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CN103043665A - Preparation method for silicon powder - Google Patents

Preparation method for silicon powder Download PDF

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CN103043665A
CN103043665A CN2013100268735A CN201310026873A CN103043665A CN 103043665 A CN103043665 A CN 103043665A CN 2013100268735 A CN2013100268735 A CN 2013100268735A CN 201310026873 A CN201310026873 A CN 201310026873A CN 103043665 A CN103043665 A CN 103043665A
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silicon
atomizer
slagging
silicon powder
liquid
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CN103043665B (en
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罗学涛
卢成浩
方明
陈娟
黄柳青
赖惠先
李锦堂
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Xiamen University
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Abstract

一种硅粉的制备方法,涉及工业硅除硼工艺和高纯超细硅粉的制备方法。提供一种可显著减低硼含量的硅粉的制备方法。所得硅粉可作为冶金法提纯太阳能级多晶硅的后道工序即酸洗除杂工序理想的低硼原料。1)采用冶金级硅料作为原料,将原料硅放在坩埚中,通过感应线圈电磁加热,熔化硅料;2)硅料熔化时,加入造渣剂,控制加热功率,使反应过程中硅液的温度保持在1550℃~1850℃,造渣精炼结束后,静置,除去浮于硅液上层的造渣剂;3)将硅液温度控制在1500~1700℃,然后打开阀门,启动雾化器;硅液经由导流管进入雾化器;调整雾化器出气口的气压,使硅液呈喷雾状飞出雾化器进入雾化室,由承接转盘收集得到所述的硅粉。

A method for preparing silicon powder relates to an industrial silicon boron removal process and a method for preparing high-purity ultrafine silicon powder. A preparation method of silicon powder capable of significantly reducing boron content is provided. The obtained silicon powder can be used as an ideal low-boron raw material in the subsequent process of purifying solar-grade polysilicon by metallurgical methods, that is, the pickling and impurity removal process. 1) Using metallurgical grade silicon material as the raw material, put the raw silicon material in the crucible, and heat it electromagnetically through the induction coil to melt the silicon material; 2) When the silicon material is melted, add a slagging agent to control the heating power, so that the silicon liquid in the reaction process The temperature of the silicon liquid is kept at 1550-1850 °C. After the slagging and refining is completed, let it stand still to remove the slagging agent floating on the upper layer of the silicon liquid; 3) Control the temperature of the silicon liquid at 1500-1700 °C, then open the valve and start the atomization The silicon liquid enters the atomizer through the guide tube; the air pressure at the air outlet of the atomizer is adjusted to make the silicon liquid fly out of the atomizer into the atomization chamber in the form of a spray, and the silicon powder is collected by the receiving turntable.

Description

一种硅粉的制备方法A kind of preparation method of silicon powder

技术领域technical field

本发明涉及工业硅除硼工艺和高纯超细硅粉的制备方法,尤其是涉及适用于制备太阳能电池硅料的一种硅粉的制备方法。The invention relates to a process for removing boron from industrial silicon and a method for preparing high-purity ultrafine silicon powder, in particular to a method for preparing silicon powder suitable for preparing silicon materials for solar cells.

背景技术Background technique

面临日益严峻的能源危机与环境恶化情况,各国政府争相把开发新能源作为重点发展方向。我国属于太阳能资源储量丰富的国家之一,年日照时数大于2000小时的地区面积约占全国总面积的三分之二以上,太阳能发电在我国发展潜力巨大。目前,太阳能电池主要有晶体硅太阳能电池、薄膜太阳能电池、染料敏化太阳能电池、量子点阵太阳能电池等类型。其中,晶体硅电池占90%以上,是目前及今后一段时期最为重要的太阳能电池类型。Facing the increasingly severe energy crisis and environmental degradation, governments of various countries are scrambling to focus on the development of new energy sources. my country is one of the countries with rich reserves of solar energy resources. The area with annual sunshine hours greater than 2,000 hours accounts for more than two-thirds of the total area of the country. Solar power generation has great potential for development in my country. At present, solar cells mainly include crystalline silicon solar cells, thin-film solar cells, dye-sensitized solar cells, and quantum dot matrix solar cells. Among them, crystalline silicon cells account for more than 90%, which is the most important type of solar cells at present and in the future.

