The specific embodiment
About being used for implementing mode of the present invention (embodiment), on one side with reference to accompanying drawing, be described in detail on one side.But the present invention also can't help the content of following embodiment record and limits.And, in the inscape of record, comprise the key element that those skilled in the art can easily imagine below, and identical in fact key element.And the structure that the below puts down in writing can suitably make up.And, can in the scope that does not break away from purport of the present invention, carry out various omissions, displacement or the change of structure.
Fig. 1 is the figure of the structure example of the topping machanism that relates to of expression embodiment.Fig. 2 is the figure of expression cutting member and trim components.Fig. 3 is the figure of the position relationship of expression cutting member and trim components.In addition, Fig. 3 is the figure that observes cutting member and trim components from Z-direction, and it schematically illustrates cutting member.
Thereby the topping machanism that present embodiment relates to is used for by the cutting member with cutting tool is relatively moved with the chuck table that keeps machined object machined object being carried out machining.As shown in Figure 1, topping machanism 1 is two main shaft cutting machines (dicer), be exactly so-called two cutting machines, it constitutes and comprises chuck table 10, two cutting member 20a, 20b, two y-axis shifts moving member 30a, 30b, two Z axis mobile member 40a, 40b, two trim components 50a, 50b and control member 90.In addition, the topping machanism 1 that relates to of present embodiment constitutes and also comprises not shown X-axis mobile member, box lift 60, interim placement member 70 and cleaning and dry member 80.Topping machanism 1 is provided with the post section 3 of a type at apparatus main body 2.
Chuck table 10 is used for machined object W is remained on the surface that forms horizontal plane.In the present embodiment, chuck table 10 is by aspirating to keep machined object W from the back side of machined object W.The part that consists of the surface of chuck table 10 is the disc-shape that is formed by porous ceramics etc., and the part on the surface of described formation chuck table 10 is connected with not shown vacuum suction source by not shown vacuum draw path.In addition, around chuck table 10, be provided with a pair of clamping part 11.Clamping part 11 is driven and the framework F on every side of clamping machined object W by air actuator.
Herein, machined object W is the processing object that utilizes topping machanism 1 processing, and in the present embodiment, machined object W is with the wafer as mother metal such as silicon, sapphire, gallium.Machined object W sticks on cutting belt T with the back side with a side of the surface opposite of the device-side that is formed with a plurality of devices, by will pasting with the cutting belt T that machined object W is pasted together framework F, thereby machined object W is fixed in framework F.
The X-axis mobile member is used for maintained machined object W is relatively moved with respect to cutting tool 21 along X-direction.The X-axis mobile member is set to make post section 3 across at apparatus main body 2, and described X-axis mobile member constitutes and comprises X-axis ball-screw, X-axis impulse motor and a pair of X-axis guide rail.The X-axis ball-screw sets along X-direction, and screws togather with the not shown nut of the bottom that is arranged on movable workbench base 4, and an end and the X-axis impulse motor of described X-axis ball-screw link together.A pair of X-axis guide rail and X-axis ball-screw form abreast, and described a pair of X-axis guide rail loads movable workbench base 4 in the mode that can slide.The X-axis mobile member is by utilizing the revolving force that is produced by the X-axis impulse motor to make X-axis ball-screw rotary actuation, thereby utilize on one side a pair of X-axis rail guidance movable workbench base 4(chuck table 10), Yi Bian described movable workbench base (chuck table 10) is moved along X-direction with respect to apparatus main body 2.
Herein, movable workbench base 4 is supported to and can rotates freely centered by the central axis of movable workbench base 4 at apparatus main body 2.Movable workbench base 4 links together with the not shown base drive source that is accommodated in apparatus main body 2.Movable workbench base 4 can utilize the revolving force that is produced by the base drive source to rotate arbitrarily angle (for example 90 degree) or continuous rotation, can make chuck table 10 carry out the rotary actuations such as arbitrarily angle rotation and continuous rotation with respect to cutting tool 21a, 21b centered by the central axis of movable workbench base 4.
