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CN103123956A - Organic light emitting display panel and manufacturing method thereof - Google Patents

Organic light emitting display panel and manufacturing method thereof Download PDF

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CN103123956A
CN103123956A CN2012105571359A CN201210557135A CN103123956A CN 103123956 A CN103123956 A CN 103123956A CN 2012105571359 A CN2012105571359 A CN 2012105571359A CN 201210557135 A CN201210557135 A CN 201210557135A CN 103123956 A CN103123956 A CN 103123956A
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CN103123956B (en
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奚鹏博
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Abstract

本发明有关于一种有机发光显示面板及其制作方法,有机发光显示面板包含有一第一基板、一黑色矩阵、一图案化彩色滤光层、一保护层、一间隙物、一第二基板以及一有机发光显示元件。黑色矩阵设置于第一基板上,且具有至少一显示开口。图案化彩色滤光层具有至少一区块覆盖于显示开口。保护层覆盖于图案化彩色滤光层与黑色矩阵上,且具有一凹陷,位于区块的上方,且对准显示开口。间隙物设置于保护层上。第二基板跟第一基板相对设置,且有机发光显示元件设置在第二基板上,且对准显示开口。

Figure 201210557135

The invention relates to an organic light-emitting display panel and a manufacturing method thereof. The organic light-emitting display panel includes a first substrate, a black matrix, a patterned color filter layer, a protective layer, a spacer, a second substrate and An organic light-emitting display element. The black matrix is disposed on the first substrate and has at least one display opening. The patterned color filter layer has at least one area covering the display opening. The protective layer covers the patterned color filter layer and the black matrix, and has a recess located above the block and aligned with the display opening. The spacer is arranged on the protective layer. The second substrate is arranged opposite to the first substrate, and the organic light-emitting display element is arranged on the second substrate and aligned with the display opening.

Figure 201210557135

Description

有机发光显示面板及其制作方法Organic light emitting display panel and manufacturing method thereof

技术领域technical field

本发明关于一种有机发光显示面板及其制作方法,尤指一种顶面发光型有机发光显示面板及其制作方法。The present invention relates to an organic light-emitting display panel and a manufacturing method thereof, in particular to a top-emitting organic light-emitting display panel and a manufacturing method thereof.

背景技术Background technique

近年来,有机发光显示面板(organic light-emitting display,OLED)已渐渐成为热门的新兴平面显示器,由于具有自发光、广视角、反应时间快、高发光效率、低操作电压、面板厚度薄、可制作成可挠曲性面板以及制程简单等优点,因此已广泛地应用于各种平面显示产品上。In recent years, organic light-emitting display panels (organic light-emitting display, OLED) has gradually become a popular emerging flat-panel display, due to its self-illumination, wide viewing angle, fast response time, high luminous efficiency, low operating voltage, thin panel thickness, and It has the advantages of being made into a flexible panel and a simple manufacturing process, so it has been widely used in various flat display products.

传统有机发光显示面板包含有多个有机发光二极管作为显示像素,以显示出画面。其中,各有机发光二极管由一阳极、一发光层以及一阴极所构成,且阳极、发光层与阴极依序堆叠于基板上。并且,为了降低有机发光二极管的发光能障,阳极使用高功函数的材料,且阴极使用低功函数的材料。然而,一般具有低功函数以及高导电率的材料为金属材料,且为了不增加阴极的电阻值,由金属材料所构成的阴极因具有一定厚度而不具有透光性。因此,传统大尺寸的有机发光显示面板将发光层所产生的光线从阳极射出,即所谓的底面发光有机发光显示面板。A conventional organic light emitting display panel includes a plurality of organic light emitting diodes as display pixels to display images. Wherein, each organic light emitting diode is composed of an anode, a light-emitting layer and a cathode, and the anode, the light-emitting layer and the cathode are sequentially stacked on the substrate. Moreover, in order to reduce the light-emitting energy barrier of the OLED, the anode uses a material with a high work function, and the cathode uses a material with a low work function. However, generally the material with low work function and high conductivity is a metal material, and in order not to increase the resistance of the cathode, the cathode made of the metal material has a certain thickness and is not transparent. Therefore, conventional large-sized organic light-emitting display panels emit light generated by the light-emitting layer from the anode, which is a so-called bottom-emitting organic light-emitting display panel.

不过,用于驱动有机发光二极管的薄膜晶体管与有机发光二极管形成于同一基板上,且介于有机发光二极管与基板之间,因此底面发光有机发光显示面板的像素开口率会受限于薄膜晶体管的大小与数量,而无法提升。此外,为了有效地控制驱动有机发光二极管的电流大小,使有机发光二极管所产生的像素灰阶更明显,用于驱动单一有机发光二极管的薄膜晶体管的数量亦相对地增加。如此一来,随着有机发光显示面版的尺寸缩小,像素开口率会大幅地降低。因此,目前已有发展出顶面发光的有机发光显示面板,以避免薄膜晶体管的数量影响像素开口率。However, the thin film transistor used to drive the OLED is formed on the same substrate as the OLED, and is interposed between the OLED and the substrate. Therefore, the pixel aperture ratio of the bottom emitting OLED display panel is limited by the thin film transistor. size and quantity, and cannot be upgraded. In addition, in order to effectively control the magnitude of the current driving the OLED and make the pixel gray scale generated by the OLED more obvious, the number of thin film transistors used to drive a single OLED is relatively increased. In this way, as the size of the OLED panel shrinks, the pixel aperture ratio will be greatly reduced. Therefore, a top-emitting organic light-emitting display panel has been developed to prevent the number of thin film transistors from affecting the pixel aperture ratio.

传统顶面发光型的有机发光显示面板会于形成有薄膜晶体管以及有机发光二极管的阵列基板上覆盖一彩色滤光片基板,以保护有机发光二极管,并提升有机发光显示面板所产生光线颜色的色域。然而,在结合彩色滤光片基板与阵列基板的过程中,空气中的微粒容易会附着于阵列基板上,使得微粒容易被夹在彩色滤光片基板与阵列基板之间。再者,彩色滤光片基板与阵列基板之间的间隙(cell gap)仅约略为3.8微米,但空气中的微粒大小约略介于5微米与10微米之间,因此在结合彩色滤光片基板与阵列基板时,微粒容易朝有机发光二极管突出,而压坏有机发光二极管。A traditional top-emission organic light-emitting display panel will cover a color filter substrate on the array substrate formed with thin-film transistors and organic light-emitting diodes to protect the organic light-emitting diodes and improve the color of the light produced by the organic light-emitting display panel. area. However, during the process of combining the color filter substrate and the array substrate, particles in the air are likely to adhere to the array substrate, so that the particles are easily sandwiched between the color filter substrate and the array substrate. Furthermore, the cell gap between the color filter substrate and the array substrate is only about 3.8 microns, but the particle size in the air is between 5 microns and 10 microns, so when combining the color filter substrate When combined with the array substrate, the particles are likely to protrude toward the OLEDs and crush the OLEDs.

