CN103186058A - Mask platform system with six-degree-of-freedom coarse drive platform - Google Patents

Abstract

A mask table system with a six-degree-of-freedom coarse motion table is mainly used in a photolithography machine system. The system includes a coarse motion table, a fine motion table and a frame; the coarse motion table includes a coarse motion table body, a driving device and a gravity balance component of the coarse motion table, and the coarse motion table body is arranged outside the fine motion table, and the fine motion table The moving table is surrounded in the middle; the driving device includes two sets of X-direction linear motors arranged symmetrically about the X-axis direction and four sets of two-degree-of-freedom linear motors simultaneously driving the Y-direction and Z-direction to realize the six-degree-of-freedom motion of the coarse motion table. The six-degree-of-freedom coarse motion stage cooperates with the six-degree-of-freedom fine motion stage, which not only improves the speed, acceleration and control bandwidth of the mask stage while adjusting the attitude of the mask stage, but also meets the requirements of high motion accuracy and positioning accuracy, and then The productivity, overlay accuracy and resolution of the lithography machine are improved.

Description

A mask stage system with a six-degree-of-freedom coarse motion stage

technical field

The invention relates to a photolithography machine mask table system, which is mainly used in semiconductor photolithography machines and belongs to the technical field of semiconductor manufacturing equipment. the

Background technique

In the production process of integrated circuit chips, the exposure transfer (photolithography) of the design pattern of the chip on the photoresist on the surface of the silicon wafer is one of the most important processes. The equipment used in this process is called a photolithography machine (exposure machine). The resolution and exposure efficiency of the lithography machine greatly affect the characteristic line width (resolution) and productivity of the integrated circuit chip. As the key system of the lithography machine, the motion accuracy and work efficiency of the mask table system largely determine the resolution and exposure efficiency of the lithography machine. the

The basic principle of the step-and-scan projection lithography machine is: the deep ultraviolet light from the light source passes through the reticle on the mask table, and the lens system images a part of the pattern on the reticle on a chip of the silicon wafer. In order to expose a chip on the silicon wafer, the mask stage and the silicon wafer stage need to be accelerated separately, and when they move to the exposure starting position, they must simultaneously reach the speed of 4:1 required by the scanning exposure. After that, the wafer stage moves in the direction of scanning motion at a uniform speed, and the mask stage moves in the direction opposite to the scanning motion of the wafer stage at a speed four times the scanning speed of the wafer stage. Precise synchronization, and finally image all the patterns on the reticle on a specific chip (Chip) on the silicon wafer. When a chip is scanned, the mask stage and wafer stage respectively decelerate, and at the same time, the wafer stage performs stepping motion to move the next chip to be exposed to below the projection objective lens. After that, the mask stage accelerates, scans, and decelerates in the direction opposite to the direction of the last scanning movement, and the wafer stage accelerates, scans, and decelerates in the direction planned, and completes the exposure of a chip during the synchronous scanning process. This is repeated continuously, the mask table performs linear motions of acceleration, scanning, and deceleration back and forth, and the silicon wafer table performs stepping and scanning motions according to the planned trajectory to complete the exposure of the entire silicon wafer. the

According to the motion requirements of the mask table, the mask table mainly provides the function of ultra-precise high-speed linear motion back and forth along the scanning direction. Its stroke should meet 4 times of the chip length, plus the distance of acceleration and deceleration; its scanning speed should be 4 times of the scanning speed of the silicon wafer table, and the maximum acceleration will be higher than the maximum acceleration of the silicon wafer table accordingly. According to the technical indicators of typical foreign lithography machine products, the stroke of the mask table exceeds 100mm (some models reach 200mm), the scanning speed reaches 1000mm/s, and the maximum acceleration reaches 20m/s ² , that is, 2g. Improving the scanning speed and acceleration of the mask table (the silicon wafer table is also increased simultaneously) can effectively improve the productivity of the lithography machine.

