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CN103149955B - Temperature accurate control device used for integrated cavity spectrum technology isotope analysis - Google Patents

Temperature accurate control device used for integrated cavity spectrum technology isotope analysis Download PDF

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CN103149955B
CN103149955B CN201310039844.2A CN201310039844A CN103149955B CN 103149955 B CN103149955 B CN 103149955B CN 201310039844 A CN201310039844 A CN 201310039844A CN 103149955 B CN103149955 B CN 103149955B
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laser
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optical path
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CN103149955A (en
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张志荣
董凤忠
夏滑
庞涛
吴边
王高璇
崔小娟
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Anhui Caszt Photoelectric Measurement And Control Technology Co Ltd
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Hefei Institutes of Physical Science of CAS
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Abstract

一种用于积分腔光谱技术同位素分析的温度精确控制装置包括:有光学路径系统的一次密封和温度稳定精确控制的二次密封系统。光学路径系统安装于一次密封壳体内部,其特征在于光学路径系统内集成有激光器,DFB激光器光源,光束汇聚准直透镜组,激光光路,光学腔,激光光束汇聚透镜,InGaAs探测器,以上部件均处于氮气氛围中避免外界气体的干扰。温度稳定精确控制的二次密封系统包括二次密封壳体,铂电阻温度传感器,刚性支架,半导体制冷堆,网状热交换器,风扇,减震泡沫,以及置于二次密封壳体外的温度控制器,驱动电路模块,各种控制命令及电信号均通过电缆进行密封连接。本发明具有结构简单、操作方便、响应快速、抗震性好、温度控制精度高、稳定性好的优点。

A precise temperature control device for isotope analysis of integral cavity spectroscopy comprises: a primary seal with an optical path system and a secondary seal system with stable and precise temperature control. The optical path system is installed inside the primary sealed housing, which is characterized in that the optical path system integrates a laser, a DFB laser light source, a beam converging collimator lens group, a laser optical path, an optical cavity, a laser beam converging lens, an InGaAs detector, and the above components All were in a nitrogen atmosphere to avoid the interference of external gases. The secondary sealing system with stable and precise temperature control includes a secondary sealing shell, a platinum resistance temperature sensor, a rigid support, a semiconductor refrigeration stack, a mesh heat exchanger, a fan, shock-absorbing foam, and a temperature placed outside the secondary sealing shell The controller, drive circuit module, various control commands and electrical signals are all sealed and connected through cables. The invention has the advantages of simple structure, convenient operation, fast response, good shock resistance, high temperature control precision and good stability.

Description

一种用于积分腔光谱技术同位素分析的温度精确控制装置A Precise Temperature Control Device for Isotope Analysis Using Integrating Cavity Spectroscopy

技术领域technical field

本发明涉及一种温度精确控制装置,更具体的说是一种应用于积分腔光谱技术气体同位素分析领域的温度精确控制的装置。The invention relates to a precise temperature control device, in particular to a precise temperature control device applied in the field of gas isotope analysis of integrating cavity spectroscopy technology.

背景技术Background technique

近年来稳定同位素分析在环境科学和环保领域的应用日益受到重视,尤其在大气、土壤、水质及生态环境研究中均发挥了重要作用。如应用稳定性同位素丰度变化,研究和指示环境污染源和污染程度;利用稳定同位素的示踪作用,可辨别温室气体的排放来源,分析人类活动如化石燃料燃烧、水泥生产、养殖畜牧以及农业生产对温室气体排放的贡献,不仅可以准确估算各排放源的排放总量对工厂、城市实施“节能减排”工作也具有一定的指导意义;通过测定甲烷同位素有助于了解大气中甲烷源汇的物理和化学变化机制,用于稻田、湿地等甲烷排放机理和氧化率的定量研究。此外稳定同位素分析在地质学、核工业、考古学、生态环境科学研究、生物学和化学研究、水资源开发、农业生产、食品安全、临床医学等多个学科也已得到了广泛的应用。In recent years, the application of stable isotope analysis in the field of environmental science and environmental protection has been paid more and more attention, especially in the study of atmosphere, soil, water quality and ecological environment. For example, the use of stable isotope abundance changes to study and indicate environmental pollution sources and pollution levels; the use of stable isotope tracers can identify the source of greenhouse gas emissions and analyze human activities such as fossil fuel combustion, cement production, animal husbandry and agricultural production The contribution to greenhouse gas emissions can not only accurately estimate the total emissions of each emission source, but also has certain guiding significance for the implementation of "energy saving and emission reduction" in factories and cities; the determination of methane isotopes helps to understand the relationship between methane sources and sinks in the atmosphere Physical and chemical change mechanism, used for quantitative research on methane emission mechanism and oxidation rate of rice fields, wetlands, etc. In addition, stable isotope analysis has also been widely used in many disciplines such as geology, nuclear industry, archaeology, ecological and environmental science research, biology and chemistry research, water resources development, agricultural production, food safety, and clinical medicine.

积分腔光谱技术是通过测量透过光腔的时间积分光强,与入射光强的差值,计算待测气体浓度,这种方法更接近于传统的直接吸收光谱,更符合Beer-Lambert定律。该技术具有极高的测量频率、光谱分辨率及测量灵敏度,测量设备结构简单且结果无需复杂标定,而且可以做成小型化便携式,辅助其他物理手段同一台激光同位素分析仪可以实现对气、液、固三态样品进行分析,因此相较基于质谱技术的同位素分析仪有诸多优势。Integrating cavity spectroscopy technology calculates the gas concentration to be measured by measuring the difference between the time-integrated light intensity passing through the optical cavity and the incident light intensity. This method is closer to the traditional direct absorption spectrum and more in line with the Beer-Lambert law. This technology has extremely high measurement frequency, spectral resolution and measurement sensitivity. The structure of the measurement equipment is simple and the results do not require complicated calibration. It can also be made miniaturized and portable, assisting other physical means. The same laser isotope analyzer can realize gas and liquid analysis. Therefore, it has many advantages over isotope analyzers based on mass spectrometry.

