CN103045998A - Product containing CrNiTiAlN quinary coating and preparation method thereof - Google Patents
Product containing CrNiTiAlN quinary coating and preparation method thereof Download PDFInfo
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- CN103045998A CN103045998A CN2012105296934A CN201210529693A CN103045998A CN 103045998 A CN103045998 A CN 103045998A CN 2012105296934 A CN2012105296934 A CN 2012105296934A CN 201210529693 A CN201210529693 A CN 201210529693A CN 103045998 A CN103045998 A CN 103045998A
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- 238000000576 coating method Methods 0.000 title claims abstract description 96
- 239000011248 coating agent Substances 0.000 title claims abstract description 71
- 238000002360 preparation method Methods 0.000 title claims description 19
- 238000000034 method Methods 0.000 claims abstract description 22
- 230000007704 transition Effects 0.000 claims abstract description 18
- 238000005121 nitriding Methods 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims description 42
- 150000001875 compounds Chemical class 0.000 claims description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 18
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 17
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 14
- 238000000151 deposition Methods 0.000 claims description 14
- 230000008021 deposition Effects 0.000 claims description 14
- 229910001120 nichrome Inorganic materials 0.000 claims description 14
- 239000000956 alloy Substances 0.000 claims description 13
- 229910045601 alloy Inorganic materials 0.000 claims description 13
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 10
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 7
- 229960000935 dehydrated alcohol Drugs 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 6
- 238000005256 carbonitriding Methods 0.000 claims description 5
- 239000000243 solution Substances 0.000 claims description 4
- 238000002203 pretreatment Methods 0.000 claims description 3
- 239000003637 basic solution Substances 0.000 claims description 2
- 238000007781 pre-processing Methods 0.000 claims description 2
- 229910000831 Steel Inorganic materials 0.000 abstract description 10
- 239000010959 steel Substances 0.000 abstract description 10
- 239000003960 organic solvent Substances 0.000 abstract description 6
- 238000009736 wetting Methods 0.000 abstract description 6
- 238000013461 design Methods 0.000 abstract description 4
- 238000012360 testing method Methods 0.000 abstract description 4
- 239000002131 composite material Substances 0.000 abstract description 3
- 230000004580 weight loss Effects 0.000 abstract description 2
- 239000011159 matrix material Substances 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000007733 ion plating Methods 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000006748 scratching Methods 0.000 description 2
- 230000002393 scratching effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
本发明公开了一种含有CrNiTiAlN五元涂层的制品，所述制品以Cr层为底层，以NiCrN层为过渡层，在NiCrN层上沉积厚度为若干层的NiCrN-CrN-AlN-TiN复合涂层，使复合涂层的厚度达到2~5μm；本发明采用多层梯度设计和镀膜前的渗氮工艺大大提高了涂层的膜基结合强度，制备的梯度涂层在划痕试验中的临界载荷高达68N，相对高于其它方法和工艺制备的相关镀层；含CrNiTiAlN五元涂层制品的硬度可达到2880HV；大幅提高了模具和刀具表面的抗冲击耐磨减摩性能和热稳定性，摩擦系数和磨损失重率都大幅降低；提高了模具钢对有机溶剂的润湿角，表明该涂层可大幅改善模具的脱模性能。The invention discloses a product containing a CrNiTiAlN five-element coating. The product uses a Cr layer as a bottom layer and a NiCrN layer as a transition layer, and deposits a NiCrN-CrN-AlN-TiN composite coating with a thickness of several layers on the NiCrN layer. Layer, so that the thickness of the composite coating reaches 2 ~ 5μm; the present invention adopts the multi-layer gradient design and the nitriding process before coating to greatly improve the film-base bonding strength of the coating, and the criticality of the prepared gradient coating in the scratch test The load is as high as 68N, which is relatively higher than the relevant coatings prepared by other methods and processes; the hardness of the five-component coating products containing CrNiTiAlN can reach 2880HV; the impact resistance, wear resistance and friction reduction performance and thermal stability of the surface of the mold and tool are greatly improved. Both the coefficient and the wear weight loss rate are greatly reduced; the wetting angle of the mold steel to the organic solvent is increased, indicating that the coating can greatly improve the release performance of the mold.