制备晶体硅太阳能电池需要纯度不低于6N的硅料,其中杂质元素硼的含量要小于0.3ppmw。硼是半导体硅中的一种主要的受主元素,其在硅中形成的硼氧复合体严重制约着太阳电池的少子寿命,对太阳电池的发电效率有恶劣影响。因此,除硼是各种硅提纯方法中的关键任务。化学法中(改良西门子、硅烷法等)是通过硅化物精馏、还原等步骤获得低硼高纯多晶硅。而冶金法过程中,由于硼在硅中具有较高的分凝系数(0.8)和较低的高温饱和蒸汽压,采用传统的定向凝固或真空熔炼难以达到去除目的,需要采用造渣精炼的方法进行提纯。The preparation of crystalline silicon solar cells requires silicon materials with a purity not lower than 6N, and the content of impurity element boron is less than 0.3ppmw. Boron is a main acceptor element in semiconductor silicon, and the boron-oxygen complex formed in silicon seriously restricts the minority carrier lifetime of solar cells and has a bad influence on the power generation efficiency of solar cells. Therefore, boron removal is a key task in various silicon purification methods. In the chemical method (improved Siemens, silane method, etc.), low-boron high-purity polysilicon is obtained through silicide rectification, reduction and other steps. In the metallurgical process, due to the high segregation coefficient (0.8) and low high-temperature saturated vapor pressure of boron in silicon, it is difficult to achieve the purpose of removal by traditional directional solidification or vacuum melting, and the method of slagging and refining is required. Purify.

造渣精炼即通过加入造渣剂,在熔融态中形成渣相,去除硅中的硼杂质,获得高纯硅的方法。其关键因素取决于熔炼温度、渣液的碱度、氧势和硼的分配系数。通过理论计算及实验验证,硼的氧化物在渣相和硅中的分凝系数远远小于硼在硅中的分凝系数。日本的Suzuki和Sano,日本东京大学Viana Teixeira和Kazuki Morita(Leandro Augusto Viana Teixeiraand Kazuki Morital,Removal of Boron from Molten Silicon Using CaO–SiO2Based Slags,ISIJ International,Vol.49(2009),No.6,pp.783–787.)均进行了探索性实验研究,在1823K的条件下可获得分配比为2.4的除硼效果。厦门大学冶金实验室(蔡靖,罗学涛等,高纯冶金硅除硼的研究进展,材料导报,2009,23(12):81-84)采用CaO-SiO2-CaF2-BaO造渣体系的中试试验表明,在渣硅比2∶1~1∶2、温度1650~1750℃下成功地将B含量降低到0.15~0.35ppmw。2011年,罗学涛等人(中国专利ZL201110040875.0;中国专利ZL201110000994.3)采用造渣结合酸洗的方法,将金属硅中的硼从8ppmw降低到0.3ppmw以下。2012年,昆明理工大学马文会等人采用CaO-SiO2-Li2O和CaO-SiO2-LiF渣系,在1823K的条件下,可以将硼的含量从22ppmw降低到1.3ppmw。Slagging refining is a method of obtaining high-purity silicon by adding a slagging agent to form a slag phase in the molten state to remove boron impurities in silicon. The key factors depend on the smelting temperature, the alkalinity of the slag liquid, the oxygen potential and the distribution coefficient of boron. Through theoretical calculation and experimental verification, the segregation coefficient of boron oxide in slag phase and silicon is much smaller than that of boron in silicon. Suzuki and Sano from Japan, Viana Teixeira and Kazuki Morita from the University of Tokyo, Japan (Leandro Augusto Viana Teixeira and Kazuki Morital, Removal of Boron from Molten Silicon Using CaO–SiO 2 Based Slags, ISIJ International, Vol.49(2009), No.6, pp.783–787.) have carried out exploratory experimental studies, and the boron removal effect with a distribution ratio of 2.4 can be obtained under the condition of 1823K. Metallurgical Laboratory of Xiamen University (Cai Jing, Luo Xuetao, etc., Research progress on boron removal from high-purity metallurgical silicon, Materials Herald, 2009, 23 (12): 81-84) using CaO-SiO 2 -CaF 2 -BaO slagging system The pilot test showed that the B content was successfully reduced to 0.15-0.35ppmw at a slag-silicon ratio of 2:1-1:2 and a temperature of 1650-1750°C. In 2011, Luo Xuetao et al. (Chinese patent ZL201110040875.0; Chinese patent ZL201110000994.3) used the method of slagging combined with pickling to reduce the boron in metal silicon from 8ppmw to below 0.3ppmw. In 2012, Ma Wenhui of Kunming University of Science and Technology and others used CaO-SiO 2 -Li 2 O and CaO-SiO 2 -LiF slag systems to reduce the boron content from 22ppmw to 1.3ppmw at 1823K.