在积分腔光谱技术同位素测量分析过程中,为了使仪器系统本身发挥最大的性能除了选择独立的激光光源外,保持一个单一、恒定的温度和最小的环境振动也是必不可少的。温度调控速度是所有电学系统,激光光源,仪器尺寸,声速等在内的主要影响因素。通常情况下这些参数会随着每Kelvin的变化有10-4~10-5的变化量。如果测量目标是固体或者液体,温度的变化将会造成系统较大的漂移甚至测量结果的极大不准确。当采用积分腔光谱技术测量气体同位素分析时,如:C14O2,C13O2,C12O2,温度的变化将会影响不同同位素的Boltzman分布情况,甚至加剧测量已知固定组分情况的同位素比值的不准确。并且,气体同位素真正浓度的测量和超精密光路的稳定性在很大程度上依赖于温度稳定性,否则无法获得准确的测量结果,而准确、快速且稳定的温度精确控制,也恰恰是使仪器零漂移最小的重要指标之一。因此精确的温度控制装置对于拓展积分腔光谱技术同位素分析仪的适用环境,提高检测的实效性和准确性都具有十分重要的意义。In the isotope measurement and analysis process of the integral cavity spectroscopy technology, in order to maximize the performance of the instrument system itself, in addition to selecting an independent laser light source, it is also essential to maintain a single, constant temperature and minimum environmental vibration. The speed of temperature regulation is the main influencing factor of all electrical systems, laser light source, instrument size, sound velocity, etc. Usually, these parameters will vary by 10 -4 ~10 -5 per Kelvin. If the measurement target is solid or liquid, the temperature change will cause a large drift of the system and even a great inaccuracy of the measurement results. When using integrating cavity spectroscopy to measure gas isotope analysis, such as: C 14 O 2 , C 13 O 2 , C 12 O 2 , temperature changes will affect the Boltzman distribution of different isotopes, and even aggravate the measurement of known fixed components. The inaccuracy of the isotope ratio of the situation. Moreover, the measurement of the true concentration of gas isotopes and the stability of the ultra-precise optical path depend to a large extent on temperature stability, otherwise accurate measurement results cannot be obtained, and accurate, fast and stable temperature control is exactly what makes the instrument One of the important indicators with the smallest zero drift. Therefore, an accurate temperature control device is of great significance for expanding the applicable environment of the isotope analyzer of integrating cavity spectroscopy and improving the effectiveness and accuracy of detection.

发明内容Contents of the invention

本发明的技术解决问题:克服现有技术的不足,提供一种用于积分腔光谱技术同位素分析的温度精确控制装置,以解决现有的积分腔光谱技术同位素分析在测量过程中受温度影响的准确性、稳定性和零漂移问题。The technical problem of the present invention is to overcome the deficiencies of the prior art, and provide a precise temperature control device for isotope analysis of the integral cavity spectroscopy technique, so as to solve the problem that the isotope analysis of the existing integral cavity spectroscopy technique is affected by temperature during the measurement process Accuracy, stability and zero drift issues.

本发明的技术方案如下:一种用于积分腔光谱技术同位素分析的温度精确控制装置,其特征在于包括:光学路径系统1、一次密封壳体2、四个铂电阻温度传感器3、二次密封壳体5、两个热控装置、氮气9氛围、温度控制器10、驱动电路模块11、刚性支架13和减震泡沫14;所述两个热控装置分别安装于二次密封壳体5对称的壳体两端,每个热控装置由半导体制冷堆6,网状热交换器7和风扇8组成,网状热交换器7的1/3部分安装于半导体制冷堆6的内部并与半导体制冷堆6紧密无缝相连,使网状热交换器7和半导体制冷堆6之间的热量交换达到最充分的情况,风扇8安装于网状热交换器7的同一侧,安装位置应保持一致同左或同右,使风扇8作用下的热交换气流形成顺时针或者逆时针的层流4方向;光学路径系统1安装于一次密封壳体2内部,一次密封壳体2通过减震泡沫14进行热隔离和减振,然后再通过刚性支架13固定在二次密封壳体5内部;所述一次密封壳体2内部和二次密封壳体5内部均需充满氮气9氛围;四个铂电阻温度传感器3中的两个铂电阻温度传感器分别安装嵌入在一次密封壳体2的对角两端壳体内,另外两个铂电阻温度传感器分别安装在网状热交换器7远离风扇8的一端;所有的铂电阻温度传感器3均与安装于二次密封壳体5外部的温度控制器10相连,并实时获取一次密封壳体2内部和二次密封壳体5内部的温度情况;温度控制器10根据不同的铂电阻温度传感器3的反馈信息,通过PID控制输出控制安装于二次密封壳体5外部的驱动电路模块11进行温度精确控制工作,当温度控制器3的PID控制发出温度控制命令时,驱动电路模块11开始正常工作,驱动半导体制冷堆6进行加热或者制冷控制,并启动风扇8加速热量循环,极大的缩短了温度控制的时间和提高了热交换的效率,从而保证温度的稳定性,且驱动电路模块11在运行过程中实时根据接收到的温度控制器10指令实时循环控制直至达到指定温度;同时在工作过程中实时处理温度变化情况,进行循环控制直至达到指定温度。The technical scheme of the present invention is as follows: a precise temperature control device for isotope analysis of integral cavity spectroscopy, which is characterized in that it includes: an optical path system 1, a primary sealing shell 2, four platinum resistance temperature sensors 3, a secondary sealing Housing 5, two thermal control devices, nitrogen 9 atmosphere, temperature controller 10, drive circuit module 11, rigid bracket 13 and shock-absorbing foam 14; the two thermal control devices are respectively installed in the secondary sealed housing 5 symmetrically At both ends of the housing, each thermal control device is composed of a semiconductor refrigeration stack 6, a mesh heat exchanger 7 and a fan 8, and 1/3 of the mesh heat exchanger 7 is installed inside the semiconductor refrigeration stack 6 and connected to the semiconductor refrigeration stack. The refrigeration stack 6 is closely and seamlessly connected, so that the heat exchange between the mesh heat exchanger 7 and the semiconductor refrigeration stack 6 can reach the most sufficient situation, and the fan 8 is installed on the same side of the mesh heat exchanger 7, and the installation position should be consistent The same as the left or the right, so that the heat exchange air flow under the action of the fan 8 forms a clockwise or counterclockwise laminar flow 4 direction; Isolation and vibration damping, and then fixed inside the secondary sealed casing 5 through a rigid bracket 13; the inside of the primary sealed casing 2 and the inside of the secondary sealed casing 5 need to be filled with nitrogen 9 atmosphere; four platinum resistance temperature sensors The two platinum resistance temperature sensors in 3 are respectively installed and embedded in the housings at both ends of the primary sealed housing 2, and the other two platinum resistance temperature sensors are respectively installed at the end of the mesh heat exchanger 7 away from the fan 8; all Platinum resistance temperature sensors 3 are all connected to each other with the temperature controller 10 installed on the outside of the secondary sealed casing 5, and obtain the temperature conditions inside the primary sealed casing 2 and the inside of the secondary sealed casing 5 in real time; The feedback information of the platinum resistance temperature sensor 3 is controlled by the PID control output to control the drive circuit module 11 installed outside the secondary sealed casing 5 to perform precise temperature control work. When the PID control of the temperature controller 3 issues a temperature control command, the drive The circuit module 11 starts to work normally, drives the semiconductor refrigeration stack 6 for heating or cooling control, and starts the fan 8 to accelerate the heat cycle, which greatly shortens the time for temperature control and improves the efficiency of heat exchange, thereby ensuring temperature stability. In addition, the driving circuit module 11 performs cyclic control in real time according to the received temperature controller 10 instruction until reaching the specified temperature during operation; meanwhile, it processes temperature changes in real time during the working process and performs cyclic control until reaching the specified temperature.