Description
(1) technical field
The present invention relates to five yuan of coatings of a kind of novel PVD, be used for improving cutter, die surface hardness, Modificati on and shock-resistant polishing machine, significantly improve cutter, mold use life-span; Improve the demolding performace of die surface, improve plastic component formed product precision, i.e. a kind of goods and preparation method who contains five yuan of coatings of CrNiTiAlN.The method and similar preparation method's ratio, cost is lower.
(2) background technology
Along with developing rapidly of automotive industry, the demand of automobile accessories part increases considerably.Wherein, the quality of workpiece, output and production cost often depend on quality and the acceptable life of mould.Yet under extremely abominable working condition, early stage surface failure often occurs in die steel.For preventing mould generation early failure, prolong the mold use life-span, most economical efficient manner is carried out surface treatment to mould exactly.The PVD magnetic sputtering coating can effectively improve the surface propertys such as the hardness, antiwear and antifriction of matrix.Wherein, CrTiAlN quaternary compound coating has obtained the extensive concern of domestic and international researcher with its excellent mechanical property.CrTiAlN quaternary compound coating has better hardness, film/film-substrate binding strength than present most widely used TiN and CrN.The application of CrTiAlN coating on the instruments such as drill bit, lathe tool extensively approved, but for mould, the application of this coating but is restricted.This mainly is because the Working environment of die steel is extremely abominable, and also there is larger defective in CrTiAlN coating self performance, and for example its toughness is relatively poor, is easy to cracking under shock load, peels off.Be further optimized coatings over-all properties and raising film substrate bond strength, the present invention introduces the Ni element on the basis of CrTiAlN coating, is intended to develop a kind of quinary CrNiTiAlN coating.
(3) summary of the invention
The object of the invention provides goods and the preparation method of five yuan of coatings of a kind of CrNiTiAlN of containing, and further improves the film substrate bond strength of CrTiAlN compound coating, and the size of controlling each layer tissue crystal grain in the nanoscale scope and evenly; The layer thickness of every one deck is also in the nanoscale scope; The coating structure voidage is low, and dense structure makes coating have best hardness/toughness combination, shock-resistant polishing machine, antifriction performance and the Modificati on of optimized coatings, the demolding performace of raising mould.The technical solution used in the present invention is:
A kind of goods that contain five yuan of coatings of CrNiTiAlN, described goods are take the Cr layer as bottom, and take the NiCrN layer as transition layer, deposit thickness is (NiCrN-CrN-AlN-TiN) compound coating of some layers on the NiCrN layer, make the thickness of compound coating reach 2 ~ 5 μ m.Usually can make the thickness of compound coating reach 2 ~ 5 μ m at NiCrN transition layer deposition NiCrN-CrN-AlN-TiN compound coating 2 ~ 2.5h.
A kind of described preparation method who contains the goods of five yuan of compound coatings of CrNiTiAlN, described method is: 1) pre-treatment: with goods substrate ultrasonic cleaning 5 ~ 10min in basic solution, ultrasonic cleaning 6 ~ 9min in acetone again, ultrasonic cleaning 4 ~ 8min in dehydrated alcohol obtains pretreated goods substrate at last; (2) adopt the non-balance magnetically controlled sputter method, with the Cr layer at Cr target current 3 ~ 5A, substrate bias is-80 ~-120V condition deposit to the pretreated goods substrate as bottom; (3) logical nitrogen, at NiCr alloys target electric current 5 ~ 7A, substrate bias be-40 ~-condition of 80V under, deposit the NiCrN layer as transition layer at bottom; (4) prepare at last the NiCrN-CrN-AlN-TiN compound coating, logical nitrogen, at Cr target current 5-7A, NiCr alloys target electric current 4-6A, Ti target current 5-7A, Al target current 5-7A, substrate bias is-50 ~-the 80V condition under, the NiCrN-CrN-AlN-TiN compound coating is deposited on the transition layer, and making NiCrN-CrN-AlN-TiN compound coating thickness is 2 ~ 5 μ m, makes the goods that contain five yuan of coatings of CrNiTiAlN.