F.A.Trumbore,G.L.Vick等人的研究结果表明,在1500K以下,硼在硅中的固溶度随着温度的降低而显著降低,且杂质易偏析残留于晶界。通常,造渣精炼后的硅液倒入锭模中冷却凝固成大的硅锭,再经过破碎、磨粉后进行酸洗除杂工序,在粉体加工过程中往往会造成金属二次污染并增加加工成本。因此,传统的造渣精炼方法存在着一定的局限性。The research results of F.A.Trumbore, G.L.Vick et al. show that below 1500K, the solid solubility of boron in silicon decreases significantly as the temperature decreases, and impurities tend to segregate and remain in the grain boundaries. Usually, the silicon liquid after slagging and refining is poured into the ingot mold to cool and solidify into large silicon ingots, and then pickling and impurity removal are carried out after crushing and grinding, which often causes secondary metal pollution and Increase processing costs. Therefore, the traditional slagging refining method has certain limitations.

发明内容Contents of the invention

本发明的目的主要是针对造渣除硼工艺现有技术的不足,提供可显著减低硼含量的一种硅粉的制备方法。所得硅粉可作为冶金法提纯太阳能级多晶硅的后道工序即酸洗除杂工序理想的低硼原料。The purpose of the present invention is mainly to provide a method for preparing silicon powder that can significantly reduce the boron content in view of the deficiencies in the prior art of slagging and boron removal technology. The obtained silicon powder can be used as an ideal low-boron raw material in the subsequent process of purifying solar-grade polysilicon by metallurgical methods, that is, the pickling and impurity removal process.

本发明的技术方案是先采用高温造渣提纯多晶硅,待造渣反应结束后,去除渣液;然后将硅液通过雾化器的雾化作用,形成低硼的硅粉。硼的含量可以一次性降低到0.05~0.2ppmw,可以满足冶金法提纯太阳能级多晶硅的后道工序即酸洗除杂工艺的要求。The technical proposal of the present invention is to purify the polysilicon by high-temperature slagging, and remove the slag liquid after the slagging reaction is completed; then, the silicon liquid is atomized by an atomizer to form low-boron silicon powder. The boron content can be reduced to 0.05-0.2ppmw at one time, which can meet the requirements of the subsequent process of purifying solar-grade polysilicon by metallurgical methods, that is, the pickling and impurity removal process.

本发明包括以下步骤:The present invention comprises the following steps:

1)采用冶金级硅料作为原料,将原料硅放在坩埚中,通过感应线圈电磁加热,熔化硅料;1) Using metallurgical grade silicon material as the raw material, placing the raw material silicon in a crucible, and electromagnetically heating the silicon material through an induction coil to melt the silicon material;

2)硅料熔化时,加入造渣剂,控制加热功率,使反应过程中硅液的温度保持在1550~1850℃,造渣精炼结束后,静置,除去浮于硅液上层的造渣剂;2) When the silicon material is melted, add a slagging agent and control the heating power to keep the temperature of the silicon liquid at 1550-1850°C during the reaction process. After the slagging and refining is completed, let it stand still to remove the slagging agent floating on the upper layer of the silicon liquid ;

3)将硅液温度控制在1500~1700℃,然后启动雾化器,硅液经由导流管进入雾化器,调整雾化器出气口的气压,使硅液呈喷雾状飞出雾化器进入雾化室,由承接转盘收集得到硅粉。3) Control the temperature of the silicon liquid at 1500-1700°C, then start the atomizer, the silicon liquid enters the atomizer through the guide tube, adjust the air pressure at the air outlet of the atomizer, so that the silicon liquid flies out of the atomizer in a spray shape Enter the atomization chamber, and collect the silicon powder by the receiving turntable.

在步骤1)中,所述冶金级硅可为硅粉或硅块,其纯度最好为99%以上,硼的含量可为5~30ppmw;所述坩埚最好为石墨坩埚。In step 1), the metallurgical-grade silicon can be silicon powder or silicon block, the purity of which is preferably above 99%, and the content of boron can be 5-30 ppmw; the crucible is preferably a graphite crucible.

