 is provided with and has and the lower screwed hole 321 of this corresponding female thread of screw external screw thread, the other end of described threaded portion 122 is after screw sleeve 110, by screwing with described lower screwed hole 321, it is fixed in described lower picture frame 320, screw 120 can be made to be combined in the lower screwed hole 321 of lower picture frame 320 by such structure, the fixed effect making this screw fixing device 100 is more notable, dismounting only need to screw out screw 120 adjustment screw sleeve 110 with when adjusting, make installation and adjust more convenient.
Further, space is left between described screw 120 and described screw sleeve 110, space enough between screw 120 with screw sleeve 110 will not produce because screw 120 touches with screw sleeve 110 phase when both can ensure that the angle of inclination of picture frame 310 on regulating on the stress of picture frame 310, thus affecting face the type even quality of litho machine of eyeglass 400.
Further, described screw fixing device 100 also includes bonded washer 200, the other end of described threaded portion 122 is fixed in described lower picture frame 320 after sequentially passing through described bonded washer 200 and screw sleeve 110, described bonded washer 200 can reduce the friction between screw 120 and screw sleeve 110 and collision, thus decrease this screw fixing device 100 in installation process on the stress of picture frame 310 and lower picture frame 320.
Further, described bonded washer 200 includes the first packing ring 210 and the second packing ring 220, one face of described first packing ring 210 is concave surface, one face of described second packing ring 220 is convex surface, the mating shapes of described concave surface and convex surface, when upper picture frame 310 plays picture frame 320 to have angle of inclination relatively, screw 120 and screw sleeve 110 can produce certain angle, but the first packing ring 210 and the second packing ring 220 still can be close on screw 120 and screw sleeve 110, so just collision between screw 120 and screw sleeve 110 is reduced when tightening screw 120 to stress produced by picture frame 300, serve the effect well protecting eyeglass 400.
Further, the quantity of described screw fixing device 100 is three, the equal angle in described three screw fixing device 100 intervals is fixedly installed in described object lens picture frame 300, and described three screw fixing devices 100 can freely regulate the distance between picture frame 310 and lower picture frame 320 and angle of inclination.
Functional realiey process below in conjunction with the fixing device of picture frame that Fig. 1 to Fig. 6 more detailed description embodiment of the present invention provides.
nullThe fixing device of this picture frame just can realize the angle of inclination of eyeglass 400 and the adjustment at interval between upper picture frame 310 and lower picture frame 320 in upper picture frame 310 by adjusting three screw fixing devices 100，When mounted，First screw sleeve 110 is screwed in the upper screwed hole 311 of upper picture frame 310，The lower end of screw sleeve 110 is touched the upper surface of lower picture frame 320，Get up to be positioned on screw sleeve 110 by the concave surface of the first packing ring 210 in bonded washer 200 and the convex combinations thereof of the second packing ring 220 again，Then the threaded portion 122 of screw 120 is connected through bonded washer 200 and screw sleeve 110 with lower picture frame 320，If now continuing to regulate downwards screw sleeve 110，Then go up picture frame 310 can move up near one end of this screw fixing device 100 generation angle of inclination，If wanting to regulate the distance between picture frame 310 and lower picture frame 320，Then the screw sleeve 110 in three screw fixing devices 100 is regulated all downwards identical distance，Continue to regulate three screw sleeves 110 to reach on desirably、Lower picture frame interval and angle of inclination，Finally the threaded portion 122 of screw 120 is tightened in the lower screwed hole 321 being fixed on lower picture frame 320，The nut 121 making screw 120 tightly suppresses screw sleeve 110 by bonded washer 200，Complete the fixing work of object lens picture frame 300，This picture frame fixture structure is simple，Easily install，Installation effectiveness is high，Stable firm，And with the space between threaded portion 122 and the screw sleeve 110 of bonded washer 200 and screw 120，So on adjusting、Picture frame 300 will not be produced too big torsional deformation when the distance of lower picture frame and angle of inclination，Thereby may be ensured that and picture frame 300 will not be produced stress when screw 120 is tightened，Therefore the eyeglass 400 in picture frame 300 would not be subject to the impact of the stress of generation when screw 120 is tightened and deform，Ensure that the quality of the face type of eyeglass 400 and litho machine.
