CN103094173B - Multi-chuck wafer clamp - Google Patents

Abstract

The invention discloses a multi-chuck wafer clamp, which controls chucks by applying force to clamp arms, reduces the distance between the chucks so that the chucks are folded and contact the side edge of a wafer to complete the operation of clamping the wafer. The invention comprises four or more chucks, the chucks are arranged at the tail ends of the clamping arms, a plurality of chucks can be arranged at the tail ends of one or more clamping arms to form a multi-chuck clamp, part of the clamping arms are relatively fixed, the rest clamping arms can move in a direction to drive the chucks to approach and contact the side edge of a wafer to carry out clamping operation, and included angles are formed among the clamping arms. The multi-chuck clamp can achieve the function of the clamp only by acting three chucks on the wafer, thereby reducing the requirement on the control accuracy of the chucks and the control difficulty of clamping the wafer and improving the safety.

Description

A multi-clamp wafer fixture

technical field

The invention relates to a clamp, in particular to a multi-clamp clamp that only needs three of the clamps in the wafer clamping process to complete the clamping operation, thereby reducing the difficulty of clamping operation and improving safety.

Background technique

The third-generation semiconductor materials represented by semiconductor materials have the characteristics of high internal and external quantum efficiency, high luminous efficiency, high thermal conductivity, high temperature resistance, radiation resistance, acid and alkali resistance, high strength and high hardness, and are used in new optical displays. , optical storage, optical lighting, photodetection devices and other fields are widely used. At present, the production scale of these semiconductor industries is constantly expanding, and its output is constantly increasing.

The rapid development of these semiconductor industries and related electronic industries has naturally aroused everyone's attention to the frequently used and indispensable production tools in these industries, namely wafer fixtures.

At present, there are mainly two ways to pick up large-sized semiconductor wafers with a diameter of two inches, three inches, and four inches. One is to use ordinary tweezers, and the other is vacuum suction. Ordinary tweezers use its two chucks to clamp the front and back sides of the wafer to complete the clamping operation; the suction cup for vacuum suction is made of rubber. Keep. At present, the control accuracy of the fixture to the collet is relatively low, the operation is difficult, and the work efficiency is low; the vacuum adsorption fixture is not suitable for high temperature environment.

Whether the above-mentioned tweezers are two-clamp, three-clamp tweezers or vacuum suction, the requirements for clamping accuracy are relatively high. For tweezers with two chucks and three chucks, all the chucks are required to apply force to the side edge of the wafer at the same time to complete the clamping operation. For vacuum suction, the suction cup must not be deformed or have dirt. If the suction cup is prone to deformation or If there are stolen goods, it will cause air leakage and cannot complete the clamping operation, and the clamping operation will fail.

Therefore, if there is a kind of clamp, when the clamp is operating, the requirements for the clamping control accuracy of a certain clamp can be appropriately reduced, and the clamp will not be affected by a certain clamp due to its clamping action. operation, the use of this fixture will be safer and more reliable.

Contents of the invention

The object of the present invention is to address the deficiencies in the prior art, to provide a multi-clamp clamp, which contains four or more clamps, the clamps are installed at the end of the clamp arm, and the clamp is controlled by applying force to the clamp arm, The clamping operation is accomplished by reducing the distance between the chucks so that they close together and contact the side edges of the wafer. During the operation of clamping the wafer, the clamp only needs to ensure that any three chucks clamp the side edge of the wafer to successfully complete the clamping operation. The jig of the present invention can meet the above-mentioned requirements through the type selection, material selection, and free installation and combination of the chuck and the jig arm according to the use requirements.

To achieve the above object, the present invention adopts the following scheme:

A multi-clamp wafer clamp includes four or more clamps, the clamps are installed at the end of the clamp arm, and a plurality of clamps can be installed on the end of one or more clamp arms to form a multi-clamp clamp, these clamps All can apply force to the side edge of the wafer and complete the clamping operation. At this time, there are at least two clamping arms to achieve the above clamping purpose, that is, the number of clamping arms can be two or more; in the clamping arms, some clamping arms Relatively fixed, the rest of the clamp arms can be moved in a direction to drive the chucks closer and contact the side edge of the wafer to perform the clamping operation; the joints of the clamp arms of the above-mentioned multi-clamp fixture can be placed at: the head end of the clamp arm; the middle section of the clamp arm; and away from the clamp Any other part of the end of the arm (where it is connected to the chuck); there is an angle formed between the arms, and the motion properties of the arms are: one of the arms has a certain movement elasticity and force displacement function, and the rest of the arms Relatively fixed; or two of the clamp arms have a certain movement elasticity and force displacement function, and the rest of the clamp arms are relatively fixed; or all the clamp arms have a certain movement elasticity and force displacement function; the chuck and the clamp The installation method of the end of the arm includes one-piece molding, rolling, screwing, bonding, welding, clamping and other installation methods.

