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CN103151706A - Tunable external cavity semiconductor laser based on spatial light modulator - Google Patents

Tunable external cavity semiconductor laser based on spatial light modulator Download PDF

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CN103151706A
CN103151706A CN2013100817183A CN201310081718A CN103151706A CN 103151706 A CN103151706 A CN 103151706A CN 2013100817183 A CN2013100817183 A CN 2013100817183A CN 201310081718 A CN201310081718 A CN 201310081718A CN 103151706 A CN103151706 A CN 103151706A
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light modulator
spatial light
laser
laser diode
reflection film
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甘雨
陈风东
张立宏
唐圭新
刘国栋
刘炳国
庄志涛
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Harbin Institute of Technology Shenzhen
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Abstract

The invention provides a tunable external cavity semiconductor laser based on a spatial light modulator, relating to the field of optical fiber communication, and solves the problems that under the mechanical tuning way, the existing laser is slow in tuning speed, and poor in precision, does not adapt to the demand of the further dynamic light network, cannot keep narrow dynamic line width, and is not suitable for a dense wavelength division multiplexing system. According to the tunable external cavity semiconductor laser provided by the invention, as an electric addressable spatial light modulator is adopted, the light wave frequency is controlled by digital programming and an electric signal, thus, the period of the spatial light modulator can be tuned by only changing the control signal of the spatial light modulator; the tuning speed is speeded up; and moreover, the emitted wavelength of the laser is only needed to be positioned on a special light channel, good corresponding relationship between the spatial light modulator and the lasing frequency can be realized, the correctness is ensured, and the demands of the future dynamic light network can be adapted. As the external cavity structure is adopted, a single-mode dynamic line width reducing one quantity level can be kept compared with the existing laser, and thus, the laser provided by the invention is suitable for the dense wavelength division multiplexing system.

Description

基于空间光调制器的可调谐外腔半导体激光器Tunable External Cavity Semiconductor Laser Based on Spatial Light Modulator

技术领域technical field

本发明涉及一种激光器,特别涉及利用双空间光调制器做为光学滤波和光程调节元件的可调谐外腔半导体激光器。属于光纤通信领域。The invention relates to a laser, in particular to a tunable external cavity semiconductor laser using a dual spatial light modulator as an optical filter and an optical path adjustment element. It belongs to the field of optical fiber communication.

背景技术Background technique

波分复用技术是光纤通信的关键技术之一,在波分复用系统中,每个传输通道对应一个特定波长的光波。与此相对应,这些传输通道都需要配备一个固定的相应波长激光器。DFB激光器是目前光纤通信中普遍采用的激光器,具有波长稳定性好,操作简单,易于集成的特点。在DFB激光器中,一个布拉格光栅集成于激光器的整个腔内,因此是一种分布反馈结构。DFB激光器输出一个稳定的单模激光。Wavelength division multiplexing technology is one of the key technologies of optical fiber communication. In the wavelength division multiplexing system, each transmission channel corresponds to a light wave of a specific wavelength. Correspondingly, these transmission channels need to be equipped with a fixed corresponding wavelength laser. DFB laser is currently widely used in optical fiber communication, and has the characteristics of good wavelength stability, simple operation and easy integration. In a DFB laser, a Bragg grating is integrated in the entire cavity of the laser, so it is a distributed feedback structure. DFB lasers output a stable single-mode laser.

在实际应用中,当一个传输通道的激光器出现故障时,必须采用具有相同波长的另一个激光器来取代。为了使整个波分复用系统更加可靠的运行,需要对每一个波长通道进行激光器的备份。这样,激光器的库存就是一个很大的数目,同时这也是使光网络的日常维护面临很大的困难。In practical applications, when a laser of a transmission channel fails, another laser with the same wavelength must be used to replace it. In order to make the entire wavelength division multiplexing system run more reliably, it is necessary to back up the laser for each wavelength channel. In this way, the inventory of lasers is a large number, and this also makes the daily maintenance of the optical network face great difficulties.

可调谐半导体激光器能够克服上述问题。当一个通道的激光器出现问题时,立即将备份的激光器调谐到该波长;当另一个通道的激光器发生故障时,将调谐激光器的波长调到该故障波长上。当每个激光器发生故障的可能性都相同时,利用可调谐激光器能够大大减少激光器的备份。除此之外,密集波分复用系统对激光器提出更高的要求。它要求激光器在动态调制的时候仍然能够保持较窄的线宽,而外腔激光器较DFB激光器有很好的谱线特性。Tunable semiconductor lasers can overcome the above-mentioned problems. When there is a problem with the laser of one channel, the backup laser is immediately tuned to this wavelength; when the laser of another channel fails, the wavelength of the tuning laser is adjusted to the faulty wavelength. When each laser is equally likely to fail, using tunable lasers can greatly reduce laser backup. In addition, dense wavelength division multiplexing systems put forward higher requirements for lasers. It requires that the laser can still maintain a narrow linewidth during dynamic modulation, and the external cavity laser has better spectral line characteristics than the DFB laser.

目前采用的外腔激光器大都采用衍射光栅来选频。在稳定运转的情况下,衍射光栅外腔半导体激光器表现出相当出色的性能。但是这种激光器采用机械的方式来调谐,因此,导致激光器调谐速度慢、精度差、不能适应未来动态光网络的需要。Most external cavity lasers currently used use diffraction gratings for frequency selection. In the case of stable operation, the diffraction grating external cavity semiconductor laser shows a very good performance. However, this kind of laser is tuned in a mechanical way. Therefore, the tuning speed of the laser is slow, the precision is poor, and it cannot meet the needs of future dynamic optical networks.