在步骤2)中,所述造渣剂与硅料的质量比可为3∶1~1∶2;当硅料不超过20kg时,造渣精炼时间为15~30min;当硅料在20~50kg时,造渣精炼时间为30~60min;当硅料在50~100kg时,造渣精炼时间为60~120min;所述静置时间可为10~20min。所述造渣剂可采用二氧化硅、氟化钠和钠盐的混合物,按质量百分比,二氧化硅可为25%~40%,氟化钠可为8%~20%,钠盐可为40%~60%;所述钠盐可采用碳酸钠或碳酸氢钠。In step 2), the mass ratio of the slagging agent to the silicon material can be 3:1 to 1:2; when the silicon material is no more than 20kg, the slagging and refining time is 15 to 30min; When the silicon material is 50kg, the slagging and refining time is 30-60 minutes; when the silicon material is 50-100kg, the slagging and refining time is 60-120 minutes; the standing time can be 10-20 minutes. The slag-forming agent can be a mixture of silicon dioxide, sodium fluoride and sodium salt. According to mass percentage, silicon dioxide can be 25% to 40%, sodium fluoride can be 8% to 20%, and sodium salt can be 40% to 60%; the sodium salt can be sodium carbonate or sodium bicarbonate.

在步骤3)中,所述导流管的直径可为2~8mm;所采用的雾化器气体可为氮气、氧气、氩气或上述三种气体构成的混合气体,当气体从雾化器出气口流出时,气压可为0.5~3MPa;雾化器液体出口至承接转盘的垂直距离为0.3~1.5m,承接转盘的温度可为25℃~100℃。In step 3), the diameter of the guide tube can be 2-8mm; the atomizer gas used can be nitrogen, oxygen, argon or a mixture of the above three gases, when the gas from the atomizer When the gas outlet flows out, the air pressure can be 0.5-3MPa; the vertical distance from the liquid outlet of the atomizer to the receiving turntable is 0.3-1.5m, and the temperature of the receiving turntable can be 25°C-100°C.

与现有技术比较,本发明的机理及有益效果如下:Compared with prior art, mechanism of the present invention and beneficial effect are as follows:

根据冶金物理化学理论,高温下,硅中的硼单质与熔融状态下的游离氧离子、氧气作用,以硼酸盐的形式进入渣相中。通过调节造渣剂的配方,改变其碱度,从而调整熔体中的游离氧离子浓度与氧势,综合考虑硅的损失与除硼反应程度,选择最优温度与熔炼时间进行熔炼。According to the theory of metallurgical physics and chemistry, at high temperature, boron in silicon interacts with free oxygen ions and oxygen in the molten state, and enters the slag phase in the form of borate. By adjusting the formula of the slagging agent and changing its alkalinity, the concentration of free oxygen ions and oxygen potential in the melt can be adjusted. Considering the loss of silicon and the degree of boron removal reaction, the optimal temperature and melting time are selected for smelting.

高温硅液经静置后,经导流管进入雾化器,通过调整雾化器出气口的气压,使硅液在雾化气体的作用下雾化成细小的液滴。在雾化过程中,硅液在气体的作用下,克服了表面张力和粘性力,变形、破碎成为液滴颗粒,因此,雾化气体质量流率与金属液体质量流率之间的比值(GMR)是影响最后硅粉质量的重要参数。该参数决定着雾化锥的质量分布、粒度分布、冷却速度等,从而直接影响硅粉质量。在导流管的直径是一定的时候,硅液质量流率可以看成一定值。要调节雾化气体质量流率与金属液体质量流率之间的比值(GMR)就只需控制雾化器出气口的气压。After standing still, the high-temperature silicon liquid enters the atomizer through the guide tube, and the silicon liquid is atomized into fine droplets under the action of the atomizing gas by adjusting the air pressure at the gas outlet of the atomizer. During the atomization process, under the action of the gas, the silicon liquid overcomes the surface tension and viscous force, and deforms and breaks into droplets. Therefore, the ratio between the mass flow rate of the atomized gas and the mass flow rate of the metal liquid (GMR ) is an important parameter affecting the quality of the final silicon powder. This parameter determines the mass distribution, particle size distribution, cooling rate, etc. of the atomization cone, which directly affects the quality of silicon powder. When the diameter of the draft tube is constant, the mass flow rate of silicon liquid can be regarded as a certain value. To adjust the ratio (GMR) between the mass flow rate of the atomizing gas and the mass flow rate of the metal liquid, it is only necessary to control the air pressure at the gas outlet of the atomizer.

