CN103084724A - Contravariant accelerating power supply device of electron beam depositing equipment and control method thereof - Google Patents
Contravariant accelerating power supply device of electron beam depositing equipment and control method thereof Download PDFInfo
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- CN103084724A CN103084724A CN2013100469096A CN201310046909A CN103084724A CN 103084724 A CN103084724 A CN 103084724A CN 2013100469096 A CN2013100469096 A CN 2013100469096A CN 201310046909 A CN201310046909 A CN 201310046909A CN 103084724 A CN103084724 A CN 103084724A
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Abstract
The invention discloses a contravariant accelerating power supply device of electron beam depositing equipment and a control method of the contravariant accelerating power supply device of the electron beam depositing equipment. The contravariant accelerating power supply device of the electron beam depositing equipment uses a three phase intermediate frequency inverter bridge, an intermediate frequency boosting transformer and a three phase high voltage rectifier bridge as elementary units, a rectifying device of the accelerating power supply of the electron beam depositing equipment is formed by the outputs of the high voltage rectifier bridges of a plurality of elementary units through series connection and/or parallel connection, the phase sequences of the inverter bridges of the plurality of elementary units are arranged in symmetrical, and the ripple frequency of the output voltage of the rectifying device of the accelerating power supply is 6n times of a contravariant frequency, wherein the n is the number of the elementary units. A voltage regulating control mode adopts an intermediate frequency contravariant process and simultaneously achieves a pulse width modulation (PWM), and switching loss can be reduced by reducing the working frequency of a contravariant power tube. The contravariant accelerating power supply device of the electron beam depositing equipment and the control method of the contravariant accelerating power supply device of the electron beam depositing equipment adopt the intermediate frequency contravariant and the PWM modes, and have the advantages that the switching loss of a contravariant switch tube is small, and the ripple frequency of high-voltage rectification wave is much higher than the contravariant frequency.
Description
Technical field
The present invention relates to the deposited apparatus field of electron beam, be specifically related to the deposited equipment inversion of a kind of electron beam accelerating power source device and control method thereof.
Background technology
Accelerating power source is one of critical component of electron beam process equipment, and the static state of the technical indicator of accelerating power source requires the output voltage precision high, and ripple is little, and the dynamic requirements governing speed is fast.According to technical requirement, under the different times technical conditions, adopt different technical tactics, as power frequency auto-transformer machinery Regulation Control mode, power frequency IGCT phase-shift control mode, medium frequency electric generating unit Regulation Control mode, different technical tactics, the technical merit that reaches is also different.
Along with the development of semiconductor devices, accelerating power source adopts inversion pulsewidth modulation (PWM) Regulation Control mode more at present.In order to reduce the ripple quantity of output voltage, adopt the high-frequency inversion mode, as " based on the development of the electron beam welding high voltage inverting power source control system of DSP " that in October, 2012, " electric welding machine " magazine the 42nd volume the 10th periodical was stepped on, that adopt is exactly 20kH
zInversion PWM regulate, the mode of 10 grades of capacitance voltage-multiplyings.This mode, the electric capacity consumption is too many, and because the capacity of single high-voltage capacitance is less, and volume is larger, and the cost of whole power supply and volume are all larger.In addition, this mode is because operating frequency is higher, and the switching loss of inverter power tube is larger, adopts single H bridge inverter circuit, needs special high-power high-frequency switch pipe for powerful accelerating power source, and it is larger that device solves difficulty.another kind of inverting is to adopt medium frequency inverter, the high-frequency pulsed width modulation voltage regulating mode, it is the Chinese invention patent disclosed " electron-beam welder accelerates control method and the supply unit of high voltage source " of ZL200810302949.1 as the patent No., the characteristics of this mode, the electric capacity consumption is less, adopt general cold rolled silicon steel iron core, can realize that the high-voltage rectifying voltage waveform is the dither ripple, but still exist the power tube operating frequency higher, switching loss is larger, and transformer medium-high frequency current weight is larger, can increase iron loss, be unfavorable for that accelerating power source is to high-power future development.