发明内容Contents of the invention

本发明是为了解决现有激光器采用机械的方式调谐,导致调谐速度慢、精度差、不能适应未来动态光网络需要,并且不能保持较窄的动态线宽,不适用于密集波分复用系统的问题,现提出了一种基于空间光调制器的可调谐外腔半导体激光器。The present invention aims to solve the problem that existing lasers are tuned mechanically, resulting in slow tuning speed and poor precision, which cannot adapt to the needs of future dynamic optical networks, and cannot maintain a narrow dynamic line width, and is not suitable for dense wavelength division multiplexing systems. To solve this problem, a tunable external cavity semiconductor laser based on a spatial light modulator is proposed.

基于空间光调制器的可调谐外腔半导体激光器,它包括:高反射膜、激光二极管、增透膜、准直透镜、空间光调制器和反射镜,准直透镜、空间光调制器和反射镜均位于激光器的外腔内,空间光调制器为电寻址的空间光调制器;Tunable external cavity semiconductor laser based on spatial light modulator, which includes: high reflection coating, laser diode, anti-reflection coating, collimating lens, spatial light modulator and mirror, collimating lens, spatial light modulator and mirror are all located in the outer cavity of the laser, and the spatial light modulator is an electrically addressable spatial light modulator;

在激光二极管的发光面镀有增透膜,非发光面镀有高反射膜,激光二极管产生并发射的光波经增透膜射入激光器的外腔,在该外腔内经准直透镜准直后入射到空间光调制器,该空间光调制器将光波分束获得反射光波和衍射光波,该反射光波从空间光调制器正常反射的方向射出,该衍射光波以垂直于反射镜表面的方向衍射到反射镜上,该反射镜将光波沿入射光路反射到空间光调制器上,经该空间光调制器衍射至准直透镜,经该准直透镜透射后经增透膜入射至激光二极管,经该激光二极管透射的光经高反射膜反射后反射至激光二极管中。The light-emitting surface of the laser diode is coated with an anti-reflection film, and the non-light-emitting surface is coated with a high-reflection film. The light waves generated and emitted by the laser diode enter the outer cavity of the laser through the anti-reflection film, and are collimated by the collimator lens in the external cavity. Incident to the spatial light modulator, the spatial light modulator splits the light waves to obtain reflected light waves and diffracted light waves, the reflected light waves are emitted from the normal reflection direction of the spatial light modulator, and the diffracted light waves are diffracted to the On the reflector, the reflector reflects the light wave along the incident light path to the spatial light modulator, diffracts through the spatial light modulator to the collimator lens, transmits through the collimator lens, enters the laser diode through the anti-reflection film, passes through the The light transmitted by the laser diode is reflected by the high reflection film and then reflected into the laser diode.

上述基于空间光调制器的可调谐外腔半导体激光器,它还包括:空间光调制器基座、PZT压电陶瓷和反射镜基座;空间光调制器固定于空间光调制器基座上,PZT压电陶瓷固定于反射镜基座上,反射镜固定于PZT压电陶瓷上。The above-mentioned tunable external cavity semiconductor laser based on the spatial light modulator also includes: a spatial light modulator base, a PZT piezoelectric ceramic and a mirror base; the spatial light modulator is fixed on the spatial light modulator base, and the PZT The piezoelectric ceramics are fixed on the reflector base, and the reflector is fixed on the PZT piezoelectric ceramics.

基于空间光调制器的可调谐外腔半导体激光器,它包括:高反射膜、激光二极管、增透膜、准直透镜、空间光调制器和第二空间光调制器,准直透镜、空间光调制器和第二空间光调制器均位于激光器的外腔内,空间光调制器为电寻址的空间光调制器;Tunable external cavity semiconductor laser based on spatial light modulator, which includes: high reflection film, laser diode, anti-reflection film, collimator lens, spatial light modulator and second spatial light modulator, collimator lens, spatial light modulation Both the laser and the second spatial light modulator are located in the external cavity of the laser, and the spatial light modulator is an electrically addressable spatial light modulator;

在激光二极管的发光面镀有增透膜,非发光面镀有高反射膜,激光二极管产生并发射的光波经增透膜射入激光器的外腔,在该外腔内经准直透镜准直后入射到空间光调制器,该空间光调制器将光波分束获得反射光波和衍射光波,该反射光波从空间光调制器正常反射的方向射出,该衍射光波以不垂直于第二空间光调制器表面的方向衍射到第二空间光调制器上,该经第二空间光调制器将光波沿入射光路反射到空间光调制器上,经该空间光调制器衍射至准直透镜,经该准直透镜透射后经增透膜入射至激光二极管,经该激光二极管透射的光经高反射膜反射后反射至激光二极管中。The light-emitting surface of the laser diode is coated with an anti-reflection film, and the non-light-emitting surface is coated with a high-reflection film. The light waves generated and emitted by the laser diode enter the outer cavity of the laser through the anti-reflection film, and are collimated by the collimator lens in the external cavity. Incident to the spatial light modulator, the spatial light modulator splits the light waves to obtain reflected light waves and diffracted light waves, the reflected light waves are emitted from the normal reflection direction of the spatial light modulator, and the diffracted light waves are not perpendicular to the second spatial light modulator The direction of the surface is diffracted to the second spatial light modulator, and the second spatial light modulator reflects the light wave along the incident light path to the spatial light modulator, and is diffracted by the spatial light modulator to the collimator lens, and the collimated After the lens is transmitted, it enters the laser diode through the antireflection film, and the light transmitted through the laser diode is reflected by the high reflection film and then reflected into the laser diode.