高温硅液在气体的作用下变成液体颗粒,在承接转盘上急冷。通过急冷作用,抑制了硅液在降温过程中,硼从残余的少量渣相逆向扩散到硅相中。另一方面,高温硅液中的硼(B)元素与空气中的氧气和水分发生化学反应,生成BxOyHz类化合物,该类化合物主要含有B3O6H3和BO2H,以及还有少量的BO3H3和BOH等,生成的BxOyHz类化合物会以气体的形式从硅相中迅速挥发,从而达到进一步除硼的目的。此外,通过控制承接转盘的温度,可以为液滴的凝固过程提供合适的过冷度,提高硅液的形核几率和结晶速率。The high-temperature silicon liquid turns into liquid particles under the action of gas, and is quenched on the receiving turntable. Through the rapid cooling effect, the reverse diffusion of boron from the remaining small amount of slag phase into the silicon phase is suppressed during the cooling process of the silicon liquid. On the other hand, the boron (B) element in the high-temperature silicon liquid reacts chemically with the oxygen and moisture in the air to form B x O y H z compounds, which mainly contain B 3 O 6 H 3 and BO 2 H , and a small amount of BO 3 H 3 and BOH, etc., the generated B x O y H z compounds will quickly volatilize from the silicon phase in the form of gas, so as to achieve the purpose of further boron removal. In addition, by controlling the temperature of the receiving turntable, an appropriate subcooling degree can be provided for the solidification process of the liquid droplets, and the nucleation probability and crystallization rate of the silicon liquid can be improved.

本发明通过对去除工业硅中B杂质的工艺实验验证,确定了关键参数:如造渣反应温度、反应时间、雾化器出气口气压、雾化器液体出口到承接转盘的垂直距离、承接转盘的温度等的设定范围,结果表明显著降低了工业硅中B含量,具有广阔的应用前景。The present invention confirms key parameters by verifying the process experiment of removing B impurities in industrial silicon: such as slagging reaction temperature, reaction time, air pressure at the gas outlet of the atomizer, vertical distance from the liquid outlet of the atomizer to the receiving turntable, and the receiving turntable The temperature and other setting ranges, the results show that the B content in industrial silicon is significantly reduced, and it has broad application prospects.

本发明提出了一种硅粉的制备工艺,通过将造渣精炼后的硅液进行雾化,获得硼含量低的硅粉,可以直接作为酸洗工序的原料。The invention proposes a preparation process of silicon powder. The silicon powder with low boron content is obtained by atomizing the silicon liquid after slagging and refining, which can be directly used as the raw material of the pickling process.

附图说明Description of drawings

图1为本发明各实施例制备硅粉的装置及流程示意图。Fig. 1 is a schematic diagram of the device and process for preparing silicon powder in various embodiments of the present invention.

图2为图1中的雾化器的结构示意图。Fig. 2 is a schematic structural diagram of the atomizer in Fig. 1 .

具体实施方式Detailed ways

参见图1和2,本发明各实施例制备硅粉的装置包括感应线圈1、石墨坩埚2、保温板3、阀门4、导流管5、雾化器6、雾化室7和承接转盘8。图1中的标号P1为硅液,标号P2为硅粉。Referring to Figures 1 and 2, the device for preparing silicon powder in each embodiment of the present invention includes an induction coil 1, a graphite crucible 2, a heat preservation plate 3, a valve 4, a draft tube 5, an atomizer 6, an atomization chamber 7 and a receiving turntable 8 . The symbol P1 in Fig. 1 is silicon liquid, and the symbol P2 is silicon powder.

保温板3包裹在石墨坩埚2外壁,感应线圈1围绕在保温板3外周,阀门4位于导流管5上端,导流管5位于石墨坩埚2底部正中,雾化器6位于石墨坩埚2下方,雾化室7位于雾化器6下方,承接转盘8位于雾化室7内且位于雾化器6下方。The heat preservation plate 3 is wrapped on the outer wall of the graphite crucible 2, the induction coil 1 surrounds the outer periphery of the heat preservation plate 3, the valve 4 is located at the upper end of the guide tube 5, the guide tube 5 is located at the center of the bottom of the graphite crucible 2, and the atomizer 6 is located under the graphite crucible 2, The atomization chamber 7 is located under the atomizer 6 , and the receiving turntable 8 is located in the atomization chamber 7 and below the atomizer 6 .

雾化器6包括外壁61、气囊62、出气口63、液体出口64。气囊62被外壁61包裹,气囊62中的气体由出气口63流出,与从液体出口64中流出的硅液反应,将硅液雾化。The atomizer 6 includes an outer wall 61 , an air bag 62 , an air outlet 63 and a liquid outlet 64 . The airbag 62 is wrapped by the outer wall 61, and the gas in the airbag 62 flows out from the gas outlet 63, reacts with the silicon liquid flowing out from the liquid outlet 64, and atomizes the silicon liquid.

采用上述装置制备本发明所述硅粉的制备方法实施例如下:Adopt above-mentioned device to prepare the preparation method embodiment of silicon powder of the present invention as follows:

实施例1Example 1

取B含量为5.1ppmw的冶金级硅料放入石墨坩埚中熔炼。硅料熔化时加入造渣剂(碳酸氢钠50%,二氧化硅30%,氟化钠20%),造渣精炼除硼时间0.5h,控制石墨坩埚内温度在1600℃~1650℃,静置10~20min。除去浮于硅液上层的造渣剂;打开阀门,硅液从导流管流入雾化器,导流管直径为5mm,控制雾化器出气口气压为0.5MPa,雾化器液体出口与承接转盘的距离为0.3m。获得的硅粉中硼含量为0.24ppmw。硅粉平均粒径为55μm。A metallurgical grade silicon material with a B content of 5.1 ppmw was taken and melted in a graphite crucible. Add slagging agent (sodium bicarbonate 50%, silicon dioxide 30%, sodium fluoride 20%) when the silicon material is melted, slagging and refining boron removal time is 0.5h, control the temperature in the graphite crucible at 1600 ° C ~ 1650 ° C, static Leave it on for 10-20 minutes. Remove the slagging agent floating on the upper layer of the silicon liquid; open the valve, the silicon liquid flows into the atomizer from the diversion tube, the diameter of the diversion tube is 5mm, control the air pressure of the atomizer outlet to 0.5MPa, the liquid outlet of the atomizer is connected to the acceptor The distance of the turntable is 0.3m. The boron content in the obtained silicon powder was 0.24ppmw. The average particle size of silicon powder is 55 μm.

经对比试验,采用普通技术(相同的造渣精炼温度、时间和配方)所制备的硅中B含量为0.55ppmw。可见本实施例获得的硅粉中硼含量显著降低。Through comparative tests, the B content in silicon prepared by ordinary technology (same slagging refining temperature, time and formula) is 0.55ppmw. It can be seen that the boron content in the silicon powder obtained in this embodiment is significantly reduced.

实施例2Example 2

工艺过程同实施例1,区别在于,造渣剂配方为碳酸氢钠40%,二氧化硅40%,氟化钠20%,造渣精炼除硼时,控制石墨坩埚内温度在1650℃~1700℃,造渣精炼时间1h,导流管直径为4mm,控制雾化器出气口气压为1MPa,雾化器液体出口与承接转盘的距离为0.5m。测得所得硅粉中硼含量为0.21ppmw。硅粉平均粒径为48μm。The process is the same as in Example 1, the difference is that the slagging agent formula is 40% sodium bicarbonate, 40% silicon dioxide, and 20% sodium fluoride. When slagging and refining boron removal, the temperature in the graphite crucible is controlled at 1650°C to 1700°C. ℃, slagging and refining time 1h, the diameter of the guide tube is 4mm, the air pressure at the gas outlet of the atomizer is controlled at 1MPa, and the distance between the liquid outlet of the atomizer and the receiving turntable is 0.5m. The boron content in the obtained silicon powder was measured to be 0.21 ppmw. The average particle size of silicon powder is 48 μm.

经对比试验,采用普通技术(相同的造渣精炼温度、时间和配方)所制备的硅中硼含量为0.51ppmw。可见本实施例获得的硅粉中硼含量显著降低。According to comparative tests, the boron content in silicon prepared by ordinary technology (same slagging refining temperature, time and formula) is 0.51ppmw. It can be seen that the boron content in the silicon powder obtained in this embodiment is significantly reduced.

实施例3Example 3

工艺过程同实施例1,区别在于,造渣剂配方为碳酸钠60%,二氧化硅32%,氟化钠8%,造渣精炼除硼时,控制石墨坩埚内温度在1650℃~1700℃,造渣精炼时间0.5h,导流管直径为6mm,控制雾化器出气口气压为1.5MPa,雾化器液体出口与承接转盘的距离为0.75m。测得所得硅粉中硼含量为0.19ppmw。硅粉平均粒径为41μm。The process is the same as in Example 1, the difference is that the slagging agent formula is 60% sodium carbonate, 32% silicon dioxide, and 8% sodium fluoride. During slagging, refining and boron removal, the temperature in the graphite crucible is controlled at 1650°C to 1700°C , slagging and refining time is 0.5h, the diameter of the guide tube is 6mm, the air pressure at the gas outlet of the atomizer is controlled at 1.5MPa, and the distance between the liquid outlet of the atomizer and the receiving turntable is 0.75m. The boron content in the obtained silicon powder was measured to be 0.19 ppmw. The average particle size of silicon powder is 41 μm.