The most important thing is that the mask stage must be able to achieve ultra-high-precision synchronous movement with the scanning movement of the silicon wafer stage. For a 45nm lithography machine, its synchronization accuracy requires MA (moving average deviation) to be less than 2.25nm, MSD (moving standard deviation) is less than 5.4nm. Among them, MA mainly affects the overlay accuracy of exposure, and MSD mainly affects the exposure resolution. the

In order to meet the strict requirements of large stroke, high speed and high precision of the mask table, the traditional mask table system usually adopts a coarse-fine motion lamination driving structure. The mask table system consists of a coarse motion table and a fine motion table superimposed on it. Among them, the coarse motion table is driven by a high-speed and large-stroke bilateral drive system composed of a left linear motor and a right linear motor, supported by air-floating guide rails; the fine motion table is driven by a voice coil motor in the X direction and a voice coil motor in the Y direction. The mask table is fine-tuned in real time and with high precision to meet its motion precision requirements. When this laminated drive structure is in motion, the double-sided drive structure of the underlying linear motor with single-degree-of-freedom reciprocating motion is supported by air-floating guide rails. The structure is complex and the assembly accuracy is extremely high, which limits the motion accuracy of the mask table and hinders increased its acceleration. the

Contents of the invention

In order to improve the acceleration, speed and positioning accuracy of the mask table of the lithography machine, and then promote the productivity, overlay accuracy and resolution of the lithography machine, and reduce the assembly accuracy requirements, the purpose of the present invention is to provide a six-degree-of-freedom Mask stage system for coarse motion stage. the

Technical scheme of the present invention is as follows:

A mask table system with a six-degree-of-freedom coarse motion table, the system includes a fine motion table, a coarse motion table and a frame, and the coarse motion table includes a coarse motion table body and a driving device, and is characterized in that: The body of the coarse motion table is arranged outside the fine motion table, surrounding the fine motion table in the middle; the drive device includes two parts: a large stroke drive module and a small stroke drive module, and the large stroke drive module consists of two groups about The X-axis direction is composed of X-direction linear motors symmetrically arranged on both sides of the coarse motion table body. The small-stroke drive module is composed of four sets of two-degree-of-freedom linear motors that simultaneously drive the Y-direction and Z-direction. Four sets of two-degree-of-freedom linear motors The two are symmetrically arranged on both sides of the coarse motion table body with respect to the X-axis direction, and are located under the large-stroke drive module;

The coarse motion table also includes two gravity balance components of the coarse motion table, and the two gravity balance components of the coarse motion table are arranged above the body of the coarse motion table, symmetrically arranged on both sides of the body of the coarse motion table along the X-axis direction. On the side, each coarse motion table gravity balance assembly includes a coarse motion table gravity balance magnetic guide plate and two coarse motion table gravity balance permanent magnets, the coarse motion table gravity balance magnetic guide plate is connected with the permanent magnet array of the X-direction linear motor At the same time, the gravity balance permanent magnets of the coarse motion table are respectively arranged on the upper surface of the coarse motion table body, and the sides along the X-axis direction are arranged symmetrically with respect to the Y-axis direction, and there is a gap with the gravity balance magnetic plate of the coarse motion table. the

A mask table system with a six-degree-of-freedom coarse motion table according to the present invention is characterized in that: each of the X-direction linear motors is composed of two sets of permanent magnet arrays and one set of coil arrays; each of the two The degree of freedom linear motor consists of a set of permanent magnet arrays and a set of coil arrays, and two two-degree-of-freedom linear motors on the same side along the X direction share a set of permanent magnet arrays; two sets of permanent magnet arrays of the X-direction linear motor and two The four sets of permanent magnet arrays of the degree of freedom linear motor are all fixed on the horizontal plane on the frame; the two sets of coil arrays of the X-direction linear motor and the four sets of coil arrays of the two-degree-of-freedom linear motor are respectively fixed on the coarse motion table body . the

