CN103090030B - Non-slide type gate valve - Google Patents
Non-slide type gate valve Download PDFInfo
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- CN103090030B CN103090030B CN201210432039.1A CN201210432039A CN103090030B CN 103090030 B CN103090030 B CN 103090030B CN 201210432039 A CN201210432039 A CN 201210432039A CN 103090030 B CN103090030 B CN 103090030B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/316—Guiding of the slide
- F16K3/3165—Guiding of the slide with rollers or balls
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
- Mechanically-Actuated Valves (AREA)
Abstract
A parallel movement mechanism including guide grooves and guide rollers and a vertical movement mechanism including cam grooves and cam rollers are interposed between a drive rod and a valve shaft of an air cylinder, and a valve seal of a valve plate is moved vertically toward and away from a valve seat surface to open and close the opening by moving the valve shaft in parallel to the valve seat surface by the parallel movement mechanism and moving the same vertically with respect to the valve seat surface by the vertical movement mechanism.
Description
Technical field
The present invention relates to a kind of gate valve, it is arranged on the vacuum chamber in semiconductor processing device, in the switching of the opening being communicated with this vacuum chamber, uses, and relates in more detail the fricton-tight formula gate valve that can fricton-tightly open and close described opening.
Background technique
In semiconductor processing device, in the switching of the opening being communicated with vacuum chamber, use gate valve.This gate valve generally has the valve shaft that opens and closes the valve plate of opening, links with this valve plate and the cylinder linking with this valve shaft, by valve shaft described in this cylinder operation, thus, make the valve seal of described valve plate with respect to approaching this opening that opens and closes discretely of described parameatal valve seat surface.
Described gate valve has following mode: by take, any fascinates the mode of opening and closing operations valve plate as fulcrum makes described valve shaft; By making described valve shaft and valve plate vertically move the mode of this valve plate of opening and closing operations with respect to valve seat surface.
Wherein, make valve shaft tilt in the gate valve of mode of opening and closing operations valve plate, after described valve seal contacts with valve seat surface, when in order to obtain the pushing force of regulation, while continuing to make valve shaft to fascinate, valve plate with respect to valve seat surface at the direction top offset along this seat surface, thereby there is following possibility: between described valve seal and valve seat surface, rub, or valve seal rotates in mounting groove, produce abrasion powder, become the infringement cleaning of valve.
In contrast, make valve shaft and valve plate vertically move the gate valve of the mode of this valve plate of opening and closing operations with respect to valve seat surface, owing to not rubbing, thereby do not worry producing abrasion powder between valve seal and valve seat surface.The nonslipping gate valve that friction does not occur between valve seal and valve seat surface is disclosed in following patent documentation 1.This gate valve is a plurality of connecting rods of sandwiched, cam follower and guiding groove between driveshaft (cardan shaft) at cylinder and valve shaft (valve rod), make valve plate mobile abreast with respect to this parameatal valve seat surface from open position to the position relative with opening after, with respect to this valve seat surface, vertically move again, close thus described opening.
Patent documentation 1: Japanese kokai publication hei 11-351419 communique
But, in the disclosed gate valve of described patent documentation 1, combine a plurality of connecting rods, cam follower and guiding groove and be configured for making described valve plate with respect to valve seat surface mobile mechanism vertically, thereby exist part number to become the also difficult point of complexity of many, complex structure, operation.
Summary of the invention
The object of this invention is to provide a kind of fricton-tight formula gate valve, only the simple mechanism that has used cam is folded between the driveshaft and valve shaft of cylinder, just can make described valve shaft and valve plate vertically move and open and close opening with respect to valve seat surface.
For realizing described object, according to the invention provides a kind of gate valve, have: be housed in the valve plate in the clack box with opening; Be arranged on the valve seal on this valve plate; Valve shaft with described valve plate link; Driveshaft is linked to the cylinder of this valve shaft, by described valve shaft being moved by this cylinder, thus, described valve plate from the irrelative fully open position of described opening, via the relative position relative with described opening, move to and valve seal is pressed against on described parameatal valve seat surface and closes the closed position of this opening.
This gate valve has: can link to relative displacement the connect mechanism of described driveshaft and valve shaft; Make described valve plate and valve shaft from described fully open position to relative position and described valve seat surface mobile parallel moving mechanism abreast; Make described valve plate and valve shaft from described relative position to closed position with respect to described valve seat surface mobile vertical movement mechanism vertically, described connect mechanism has: be fixed on the lever arm on described driveshaft; Be fixed on the lever part on described valve shaft; Be folded in the Compress Spring between this lever part and described lever arm, described parallel moving mechanism has: in the mode of facing with left surface and the right flank of described lever part respectively, be fixed on the pairing left and right cam framework on described lever arm; Be formed on abreast the guiding groove on each cam framework with described valve seat surface; Be installed on pairing left and right roller framework and be embedded in the Guide roller of described guiding groove, described pairing left and right roller framework is fixed on the valve gap that described clack box is installed, described vertical movement mechanism has: cam path, with respect to described valve seat surface, tilt towards being formed in each of described pair of cams framework; Cam rollers, is installed in respectively on the left surface of described lever part and right flank and is embedded in described cam path.
In the present invention, preferably, in each of described pair of cams framework, be formed with a described guiding groove and two described cam paths, at left surface and the right flank of described lever part, be separately installed with two described cam rollers.
In this case, preferably, the axis of described guiding groove and described valve shaft forms abreast, and described two cam paths and described two cam rollers of being embedded in this cam path are configured to two-stage along the axial direction of described valve shaft.
In the present invention, also can be of the width direction of described cam framework be half sidely formed with described guiding groove, be formed with described cam path another of the width direction of described cam framework is half side, or, also can on the outer surface of facing with described roller framework of described cam framework, be formed with described guiding groove, on the internal surface of facing with described lever part of described cam framework, be formed with described cam path.