有鉴于此,提供具有大于微粒大小的单元间隙的有机发光显示面板,以避免有机发光二极管受到损坏,实为业界努力的目标。In view of this, it is a goal of the industry to provide an organic light emitting display panel with a cell gap larger than the size of a particle to prevent the organic light emitting diode from being damaged.

发明内容Contents of the invention

本发明的主要目的之一在于提供一种有机发光显示面板及其制作方法,以避免有机发光二极管因空气中微粒位于彩色滤光片基板与阵列基板之间的间隙所受到的损坏。One of the main objectives of the present invention is to provide an organic light emitting display panel and a manufacturing method thereof, so as to prevent organic light emitting diodes from being damaged by particles in the air located in the gap between the color filter substrate and the array substrate.

为达上述的目的,本发明提供一种有机发光显示面板的制作方法。首先,提供一第一基板,具有一第一内表面。然后,于第一内表面的第一基板上形成一黑色矩阵,且黑色矩阵具有至少一显示开口,分别暴露出第一基板。接着,于第一内表面的第一基板上形成一图案化彩色滤光层,具有至少一第一区块与一第二区块,第一区块覆盖于显示开口的第一基板上,第二区块设置在黑色矩阵上。随后,于第一内表面的第一基板上形成一第一保护层,覆盖图案化彩色滤光层与黑色矩阵,且第一保护层具有一第一凹陷,其中第一凹陷位于图案化彩色滤光层的第一区块的上方,且对准显示开口。接下来,于第一保护层上形成一第一间隙物,且第一间隙物位于图案化彩色滤光层的第二区块上方。最后,组装第一基板与一第二基板,第二基板具有一第二内表面,面向第一基板的第一内表面,第二基板具有一有机发光显示元件,设置在第二内表面的第二基板上,且对准显示开口。To achieve the above objectives, the present invention provides a method for manufacturing an organic light emitting display panel. Firstly, a first substrate is provided, which has a first inner surface. Then, a black matrix is formed on the first substrate on the first inner surface, and the black matrix has at least one display opening, respectively exposing the first substrate. Next, a patterned color filter layer is formed on the first substrate on the first inner surface, and has at least one first block and a second block, the first block covers the first substrate of the display opening, and the second block covers the display opening on the first substrate. Two blocks are set on the black matrix. Subsequently, a first protection layer is formed on the first substrate on the first inner surface, covering the patterned color filter layer and the black matrix, and the first protection layer has a first depression, wherein the first depression is located in the patterned color filter layer. above the first block of the optical layer and aligned with the display opening. Next, a first spacer is formed on the first protection layer, and the first spacer is located above the second block of the patterned color filter layer. Finally, assemble the first substrate and a second substrate, the second substrate has a second inner surface facing the first inner surface of the first substrate, the second substrate has an organic light-emitting display element, and is arranged on the second inner surface of the second inner surface. on the second substrate and aligned with the display opening.

为达上述的目的,本发明提供一种有机发光显示面板,其包含有一第一基板、一黑色矩阵、一图案化彩色滤光层、一第一保护层、一第一间隙物、一第二基板以及一有机发光显示元件。第一基板具有一第一内表面。黑色矩阵设置于第一内表面的第一基板上,且黑色矩阵具有至少一显示开口。图案化彩色滤光层具有至少一第一区块与一第二区块,第一区块覆盖于显示开口的第一基板上,第二区块设置在黑色矩阵上。第一保护层覆盖于图案化彩色滤光层与黑色矩阵上,且第一保护层具有一第一凹陷,位于图案化彩色滤光层的第一区块的上方,且对准显示开口。第一间隙物设置于第一保护层上,且第一间隙物位于图案化彩色滤光层的第二区块上方。第二基板跟第一基板相对设置,第二基板具有一第二内表面,面向第一基板的第一内表面。有机发光显示元件设置在第二内表面的第二基板上,且对准显示开口。To achieve the above purpose, the present invention provides an organic light emitting display panel, which includes a first substrate, a black matrix, a patterned color filter layer, a first protective layer, a first spacer, a second A substrate and an organic light emitting display element. The first substrate has a first inner surface. The black matrix is disposed on the first substrate on the first inner surface, and the black matrix has at least one display opening. The patterned color filter layer has at least a first block and a second block, the first block is covered on the first substrate of the display opening, and the second block is arranged on the black matrix. The first protection layer is covered on the patterned color filter layer and the black matrix, and the first protection layer has a first recess, which is located above the first block of the patterned color filter layer and aligned with the display opening. The first spacer is disposed on the first passivation layer, and the first spacer is located above the second block of the patterned color filter layer. The second substrate is disposed opposite to the first substrate, and the second substrate has a second inner surface facing the first inner surface of the first substrate. The organic light emitting display element is disposed on the second substrate on the second inner surface and aligned with the display opening.

本发明的有机发光显示面板于第一保护层对应显示开口的位置具有第一凹陷,且有机发光显示元件亦对应显示开口设置,藉此可加大第一凹陷的底部与有机发光显示元件之间的间隙,使得在结合彩色滤光片基板与阵列基板时,微粒不会朝有机发光显示元件突出,而可避免有有机发光显示元件受到损坏。The organic light-emitting display panel of the present invention has a first depression at the position corresponding to the display opening in the first protective layer, and the organic light-emitting display element is also arranged corresponding to the display opening, so that the gap between the bottom of the first depression and the organic light-emitting display element can be enlarged The gap is so that when the color filter substrate and the array substrate are combined, the particles will not protrude toward the organic light emitting display element, and the organic light emitting display element can be prevented from being damaged.

附图说明Description of drawings

图1至图8为本发明一第一实施例的有机发光显示面板的制作方法示意图;1 to 8 are schematic diagrams of a manufacturing method of an organic light emitting display panel according to a first embodiment of the present invention;

图9至图11为本发明一第二实施例的有机发光显示面板的制作方法示意图;9 to 11 are schematic diagrams of a manufacturing method of an organic light emitting display panel according to a second embodiment of the present invention;

图12至图13为本发明一第三实施例的有机发光显示面板的制作方法示意图。12 to 13 are schematic diagrams of a manufacturing method of an organic light emitting display panel according to a third embodiment of the present invention.

其中,附图标记:Among them, reference signs:

10  有机发光显示面板    12   第一基板10 organic light emitting display panel 12 first substrate

12a 第一内表面          14   黑色矩阵12a first inner surface 14 black matrix

14a 显示开口            16   图案化彩色滤光层14a Display opening 16 Patterned color filter layer

16a 第一区块            16b  第二区块16a First Block 16b Second Block

18  第一保护层          18a  第一凹陷18 first protective layer 18a first depression

18b 厚部                18c  薄部18b thick part 18c thin part

18d 间隙物部            20   第二保护层18d Clearance part 20 Second protective layer

22  金属图案层          24   第一间隙物22 metal pattern layer 24 first spacer

26  透明导电层          27   彩色滤光片基板26 Transparent Conductive Layer 27 Color Filter Substrate

28  第二基板            28a  第二内表面28 second substrate 28a second inner surface

30  有机发光显示元件    32   阵列基板30 organic light emitting display element 32 array substrate

34  主动元件层          36   第一电极34 active element layer 36 first electrode

38  挡墙                38a  开口38 retaining wall 38a opening

40  第二间隙物          42   发光层40 Second spacer 42 Light emitting layer

44  第二电极            44a  第二凹陷44 second electrode 44a second recess

46  有机发光二极管      48   主动元件46 Organic Light Emitting Diodes 48 Active Components

50  平坦层              50a  穿孔50 flat layer 50a perforated

100 有机发光显示面板    102  第一间隙物100 organic light emitting display panel 102 first spacer

104 彩色滤光片基板      106  阵列基板104 color filter substrate 106 array substrate

200 有机发光显示面板    202  第一间隙物200 organic light emitting display panel 202 first spacer

204 彩色滤光片基板      206  阵列基板204 color filter substrate 206 array substrate

D1  第一方向            D2   第二方向D1 first direction D2 second direction

T1  第一厚度            T2   第二厚度T1 first thickness T2 second thickness

T3  第三厚度            H    间隙T3 Third Thickness H Clearance

具体实施方式Detailed ways

以下结合附图和具体实施例对本发明进行详细描述,但不作为对本发明的限定。The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

请参考图1至图8,图1至图8为本发明一第一实施例的有机发光显示面板的制作方法示意图,其中图5与图6分别为图7沿着剖面线AA’与剖面线BB’的剖面示意图,且图8为本发明第一实施例的有机发光显示面板的剖面示意图。本发明的有机发光显示面板可由多个像素结构所构成,但为了简化说明,以下以有机发光显示面板的单一像素结构为例来作描述,但不以此为限。首先,如图1所示,提供一第一基板12,例如:玻璃、强化玻璃、塑胶、蓝宝石或石英等透明基板,且可为硬质基板、软性基板或是可挠性基板,且第一基板12具有一第一内表面12a。然后,进行一微影制程,于第一内表面12a的第一基板12上形成一黑色矩阵14,且黑色矩阵14具有至少一显示开口14a,分别暴露出第一基板12。本实施例的黑色矩阵14可用于遮蔽彩色滤光片基板与阵列基板中的不透光元件,例如金属图案层以及主动元件等。Please refer to FIG. 1 to FIG. 8. FIG. 1 to FIG. 8 are schematic diagrams of a manufacturing method of an organic light-emitting display panel according to a first embodiment of the present invention, wherein FIG. 5 and FIG. BB' is a schematic cross-sectional view, and FIG. 8 is a schematic cross-sectional view of the organic light emitting display panel according to the first embodiment of the present invention. The organic light emitting display panel of the present invention may be composed of a plurality of pixel structures, but to simplify the description, a single pixel structure of the organic light emitting display panel is used as an example for description below, but not limited thereto. First, as shown in FIG. 1 , a first substrate 12 is provided, such as transparent substrates such as glass, strengthened glass, plastic, sapphire or quartz, and can be a hard substrate, a flexible substrate or a flexible substrate, and the second A substrate 12 has a first inner surface 12a. Then, a lithography process is performed to form a black matrix 14 on the first inner surface 12 a of the first substrate 12 , and the black matrix 14 has at least one display opening 14 a to expose the first substrate 12 respectively. The black matrix 14 of this embodiment can be used to shield the color filter substrate and opaque components in the array substrate, such as metal pattern layers and active components.

接着,如图2所示,进行另一微影制程,于第一内表面12a的第一基板12与黑色矩阵14上形成一图案化彩色滤光层16,其中图案化彩色滤光层16具有至少一第一区块16a与一第二区块16b。并且,第一区块16a覆盖于显示开口14a的第一基板12上,并延伸至部分黑色矩阵14上,以完全遮蔽显示开口14a,且第二区块16b设置在黑色矩阵14上。图案化彩色滤光层16的第一区块16a具有一特定颜色,以用于决定经过此第一区块16a的出光颜色。Next, as shown in FIG. 2, another lithography process is performed to form a patterned color filter layer 16 on the first substrate 12 and the black matrix 14 on the first inner surface 12a, wherein the patterned color filter layer 16 has At least one first block 16a and one second block 16b. Moreover, the first block 16 a covers the first substrate 12 of the display opening 14 a and extends to part of the black matrix 14 to completely cover the display opening 14 a, and the second block 16 b is disposed on the black matrix 14 . The first block 16a of the patterned color filter layer 16 has a specific color for determining the color of light passing through the first block 16a.

随后,如图3所示,于第一内表面12a的第一基板12上形成一第一保护层18,覆盖图案化彩色滤光层16与黑色矩阵14,且第一保护层18具有一第一凹陷18a,其中第一凹陷18a位于图案化彩色滤光层16的第一区块16a的上方,且对准显示开口14a。并且,第一保护层18具有一厚部18b、一薄部18c以及一间隙物部18d,使厚部18b、薄部18c与间隙物部18d形成第一凹陷18a,且薄部18c位于第一凹陷18a的底部。于本实施例中,形成第一保护层18的步骤是先于第一基板12与黑色矩阵14上覆盖一保护材料层,例如:光阻材料,包括负型光阻材料或是正型光阻材料。然后利用一半色调光罩(half-tone mask)或一灰阶光罩(gray-tone mask),将半透光的部分对准显示开口14a的位置,亦即欲形成第一凹陷18a的位置,并搭配进行另一微影制程,以移除部分光阻材料,并同时形成具有厚部18b、薄部18c与间隙物部18d的第一保护层18。藉此,位于图案化彩色滤光层16的第一区块16a上仍有薄部18c覆盖,而不会于后续其他制程受到破坏。本发明制作第一保护层的材料并不限于上述,且本发明形成第一保护层的方法亦不限于此。于本发明的变化实施例中,第一保护层18的材料亦可以是可显影的有机材料,直接进型曝光与显影的步骤,同时形成具有厚部18b、薄部18c与间隙物部18d的第一保护层18。于本发明的其他实施例中,第一保护层18的材料亦可为有机材料,且形成第一保护层的步骤也可以将保护材料层的厚度蚀刻或研磨至与厚部的厚度相同,以先形成厚部,然后进行另一微影制程,于保护材料层上蚀刻出第一凹陷,以形成薄部。此外,本实施例的第一凹陷18a具有一深度,可介于1微米至3微米之间,且第一保护层18具有一厚度T,可介于1微米至30微米之间,其中薄部的第一厚度T1可介于1微米至2微米之间,间隙物部的第二厚度T2可介于2微米至6微米之间,且厚部的第三厚度T3可介于4微米至30微米之间,但本发明不限于此。并且,第一凹陷的深度可通过控制微影制程的曝光能量来调整。Subsequently, as shown in FIG. 3, a first protective layer 18 is formed on the first substrate 12 on the first inner surface 12a, covering the patterned color filter layer 16 and the black matrix 14, and the first protective layer 18 has a first protective layer 18. A recess 18a, wherein the first recess 18a is located above the first section 16a of the patterned color filter layer 16 and aligned with the display opening 14a. Moreover, the first protection layer 18 has a thick portion 18b, a thin portion 18c and a spacer portion 18d, so that the thick portion 18b, the thin portion 18c and the spacer portion 18d form a first depression 18a, and the thin portion 18c is located in the first The bottom of the depression 18a. In this embodiment, the step of forming the first protective layer 18 is to cover the first substrate 12 and the black matrix 14 with a protective material layer, for example: photoresist material, including negative photoresist material or positive photoresist material . Then use a half-tone mask (half-tone mask) or a gray-tone mask (gray-tone mask) to align the semi-transparent part with the position of the display opening 14a, that is, the position where the first recess 18a is to be formed, In addition, another lithography process is performed to remove part of the photoresist material, and at the same time form the first protection layer 18 having the thick portion 18b, the thin portion 18c and the spacer portion 18d. In this way, the thin portion 18c is still covered on the first region 16a of the patterned color filter layer 16, and will not be damaged in subsequent other manufacturing processes. The material for making the first protective layer in the present invention is not limited to the above, and the method for forming the first protective layer in the present invention is not limited thereto. In a variant embodiment of the present invention, the material of the first protective layer 18 can also be a developable organic material, directly proceed to the steps of exposure and development, and simultaneously form the thick portion 18b, the thin portion 18c and the spacer portion 18d The first protective layer 18 . In other embodiments of the present invention, the material of the first protective layer 18 can also be an organic material, and the step of forming the first protective layer can also etch or grind the thickness of the protective material layer to be the same as the thickness of the thick portion, so as to The thick part is formed first, and then another lithography process is performed to etch the first depression on the protective material layer to form the thin part. In addition, the first depression 18a of this embodiment has a depth, which can be between 1 micron and 3 microns, and the first protection layer 18 has a thickness T, which can be between 1 micron and 30 microns, wherein the thin part The first thickness T1 of the spacer part may be between 1 micron and 2 microns, the second thickness T2 of the spacer part may be between 2 microns and 6 microns, and the third thickness T3 of the thick part may be between 4 microns and 30 microns. between microns, but the present invention is not limited thereto. Moreover, the depth of the first depression can be adjusted by controlling the exposure energy of the lithography process.

接着,如图4所示,于第一保护层18上选择性的覆盖一第二保护层20,例如:氮化硅、氧化硅、氮氧化硅或是其他的有机材质。随后,于间隙物部18d上形成一金属图案层22,例如:网格状金属图案。金属图案层22的制作方式例如是将导电粒子,例如:银粒子、铝粒子、铜粒子、铟锡氧化物粒子等导电粒子,溶解于一溶剂中,例如:负型光阻溶剂,以形成一溶液,并将溶液涂布于第二保护层20上。然后,进行一曝光制程,将位于图案化彩色滤光层16的第二区块16b上的部分溶液固化,而其他部份未固化。接着,进行一显影制程,以移除未固化的溶液。随后,烘烤位于图案化彩色滤光层16的第二区块16b上的固化溶液,以移除固化溶液中的溶剂,并于间隙物部18d上形成金属图案层22,例如:网格状金属图案。值得注意的是,本实施例于形成金属图案层22之前是先于第一保护层18上覆盖第二保护层20,使得金属图案层22可与第二保护层20有较佳的黏着度,以避免金属图案层22因与第一保护层18之间的黏着度较差而产生剥落的情况。Next, as shown in FIG. 4 , a second protection layer 20 such as silicon nitride, silicon oxide, silicon oxynitride or other organic materials is selectively covered on the first protection layer 18 . Subsequently, a metal pattern layer 22 , such as a grid-like metal pattern, is formed on the spacer portion 18 d. The fabrication method of the metal pattern layer 22 is, for example, dissolving conductive particles, such as silver particles, aluminum particles, copper particles, indium tin oxide particles, etc., in a solvent, such as a negative photoresist solvent, to form a solution, and apply the solution on the second protective layer 20. Then, an exposure process is performed to cure part of the solution located on the second region 16 b of the patterned color filter layer 16 , while other parts are not cured. Next, a developing process is performed to remove the uncured solution. Subsequently, the curing solution located on the second block 16b of the patterned color filter layer 16 is baked to remove the solvent in the curing solution, and the metal pattern layer 22 is formed on the spacer portion 18d, for example: a grid shape Metal pattern. It is worth noting that, in this embodiment, the second protective layer 20 is covered on the first protective layer 18 before forming the metal pattern layer 22, so that the metal pattern layer 22 can have better adhesion to the second protective layer 20, In order to avoid peeling off of the metal pattern layer 22 due to poor adhesion with the first protection layer 18 .