上述基于空间光调制器的可调谐外腔半导体激光器,它还包括:空间光调制器基座、PZT压电陶瓷和第二空间光调制器基座;空间光调制器固定于空间光调制器基座上,PZT压电陶瓷固定于第二空间光调制器基座上,第二空间光调制器固定于PZT压电陶瓷上。The above-mentioned tunable external cavity semiconductor laser based on the spatial light modulator also includes: a spatial light modulator base, a PZT piezoelectric ceramic and a second spatial light modulator base; the spatial light modulator is fixed on the spatial light modulator base On the seat, the PZT piezoelectric ceramic is fixed on the base of the second spatial light modulator, and the second spatial light modulator is fixed on the PZT piezoelectric ceramic.

基于空间光调制器的可调谐外腔半导体激光器,它包括:高反射膜、激光二极管、增透膜、准直透镜、衍射光栅和第二空间光调制器,准直透镜、衍射光栅和第二空间光调制器均位于激光器的外腔内,空间光调制器为电寻址的空间光调制器;A tunable external cavity semiconductor laser based on a spatial light modulator, which includes: a high reflection film, a laser diode, an antireflection film, a collimator lens, a diffraction grating and a second spatial light modulator, a collimator lens, a diffraction grating and a second The spatial light modulators are all located in the external cavity of the laser, and the spatial light modulators are electrically addressable spatial light modulators;

在激光二极管的发光面镀有增透膜,非发光面镀有高反射膜,激光二极管产生并发射的光波经增透膜射入激光器的外腔,在该外腔内经准直透镜准直后入射到衍射光栅,该衍射光栅将该光波分束获得反射光波和衍射光波,该反射光波从衍射光栅正常反射的方向射出,该衍射光波以不垂直于第二空间光调制器表面的方向衍射到第二空间光调制器上,该第二空间光调制器将光波沿入射光路反射到衍射光栅,经该衍射光栅衍射至准直透镜、经该准直透镜透射后经增透膜入射至激光二极管,经该激光二极管透射的光经高反射膜反射后反射至激光二极管中。The light-emitting surface of the laser diode is coated with an anti-reflection film, and the non-light-emitting surface is coated with a high-reflection film. The light waves generated and emitted by the laser diode enter the outer cavity of the laser through the anti-reflection film, and are collimated by the collimator lens in the external cavity. incident to the diffraction grating, the diffraction grating splits the light wave to obtain reflected light waves and diffracted light waves, the reflected light waves are emitted from the direction normally reflected by the diffraction grating, and the diffracted light waves are diffracted to the On the second spatial light modulator, the second spatial light modulator reflects the light wave along the incident optical path to the diffraction grating, diffracts through the diffraction grating to the collimator lens, transmits the collimator lens, and enters the laser diode through the antireflection film , the light transmitted through the laser diode is reflected by the high reflection film and then reflected into the laser diode.

上述基于空间光调制器的可调谐外腔半导体激光器,它还包括:衍射光栅基座、PZT压电陶瓷和第二空间光调制器基座;衍射光栅固定于衍射光栅基座上,PZT压电陶瓷固定于第二空间光调制器基座上,第二空间光调制器固定于PZT压电陶瓷上。The above-mentioned tunable external cavity semiconductor laser based on the spatial light modulator also includes: a diffraction grating base, a PZT piezoelectric ceramic and a second spatial light modulator base; the diffraction grating is fixed on the diffraction grating base, and the PZT piezoelectric The ceramic is fixed on the base of the second spatial light modulator, and the second spatial light modulator is fixed on the PZT piezoelectric ceramic.

本发明利用电寻址的空间光调制器,通过数字编程和电信号共同控制的方式来改变光波频率,因此只需要改变空间光调制器的控制信号即可实现对其周期的调谐,从而加快了调谐速度,并且本发明不需要对激光器进行连续的调频,只需要将激光器的出射波长定位于特定的光通道上,空间光调制器与激射频率之间有很好的对应关系,这样调谐的准确性就能得到保证,因此能够适应未来动态光网络的需要。同时由于采用了外腔结构,使本发明所述的基于双空间光调制器的可调谐外腔半导体激光器能够保持比现有激光器降低一个数量级的单模动态线宽,适用于密集波分复用系统。The present invention uses an electrical addressing spatial light modulator to change the frequency of the light wave through digital programming and electric signal control, so only the control signal of the spatial light modulator can be adjusted to realize its period tuning, thus speeding up tuning speed, and the present invention does not need to continuously frequency-modulate the laser, it only needs to position the output wavelength of the laser on a specific optical channel, and there is a good correspondence between the spatial light modulator and the lasing frequency, so the tuned The accuracy can be guaranteed, so it can adapt to the needs of future dynamic optical networks. At the same time, due to the use of the external cavity structure, the tunable external cavity semiconductor laser based on the dual spatial light modulator of the present invention can maintain a single-mode dynamic linewidth that is an order of magnitude lower than that of the existing laser, and is suitable for dense wavelength division multiplexing system.

附图说明Description of drawings

图1是实施方式一所述的基于空间光调制器的可调谐外腔半导体激光器的光路原理示意图;Fig. 1 is a schematic diagram of the optical path principle of the tunable external cavity semiconductor laser based on the spatial light modulator according to the first embodiment;

图2是实施方式四所述的基于空间光调制器的可调谐外腔半导体激光器的光路原理示意图;Fig. 2 is a schematic diagram of the optical path principle of the tunable external cavity semiconductor laser based on the spatial light modulator described in the fourth embodiment;

图3是实施方式六所述的基于空间光调制器的可调谐外腔半导体激光器的光路原理示意图。Fig. 3 is a schematic diagram of the optical path principle of the tunable external cavity semiconductor laser based on the spatial light modulator described in the sixth embodiment.