Further, the described method of step (1) is: with goods substrate ultrasonic cleaning 8min in the 10g/L aqueous sodium hydroxide solution, ultrasonic cleaning 9min in acetone behind the ultrasonic cleaning 8min, obtains pretreated goods substrate at last in dehydrated alcohol again.
Further, the described preprocessing process of step (1) also comprises substrate in dehydrated alcohol behind ultrasonic cleaning 4 ~ 8min, carries out nitriding processing or carbonitriding again and processes.It is to well known to a person skilled in the art method that described nitriding processing or carbonitriding are processed, and nitriding is processed and referred to die steel 570 ℃ of lower nitridings in nitriding furnace were processed 8 hours usually; The carbonitriding processing is to point to the process that the top layer of steel is infiltrated carbon and nitrogen simultaneously.
Further, step (2) adopts the non-balance magnetically controlled sputter method that Cr is deposited on the pretreated goods substrate as bottom, and mode of deposition is: Cr target current 4A, substrate bias is-100V.
Further, step (3) is deposited on the bottom NiCrN as transition layer, and mode of deposition is: logical nitrogen, and NiCr alloys target electric current 6A, substrate bias is-65V.
Further, step (4) deposits to the goods that to make five yuan of compound coating thickness of NiCrN-CrN-AlN-TiN on the NiCrN transition layer be 2 ~ 5 μ m with the NiCrN-CrN-AlN-TiN compound coating, mode of deposition is: at Cr target current 6A, NiCr alloys target electric current 5A, Ti target current 6A, Al target current 6A, substrate bias is-65V.
The present invention designs preparation multi-layer nano gradient cladding, to improve the film substrate bond strength of coating, basis at the CrTiAlN compound coating adds the Ni element, and the Ni element can improve coating toughness and thermostability to a great extent, and can reduce the wetness degree of mould and liquid plastic; Before plated film, increase nitridation process or carry out the carbonitriding processing.Workpiece running status in stove is that diaxon rotates, and namely around the main shaft revolution, also finishes rotation simultaneously.
Cr target of the present invention, Ti target, NiCr alloys target, Al target are pure metal, recommend the ladder that coating company available from Britain.
Compared with prior art, beneficial effect of the present invention is mainly reflected in:
(1) the present invention adopts multi-gradient design and the front nitridation process of plated film greatly to improve the film substrate bond strength of coating, the critical load of gradient cladding in scratch test of the present invention preparation up to the general film substrate bond strength of 68N(about 45N), be relatively higher than the relevant coating of other Method and process preparation;
(2) owing to the existence in the rich Ni of disperse district, dispersion-strengthened and stress reinforced effect strengthen by regulating the electric current of NiCr alloys target in the coating, and (NiCrN-CrN-AlN-TiN) hardness of five yuan of coatings of compound coating can reach 2880HV;
(3) the Ni element has improved to a great extent the toughness of coating and has improved the thermostability that shows, can obtain optimum hardness/toughness combination by control preparation technology, and the existence of Ni makes the coated grains refinement, and porosity reduces, and compactness improves;
(4) (NiCrN-CrN-AlN-TiN) compound coating has significantly improved impact-resistant abrasion-proof antifriction performance and the thermostability of mould and tool surface, and frictional coefficient and wear weight loss rate all significantly reduce;
(5) (NiCrN-CrN-AlN-TiN) five yuan of coatings of NEW TYPE OF COMPOSITE have improved the wetting angle of die steel to organic solvent greatly, show that this coating can significantly improve the demolding performace of mould.
(4) description of drawings
The coating structure schematic diagram of Fig. 1 the present invention preparation.
Fig. 2 target distributes and places schematic diagram with specimen holder.