所述的光学路径系统1包括DFB激光器301、光束汇聚准直透镜组302、准直光束303、光学腔304、激光光束汇聚透镜306、InGaAs探测器307。DFB激光器301受到安装于一次密封壳体2和二次密封壳体5外部的激光器驱动源308驱动产生调制激光,激光光束经过光束汇聚准直透镜组302形成(光斑直径≤1mm)准直光束303,准直光束303经过光学腔304内部的待测气体305吸收以后,经过激光光束汇聚透镜306汇聚到InGaAs探测器307的光敏面上,其汇聚光斑大小≤1mm2。然后经过光电转后的信号通过电缆12送入安装于一次密封壳体2和二次密封壳体5外部的信号后续处理单元309进行后续的信号处理和气体同位素丰度的反演,该系统所有部件均处于氮气9氛围。The optical path system 1 includes a DFB laser 301 , a beam converging collimating lens group 302 , a collimated beam 303 , an optical cavity 304 , a laser beam converging lens 306 , and an InGaAs detector 307 . The DFB laser 301 is driven by the laser driving source 308 installed outside the primary sealed casing 2 and the secondary sealed casing 5 to generate modulated laser light, and the laser beam passes through the beam converging collimating lens group 302 to form a collimated beam 303 (spot diameter ≤ 1mm) After the collimated beam 303 is absorbed by the gas to be measured 305 inside the optical cavity 304, it is converged to the photosensitive surface of the InGaAs detector 307 by the laser beam converging lens 306, and the converging spot size is ≤1mm 2 . Then the signal after the photoelectric conversion is sent to the signal follow-up processing unit 309 installed outside the primary sealed casing 2 and the secondary sealed casing 5 through the cable 12 for subsequent signal processing and inversion of gas isotope abundance. The parts were all in a nitrogen 9 atmosphere.

所述的激光器驱动源308安装于一次密封壳体2和二次密封壳体5外部,包括:激光器驱动的温度控制器、电流控制器和产生三角波扫描信号、正弦波调制信号的信号发生器单元;温度控制器、电流控制器驱动DFB激光器(301)正常工作,信号发生器单元使DFB激光器301产生调制激光。The laser driving source 308 is installed outside the primary sealed casing 2 and the secondary sealed casing 5, including: a temperature controller driven by the laser, a current controller, and a signal generator unit that generates triangular wave scanning signals and sine wave modulation signals ; The temperature controller and the current controller drive the DFB laser (301) to work normally, and the signal generator unit makes the DFB laser 301 generate modulated laser light.

所述的DFB激光器301为可调谐半导体激光器。The DFB laser 301 is a tunable semiconductor laser.

所述后续处理单元309安装于一次密封壳体2和二次密封壳体5外部,包括:光电信号放大电路,锁相放大器,数据采集卡和计算机;InGaAs探测器308的输出信号送入光电信号放大电路,经过放大电路放大以后的信号送入锁相放大器进行解调获得相应的谐波信号,谐波信号通过安装于计算机内部的数据采集卡进行采集然后进行后续的信号处理和气体同位素丰度的反演。Described follow-up processing unit 309 is installed on the outside of primary sealed housing 2 and secondary sealed housing 5, comprising: photoelectric signal amplifying circuit, lock-in amplifier, data acquisition card and computer; The output signal of InGaAs detector 308 is sent into photoelectric signal Amplifying circuit, the signal amplified by the amplifying circuit is sent to the lock-in amplifier for demodulation to obtain the corresponding harmonic signal, the harmonic signal is collected by the data acquisition card installed in the computer, and then the subsequent signal processing and gas isotope abundance inversion.