具体实施方式Detailed ways

具体实施方式一:参照图1具体说明本实施方式。本实施方式所述的基于空间光调制器的可调谐外腔半导体激光器,它包括:高反射膜1、激光二极管2、增透膜3、准直透镜4、空间光调制器5和反射镜7,准直透镜4、空间光调制器5和反射镜7均位于激光器的外腔内,空间光调制器5为电寻址的空间光调制器;Specific Embodiment 1: This embodiment will be specifically described with reference to FIG. 1 . The tunable external cavity semiconductor laser based on the spatial light modulator described in this embodiment includes: a high reflection film 1, a laser diode 2, an antireflection film 3, a collimating lens 4, a spatial light modulator 5 and a mirror 7 , the collimating lens 4, the spatial light modulator 5 and the reflector 7 are all located in the outer cavity of the laser, and the spatial light modulator 5 is an electrically addressable spatial light modulator;

在激光二极管2的发光面镀有增透膜3,非发光面镀有高反射膜1,激光二极管2产生并发射的光波经增透膜3射入激光器的外腔,在该外腔内经准直透镜4准直后入射到空间光调制器5,该空间光调制器5将光波分束获得反射光波和衍射光波,该反射光波从空间光调制器5正常反射的方向射出,该衍射光波以垂直于反射镜7表面的方向衍射到反射镜7上,该反射镜7将光波沿入射光路反射到空间光调制器5上,经该空间光调制器5衍射至准直透镜4,经该准直透镜4透射后经增透膜3入射至激光二极管2,经该激光二极管2透射的光经高反射膜1反射后反射至激光二极管2中。The light-emitting surface of the laser diode 2 is coated with an anti-reflection film 3, and the non-luminous surface is coated with a high-reflection film 1. The light waves generated and emitted by the laser diode 2 enter the outer cavity of the laser through the anti-reflection film 3, and are calibrated in the external cavity. After being collimated by the straight lens 4, it enters the spatial light modulator 5. The spatial light modulator 5 splits the light waves to obtain reflected light waves and diffracted light waves. The reflected light waves are emitted from the normal reflection direction of the spatial light modulator 5. The diffracted light waves are The direction perpendicular to the surface of the reflector 7 is diffracted onto the reflector 7, and the reflector 7 reflects the light wave to the spatial light modulator 5 along the incident light path, and is diffracted to the collimator lens 4 by the spatial light modulator 5, and then After being transmitted by the straight lens 4 , it enters the laser diode 2 through the antireflection film 3 , and the light transmitted through the laser diode 2 is reflected by the high reflection film 1 and then reflected into the laser diode 2 .

在激光二极管2的非发光面镀有高反射膜1,为光波提供强反馈,降低激光器的增益阈值,同时该高反射膜1还起到反射和聚光的作用,能够使激光二极管发射的光、以及从外部入射至激光二极管内部的光都被反射后经由激光二极管的发光面的增透膜3发射出去;激光二极管2产生光波,并对光波进行放大;增透膜3使从激光二极管2发出的光直接进入外腔,而不在激光二极管2内发生反射,从而不会产生内腔模式;准直透镜4对光波进行扩束和准直,减小光波的发散角,提高光束质量。The non-luminous surface of the laser diode 2 is coated with a high-reflection film 1, which provides strong feedback for the light wave and reduces the gain threshold of the laser. , and the light incident from the outside to the inside of the laser diode is reflected and emitted through the anti-reflection coating 3 on the light-emitting surface of the laser diode; the laser diode 2 generates light waves and amplifies the light waves; The emitted light directly enters the external cavity without reflection in the laser diode 2, so that no internal cavity mode occurs; the collimator lens 4 expands and collimates the light wave, reduces the divergence angle of the light wave, and improves the beam quality.

高反射膜1与激光二极管2相接触的一面与反射镜7的反射端面共同组成了激光器谐振腔的两个端面,两个端面之间的光学长度即为激光器的光学腔长,按照激光器的纵模理论,激光器的光学腔长应为激光器出射光二分之一波长的整数倍,反射镜7为光波提供反馈,同时他只能使垂直于镜面入射的光波沿原路返回。The side of the high-reflection film 1 in contact with the laser diode 2 and the reflective end face of the mirror 7 together form the two end faces of the laser resonator. The optical length between the two end faces is the optical cavity length of the laser. According to the longitudinal direction of the laser According to the mode theory, the optical cavity length of the laser should be an integer multiple of half the wavelength of the laser output light, and the mirror 7 provides feedback for the light wave, and at the same time it can only make the light wave incident perpendicular to the mirror surface return along the original path.

空间光调制器5作为光学滤波器,使激光器进行单模运转;电寻址的空间光调制器能够准确地控制每一个像素内材料的光学性质,有利于对激光的精确控制,因此本发明选用电寻址的空间光调制器能够通过数字编程来操纵空间光调制器5的控制信号,使空间光调制器5形成类似于光栅的周期性结构,对入射到其上面的光波进行调制,这时空间光调制器5的周期长度是可以改变的,改变空间光调制5的控制信号即可实现对其周期的快速调制;当控制信号发生改变时,周期就发生了改变,对应于入射到反射镜7上的光波频率相应地也发生变化,由于空间光调制器5中每个独立的像素单元是离散的,那么其反射峰值也是离散变化的,只需要通过改变空间光调制器5上的控制信号,即可选择不同的纵模模式,实现对激光器频率粗调。The spatial light modulator 5 is used as an optical filter to enable the laser to perform single-mode operation; the electrically addressable spatial light modulator can accurately control the optical properties of the material in each pixel, which is beneficial to the precise control of the laser, so the present invention uses The electrical addressable spatial light modulator can manipulate the control signal of the spatial light modulator 5 through digital programming, so that the spatial light modulator 5 forms a periodic structure similar to a grating, and modulates the light waves incident on it. At this time The period length of the spatial light modulator 5 can be changed, and the rapid modulation of its period can be realized by changing the control signal of the spatial light modulator 5; when the control signal changes, the period changes, corresponding to the The frequency of the light wave on 7 also changes correspondingly, since each independent pixel unit in the spatial light modulator 5 is discrete, so its reflection peak also changes discretely, only by changing the control signal on the spatial light modulator 5 , different longitudinal mode modes can be selected to achieve coarse adjustment of the laser frequency.