A mask table system with a six-degree-of-freedom coarse motion table according to the present invention is characterized in that: the fine motion table includes a fine motion table body, a Lorentz motor, and a gravity compensation component of the fine motion table; The above-mentioned Lorentz motors include three kinds of Lorentz motors, each of which is symmetrically distributed on both sides of the fine motion table body along the Y-axis direction, wherein the driving direction of the first Lorentz motor is along the X-axis direction, arranged symmetrically about the X-axis, at least two on each side, driving the fine motion table body to move along the X direction and the direction of rotation around the Z-axis; the driving direction of the second type of Lorentz motor is along the Y-axis direction and passes through the precision The center of mass of the moving table, at least one on each side, drives the fine moving table body to move in the Y direction; the third type of Lorentz motor is located on the four corners of the fine moving table body, and is symmetrically arranged about the X axis, with two on each side One, its driving direction is along the Z-axis direction, and drives the precision moving table body to move along the Z-axis direction, the rotation direction around the X-axis and the Y-axis rotation direction. the

A mask table system with a six-degree-of-freedom coarse motion table according to the present invention is characterized in that: the fine motion table gravity compensation assembly includes four fine motion table gravity compensation units, and each fine motion table gravity compensation The unit is composed of a precision table gravity balance magnetic guide plate and a precision table gravity balance permanent magnet. The four precision table gravity compensation units are respectively distributed on the four corners of the precision table body, of which four The gravity balance magnetic guide plate of the fine motion table is respectively fixed on the body of the coarse motion table; Correspondingly, at the same time, there is a gap between the gravity balance magnetic plate of the fine motion table. the

A mask stage system with a six-degree-of-freedom coarse motion stage according to the present invention is characterized in that: the body of the coarse motion stage is a thin-walled shell made of silicon carbide ceramic material. The body of the precision moving table is a thin-walled shell made of silicon carbide ceramic material. the

A mask stage system with a six-degree-of-freedom coarse motion stage according to the present invention is characterized in that: the coil arrays of the two sets of X-direction linear motors and the four sets of coil arrays of the two-degree-of-freedom linear motors are all made of A one-dimensional array composed of iron-less rectangular coils; the permanent magnet arrays of the two sets of X-direction linear motors adopt a one-dimensional halbach type permanent magnet array, and the permanent magnet arrays of a two-degree-of-freedom linear motor adopt a planar halbach type permanent magnet array. the

A mask table system with a six-degree-of-freedom coarse motion table according to the present invention has the following advantages and outstanding effects: ①Compared with the traditional mask table supported by air-floating guide rails, the mask table described in the present invention The magnetic levitation support simplifies the system structure, avoids the vibration and noise introduced by the air flotation, and can meet the high vacuum environment required by extreme ultraviolet lithography, and the attractive force of the magnetic levitation device balances the mask table and its appendages Most of the gravity. ②Compared with the traditional single-degree-of-freedom coarse motion table with double-sided driving junction structure, the structure of the six-degree-of-freedom coarse motion table of the present invention increases the flexibility of the mover in the system, which not only reduces the assembly requirements of the system, but also improves the The response speed, acceleration and motion positioning accuracy of the mask table, thereby improving the productivity, overlay accuracy and resolution of the lithography machine. the

Description of the figure

FIG. 1 is a schematic structural diagram of a mask stage system with a six-degree-of-freedom coarse motion stage according to the present invention. the

Fig. 2 is a structural schematic diagram of the gravity balance assembly of the coarse motion table and the gravity balance assembly of the fine motion table according to the present invention. the

FIG. 3 is a schematic structural view of a X-direction linear motor of a mask stage system with a six-degree-of-freedom coarse motion stage according to the present invention, with the first permanent magnet array removed. the

Fig. 4 is a schematic structural diagram of a mask stage system with a six-degree-of-freedom coarse motion stage according to the present invention, with the coil of the two-degree-of-freedom linear motor removed from one side of the third permanent magnet array. the

FIG. 5 is a three-dimensional schematic diagram of an ironless coil used in a mask stage system with a six-degree-of-freedom coarse motion stage according to the present invention. the