所述的光学腔304为离轴积分腔,腔体侧面连接进出气口,同时使入射到腔内的激光光束303来回多次反射,极大地增加测量气体的吸收光程长度,从而提高检测气体的灵敏度。The optical cavity 304 is an off-axis integrating cavity, the side of the cavity is connected to the gas inlet and outlet, and at the same time, the laser beam 303 incident into the cavity is reflected back and forth multiple times, which greatly increases the absorption optical path length of the measured gas, thereby improving the detection of the gas. sensitivity.

所述PID控制采用为模糊自适应PID控制算法,工作内容有温度设定、数据采集、PID控制输出,通过比较实时温度、设定温度之间的差异,通过PID输出控制半导体制冷堆6制冷或制热,使光学路径系统1在某一温度保持稳定。The PID control adopts a fuzzy self-adaptive PID control algorithm, and the work content includes temperature setting, data acquisition, and PID control output. By comparing the difference between the real-time temperature and the set temperature, the PID output is used to control the semiconductor refrigeration stack 6 to refrigerate or Heat is applied to keep the optical path system 1 stable at a certain temperature.

所述系统所有供电电源均采用DC-24V供电。All power supplies of the system are powered by DC-24V.

本发明与现有技术相比的优点在于:The advantage of the present invention compared with prior art is:

(1)现行的积分腔光谱同位素分析技术测量普遍的要求是具有高灵敏度、高精度,且装置本身应该坚固、便携、应用范围广。例如,当仪器暴露在某些外界环境温度变化频繁,存在震动的环境中,积分腔光谱同位素分析的温度精确控制装置就必须不受热环境和震动环境的干扰,保持高度的稳定性和精确性,而本发明解决了现有的积分腔光谱技术同位素分析在测量过程中的温度稳定性问题,提高了测量的准确性、稳定性,而且能够减少外界因素影响,改善系统零漂移的优点。(1) The general requirements of the current integrating cavity spectroscopic isotope analysis technology are high sensitivity and high precision, and the device itself should be strong, portable and widely used. For example, when the instrument is exposed to an environment where the temperature of the external environment changes frequently and there is vibration, the precise temperature control device for the spectroscopic isotope analysis of the integrating cavity must not be disturbed by the thermal environment and the vibration environment, and maintain a high degree of stability and accuracy. However, the present invention solves the problem of temperature stability in the measurement process of the existing integrating cavity spectroscopy technology isotope analysis, improves the accuracy and stability of the measurement, and can reduce the influence of external factors and improve the advantages of zero drift of the system.

(2)本发明将由激光器、镜片、光学腔以及InGaAs探测器组成的光学路径系统密封在一起进行一次密封,然后放入二次密封壳体内进行再次密封,对整个二次密封壳体进行温度精确控制。温度精确控制的目的并不是将温度精确的控制在某一温度,而是追求系统光路在某一温度的稳定性,至少能达到±0.01K,最好能达到±0.001K的稳定幅度。(2) The present invention seals the optical path system composed of lasers, lenses, optical cavities and InGaAs detectors together for primary sealing, and then puts them into the secondary sealing shell for re-sealing, and carries out temperature accuracy for the entire secondary sealing shell. control. The purpose of precise temperature control is not to precisely control the temperature at a certain temperature, but to pursue the stability of the system optical path at a certain temperature, at least ±0.01K, preferably ±0.001K.

(3)本发明各部分分别集成封装,采用多点温度测量与控制系统,采用闭环控制PID算法达到了实时的温度检测和实时的精确稳定控制。(3) Each part of the present invention is separately integrated and packaged, adopts a multi-point temperature measurement and control system, and adopts a closed-loop control PID algorithm to achieve real-time temperature detection and real-time accurate and stable control.

(4)本发明采用半导体制冷堆、网状热交换器、风扇等部件极大的缩短了温度控制的时间和提高了热交换的效率,实现了在极短时间内的温度精确控制和长时间的温度精确稳定。(4) The present invention greatly shortens the time of temperature control and improves the efficiency of heat exchange by adopting components such as semiconductor refrigeration stacks, mesh heat exchangers, and fans, and realizes precise temperature control in a very short period of time and long-term The temperature is precise and stable.

(5)本发明采用震动较小的风扇、刚性支架和抗震材料,在保证温度控制精度和稳定度的同时,保证了系统的抗震性和结构稳定度。(5) The present invention adopts a fan with less vibration, a rigid support and an anti-seismic material to ensure the anti-seismicity and structural stability of the system while ensuring the temperature control accuracy and stability.

(6)本发明的一次密封壳体和二次密封壳体均为严格密封条件,且其内部充满了氮气氛围,因此在同位素测量过程中消除了其他干扰气体的影响。(6) Both the primary sealed casing and the secondary sealed casing of the present invention are strictly sealed, and the inside is filled with nitrogen atmosphere, so the influence of other interfering gases is eliminated during the isotope measurement process.

附图说明Description of drawings

图1为本发明整体温度精确控制系统的俯视平面图;Fig. 1 is the top plan view of integral temperature precise control system of the present invention;

图2为本发明整体温度精确控制系统的侧面平面图;Fig. 2 is a side plan view of the overall precise temperature control system of the present invention;

图3为本发明一次密封壳体的光学路径系统图。Fig. 3 is an optical path system diagram of the primary sealed housing of the present invention.

具体实施方式Detailed ways

如图1、图2、图3所示,本发明装置包括两部分:一是光学路径系统1;二是用来精确控制温度的二次密封系统;精确控制温度的二次密封系统包括:光学路径系统1通过一次密封壳体2进行第一次密封,铂电阻温度传感器3,气体层流4,二次密封壳体5,半导体制冷堆6,网状热交换器7,风扇8,氮气9氛围,温度控制器10,驱动电路模块11,电缆12,刚性支架13,减震泡沫14。As shown in Fig. 1, Fig. 2 and Fig. 3, the device of the present invention includes two parts: one is the optical path system 1; the other is a secondary sealing system for precise temperature control; the secondary sealing system for precise temperature control includes: optical The path system 1 is sealed for the first time through the primary sealing shell 2, the platinum resistance temperature sensor 3, the gas laminar flow 4, the secondary sealing shell 5, the semiconductor refrigeration stack 6, the mesh heat exchanger 7, the fan 8, and the nitrogen gas 9 Atmosphere, temperature controller 10, drive circuit module 11, cable 12, rigid bracket 13, shock-absorbing foam 14.