经对比试验,采用普通技术(相同的造渣精炼温度、时间和配方)所制备的硅中硼含量为0.49ppmw。可见本实施例获得的硅粉中硼含量显著降低。According to comparative tests, the boron content in silicon prepared by ordinary technology (same slagging refining temperature, time and formula) is 0.49ppmw. It can be seen that the boron content in the silicon powder obtained in this embodiment is significantly reduced.

实施例4Example 4

工艺过程同实施例1,区别在于,造渣剂配方为碳酸氢钠60%,二氧化硅25%,氟化钠15%,造渣精炼除硼时,控制石墨坩埚内温度在1700℃~1750℃,造渣精炼时间1h,控制雾化器出气口气压为2MPa,雾化器液体出口与承接转盘的距离为1m。测得所得硅粉中硼含量为0.15ppmw。硅粉平均粒径为38μm。The process is the same as in Example 1, the difference is that the slagging agent formula is 60% sodium bicarbonate, 25% silicon dioxide, and 15% sodium fluoride. When slagging and refining boron removal, the temperature in the graphite crucible is controlled at 1700°C to 1750°C. ℃, slagging and refining time 1h, control the gas outlet air pressure of the atomizer to 2MPa, and the distance between the liquid outlet of the atomizer and the receiving turntable to be 1m. The measured boron content in the obtained silicon powder was 0.15 ppmw. The average particle size of silicon powder is 38 μm.

经对比试验,采用普通技术(相同的造渣精炼温度、时间和配方)所制备的硅中硼含量为0.38ppmw。可见本实施例获得的硅粉中硼含量显著降低。According to comparative tests, the boron content in silicon prepared by ordinary technology (same slagging refining temperature, time and formula) is 0.38ppmw. It can be seen that the boron content in the silicon powder obtained in this embodiment is significantly reduced.

实施例5Example 5

工艺过程同实施例1,区别在于,造渣剂配方为碳酸钠40%,二氧化硅40%,氟化钠20%,造渣精炼除硼时,控制石墨坩埚内温度在1700℃~1750℃,造渣精炼时间1h,控制雾化器出气口气压为3MPa,雾化器液体出口与承接转盘的距离为1.5m。测得所得硅粉中硼含量为0.12ppmw。硅粉平均粒径为33μm。The process is the same as in Example 1, the difference is that the slagging agent formula is 40% sodium carbonate, 40% silicon dioxide, and 20% sodium fluoride. When slagging and refining boron removal, the temperature in the graphite crucible is controlled at 1700°C to 1750°C , slagging and refining time 1h, control the gas outlet air pressure of the atomizer to 3MPa, and the distance between the liquid outlet of the atomizer and the receiving turntable to be 1.5m. The boron content in the obtained silicon powder was measured to be 0.12 ppmw. The average particle size of silicon powder is 33 μm.

经对比试验,采用普通技术(相同的造渣精炼温度、时间和配方)所制备的硅中硼含量为0.35ppmw。可见本实施例获得的硅粉中硼含量显著降低。According to comparative tests, the boron content in silicon prepared by ordinary technology (same slagging refining temperature, time and formula) is 0.35ppmw. It can be seen that the boron content in the silicon powder obtained in this embodiment is significantly reduced.

Claims (10)

