CN103175847A - Grating surface blemish detection device - Google Patents

Abstract

The invention relates to a detection device for grating surface defects. At present, enterprises rely on manual visual detection of grating surface defects, which has low degree of automation, low detection accuracy, low reliability, low detection efficiency, large human subjective error, and high detection cost. A grating surface defect detection device, which consists of: a column ( 1 ), a control module, the column is connected to a short arm ( 2 ), and a pair of coarse and fine regulators are respectively connected to both sides of the short arm, and the The short arm is connected to the long arm ( 3 ), the long arm is connected to the grating surface image collector through a through hole, the output end of the industrial computer ( 7 ) is connected to the input end of the control system ( 8 ), and the signal output end of the control system is connected to the The drive motor ( 9 ) and the light source ( 10 ), the drive motor is connected to the input end of the grating screening mechanism ( 11 ), the grating image two-dimensional translation platform ( 12 ) and the grating cleaning mechanism ( 13 ), and the light source is placed in the grating image detection On the stage, the light source is placed on the grating image detection stage. The invention is used to improve the precision, resolution, automation and detection efficiency of the grating surface defect detection device.

Description

Grating Surface Defect Inspection Device

Technical field:

The invention relates to the field of precision instrument detection, in particular to a grating surface defect detection device.

Background technique:

At present, enterprises use stereo microscopes to rely on manual visual detection of grating surface defects, which have the following disadvantages:

The degree of automation is low. Grating fixing, grating unfolding, grating identification, grating loading and unloading, grating marking, etc. are mainly done manually.

The detection accuracy is low. In the manual inspection process, both human factors and equipment accuracy will affect the detection accuracy. Human factors such as decreased attention, subjective judgment, limited resolution of the naked eye, etc., and equipment accuracy such as the use of a single light source, traditional optical microscope, manufacturing accuracy, etc.

Low reliability. Due to factors such as working environment, personal mood, subjective judgment, manual operation, advanced equipment and other factors, the staff may miss detection or misjudgment during the detection process, which will affect the reliability of the detection quality.

The detection efficiency is low. Due to the high labor intensity of manual inspection and monotonous and repetitive inspection work, the staff are prone to fatigue and pause for rest. At the same time, whether the inspection work is carried out normally depends to a certain extent on the quality of the working environment, etc., which will shorten the effective working time and reduce the detection efficiency. .

Human subjective error is large. In the whole inspection process, the staff is the leader, and the identification, classification, and screening of defects are all subjective judgments, and all of this depends on the staff having a good working mood, a suitable working environment and normal operation of testing equipment.

The detection cost is high. Staff labor remuneration, equipment procurement and maintenance, and high grating re-inspection rate lead to increased inspection costs.

High-speed production cannot be satisfied. Manual inspection can only be adapted to small-batch and low-precision production, and is limited by the physical strength of workers, inspection speed and accuracy, and equipment inspection capabilities, and cannot achieve high-speed production.

Contact, destructive testing. Manual inspection requires workers to take the grating manually, and it is inevitable that there will be mistakes such as artificially scratching the grating to be inspected, resulting in unnecessary losses.

Invention content:

The object of the present invention is to provide a grating surface defect detection device, which improves the accuracy, resolution, automation and detection efficiency of the grating surface defect detection device.

The purpose of the present invention is achieved like this:

A grating surface defect detection device, which consists of: a column, a control module, the column is connected to a short arm, a pair of coarse and fine regulators are respectively connected to both sides of the short arm, the short arm is connected to a long arm, The long arm is connected to the grating surface image collector through a through hole, the output end of the industrial computer is connected to the input end of the control system, the signal output end of the control system is connected to the drive motor and the light source, and the drive motor is connected to the grating screening mechanism, the grating image two The input end of the three-dimensional translation stage and the grating cleaning mechanism, and the light source is placed on the grating image detection stage.

The grating surface defect detection device, the grating surface image collector includes: a microscope lens, a CCD camera, an image acquisition card, the projection light source and a light source controller, and the microscope lens passes through the channel of the long arm. The hole is connected to a CCD industrial camera, the CCD industrial camera is fixed on the long arm by bolts, the output end of the CCD industrial camera is connected to the input end of the grating surface image acquisition card, and the output end of the image acquisition card is connected to the industrial control machine input.

In the grating surface defect detection device, the control module has a two-dimensional translation stage stepping motor control module, a grating unfolding mechanism, a stepping motor control module, a cleaning mechanism control module and a grating screening mechanism control module, and the grating The unfolding mechanism has a grating clamping mechanism, a mechanical connection mechanism and the drive motor, the grating clamping mechanism is connected to the drive motor and the mechanical connection mechanism, the mechanical connection mechanism is connected to the two-dimensional translation platform, and the two-dimensional The translation platform is connected to the grating defect detection platform, the grating defect detection platform is connected to the column, and the industrial computer has a data processing module.

In the grating surface defect detection device, the grating image two-dimensional translation stage includes: an X, Y two-dimensional moving stage driven and controlled by a stepping motor, so that the grating to be inspected moves along the X and Y in the horizontal plane, accurately Align the microscopic objective lens to collect images of grating surface defects; the grating unfolding mechanism includes: a mechanical device of a grating clamping device and a grating surface unfolding mechanism, to realize the clamping of the grating and the unfolding of the information on the grating surface.

In the grating surface defect detection device, the grating screening mechanism transmits the processing results to the control module through the data processing module, and then the control module issues an instruction to control the grating screening mechanism to perform "qualified grating" and "unqualified grating" Classified storage; the control module includes: a light source control module, a two-dimensional translation stage stepping motor control module, a grating expansion mechanism stepping motor control module, a cleaning mechanism control module and a grating screening mechanism control module, to realize light source control, to-be-checked The alignment of the grating position, the unfolding of the surface information of the grating to be inspected, the cleaning of the grating surface and the screening of "qualified" and "unqualified" gratings.

The grating surface defect detection device, the grating image detection platform includes: a supporting chassis and an adjustable column, the adjustable column supports and fixes other detection components, and adjusts the vertical distance between the CCD camera and the detection platform; The data processing module of the system performs relevant image processing on the collected grating surface defect image to obtain a clear image, and then uses relevant software to detect, and finally obtains the detection result.

Beneficial effect:

1. The image acquisition equipment adopted in the present invention has higher resolution, more automatic operation and higher reliability.

The grating image detection platform adopted by the invention has a small occupied area, a compact structure, and can adjust the CCD camera up and down.

The two-dimensional electric translation platform adopted in the present invention has more convenient operation, higher operation precision and lower blind randomness.

The grating unfolding mechanism adopted in the present invention has more stable and more complete unfolding of grating surface information, higher unfolding precision and stronger controllability, and at the same time, the grating clamping is firmer and more stable.

The color and intensity of the light source used in the present invention can be adjusted, and different types of light sources can also be replaced according to the situation. At the same time, specular emission on the surface of the grating can be avoided to the greatest extent, and image acquisition conditions with more uniform brightness can be obtained.

The image acquisition card adopted in the present invention can transmit the digital image to the data processing module at high speed.

The control module adopted in the present invention can realize high-precision and automatic control of the grating two-dimensional translation stage, grating unfolding mechanism, grating cleaning mechanism, grating image acquisition equipment and grating screening mechanism, reducing the low efficiency and low precision of manual control And the disadvantages of high recklessness.

The grating cleaning mechanism adopted in the present invention can perform automatic, fully enclosed, no dead angle and high cleanliness cleaning of the grating to be inspected before detection, reducing the adverse effects of external pollution on detection, and is more efficient and cleaner than manual cleaning ,More comprehensive.

The screening mechanism adopted in the present invention can automatically realize the automatic sorting of qualified and unqualified gratings through the control system, which is faster and more accurate than manual sorting.

Description of drawings:

Accompanying drawing 1 is the schematic diagram of the present invention.

Accompanying drawing 2 is the work flowchart of the present invention.

Detailed ways:

Example 1:

A grating surface defect detection device, which consists of: a column 1, a control module, characterized in that: the column is connected to a short arm 2, and a pair of coarse and fine regulators are respectively connected to both sides of the short arm, and the The short arm is connected to the long arm 3, the long arm is connected to the grating surface image collector through a through hole, the output end of the industrial computer 7 is connected to the input end of the control system 8, and the signal output end of the control system is connected to the drive motor 9 and the light source 10 , the drive motor is connected to the input end of the grating screening mechanism 11, the two-dimensional translation stage 12 of the grating image and the input end of the grating cleaning mechanism 13, and the light source is placed on the grating image detection stage.

Example 2:

According to the grating surface defect detection device described in embodiment 1, it is characterized in that: the grating surface image acquisition device includes: microscopic lens 4, CCD camera 5, image acquisition card 6, described light source and light source controller, described microscope The head passes through the through hole of the long arm to connect the CCD industrial camera, the CCD industrial camera is fixed on the long arm by bolts, the output end of the CCD industrial camera is connected to the input end of the grating surface image acquisition card, the The output end of the image acquisition card described above is connected to the input end of the industrial computer 7.

Example 3:

According to the grating surface defect detection device described in embodiment 1 or 2, it is characterized in that: the control module has a two-dimensional translation stage stepping motor control module, a grating unfolding mechanism 14, a stepping motor control module, and a cleaning mechanism control module and a grating screening mechanism control module, the grating unfolding mechanism has a grating clamping mechanism, a mechanical connection mechanism and the drive motor, the grating clamping mechanism is connected to the drive motor and the mechanical connection mechanism, and the mechanical connection mechanism The two-dimensional translation platform is connected, the two-dimensional translation platform is connected to the grating defect detection platform 15, the grating defect detection platform is connected to the column, and the industrial computer has a data processing module.

Example 4:

In the grating surface defect detection device described in Embodiment 3, the grating image two-dimensional translation stage includes: an X, Y two-dimensional moving displacement stage driven and controlled by a stepping motor, so that the grating to be inspected is moved along the X, Y axis in the horizontal plane. Move and accurately align the microscopic objective lens for image collection of grating surface defects; the grating unfolding mechanism includes: a grating clamping device and a mechanical device of the grating surface unfolding mechanism, to realize the clamping of the grating and the unfolding of the information on the grating surface.

Example 5

In the grating surface defect detection device described in Embodiment 3, the grating screening mechanism transmits the processing results to the control module through the data processing module, and then the control module issues an instruction to control the grating screening mechanism to detect "qualified grating" and "unqualified grating". grating" for classification and storage; the control module includes: a light source control module, a two-dimensional translation stage stepping motor control module, a grating unfolding mechanism stepping motor control module, a cleaning mechanism control module and a grating screening mechanism control module to realize light source control , The alignment of the position of the grating to be inspected, the unfolding of the surface information of the grating to be inspected, the cleaning of the grating surface and the screening of "qualified" and "unqualified" gratings.

Embodiment 6:

The grating surface defect detection device described in Embodiment 3, the grating image detection platform includes: a support chassis and an adjustable column, the adjustable column supports and fixes other detection components, and adjusts the vertical distance between the CCD camera and the detection platform ; The data processing module performs related image processing on the collected grating surface defect image to obtain a clear image, then uses related software to detect, and finally obtains the detection result.

Claims (6)

1. A grating surface defect detection device, which consists of a column and a control module, characterized in that: the column is connected to a short arm, and a pair of coarse and fine regulators are respectively connected to both sides of the short arm, and the The short arm is connected to the long arm, the long arm is connected to the grating surface image collector through a through hole, the output end of the industrial computer is connected to the input end of the control system, the signal output end of the control system is connected to the drive motor and the light source, and the drive motor is connected to the grating The screening mechanism, the input end of the grating image two-dimensional translation stage and the grating cleaning mechanism, the light source is placed on the grating image detection stage. 2. The grating surface defect detection device according to claim 1, characterized in that: the grating surface image collector includes: a microscope lens, a CCD camera, an image acquisition card, the projection light source and a light source controller, and the microscope The head passes through the through hole of the long arm to connect the CCD industrial camera, the CCD industrial camera is fixed on the long arm by bolts, the output end of the CCD industrial camera is connected to the input end of the grating surface image acquisition card, the The output end of the image acquisition card described above is connected to the input end of the industrial computer. 3. The grating surface defect detection device according to claim 1 or 2, characterized in that: the control module has a two-dimensional translation stage stepping motor control module, a grating unfolding mechanism, a stepping motor control module, and a cleaning mechanism control module and a grating screening mechanism control module, the grating expansion mechanism has a grating clamping mechanism, a mechanical connection mechanism and the drive motor, the grating clamping mechanism is connected to the drive motor and the mechanical connection mechanism, and the mechanical connection mechanism The two-dimensional translation platform is connected, the two-dimensional translation platform is connected to the grating defect detection platform, the grating defect detection platform is connected to the column, and the industrial computer has a data processing module. 4. The grating surface defect detection device according to claim 3, characterized in that: the grating image two-dimensional translation stage includes: an X, Y two-dimensional moving stage driven and controlled by a stepping motor, so that the grating to be inspected Move along X and Y in the horizontal plane, accurately align the microscopic objective lens, and wait for the image collection of the grating surface defect; the described grating unfolding mechanism includes: the mechanical device of the grating clamping device and the grating surface unfolding mechanism, and realizes the grating clamping and Unwrapping of raster surface information. 5. The grating surface defect detection device according to claim 3, characterized in that: the grating screening mechanism transmits the processing results to the control module through the data processing module, and then the control module issues instructions to control the grating screening mechanism to "qualified" grating” and “unqualified grating” are classified and stored; the control module includes: light source control module, two-dimensional translation stage stepper motor control module, grating expansion mechanism stepper motor control module, cleaning mechanism control module and grating screening mechanism The control module is used to control the light source, align the position of the grating to be inspected, expand the surface information of the grating to be inspected, clean the grating surface, and screen "qualified" and "unqualified" gratings. 6. The grating surface defect detection device according to claim 3, characterized in that: the grating image detection platform includes: a supporting chassis and an adjustable column, and the adjustable column supports and fixes other detection components, and adjusts the CCD camera The vertical distance from the detection platform; the data processing module performs relevant image processing on the collected grating surface defect image to obtain a clear image, and then uses relevant software to perform detection, and finally obtains the detection result.

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