Fig. 3 Teer-UDP850/4 type magnetic control sputtering device photo.
Fig. 4 contains the scanning electron microscope (SEM) photograph of five yuan of coated productss of CrNiTiAlN.
Fig. 5 contains the wetting angle of five yuan of coated products surfaces of CrNiTiAlN organic solvent.
Fig. 6 does not contain the wetting angle of coated products surface organic solvent.
(5) embodiment
The present invention is described further below in conjunction with specific embodiment, but protection scope of the present invention is not limited in this:
The Teer-UDP850/4 type closed field unbalanced magnetron sputtering ion plating equipment (Teer-UDP850/4 closed-filed unbalanced magnetron sputtering ion plating coater) of selecting your coating company of Britain's ladder to make prepares the goods of five yuan of coatings of the CrNiTiAlN of containing of the present invention, this equipment is comprised of vacuum system, power-supply system, Controlling System, cooling system four parts, and photo as shown in Figure 3.
Vacuum system is two-stage vacuum, and prime adopts mechanical pump slightly to take out, and rear class adopts the diffusion pump essence to take out.As shown in Figure 2, four targets (a Cr target, a Ti target, a NiCr alloys target, an Al target are all available from Britain ladder that coating company) are installed on the vacuum wall.
Embodiment 1
(1) substrate pre-treatment: take H13 die steel as the goods substrate, with goods substrate ultrasonic cleaning 8min in 10 g/L aqueous sodium hydroxide solutions, ultrasonic cleaning 9min in acetone again, ultrasonic cleaning 8min in dehydrated alcohol obtains pretreated goods substrate at last.
(2) adopt the key step of Teer-UDP850/4 type closed field unbalanced magnetron sputtering ion plating equipment deposition (NiCrN-CrN-AlN-TiN) compound coating (the coating structure schematic diagram is as shown in Figure 1) as follows:
1) start preheating, logical water coolant is opened mechanical pump and is evacuated to 4.0 * 10
-4Pa, and vacuum chamber is heated to 100 ℃;
2) pass into argon gas, regulate gas cylinder valve and under meter, adjust the vacuum chamber internal gas pressure and make the target build-up of luminance;
3) Ion Cleaning: make matrix rotation, regulate substrate bias to-400V, clean matrix surface 20min with Ar+, remove surface impurity, for formal plated film is prepared;
4) metal refining Cr bottoming: open the Cr target, target current is 4A, adjusts substrate bias to be-100V, and deposition one deck Cr is as bottom, to improve the bonding strength of coating and matrix;
5) deposition NiCrN transition layer: NiCr alloys target electric current is increased to 6 A, and substrate bias-65V opens the nitrogen valve, and deposition layer of Ni CrN is as transition layer, with the bonding strength of further enhancing coating and matrix;
6) deposition (NiCrN-CrN-AlN-TiN) compound coating: four targets (a Cr target, a Ti target, a NiCr alloys target, an Al target) are arranged by mode shown in Figure 2, all open, logical nitrogen, Cr target current 6A, NiCr alloys target electric current 5A, Ti target current 6A, Al target current 6A, substrate bias is-65V.
7) plated film is complete: cool off after 30 minutes applying argon gas, blow-on, sampling, NiCrN-CrN-AlN-TiN compound coating thickness is 3 μ m in the goods, namely obtain to contain the goods of five yuan of coatings of CrNiTiAlN, and the goods that will contain five yuan of coatings of CrNiTiAlN carries out performance test as sample.Concrete processing parameter is shown in Table 1.
The preparation technology parameter of five yuan of coatings of table 1 CrNiTiAlN
Adopt HMV-1T type microhardness tester, measure the microhardness value under the 10g load, hold time is 10s.In order to reduce each sample measurement microhardness value of error five times, get five times arithmetical av as the hardness value of this sample.The microhardness value of coating can reach 2660HV.
Adopting CQY-18 type ball trace instrument to measure the thickness that calculates coating is 3 μ m; Adopt the film substrate bond strength of WS-2004 type coating adhesion scratching instrument characterizing coating, the critical load in the scratch test is 58N.