接下来,如图5、图6与图7所示,于第二保护层20与金属图案层22上形成一第一间隙物24,金属图案层22可用于辅助垫高第一间隙物24,第一间隙物24的材质例如:光阻材料,其中第一间隙物24沿一第一方向D1覆盖金属图案层22,但沿垂直第一方向的一第二方向D2仅覆盖部分金属图案层22,且暴露出部分金属图案层22。然后,于第二保护层20、金属图案层22与第一间隙物24上覆盖一透明电极层26,且透明电极层26可与暴露出的部分金属图案层22相接触,而彼此电性连接,此设计可以增加第一间隙物24与透明电极层26的可接触面积。至此已完成本实施例的彩色滤光片基板27。于本实施例中,第一间隙物24具有一高度,介于1微米至10微米之间,但不限于此。Next, as shown in FIG. 5, FIG. 6 and FIG. 7, a first spacer 24 is formed on the second protection layer 20 and the metal pattern layer 22, and the metal pattern layer 22 can be used to assist in raising the first spacer 24, The material of the first spacer 24 is, for example: photoresist material, wherein the first spacer 24 covers the metal pattern layer 22 along a first direction D1, but only covers part of the metal pattern layer 22 along a second direction D2 perpendicular to the first direction. , and part of the metal pattern layer 22 is exposed. Then, a transparent electrode layer 26 is covered on the second protection layer 20, the metal pattern layer 22 and the first spacer 24, and the transparent electrode layer 26 can be in contact with the exposed part of the metal pattern layer 22 to be electrically connected to each other. , this design can increase the contactable area between the first spacer 24 and the transparent electrode layer 26 . So far, the color filter substrate 27 of this embodiment has been completed. In this embodiment, the first spacer 24 has a height between 1 micron and 10 microns, but not limited thereto.

然后,如图8所示,提供一第二基板28,例如:玻璃、塑胶或石英等透明基板,并不限于此。具有一第二内表面28a,且于第二基板28的第二内表面28a上形成一有机发光显示元件30。至此已完成本实施例的阵列基板32。随后,以第二基板28的第二内表面28a面向第一基板12的第一内表面12a的方式,组装第一基板12与第二基板28,并将有机发光显示元件30对准显示开口14a,使有机发光显示元件30所产生的光线可从显示开口14a经过图案化彩色滤光层16射出显示开口14a,以形成本实施例的有机发光显示面板10。Then, as shown in FIG. 8 , a second substrate 28 is provided, such as a transparent substrate such as glass, plastic or quartz, but is not limited thereto. It has a second inner surface 28a, and an organic light emitting display element 30 is formed on the second inner surface 28a of the second substrate 28 . So far, the array substrate 32 of this embodiment has been completed. Subsequently, the first substrate 12 and the second substrate 28 are assembled with the second inner surface 28a of the second substrate 28 facing the first inner surface 12a of the first substrate 12, and the organic light emitting display element 30 is aligned with the display opening 14a. The light generated by the organic light emitting display element 30 can pass through the patterned color filter layer 16 from the display opening 14 a to exit the display opening 14 a, so as to form the organic light emitting display panel 10 of this embodiment.

于本实施例中,形成有机发光显示元件30的步骤说明如下,但不以此为限。首先,于第二基板28的第二内表面28a上形成一主动元件层34,其中主动元件层34包含有一主动元件48,例如:薄膜晶体管,以及一平坦层50,覆盖于主动元件48与第二基板28上,并具有一穿孔50a暴露出主动元件48的一电极。然后,于主动元件层34的平坦层50上形成一第一电极36,并通过平坦层50的穿孔50a电性连接至主动元件48的电极,其中第一电极36可由例如金属等具有反射特性与高功函数的导电材料所构成,且第一电极36的位置对应彩色滤光片基板27的显示开口14设置。随后,于主动元件层34与第一电极36上形成一挡墙38,且挡墙38具有一开口38a,暴露出第一电极36,其中挡墙38由一绝缘材料所构成。接着,于挡墙38上形成一第二间隙物40,例如:光阻材料,且依序于暴露出的第一电极36上覆盖一发光层42与第二电极44,其中发光层42与第二电极44延伸至覆盖于挡墙38与第二间隙物40上,因此第二电极44可具有一第二凹陷44a,对准开口38a。In this embodiment, the steps of forming the organic light emitting display device 30 are described as follows, but not limited thereto. First, an active device layer 34 is formed on the second inner surface 28a of the second substrate 28, wherein the active device layer 34 includes an active device 48, such as a thin film transistor, and a planar layer 50 covering the active device 48 and the first The second substrate 28 has a through hole 50 a exposing an electrode of the active device 48 . Then, a first electrode 36 is formed on the planar layer 50 of the active device layer 34, and is electrically connected to the electrode of the active device 48 through the through hole 50a of the planar layer 50, wherein the first electrode 36 can be made of, for example, metal with reflective properties and The first electrode 36 is made of conductive material with high work function, and the position of the first electrode 36 is set corresponding to the display opening 14 of the color filter substrate 27 . Subsequently, a barrier wall 38 is formed on the active device layer 34 and the first electrode 36, and the barrier wall 38 has an opening 38a exposing the first electrode 36, wherein the barrier wall 38 is made of an insulating material. Next, a second spacer 40, such as a photoresist material, is formed on the retaining wall 38, and a light-emitting layer 42 and a second electrode 44 are sequentially covered on the exposed first electrode 36, wherein the light-emitting layer 42 and the first electrode 44 are covered. The second electrode 44 extends to cover the retaining wall 38 and the second spacer 40 , so the second electrode 44 can have a second recess 44 a aligned with the opening 38 a.