6 is a schematic diagram of the magnetization direction of the X-direction linear motor permanent magnet array in a mask stage system with a six-degree-of-freedom coarse motion stage according to the present invention. the

7 is a schematic diagram of the magnetization direction of the permanent magnet array of the two-degree-of-freedom linear motor in a mask stage system with a six-degree-of-freedom coarse motion stage according to the present invention. the

In the figure: 1—fine motion table body; 2—coarse motion table body; 3—the first X-direction linear motor; 4—the second X-direction linear motor; 5—the first two-degree-of-freedom linear motor; 6—the first Two-degree-of-freedom linear motor; 7—third two-degree-of-freedom linear motor; 8—fourth two-degree-of-freedom linear motor; 11—coarse motion table gravity balance magnetic plate; 12—coarse motion table gravity balance permanent magnet; 13— 14—the second large coil array; 15—the first small coil array; 16—the second small coil array; 17—the third small coil array; 18—the fourth small coil array; 21—the first Permanent magnet array; 22—the second permanent magnet array; 23—the third permanent magnet array; 31—the gravity balance magnetic guide plate of the fine motion table; 32—the gravity balance permanent magnet of the fine motion table. the

Detailed ways

The specific structure, mechanism and working process of the present invention will be further described below in conjunction with the accompanying drawings. the

The present invention provides a mask table system with six degrees of freedom coarse motion table, as shown in Figure 1 and Figure 2, the system includes a coarse motion table, a fine motion table and a frame, and the coarse motion table contains a coarse motion table The table body 2, the driving device and two gravity balance components of the coarse motion table; the table body 2 of the coarse motion table is set on the outside of the fine motion table, and is a thin-walled shell made of sintered silicon carbide ceramic material; the drive device It includes two parts: a large stroke drive module and a small stroke drive module. The large-stroke driving module is composed of two groups of first X-direction linear motors 3 and second X-direction linear motors 4 that are symmetrically arranged on both sides of the coarse motion table body 2 with respect to the X direction, and are responsible for driving the mask table coarse motion table in X Reciprocating linear motion with a large stroke in the direction; while the small stroke drive module is driven by four groups of the first two-degree-of-freedom linear motor 5, the second two-degree-of-freedom linear motor 6, and the third two-degree-of-freedom linear motor in the Y direction and Z direction The linear motor 7 and the fourth two-degree-of-freedom linear motor 8 are composed of four sets of two-degree-of-freedom linear motors, which are symmetrically arranged on both sides of the coarse motion table body 2 in pairs about the X direction, and are located below the large-stroke drive module. The four sets of two-degree-of-freedom linear motors are responsible for adjusting the small stroke displacement of the mask table coarse motion table in the Y-axis and Z-axis directions, and the small range of rotation angles of the three degrees of freedom around the X-axis, Y-axis and Z-axis Rotation; using a control algorithm based on d-q decomposition, the linear motor in the X direction can only provide thrust in the X direction, and the thrust in the Y and Z directions is close to zero; the linear motor in the Y and Z directions only produces thrust in the Y and Z directions, and the X direction The thrust in the direction is close to zero. the

The two coarse motion table gravity balance assemblies are symmetrically arranged on both sides of the coarse motion table body with respect to the X-axis direction, and each coarse motion table gravity balance assembly includes a coarse motion table gravity balance magnetic guide plate 11 and two coarse motion table gravity balance components. Platform gravity balance permanent magnet 12. Each coarse motion table gravity balance magnetic guide plate 11 is connected with the stator part of the X-direction linear motor on the same side, and two coarse motion table gravity balance permanent magnets 12 are respectively installed on the coarse motion table body 2 along the X-axis direction. On the two corners of the side, and keep a certain gap with the gravity balance magnetic guide plate 11 of the coarse motion table;