具体实施方式二:本实施方式对方式一所述的基于空间光调制器的可调谐外腔半导体激光器作进一步说明,本实施方式中,它还包括:空间光调制器基座6、PZT压电陶瓷8和反射镜基座9;Specific implementation mode two: This implementation mode further explains the tunable external cavity semiconductor laser based on the spatial light modulator described in the first mode. In this embodiment mode, it also includes: a spatial light modulator base 6, a PZT piezoelectric Ceramic 8 and reflector base 9;

空间光调制器5固定于空间光调制器基座6上,PZT压电陶瓷8固定于反射镜基座9上,反射镜7固定于PZT压电陶瓷8上。The spatial light modulator 5 is fixed on the base 6 of the spatial light modulator, the PZT piezoelectric ceramic 8 is fixed on the reflector base 9 , and the reflector 7 is fixed on the PZT piezoelectric ceramic 8 .

空间光调制器基座6能够机械调节空间光调制器5的位置和方向,反射镜基座9能够机械调节反射镜7的位置和方向。The spatial light modulator base 6 can mechanically adjust the position and direction of the spatial light modulator 5 , and the reflector base 9 can mechanically adjust the position and direction of the reflector 7 .

PZT压电陶瓷8可以实现对频率的精调,调节PZT压电陶瓷8的电信号,激光器的光学腔长会发生变化,激光器的纵模也会跟着移动,在空间光调制器反射峰的包络内就能够实现连续调谐,即能精确控制激光器的激射波长。PZT piezoelectric ceramic 8 can realize the fine adjustment of frequency, adjust the electrical signal of PZT piezoelectric ceramic 8, the optical cavity length of the laser will change, and the longitudinal mode of the laser will also move accordingly. Continuous tuning can be realized in the network, that is, the lasing wavelength of the laser can be precisely controlled.

基于空间光调制器的可调谐外腔半导体激光器固定在一个密封的机械平台上,机械平台上分别固定有空间光调制器基座6和反射镜基座9,密封的机械平台可以确保激光器免受外界温度和气流的影响,采取一定的防震措施后,激光器能够抵御外界较强的振动;通过改变反射镜7的位置,激光器谐振腔的腔长就发生了变化,改变反射镜7的角度,从空间光调制器5衍射出来的光波的角度就会发生变化,从而反射峰值就发生了变化,通过改变空间光调制5的位置和方向,同样能使激光器谐振腔的腔长和反射峰值发生变化;因此,激光器不仅能实现对离散的波长进行调谐,同时也能实现一定范围内连续的调谐。The tunable external cavity semiconductor laser based on the spatial light modulator is fixed on a sealed mechanical platform, and the spatial light modulator base 6 and the mirror base 9 are respectively fixed on the mechanical platform. The sealed mechanical platform can ensure that the laser is protected from Influenced by external temperature and air flow, after taking certain anti-shock measures, the laser can resist strong external vibrations; by changing the position of the reflector 7, the cavity length of the laser resonator is changed, changing the angle of the reflector 7, from The angle of the light wave diffracted by the spatial light modulator 5 will change, so that the reflection peak will change. By changing the position and direction of the spatial light modulator 5, the cavity length and reflection peak of the laser resonator can also be changed; Therefore, the laser can not only realize the tuning of discrete wavelengths, but also realize continuous tuning within a certain range.

具体实施方式三:参照图2具体说明本实施方式。本实施方式所述的基于空间光调制器的可调谐外腔半导体激光器,它包括:高反射膜1、激光二极管2、增透膜3、准直透镜4、空间光调制器5和第二空间光调制器10,准直透镜4、空间光调制器5和第二空间光调制器10均位于激光器的外腔内,空间光调制器5为电寻址的空间光调制器;Specific Embodiment Three: This embodiment will be specifically described with reference to FIG. 2 . The tunable external cavity semiconductor laser based on the spatial light modulator described in this embodiment includes: a high reflection film 1, a laser diode 2, an antireflection film 3, a collimating lens 4, a spatial light modulator 5 and a second space The light modulator 10, the collimator lens 4, the spatial light modulator 5 and the second spatial light modulator 10 are all located in the external cavity of the laser, and the spatial light modulator 5 is an electrically addressable spatial light modulator;