In some of these embodiments, the shape of the chuck can be flat, ear-shaped, shovel-shaped, duckbill-shaped, shaped, inverted triangle, peak-shaped, etc., wherein any three chucks exert force on the side of the wafer, The clipping operation can be successfully completed.

In some of these embodiments, the clamping arm drives the clamping heads to move by applying force, so that the distance between the clamping heads is reduced and moved closer together to complete the clipping operation. The shape of the clamping arm can be: flat, cylindrical, And the thickness of the clamp arms such as cones does not require all to be equal, such as: all the clamp arms have the same thickness; one of the clamp arms has a different thickness from all other clamp arms; two of the clamp arms have the same thickness, and all other clamp arms have different thicknesses; all Jaws of different thickness; and other similar variations from the above.

In some of these embodiments, the material of the clamp arm can be selected from iron, carbon, stainless steel, plastic, aluminum alloy and other composite materials according to different requirements such as force application and operating temperature.

In some of these embodiments, the shapes of the multiple chucks can be combined freely, and all the chucks have the same size; or all the chucks have different sizes; or two of the chucks have the same size, and the rest of the chucks have different sizes; or wherein The size of one chuck is different from all other chucks; and any other combination different from the above; the chuck has the characteristics of high temperature resistance, and the chuck is made of: iron, carbon, stainless steel, plastic , aluminum alloy and other composite materials.

In some of these embodiments, the multi-clamp clamp can also have other various implementations: for example, four clamps, three clamp arms; five clamps, five clamp arms; and multiple clamps, multiple clamp arms; When the arm and collet are assembled, two collets are installed at the end of one clamp arm.

In some of these embodiments, the clamp is provided with four clamp arms and four chuck clamps, including four A clamp arms, B clamp arms, C clamp arms, and D clamp arms of the same size and shape, and their top ends are connected to each other. , and form an included angle with each other; the fixture also includes four A chucks, B chucks, C chucks, and D chucks of the same size and shape. Clamp arm, C clamp arm, and D clamp arm are integrally connected; the four clamps of A, B, C and D clamps are all in the same plane as the wafer contact points, and the four clamps constitute The diameter of the concentric circles is slightly larger than the diameter of the wafer.

In some of these embodiments, the clamp includes two clamp arms A and B with the same size and shape, their top ends are connected to each other and form an angle with each other, and each end of each clamp arm is connected with two chucks. , A1 chuck, A2 chuck is installed at the end of A clamp arm, B1 chuck and B2 chuck are installed at the end of B clamp arm, and the four chucks of A1 chuck, A2 chuck, B1 chuck and B2 chuck are all Placed vertically and integrally connected with respective clamp arms; the contact points of the four clamps and the wafer are all on the same plane, and the diameter of the concentric circle formed by the four clamps is slightly larger than the diameter of the wafer.

The invention provides a multi-clamp fixture, which includes 4 or more clamps. During the wafer clamping process, only three of the clamps need to act on the wafer to achieve the effect of the clamp, thereby reducing the impact on the wafer. The requirements for the control accuracy of the chuck and the difficulty of manipulating the clamped wafer improve safety. And according to the use environment of the fixture, its material can be selected from iron, carbon, stainless steel, plastic, aluminum alloy and other composite materials, which can be used at high temperature or normal temperature.

Description of drawings

Figure 1 shows a schematic diagram of Embodiment 1 of the present invention.

FIG. 2 shows a schematic diagram of Embodiment 2 of the present invention.

The reference signs are explained as follows:

A clamp arm 1, B clamp arm 2, C clamp arm 3, D clamp arm 4, A clamp 5, B clamp 6, C clamp 7, D clamp 8, wafer 9, A1 clamp 13, A2 clamp Head 14, B1 chuck 15, B2 chuck 16.

detailed description

In order to further understand the features, technical means, and achieved specific objectives and functions of the present invention, and to analyze the advantages and spirit of the present invention, the present invention will be further described through the following examples.