Each X-direction linear motor is composed of a first permanent magnet array 21, a second permanent magnet array 22 and a group of large coil arrays; each two-degree-of-freedom linear motor is composed of a third permanent magnet array 23 and a group of small Composed of coil arrays, and two two-degree-of-freedom linear motors on the same side along the X direction share a set of third permanent magnet arrays 23; the first permanent magnet array 21 and the second permanent magnet array 22 of all X-direction linear motors and All the third permanent magnet arrays 23 of the two-degree-of-freedom linear motors are fixed on the horizontal plane on the lithography machine frame; all the large coil arrays and small coil arrays are respectively fixed on the coarse motion table body 2;

The large coil array of the X-direction linear motor for coarse motion of the present invention and the small coil array of the two-degree-of-freedom linear motor are both one-dimensional coils composed of ironless rectangular coils (as shown in Figure 5) concentrically wound with copper wires. Array, the support of the coil is made of non-ferromagnetic components (such as aluminum alloy);

The first permanent magnet array 21 and the second permanent magnet array 22 of the coarse-motion X-direction linear motor of the present invention are a one-dimensional halbach type permanent magnet array formed by bonding a group of rectangular parallelepiped rare earth permanent magnets on a thin rectangular yoke. Magnetic array, the volume of the permanent magnet whose magnetization direction is parallel to the array direction in the first permanent magnet array 21 and the second permanent magnet array 22 is smaller than the permanent magnet whose magnetization direction is perpendicular to the array direction (as shown in Figure 6, among the figure "N", "S" represent the N pole and the S pole of the permanent magnet, and now the magnetization direction of the permanent magnet is perpendicular to the paper. The third permanent magnet array 23 of the described two-degree-of-freedom linear motor is also in a rectangular thin A group of planar halbach permanent magnet arrays arranged by rectangular parallelepiped rare earth permanent magnets are bonded to the yoke, and the volume of the permanent magnets whose magnetization direction is parallel to the array direction in the third permanent magnet array 23 is also smaller than the magnetization direction and the array direction Vertical permanent magnet (as shown in Figure 7). 

The fine motion table is a six-degree-of-freedom micro-motion worktable, which includes a fine motion table body 1, a Lorentz motor and a gravity compensation component of the fine motion table; the Lorentz motor includes three types of Lorentz motors, and each Lorentz motor The Lorentz motors are symmetrically distributed on both sides of the fine motion table body 1 along the Y-axis direction, wherein the driving direction of the first type of Lorentz motors is along the X-axis direction, symmetrically arranged with respect to the X-axis, at least two on each side, Drive the precision table body 1 to move along the X direction and the direction of rotation around the Z axis; the driving direction of the second Lorentz motor is along the Y axis direction and pass through the center of mass of the precision table, at least one on each side, to drive the precision table body 1. Move along the Y direction; the third type of Lorentz motor is located on the four corners of the precision table body, and is symmetrically arranged about the X-axis, two on each side, and its driving direction is along the Z-axis direction to drive the precision table The table body moves along the Z direction, the rotation direction around the X axis and the Y axis rotation direction;

The gravity compensation assembly of the precision table includes four sets of gravity compensation units of the fine table, and each gravity compensation unit of the fine table is composed of a gravity balance magnetic guide plate 31 of the fine table and a permanent magnet 32 of the gravity balance of the fine table. Four groups of fine motion table gravity compensation units are distributed on the four corners of the fine motion table body 1, wherein all the fine motion table gravity balance magnetic guide plates 31 are fixed on the coarse motion table body 2, and all the fine motion table gravity The balance permanent magnet 32 is fixed on the corresponding position of each precision table gravity balance magnetic guide plate 31 on the fine motion table body 1, and has a certain gap with the fine motion table gravity balance magnetic guide plate, and the fine motion table body 1 It is a thin-walled shell made of silicon carbide ceramic material;