1.一种硅粉的制备方法,其特征在于其包括以下步骤:1. a preparation method of silicon powder, is characterized in that it comprises the following steps: 1)硅料熔化:采用冶金级硅料作为原料,将原料硅放在坩埚中,通过感应线圈电磁加热,熔化硅料;1) Silicon material melting: metallurgical grade silicon material is used as raw material, the raw material silicon is placed in a crucible, and the silicon material is melted by electromagnetic heating through an induction coil; 2)造渣精炼除硼:硅料熔化时,加入造渣剂,控制加热功率,使反应过程中硅液的温度保持在1550℃~1850℃,造渣精炼结束后,静置,除去浮于硅液上层的造渣剂;2) Boron removal by slagging and refining: When the silicon material is melted, add slagging agent and control the heating power to keep the temperature of the silicon liquid at 1550°C to 1850°C during the reaction. Slagging agent on the upper layer of silicon liquid; 3)将硅液温度控制在1500~1700℃,然后打开阀门,启动雾化器;硅液经由导流管进入雾化器;调整雾化器出气口的气压,使硅液呈喷雾状飞出雾化器,进入雾化室,由承接转盘收集得到本发明所述的硅粉。3) Control the temperature of the silicon liquid at 1500-1700°C, then open the valve and start the atomizer; the silicon liquid enters the atomizer through the guide tube; adjust the air pressure at the outlet of the atomizer to make the silicon liquid fly out in the form of a spray The atomizer enters the atomization chamber, and the silicon powder described in the present invention is collected by a receiving turntable. 2.如权利要求1所述的一种硅粉的制备方法,其特征在于步骤1)中,所述硅料为硅粉或硅块,纯度为99%以上,硼含量为5~30ppmw。2. The preparation method of a kind of silicon powder as claimed in claim 1, it is characterized in that in step 1), described silicon material is silicon powder or silicon block, and purity is more than 99%, and boron content is 5~30ppmw. 3.如权利要求1所述的一种硅粉的制备方法,其特征在于在步骤1)中,所述坩埚为石墨坩埚。3. the preparation method of a kind of silicon powder as claimed in claim 1 is characterized in that in step 1), described crucible is graphite crucible. 4.如权利要求1所述的一种硅粉的制备方法,其特征在于在步骤2)中,当硅料不超过20kg时,造渣精炼时间为15~30min;当硅料在20~50kg时,造渣精炼时间为30~60min;当硅料在50~100kg时,造渣精炼时间为60~120min;所述静置时间为10~20min。4. the preparation method of a kind of silicon powder as claimed in claim 1 is characterized in that in step 2), when the silicon material is no more than 20kg, the slagging and refining time is 15~30min; when the silicon material is 20~50kg , the slagging and refining time is 30-60 minutes; when the silicon material is 50-100 kg, the slagging and refining time is 60-120 minutes; the standing time is 10-20 minutes. 5.如权利要求1所述的一种硅粉的制备方法,其特征在于在步骤2)中,所述造渣剂采用二氧化硅、氟化钠和钠盐的混合物。5. The preparation method of a kind of silicon powder as claimed in claim 1, is characterized in that in step 2), described slagging agent adopts the mixture of silicon dioxide, sodium fluoride and sodium salt. 6.如权利要求5所述的一种硅粉的制备方法,其特征在于所述造渣剂按质量百分比,二氧化硅为25%~40%,氟化钠为8%~20%,钠盐为40%~60%。6. the preparation method of a kind of silicon powder as claimed in claim 5 is characterized in that described slagging agent is by mass percentage, and silicon dioxide is 25%~40%, sodium fluoride is 8%~20%, sodium Salt is 40% to 60%. 7.如权利要求5或6所述的一种硅粉的制备方法,其特征在于所述钠盐采用碳酸钠或碳酸氢钠。7. the preparation method of a kind of silicon powder as claimed in claim 5 or 6 is characterized in that described sodium salt adopts sodium carbonate or sodium bicarbonate. 8.如权利要求1所述的一种硅粉的制备方法,其特征在于在步骤3)中,所述导流管的直径为2~8mm。8. A method for preparing silicon powder as claimed in claim 1, characterized in that in step 3), the diameter of the draft tube is 2-8mm. 9.如权利要求1所述的一种硅粉的制备方法,其特征在于在步骤3)中,所述雾化器采用的气体为氮气、氧气、氩气或上述三种气体构成的混合气体;气体从雾化器出气口流出时,气压为0.5~3MPa。9. the preparation method of a kind of silicon powder as claimed in claim 1 is characterized in that in step 3), the gas that described atomizer adopts is the mixed gas that nitrogen, oxygen, argon or above-mentioned three kinds of gases form ; When the gas flows out from the gas outlet of the atomizer, the pressure is 0.5~3MPa. 10.如权利要求1所述的一种硅粉的制备方法,其特征在于在步骤3)中,所述承接转盘距离雾化器液体出口的垂直距离为0.3~1.5m,承接转盘的温度为25℃~100℃。10. the preparation method of a kind of silicon powder as claimed in claim 1, it is characterized in that in step 3), the vertical distance of described accepting turntable apart from atomizer liquid outlet is 0.3~1.5m, and the temperature of accepting turntable is 25℃~100℃.
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