In the present invention, preferably, described guiding groove is the open groove in one end, in each of the roller framework of described left and right, a plurality of described Guide rollers are installed, fully open position at described valve plate, at least one Guide roller is embedded in described guiding groove, and in relative position and the closed position of described valve plate, whole Guide rollers is embedded in described guiding groove.
In an embodiment of the invention, the described cam path that is configured to two-stage is to approach the first cam path of described valve plate and away from the second cam path of described valve plate, described the first cam path and the second cam path equate mutually with respect to the angle of inclination of the axis of described valve shaft.
In other mode of executions of the present invention, the described cam path that is configured to two-stage is to approach the first cam path of described valve plate and away from the second cam path of described valve plate, this second cam path has mutual different the first slot part and the second slot parts in angle of inclination with respect to the axis of described valve shaft, this second slot part is positioned at the position further from valve plate than described the first slot part, and the angle of inclination of this second slot part is larger with respect to the angle of inclination of the axis of valve shaft than described the first cam path.
In addition, in the present invention, described cylinder also can respectively arrange one on left side and the right side of described valve shaft respectively with the state being fixed on described valve gap, from two extended two described driveshafts of cylinder, described lever arm is being installed, and cylinder shell is also used as described roller framework.
Gate valve of the present invention is to make valve plate with respect to valve seat surface, vertically move and make valve seal approach separated mode with respect to this valve seat surface, thereby can not exist between this valve seal and valve seat surface and rub, or the situation that valve seal rotates in mounting groove, the reliably generation of wear prevention powder.
And, by the simple mechanism that has used cam is folded between driveshaft and valve shaft, only by the straight precession of cylinder, make to realize the on-off action of described valve plate, thus the simple structure of operating device, and part number also can realize less, sealing force is also large.
Accompanying drawing explanation
Fig. 1 means the sectional view of the I-I line along Fig. 2 of the first mode of execution of gate valve of the present invention, and left-half represents that valve plate is in opening the state of valve position, and right half part represents the state of valve plate in relative position.
Fig. 2 is the sectional view along the II-II line of Fig. 1.
Fig. 3 is the stereogram that decomposes the key position of ground presentation graphs 1.
Fig. 4 is the longitudinal section of the left-half side of Fig. 1.
Fig. 5 is the longitudinal section of the right half part side of Fig. 1.
Fig. 6 means state same with right half part Fig. 1 the sectional view that valve plate is in the closed position.
Fig. 7 is the longitudinal section of Fig. 6.
Fig. 8 means the side view of key position of the position relationship of stop roller when valve plate is in the closed position and abutting part.
Fig. 9 means the sectional view same with Fig. 1 of the second mode of execution of gate valve of the present invention, and left-half represents that valve plate is in opening the state of valve position, and right half part represents the state of valve plate in relative position.
Figure 10 is the longitudinal section that valve plate moves to the state of closed position in Fig. 9.
Figure 11 means the sectional view of the XI-XI line along Figure 12 of the 3rd mode of execution of gate valve of the present invention, and left-half represents that valve plate is in opening the state of valve position, and right half part represents the state of valve plate in relative position.
Figure 12 is the sectional view along the XII-XII line of Figure 11.
Figure 13 is the longitudinal section of the left-half side of Figure 11.
Figure 14 is the longitudinal section of the right half part side of Figure 11.
Figure 15 means state same with right half part Figure 11 the sectional view that valve plate is in the closed position.
Figure 16 is the longitudinal section of Figure 15.
Figure 17 is the side view of key position that represents simplifiedly the 4th mode of execution of gate valve of the present invention, represents the state of valve plate in relative position.
Figure 18 means that valve plate moves to the side view of the state of closed position from the position of Figure 17.
Figure 19 is for contrasting with Figure 18, is illustrated in the side view of the state of valve plate in relative position in the gate valve of the first ~ three mode of execution.
The explanation of reference character
1A, 1B, 1C, 1D gate valve
2 clack boxes
3 openings
5 valve plates
6 valve seals
7 valve shafts
8 cylinders
9 driveshafts
10 valve seat surfaces
12 lever parts
24 lever arms
25 Compress Springs
28 cam frameworks
29 guiding grooves
30a, 30b cam path
30c the first slot part
30d the second slot part
31a, 31b Guide roller
32 roller frameworks
33a, 33b cam rollers
The axis of L1 valve shaft
θ, θ 1, θ 2 angles of inclination
Embodiment
Fig. 1 ~ Fig. 8 represents the first mode of execution of fricton-tight formula gate valve of the present invention.The vacuum chamber that this gate valve 1A is installed in semiconductor processing device opens and closes the opening being communicated with this vacuum chamber, and has: the clack box 2 with described opening 3; Be housed in the valve plate 5 in this clack box 2; Be installed in the valve seal 6 on this valve plate 5; Valve shaft 7 with described valve plate 5 links; Driveshaft 9 is attached to the cylinder 8 on this valve shaft 7, by this cylinder 8, described valve shaft 7 is moved, thus, make described valve plate 5 in as upper/lower positions: with as described in the irrelative position of opening 3 make this opening 3 become the fully open position (with reference to Fig. 1 left-half and Fig. 4) of standard-sized sheet; But the relative position (with reference to Fig. 1 right half part and Fig. 5) of not closing relative with described opening 3; Valve seal 6 is pressed against to valve seat surface 10 around of described opening 3 and closes the closed position (with reference to Fig. 6 and Fig. 7) of this opening 3.
Described clack box 2 is from Fig. 1 and the known case shape that is square of Fig. 4, on wall 2a, the 2b of relative front and back, be formed with described opening 3 and the opening 4 of the rectangle of growing crosswise, in the inside of this clack box 2, contain the described valve plate 5 of the rectangle of growing crosswise of the opening 3 of the wall 2a that opens and closes the place ahead.
Internal surface at the wall 2a in described the place ahead is formed with the described valve seat surface 10 consisting of the rectangle around described opening 3 or oval-shaped tabular surface, at described valve plate 5 rectangle or the oval-shaped described valve seal 6 of closing described opening 3 with described valve seat surface 10 butts is installed above.