In the mask stage system described in the present invention, its working phase is divided into three phases: start-up phase, normal operation phase and stop phase. The working principle of the start-up phase is as follows: before the system is powered on, the attractive force of the gravity balance device is less than the gravity of the mask table coarse motion table and the fine motion table, and the mask table stops slightly above the upper surface of the second permanent magnet array 22 On a fixed station on the lithography machine frame. After the system is powered on, the four two-degree-of-freedom linear motors provide upward thrust in the Z direction, pushing the mover part of the coarse motion table to move upward to the working position, and then adjust the mover part of the coarse motion table during the working process of the mask table The position along the Z axis, and the attitude of the two degrees of freedom of the rotation around the X axis and the rotation around the Y direction, on the other hand, cooperate with the gravity balance device to balance the mover part of the coarse motion table, that is, the mask table and its accessories. The gravity of the object keeps the mover part of the coarse motion table and the fine motion table in a suspended state all the time. At the same time, four two-degree-of-freedom linear motors provide thrust in the Y direction, and adjust the attitudes of the two degrees of freedom of the mover part of the coarse motion table and the translational motion of the fine motion table along the Y-axis and the rotation around the Z-axis, so that the coarse motion The mover part of the table and the fine motion table reach the position and attitude required by the work, and adjust the aforementioned five degrees of freedom in real time during the entire work process to meet the positioning requirements of the system for these five degrees of freedom. Then, the two X-direction linear motors adopt bilateral drive mode to drive the mover part of the coarse motion table, that is, the mover part of the coarse motion table and the fine motion table to accelerate, decelerate and reciprocate at a uniform speed in the X direction to reach the working speed required by the system. , to complete the startup phase. the

After that, the system enters the normal working stage, and the driving device fine-tunes the speed and attitude of the mover part of the coarse motion table and the fine motion table in the X-direction linear motor working area to meet the speed and position requirements of the system, and at the same time compensate the system energy dissipation. When the mover part of the coarse movement table and the fine movement table move to the end of the stroke in the +X direction, the linear motor in the X direction decelerates to stop, and then accelerates in the reverse direction, so that the mover part of the coarse movement table and the fine movement table move to -X direction movement to the end of the stroke, the X-direction linear motor decelerates until it stops, and so reciprocates. the

In the stop stage, when the mover part of the coarse motion table and the fine motion table move above the static station at low speed, then all the driving devices cooperate with deceleration to stop on the static station. the

The mask stage system of the present invention adopts magnetic levitation support, does not need an air flotation system, simplifies the system structure, avoids vibration and noise introduced by air flotation, and can meet the high vacuum environment required by extreme ultraviolet lithography. the

On the other hand, compared with the traditional coarse and fine motion lamination structure, the mask table system of the present invention provides a coarse motion table structure with six degrees of freedom motion function, which not only ensures the thrust of the scanning motion but also improves the The motion accuracy is improved, and the high-precision assembly requirements of the coarse motion table are reduced. Without changing the motion accuracy, the precision requirements for the design and manufacture of parts are greatly simplified, and the productivity, overlay accuracy and resolution of the lithography machine are improved. Rate. the

Claims (7)