光学路径系统1如图3所示,主要包括:安装于一次密封壳体2和二次密封壳体5外部的DFB激光器301,光束汇聚准直透镜组302,准直光束303,光学腔304,光学腔304内部的待测气体305,激光光束汇聚透镜306,InGaAs探测器307。DFB激光器302受到安装于一次密封壳体2和二次密封壳体5外部的激光器驱动源308驱动产生调制激光,调制后的激光光束经过光束汇聚准直透镜组302形成(光斑直径≤1mm)准直光束303,准直光束303经过光学腔304内部的待测气体305吸收以后,经过激光光束汇聚透镜306汇聚到InGaAs探测器307的光敏面上,其汇聚光斑大小≤1mm2,然后经过光电转后的信号通过电缆12送入安装于一次密封壳体2和二次密封壳体5外部的信号后续处理单元309进行后续的信号处理和气体同位素丰度的反演,该系统所有部件均处于一次密封壳体2内部的氮气氛围9中。The optical path system 1 is shown in Fig. 3, and mainly includes: a DFB laser 301 installed outside the primary sealed casing 2 and the secondary sealed casing 5, a beam converging collimating lens group 302, a collimated beam 303, an optical cavity 304, The gas to be measured 305 inside the optical cavity 304 , the laser beam converging lens 306 , and the InGaAs detector 307 . The DFB laser 302 is driven by the laser drive source 308 installed outside the primary sealed casing 2 and the secondary sealed casing 5 to generate modulated laser light. The straight beam 303 and the collimated beam 303 are absorbed by the gas to be measured 305 inside the optical cavity 304, and then converged to the photosensitive surface of the InGaAs detector 307 by the laser beam converging lens 306. The final signal is sent to the signal follow-up processing unit 309 installed outside the primary sealed housing 2 and the secondary sealed housing 5 through the cable 12 for subsequent signal processing and inversion of gas isotope abundance. All components of the system are in the primary In the nitrogen atmosphere 9 inside the sealed case 2 .

本发明实施的具体过程为:首先,光学路径系统1通过安装于一次密封壳体2内部进行第一次密封,一次密封壳体2使用导热系数较大、便于加工的金属材料为材质。然后,将光学路径系统1和一次密封壳体2共同密封于二次密封壳体5的内部进行再次密封,这样设计的目的是为了保证外界环境的完全热隔离,二次密封壳体5的材质可使用具有更好隔热性能的硬质塑料为材料。一次密封壳体2通过减震泡沫14进行热隔离和减振,例如:聚氨酯泡沫、乙烯基共聚物泡沫等进行热隔离和减振,然后再通过刚性支架13固定于二次密封壳体5的内部,刚性支架13和二次密封壳体5之间同样采用减震泡沫14进行再次减振。所有的铂电阻温度传感器3均与安装于二次密封壳体5外部的温度控制器10相连,用于实时获取一次密封壳体2内部和二次密封壳体5内部的温度情况。温度控制器10根据不同部位的铂电阻温度传感器3反馈回来的温度信息,通过模糊自适应PID控制算法进行各温度测量点和温度控制点的温度比较,并且按照比较结果通过电缆12发送不同的控制指令给安装于二次密封壳体5外部的驱动电路模块11,驱动电路模块11根据收到的PID控制指令控制半导体制冷堆6和风扇8的运行进行温度的精确控制工作。为了使光学路径系统1的温度均匀温度变化,在二次密封壳体5的对立面各安装了一套热控装置,主要有半导体制冷堆6、网状热交换器7、风扇8组成。其安装情况为:网状热交换器7约1/3部分安装于半导体制冷堆6的内部并与半导体制冷堆6紧密无缝相连,使热量交换达到最充分的情况,两个风扇8安装于两个网状热交换器7的同一侧,安装位置应保持一致同左或同右。当温度控制器10的PID控制发出温度控制命令时,驱动电路模块11开始正常工作,驱动基于帕尔帖效应的半导体制冷堆6,半导体制冷堆6可以在电流方向的控制下进行加热或者制冷操作。当半导体制冷堆6的温度发生微小变化时,启动风扇8并控制转速,半导体制冷堆6内部的网状热交换器7可以很迅速进行感应并热传导到半导体制冷堆6以外的部分,并通过风扇8迅速将热量传递到氮气9(也可以是其他热导系数很小的纯净气体)氛围中,灵活的进行控制加速热量氛围的循环。网状热交换器7的材质一般是金属材料,具有极好的导热性,可以快速进行热交换。在以上热控装置的作用下,热交换气体按照顺时针或逆时针方向形成气体层流4,顺时针或逆时针方向的气体层流4受到二次密封壳体5的影响,其特点是中心速度大,边缘流速小,因而在光学路径系统1的一次密封壳体2外壳上形成了热交换气流,极大的促进了温度的控制时间和热交换效率,再加上氮气9也是一种热导系数很小的物质,因此形成光学路径系统1和流动氮气9之间的热交换非常小,从而保证了温度的稳定性。同时,在工作过程中温度控制器10实时处理温度变化情况,实时发出指令给驱动电路模块11,驱动电路模块11实时根据接收到的指令进行循环控制从而达到热隔离和温度均匀的目的。在保证上述温度精确控制和稳定的情况下,积分腔光谱技术同位素分析处于准确的工作状态,即光学系统处于正常稳定的工作过程,即:DFB激光器302受到安装于一次密封壳体2和二次密封壳体5外部的激光器驱动源308驱动产生调制激光,调制后的激光光束经过光束汇聚准直透镜组302形成(光斑直径≤1mm)准直光束303,准直光束303经过光学腔304内部的待测气体305吸收以后,经过激光光束汇聚透镜306汇聚到InGaAs探测器307的光敏面上,其汇聚光斑大小≤1mm2,然后经过光电转后的信号通过电缆12送入安装于一次密封壳体2和二次密封壳体5外部的信号后续处理单元309进行后续的信号处理和气体同位素丰度的反演。以上所述的各个部件均处于一次密封壳体2内部和二次密封壳体5内部的氮气9氛围中,确保无干扰气的存在。最终确保积分腔光谱技术同位素分析在测量过程中受温度影响的准确性、稳定性和零漂移问题降低到最低。上述积分腔光谱技术同位素分析系统中所使用的电源均由DC-24V电源提供。The specific process of implementing the present invention is as follows: firstly, the optical path system 1 is sealed for the first time by being installed inside the primary sealing casing 2, and the primary sealing casing 2 is made of a metal material with a large thermal conductivity and is easy to process. Then, the optical path system 1 and the primary sealing case 2 are jointly sealed inside the secondary sealing case 5 for resealing. The purpose of this design is to ensure complete thermal isolation of the external environment. The material of the secondary sealing case 5 Rigid plastics with better thermal insulation properties can be used as materials. The primary sealed casing 2 is thermally isolated and damped by shock-absorbing foam 14, such as polyurethane foam, vinyl copolymer foam, etc., and then fixed to the secondary sealed casing 5 by a rigid bracket 13. Inside, the shock-absorbing foam 14 is also used between the rigid support 13 and the secondary sealing shell 5 for further vibration reduction. All the platinum resistance temperature sensors 3 are connected with the temperature controller 10 installed outside the secondary sealed casing 5 for obtaining the temperature inside the primary sealed casing 2 and the secondary sealed casing 5 in real time. The temperature controller 10 performs temperature comparison between each temperature measurement point and temperature control point through the fuzzy adaptive PID control algorithm according to the temperature information fed back by the platinum resistance temperature sensor 3 at different parts, and sends different control signals through the cable 12 according to the comparison results. The command is given to the drive circuit module 11 installed outside the secondary sealed casing 5, and the drive circuit module 11 controls the operation of the semiconductor refrigeration stack 6 and the fan 8 to precisely control the temperature according to the received PID control command. In order to make the temperature of the optical path system 1 change evenly, a set of thermal control devices are installed on the opposite sides of the secondary sealing shell 5, mainly composed of a semiconductor refrigeration stack 6, a mesh heat exchanger 7, and a fan 8. The installation situation is: about 1/3 of the mesh heat exchanger 7 is installed inside the semiconductor refrigeration stack 6 and is closely and seamlessly connected with the semiconductor refrigeration stack 6, so that the heat exchange can reach the most sufficient situation. Two fans 8 are installed on the On the same side of the two mesh heat exchangers 7, the installation positions should be consistent with the left or right. When the PID control of the temperature controller 10 sends a temperature control command, the drive circuit module 11 starts to work normally, driving the semiconductor refrigeration stack 6 based on the Peltier effect, and the semiconductor refrigeration stack 6 can perform heating or cooling operations under the control of the current direction . When the temperature of the semiconductor refrigeration stack 6 changes slightly, the fan 8 is started and the rotating speed is controlled, and the mesh heat exchanger 7 inside the semiconductor refrigeration pile 6 can be sensed very quickly and heat is conducted to parts other than the semiconductor refrigeration pile 6, and passed through the fan. 8 quickly transfer heat to the atmosphere of nitrogen 9 (or other pure gases with small thermal conductivity), and flexibly control the cycle of accelerating the heat atmosphere. The material of the mesh heat exchanger 7 is generally a metal material, which has excellent thermal conductivity and can quickly perform heat exchange. Under the action of the above thermal control device, the heat exchange gas forms a gas laminar flow 4 in a clockwise or counterclockwise direction, and the clockwise or counterclockwise gas laminar flow 4 is affected by the secondary sealing shell 5, which is characterized by the center The speed is high and the edge flow velocity is small, so a heat exchange airflow is formed on the outer casing of the primary sealed casing 2 of the optical path system 1, which greatly promotes the temperature control time and heat exchange efficiency, and nitrogen 9 is also a heat exchange Substances with very small conductivities, so the heat exchange between the optical path system 1 and the flowing nitrogen gas 9 is very small, thereby ensuring temperature stability. At the same time, during the working process, the temperature controller 10 processes temperature changes in real time, sends instructions to the drive circuit module 11 in real time, and the drive circuit module 11 performs cycle control in real time according to the received instructions to achieve thermal isolation and temperature uniformity. In the case of ensuring the precise control and stability of the above temperature, the isotope analysis of the integrating cavity spectroscopy technology is in an accurate working state, that is, the optical system is in a normal and stable working process, that is: the DFB laser 302 is installed in the primary sealed shell 2 and the secondary The laser driving source 308 outside the sealed casing 5 drives to generate modulated laser light. The modulated laser beam passes through the beam converging collimating lens group 302 to form a collimated beam 303 (spot diameter ≤ 1mm), and the collimated beam 303 passes through the optical cavity 304 inside. After the gas to be measured 305 is absorbed, it is converged to the photosensitive surface of the InGaAs detector 307 through the laser beam converging lens 306, and the converging spot size is ≤1mm 2 , and then the signal after the photoelectric conversion is sent into the primary sealed casing through the cable 12 2 and the signal subsequent processing unit 309 outside the secondary sealed housing 5 performs subsequent signal processing and inversion of gas isotope abundance. All the components mentioned above are in the nitrogen 9 atmosphere inside the primary sealed casing 2 and the secondary sealed casing 5 to ensure that there is no interfering gas. Finally, it is ensured that the accuracy, stability and zero drift of the isotope analysis affected by the temperature during the measurement process of the integral cavity spectroscopy are reduced to the minimum. The power used in the above-mentioned integrating cavity spectroscopy isotope analysis system is provided by a DC-24V power supply.

