CN103111917B - The efficient magnetorheological grinding and polishing device that a kind of magnetic circuit break-make is controlled - Google Patents
The efficient magnetorheological grinding and polishing device that a kind of magnetic circuit break-make is controlled Download PDFInfo
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- CN103111917B CN103111917B CN201310031043.1A CN201310031043A CN103111917B CN 103111917 B CN103111917 B CN 103111917B CN 201310031043 A CN201310031043 A CN 201310031043A CN 103111917 B CN103111917 B CN 103111917B
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CN201310031043.1A CN103111917B (en) | 2013-01-28 | 2013-01-28 | The efficient magnetorheological grinding and polishing device that a kind of magnetic circuit break-make is controlled |
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CN201310031043.1A CN103111917B (en) | 2013-01-28 | 2013-01-28 | The efficient magnetorheological grinding and polishing device that a kind of magnetic circuit break-make is controlled |
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CN103111917A CN103111917A (en) | 2013-05-22 |
CN103111917B true CN103111917B (en) | 2015-11-18 |
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CN201310031043.1A Active CN103111917B (en) | 2013-01-28 | 2013-01-28 | The efficient magnetorheological grinding and polishing device that a kind of magnetic circuit break-make is controlled |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103273385B (en) * | 2013-06-09 | 2015-05-27 | 湖南大学 | Surface contact magneto-rheological flat polishing device and method with uniform magnetic field |
CN109396968B (en) * | 2018-12-20 | 2019-09-06 | 中国人民解放军国防科技大学 | Semi-closed extension formula magnetic current becomes burnishing device |
CN111438567B (en) * | 2020-04-07 | 2021-02-05 | 台州学院 | A magnetorheological polishing knife |
CN115592475A (en) * | 2022-10-28 | 2023-01-13 | 无锡市锡山区半导体先进制造创新中心(Cn) | A kind of magnetorheological polishing equipment |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4821466A (en) * | 1987-02-09 | 1989-04-18 | Koji Kato | Method for grinding using a magnetic fluid and an apparatus thereof |
US6083839A (en) * | 1997-12-31 | 2000-07-04 | Intel Corporation | Unique chemical mechanical planarization approach which utilizes magnetic slurry for polish and magnetic fields for process control |
CN1486821A (en) * | 2003-08-22 | 2004-04-07 | 清华大学 | Electromagnetic magnetorheological polishing head |
CN1515809A (en) * | 2003-01-02 | 2004-07-28 | 玲 邱 | Electromagnetic rheopectic fluid piston component |
CN1915591A (en) * | 2006-09-04 | 2007-02-21 | 厦门大学 | Polishing wheel with parameter adjustable type magnetic rheology |
CN101564824A (en) * | 2009-06-05 | 2009-10-28 | 湖南大学 | Method and device for polishing magneto-rheological inclined shaft |
CN202684649U (en) * | 2012-06-19 | 2013-01-23 | 东莞市兰光光学科技有限公司 | Magneto-rheological polishing head |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI295219B (en) * | 2005-11-01 | 2008-04-01 | Nat Applied Res Laboratories | The device and method of lapping and polishing with multi composite controlled by magnetic controlled |
US20080051008A1 (en) * | 2006-08-22 | 2008-02-28 | International Business Machines Corporation | Apparatus and method for chemical mechanical polishing with improved uniformity |
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2013
- 2013-01-28 CN CN201310031043.1A patent/CN103111917B/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4821466A (en) * | 1987-02-09 | 1989-04-18 | Koji Kato | Method for grinding using a magnetic fluid and an apparatus thereof |
US6083839A (en) * | 1997-12-31 | 2000-07-04 | Intel Corporation | Unique chemical mechanical planarization approach which utilizes magnetic slurry for polish and magnetic fields for process control |
CN1515809A (en) * | 2003-01-02 | 2004-07-28 | 玲 邱 | Electromagnetic rheopectic fluid piston component |
CN1486821A (en) * | 2003-08-22 | 2004-04-07 | 清华大学 | Electromagnetic magnetorheological polishing head |
CN1915591A (en) * | 2006-09-04 | 2007-02-21 | 厦门大学 | Polishing wheel with parameter adjustable type magnetic rheology |
CN101564824A (en) * | 2009-06-05 | 2009-10-28 | 湖南大学 | Method and device for polishing magneto-rheological inclined shaft |
CN202684649U (en) * | 2012-06-19 | 2013-01-23 | 东莞市兰光光学科技有限公司 | Magneto-rheological polishing head |
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CN103111917A (en) | 2013-05-22 |
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Inventor after: Yin Shaohui Inventor after: Huang Shifan Inventor before: Yin Shaohui |
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TR01 | Transfer of patent right |
Effective date of registration: 20170401 Address after: 311200 Hangzhou science and technology development center, No. 438 Jincheng Road, Xiaoshan District, Zhejiang, China, 707 Patentee after: Hangzhou Ming Ming Technology Co., Ltd. Address before: Jiaxing City, Zhejiang province 314001 Nanhu District Ling Gong Tang Road No. 3339 (Jiaxing city) building 2, room 111 Patentee before: Jiaxing Namei Precision Machinery Co., Ltd. |
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Effective date of registration: 20181219 Address after: 310000 New Street Science Park B509, Xiaoshan District, Hangzhou City, Zhejiang Province Patentee after: Hangzhou Laser Technology Co., Ltd. Sheng radium Address before: 311200 Southeast Science and Technology Research Center 707, 438 Jincheng Road, Xiaoshan District, Hangzhou City, Zhejiang Province Patentee before: Hangzhou Ming Ming Technology Co., Ltd. |
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Effective date of registration: 20210518 Address after: 310000 Shengzhong Village, Xinjie Street, Xiaoshan District, Hangzhou City, Zhejiang Province Patentee after: HANGZHOU ZHIFAN LASER TECHNOLOGY Co.,Ltd. Address before: 310000 New Street Science Park B509, Xiaoshan District, Hangzhou City, Zhejiang Province Patentee before: HANGZHOU SENLAY LASER TECHNOLOGY Co.,Ltd. |
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