The upper end that links cylindrical described valve shaft 7 at the central part of described valve plate 5, the central 11a of cylinder portion of the valve gap 11 of the bottom that is fixed on airtightly described clack box 2 is run through in the underpart of this valve shaft 7, and from described clack box 2 to downward-extension, in this underpart, be fixed with the lever part 12 of the sectional shape with rectangle.The underpart of this lever part 12 is outstanding a little downwards from the underpart of described valve shaft 7.The axis L1 of described valve shaft 7 is parallel with described valve seat surface 10.
The assembly 15 of the ring-type of installing in the mode of stretching out to the inner circumferential side of the 11a of this in the end of the 11a of cylinder portion of described valve gap 11 and in the periphery of described valve shaft 7 at the assembly 16 of the ring-type of installing with the approaching position of described valve plate 5, link airtightly respectively one end and the other end of the bellows 17 flexible by moving up and down of described valve shaft 7, by this bellows 17, the inside of clack box 2 and outside are fully cut off.
The lower surface of described valve gap 11 across the relative position of described valve shaft 7, so that the axis L2 of driveshaft 9 posture parallel with the axis L1 of described valve shaft 7 is provided with two described cylinders 8.Described cylinder 8 has: the cylinder shell that is shaped as rectangle 21 of outer circumferential face; Along described axis L2 direction, be free to slide the piston 22 of the inside that is housed in this cylinder shell 21; The described driveshaft 9 that upper end and this piston 22 links, the upper end of described cylinder shell 21 is fixed on described valve gap 11, and described driveshaft 9 is from being arranged on end plate 23 lower end of this cylinder shell 21 to downward-extension.
In the lower end of two driveshafts 9,9 that extend from described two cylinders 8, be fixed with one end and the other end of the lever arm 24 that is tabular.This lever arm 24 flatly extends to than position more on the lower, the lower end of described valve shaft 7 and lever part 12, is folded with Compress Spring 25 being formed on the spring seat 24a of the concavity on the central upper surface of this lever arm 24 and being formed between the spring seat 12a of concavity of lower surface central authorities of described lever part 12.
Also with reference to Fig. 3, pairing left and right cam framework 28,28 is fixed on the upper surface of described lever arm 24 abreast at the axis L1 of the configuration of facing with left surface and the right flank of described lever part 12 respectively and described valve shaft 7, on each cam framework 28, to run through the state of this cam framework 28, be formed with a guiding groove 29 and two cam path 30a, 30b.
Described guiding groove 29 is half side of the width direction of described cam framework 28, forms abreast with the axis L1 of described valve shaft 7, and the upper end of this guiding groove 29 is opened to outside.The groove width of this guiding groove 29 is constant in length range.This guiding groove 29 also can, in the outer surface side towards described cylinder 8 one sides of described cam framework 28, form not run through the state of this cam framework 28.
On the other hand, described cam path 30a, 30b are the linearly grooves with respect to the constant groove width of the axis L1 inclination of described valve shaft 7, and edge more tends to the direction inclination that below approaches described valve seat surface 10.And two cam path 30a, 30b are in another half side, to be parallel to each other mutually to tilt with equal angular along equidirectional posture of the width direction of described cam framework 28, along the axis L1 direction two-stage of described valve shaft 7 configure.
The inner side surface towards described valve shaft 7 sides of the cylinder shell 21 in described two cylinders 8,8, is separately installed with Guide roller 31a, the 31b of two formed objects chimeric with described guiding groove 29.These two Guide roller 31a, 31b is configured in the position of upper and lower separation, and at described valve plate 5 and valve shaft 7 during in described fully open position, only the first Guide roller 31a of below and the guiding groove 29 of described cam framework 28 are chimeric, described valve plate 5 and valve shaft 7 are when described relative position moves, near this relative position, described the second Guide roller 31b is also embedded in described guiding groove 29, by this Guide roller 31a, 31b, keeping abreast under the state of axis L1 of described valve shaft 7 with described valve seat surface 10, this valve shaft 7 and valve plate 5 from described fully open position to described relative position and described valve seat surface 10 move abreast.
Therefore, described cam framework 28, guiding groove 29 and Guide roller 31a, 31b formed for make described valve shaft 7 and valve plate 5 from described fully open position towards relative position and described valve seat surface 10 mobile parallel moving mechanism abreast.
In addition, a part for described cylinder shell 21 is also used as for the roller framework of described Guide roller 31a, 31b is installed.Therefore, in the following description, also the part that described Guide roller 31a, the 31b of cylinder shell 21 are installed is called to " roller framework 32 ".But, this roller framework 32 also can with described cylinder shell 21 splits form.
In addition, left surface and the right flank at described lever part 12 is separately installed with two cam rollers 33a, the 33bs chimeric with two cam path 30a, 30b of described cam framework 28.These two cam rollers 33a, 33b are configured in the position of upper and lower separation, and individually chimeric with described two cam path 30a, 30b, at described fully open position and relative position, by the spring force of described Compress Spring 25, be pressed against the upper end of each cam path 30a, 30b.
And, by shut-down mechanism described later, make described valve shaft 7 stop under the state of described relative position, when described cam framework 28 rises, by the rising of described cam path 30a, 30b, described cam rollers 33a, 33b are pushed to this cam path 30a, the 30b of inclination and vertically move with respect to this valve seat surface 10 to the direction that approaches described valve seat surface 10, thereupon, described valve shaft 7 and valve plate 5 also move to equidirectional, the valve seal 6 of described valve plate 5 is pressed against described valve seat surface 10, and this valve plate 5 is in described closed position.
Therefore, described cam path 30a, 30b and described cam rollers 33a, 33b have formed for making described valve shaft 7 and valve plate 5 with respect to described valve seat surface 10 mobile vertical movement mechanism vertically.