再者,第一电极36、第二电极44与位于其间的发光层42构成一有机发光二极管46,用于产生一白色光,并对准显示开口14a设置,使白色光可直接朝上射向图案化彩色滤光层16的第一区块16a,并于有机发光显示面板10的外侧显示出具有图案化彩色滤光层16的颜色的光线。第一电极36因具有高功函数而可作为有机发光二极管46的阳极,且通过平坦层50的穿孔50a电性连接至主动元件48的电极,以藉由主动元件48来控制有机发光二极管46所产生光线的灰阶。第二电极44则可由具有低功函数的透明导电材料所构成,例如:具有一定薄度而可呈现透明状态的银或镁,而可作为有机发光二极管46的阴极。此外,发光层42由可产生白色光的有机发光材料所构成,例如:有机发光材料为红光、绿光与蓝光有机发光材料堆叠而成,或者有机发光材料为蓝光有机发光材料,并搭配黄色荧光粉,使得有机发光二极管46可产生白色光。值得一提的是,本实施例的第一电极36由具有反射特性的导电材料所构成,且第二电极44由透明导电材料所构成,因此位于第一电极36与第二电极44之间的发光层42所产生的光线不仅可从第二电极44射出,并可受到第一电极36的反射,而往第二电极44射出,以有效地提升光利用率。由此可知,本实施例的有机发光显示面板为一顶面发光型有机发光显示面板。本发明的有机发光二极管并不限仅由第一电极、发光层以及第二电极所构成,而亦可包含有电子注入层与电洞注入层,但不以此为限。Moreover, the first electrode 36, the second electrode 44 and the light-emitting layer 42 therebetween form an organic light-emitting diode 46 for generating a white light, and is aligned with the display opening 14a, so that the white light can be directed upwards The first block 16a of the patterned color filter layer 16 displays light with the color of the patterned color filter layer 16 on the outside of the organic light emitting display panel 10 . The first electrode 36 can be used as the anode of the OLED 46 due to its high work function, and is electrically connected to the electrode of the active device 48 through the through hole 50a of the planar layer 50, so that the active device 48 can control the operation of the OLED 46. Generates a gray scale of light. The second electrode 44 can be made of a transparent conductive material with a low work function, such as silver or magnesium with a certain thickness and can be transparent, and can be used as a cathode of the OLED 46 . In addition, the light-emitting layer 42 is made of organic light-emitting materials that can generate white light. For example, the organic light-emitting materials are stacked red, green and blue light-emitting organic light-emitting materials, or the organic light-emitting materials are blue-light organic light-emitting materials combined with yellow light. Phosphor, so that the OLED 46 can generate white light. It is worth mentioning that the first electrode 36 of this embodiment is made of a conductive material with reflective properties, and the second electrode 44 is made of a transparent conductive material, so the area between the first electrode 36 and the second electrode 44 The light generated by the light-emitting layer 42 can not only be emitted from the second electrode 44, but also be reflected by the first electrode 36, and then emitted to the second electrode 44, so as to effectively improve light utilization efficiency. It can be seen from the above that the organic light emitting display panel of this embodiment is a top emission type organic light emitting display panel. The organic light emitting diode of the present invention is not limited to be composed of the first electrode, the light emitting layer and the second electrode, but may also include an electron injection layer and a hole injection layer, but is not limited thereto.

值得注意的是,于组装阵列基板32与彩色滤光片基板27时,第二间隙物40对应第一间隙物24设置,使覆盖于第二间隙物40上的第二电极44与覆盖于第一间隙物24上的透明导电层26相接触,并彼此电性连接。藉此,本实施例的有机发光显示面板10的第二电极44可有效地通过透明导电层26以及金属图案层22电性连接至周边驱动元件,以避免因过薄而与周边驱动元件之间有过大的电阻。另外,第二间隙物40、第一间隙物24与金属图案层22堆叠于第一保护层18与挡墙38之间,且第二凹陷44a对准第一凹陷18a设置,使第一凹陷18a的底部与有机发光显示元件30之间可具有一间隙H,介于5微米至30微米之间,使对应显示开口14a的间隙H可大于空气中的微粒大小。藉此,在结合彩色滤光片基板27与阵列基板32时,微粒不会朝有机发光二极管46突出,而可避免有机发光二极管受到损坏。It should be noted that when assembling the array substrate 32 and the color filter substrate 27, the second spacer 40 is arranged corresponding to the first spacer 24, so that the second electrode 44 covering the second spacer 40 and the second electrode 44 covering the first spacer 40 are arranged. The transparent conductive layers 26 on a spacer 24 are in contact and are electrically connected to each other. In this way, the second electrode 44 of the organic light emitting display panel 10 of this embodiment can be effectively electrically connected to the peripheral driving elements through the transparent conductive layer 26 and the metal pattern layer 22, so as to avoid the gap between the second electrode 44 and the peripheral driving elements due to being too thin. There is an excessive resistance. In addition, the second spacer 40, the first spacer 24 and the metal pattern layer 22 are stacked between the first protective layer 18 and the retaining wall 38, and the second recess 44a is aligned with the first recess 18a, so that the first recess 18a There may be a gap H between the bottom of and the organic light emitting display element 30, which is between 5 microns and 30 microns, so that the gap H corresponding to the display opening 14a may be larger than the particle size in the air. Thereby, when the color filter substrate 27 and the array substrate 32 are combined, the particles will not protrude toward the OLED 46 , so that the OLED can be prevented from being damaged.

本发明的有机发光显示面板及其制作方法并不以上述实施例为限。下文将继续揭示本发明的其它实施例或变化形,然为了简化说明并突显各实施例或变化形之间的差异,下文中使用相同标号标注相同元件,并不再对重复部分作赘述。The organic light emitting display panel and the manufacturing method thereof of the present invention are not limited to the above-mentioned embodiments. The following will continue to disclose other embodiments or variants of the present invention. However, in order to simplify the description and highlight the differences between the embodiments or variants, the same reference numerals are used to mark the same components, and the repetitive parts will not be repeated.