In contemporary inversion transformation technique, for the harmonic content in less output AC voltage, two kinds of different research directions are arranged.A kind of is two level research directions, namely utilizes the PWM control mode, by improving the method for switching frequency, makes the output voltage waveforms sineization; Another kind of direction is many level research direction, i.e. utilization increase main circuit level number reduces the harmonic wave in output voltage, and makes the power tube of inverter be operated in the lower frequency state, to reduce switching loss and electromagnetic interference (EMI).The deposited equipment of electron beam and electron-beam welder belong to electron beam process equipment together, accelerating power source has a lot of similarities, but the power of the deposited equipment of electron beam is generally larger, in the inversion accelerating power source of the deposited equipment of electron beam, the method that can use for reference inversion transformation technique the second research direction reduces reverse frequency, is convenient to realize the high power contravariant accelerating power source.
Summary of the invention
Technical problem to be solved by this invention is to provide the deposited equipment inversion of a kind of electron beam accelerating power source device and control method thereof, it adopts medium frequency inverter and pulsewidth modulation voltage regulating mode, switching loss with inverse switch pipe is little, and the ripple frequency of high-voltage rectifying ripple is far above the characteristics of reverse frequency.
basic conception of the present invention is take three-phase mid-frequency inverter bridge+intermediate frequency step-up transformer+three-phase high-voltage rectifier bridge as elementary cell, by the output of several elementary cell high-voltage rectifier bridges by series connection and/or compose in parallel the fairing of the deposited equipment accelerating power source of electron beam, the phase sequence of the inverter bridge of several elementary cells is symmetric, the ripple frequency of the output voltage of accelerating power source fairing is 6n times (n is number of elementary entitles) of reverse frequency, to be that the medium frequency inverter process is double realize pulsewidth modulation (PWM) to the Regulation Control mode, the operating frequency that reduces inverter power tube can reduce switching loss.Adopt industrial frequency AC input → lower pressure rectifier filtering → medium frequency inverter pulsewidth modulation pressure regulation → intermediate-frequency transformer of holding concurrently to boost → technology path that high-voltage rectifying filtering is exported, it is AC → DC → AC → DC current transformation pattern, go to control the dutycycle of pulsewidth modulation by the negative-feedback signal of output voltage, carry out automatic Regulation, make high accelerating power source output voltage keep stable.
For addressing the above problem, the present invention is achieved by the following scheme:
The deposited equipment inversion of a kind of electron beam accelerating power source control method, power supply is powered by the three-phase mains, adopt successively industrial frequency AC input → lower pressure rectifier filtering → medium frequency inverter pulsewidth modulation pressure regulation → intermediate-frequency transformer of holding concurrently to boost → the current transformation mode of high-voltage rectifying filtering output, realize the transmission of energy, conversion and the High-Voltage Insulation of magnitude of voltage by intermediate-frequency transformer.The high-pressure sampling signal is gone to control the dutycycle of pulsewidth modulation output wave as negative-feedback signal, power supply is realized pulsewidth modulation and medium frequency inverter in interchange intermediate link, for the deposited equipment of electron beam provides stable beam voltage.Adopt heterogeneous medium frequency inverter technology, the iron core of high-tension transformer adopts cold-reduced silicon sheet to get final product, and the high-tension transformer manufacturing process is simple; And the ripple frequency of the DC voltage of high-voltage rectifying output is far above reverse frequency (6 times to the elementary unit groups number), the dutycycle of pulsewidth modulation greater than
The time (being guaranteed by the intermediate-frequency transformer design parameter), total commutating voltage ripple is without zero crossing, the high-voltage filtering capacitor value of selection of small just can filter alternating component like this, satisfy the ripple factor index request, be conducive to improve on the one hand the control system governing speed, energy storage is little on the other hand, and the impact that electrion produces is naturally little, is conducive to improve the power-supply system operational reliability.
The signal of above-mentioned dutycycle for controlling the pulsewidth modulation output wave also comprises the high pressure setting signal, the deviation signal of this high pressure setting signal and negative-feedback signal is carried out ratio-integral operation output signal and is gone to regulate the dutycycle that the high frequency pulsewidth of inverter is transferred output wave, the final stable regulation that realizes the output accelerating potential.
