CN103041954A - Liquid level alarm system for spin coating equipment - Google Patents
Liquid level alarm system for spin coating equipment Download PDFInfo
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- CN103041954A CN103041954A CN2011103103383A CN201110310338A CN103041954A CN 103041954 A CN103041954 A CN 103041954A CN 2011103103383 A CN2011103103383 A CN 2011103103383A CN 201110310338 A CN201110310338 A CN 201110310338A CN 103041954 A CN103041954 A CN 103041954A
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- liquid level
- level sensor
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- 239000007788 liquid Substances 0.000 title claims abstract description 101
- 238000004528 spin coating Methods 0.000 title claims abstract description 31
- 239000012530 fluid Substances 0.000 claims description 25
- 238000013459 approach Methods 0.000 claims description 7
- 230000000295 complement effect Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 14
- 229910052710 silicon Inorganic materials 0.000 abstract description 14
- 239000010703 silicon Substances 0.000 abstract description 14
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000005856 abnormality Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000004590 computer program Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 241000931705 Cicada Species 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
Abstract
本发明公开了一种用于旋涂设备的液位报警系统，包括源瓶以及出液管道，还包括：液位传感器、开关电路和主机；液位传感器设置在所述源瓶外能有效检测源瓶内液位的感应距离内；且液位传感器的设置高度与源瓶内液面的报警高度相匹配；当液位传感器检测到源瓶内的液面高度低于报警高度时，输出信号给开关电路；开关电路连接液位传感器和主机，将液位传感器的输出信号传送给所述主机；所述主机用于接收开关电路传送的信号，触发报警。本发明解决了因为旋涂装置的源瓶液位低于出液管道的下端端口时，不能及时报警或报警时已经产生气泡而导致硅片涂花的问题，且在需要换液时会减少人为因素导致的异常，同时也提高了生产效率。
The invention discloses a liquid level alarm system for spin coating equipment, which includes a source bottle and a liquid outlet pipeline, and also includes: a liquid level sensor, a switch circuit and a host; the liquid level sensor is arranged outside the source bottle to effectively detect within the sensing distance of the liquid level in the source bottle; and the setting height of the liquid level sensor matches the alarm height of the liquid level in the source bottle; when the liquid level sensor detects that the liquid level in the source bottle is lower than the alarm height, the output signal to the switch circuit; the switch circuit connects the liquid level sensor and the host, and transmits the output signal of the liquid level sensor to the host; the host is used to receive the signal transmitted by the switch circuit and trigger an alarm. The invention solves the problem that the silicon chip is smeared because the source bottle liquid level of the spin coating device is lower than the lower end port of the liquid outlet pipeline, and the alarm cannot be timely or the bubbles have been generated during the alarm, and it can reduce the man-made problem when the liquid needs to be changed. Abnormalities caused by factors, but also improve production efficiency.
Description
Technical field
The present invention relates to the semiconductor devices production field, relate in particular to a kind of pit alert system for spin-coating equipment.
Background technology
In field of semiconductor manufacture, SOG (Spin on Glass) is a kind of liquid dielectric medium that is mixed by solvent and dielectric medium.Because contain SiO
2Or near SiO
2The material of structure, adding itself is the surface that is coated on chip in the mode of spin coating, therefore claims this liquid medium to be " spin-coating glass ".SOG is a kind of quite easy planarization, because being the form with solvent, dielectric layer material covers silicon chip surface, therefore SOG is very good to " ditch is filled out ability " of the outward appearance that just rises and falls, the hole problem that is faced in the time of can avoiding purely making dielectric layer with the CVD legal system.