Described shut-down mechanism consists of the abutting part 37 that is installed in the stop roller 36 on described lever part 12 and be formed on described roller framework 32.
Be installed in the outside of the first cam rollers 33a of top, and it is less than this first cam rollers 33a to form diameter described stop roller 36 coaxial shapes.But this stop roller 36 also can be identical with the diameter of described the first cam rollers 33a.
As can be seen from Figure 8, the upper end portion of the groove 38 of described abutting part 37 on the inner side surface that is formed at described roller framework 32 forms, and described stop roller 36 is entrenched in this groove 38.Described groove 38 extends abreast with the axis L1 of described valve shaft 7, when described valve shaft 7 moves from described fully open position to described relative position, and described stop roller 36 and described abutting part 37 butts, described valve shaft 7 stops at this position.
At described abutting part 37, be formed with the tabular surface 37a vertical with respect to described valve seat surface 10, after described stop roller 36 and these abutting part 37 butts, when described valve shaft 7 moves from described relative position to closed position, this stop roller 36 can move along described tabular surface 37a to the direction identical with described valve shaft 7 with respect to described abutting part 37.Thus, in the upper end portion of described groove 38, be formed with for accepting the 38a of translot portion of mobile next described stop roller 36.
Here, be folded in the spring force that described Compress Spring 25 between described lever arm 24 and lever part 12 has the weight that can support described valve plate 5, valve shaft 7 and lever part 12, by this spring force, lordosis supporting-point roller 33a, 33b are pressed against to the upper end of cam path 30a, 30b, thus, when described valve plate 5 moves from described fully open position to relative position, make described valve shaft 7 and lever arm 24 becoming one, compressed and allow relatively moving of described valve shaft 7 and lever arm 24 when described valve plate 5 moves from described relative position to described closed position.Therefore, this Compress Spring 25 has formed the connect mechanism that links described valve shaft 7 and driveshaft 9 for the mode with can relative displacement together with described lever part 12 and described lever arm 24.
Below, for the action with the gate valve 1A of described structure, describe.To be described valve plate 5 from opening 3 separated and in keeping out of the way the state of fully open position of the underpart of clack box 2 for Fig. 1 left-half and Fig. 4.Now, the driveshaft 9 of cylinder 8 fully stretches downwards, valve shaft 7 and valve plate 5 position in declining to greatest extent, spring force by described Compress Spring 25 is pressed against each cam rollers 33a, 33b the upper end of each cam path 30a, 30b, thus, described driveshaft 9 and valve shaft 7 state in becoming one by described lever arm 24, cam framework 28 and lever part 12, in addition, the first Guide roller 31a of the below in two Guide roller 31a, 31b is entrenched in guiding groove 29, and described stop roller 36 is separated and be positioned at the bottom of groove 38 from abutting part 37.
In addition, in the following description, mutual described driveshaft 9, lever arm 24 and cam framework 28 in fixed relationship is called to " bar side assembly ", similarly the described lever part 12 in fixed relationship, valve shaft 7 and valve plate 5 is called by " axle side assembly ".
State from described fully open position, the upper port 8a of cylinder 8 is opened to outside, and while making described driveshaft 9 to lower port 8b supply pressure air, described bar side assembly and axle side assembly are in and are integrated and rise, as shown in Fig. 1 right half part and Fig. 5, described valve plate 5 is relative with opening 3, and valve seal 6 reaches from the described relative position of valve seat surface 10 separation.
Now, at the rising initial stage of described bar side assembly and axle side assembly, as shown in Figure 4, by the first Guide roller 31a drive cam framework 28 with the chimeric below of guiding groove 29, thus, keeping abreast, under the state of axis L1 of described valve shaft 7, carrying out described bar side assembly and axle side assembly with respect to the parallel of described valve seat surface 10 with described valve seat surface 10.And when described bar side assembly and axle side assembly approach described relative position, as shown in Figure 5, described the second Guide roller 31b is also embedded in described guiding groove 29, guides the parallel of described bar side assembly and axle side assembly by these two Guide roller 31a, 31b.
When described bar side assembly and axle side assembly arrive described relative position, also as shown in the dot and dash line of Fig. 8, abutting part 37 butts of described stop roller 36 and the upper end of described groove 38, thus, described axle side assembly stops at this position.But, because described bar side assembly after this compresses further continuation to Compress Spring 25, rise, thereby the cam path 30a, the 30b that are formed on described cam framework 28 rise with respect to described cam rollers 33a, 33b.Thus, this cam rollers 33a, 33b are urged at the cell wall of the described cam path 30a, the 30b that tilt and vertically move with respect to this valve seat surface 10 to the direction that approaches described valve seat surface 10, described axle side assembly also moves to equidirectional together with this cam rollers 33a, 33b, thereby as shown in FIG. 6 and 7, the valve seal 6 of described valve plate 5 is pressed against described valve seat surface 10 and closes described opening 3, and this valve plate 5 is in the closed position.
Now, the movement of described bar side assembly from described relative position to closed position is by two Guide roller 31a, 31b drive cam framework 28 and carry out abreast with described valve seat surface 10, counter-force when in addition, described valve seal 6 is pressed against valve seat surface 10 is born by described two Guide roller 31a, 31b by described cam framework 28.
In addition, described stop roller 36 as shown in the solid line of Fig. 8 along as described in abutting part 37 tabular surface 37a to as described in the identical direction of the first cam rollers 33a move, and be housed in the described translot 38a of portion.
In addition, at described valve plate 5 during in described closed position, described cam rollers 33a, 33b are not limited to move to the position with the lower end butt of described cam path 30a, 30b, sometimes also correspondingly stop at than the position of the more close front side, lower end of this cam path 30a, 30b with the pushing force of valve seal 6.
When open described gate valve 1A, the lower port 8b of described cylinder 8 open to outside, and to upper port 8a supply pressure air, thus, carry out action contrary when closing described gate valve 1A.