As improvement, the signal of above-mentioned dutycycle for controlling the pulsewidth modulation output wave also comprises line voltage sampled signal and the given signal of electronic beam current, go to regulate the dutycycle of the pulsewidth modulation output wave of inverter after the given signal of line voltage sampled signal and electronic beam current is comprehensive as the output signal of feed-forward signal and high pressure regulator, realize that the accelerating power source control system is disturbed voltage ripple of power network and load is the quick adjustment that electronic beam current disturbs, reduce accelerating potential dynamic fluctuation amplitude.
As improvement; the deposited equipment inversion of above-mentioned electron beam accelerating power source control method also comprises error protection control; namely judge higher limit that whether accelerating potential surmount the higher limit of setting, electronic beam current and whether surmount setting, whether produce the electrion phenomenon and whether the arbitrary power switch pipe of inverter is abnormal, whether the inverter power supply loop current surmounts the higher limit of setting; the generation of above-mentioned any one event is output signal all, and blocks immediately the output signal of high pressure regulator and the driving pulse of inverter.
As improvement, the deposited equipment inversion of above-mentioned electron beam accelerating power source control method also comprises the phase sequence control to medium frequency inverter, and namely the inversion phase sequence of each inverter bridge and pulse width modulated wave phase sequence are subjected to same clock control, and between each inverter bridge, the inversion phase sequence is symmetric.
Can realize the deposited equipment inversion of the electron beam accelerating power source device of said method, comprise line filter, input rectifying filter unit, inverter, high-tension transformer, high-voltage rectifying wave filter, electrion choke circuit, high-pressure sampling circuit, electronic beam current sample resistance, high pressure regulator and the inverse changing driving circuit of connection.The input of line filter is connected with the three-phase mains, and the output of line filter connects the input of inverter through the input rectifying filter unit.The output of inverter connects the first side winding of high-tension transformer, and the secondary side winding of high-tension transformer is connected with the input of high-voltage rectifying wave filter.The high-pressure side of high-voltage rectifying wave filter is connected with the negative electrode of electron gun through the electrion choke circuit, and the low-pressure end of high-voltage rectifying wave filter joins with the anode of the earth and electron gun after the electronic beam current sample resistance.The high-pressure sampling circuit is connected between electrion choke circuit output and the earth.The high-pressure sampling circuit connects the input of high pressure regulator, and the output of high pressure regulator is connected to the input of inverse changing driving circuit.Inverse changing driving circuit and inverter interconnect.
In such scheme, described inverter comprises that three phase inverter bridge, the high-tension transformer more than 2 or 2 comprises that three-phase transformer, high-voltage rectifying wave filter more than 2 or 2 comprise the rectifier bridge more than 2 or 2.1 three phase inverter bridge, 1 three-phase transformer and 1 rectifier bridge form an elementary cell.Each input of organizing the three phase inverter bridge of elementary cell all is connected in the output of input rectifying filter unit.The output of the three phase inverter bridge of every group of elementary cell connects the first side winding of the three-phase transformer of elementary cell on the same group, and the secondary side winding of the three-phase transformer of elementary cell connects the input side of the rectifier bridge of elementary cell on the same group on the same group.Each outlet side of organizing elementary cell is series connection and/or the rear output that is connected in parallel mutually.
In such scheme, when the outlet side of 2 rectifier bridges is when being connected in parallel, need carry out parallel connection by paralleing reactor.
As improvement, described high pressure regulator is the proportional-integral controller structure.This moment, the output of high pressure regulator was connected to the input of inverse changing driving circuit via a signal synthesizer.Another input of above-mentioned high pressure regulator is connected with the given signal output part of high pressure of central control unit, and another input of signal synthesizer is connected with the given signal output part of line of central control unit.
As further improvement, this accelerating power source device also further comprises the inverter power supply voltage detector component.At this moment, 2 measuring junctions of inverter power supply voltage detector component are attempted by on the output of input rectifying filter unit, and inverter power supply voltage detector component output is connected on another input of signal synthesizer.
In such scheme, described electrion choke circuit is made of inductance and high-voltage diode parallel connection.
In addition, the output of the given signal output part of electronic beam current of the sampled signal output of electronic beam current sample resistance, central control unit and fault distinguishing circuit also is connected to respectively the input of electronic beam current adjuster in the deposited equipment of electron beam.