在激光二极管2的发光面镀有增透膜3,非发光面镀有高反射膜1,激光二极管2产生并发射的光波经增透膜3射入激光器的外腔,在该外腔内经准直透镜4准直后入射到空间光调制器5,该空间光调制器5将光波分束获得反射光波和衍射光波,该反射光波从空间光调制器5正常反射的方向射出,该衍射光波以不垂直于第二空间光调制器10表面的方向衍射到第二空间光调制器10上,该经第二空间光调制器10将光波沿入射光路反射到空间光调制器5上,经该空间光调制器5衍射至准直透镜4,经该准直透镜4透射后经增透膜3入射至激光二极管2,经该激光二极管2透射的光经高反射膜1反射后反射至激光二极管2中。The light-emitting surface of the laser diode 2 is coated with an anti-reflection film 3, and the non-luminous surface is coated with a high-reflection film 1. The light waves generated and emitted by the laser diode 2 enter the outer cavity of the laser through the anti-reflection film 3, and are calibrated in the external cavity. After being collimated by the straight lens 4, it enters the spatial light modulator 5. The spatial light modulator 5 splits the light waves to obtain reflected light waves and diffracted light waves. The reflected light waves are emitted from the normal reflection direction of the spatial light modulator 5. The diffracted light waves are The direction not perpendicular to the surface of the second spatial light modulator 10 is diffracted onto the second spatial light modulator 10, and the second spatial light modulator 10 reflects the light wave to the spatial light modulator 5 along the incident light path, and passes through the space The light modulator 5 diffracts to the collimator lens 4, and after being transmitted by the collimator lens 4, it enters the laser diode 2 through the antireflection film 3, and the light transmitted by the laser diode 2 is reflected by the high reflection film 1 and then reflected to the laser diode 2 middle.

当第二空间光调制器10的反射平面与空间光调制器5的衍射光束垂直时,本实施方式与具体实施方式一是等价的技术方案;当第二空间光调制器10的反射平面与空间光调制器5的衍射光束不垂直时,第二空间光调制器10的角度选频作用能使激光出射到新的频率;两个空间光调制器都相当于衍射光栅,并且光栅的周期都是可变的,整个装置更加灵活,激光器的调谐范围更大。When the reflection plane of the second spatial light modulator 10 is perpendicular to the diffracted light beam of the spatial light modulator 5, this embodiment and the first embodiment are equivalent technical solutions; when the reflection plane of the second spatial light modulator 10 is perpendicular to When the diffracted light beam of the spatial light modulator 5 is not vertical, the angular frequency selection function of the second spatial light modulator 10 can make the laser light emit to a new frequency; both spatial light modulators are equivalent to diffraction gratings, and the periods of the gratings are both is variable, the whole device is more flexible, and the tuning range of the laser is larger.

具体实施方式四:本实施方式对方式三所述的基于空间光调制器的可调谐外腔半导体激光器作进一步说明,本实施方式中,它还包括:空间光调制器基座6、PZT压电陶瓷8和第二空间光调制器基座11;Specific Embodiment 4: This embodiment further describes the tunable external cavity semiconductor laser based on the spatial light modulator described in the third method. In this embodiment, it also includes: a spatial light modulator base 6, a PZT piezoelectric Ceramic 8 and second spatial light modulator base 11;

空间光调制器5固定于空间光调制器基座6上,PZT压电陶瓷8固定于第二空间光调制器基座11上,第二空间光调制器10固定于PZT压电陶瓷8上。The spatial light modulator 5 is fixed on the spatial light modulator base 6 , the PZT piezoelectric ceramic 8 is fixed on the second spatial light modulator base 11 , and the second spatial light modulator 10 is fixed on the PZT piezoelectric ceramic 8 .

具体实施方式五:参照图3具体说明本实施方式。本实施方式所述的基于空间光调制器的可调谐外腔半导体激光器,它包括:高反射膜1、激光二极管2、增透膜3、准直透镜4、衍射光栅12和第二空间光调制器10,准直透镜4、衍射光栅12和第二空间光调制器10均位于激光器的外腔内,空间光调制器5为电寻址的空间光调制器;Embodiment 5: This embodiment will be described in detail with reference to FIG. 3 . The tunable external cavity semiconductor laser based on the spatial light modulator described in this embodiment includes: a high reflection film 1, a laser diode 2, an antireflection film 3, a collimator lens 4, a diffraction grating 12 and a second spatial light modulator The device 10, the collimating lens 4, the diffraction grating 12 and the second spatial light modulator 10 are all located in the external cavity of the laser, and the spatial light modulator 5 is an electrically addressable spatial light modulator;

在激光二极管2的发光面镀有增透膜3,非发光面镀有高反射膜1,激光二极管2产生并发射的光波经增透膜3射入激光器的外腔,在该外腔内经准直透镜4准直后入射到衍射光栅12,该衍射光栅12将该光波分束获得反射光波和衍射光波,该反射光波从衍射光栅12正常反射的方向射出,该衍射光波以不垂直于第二空间光调制器10表面的方向衍射到第二空间光调制器10上,该第二空间光调制器10将光波沿入射光路反射到衍射光栅12,经该衍射光栅12衍射至准直透镜4、经该准直透镜4透射后经增透膜3入射至激光二极管2,经该激光二极管2透射的光经高反射膜1反射后反射至激光二极管2中。The light-emitting surface of the laser diode 2 is coated with an anti-reflection film 3, and the non-luminous surface is coated with a high-reflection film 1. The light waves generated and emitted by the laser diode 2 enter the outer cavity of the laser through the anti-reflection film 3, and are calibrated in the external cavity. After being collimated by the straight lens 4, it enters the diffraction grating 12. The diffraction grating 12 splits the light wave to obtain a reflected light wave and a diffracted light wave. The direction of the surface of the spatial light modulator 10 is diffracted onto the second spatial light modulator 10, and the second spatial light modulator 10 reflects the light wave along the incident light path to the diffraction grating 12, and then diffracts the light wave to the collimating lens 4, After being transmitted by the collimator lens 4 , it enters the laser diode 2 through the antireflection film 3 , and the light transmitted through the laser diode 2 is reflected by the high reflection film 1 and then reflected into the laser diode 2 .