本发明未详细阐述部分属于本领域公知技术。Parts not described in detail in the present invention belong to the well-known technology in the art.

Claims (8)

1.一种用于积分腔光谱技术同位素分析的温度精确控制装置,其特征在于包括:光学路径系统(1)、一次密封壳体(2)、四个铂电阻温度传感器(3)、二次密封壳体(5)、两个热控装置、氮气(9)氛围、温度控制器(10)、驱动电路模块(11)、刚性支架(13)和减震泡沫(14);所述两个热控装置分别安装于二次密封壳体(5)对称的壳体两端,每个热控装置由半导体制冷堆(6),网状热交换器(7)和风扇(8)组成,网状热交换器(7)的1/3部分安装于半导体制冷堆(6)的内部并与半导体制冷堆(6)紧密无缝相连,使网状热交换器(7)和半导体制冷堆(6)之间的热量交换达到最充分的情况,风扇(8)安装于网状热交换器(7)的同一侧,安装位置应保持一致同左或同右,使风扇(8)作用下的热交换气流形成顺时针或者逆时针的层流(4)方向;光学路径系统(1)安装于一次密封壳体(2)内部,一次密封壳体(2)通过减震泡沫(14)进行热隔离和减振,然后再通过刚性支架(13)固定在二次密封壳体(5)内部;所述一次密封壳体(2)内部和二次密封壳体(5)内部均需充满氮气(9)氛围;四个铂电阻温度传感器(3)中的两个铂电阻温度传感器分别安装嵌入在一次密封壳体(2)的对角两端壳体内,另外两个铂电阻温度传感器分别安装在网状热交换器(7)远离风扇(8)的一端;所有的铂电阻温度传感器(3)均与安装于二次密封壳体(5)外部的温度控制器(10)相连,并实时获取一次密封壳体(2)内部和二次密封壳体(5)内部的温度情况;温度控制器(10)根据不同的铂电阻温度传感器(3)的反馈信息,通过PID控制输出控制安装于二次密封壳体(5)外部的驱动电路模块(11)进行温度精确控制工作,当温度控制器(10)的PID控制发出温度控制命令时,驱动电路模块(11)开始正常工作,驱动半导体制冷堆(6)进行加热或者制冷控制,并启动风扇(8)加速热量循环,极大的缩短了温度控制的时间和提高了热交换的效率,从而保证温度的稳定性,且驱动电路模块(11)在运行过程中实时根据接收到的温度控制器(10)指令实时循环控制直至达到指定温度;同时在工作过程中实时处理温度变化情况,进行循环控制直至达到指定温度。  1. A precise temperature control device for isotope analysis of integral cavity spectroscopy, characterized in that it comprises: an optical path system (1), a primary sealed housing (2), four platinum resistance temperature sensors (3), a secondary sealed housing (5), two thermal control devices, nitrogen (9) atmosphere, temperature controller (10), drive circuit module (11), rigid bracket (13) and shock-absorbing foam (14); the two The thermal control devices are respectively installed at both ends of the symmetrical shell of the secondary sealing shell (5). Each thermal control device is composed of a semiconductor refrigeration stack (6), a mesh heat exchanger (7) and a fan (8). The 1/3 part of the heat exchanger (7) is installed in the inside of the semiconductor refrigeration stack (6) and is closely and seamlessly connected with the semiconductor refrigeration stack (6), so that the mesh heat exchanger (7) and the semiconductor refrigeration stack (6) ) to achieve the most sufficient heat exchange, the fan (8) is installed on the same side of the mesh heat exchanger (7), and the installation position should be consistent with the left or right, so that the heat exchange airflow under the action of the fan (8) A clockwise or counterclockwise laminar flow (4) is formed; the optical path system (1) is installed inside the primary sealed casing (2), and the primary sealed casing (2) is thermally isolated and damped by shock-absorbing foam (14). vibrate, and then fixed inside the secondary sealing shell (5) by a rigid support (13); the inside of the primary sealing shell (2) and the inside of the secondary sealing shell (5) need to be filled with nitrogen (9) atmosphere Two platinum resistance temperature sensors in the four platinum resistance temperature sensors (3) are respectively installed and embedded in the housings at both ends of the primary sealed housing (2), and the other two platinum resistance temperature sensors are respectively installed in the mesh heat The end of the exchanger (7) away from the fan (8); all the platinum resistance temperature sensors (3) are connected with the temperature controller (10) installed outside the secondary sealed casing (5), and obtain the temperature of the primary sealed casing in real time. The temperature inside the body (2) and the inside of the secondary sealing shell (5); the temperature controller (10) is installed in the secondary sealing shell through PID control output control according to the feedback information of different platinum resistance temperature sensors (3) The drive circuit module (11) outside the body (5) performs precise temperature control work. When the PID control of the temperature controller (10) sends out a temperature control command, the drive circuit module (11) starts to work normally and drives the semiconductor refrigeration stack (6 ) for heating or cooling control, and start the fan (8) to accelerate heat circulation, which greatly shortens the time for temperature control and improves the efficiency of heat exchange, thereby ensuring temperature stability, and the drive circuit module (11) is running During the process, real-time cycle control is performed according to the received temperature controller (10) instruction until the specified temperature is reached; at the same time, the temperature change is processed in real time during the working process, and cycle control is performed until the specified temperature is reached. the 2.根据权利要求1所述的用于积分腔光谱技术同位素分析的温度精确控制装置,其特征在于:所述的光学路径系统(1)包括DFB激光器(301)、光束汇聚准直透镜组(302)、准直光束(303)、光学腔(304)、激光光束汇聚透镜(306)、InGaAs探测器(307);DFB激光器(301)受到安装于一次密封壳体(2)和二次密封壳体(5)外部的激光器驱动源(308)驱动产生调制激光,调制后的激光光束经过光束汇聚准直透镜组(302)形成准直光束(303),准直光束(303)经过光学腔(304)内部的待测气体(305)吸收以后,经过激光光束汇聚 透镜(306)汇聚到InGaAs探测器(307)的光敏面上;然后经过光电转换后的信号通过电缆(12)送入安装于一次密封壳体(2)和二次密封壳体(5)外部的信号后续处理单元(309)进行后续的信号处理和气体同位素丰度的反演,该系统所有部件均处于氮气(9)氛围。  