Obviously, the present invention can be carried out various change and deformation without deviating from the spirit and scope of the present invention by those skilled in the art.So, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (4)
1. the fixing device of picture frame, for fixing upper picture frame in photo-etching machine objective lens picture frame and lower picture frame, it is characterized in that: include screw fixing device, described screw fixing device includes screw sleeve and screw, described screw sleeve is provided with sleeve external screw thread, described upper picture frame is provided with the upper screwed hole with female thread corresponding to this sleeve external screw thread, the length of described screw sleeve is more than the thickness of described upper picture frame, described screw sleeve is combined in the upper screwed hole of picture frame, the lower end of described screw sleeve contacts with the upper surface of described lower picture frame, described screw is fixed in described lower picture frame through described screw sleeve；
Described screw includes nut and threaded portion, one end of described threaded portion is connected with described nut, described threaded portion is provided with screw external screw thread, described lower picture frame is provided with and has and the lower screwed hole of this corresponding female thread of screw external screw thread, the other end of described threaded portion is after screw sleeve, by screwing with described lower screwed hole, it is fixed in described lower picture frame；
Leave space between described threaded portion with described screw sleeve and do not contact.
2. the fixing device of picture frame according to claim 1, it is characterised in that described screw fixing device also includes bonded washer, and the other end of described threaded portion is fixed in described lower picture frame after sequentially passing through described bonded washer and screw sleeve.
3. the fixing device of picture frame according to claim 2, it is characterized in that, described bonded washer includes the first packing ring and the second packing ring, and a face of described first packing ring is concave surface, one face of described second packing ring is convex surface, the mating shapes of described concave surface and convex surface.
4. the fixing device of picture frame according to any one of claims 1 to 3, it is characterised in that the quantity of described screw fixing device is three, the equal angle in described three screw fixing device intervals is fixedly installed in described object lens picture frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210005083.4A CN103197396B (en) | 2012-01-09 | 2012-01-09 | Device fixed by picture frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210005083.4A CN103197396B (en) | 2012-01-09 | 2012-01-09 | Device fixed by picture frame |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103197396A CN103197396A (en) | 2013-07-10 |
| CN103197396B true CN103197396B (en) | 2016-07-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210005083.4A Active CN103197396B (en) | 2012-01-09 | 2012-01-09 | Device fixed by picture frame |
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| Country | Link |
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| CN (1) | CN103197396B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109752810A (en) * | 2017-11-02 | 2019-05-14 | 扬明光学股份有限公司 | Optical path adjustment mechanism and manufacturing method thereof |
| CN110542973A (en) * | 2019-02-18 | 2019-12-06 | 广州长步道光电科技有限公司 | Floating zooming mechanical structure |
| CN110955058B (en) * | 2019-12-17 | 2021-08-10 | 中国工程物理研究院应用电子学研究所 | Three-freedom stress releaser |
| CN111897123A (en) * | 2020-08-24 | 2020-11-06 | 嘉兴锐星光学仪器有限公司 | A Cassegrain-style astronomical telescope |
| CN113933950A (en) * | 2021-10-26 | 2022-01-14 | 中国科学院光电技术研究所 | A device for adjusting and aligning optical components |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1688822A (en) * | 2002-10-07 | 2005-10-26 | 盖茨公司 | Tolerance compensating mounting device |
| CN101241221A (en) * | 2007-10-11 | 2008-08-13 | 中国科学院长春光学精密机械与物理研究所 | A Stable Adjustment Device for Refraction of Optical Axis in Refraction Optical Path |
| CN201368109Y (en) * | 2009-03-16 | 2009-12-23 | 无锡创明传动工程有限公司 | Bolt washer combination structure used for transmitting torque with coating |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10342526B4 (en) * | 2003-09-12 | 2006-04-27 | Robert Bosch Gmbh | camera assembly |
-
2012
- 2012-01-09 CN CN201210005083.4A patent/CN103197396B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1688822A (en) * | 2002-10-07 | 2005-10-26 | 盖茨公司 | Tolerance compensating mounting device |
| CN101241221A (en) * | 2007-10-11 | 2008-08-13 | 中国科学院长春光学精密机械与物理研究所 | A Stable Adjustment Device for Refraction of Optical Axis in Refraction Optical Path |
| CN201368109Y (en) * | 2009-03-16 | 2009-12-23 | 无锡创明传动工程有限公司 | Bolt washer combination structure used for transmitting torque with coating |
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| Publication number | Publication date |
|---|---|
| CN103197396A (en) | 2013-07-10 |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |