CN103162645A - Method and device for measuring roll angular errors based on elliptical polarization measurement - Google Patents
Method and device for measuring roll angular errors based on elliptical polarization measurement Download PDFInfo
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Abstract
本发明公开了一种基于椭偏度测量的滚转角误差测量方法，包括二分之一波片处于被测件上的第一位置时，将线偏光入射到与被测件滑动配合的二分之一波片内，透过二分之一波片的线偏光经四分之一波片形成椭偏光，所述椭偏光再照射到旋转的检偏器上，分析检偏器出射光束的光强变化得到第一椭偏度；将二分之一波片移至第二位置，根据与第一椭偏度同样的方法得到第二椭偏度，比较分析第一椭偏度和第二椭偏度，得到被测件的第一位置和第二位置之间的滚转角误差。本发明还公开了一种基于椭偏度测量的滚转角误差测量装置。
The invention discloses a roll angle error measurement method based on ellipsometric measurement, which comprises the steps of injecting linearly polarized light into a half-wave plate slidingly matched with the tested piece when the half-wave plate is at the first position on the tested piece. In one-wave plate, the linearly polarized light passing through the half-wave plate passes through the quarter-wave plate to form ellipsoidal light, and the ellipsoidal light is then irradiated on the rotating analyzer to analyze the light emitted by the analyzer Strong change to obtain the first ellipticity; move the half-wave plate to the second position, obtain the second ellipticity according to the same method as the first ellipticity, and compare and analyze the first ellipticity and the second ellipticity Skewness, to obtain the roll angle error between the first position and the second position of the tested object. The invention also discloses a roll angle error measuring device based on ellipsometric measurement.
Description
Technical field
The present invention relates to the high-accuracy optical fields of measurement, particularly a kind of rolling measurement method and apparatus of measuring based on the ellipse degree of bias.
Background technology
Development along with science and technology, more and more higher to the requirement of machine error in high-precision machine tool, boats and ships, aerospace field large-scale workpiece assembling process, in numerous machine errors, it is larger that the roll angle error belongs to impact simultaneously, controls the high error of cost compare.
The method of optical measurement roll angle mainly contains following four kinds at present:
Based on interferometric method: although some interference system can obtain very high measurement resolution, system is too complicated, cost is high, is the disclosed roll angle measurement method of patent documentation of CN1335483A as publication number;
Measuring method based on the holographic grating diffraction: utilize the holographic grating diffraction phenomena to realize rolling angle measurement, its shortcoming is that measuring accuracy is not high, measuring head is with following cable simultaneously, causing into in-site measurement inconvenient, is the disclosed transfer angle measuring method of patent documentation of US6316779B1 as publication number;
Measuring method based on the polarization benchmark: Polarization Method is a kind of more method of studying at present, but the resolution of its measurement and stability need further reinforcement, are the disclosed roll angle measurement method of patent documentation of CN1687701A as publication number;
Based on the collimated light measuring method: the measuring principle of this method is relatively simple, utilize the geometrical optics measuring principle, publication number is that the patent documentation of US5798828A discloses a kind of method that collimation laser is measured roll angle, and the method calculates the roll angle size based on parallel rays by the linearity of measuring two diverse locations.Improve measurement sensitivity, need to increase the distance between the collimation parallel rays, and in measuring head with cable, make troubles to the scene.Chien-Hung Liu is being entitled as " Development of a laser-based high-precision six-degrees-of-freedom motionerrors measuring system for linear stage " (Review of Scientific instruments, 2005, 76, 055110) propose to utilize the prism of corner cube retrodirective reflection in, thereby make not tape cable of systematic survey slip-on head, thereby overcome the shortcoming that slip-on head has cable, but, so, two measure also at double the increase of light aerial light paths, air has also increased the impact of measuring.In addition, measure the method for roll angle based on parallel rays, improve Measurement Resolution, can only be by increasing the distance between parallel rays, thus increased the volume of measuring system.
Therefore, present existing rolling angle measurement system still can't satisfy in high-precision machine tool, Aero-Space, accurately controls economically the requirement of roll angle error in the big machineries such as Marine engineering processing assembling.
Summary of the invention
For overcoming the deficiencies in the prior art, promote the measuring accuracy of roll angle error, apparatus structure is oversimplified, the invention provides a kind of method and apparatus of high-acruracy survey roll angle error, polarized light sees through 1/2nd wave plates that are associated with tested track, obtains the roll angle information of track by the variation of measuring outgoing light polarization angle.
A kind of rolling measurement method of measuring based on the ellipse degree of bias comprises the following steps:
When 1) 1/2nd wave plates are in primary importance on measured piece, the line polarisation incides 1/2nd wave plates, the line polarisation that sees through 1/2nd wave plates forms ellipse polarisation through quarter-wave plate, described ellipse polarisation shines on the analyzer of rotation again, and the light intensity variation of analyzing the analyzer outgoing beam obtains the first ellipse degree of bias;
When 2) 1/2nd wave plates slide into the second place along measured piece, the line polarisation incides 1/2nd wave plates, the line polarisation that sees through 1/2nd wave plates forms ellipse polarisation through quarter-wave plate, described ellipse polarisation shines on the analyzer of rotation again, and the light intensity variation of analyzing the analyzer outgoing beam obtains the second ellipse degree of bias;
3) the ellipse degree of bias of comparative analysis first and the second ellipse degree of bias obtain the primary importance of measured piece and the roll angle error between the second place.
Preferably, the fast axle clamp angle of described line polarisation and 1/2nd wave plates is 0 °, the fast axle of quarter-wave plate is parallel with the fast axle of 1/2nd wave plates, when there be not the roll angle error in the primary importance on measured piece and the second place, the polarized light polarization state that sees through 1/2nd wave plates and quarter-wave plate was constant like this.
The present invention also provides a kind of rolling measurement device of measuring based on the ellipse degree of bias to comprise and has arranged successively along light path:
Line polarisation generation module comprises the light source that sends laser beam and the modulator that is used for described laser beam is modulated into the line polarisation;
Sensing module comprises 1/2nd wave plates that are slidably fitted on measured piece;
Detection module comprises quarter-wave plate, analyzer and light intensity detector along light path arrangement, and for the computing machine that the information of described light intensity detector is analyzed.
To be measured of the present invention is guide rail or corresponding workpiece, and is provided with the pedestal that is slidably matched with guide rail or workpiece, and described 1/2nd wave plates are fixed on pedestal.
Described modulator is the polarizer, is provided with successively condenser lens, aperture and collimation lens between described light source and the polarizer.Wherein aperture is positioned at the back focus place of condenser lens, and the back focus of condenser lens and the front focus of collimation lens overlap.
Principle of work of the present invention is as follows:
By the polarizer, uniform laser beam is modulated into the line polarisation, the line polarisation through 1/2nd wave plates after, the polarization direction of line polarisation changes, through the polarization direction of the line polarisation after 1/2nd wave plates with incide the polarization direction of the line polarisation on 1/2nd wave plates about the fast rotational symmetry of 1/2nd wave plates.The line polarisation that sees through 1/2nd wave plates shines on quarter-wave plate, the line polarisation becomes ellipse polarisation, pass through again the analyzer of rotation, the laser intensity that shines on light intensity detector will fluctuate, the light intensity maximal value is that the analyzer polarization direction overlaps with the long axis direction of ellipse polarisation, and the light intensity minimum value is that the polarization direction of analyzer overlaps with the short-axis direction of ellipse polarisation.By calculating the ellipse degree of bias of polarized light.By the ellipse degree of bias that obtains in real time and the ellipse degree of bias comparing calculation of initial position, can obtain real-time roll angle information.
Under optimal situation, through the line polarisation after the polarizer be
/ 2nd fast axles of wave plate and line polarisation angle are 0 °, become by line polarisation after 1/2nd wave plates
Polarized light E
1Again by fast axle during with quarter-wave plate that 1/2nd wave plates overlap linearly polarized light become circularly polarized light
The analyzer emergent light that sees through rotation is
Wherein ω is frequency of light wave, ω
1Be the gyro frequency of analyzer,
For under the analyzer starting condition with the angle of polarized light.Can find out when 1/2nd wave plates do not deflect, the emergent light light intensity that sees through analyzer becomes complete sinusoidal variations, and the ellipse degree of bias is 0.Suppose that certain rotation occurs 1/2nd wave plates, supposes that rotational angle is θ
e, by after 1/2nd wave plates, linearly polarized light can be expressed as
During again by quarter-wave plate, linearly polarized light becomes elliptically polarized light
When elliptically polarized light through the line polarisation expression formula that obtains after polaroid is
θ wherein
eBe the roll angle error, ω is frequency of light wave, ω
1Be the analyzer rotational frequency,
Be the initial angle of analyzer, therefrom we can find out that light intensity follows θ
e, ω
1Relevant with t, due to ω
1All can accurately control with t, so just can obtain θ from intensity signal
e, i.e. our roll angle error of needing.
In the present invention, by the Measurement accuracy of the ellipse degree of bias is measured the roll angle error, adopt to be total to the road from the mode of reference, light path is the shortest, the error of having avoided greatly air and other non-road reasons altogether to produce, when having good precision, device is also very compact is convenient to Installation and Debugging.
Compared with prior art, the present invention has following useful technique effect:
1, system signal noise ratio is high, adopts the mode from reference, can greatly improve the signal to noise ratio (S/N ratio) of system;
2, light path is the most succinct, only has a light path in whole measuring process, participates in device few, assembles simple source of error few;
3, precision is higher, can reach the precision of 2 second of arcs at this cover according to experimental facilities through check;
4, moving component is few, only has 1/2nd wave plates along with measuring base motion in whole measuring process, can measure the roll angle error of large scale track and workpiece.
Description of drawings
Fig. 1 is the structural representation of rolling measurement device of the present invention;
Ellipse degree of bias data result figure when Fig. 2 changes by 1080 second of arcs for simulation roll angle error at every turn;
Ellipse degree of bias data result figure when Fig. 3 changes by 2.16 second of arcs for simulation roll angle error at every turn.
Embodiment
As shown in Figure 1, a kind of device of measuring the roll angle error by measuring the ellipse degree of bias comprises: line polarisation generation module 1, sensing module 2, angle detection module 3.Its center line polarisation generation module 1 comprises: laser instrument 101, condenser lens 102, aperture 103, collimation lens 104, the polarizer 105.Sensing module 2 comprises: 1/2nd wave plates 201, pedestal 202.Angle detection module 3 comprises: quarter-wave plate 301, the analyzer 302 of rotation, light intensity detector 303, master control counter 304.
Wherein, laser instrument 101 sends laser beam, condenser lens 102, and aperture 103, collimation lens 104, the polarizer 105 are placed on the direction of propagation of laser beam successively, and primary optical axis overlaps with laser beam.Aperture 103 is placed on the back focal plane of condenser lens 102, and the front focal plane of collimation lens overlaps with the condenser lens back focal plane.
Adopt the ellipse degree of bias of measurement shown in Figure 1 to measure the roll angle error approach, its process is as follows:
(1) pedestal 202 is in the initial position on tested track or workpiece, and laser instrument 101 is launched light beam, and line focus lens 102 focus on aperture 103, again by collimation lens 104 collimations, obtains uniform collimated light beam after aperture 103 filtering; This collimated light beam is modulated to linearly polarized light through the polarizer 105, then shines the center of 1/2nd wave plates 201, because the fast axle of 1/2nd wave plates overlaps with the polarization direction, so the polarization direction does not change.
When (2) initial, pedestal 202 and 1/2nd wave plates 201 are motionless.Angle detection module 3, be placed on a stabilised platform, the line polarisation shines on quarter-wave plate 301, become ellipse polarisation by the line polarisation, when on the analyzer 302 that shines rotation, analyzer 302 can see through by the components that the polarization direction is identical, light intensity detector 303 is measured the intensity signal of initial position, main control computer 304 is read intensity signal, draws the ellipse degree of bias of initial position according to the floating information of light intensity, records as the reference in measuring process.
(3) in the actual measurement process, pedestal 202 is along with track or workpiece carry out rectilinear motion, when the roll angle error exists, / 2nd wave plates 201 rotate, the variation of twice roll angle error angle occurs in the polarization direction that sees through the line polarisation of 1/2nd wave plates, after the line polarisation shines quarter-wave plate 301, will become ellipse polarisation, shine on the analyzer 302 of rotation, the analyzer 302 of rotation can see through the identical polarized component in polarization direction with it, maximal value wherein is the component of ellipse partially round long axis direction, minimum value is the component of ellipse partially round short-axis direction, can obtain the real-time ellipse degree of bias of polarized light by comparing calculation, by with step (2) in reference position contrast can obtain track or workpiece in the roll angle error of diverse location.We can find out from Fig. 2 and Fig. 3, and by simulation roll angle error, native system can detect 1000 second of arc 2 second of arcs and even less roll angle error accurately.
Claims (8)
1. a rolling measurement method of measuring based on the ellipse degree of bias, is characterized in that, comprises the following steps:
When 1) 1/2nd wave plates are in primary importance on measured piece, the line polarisation incides 1/2nd wave plates, the line polarisation that sees through 1/2nd wave plates forms ellipse polarisation through quarter-wave plate, described ellipse polarisation shines on the analyzer of rotation again, and the light intensity variation of analyzing the analyzer outgoing beam obtains the first ellipse degree of bias;
When 2) 1/2nd wave plates slide into the second place along measured piece, the line polarisation incides 1/2nd wave plates, the line polarisation that sees through 1/2nd wave plates forms ellipse polarisation through quarter-wave plate, described ellipse polarisation shines on the analyzer of rotation again, and the light intensity variation of analyzing the analyzer outgoing beam obtains the second ellipse degree of bias;
3) the ellipse degree of bias of comparative analysis first and the second ellipse degree of bias obtain the primary importance of measured piece and the roll angle error between the second place.