Referring to accompanying drawings 1 and 2 for the effect diagrams of the embodiments of the present invention, the present invention provides a multi-clamp clamp, which contains four or more clamps. The clamp is installed at the end of the clamp arm, and the force applied by the clamp arm drives the clamp to move, so that the distance between the clamps is reduced and moved closer together, and the clip operation is completed. During the operation of clamping the wafer, the clamp only needs to ensure that any three chucks apply force to the side of the wafer, and then the clamping operation can be successfully completed. The clamp can achieve the purpose of the present invention by free combination of the type selection and material selection of the chuck and the clamp arm according to the use requirements. The above clamp is assembled from two main parts, the clamping head and the clamping arm.

The clamp is a multi-clamp clamp, and the number of clamps can be 4 or more. These clamps can apply force to the side edge of the wafer and complete the clamping operation. The shape can be flat or ear-shaped. , shovel, duckbill, configuration, inverted triangle, peak, etc. Under the premise that the above-mentioned clamping purpose can be achieved, the size of the multi-clamps can be selected and combined freely, such as: all the clamps have the same size; all the clamps have different sizes; two of the clamps have the same size, and the rest None of the collet sizes are the same; any other combination than the above. The chuck has the characteristics of high temperature resistance and can be made of iron, carbon, stainless steel, plastic, aluminum alloy and other composite materials.

The multi-clamp fixture of the present invention can install a plurality of clamps on one clamp arm. At this time, at least two clamp arms can realize the above-mentioned clamping purpose, that is, the number of clamp arms can be 2, 3 or 4. above. Among the clamping arms, some of the clamping arms are relatively fixed, and the rest of the clamping arms can be oriented to move to drive the clamping head closer and contact the side edge of the wafer to carry out the clamping operation. The motion properties of the clamp arms have the following conditions: one of the clamp arms has a certain motion elasticity and force displacement function, and the other clamp arms are relatively fixed; two of the clamp arms have certain motion elasticity and force displacement functions, The rest of the clamping arms are relatively fixed; all the clamping arms have certain movement flexibility and force displacement functions; and other similar changes that are different from the above situations. The shape of the clamp arm can be: flat, cylindrical, conical and so on. Under the premise that the above clamping purpose can be achieved, the thickness of the clamp arms does not need to be all equal, for example: all the clamp arms have the same thickness; one of the clamp arms has a different thickness from all other clamp arms; two of the clamp arms have the same thickness, and all other Jaws vary in thickness; all jaws vary in thickness; and other similar variations from the above. The material of the jig arm can be selected according to different requirements such as force application and operating temperature: iron, carbon, stainless steel, plastic, aluminum alloy and other composite materials.

The joints of the clamp arms of the above-mentioned multi-clamp fixture can be placed at: the head end of the clamp arm; the middle section of the clamp arm; and any other position away from the end of the clamp arm (where the clamp is connected). The connection methods between them include integral molding, rolling, screw bonding, bonding, welding, clamping and other connection methods.

The above-mentioned clamping arms form an included angle with each other, and the angle between them can be arbitrarily selected on the premise that the above-mentioned clamping purpose can be achieved. The above-mentioned collets are installed at the end of the jig arm, and a maximum of two collets can be installed at the end of one jig arm. The chuck and jig arm can be installed at any angle according to requirements. The installation method of the chuck and the end of the clamp arm: including integral molding, rolling, screwing, bonding, welding, clamping and other installation methods.

Embodiment one:

Embodiment 1 of the present invention provides a fixture with four clamp arms and four clamp heads, as shown in Figure 1, it includes four A clamp arms 1, B clamp arms 2, C clamp arms 3, and D clamps of the same size and shape. The top ends of the arms 4 are connected to each other and form an angle with each other. The clamp also includes four A chucks 5, B chucks 6, C chucks 7, and D chucks 8 of the same size and shape. The arm 2, the C clamp arm 3, and the D clamp arm 4 are integrally connected. The contact points between the A chuck 5, B chuck 6, C chuck 7 and D chuck 8 are all in the same plane with the wafer 9, and the diameter of the concentric circle formed by the four chucks is slightly larger than the diameter of the wafer 9. .