1. A mask table system with a six-degree-of-freedom coarse motion table, the system includes a fine motion table, a coarse motion table and a frame, and the coarse motion table includes a coarse motion table body (2) and a driving device , is characterized in that: the body (2) of the coarse motion table is arranged outside the fine motion table, enclosing the fine motion table in the middle; the drive device includes two parts: a large stroke drive module and a small stroke drive module, The large-stroke drive module consists of two sets of X-direction linear motors symmetrically arranged on both sides of the coarse motion table body (2) with respect to the X-axis direction, and the small-stroke drive module consists of four sets of two-degree-of-freedom linear motors that simultaneously drive the Y and Z directions. Composed of motors, four sets of two-degree-of-freedom linear motors are symmetrically arranged on both sides of the coarse motion table (2) with respect to the X-axis direction, and are located under the large-stroke drive module; The coarse motion table also includes two coarse motion table gravity balance components, the two coarse motion table gravity balance components are arranged above the coarse motion table body (2), symmetrically arranged on the coarse motion table along the X-axis direction On both sides of the table body (2), each coarse motion table gravity balance assembly includes a coarse motion table gravity balance magnetic guide plate (11) and two coarse motion table gravity balance permanent magnets (12), the coarse motion table gravity balance magnetic guide The plate (11) is connected with the permanent magnet array of the X-direction linear motor, and the gravity balance permanent magnets (12) of the coarse motion table are respectively arranged on the upper surface of the coarse motion table body (2). The axial direction is symmetrically arranged, and there is a gap with the gravity balance magnetic guide plate (11) of the coarse motion table. 2. A mask stage system with a six-degree-of-freedom coarse motion stage according to claim 1, wherein each of the X-direction linear motors is composed of two sets of permanent magnet arrays and a set of coil arrays; Each two-degree-of-freedom linear motor is composed of a set of permanent magnet arrays and a set of coil arrays, and two two-degree-of-freedom linear motors on the same side along the X direction share a set of permanent magnet arrays; two sets of permanent magnet arrays of the X-direction linear motors The magnet array and the four sets of permanent magnet arrays of the two-degree-of-freedom linear motor are fixed on the horizontal plane on the frame; the two sets of coil arrays of the X-direction linear motor and the four sets of coil arrays of the two-degree-of-freedom linear motor are respectively fixed on the coarse motion on the platform body (2). 3. A mask table system with a six-degree-of-freedom coarse motion table according to claim 1 or 2, characterized in that: the fine motion table includes a fine motion table body (1), a Lorentz motor and the gravity compensation component of the fine motion table; the Lorentz motor includes three kinds of Lorentz motors, each of which is symmetrically distributed on both sides of the fine motion table body (1) along the Y-axis direction, wherein, The driving direction of the first type of Lorentz motor is along the X-axis direction, symmetrically arranged with respect to the X-axis, at least two on each side, driving the fine motion table body (1) to move along the X-axis direction and the rotation direction around the Z-axis; the second The driving direction of the first type of Lorentz motor is along the Y axis and passes through the center of mass of the fine motion table, at least one on each side, driving the body (1) of the fine motion table to move along the Y direction; the third type of Lorentz motor is located on the fine motion table On the four corners of the table body, they are arranged symmetrically about the X axis at the same time, two on each side, and their driving direction is along the Z axis direction, driving the precision motion table body to move along the Z direction, the rotation direction around the X axis and the Y axis rotation direction. 4. A mask stage system with a six-degree-of-freedom coarse motion stage according to claim 3, wherein the gravity compensation component of the fine motion table includes four gravity compensation units of the fine motion table, each fine motion table The gravity compensation unit of the moving table is composed of a gravity balance magnetic guide plate (31) of the fine moving table and a permanent magnet (32) of gravity balance of the fine moving table. The four gravity compensation units of the fine moving table are respectively distributed on the fine moving table On the four corners of the body (1), the four gravity balance magnetic guide plates (31) of the fine motion table are respectively fixed on the coarse motion table body (2); the four gravity balance permanent magnets (32) of the fine motion table are respectively It is fixed on the body (1) of the fine motion table, and corresponds to the position of the gravity balance magnetic guide plate (31) of the fine motion table, and at the same time, there is a gap between the gravity balance magnetic guide plate of the fine motion table. 5. A mask stage system with a six-degree-of-freedom coarse motion stage according to claim 1, characterized in that: the coarse motion stage body (2) is a thin-walled shell made of silicon carbide ceramic material production. 6. A mask stage system with a six-degree-of-freedom coarse motion stage according to claim 3, characterized in that: the fine motion stage body (1) is a thin-walled shell made of silicon carbide ceramic material production. 7. A mask stage system with a six-degree-of-freedom coarse motion stage according to claim 2, characterized in that: the coil arrays of the two sets of X-direction linear motors and the four sets of coils of the two-degree-of-freedom linear motors The arrays are all one-dimensional arrays composed of coreless rectangular coils; the permanent magnet arrays of the two sets of X-direction linear motors adopt a one-dimensional halbach type permanent magnet array, and the permanent magnet arrays of a two-degree-of-freedom linear motor adopt a planar halbach type permanent magnet array. magnetic array.

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