Now, at first, keeping the spring force by described Compress Spring 25 to make under the state of described stop roller 36 and abutting part 37 butts, when declining with described bar side assembly, described Compress Spring 25 stretches gradually, thereby described cam framework 28 and cam path 30a, 30b decline, described cam rollers 33a, 33b vertically move to separated direction from valve seat surface 10, thus, described valve seal 6 is also vertically separated with respect to this valve seat surface 10, and described bar side assembly moves to the relative position shown in Fig. 1 right half part and Fig. 5.
Then, described driveshaft 9 further declines, and thus, described bar side assembly and axle side assembly become one and move to the fully open position of Fig. 1 left-half and Fig. 4.
And, the valve plate 5 of described gate valve 1A vertically moves with respect to valve seat surface 10 and makes valve seal 6 vertically approach separated with respect to this valve seat surface 10, thereby can not exist between this valve seal 6 and valve seat surface 10, do not rub, or the situation that valve seal 6 rotates in mounting groove, the reliably generation of wear prevention powder.
And, the simple direction switching mechanism of having used cam path 30a, 30b and cam rollers 33a, 33b is folded between driveshaft 9 and valve shaft 7, thus, straight precession by cylinder 8 realizes described valve plate 5 with respect to the on-off action of the Vertical direction of described valve seat surface 10, thereby also can realize for simple structure and the part number of opening and closing operations less.
Fig. 9 and Figure 10 represent the second mode of execution of gate valve of the present invention, the difference of the gate valve 1B of this second mode of execution and the gate valve 1A of described the first mode of execution is, the stop roller 36 and the described stop roller in abutting part 37 36 that form shut-down mechanism are mounted coaxially with the second cam rollers 33b that is arranged on the below in two cam rollers 33a, the 33b up and down on lever part 12, described abutting part 37 is formed by the recessed stepped part 40 of the lower end of roller framework 32, and the configuration of bellows 17 is different.
That is, described recessed stepped part 40 is that a part for the inner side surface underpart of described roller framework 32 is cut away with concavity, and this part is made to described abutting part 37 and tabular surface 37a.
In addition, the upper end of described bellows 17 is linked to the assembly 41 of the ring-type on the inner peripheral surface that is fixed on valve gap 11 airtightly, and the lower end of this bellows 17 is attached at the upper end with the lever part 12 of valve shaft 7 one airtightly.
Above-mentioned structure and the action in addition of this second mode of execution is identical with described the first mode of execution essence, thereby for the main identical component part mark reference character identical with the first mode of execution, and the description thereof will be omitted.
Figure 11 ~ Figure 16 represents the 3rd mode of execution of gate valve of the present invention, and the gate valve 1C part different from the gate valve 1A of described the first mode of execution of this 3rd mode of execution is cam path 30a, 30b and cam rollers 33a, 33b and the formation stop roller 36 of shut-down mechanism and the structure of abutting part 37 that forms the guiding groove 29 of parallel moving mechanism and Guide roller 31a, 31b, formation vertical movement mechanism.Therefore, in the following description, about the structure relevant to these horizontal mobile mechanisms, vertical movement mechanism and shut-down mechanism, describe.
As shown in FIG. 11 and 12, be fixed on pair of cams framework on lever arm 24 28 on each, at its outer side surface and inner side surface, in mutual back-to-back position, be formed with described guiding groove 29 and cam path 30a, 30b.; the outer side surface of facing with roller framework 32 at described cam framework 28; guiding groove 29 forms on above-below direction along the axis L1 of valve shaft 7, at the inner side surface of facing with lever part 12 of described cam framework 28, two cam path 30a, 30b of inclination with upper and lower two-stage form.Described in the depth ratio of described cam path 30a, 30b and guiding groove 29, half of the thickness of cam framework 28 is shallow.The position of described guiding groove 29 and cam path 30a, 30b also can be along the width direction mutual dislocation of cam framework 28.
And, on the inner side surface of described roller framework 32, two Guide roller 31a, the 31bs chimeric with described guiding groove 29 are installed, on the outer side surface of described lever part 12, individually chimeric with described two cam path 30a, 30b two cam rollers 33a, 33b are installed.
Be fixed on to the position by width direction one end of the described lever arm 24 of described cam framework 28 deflection this position, with this cam framework 28 accordingly, described Guide roller 31a, 31b and cam rollers 33a, 33b be also partial to described roller framework 32 and lever part 12 by the position of width direction one end be installed in this position.
In addition, inner side surface at described roller framework 32, in the position of not conflicting with described cam framework 28, stop roller 36 is installed, left and right sides at described lever part 12, in the position corresponding with described stop roller 36, be formed with the extension 12b that upper surface is the tabular surface 37a of level, by this extension 12b, form the abutting part 37 for described stop roller 36 butts.
Structure beyond above-mentioned is identical with described the first mode of execution in fact, thereby for the main identical component part mark reference character identical with the first mode of execution, and the description thereof will be omitted.
The valve events that closes for the gate valve 1C of described the 3rd mode of execution, with the gate valve 1A of described the first mode of execution similarly, state from the fully open position shown in Figure 11 left-half and Figure 13, state via the relative position shown in Figure 11 right half part and Figure 14, reach the state of the closed position shown in Figure 15 and Figure 16, carry out thus described the 3rd mode of execution gate valve 1C close valve events, open valve events and undertaken by the path contrary with it.
Now, parallel by described guiding groove 29 and Guide roller 31a, 31b guide rod side assembly and axle side assembly with respect to valve seat surface 10, the vertical movement by described cam path 30a, 30b and cam rollers 33a, 33b leading axle side assembly with respect to valve seat surface 10.This point is also identical with the gate valve 1A of described the first mode of execution.
On the other hand, about forming stop roller 36 and the abutting part 37 of shut-down mechanism, when the lever part 12 on being fixed on described valve shaft 7 rises to relative position from described fully open position, be formed on the upper surface of the described abutting part 37 on this lever part 12 and be arranged on described stop roller 36 butts on installation frame 32, this lever part 12 stops at this position.And when the effect via described vertical movement mechanism, valve shaft 7 is when closed position moves, with respect to described stop roller 36, the direction to described closed position relatively moves described lever part 12.