As shown in Figure 1, the structure chart that is used for the spin coating device of spin-coating glass for prior art, comprise source bottle 14, fluid pipeline 12 and be arranged at air bubble sensor 13 on the fluid pipeline 12, air bubble sensor 13 is arranged on the upper end in source bottle 14 outsides, be installed in the top of 1/8th inches fluid pipeline 12, and so that fluid pipeline 12 passes air bubble sensor 13, air bubble sensor 13 just can detect whether also have liquid in the source bottle 14.When liquid level in the source bottle 14 was lower than the lower end port of fluid pipeline 12, bubble entered into fluid pipeline 12, in the fluid pipeline 12 Bubble formation is arranged, and air bubble sensor 13 occurs reporting to the police when having bubble detecting, so stop silicon chip technique.
The shortcoming of prior art is:
When occurring reporting to the police, bubble has been arranged in the fluid pipeline, very easily cause current silicon chip to be coated with flower; In addition, when bubble appearred in moment, air bubble sensor was difficult for sensing, so that can not reach alarm;
After reporting to the police, follow-up silicon chip will need manual taking-up, and replacing liquid just can continue technique behind the source, and dealing with can be very loaded down with trivial details, and easily causes the artificial scuffing of silicon chip.
Summary of the invention
The object of the present invention is to provide the pit alert system for spin-coating equipment, solved because the source bottle liquid level of spin coating device is when being lower than the lower end port of fluid pipeline, produce bubble in the time of can not reaching alarm or warning and caused silicon chip to be coated with colored problem, and when needs change liquid, can reduce unusual that human factor causes, also improve production efficiency simultaneously.
The present invention also provides a kind of pit alert system for spin-coating equipment, comprises source bottle and fluid pipeline, also comprises: liquid level sensor, on-off circuit and main frame;
Described liquid level sensor is arranged in the distance of reaction of liquid level in the effective detection resources bottle of described source bottle external enwergy; And described liquid level sensor arrange that the warning of liquid level highly is complementary in height and the described source bottle; When the height of liquid level is lower than described warning height in described liquid level sensor detects described source bottle, output signal to described on-off circuit;
Described on-off circuit connects between described liquid level sensor and the described main frame, the output signal of described liquid level sensor is closed send described main frame to;
Described main frame is used for receiving the signal that described on-off circuit transmits, trigger alarm.
The present invention's advantage compared to existing technology:
Pit alert system for spin-coating equipment provided by the invention after sending warning, in fact also has spin-coating glass SOG liquid in the fluid pipeline, can be not influential to current silicon chip; And the height that arranges with liquid level sensor highly is complementary with the warning of liquid level when mounted, and the height of liquid level is lower than described warnings highly the time in detecting described source bottle, outputs signal to on-off circuit; Transmit signal to main frame by on-off circuit again, report to the police, the present invention can also technique multi-disc silicon chip after sending warning, but does not still have Bubble formation in the fluid pipeline, makes things convenient for like this engineer's handling failure, has improved utilization rate of equipment and installations; The present invention has reduced and has manually got the problems such as scuffing that sheet may cause, and has simplified preparation technology, has saved equipment and goods, materials and equipments cost.
Description of drawings
Fig. 1 is the structural representation of the SOG spin-coating equipment of prior art;
Fig. 2 is the apparatus structure schematic diagram of system embodiment one of the present invention;
Fig. 3 is the system, control circuit figure of system embodiment one of the present invention;
Fig. 4 is system embodiment two section of structures of the present invention.
The specific embodiment
The object of the invention is to, a kind of pit alert system for spin-coating equipment is provided, solved because the source bottle liquid level of spin coating device is when being lower than the lower end port of fluid pipeline, produce bubble in the time of can not reaching alarm or warning and caused silicon chip to be coated with colored problem, and when needs change liquid, can reduce unusual that human factor causes, also improve production efficiency simultaneously.
The invention provides a kind of pit alert system for spin-coating equipment, comprise source bottle and fluid pipeline, also comprise: liquid level sensor, on-off circuit and main frame;
Described liquid level sensor is arranged in the distance of reaction of liquid level in the effective detection resources bottle of described source bottle external enwergy; And described liquid level sensor arrange that the warning of liquid level highly is complementary in height and the described source bottle; When the liquid level in described liquid level sensor detects described source bottle is lower than described warning height, output signal to described on-off circuit;
Described on-off circuit connects described liquid level sensor and described main frame, the output signal of described liquid level sensor is closed send described main frame to;
Described main frame is used for receiving the signal that described on-off circuit transmits, trigger alarm.
Preferably, described liquid level sensor is arranged on the connection bracket that is fixed on bottle outside, described source, and the distance between described connection bracket and the described source bottle is in described distance of reaction.
More excellent, described source bottle is provided with fixed head, and described connection bracket one end is connected with described fixed head, and the other end is connected with described liquid level sensor.
More excellent, described fixing board card is placed in the bottle bottle wall outside, described source.
Preferably, described liquid level sensor is arranged at and is fixed on the outer base of described source bottle.
More excellent, described substructure height is adjustable.
Preferably, the high 5mm～8mm of lower end port that the described fluid pipeline of aspect ratio is set of described liquid level sensor.
More excellent, described liquid level sensor is capacitive approach switch sensor or inductance approach switch sensor.
Preferably, described on-off circuit comprises relay, and the output of described relay is connected with described main frame, and its input is connected with the common port of described main frame, a termination 24V DC voltage of two power ends, the output of the described liquid level sensor of a termination.
Below in conjunction with drawings and the embodiments the present invention further is described, the invention provides a kind of pit alert system for spin-coating equipment, comprise capacitive approach switch sensor or inductance approach switch sensor, and by liquid level sensor is set suitable height in its distance of reaction, be used for the height of liquid level in the bottle of monitoring source.
As shown in Figure 2, be the structural representation of system embodiment one of the present invention, comprise source bottle 31 and fluid pipeline 12, wherein, fluid pipeline 12 1 ends extend into the bottom position of source bottle 31, are used for the spin-coating glass SOG liquid of source bottle 31 is discharged, and the processing silicon chip uses.Be fixedly installed a base 22 in source bottle 31 outsides, and it is controlled in the liquid level sensor distance of reaction scope, the height of base 22 is adjustable, namely has Telescopic, on base 22, be provided with liquid level sensor 21, liquid level sensor 21 in the present embodiment is the capacitive approach switch sensor, height by adjusting base 22, the height setting of sensor 21 is complementary with the height that reaches liquid level warning, specifically the height with liquid level sensor 21 is arranged at the lower end port 5mm～8mm that is higher than fluid pipeline 12, when the liquid in the bottle of source is lower than the setting height of liquid level sensor 21, liquid level sensor 21 sends signal, and triggers main frame (with reference to Fig. 3) by on-off circuit (with reference to Fig. 3) and report to the police.
As shown in Figure 3, be the system, control circuit figure of system embodiment one of the present invention, liquid level sensor 1 is arranged in the distance of reaction of the effective detection resources bottle 31 interior liquid levels of source bottle 31 external enwergys; And the height that arranges of liquid level sensor 1 highly is complementary with the warning of source bottle 31 interior liquid levels; When the height that detects source bottle 31 interior liquid levels when liquid level sensor 1 is lower than described warning height, output signal to described on-off circuit; Described on-off circuit connecting fluid level sensor 1 and main frame 3 close the output signal of liquid level sensor 1 and send main frame 3 to.
Wherein, described on-off circuit comprises relay 2, liquid level sensor 1 has a power end ground connection 6, another power supply termination 24V DC voltage 5, relay 2 has four pins, be respectively two power ports and an output, an input, a termination 24V DC voltage 5 of two power ends, the output of another termination liquid level sensor 1; Its output is connected with main frame 3, input termination main frame common port 4.When the liquid level in liquid level sensor 1 detects source bottle 31 is lower than the setting height of liquid level sensor 1, the stability of circuit changes, transfer low level to by high level, make the power end energising of relay 2, relay 2 adhesives, main frame 3 and common port 4 conductings, common port is low level, triggers main frame 3 alarm signals.