Embodiment two:

Embodiment 2 of the present invention provides a clamp with two clamping arms and four clamping heads. As shown in Figure 2, it comprises two A clamping arms 1 and B clamping arms 2 of the same size and shape, whose top ends are connected to each other, and They form an angle with each other, and each end of each clamping arm is connected with two chucks, the end of A clamping arm 1 is equipped with A1 clamping clamp 13, A2 clamping clamp 14, and the end of B clamping arm 2 is equipped with B1 clamping clamp 15, B2 clamping clamp 16. The four chucks of A1 chuck 13, A2 chuck 14, B1 chuck 15, and B2 chuck 16 are all placed vertically and integrally connected with respective clamp arms. The contact points of the four chucks and the wafer 9 are all on the same plane, and the diameter of the concentric circle formed by the four chucks is slightly larger than that of the wafer 9 .

The multi-clamp fixture of the present invention can also have other various implementation modes: for example, four chucks and three clamp arms; five clamps and five clamp arms; and multiple clamps and multiple clamp arms.

In specific implementation, the number of chucks can be 4 or more, and these chucks can exert force on the side edge of the wafer and complete the clamping operation, and the shape can be flat, ear-shaped, shovel-shaped, duckbill shape, configuration, inverted triangle, peak shape, etc. Under the premise that the above-mentioned clamping purpose can be achieved, the size of the multi-clamps can be selected and combined freely, such as: all the clamps are the same size; all the clamps are different in size; The heads are all different sizes; two of the chucks are the same size and all the rest are different sizes; and any other combination other than the above. The chuck has the characteristics of high temperature resistance and can be made of iron, carbon, stainless steel, plastic, aluminum alloy and other composite materials.

A plurality of clamping heads can be installed on one clamping arm. At this time, at least two clamping arms can realize the above-mentioned clamping purpose, that is, the number of clamping arms can be 2, 3 or 4 or more. The motion properties of the clamp arms have the following conditions: one of the clamp arms has a certain motion elasticity and force displacement function, and the other clamp arms are relatively fixed; two of the clamp arms have certain motion elasticity and force displacement functions, The rest of the clamping arms are relatively fixed; all the clamping arms have certain movement flexibility and force displacement functions; and other similar changes that are different from the above situations. The shape of the clamp arm can be: flat, cylindrical, conical and so on. Under the premise that the above clamping purpose can be achieved, the thickness of the clamp arms does not need to be all equal, for example: all the clamp arms have the same thickness; one of the clamp arms has a different thickness from all other clamp arms; two of the clamp arms have the same thickness, and all other clamp arms Jaws vary in thickness; all jaws vary in thickness; and other similar variations from the above. The material of the jig arm can be selected according to different requirements such as force application and operating temperature: iron, carbon, stainless steel, plastic, aluminum alloy and other composite materials.

The joints of the jig arms can be placed at: the head end of the jig arm; the middle section of the jig arm; and any other position away from the end of the jig arm (connected with the chuck). The angle between the clamp arms can be selected arbitrarily under the premise that the clamp function can be implemented. When the jig arm and chuck are assembled, one or two chucks can be installed at the end of a jig arm. The installation angle between the chuck and the jig arm can be selected at any angle according to requirements. The installation method of the chuck and the end of the clamp arm includes integral molding, rolling, screwing, bonding, welding, clamping and other installation methods.

It goes without saying that the above embodiments of the multi-clamp fixture of the present invention are only examples, and are not intended to limit this method. As long as it is within the scope of the multi-clamp core of the present invention, any changes made to the above embodiments Any modification is included in the protection scope of the claims of the present invention.

The above-mentioned embodiments only express the specific implementation manner of the present invention, and the description thereof is relatively specific and detailed, but should not be construed as limiting the patent scope of the present invention. It should be noted that, for the technology in this field, several modifications and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent for the present invention should be based on the appended claims.

Claims (7)