Compared with prior art, technical scheme of the present invention is after interchange intermediate link realizes medium frequency inverter and pulsewidth modulation pressure regulation, realize the transmission of energy, the conversion of magnitude of voltage and the insulation of high pressure by high-tension transformer, many group three-phase high-voltage rectification series connection and/or in parallel, the ripple frequency of total commutating voltage ripple is far above reverse frequency, use just can be satisfied the ripple requirement of accelerating power source output voltage than the high-voltage filtering capacitor of low capacity, the inverse switch pipe works in intermediate frequency (1000H
zIn), switching loss is much smaller than high-frequency inversion and high-frequency pulsed width modulation duty.
Description of drawings
Fig. 1 is the structural representation of a kind of embodiment of the deposited equipment inversion of electron beam of the present invention accelerating power source device; Number in the figure is: 1-line filter, 2-input rectifying filter unit, 3-voltage transmitter, the 4-current transducer, 5-inverter, 6-high-tension transformer, 7-high-voltage rectifying wave filter, 8-electrion choke circuit, 9-high-pressure sampling circuit, 10-electronic beam current sample resistance, 11-fault distinguishing circuit, 12-central control unit, 13-high pressure regulator, the 14-signal synthesizer, the 15-inverse changing driving circuit.
Fig. 2 is the basic cell structure schematic diagram.Number in the figure is: 5-1-U phase upper left brachium pontis switching power tube, 5-2-U phase lower-left brachium pontis switching power tube, 5-3-U phase upper left brachium pontis fly-wheel diode, 5-4-U phase lower-left brachium pontis fly-wheel diode, 5-5-U phase brachium pontis buffer circuit, 5-6-V phase bridge arm circuit, 5-7-W phase bridge arm circuit, 5-8-inverter detection module, 6-1-high-tension transformer first side winding, 6-2-high-tension transformer secondary side winding, 7-1-high-voltage rectifier bridge, 7-2-high-voltage filtering capacitor.
Fig. 3 is each switching power tube drive signal waveform of inverter figure (dutycycle 50%) in Fig. 1.
Fig. 4 is the structural representation of the another kind of embodiment of the deposited equipment inversion of electron beam of the present invention accelerating power source device.Number in the figure is: 1-line filter, 2-input rectifying filter unit, 3-voltage transmitter, the 4-current transducer, 5-inverter, 6-high-tension transformer, 7-high-voltage rectifying wave filter, 7-3-paralleing reactor, 8-electrion choke circuit, 9-high-pressure sampling circuit, 10-electronic beam current sample resistance, 11-fault distinguishing circuit, the 12-central control unit, the 13-high pressure regulator, 14-signal synthesizer, 15-inverse changing driving circuit.
The specific embodiment
The deposited equipment inversion of the electron beam of the present embodiment accelerating power source device, as shown in Figure 1, mainly consisted of by line filter 1, input rectifying filter unit 2, voltage transmitter 3, current transducer 4, inverter 5, high-tension transformer 6, high-voltage rectifying wave filter 7, electrion choke circuit 8, high-pressure sampling circuit 9, electronic beam current sample resistance 10, fault distinguishing circuit 11, central control unit 12, high pressure regulator 13, signal synthesizer 14 and inverse changing driving circuit 15.
The input of line filter 1 and three-phase four-wire system electrical network join, and the AC of input rectifying filter unit 2 is sent in its output, for cut-out electromagnetic interference (EMI) route of transmission.
Input rectifying filter unit 2 is used for three-phase alternating current is transformed into straight uncontrollable positive and negative direct current, and the zero line of positive and negative galvanic mid point and electrical network joins, and the straight positive and negative direct current of its output is sent into the positive-negative input end of inverter 5 each inverter bridge.
High-tension transformer 6 comprises the three-phase transformer more than 2 or 2, and its number is identical with the number of inverter bridge, and the iron core of each transformer adopts the cold rolled silicon steel sheet material, is used for realizing the transmission of electric weight, conversion and the High-Voltage Insulation of magnitude of voltage.The medium-frequency high-voltage electricity of each Circuit Fault on Secondary Transformer winding output is sent into the interchange input side of corresponding rectifier bridge.