Figure 17 and Figure 18 are the side views of key position that represents simplifiedly the gate valve 1D of the 4th mode of execution.The difference of this gate valve 1D of the 4th mode of execution and the gate valve 1A ~ 1C of described the first ~ three mode of execution is the shape of cam path 30a, 30b, especially the shape of the second cam path 30b, by making the shape of this second cam path 30b different from the shape of the second cam path 30b of the gate valve 1A ~ 1C of described the first ~ three mode of execution, and reduce opening and closing operations valve plate 5 cylinder (not shown) need thrust.Below, the gate valve 1D structure different from the gate valve 1A ~ 1C of described the first ~ three mode of execution for this 4th mode of execution describes.
As shown in figure 17, on cam framework 28, two described cam path 30a, 30b are configured to two-stage along the axis L1 direction of valve shaft 7, and two cam rollers 33a, 33b being arranged on lever part 12 are individually embedded in this cam path 30a, 30b.
The the first cam path 30a that approaches valve plate 5 in described two cam path 30a, 30b is the groove with the straight line shape of constant groove width, and this first cam path 30a is θ with respect to the angle of inclination of described axis L1.In addition, in the illustrated embodiment, the side 28a of described cam framework 28 is parallel with the axis L1 of valve shaft 7, thereby with respect to the angle of inclination of this side 28a, the tilt angle theta as the first cam path 30a represents using cell wall.The second cam path 30b for following explanation is also identical.
On the other hand, described the second cam path 30b away from described valve plate 5 has groove width mutual different the first slot part 30c and the second slot part 30d in identical and angle of inclination mutually, less than the tilt angle theta of described the first cam path 30a in approaching the tilt angle theta 1 of described the first slot part 30c of a side of valve plate 5, the tilt angle theta 2 of described the second slot part 30d in the side away from valve plate 5 is larger than the tilt angle theta of described the first cam path 30a.But the tilt angle theta 1 of described the first slot part 30c also can equate with the tilt angle theta of the first cam path 30a.
The above-mentioned structure in addition of the gate valve 1D of this 4th mode of execution is identical in fact with the arbitrary structures in the gate valve 1A ~ 1C of described the first ~ three mode of execution.Therefore, for the Figure 17 in the structure beyond above-mentioned and the part shown in Figure 18, mark the reference character identical with the gate valve 1A ~ 1C of the first ~ three mode of execution, for the effect of this gate valve 1D, as described below.
Figure 17 represents that valve plate 5 position relative in the opening 3 with clack box 2 but that do not close this opening 3 is the state of relative position.Now, the valve plate 5 of one relation, valve shaft 7 and lever part 12 are in being limited the state of further rising, the first cam rollers 33a in described two cam rollers 33a, 33b is positioned at the upper end portion of described the first cam path 30a, the second cam rollers 33b is arranged in the upper end portion of described the first slot part 30c of the second cam path 30b, and two Guide roller 31a, 31b being arranged on roller framework (not shown) are entrenched in the guiding groove 29 that is formed at described cam framework 28.
From the state of Figure 17, when the described cam framework 28 by air cylinder driven is embedded in described Guide roller 31a, the 31b guiding of guiding groove 29 and rises to axis L1 direction, as shown in figure 18, described cam rollers 33a, 33b are urged at the cam path 30a, the 30b that tilt and to the left in figure to movement, thereby described lever part 12, valve shaft 7 and valve plate 5 become one and vertically move with respect to this valve seat surface 10 to the direction of valve seat surface 10, valve seal 6 is crimped on described valve seat surface 10 and closes described opening 3, and described valve plate 5 is in the closed position.Now, the second cam rollers 33b is arranged in described the second slot part 30d of the second cam path 30b.
Below, while closing opening 3 about described valve plate 5, act on the thrust of the cylinder of described cam framework 28, the situation of the gate valve 1D of the situation of the gate valve 1A ~ 1C of the first ~ three mode of execution and the 4th mode of execution is compared to the following explanation in ground.
Figure 19 is in the gate valve 1A ~ 1C of described the first ~ three mode of execution, the side view of the key position in the situation of closed position of valve plate 5 in closing opening 3.Now, opening 3 sides are barometric pressure P1, and the back side of valve plate 5 is Vacuum Pressure P2.
In the figure, when establishing the crimp force of valve seal 6 for valve seat surface 10, be W, the masterpiece from the central authorities of valve seat surface 10 to the first cam path 30a for the distance the point of action T1 of the first cam rollers 33a be D1, masterpiece from this point of action T1 to the second cam path 30b is while being D2 for the distance the point of action T2 of the second cam rollers 33b, the load W2 that is applied to described point of action T2 becomes W2=W * D1/D2, is applied to the load W1 of described point of action T1 and described W2 oppositely and becomes W1=W+W2.
In addition, by the described cam framework 28 of the thrust Fc of cylinder pushing, at the described point of action T1 of the first cam path 30a, born described load W1, thus the little gap producing between the cell wall of the opposition side of described point of action T1 and the first cam rollers 33a.Thus, the power F1 of the direction parallel with valve seat surface 10 that described the first cam path 30a implements becomes F1=-W1 * tan θ, and this becomes the counter-force with respect to described thrust Fc.
On the other hand, the described point of action T2 of the second cam path 30b is in the contrary cell wall side of the point of action T1 with described the first cam path 30a, the power F2 with valve seat surface 10 parallel directions that this second cam path 30b implements becomes F2=+W2 * tan θ, and it acts on the direction identical with described thrust Fc.Therefore, the thrust Fc that needs of cylinder becomes Fc=F1-F2.