2. the rolling measurement method of measuring based on the ellipse degree of bias as claimed in claim 1, is characterized in that, the fast axle clamp angle of described line polarisation and 1/2nd wave plates is 0 °.
3. the rolling measurement method of measuring based on the ellipse degree of bias as claimed in claim 1, is characterized in that, the fast axle of described quarter-wave plate is parallel with the fast axle of 1/2nd wave plates.
4. the rolling measurement method of measuring based on the ellipse degree of bias as claimed in claim 3, is characterized in that, the light intensity of described analyzer outgoing beam changes is collected by light intensity detector.
5. a rolling measurement device of measuring based on the ellipse degree of bias, is characterized in that, comprises arranging successively along light path:
Line polarisation generation module comprises the light source that sends laser beam and the modulator that is used for described laser beam is modulated into the line polarisation;
Sensing module comprises 1/2nd wave plates that are slidably fitted on measured piece;
Detection module comprises quarter-wave plate, analyzer and light intensity detector along light path arrangement, and for the computing machine that the information of described light intensity detector is analyzed.
6. the rolling measurement device of measuring based on the ellipse degree of bias as claimed in claim 5, is characterized in that, described modulator is the polarizer.
7. the rolling measurement device of measuring based on the ellipse degree of bias as claimed in claim 6, is characterized in that, is provided with successively condenser lens, aperture and collimation lens between described light source and the polarizer.
8. the rolling measurement device of measuring based on the ellipse degree of bias as claimed in claim 7, is characterized in that, the fast axle of described quarter-wave plate is parallel with the fast axle of 1/2nd wave plates.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104567744A (en) * | 2015-01-08 | 2015-04-29 | 佛山轻子精密测控技术有限公司 | Learning-type high-precision angular encoder and measurement method thereof |
| CN104792268A (en) * | 2014-01-22 | 2015-07-22 | 中央研究院 | Optical measuring system and method for measuring angle and rotating speed by using same |
| CN108278980A (en) * | 2017-12-27 | 2018-07-13 | 中国科学院长春光学精密机械与物理研究所 | Torsion angle dynamic measurement device based on piezoelectricity beat platform and method |
| CN108709514A (en) * | 2018-03-16 | 2018-10-26 | 华中科技大学 | A kind of compact rolling angle sensor device and measurement method |
| CN109813253A (en) * | 2019-02-27 | 2019-05-28 | 深圳大学 | A rotating shaft rotation angle detection device |
| CN109870120A (en) * | 2019-03-09 | 2019-06-11 | 中国人民解放军国防科技大学 | High-sensitivity monitoring system for micro angular displacement of rotating body based on laser polarization measurement |
| WO2019144254A1 (en) * | 2018-01-23 | 2019-08-01 | 大连理工大学 | Method for quickly detecting rotation angle error of linear shaft of numerical control machine tool |
| CN110749552A (en) * | 2019-12-02 | 2020-02-04 | 南开大学 | System and method for determining second-order nonlinear polarizability of materials |
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Cited By (10)
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| CN104792268A (en) * | 2014-01-22 | 2015-07-22 | 中央研究院 | Optical measuring system and method for measuring angle and rotating speed by using same |
| CN104567744A (en) * | 2015-01-08 | 2015-04-29 | 佛山轻子精密测控技术有限公司 | Learning-type high-precision angular encoder and measurement method thereof |
| CN108278980A (en) * | 2017-12-27 | 2018-07-13 | 中国科学院长春光学精密机械与物理研究所 | Torsion angle dynamic measurement device based on piezoelectricity beat platform and method |
| WO2019144254A1 (en) * | 2018-01-23 | 2019-08-01 | 大连理工大学 | Method for quickly detecting rotation angle error of linear shaft of numerical control machine tool |
| US10900779B2 (en) | 2018-01-23 | 2021-01-26 | Dalian University Of Technology | Method for the rapid detection of the linear axis angular error of an NC machine tool |
| CN108709514A (en) * | 2018-03-16 | 2018-10-26 | 华中科技大学 | A kind of compact rolling angle sensor device and measurement method |
| CN109813253A (en) * | 2019-02-27 | 2019-05-28 | 深圳大学 | A rotating shaft rotation angle detection device |
| CN109870120A (en) * | 2019-03-09 | 2019-06-11 | 中国人民解放军国防科技大学 | High-sensitivity monitoring system for micro angular displacement of rotating body based on laser polarization measurement |
| CN110749552A (en) * | 2019-12-02 | 2020-02-04 | 南开大学 | System and method for determining second-order nonlinear polarizability of materials |
| CN110749552B (en) * | 2019-12-02 | 2020-12-15 | 南开大学 | System and method for determining second-order nonlinear polarizability of materials |
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