High-voltage rectifying wave filter 7 comprises the rectifier bridge more than 2 or 2, and its number also number with inverter bridge is identical.High-voltage rectifying wave filter 7 is transformed into straight high voltage direct current with the high pressure medium frequency alternating current.The output of each rectifier bridge is series connection and/or output in parallel again after high-voltage capacitance filtering, and this output high-pressure side is connected to electrion choke circuit 8, exports low-pressure end and join with the anode of the earth and electron gun after electronic beam current sample resistance 10.
1 inverter adds 1 high-tension transformer and adds elementary cell of 1 high-voltage rectifier bridge composition.The structure of elementary cell as shown in Figure 2.Each inverter is comprised of a three phase inverter bridge and inverter detection module 5-8, and each brachium pontis of three phase inverter bridge is comprised of 2 switching power tubes (as U phase upper left brachium pontis switching power tube 5-1 and U lower-left brachium pontis switching power tube 5-2 mutually), 2 fast diodes (as U phase upper left brachium pontis fly-wheel diode 5-3 and U lower-left brachium pontis fly-wheel diode 5-4 mutually) and buffer circuit (as U phase brachium pontis buffer circuit 5-5).Three phase inverter bridge works in 180 ° of invertings, and inverter detection module 5-8 is for detection of the whether short circuit and whether transshipping of each switching power tube, and its output is connected to an input of fault judging circuit 11.The first side winding 6-1 of each three-phase transformer is the star connection with center line, and the zero line of center line and electrical network joins, and each three-phase transformer secondary side winding 6-2 is star or delta connection.Each rectifier bridge 7-1 is comprised of 6 high-voltage diodes.
High-pressure sampling circuit 9 is connected between electrion choke circuit 8 outputs and the earth, is used for measuring the accelerating potential value, and output is proportional to the voltage signal U of accelerating potential
a, the signal of its output is sent into high pressure regulator 13 simultaneously as negative-feedback signal, and sends into the foundation that fault distinguishing circuit 11 is used for judgement high pressure overvoltage and electrion.
Electronic beam current sample resistance 10 is serially connected with between the low-pressure end and the earth of accelerating power source output loop, and for detection of the electron beam flow valuve, this resistance two ends output is proportional to the voltage signal U of electronic beam current size
eThe signal of its output is sent into respectively the foundation that fault distinguishing circuit 11 is used for judgement electron beam overcurrent, and the electronic beam current adjuster of sending into the deposited equipment central control unit 12 of electron beam is as the electronic beam current negative-feedback signal.
The output signal U that fault distinguishing circuit 11 is accepted from high-pressure sampling circuit 9, electronic beam current sample resistance 10 and current transducer 4
a, U
eAnd U
is, fault distinguishing circuit 11 is accepted simultaneously from inverter detection module 5-8, to accelerating power source running status Real Time Monitoring, abnormal time output fault-signal U occurs
erThe first via is sent into the output that high pressure regulator 13 is used for blocking high pressure regulator; the second the tunnel sends into the output that inverse changing driving circuit 15 is used for blocking drive circuit; Third Road is sent into the output that the electronic beam current adjuster is used for blocking the electronic beam current adjuster; the 4th sends into the deposited equipment central control unit 12 of electron beam, be used for realizing accelerating power source multiple protective, with interlock protection and the fault prompting of other parts.Fault distinguishing circuit 11 is used for judge higher limit that whether accelerating potential surmount the higher limit of setting, electronic beam current and whether surmount setting, whether produce electrion phenomenon and the arbitrary power switch pipe of inverter 5 whether extremely, whether the current supply circuit electric current surmount the higher limit of setting, the generation of any one event all output signal is U
erBe high level.
Inverse changing driving circuit 15 is for generation of the rational driving pulse of each power switch pipe in inverter 5.The drive waveforms of its generation is connected to respectively the control utmost point of each power switch pipe in inverter 5 after isolation is amplified.When fault distinguishing circuit 11 had signal output, the output of inverse changing driving circuit 15 was blocked.
The control method of the deposited equipment inversion of electron beam accelerating power source comprises the stable regulation control of exporting high pressure, and inverter 5 drives to be controlled and error protection control.
The stable regulation of described output high pressure is controlled: the deposited equipment inversion of electron beam accelerating power source adopts industrial frequency AC input → lower pressure rectifier filtering → medium frequency inverter pulsewidth modulation pressure regulation → intermediate-frequency transformer of holding concurrently to boost → current transformation mode that high-voltage rectifying filtering is exported, namely by AC → DC → AC → DC current transformation mode, realize the transmission of energy, conversion and the High-Voltage Insulation of magnitude of voltage by intermediate-frequency transformer, in the input that exchanges intermediate link employing pulse modulation technology adjusting accelerating power source.High pressure regulator 13 is according to the dutycycle of the pulsewidth modulation output wave that high pressure setting signal and feedback signal compare, ratio-integral operation output signal removes to regulate inverter 5, the final stable regulation that realizes the output high pressure.
In addition, the stable regulation of described output high pressure is controlled the dynamic anti-interference adjusting that also comprises power network fluctuation and load variations, line voltage sampled signal U
sWith the given signal U of electronic beam current
e *Output signal U as feed-forward signal and high pressure regulator 13
cAfter comprehensive, output signal goes to regulate the dutycycle of the pulsewidth modulation output wave of inverter 5, suppresses the dynamic fluctuation that the power network fluctuation fluctuation of load causes accelerating power source voltage.
In addition, described inverter 5 drives controls the phase sequence control that also comprises each medium frequency inverter bridge, and the inversion phase sequence of each inverter bridge and pulse width modulated wave phase sequence are controlled by same clock CL, and between each inverter bridge, the medium frequency inverter phase sequence is symmetric, as shown in Figure 3.
The error protection of this control method is controlled the voltage signal U that comprises the following steps: on fault distinguishing circuit 11 detected electrons line sample resistances 10
eIf surpass the higher limit of setting and be judged to the electronic beam current over current fault; Fault distinguishing circuit 11 detects the output voltage signal U of high-pressure sampling circuit 9
aIf, surpass the higher limit of setting and be judged to accelerating potential overvoltage fault, if being judged to accelerating power source, the negative kick variation of generation produces the electrion fault; Inverter detection module 5-8 detects the temperature signal of each power switch pipe, and arbitrary power switch pipe temperature surpasses the higher limit of setting and is judged to inverter 5 overload fault; Inverter detection module 5-8 detects the tube voltage drop after each power switch pipe driven, and arbitrary detected value surpasses the higher limit of setting and is judged to inverter 5 short troubles; Fault distinguishing circuit 11 detects the output signal of inverter 5 direct current supply current sampling circuits, is judged to the supply current over current fault if surpass the higher limit of setting.Generation fault distinguishing circuit 11 output signal U of above-mentioned arbitrary fault
erAll become high level, and block immediately the output of high pressure regulator 13 and inverse changing driving circuit 15.If produce the electrion fault, block the output of high pressure regulator 13, inverse changing driving circuit 15 and electronic beam current adjuster, central control unit 12 is with output signal U simultaneously
a *And U
e *Zero setting automatically terminates blockade after the 1-3 millisecond, realizes the high pressure autoboot; Surpass set point number at setting-up time section inner high voltage discharge fault frequency and be judged to " permanent fault ", this moment and the same mains supply power supply and the setting signal of cutting off of measure of processing other fault type, after pending fault is got rid of, more manually restart high pressure.
The below describes the embodiment of the present embodiment: the deposited equipment inversion of electron beam accelerating power source is directly by powering after the rectification of three-phase mains, and inverter 5 becomes medium frequency alternating current to dc inverter, by the intermediate-frequency transformer rear rectification output high voltage direct current that boosts; Accelerating power source adopts output voltage negative feedback control mode, and inverter 5 is realized the pulsewidth modulation pressure regulation simultaneously in the inversion process.The dutycycle of dynamic process pulsewidth modulation also is subjected to line voltage sampled signal U
s *With the given signal U of electronic beam current
e *Control.Inverter 5 is comprised of two three-phase inverter bridge circuits, and the reverse frequency of each inverter bridge is identical, and the frequency of pulsewidth modulation and dutycycle are also identical, and between two inverter bridge, the phase difference of medium frequency inverter waveform is symmetric.Inverter 5 adds a high-tension transformer 6 and adds a high-voltage rectifier 7 and form an inversion power supply elementary cell, the output of two unit through series connection and/after being connected in parallel total output as the accelerating power source of electron beam.The iron core of intermediate-frequency transformer can adopt the thick cold-reduced silicon sheet commonly used of 0.2mm～0.35mm to build up like this, whole intermediate-frequency transformer manufacturing process is simple, and the galvanic ripple frequency of high-voltage rectifying output is 12 times of the medium frequency inverter frequency, total rectified wave pulse width modulation duty greater than
The time (being guaranteed by the intermediate-frequency transformer design parameter) without zero crossing, the high-voltage filtering capacitor value of selection of small just can filter alternating component, satisfy the ripple factor index request, be conducive to improve on the one hand the control system governing speed, energy storage is little on the other hand, the impact that electrion produces is naturally little, is conducive to improve the power-supply system operational reliability.The inverter power tube operating frequency is lower, and switching loss is little.
The present embodiment is implemented under take technical solution of the present invention as prerequisite, provided the implementation method of two groups of inverter bridge, the output that is in series after two groups of high-voltage rectifyings in its Fig. 1, in Fig. 4 after two groups of high-voltage rectifyings by paralleing reactor 7-3 output in parallel, the remainder function is identical with Fig. 1.But protection of the present invention is not limited to above-mentioned two groups of inverter bridge embodiment, as long as the inversion accelerating power source of the deposited equipment of electron beam realizes that in interchange intermediate link medium frequency inverter and impulse modulation pressure regulation namely belong to protection scope of the present invention.
Claims (10)
1. the deposited equipment inversion of electron beam accelerating power source control method, it is characterized in that: power supply is powered by the three-phase mains, adopt successively industrial frequency AC input → lower pressure rectifier filtering → medium frequency inverter pulsewidth modulation pressure regulation → intermediate-frequency transformer of holding concurrently to boost → the current transformation mode of high-voltage rectifying filtering output, realize the transmission of energy, conversion and the High-Voltage Insulation of magnitude of voltage by intermediate-frequency transformer; The high-pressure sampling signal is gone to control the dutycycle of pulsewidth modulation output wave as negative-feedback signal, power supply is realized pulsewidth modulation and medium frequency inverter in interchange intermediate link, for the deposited equipment of electron beam provides stable beam voltage.
2. the deposited equipment inversion of electron beam according to claim 1 accelerating power source control method, it is characterized in that: the signal that is used for the dutycycle of control pulsewidth modulation output wave also comprises the high pressure setting signal, the deviation signal of this high pressure setting signal and negative-feedback signal is carried out ratio-integral operation output signal and is gone to regulate the dutycycle that the high frequency pulsewidth of inverter (5) is transferred output wave, the final stable regulation that realizes the output accelerating potential.
3. the deposited equipment inversion of electron beam according to claim 2 accelerating power source control method, it is characterized in that: the signal that is used for the dutycycle of control pulsewidth modulation output wave also comprises line voltage sampled signal and the given signal of electronic beam current, go to regulate the dutycycle of the pulsewidth modulation output wave of inverter (5) after the given signal of line voltage sampled signal and electronic beam current is comprehensive as the output signal of feed-forward signal and high pressure regulator (13), realize that the accelerating power source control system is disturbed voltage ripple of power network and load is the quick adjustment that electronic beam current disturbs, reduce accelerating potential dynamic fluctuation amplitude.
4. the deposited equipment inversion of electron beam according to claim 1 accelerating power source control method, it is characterized in that: also further comprise the phase sequence control to medium frequency inverter, the inversion phase sequence and the pulse width modulated wave phase sequence that are each inverter bridge are subjected to same clock control, and between each inverter bridge, the inversion phase sequence is symmetric.