具体实施方式六:本实施方式对方式五所述的基于空间光调制器的可调谐外腔半导体激光器作进一步说明,本实施方式中,它还包括:衍射光栅基座13、PZT压电陶瓷8和第二空间光调制器基座11;Specific Embodiment Six: This embodiment further describes the tunable external cavity semiconductor laser based on the spatial light modulator described in the fifth embodiment. In this embodiment, it also includes: a diffraction grating base 13, a PZT piezoelectric ceramic 8 and the second spatial light modulator base 11;

衍射光栅12固定于衍射光栅基座13上,PZT压电陶瓷8固定于第二空间光调制器基座11上,第二空间光调制器10固定于PZT压电陶瓷8上。The diffraction grating 12 is fixed on the diffraction grating base 13 , the PZT piezoelectric ceramic 8 is fixed on the second spatial light modulator base 11 , and the second spatial light modulator 10 is fixed on the PZT piezoelectric ceramic 8 .

Claims (6)

1.基于空间光调制器的可调谐外腔半导体激光器,其特征在于,它包括:高反射膜(1)、激光二极管(2)、增透膜(3)、准直透镜(4)、空间光调制器(5)和反射镜(7),准直透镜(4)、空间光调制器(5)和反射镜(7)均位于激光器的外腔内,空间光调制器(5)为电寻址的空间光调制器;1. The tunable external cavity semiconductor laser based on the spatial light modulator is characterized in that it includes: a high reflection film (1), a laser diode (2), an antireflection film (3), a collimating lens (4), a space The light modulator (5) and the mirror (7), the collimator lens (4), the spatial light modulator (5) and the mirror (7) are all located in the outer cavity of the laser, and the spatial light modulator (5) is an electrical addressable spatial light modulator; 在激光二极管(2)的发光面镀有增透膜(3),非发光面镀有高反射膜(1),激光二极管(2)产生并发射的光波经增透膜(3)射入激光器的外腔,在该外腔内经准直透镜(4)准直后入射到空间光调制器(5),该空间光调制器(5)将光波分束获得反射光波和衍射光波,该反射光波从空间光调制器(5)正常反射的方向射出,该衍射光波以垂直于反射镜(7)表面的方向衍射到反射镜(7)上,该反射镜(7)将光波沿入射光路反射到空间光调制器(5)上,经该空间光调制器(5)衍射至准直透镜(4),经该准直透镜(4)透射后经增透膜(3)入射至激光二极管(2),经该激光二极管(2)透射的光经高反射膜(1)反射后反射至激光二极管(2)中。The light-emitting surface of the laser diode (2) is coated with an anti-reflection film (3), and the non-luminous surface is coated with a high-reflection film (1). The light waves generated and emitted by the laser diode (2) enter the laser through the anti-reflection film (3) The external cavity of the external cavity is collimated by the collimating lens (4) and then enters the spatial light modulator (5). The spatial light modulator (5) splits the light waves to obtain reflected light waves and diffracted light waves. The reflected light waves Emitted from the normal reflection direction of the spatial light modulator (5), the diffracted light wave is diffracted onto the reflector (7) in a direction perpendicular to the surface of the reflector (7), and the reflector (7) reflects the light wave along the incident light path to On the spatial light modulator (5), it diffracts to the collimator lens (4) through the spatial light modulator (5), and is incident to the laser diode (2) through the antireflection film (3) after being transmitted through the collimator lens (4). ), the light transmitted by the laser diode (2) is reflected by the high reflection film (1) and then reflected into the laser diode (2). 2.根据权利要求1所述的基于空间光调制器的可调谐外腔半导体激光器,其特征在于,它还包括:空间光调制器基座(6)、PZT压电陶瓷(8)和反射镜基座(9);2. the tunable external cavity semiconductor laser based on spatial light modulator according to claim 1, is characterized in that, it also comprises: spatial light modulator base (6), PZT piezoelectric ceramics (8) and mirror base (9); 空间光调制器(5)固定于空间光调制器基座(6)上,PZT压电陶瓷(8)固定于反射镜基座(9)上,反射镜(7)固定于PZT压电陶瓷(8)上。The spatial light modulator (5) is fixed on the base of the spatial light modulator (6), the PZT piezoelectric ceramic (8) is fixed on the reflector base (9), and the reflector (7) is fixed on the PZT piezoelectric ceramic ( 8) on. 3.基于空间光调制器的可调谐外腔半导体激光器,其特征在于,它包括:高反射膜(1)、激光二极管(2)、增透膜(3)、准直透镜(4)、空间光调制器(5)和第二空间光调制器(10),准直透镜(4)、空间光调制器(5)和第二空间光调制器(10)均位于激光器的外腔内,空间光调制器(5)为电寻址的空间光调制器;3. The tunable external cavity semiconductor laser based on the spatial light modulator is characterized in that it includes: a high reflection film (1), a laser diode (2), an antireflection film (3), a collimating lens (4), a space The light modulator (5) and the second spatial light modulator (10), the collimator lens (4), the spatial light modulator (5) and the second spatial light modulator (10) are all located in the outer cavity of the laser, and the space The light modulator (5) is an electrically addressable spatial light modulator; 在激光二极管(2)的发光面镀有增透膜(3),非发光面镀有高反射膜(1),激光二极管(2)产生并发射的光波经增透膜(3)射入激光器的外腔,在该外腔内经准直透镜(4)准直后入射到空间光调制器(5),该空间光调制器(5)将光波分束获得反射光波和衍射光波,该反射光波从空间光调制器(5)正常反射的方向射出,该衍射光波以不垂直于第二空间光调制器(10)表面的方向衍射到第二空间光调制器(10)上,该经第二空间光调制器(10)将光波沿入射光路反射到空间光调制器(5)上,经该空间光调制器(5)衍射至准直透镜(4),经该准直透镜(4)透射后经增透膜(3)入射至激光二极管(2),经该激光二极管(2)透射的光经高反射膜(1)反射后反射至激光二极管(2)中。