请参考图9至图11,且一并参考图1至图3。图9至图11为本发明一第二实施例的有机发光显示面板的制作方法示意图,其中图11为本发明第二实施例的有机发光显示面板的剖面示意图。本实施例的制作方法于形成第一保护层18的步骤以前与第一实施例的制作方法相同,如图1至图3所示,因此在此不再赘述。接着,如图8所示,相较于第一实施例,本实施例的制作方法于形成第一保护层18之后直接于第一保护层18的间隙物部18d上形成金属图案层22,而未形成有第二保护层。并且,本实施例的第一保护层18的材料可选择与金属图案层22有较佳黏着度的材料。然后,如图10所示,于金属图案层22上形成第一间隙物102。随后,于第一保护层18、金属图案层22与第一间隙物102上覆盖透明电极层26。至此已完成本实施例的彩色滤光片基板104。于本实施例中,本实施例的第一间隙物102与第一实施例的第一间隙物的差异在于本实施例的第一间隙物102仅设置于金属图案层22上,而未延伸至金属图案层22的两侧,使金属图案层22的侧边被暴露出。因此,透明电极层26可与较多部分的金属图案层22电性连接,进而可更有效地降低透明电极层26电性连接至周边驱动元件。最后,如图11所示,提供一阵列基板106,并组装阵列基板106与彩色滤光片基板104,以形成本实施例的有机发光显示面板100。于本实施例中,阵列基板106并未包含有第二间隙物,但不限于此。于本发明的其他实施例中,阵列基板亦可包含有第二间隙物。Please refer to FIG. 9 to FIG. 11 , and refer to FIG. 1 to FIG. 3 together. 9 to 11 are schematic diagrams of a manufacturing method of an organic light emitting display panel according to a second embodiment of the present invention, wherein FIG. 11 is a schematic cross-sectional view of the organic light emitting display panel according to the second embodiment of the present invention. The fabrication method of this embodiment is the same as the fabrication method of the first embodiment before the step of forming the first protective layer 18 , as shown in FIGS. 1 to 3 , so details will not be repeated here. Next, as shown in FIG. 8 , compared with the first embodiment, the fabrication method of this embodiment forms the metal pattern layer 22 directly on the spacer portion 18d of the first protection layer 18 after forming the first protection layer 18 , and No second protective layer was formed. Moreover, the material of the first protective layer 18 in this embodiment can be selected to have better adhesion to the metal pattern layer 22 . Then, as shown in FIG. 10 , a first spacer 102 is formed on the metal pattern layer 22 . Subsequently, the transparent electrode layer 26 is covered on the first protection layer 18 , the metal pattern layer 22 and the first spacer 102 . So far, the color filter substrate 104 of this embodiment has been completed. In this embodiment, the difference between the first spacer 102 of this embodiment and the first spacer of the first embodiment is that the first spacer 102 of this embodiment is only disposed on the metal pattern layer 22 and does not extend to The two sides of the metal pattern layer 22 expose the side edges of the metal pattern layer 22 . Therefore, the transparent electrode layer 26 can be electrically connected to more parts of the metal pattern layer 22 , thereby reducing the electrical connection of the transparent electrode layer 26 to peripheral driving elements more effectively. Finally, as shown in FIG. 11 , an array substrate 106 is provided, and the array substrate 106 and the color filter substrate 104 are assembled to form the organic light emitting display panel 100 of this embodiment. In this embodiment, the array substrate 106 does not include the second spacer, but it is not limited thereto. In other embodiments of the present invention, the array substrate may also include a second spacer.

请参考图12至图13,且一并参考图1至图3。图12至图13为本发明一第三实施例的有机发光显示面板的制作方法示意图,其中图13为本发明第三实施例的有机发光显示面板的剖面示意图。本实施例的制作方法于形成第一保护层18的步骤以前与第一实施例的制作方法相同,如图1至图3所示,因此在此不再赘述。接着,如图11所示,相较于第一实施例,本实施例的制作方法于形成第一保护层18之后直接于第一保护层18的间隙物部18d上形成第一间隙物202,而未形成有第二保护层与金属图案层。至此已完成本实施例的彩色滤光片基板204。最后,如图12所示,提供一阵列基板206,并组装阵列基板206与彩色滤光片基板204,以形成本实施例的有机发光显示面板200。于本实施例中,阵列基板206并未包含有第二间隙物,但不限于此。于本发明的其他实施例中,阵列基板亦可包含有第二间隙物。Please refer to FIG. 12 to FIG. 13 , and refer to FIG. 1 to FIG. 3 together. 12 to 13 are schematic diagrams of a manufacturing method of an organic light emitting display panel according to a third embodiment of the present invention, wherein FIG. 13 is a schematic cross-sectional view of the organic light emitting display panel according to the third embodiment of the present invention. The fabrication method of this embodiment is the same as the fabrication method of the first embodiment before the step of forming the first protective layer 18 , as shown in FIGS. 1 to 3 , so details will not be repeated here. Next, as shown in FIG. 11 , compared with the first embodiment, the fabrication method of this embodiment directly forms a first spacer 202 on the spacer portion 18d of the first protection layer 18 after forming the first protection layer 18 , The second protection layer and the metal pattern layer are not formed. So far, the color filter substrate 204 of this embodiment has been completed. Finally, as shown in FIG. 12 , an array substrate 206 is provided, and the array substrate 206 and the color filter substrate 204 are assembled to form the organic light emitting display panel 200 of this embodiment. In this embodiment, the array substrate 206 does not include the second spacer, but it is not limited thereto. In other embodiments of the present invention, the array substrate may also include a second spacer.

综上所述,本发明的有机发光显示面板于第一保护层对应显示开口的位置具有第一凹陷,且有机发光二极管亦对应显示开口设置,藉此可加大第一凹陷的底部与有机发光显示元件之间的间隙,使得在结合彩色滤光片基板与阵列基板时,微粒不会朝有机发光二极管突出,而可避免有机发光二极管受到损坏。To sum up, the organic light-emitting display panel of the present invention has a first depression at the position corresponding to the display opening in the first protective layer, and the organic light-emitting diode is also arranged corresponding to the display opening, thereby the bottom of the first depression and the organic light emitting diode can be enlarged. The gap between the display elements is such that when the color filter substrate and the array substrate are combined, the particles will not protrude toward the organic light emitting diodes, thereby preventing the organic light emitting diodes from being damaged.

以上所述仅为本发明的较佳实施例,凡依本发明申请专利范围所做的均等变化与修饰,皆应属本发明的涵盖范围。The above descriptions are only preferred embodiments of the present invention, and all equivalent changes and modifications made according to the scope of the patent application of the present invention shall fall within the scope of the present invention.