Five yuan of coatings of CrNiTiAlN of the present invention's preparation have the reasonable component gradient-structure, the structure design of coating is as shown in Figure 1: because Cr and steel matrix have the good sticking power of generally acknowledging, so at first use the Cr bottoming, then use the NiCrN transition on it, deposition has (NiCrN-CrN-AlN-TiN) film of nano-multilayered structures at last.Physics, chemical property and the weave construction that the membranous layer ingredient of this continuously smooth transition can make rete be continuous transition gradually, alleviates stress state at the interface, thereby can improve to a great extent the over-all properties of film.
Embodiment 2
The 570 ℃ of lower nitridings in nitriding furnace of pretreated H13 die steel were processed 8 hours, then adopted Teer-UDP850/4 type closed field unbalanced magnetron sputtering ion plating equipment to prepare the NiCrN ternary coating.Other operations and method are with embodiment 1, and NiCrN-CrN compound coating thickness is 3 μ m in the goods, namely obtain to contain the goods of NiCrN ternary coating.
The VEGA-3-S type scanning electronic microscope that adopts Czech TESCAN company to produce is observed the specimen surface pattern, the results are shown in Figure 4, has shown the nanocrystalline pattern of CrNiTiAlN coatingsurface.
Adopt HMV-1T type microhardness tester, measure the microhardness value under the 10g load, hold time is 10s.In order to reduce each sample measurement microhardness value of error five times, get five times arithmetical av as the hardness value of this sample.The microhardness value of coating can reach 2880HV.
Adopting CQY-18 type ball trace instrument to measure the thickness that calculates coating is 3 μ m; Adopt the film substrate bond strength of WS-2004 type coating adhesion scratching instrument characterizing coating, the critical load in the scratch test is 68N.
Adopting the luxuriant and rich with fragrance QCA35 type of German moral contact angle measurement to measure five yuan of coating organic solvents of die steel surface C rNiTiAlN wetting angle is 108.8 degree (shown in Figure 5), and without wetting angle 78.3 degree (shown in Figure 6) of coating mold surface organic solvent, show that this coating can significantly improve the demolding performace of mould.
Claims (7)
1. goods that contain five yuan of coatings of CrNiTiAlN, it is characterized in that described goods are take the Cr layer as bottom, take the NiCrN layer as transition layer, at some layers of NiCrN-CrN-AlN-TiN compound coating of NiCrN transition layer deposition, make the thickness of compound coating reach 2 ~ 5 μ m.
2. described preparation method who contains the goods of five yuan of compound coatings of CrNiTiAlN of claim 1, it is characterized in that described method is: 1) pre-treatment: with goods substrate ultrasonic cleaning 5 ~ 10min in basic solution, ultrasonic cleaning 6 ~ 9min in acetone again, ultrasonic cleaning 4 ~ 8min in dehydrated alcohol obtains pretreated goods substrate at last; (2) adopt the non-balance magnetically controlled sputter method, with the Cr layer at Cr target current 3 ~ 5A, substrate bias is-80 ~-120V condition deposit to the pretreated goods substrate as bottom; (3) logical nitrogen, at NiCr target current 5 ~ 7A, substrate bias be-40 ~-condition of 80V under, deposit the NiCrN layer as transition layer at bottom; (4) prepare at last the NiCrN-CrN-AlN-TiN compound coating, logical nitrogen, at Cr target current 5 ~ 7A, NiCr alloys target electric current 4 ~ 6A, Ti target current 5 ~ 7A, Al target current 5 ~ 7A, substrate bias is-50 ~-the 80V condition under, the NiCrN-CrN-AlN-TiN compound coating is deposited on the transition layer, and making NiCrN-CrN-AlN-TiN compound coating thickness is 2 ~ 5 μ m, makes the goods that contain five yuan of coatings of CrNiTiAlN.
3. the preparation method who contains as claimed in claim 2 the goods of five yuan of compound coatings of CrNiTiAlN, it is characterized in that the described method of step (1) is: with goods substrate ultrasonic cleaning 8min in the 10g/L aqueous sodium hydroxide solution, ultrasonic cleaning 9min in acetone again, ultrasonic cleaning 8min in dehydrated alcohol obtains pretreated goods substrate at last.
4. as containing the preparation method of the goods of five yuan of compound coatings of CrNiTiAlN as described in claim 2 or 3, it is characterized in that the described preprocessing process of step (1) also comprises the goods substrate in dehydrated alcohol behind ultrasonic cleaning 4 ~ 8min, carries out nitriding processing or carbonitriding again and processes.
5. the preparation method who contains as claimed in claim 2 the goods of five yuan of compound coatings of CrNiTiAlN, it is characterized in that step (2) adopts the non-balance magnetically controlled sputter method that Cr is deposited on the pretreated goods substrate as bottom, mode of deposition is: Cr target current 4A, substrate bias is-100V.
6. the preparation method who contains as claimed in claim 2 the goods of five yuan of compound coatings of CrNiTiAlN, it is characterized in that step (3) is deposited on the bottom NiCrN as transition layer, mode of deposition is: logical nitrogen, and NiCr alloys target electric current 6A, substrate bias is-65V.
7. the preparation method who contains as claimed in claim 2 the goods of five yuan of compound coatings of CrNiTiAlN, it is characterized in that step (4) deposits to the goods that to make five yuan of compound coating thickness of NiCrN-CrN-AlN-TiN on the NiCrN transition layer be 2 ~ 5 μ m with the NiCrN-CrN-AlN-TiN compound coating, mode of deposition is: at Cr target current 6A, NiCr alloys target electric current 5A, Ti target current 6A, Al target current 6A, substrate bias is-65V.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103981496A (en) * | 2014-02-10 | 2014-08-13 | 常州大学 | Apparatus and method for preparing TiAlCrN multi-element coating |
| CN104233185A (en) * | 2014-08-21 | 2014-12-24 | 中国人民解放军空军工程大学 | Integral integrating method of sensing element and metal substrate based on PVD |
| CN107151786A (en) * | 2017-06-06 | 2017-09-12 | 南京林业大学 | A kind of soft or hard composite coating wood cutter and preparation method thereof |
| CN109037708A (en) * | 2018-09-17 | 2018-12-18 | 浙江工业大学 | A kind of 20Cr steel bipolar plates material and preparation method thereof that surface is modified |
-
2012
- 2012-12-06 CN CN201210529693.4A patent/CN103045998B/en not_active Expired - Fee Related
Non-Patent Citations (2)
| Title |
|---|
| CHEN-CHENG SUN, ET AL.: "Surface free energy of non-stick coatings deposited using closed field unbalanced magnetron sputter ion plating", 《APPLIED SURFACE SCIENCE》 * |
| 陈迪春 等: "磁控溅射CrAlTiN镀层的微观结构研究", 《西安理工大学学报》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103981496A (en) * | 2014-02-10 | 2014-08-13 | 常州大学 | Apparatus and method for preparing TiAlCrN multi-element coating |
| CN103981496B (en) * | 2014-02-10 | 2016-11-02 | 常州大学 | A device and method for preparing TiAlCrN multi-layer coating |
| CN104233185A (en) * | 2014-08-21 | 2014-12-24 | 中国人民解放军空军工程大学 | Integral integrating method of sensing element and metal substrate based on PVD |
| CN107151786A (en) * | 2017-06-06 | 2017-09-12 | 南京林业大学 | A kind of soft or hard composite coating wood cutter and preparation method thereof |
| CN107151786B (en) * | 2017-06-06 | 2019-02-26 | 南京林业大学 | A kind of soft-hard composite coating woodworking tool and preparation method thereof |
| CN109037708A (en) * | 2018-09-17 | 2018-12-18 | 浙江工业大学 | A kind of 20Cr steel bipolar plates material and preparation method thereof that surface is modified |
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| CN103045998B (en) | 2015-03-04 |
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