The light-emitting surface of the laser diode (2) is coated with an anti-reflection film (3), and the non-luminous surface is coated with a high-reflection film (1). The light waves generated and emitted by the laser diode (2) enter the laser through the anti-reflection film (3) The external cavity of the external cavity is collimated by the collimating lens (4) and then enters the spatial light modulator (5). The spatial light modulator (5) splits the light waves to obtain reflected light waves and diffracted light waves. The reflected light waves Emitted from the normal reflection direction of the spatial light modulator (5), the diffracted light wave is diffracted to the second spatial light modulator (10) in a direction not perpendicular to the surface of the second spatial light modulator (10), and the second The spatial light modulator (10) reflects the light wave to the spatial light modulator (5) along the incident light path, diffracts through the spatial light modulator (5) to the collimator lens (4), and transmits the light wave through the collimator lens (4) Afterwards, it enters the laser diode (2) through the antireflection film (3), and the light transmitted through the laser diode (2) is reflected by the high reflection film (1) and then reflected into the laser diode (2). 4.根据权利要求3所述的基于空间光调制器的可调谐外腔半导体激光器,其特征在于,它还包括:空间光调制器基座(6)、PZT压电陶瓷(8)和第二空间光调制器基座(11);4. the tunable external cavity semiconductor laser based on spatial light modulator according to claim 3, is characterized in that, it also comprises: spatial light modulator base (6), PZT piezoelectric ceramics (8) and second Spatial light modulator base (11); 空间光调制器(5)固定于空间光调制器基座(6)上,PZT压电陶瓷(8)固定于第二空间光调制器基座(11)上,第二空间光调制器(10)固定于PZT压电陶瓷(8)上。The spatial light modulator (5) is fixed on the base of the spatial light modulator (6), the PZT piezoelectric ceramic (8) is fixed on the base of the second spatial light modulator (11), and the second spatial light modulator (10 ) is fixed on the PZT piezoelectric ceramic (8). 5.基于空间光调制器的可调谐外腔半导体激光器,其特征在于,它包括:高反射膜(1)、激光二极管(2)、增透膜(3)、准直透镜(4)、衍射光栅(12)和第二空间光调制器(10),准直透镜(4)、衍射光栅(12)和第二空间光调制器(10)均位于激光器的外腔内,空间光调制器(5)为电寻址的空间光调制器;5. A tunable external cavity semiconductor laser based on a spatial light modulator, characterized in that it includes: a high reflection film (1), a laser diode (2), an antireflection film (3), a collimator lens (4), a diffractive The grating (12) and the second spatial light modulator (10), the collimator lens (4), the diffraction grating (12) and the second spatial light modulator (10) are all located in the outer cavity of the laser, and the spatial light modulator ( 5) A spatial light modulator for electrical addressing; 在激光二极管(2)的发光面镀有增透膜(3),非发光面镀有高反射膜(1),激光二极管(2)产生并发射的光波经增透膜(3)射入激光器的外腔,在该外腔内经准直透镜(4)准直后入射到衍射光栅(12),该衍射光栅(12)将该光波分束获得反射光波和衍射光波,该反射光波从衍射光栅(12)正常反射的方向射出,该衍射光波以不垂直于第二空间光调制器(10)表面的方向衍射到第二空间光调制器(10)上,该第二空间光调制器(10)将光波沿入射光路反射到衍射光栅(12),经该衍射光栅(12)衍射至准直透镜(4)、经该准直透镜(4)透射后经增透膜(3)入射至激光二极管(2),经该激光二极管(2)透射的光经高反射膜(1)反射后反射至激光二极管(2)中。The light-emitting surface of the laser diode (2) is coated with an anti-reflection film (3), and the non-luminous surface is coated with a high-reflection film (1). The light waves generated and emitted by the laser diode (2) enter the laser through the anti-reflection film (3) In the external cavity, after being collimated by the collimating lens (4), it enters the diffraction grating (12), and the diffraction grating (12) splits the light wave to obtain reflected light waves and diffracted light waves. (12) The direction of normal reflection is emitted, and the diffracted light wave is diffracted to the second spatial light modulator (10) in a direction not perpendicular to the surface of the second spatial light modulator (10), and the second spatial light modulator (10) ) reflects the light wave along the incident light path to the diffraction grating (12), diffracts through the diffraction grating (12) to the collimator lens (4), transmits through the collimator lens (4), and enters the laser through the anti-reflection film (3) A diode (2), the light transmitted by the laser diode (2) is reflected by the high reflection film (1) and then reflected into the laser diode (2). 6.根据权利要求5所述的基于空间光调制器的可调谐外腔半导体激光器,其特征在于,它还包括:衍射光栅基座(13)、PZT压电陶瓷(8)和第二空间光调制器基座(11);6. the tunable external cavity semiconductor laser based on spatial light modulator according to claim 5, is characterized in that, it also comprises: Diffraction grating base (13), PZT piezoelectric ceramics (8) and second spatial light modulator base (11); 衍射光栅(12)固定于衍射光栅基座(13)上,PZT压电陶瓷(8)固定于第二空间光调制器基座(11)上,第二空间光调制器(10)固定于PZT压电陶瓷(8)上。The diffraction grating (12) is fixed on the diffraction grating base (13), the PZT piezoelectric ceramic (8) is fixed on the second spatial light modulator base (11), and the second spatial light modulator (10) is fixed on the PZT On the piezoelectric ceramic (8).
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CN110429472A (en) * 2019-09-10 2019-11-08 微源光子(深圳)科技有限公司 A kind of high-power dual output exocoel narrow linewidth laser of easy volume production
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