On the other hand, in the situation that the gate valve 1D of the 4th mode of execution, as shown in figure 18, the second cam rollers 33b is positioned at the second slot part 30d of the second cam path 30b, the power F2 ' of the direction parallel with valve seat surface 10 that thus, this second cam path 30b implements becomes F2 '=+ W2 * tan θ 2.Here, due to θ 2 > θ, so even if the relation of described W, W1, W2, D1, D2 is identical with the situation of Figure 19, described power F2 ' is also large than the F2 in Figure 19, therefore, the value that needs thrust Fc '=F1-F2 ' of cylinder becomes less than the value of the Fc in Figure 19.
Consequently, as described cylinder, can use thrust than the small cylinder of the situation of the first ~ three mode of execution.
In addition, at described valve plate 5, to described closed position, move, the back side of valve plate 5 is Vacuum Pressure P2, opening 3 sides are in the situation of barometric pressure P1, the increase of crimp force W by valve seal 6, be applied to described point of action T1, the load W1 of T2, W2 increases, cam framework 28 declines a little, the decrement of valve seal 6 reduces, but because the power F1 of acting in opposition and the difference F1-F2 ' of F2 ' are little mutually, so the slippage of described cam framework 28 is varied down to the degree that can ignore, it is extremely little that the minimizing of the decrement of valve seal 6 also becomes, thereby can further suppress to leak.
In addition, in described each mode of execution, for the opening and closing operations of valve plate 5, be provided with two cylinders 8, but a cylinder also can be set, described lever arm 24 is attached on the driveshaft of this cylinder.
In addition, formation that also can be following in described each mode of execution: in each of the roller framework 32 of left and right, two Guide roller 31a, 31b are installed, but this Guide roller also can be installed more than three on each roller framework 32, fully open position at valve plate 5, at least one Guide roller except a part of Guide roller is embedded in the guiding groove 29 of cam framework 28, relative position and closed position at described valve plate 5, remaining Guide roller is embedded in described guiding groove 29, thus, whole Guide rollers is embedded in this guiding groove 29.
In addition, the configuration of the bellows in the gate valve of described the first mode of execution 17 can also be applicable to the gate valve of described the second mode of execution, on the contrary, the configuration of the bellows in the gate valve of described the second mode of execution 17 can also be applicable to the gate valve of the first mode of execution and the 3rd mode of execution.
And, in the situation that not using gate valve with vacuum state, can also omit described bellows.
Claims (9)
1. a fricton-tight formula gate valve, has: be housed in the valve plate in the clack box with opening; Be arranged on the valve seal on this valve plate; Valve shaft with described valve plate link; Driveshaft is attached to the cylinder on this valve shaft,
By this cylinder, described valve shaft is moved, thus, described valve plate is from becoming irrelative fully open position with described opening, via the relative position relative with described opening, move to and valve seal is pressed against on described parameatal valve seat surface and closes the closed position of this opening, it is characterized in that
Described gate valve has: can link to relative displacement the connect mechanism of described driveshaft and valve shaft; Make described valve plate and valve shaft from described fully open position to described relative position and described valve seat surface mobile parallel moving mechanism abreast; Make described valve plate and valve shaft from described relative position to described closed position with respect to described valve seat surface mobile vertical movement mechanism vertically,
Described connect mechanism has: be fixed on the lever arm on described driveshaft; Be fixed on the lever part on described valve shaft; Be folded in the Compress Spring between this lever part and described lever arm,
Described parallel moving mechanism has: in the mode of facing with left surface and the right flank of described lever part respectively, be fixed on the pairing left and right cam framework on described lever arm; Be formed on abreast the guiding groove on each cam framework with described valve seat surface; Be installed on pairing left and right roller framework and be embedded in the Guide roller of described guiding groove, described pairing left and right roller framework is fixed on the valve gap that described clack box is installed,
Described vertical movement mechanism has: cam path, with respect to described valve seat surface, tilt towards being formed in each of described pair of cams framework; Cam rollers, is installed in respectively on the left surface of described lever part and right flank and is embedded in described cam path.
2. gate valve as claimed in claim 1, is characterized in that, in each of described pair of cams framework, is formed with a described guiding groove and two described cam paths, at left surface and the right flank of described lever part, is separately installed with two described cam rollers.
3. gate valve as claimed in claim 2, is characterized in that, the axis of described guiding groove and described valve shaft forms abreast, and described two cam paths and described two cam rollers of being embedded in this cam path are configured to two-stage along the axial direction of described valve shaft.
4. gate valve as claimed in claim 2 or claim 3, is characterized in that, is formed with described guiding groove of the width direction of described cam framework is half side, is formed with described cam path another of the width direction of described cam framework is half side.
5. gate valve as claimed in claim 2 or claim 3, is characterized in that, on the outer surface of facing with described roller framework of described cam framework, is formed with described guiding groove, on the internal surface of facing with described lever part of described cam framework, is formed with described cam path.
6. the gate valve as described in any one in claim 1～3, it is characterized in that, described guiding groove is the open groove in one end, in each of the roller framework of described left and right, a plurality of described Guide rollers are installed, fully open position at described valve plate, at least one Guide roller is embedded in described guiding groove, and in described relative position and the described closed position of described valve plate, whole Guide rollers is embedded in described guiding groove.
7. gate valve as claimed in claim 3, it is characterized in that, the described cam path that is configured to two-stage is to approach the first cam path of described valve plate and away from the second cam path of described valve plate, described the first cam path and the second cam path equate mutually with respect to the angle of inclination of the axis of described valve shaft.
8. gate valve as claimed in claim 3, it is characterized in that, the described cam path that is configured to two-stage is to approach the first cam path of described valve plate and away from the second cam path of described valve plate, this second cam path has mutual different the first slot part and the second slot parts in angle of inclination with respect to the axis of described valve shaft, this second slot part is positioned at the position further from valve plate than described the first slot part, and the angle of inclination of this second slot part is larger with respect to the angle of inclination of the axis of valve shaft than described the first cam path.