2. The precise temperature control device for isotope analysis of integral cavity spectroscopy according to claim 1, characterized in that: the optical path system (1) includes a DFB laser (301), a beam converging collimating lens group ( 302), collimated light beam (303), optical cavity (304), laser beam converging lens (306), InGaAs detector (307); The laser drive source (308) outside the casing (5) drives to generate modulated laser light. The modulated laser beam passes through the beam converging collimator lens group (302) to form a collimated beam (303), and the collimated beam (303) passes through the optical cavity After the gas to be measured (305) inside (304) is absorbed, it is converged to the photosensitive surface of the InGaAs detector (307) through the laser beam converging lens (306); then the signal after photoelectric conversion is sent to the installation through the cable (12). The subsequent signal processing and the inversion of gas isotope abundance are carried out in the signal post-processing unit (309) outside the primary sealed casing (2) and the secondary sealed casing (5), and all components of the system are in nitrogen (9) atmosphere. the 3.根据权利要求2所述的用于积分腔光谱技术同位素分析的温度精确控制装置,其特征在于:所述的激光器驱动源(308)安装于一次密封壳体(2)和二次密封壳体(5)外部,包括:激光器驱动的温度控制器、电流控制器和产生三角波扫描信号、正弦波调制信号的信号发生器单元;温度控制器、电流控制器驱动DFB激光器(301)正常工作,信号发生器单元使DFB激光器(301)产生调制激光。  3. The precise temperature control device for isotope analysis of integrated cavity spectroscopy according to claim 2, characterized in that: the laser drive source (308) is installed in the primary sealed casing (2) and the secondary sealed casing The outside of the body (5), including: a laser-driven temperature controller, a current controller, and a signal generator unit that generates triangular wave scanning signals and sine wave modulation signals; the temperature controller and the current controller drive the DFB laser (301) to work normally, The signal generator unit makes the DFB laser (301) generate modulated laser light. the 4.根据权利要求2所述的用于积分腔光谱技术同位素分析的温度精确控制装置,其特征在于:所述的DFB激光器(301)为可调谐半导体激光器。  4. The precise temperature control device for isotope analysis by integrating cavity spectroscopy according to claim 2, characterized in that: the DFB laser (301) is a tunable semiconductor laser. the 5.根据权利要求2所述的用于积分腔光谱技术同位素分析的温度精确控制装置,其特征在于:所述的信号后续处理单元(309)安装于一次密封壳体(2)和二次密封壳体(5)外部,包括:光电信号放大电路,锁相放大器,数据采集卡和计算机;InGaAs探测器(307)的输出信号送入光电信号放大电路,经过放大电路放大以后的信号送入锁相放大器进行解调获得相应的谐波信号,谐波信号通过安装于计算机内部的数据采集卡进行采集,然后通过计算机进行后续的信号处理和气体同位素丰度的反演操作。  5. The precise temperature control device for isotope analysis by integrating cavity spectroscopy according to claim 2, characterized in that: the signal subsequent processing unit (309) is installed in the primary sealed housing (2) and the secondary sealed The outside of the housing (5) includes: a photoelectric signal amplifier circuit, a lock-in amplifier, a data acquisition card and a computer; the output signal of the InGaAs detector (307) is sent into the photoelectric signal amplifier circuit, and the signal amplified by the amplifier circuit is sent into the lock The phase amplifier is demodulated to obtain the corresponding harmonic signal, and the harmonic signal is collected by the data acquisition card installed in the computer, and then the subsequent signal processing and the inversion operation of the gas isotope abundance are carried out by the computer. the 6.根据权利要求2所述的用于积分腔光谱技术同位素分析的温度精确控制装置,其特征在于:所述的光学腔(304)为离轴积分腔,腔体侧面连接进出气口,同时使入射到腔内的激光光束(303)来回多次反射,极大地增加测量气体的吸收光程长度,从而提高检测气体的灵敏度。  6. The precise temperature control device for isotope analysis of integrating cavity spectroscopy according to claim 2, characterized in that: the optical cavity (304) is an off-axis integrating cavity, and the side of the cavity is connected to the inlet and outlet ports, while the The laser beam (303) incident into the cavity is reflected back and forth multiple times, which greatly increases the absorption optical path length of the gas to be measured, thereby improving the sensitivity of the gas to be detected. the 7.根据权利要求1所述的用于积分腔光谱技术同位素分析的温度精确控制装置,其特征在于:所述PID控制采用为模糊自适应PID控制算法,工作内容有温度设定、数据采集、PID控制输出,通过比较实时温度、设定温度之间的差异,通过PID输出控制半导体制冷堆(6)制冷或制热,使光学路径系统(1)在某一温度保持稳定。  7. The precise temperature control device for isotope analysis of integrating cavity spectroscopy according to claim 1, characterized in that: the PID control adopts a fuzzy adaptive PID control algorithm, and the work content includes temperature setting, data acquisition, The PID control output controls the cooling or heating of the semiconductor refrigeration stack (6) through the PID output by comparing the difference between the real-time temperature and the set temperature, so as to keep the optical path system (1) stable at a certain temperature. the 8.根据权利要求1所述的用于积分腔光谱技术同位素分析的温度精确控制装置,其特征在于:所述系统所有供电电源均采用DC-24V供电。  8. The precise temperature control device for isotope analysis by integrating cavity spectroscopy according to claim 1, characterized in that: all power supplies of the system are powered by DC-24V. the
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