As shown in Figure 4, section of structure for the embodiment two of system of the present invention, comprise source bottle 31, source bottle 31 is arranged on the platform 36, wherein platform 36 is arranged on the base plate 32, the outside of source bottle wall is provided with fixed head 35, the top of connection bracket 34 is connected with fixed head 35, the lower end of connection bracket 34 is connected with liquid level sensor 33, between liquid level sensor 33 and source bottle 31, be provided with chock insulator matter, prevent that liquid level sensor 33 from contacting with source bottle 31, connection bracket 34 plays fixer level sensor 33, makes the height of liquid level sensor 33 be higher than fluid lower end of duct port 5mm～8mm, when the liquid in the source bottle 31 is lower than the setting height of liquid level sensor 33, liquid level sensor 33 sends signal, and triggers main frame by on-off circuit and report to the police.
In sum, the invention provides the pit alert system for spin-coating equipment, when sending warning, in fact also has spin-coating glass SOG liquid in the fluid pipeline, namely the lower end port of fluid pipeline does not leave liquid level, thereby can not produce bubble, just can not make current silicon chip be coated with flower yet; And the height of the liquid level sensor of liquid level in the time of can regulating corresponding the warning, even after occurring reporting to the police, also can continue spin coating multi-disc silicon chip after, and still do not have bubble in the fluid pipeline; In addition, the present invention makes things convenient for engineer's handling failure, has improved utilization rate of equipment and installations, has reduced and has manually got the problems such as silicon chip scuffing that sheet may cause, and when improving the preparation precision, has simplified preparation technology, has saved equipment and goods, materials and equipments cost.
The present invention is that reference is described according to flow chart and/or the block diagram of method, equipment (system) and the computer program of the embodiment of the invention.Should understand can be by the flow process in each flow process in computer program instructions realization flow figure and/or the block diagram and/or square frame and flow chart and/or the block diagram and/or the combination of square frame.Can provide these computer program instructions to the processor of all-purpose computer, special-purpose computer, Embedded Processor or other programmable data processing device producing a machine, so that the instruction of carrying out by the processor of computer or other programmable data processing device produces the device that is used for realizing in the function of flow process of flow chart or a plurality of flow process and/or square frame of block diagram or a plurality of square frame appointments.
These computer program instructions also can be stored in energy vectoring computer or the computer-readable memory of other programmable data processing device with ad hoc fashion work, so that the instruction that is stored in this computer-readable memory produces the manufacture that comprises command device, this command device is realized the function of appointment in flow process of flow chart or a plurality of flow process and/or square frame of block diagram or a plurality of square frame.
These computer program instructions also can be loaded on computer or other programmable data processing device, so that carry out the sequence of operations step producing computer implemented processing at computer or other programmable devices, thereby be provided for realizing the step of the function of appointment in flow process of flow chart or a plurality of flow process and/or square frame of block diagram or a plurality of square frame in the instruction that computer or other programmable devices are carried out.
Although described the preferred embodiments of the present invention, in a single day those skilled in the art get the basic creative concept of cicada, then can make other change and modification to these embodiment.So claims are intended to all changes and the modification that are interpreted as comprising preferred embodiment and fall into the scope of the invention.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.
Claims (9)
1. a pit alert system that is used for spin-coating equipment comprises source bottle and fluid pipeline, it is characterized in that, also comprises: liquid level sensor, on-off circuit and main frame;
Described liquid level sensor is arranged in the distance of reaction of liquid level in the effective detection resources bottle of described source bottle external enwergy; And described liquid level sensor arrange that the warning of liquid level highly is complementary in height and the described source bottle; When the liquid level in described liquid level sensor detects described source bottle is lower than described warning height, output signal to described on-off circuit;
Described on-off circuit connects described liquid level sensor and described main frame, sends the output signal of described liquid level sensor to described main frame;
Described main frame is used for receiving the signal that described on-off circuit transmits, trigger alarm.