5. the deposited equipment inversion of electron beam accelerating power source device, is characterized in that: the line filter (1), input rectifying filter unit (2), inverter (5), high-tension transformer (6), high-voltage rectifying wave filter (7), electrion choke circuit (8), high-pressure sampling circuit (9), electronic beam current sample resistance (10), high pressure regulator (13) and the inverse changing driving circuit (15) that comprise connection; The input of line filter (1) is connected with the three-phase mains, and the output of line filter (1) connects the input of inverter (5) through input rectifying filter unit (2); The output of inverter (5) connects the first side winding of high-tension transformer (6), and the secondary side winding of high-tension transformer (6) is connected with the input of high-voltage rectifying wave filter (7); The high-pressure side of high-voltage rectifying wave filter (7) is connected with the negative electrode of electron gun through electrion choke circuit (8), and the low-pressure end of high-voltage rectifying wave filter (7) joins with the anode of the earth and electron gun after electronic beam current sample resistance (10); High-pressure sampling circuit (9) is connected between electrion choke circuit (8) output and the earth; High-pressure sampling circuit (9) connects the input of high pressure regulator (13), and the output of high pressure regulator (13) is connected to the input of inverse changing driving circuit (15); Inverse changing driving circuit (15) interconnects with inverter (5).
6. the deposited equipment inversion of electron beam according to claim 5 accelerating power source device, it is characterized in that: described inverter (5) comprises that three phase inverter bridge, the high-tension transformer (6) more than 2 or 2 comprises that three-phase transformer, high-voltage rectifying wave filter (7) more than 2 or 2 comprise the rectifier bridge more than 2 or 2; 1 three phase inverter bridge, 1 three-phase transformer and 1 rectifier bridge form an elementary cell; Each input of organizing the three phase inverter bridge of elementary cell all is connected in the output of input rectifying filter unit (2); The output of the three phase inverter bridge of every group of elementary cell connects the first side winding of the three-phase transformer of elementary cell on the same group, and the secondary side winding of the three-phase transformer of elementary cell connects the input side of the rectifier bridge of elementary cell on the same group on the same group; Each outlet side of organizing elementary cell is series connection and/or the rear output that is connected in parallel mutually.
7. the deposited equipment inversion of electron beam according to claim 6 accelerating power source device is characterized in that: when the outlet side of 2 rectifier bridges is when being connected in parallel, need carry out parallel connection by paralleing reactor (16).
8. the deposited equipment inversion of the described electron beam of any one accelerating power source device according to claim 5～7, it is characterized in that: described high pressure regulator (13) is the proportional-integral controller structure; The output of high pressure regulator this moment (13) is connected to the input of inverse changing driving circuit (15) via a signal synthesizer (14); Another input of above-mentioned high pressure regulator (13) is connected with the given signal output part of high pressure of central control unit, and another input of signal synthesizer (14) is connected with the given signal output part of line of central control unit.
9. the deposited equipment inversion of electron beam according to claim 8 accelerating power source device, is characterized in that: also further comprise inverter power supply voltage detector component (3); At this moment, 2 measuring junctions of inverter power supply voltage detector component (3) are attempted by on the output of input rectifying filter unit (2), and inverter power supply voltage detector component (3) output is connected on another input of signal synthesizer (14).
10. the deposited equipment inversion of electron beam according to claim 5 accelerating power source device, it is characterized in that: described electrion choke circuit (8) is made of inductance and high-voltage diode parallel connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310046909.6A CN103084724B (en) | 2013-02-06 | 2013-02-06 | Contravariant accelerating power supply device of electron beam depositing equipment and control method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310046909.6A CN103084724B (en) | 2013-02-06 | 2013-02-06 | Contravariant accelerating power supply device of electron beam depositing equipment and control method thereof |
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| CN103084724A true CN103084724A (en) | 2013-05-08 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105345248A (en) * | 2015-11-30 | 2016-02-24 | 北京卫星制造厂 | Handheld electronic beam welding power source for space on-orbit welding |
| CN108717928A (en) * | 2018-04-27 | 2018-10-30 | 桂林狮达机电技术工程有限公司 | Shared accelerating power source array electronic rifle electronic beam current control device and method |
| WO2025044888A1 (en) * | 2023-08-30 | 2025-03-06 | 浙江艾罗网络能源技术股份有限公司 | Control method for off-grid micro inverter, and related device |
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