9. the gate valve as described in any one in claim 1～3, it is characterized in that, described cylinder respectively arranges one on left side and the right side of described valve shaft respectively with the state being fixed on described valve gap, from two extended two described driveshafts of cylinder, described lever arm is being installed, cylinder shell is also used as described roller framework.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011242795A JP5533839B2 (en) | 2011-11-04 | 2011-11-04 | Non-sliding gate valve |
| JP2011-242795 | 2011-11-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103090030A CN103090030A (en) | 2013-05-08 |
| CN103090030B true CN103090030B (en) | 2014-11-12 |
Family
ID=48129018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210432039.1A Active CN103090030B (en) | 2011-11-04 | 2012-11-02 | Non-slide type gate valve |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8800956B2 (en) |
| JP (1) | JP5533839B2 (en) |
| KR (1) | KR101363959B1 (en) |
| CN (1) | CN103090030B (en) |
| CH (1) | CH705752B1 (en) |
| DE (1) | DE102012021354B4 (en) |
| TW (1) | TWI512222B (en) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5963091B2 (en) | 2013-07-10 | 2016-08-03 | Smc株式会社 | Non-sliding gate valve |
| CN104421437B (en) * | 2013-08-20 | 2017-10-17 | 中微半导体设备(上海)有限公司 | Movable valve, portable shielding door and vacuum flush system |
| JP6160924B2 (en) * | 2014-05-08 | 2017-07-12 | Smc株式会社 | Gate valve |
| KR101725249B1 (en) * | 2014-11-25 | 2017-04-27 | 프리시스 주식회사 | Vacuum valves |
| WO2016096471A1 (en) * | 2014-12-19 | 2016-06-23 | Vat Holding Ag | Door for closing a chamber opening in a chamber wall of a vacuum chamber |
| US10302225B2 (en) | 2015-03-09 | 2019-05-28 | Vat Holding Ag | Vacuum valve |
| US10184570B2 (en) * | 2015-03-27 | 2019-01-22 | Vat Holding Ag | Vacuum valve |
| KR101725251B1 (en) * | 2015-05-04 | 2017-04-11 | 프리시스 주식회사 | Vacuum Valves |
| KR101784839B1 (en) * | 2015-09-25 | 2017-11-06 | 프리시스 주식회사 | Two-way gate valve |
| TWI705212B (en) | 2016-01-19 | 2020-09-21 | 瑞士商Ｖａｔ控股股份有限公司 | Closure device for the vacuum-tight closure of an opening in a wall |
| TWI740981B (en) | 2016-08-22 | 2021-10-01 | 瑞士商Ｖａｔ控股股份有限公司 | Vacuum valve |
| WO2018077553A1 (en) * | 2016-10-24 | 2018-05-03 | Vat Holding Ag | Closure device |
| JP6774302B2 (en) * | 2016-10-28 | 2020-10-21 | 株式会社キッツエスシーティー | Vacuum gate valve |
| KR20190003064A (en) * | 2017-06-30 | 2019-01-09 | 프리시스 주식회사 | Shutter valve |
| JP6388182B1 (en) * | 2017-07-25 | 2018-09-12 | Smc株式会社 | Gate valve mounting structure |
| JP7057584B2 (en) * | 2018-01-10 | 2022-04-20 | Smc株式会社 | Valve plate mounting structure for valve rod |
| CN111433500B (en) * | 2018-05-17 | 2022-06-28 | 川崎重工业株式会社 | Slide valve |
| JP7385400B2 (en) | 2018-09-26 | 2023-11-22 | 株式会社キッツエスシーティー | Vacuum gate valve |
| DE102019129344A1 (en) | 2019-10-30 | 2021-05-06 | Vat Holding Ag | Vacuum valve |
| JP7479587B2 (en) * | 2020-02-28 | 2024-05-09 | Smc株式会社 | Gate valve |
| JP7537329B2 (en) | 2021-03-19 | 2024-08-21 | Smc株式会社 | Gate valve with anti-vibration mechanism |
| JP2023065871A (en) * | 2021-10-28 | 2023-05-15 | Smc株式会社 | gate valve |
| CN115435101B (en) * | 2022-11-03 | 2023-02-28 | 中国空气动力研究与发展中心设备设计与测试技术研究所 | Large electrically-driven rectangular vacuum gate valve and motion control method |
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| JP2996915B2 (en) * | 1996-06-03 | 2000-01-11 | 入江工研株式会社 | No sliding vacuum gate valve |
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| JP5365867B2 (en) * | 2009-10-15 | 2013-12-11 | Ｓｍｃ株式会社 | Gate valve |
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- 2012-10-19 TW TW101138654A patent/TWI512222B/en active
- 2012-11-02 CN CN201210432039.1A patent/CN103090030B/en active Active
- 2012-11-02 DE DE102012021354.9A patent/DE102012021354B4/en active Active
- 2012-11-02 KR KR1020120123643A patent/KR101363959B1/en active Active
- 2012-11-02 US US13/667,453 patent/US8800956B2/en active Active
- 2012-11-04 CH CH02255/12A patent/CH705752B1/en unknown
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| US5626324A (en) * | 1994-07-28 | 1997-05-06 | Irie Koken Co., Ltd. | Non-sliding vacuum gate valve |
| CN1118650C (en) * | 1999-06-14 | 2003-08-20 | Smc株式会社 | Sluice valve |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR101363959B1 (en) | 2014-02-18 |
| TWI512222B (en) | 2015-12-11 |
| CH705752B1 (en) | 2016-12-30 |
| CH705752A2 (en) | 2013-05-15 |
| KR20130049745A (en) | 2013-05-14 |
| JP5533839B2 (en) | 2014-06-25 |
| TW201339457A (en) | 2013-10-01 |
| US20130112906A1 (en) | 2013-05-09 |
| DE102012021354A1 (en) | 2013-05-08 |
| US8800956B2 (en) | 2014-08-12 |
| JP2013096557A (en) | 2013-05-20 |
| DE102012021354B4 (en) | 2024-02-22 |
| CN103090030A (en) | 2013-05-08 |
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