2. the pit alert system for spin-coating equipment as claimed in claim 1 is characterized in that, described liquid level sensor is arranged on the connection bracket that is fixed on bottle outside, described source, and the distance between described connection bracket and the described source bottle is in described distance of reaction.
3. the pit alert system for spin-coating equipment as claimed in claim 2 is characterized in that, described source bottle is provided with fixed head, and described connection bracket one end is connected with described fixed head, and the other end is connected with described liquid level sensor.
4. the pit alert system for spin-coating equipment as claimed in claim 3 is characterized in that, described fixing board card is placed in the bottle bottle wall outside, described source.
5. the pit alert system for spin-coating equipment as claimed in claim 1 is characterized in that, described liquid level sensor is arranged at and is fixed on the outer base of described source bottle.
6. the pit alert system for spin-coating equipment as claimed in claim 5 is characterized in that, described substructure height is adjustable.
7. such as claim 2 or 5 described pit alert systems for spin-coating equipment, it is characterized in that the high 5mm～8mm of lower end port that the described fluid pipeline of aspect ratio is set of described liquid level sensor.
8. the system as claimed in claim 1 is characterized in that, described liquid level sensor is capacitive approach switch sensor or inductance approach switch sensor.
9. the pit alert system for spin-coating equipment as claimed in claim 1, it is characterized in that, described on-off circuit comprises relay, the output of described relay is connected with described main frame, its input is connected with the common port of described main frame, one termination 24V DC voltage of two power ends, the output of the described liquid level sensor of a termination.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103103383A CN103041954A (en) | 2011-10-13 | 2011-10-13 | Liquid level alarm system for spin coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103103383A CN103041954A (en) | 2011-10-13 | 2011-10-13 | Liquid level alarm system for spin coating equipment |
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| CN103041954A true CN103041954A (en) | 2013-04-17 |
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| CN2011103103383A Pending CN103041954A (en) | 2011-10-13 | 2011-10-13 | Liquid level alarm system for spin coating equipment |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103090931A (en) * | 2011-11-08 | 2013-05-08 | 无锡华润安盛科技有限公司 | System for monitoring needle cylinder remaining amount and chip mounting machine comprising same |
| CN104992916A (en) * | 2015-07-21 | 2015-10-21 | 深圳市捷佳伟创新能源装备股份有限公司 | An etchant feeding device and a wet-type etching apparatus using the same |
| CN106169432A (en) * | 2015-05-22 | 2016-11-30 | 朗姆研究公司 | The ampoule of on-demand filling refills |
| US11072860B2 (en) | 2014-08-22 | 2021-07-27 | Lam Research Corporation | Fill on demand ampoule refill |
| US11180850B2 (en) | 2014-08-22 | 2021-11-23 | Lam Research Corporation | Dynamic precursor dosing for atomic layer deposition |
| CN114446841A (en) * | 2022-04-12 | 2022-05-06 | 广州粤芯半导体技术有限公司 | Acid supply device and wet etching system |
| US11970772B2 (en) | 2014-08-22 | 2024-04-30 | Lam Research Corporation | Dynamic precursor dosing for atomic layer deposition |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103090931A (en) * | 2011-11-08 | 2013-05-08 | 无锡华润安盛科技有限公司 | System for monitoring needle cylinder remaining amount and chip mounting machine comprising same |
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| CN114446841A (en) * | 2022-04-12 | 2022-05-06 | 广州粤芯半导体技术有限公司 | Acid supply device and wet etching system |
| CN114446841B (en) * | 2022-04-12 | 2022-07-29 | 广州粤芯半导体技术有限公司 | Acid supply device and wet etching system |
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Application publication date: 20130417 |