Claims (29)

1. the manufacture method of an organic electroluminescence display panel, is characterized in that, includes:
One first substrate is provided, has one first inner surface;
Form a black matrix" on this first substrate of this first inner surface, and this black matrix" has at least one demonstration opening, expose respectively this first substrate;
Form a patterning chromatic filter layer on this first substrate of this first inner surface, have at least one the first block and one second block, this first block is covered on this first substrate of this demonstration opening, and this second block is arranged on this black matrix";
Form one first protective layer on this first substrate of this first inner surface, cover this patterning chromatic filter layer and this black matrix", and this first protective layer has one first depression, wherein this first depression is positioned at the top of this first block of this patterning chromatic filter layer, and aims at this demonstration opening;
Form one first separation material on this first protective layer, and this first separation material is positioned at above this second block of this patterning chromatic filter layer; And
Assemble this first substrate and a second substrate, this second substrate has one second inner surface, and towards this first inner surface of this first substrate, this second substrate has an organic illuminated display element, be arranged on this second substrate of this second inner surface, and aim at this demonstration opening.
2. the manufacture method of organic electroluminescence display panel according to claim 1, is characterized in that, this first protective layer utilizes a halftoning light shield or a gray-level mask to form this first depression.
3. the manufacture method of organic electroluminescence display panel according to claim 1, is characterized in that, has a gap between the bottom of the first depression and this organic illuminated display element, between 5 microns to 30 microns.
4. the manufacture method of organic electroluminescence display panel according to claim 1, is characterized in that, this first protective layer has a thickness, between 1 micron to 30 microns.
5. the manufacture method of organic electroluminescence display panel according to claim 1, is characterized in that, this first protective layer has one thick and a thin section, and this thin section is positioned at the bottom of this first depression.
6. the manufacture method of organic electroluminescence display panel according to claim 1, is characterized in that, this first depression has a degree of depth, between 1 micron to 3 microns.
7. the manufacture method of organic electroluminescence display panel according to claim 1, is characterized in that, this first separation material has a height, between 1 micron to 10 microns.
8. the manufacture method of organic electroluminescence display panel according to claim 1, is characterized in that, separately is contained in and covers one second protective layer on this first protective layer.
9. the manufacture method of organic electroluminescence display panel according to claim 1, is characterized in that, organic illuminated display element comprises:
One active member is arranged on this second substrate of this second inner surface; And
One Organic Light Emitting Diode, be arranged on this second substrate of this second inner surface, this Organic Light Emitting Diode comprises one first electrode, a luminescent layer and one second electrode at least, and this luminescent layer is arranged between this first electrode and this second electrode, and this first electrode is electrically connected this active member.
10. the manufacture method of organic electroluminescence display panel according to claim 9, is characterized in that, separately be contained on this active member and this first electrode to form a barricade, and this barricade has an opening, exposes this first electrode.
11. the manufacture method of organic electroluminescence display panel according to claim 10 is characterized in that, this second electrode covers this first electrode in this opening, and has one second depression, aims at this opening.
12. the manufacture method of organic electroluminescence display panel according to claim 10 is characterized in that, the step that forms this organic illuminated display element separately includes formation one second separation material on this barricade.
13. the manufacture method of organic electroluminescence display panel according to claim 9 is characterized in that, separately includes:
Before the step that forms this first separation material, form a metal pattern layer on this first protective layer, and this metal pattern layer is between this first separation material and this first protective layer; And
After the step that forms this first separation material, cover a transparent electrode layer on this first protective layer, this metal pattern layer and this first separation material.
14. the manufacture method of organic electroluminescence display panel according to claim 13 is characterized in that, this second electrode is electrically connected this transparent electrode layer.
15. the manufacture method of organic electroluminescence display panel according to claim 13 is characterized in that, separately includes to form one second separation material, is arranged between this second electrode and this second substrate.
16. an organic electroluminescence display panel is characterized in that, includes:
One first substrate has one first inner surface;
One black matrix" is arranged on this first substrate of this first inner surface, and this black matrix" has at least one demonstration opening;
One patterning chromatic filter layer has at least one the first block and one second block, and this first block is covered on this first substrate of this demonstration opening, and this second block is arranged on this black matrix";
One first protective layer is covered on this patterning chromatic filter layer and this black matrix", and this first protective layer have one first the depression, be positioned at the top of this first block of this patterning chromatic filter layer, and aim at this demonstration opening;
One first separation material is arranged on this first protective layer, and this first separation material is positioned at above this second block of this patterning chromatic filter layer;
One second substrate is oppositely arranged with this first substrate, and this second substrate has one second inner surface, towards this first inner surface of this first substrate; And
One organic illuminated display element is arranged on this second substrate of this second inner surface, and aims at this demonstration opening.
17. organic electroluminescence display panel according to claim 14 is characterized in that, has a gap between the bottom of the first depression and this organic illuminated display element, between 5 microns to 30 microns.
18. organic electroluminescence display panel according to claim 14 is characterized in that, this first protective layer has a thickness, between 1 micron to 30 microns.
19. organic electroluminescence display panel according to claim 14 is characterized in that, this first protective layer has one thick and a thin section, and this thin section is positioned at the bottom of this first depression.
20. organic electroluminescence display panel according to claim 14 is characterized in that, this first depression has a degree of depth, between 1 micron to 10 microns.
21. organic electroluminescence display panel according to claim 14 is characterized in that, this first separation material has a height, between 1 micron to 10 microns.
22. organic electroluminescence display panel according to claim 14 is characterized in that, separately includes one second protective layer, is arranged between this and this first protective layer.
23. organic electroluminescence display panel according to claim 14 is characterized in that, organic illuminated display element comprises:
One active member is arranged on this second substrate of this second inner surface; And
One Organic Light Emitting Diode, be arranged on this second substrate of this second inner surface, this Organic Light Emitting Diode comprises one first electrode, a luminescent layer and one second electrode at least, and this luminescent layer is arranged between this first electrode and this second electrode, and this first electrode is electrically connected this active member.
24. organic electroluminescence display panel according to claim 23 is characterized in that, this organic illuminated display element separately includes a barricade, and between this luminescent layer and this active member, and this barricade has an opening, to should the first electrode setting.
25. organic electroluminescence display panel according to claim 24 is characterized in that, this second electrode has one second depression, aims at this opening.
26. organic electroluminescence display panel according to claim 23 is characterized in that, separately includes:
One metal pattern layer is arranged between this first separation material and this first protective layer; And
One transparent electrode layer is covered on this first protective layer, this metal pattern layer and this first separation material, and contacts and be electrically connected with this metal pattern layer.
27. organic electroluminescence display panel according to claim 26 is characterized in that, this first separation material, this metal pattern layer of cover part.
28. organic electroluminescence display panel according to claim 26 is characterized in that, this second electrode is electrically connected this transparent electrode layer.
29. organic electroluminescence display panel according to claim 26 is characterized in that, also comprises one second separation material, is arranged between this second electrode and this second substrate.
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