1. A multi-clamp wafer fixture, characterized in that, the chuck is installed at the end of the clamp arm; The multi-clamp clamp includes four clamps and three clamp arms; or the multi-clamp clamp includes five clamps and five clamp arms; when the clamp arms and clamps are assembled, two clamps are installed at the end of one clamp arm ; Among the clamping arms, some clamping arms are relatively fixed, and the rest of the clamping arms can be moved in a direction to drive the clamping head closer and contact the side edge of the wafer to perform the clamping operation; the clamping arms are connected to each other, and the clamping arms are connected to each other at the head of the clamping arm. end or the middle section of the jig arm or away from the end of the jig arm; an angle is formed between the jig arms; The motion properties of the clamp arms are as follows: one of the clamp arms has a certain movement elasticity and force displacement function, and the other clamp arms are relatively fixed; or two of the clamp arms have certain movement elasticity and force displacement functions, and the rest The clamp arm is relatively fixed; or all the clamp arms have a certain movement elasticity and force displacement function; The installation methods of the chuck and the end of the clamp arm include integral molding, rolling, screw combination, bonding, welding, and clamp installation. 2. A multi-clamp wafer fixture according to claim 1, wherein the chucks are in the shape of flat, ear-shaped, shovel-shaped, duckbill-shaped, inverted triangle, or peak-shaped, any three of which A chuck applies force to the side of the wafer. 3. A multi-clamp wafer clamp according to claim 1, characterized in that, the clamp arm drives the clamps to move by applying force, so that the distance between the clamps is reduced and moved closer together to complete the clamping operation; The shape of the clamp arm is: flat, cylindrical, conical; The thickness of the clamp arms is as follows: all the clamp arms have the same thickness; or one of the clamp arms has a different thickness from all other clamp arms; or two of the clamp arms have the same thickness and all other clamp arms have different thicknesses. 4 . The multi-clamp wafer fixture according to claim 1 , wherein the material of the clamp arm is: iron, carbon, stainless steel, plastic, or aluminum alloy. 5. A multi-clamp wafer holder according to claim 1, wherein the chucks are of the same size; or the size of one of the chucks is different from that of all other chucks; Material: iron, carbon, stainless steel, plastic, aluminum alloy. 6. A multi-clamp wafer fixture, characterized in that the clamp is installed at the end of the clamp arm; in the clamp arm, part of the clamp arms are relatively fixed, and the rest of the clamp arms can be moved in a direction to drive the clamp close to and contact the wafer side The clamping operation is performed on the edge; the clamping arms are connected to each other, and the clamping arms are connected to each other at the head end of the clamping arm or the middle section of the clamping arm or away from the end of the clamping arm; an angle is formed between the clamping arms; The motion properties of the clamp arms are as follows: one of the clamp arms has a certain movement elasticity and force displacement function, and the other clamp arms are relatively fixed; or two of the clamp arms have certain movement elasticity and force displacement functions, and the rest The clamp arm is relatively fixed; or all the clamp arms have a certain movement elasticity and force displacement function; The installation methods of the chuck and the end of the clamp arm include integral molding, rolling, screwing, bonding, welding, and clamp installation; The multi-clamp wafer fixture is provided with four clamp arms and four clamp clamps, including four A clamp arms (1), B clamp arms (2), C clamp arms (3), and D clamp arms of the same size and shape. (4), their tops are connected to each other and form an included angle; the fixture also includes four A clamps (5), B clamps (6), C clamps (7) and D clamps with the same size and shape. head (8), these four chucks are placed vertically and connected with A clamp arm (1), B clamp arm (2), C clamp arm (3), D clamp arm (4) in one piece; The four chucks (5), B chuck (6), C chuck (7), and D chuck (8) are all in the same plane with the contact points of the wafer (9), and the concentric circle formed by the four chucks The diameter is larger than the diameter of the wafer (9). 7. A multi-clamp wafer fixture, characterized in that the clamp is installed at the end of the clamp arm; in the clamp arm, part of the clamp arms are relatively fixed, and the rest of the clamp arms can be moved in a direction to drive the clamp close to and contact the wafer side The clamping operation is performed on the edge; the clamping arms are connected to each other, and the clamping arms are connected to each other at the head end of the clamping arm or the middle section of the clamping arm or away from the end of the clamping arm; an angle is formed between the clamping arms; The motion properties of the clamp arms are as follows: one of the clamp arms has a certain movement elasticity and force displacement function, and the other clamp arms are relatively fixed; or two of the clamp arms have certain movement elasticity and force displacement functions, and the rest The clamp arm is relatively fixed; or all the clamp arms have a certain movement elasticity and force displacement function; The installation methods of the chuck and the end of the clamp arm include integral molding, rolling, screwing, bonding, welding, and clamp installation; The multi-clamp wafer fixture includes two A clamp arms (1) and B clamp arms (2) of the same size and shape, their top ends are connected to each other and form an angle with each other, and each clamp arm end is connected to two A collet, A collet (13) and A2 collet (14) are provided at the end of the A collet arm (1), and B1 collet (15) and B2 collet (16) are provided at the end of the B collet arm (2), These four chucks of A1 chuck (13), A2 chuck (14), B1 chuck (15), and B2 chuck (16) are all placed vertically and are integrally connected with respective jaw arms respectively; The contact points with the wafer (9) are all on the same plane, and the diameter of the concentric circle formed by the four chucks is larger than the diameter of the wafer (9).