CN103116195B - Silica-based gradient-index lens - Google Patents

Abstract

The invention relates to a silicon-based gradient refraction index lens, which comprises a silicon-based substrate on which a gradient refraction-index lens is formed. The invention adopts a silicon-based substrate as a lens substrate, and forms a gradient refractive index lens on the silicon-based substrate, which can be used in silicon-based optoelectronic integration technology.

Description

Silicon Gradient Index Lenses

technical field

The invention relates to a silicon-based gradient refractive index lens.

Background technique

As an important micro-optical element, the gradient index lens is a special element that cannot be replaced by ordinary optics. It is a micro-lens or lens array made of inhomogeneous dielectric materials with different refractive indices. The refractive index distribution profile is divided into radial, axial and spherical nonlinear curves. According to the special properties of gradient index lenses, gradient index lenses can not only be applied to micro-optical imaging devices, such as fax machines, copiers, scanners, and various tiny image sensors such as medical and industrial endoscopes, but also in optical communication As the core component of optical active and passive devices, it has a wide range of applications in optical collimators, interconnectors, isolators, optical filters, optical switches, and fiber optic couplers. Currently, gradient index lenses used in the field of optoelectronic information mainly use the ion exchange method or sol-gel method. Since the prepared gradient index lens is only suitable for the packaging of a single device, and the package size is large, it is difficult to be used in silicon-based optoelectronics. integrated technology.

Contents of the invention

The problem to be solved by the present invention is to provide a silicon-based gradient refractive index lens, which can be used in silicon-based optoelectronic integration technology.

The invention provides a silicon-based gradient refractive index lens, which comprises a silicon-based substrate on which a gradient refractive index lens is formed.

The silicon-based gradient index lens has a nanometer-sized porous structure.

The base material of the gradient index lens is single crystal silicon.

The invention adopts a silicon-based substrate as a lens substrate, and forms a gradient refractive index lens on the silicon-based substrate, which can be used in silicon-based optoelectronic integration technology.

Description of drawings

FIG. 1 is a schematic diagram of the structure of a silicon-based gradient-index lens proposed by the present invention.

Detailed ways

The technical solution will be further described below in conjunction with the accompanying drawings.

Please refer to Fig. 1, this technical scheme provides a kind of silicon-based gradient refractive index lens 10, and it comprises a lens matrix 11 of predetermined shape; distributed.

Each step will be described in detail below in conjunction with the embodiments.

In step (1), a lens base 11 of a predetermined shape is provided. The material of the lens base 11 is composed of single crystal silicon, and its lattice orientation is (110).

In step (2), the lens base is composed of nanoholes 12 . In this embodiment, the lens base 10 in step (1) is placed on a chemical etching device, and the etching solution used is a mixed solution of hydrofluoric acid and sulfuric acid.

Step (3), according to step (1) and step (2), by changing the current intensity and corrosion time, thereby controlling the nanopore size (to form the gradient index lens 10.

Claims (2)

1. A silicon-based gradient-refractive-index lens is characterized in that: it comprises a silicon-based substrate, on which a gradient-refractive-index lens is formed; the silicon-based substrate material is single crystal silicon, and the crystal lattice orientation of the single crystal silicon for (110). 2. The silicon-based gradient-refractive-index lens according to claim 1, characterized in that: said silicon-based gradient-refractive-index lens has a nanometer-sized porous structure; said silicon-based gradient-refractive index lens has a nanometer-sized porous structure through The silicon-based substrate is obtained by placing it on a chemical etching device, and the used etching solution is a mixed solution of hydrofluoric acid and sulfuric acid; and by changing the current intensity and etching time, the nanopore size is controlled to form the gradient index lens.