Cutting member 20a, 20b are used for utilizing cutting tool 21a, 21b cutting by the machined object W of chuck table 10 maintenances.Cutting member 20a is supported in support 5a, and described cutting member 20a is located at a side of post section 3 across y-axis shift moving member 30a, Z axis mobile member 40a and cutter movable base 6a.Cutting member 20b is supported in support 5b, and described cutting member 20b is located at the opposing party of post section 3 across y-axis shift moving member 30b, Z axis mobile member 40b and cutter movable base 6b.Two cutting member 20a, 20b clip chuck table 10 opposite disposed.As shown in Figure 2, cutting tool 21a, 21b are the cutting grinding tools as thin as a wafer with general toroidal shape, and described cutting tool 21a, 21b are assemblied in main shaft 22a, 22b with freely installing and removing respectively. Main shaft 22a, 22b are supported to and can be rotated by housing 23a, the 23b of drum respectively, and described main shaft 22a, 22b link together with not shown cutter drives source respectively, and described cutter drives source is accommodated in respectively housing 23a, 23b.Cutting tool 21a, 21b are by the rotary actuation by the revolving force of cutter drives source generation.In addition, for cutting member 20a, 20b, as shown in Figure 3, main shaft 22a, 22b are arranged so that the rotation A of main shaft 22a, 22b is parallel with Y direction.
As shown in Figure 1, moving member 30a, 30b of y-axis shift is used for making cutting tool 21a, 21b to relatively move with respect to the machined object W and trim components 50a, the 50b that are kept by chuck table 10 respectively along Y direction.Y-axis shift moving member 30a, 30b are located at respectively post section 3, described y-axis shift moving member 30a, 30b constitute separately have Y-axis ball- screw 31a, 31b, Y- axis impulse motor 32a, 32b and a pair of Y-axis guide rail 33.Y-axis ball- screw 31a, 31b set along Y direction, screw togather respectively with at the inner not shown nut that arranges of cutter movable base 6a, 6b, and an end of described Y-axis ball-screw links together with Y- axis impulse motor 32a, 32b respectively.A pair of Y-axis guide rail 33 forms abreast with Y-axis ball- screw 31a, 31b, and described a pair of Y-axis guide rail 33 loads respectively cutter movable base 6a, 6b in the mode that can slide.Y-axis shift moving member 30a, 30b are by utilizing the revolving force that is produced by Y- axis impulse motor 32a, 32b to make Y-axis ball- screw 31a, 31b rotary actuation, thereby utilize a pair of Y-axis guide rail 33 guiding cutter movable base 6a, 6b on one side, Yi Bian make described cutter movable base 6a, 6b mobile respectively along Y direction with respect to apparatus main body 2.
Z axis mobile member 40a, 40b are used for making cutting tool 21a, 21b to approach and relatively move respectively away from the direction of chuck table 10 along Z-direction that is along main shaft 22a, 22b with respect to the machined object W that is kept by chuck table 10 and trim components 50a, 50b.Z axis mobile member 40a, 40b are located at respectively cutter movable base 6a, 6b, described Z axis mobile member 40a, 40b constitute respectively have Z axis ball-screw 41a, 41b, Z axis impulse motor 42a, 42b and a pair of Z axis guide rail 43a, 43b.Z axis ball-screw 41a, 41b set along Z-direction, screw togather respectively with the not shown nut that is arranged on support 5a, 5b inside, and the end of described Z axis ball-screw 41a, 41b links together with Z axis impulse motor 42a, 42b respectively.A pair of Z axis guide rail 43a, 43b and Z axis ball-screw 41a, 41b form abreast, and described a pair of Z axis guide rail 43a, 43b load support 5a, 5b in the mode that can slide.Z axis mobile member 40a, 40b are by utilizing the revolving force that is produced by Z axis impulse motor 42a, 42b to make Z axis ball-screw 41a, 41b rotary actuation, thereby utilize a pair of Z axis guide rail 43a, 43b guiding support 5a, 5b on one side, Yi Bian make described support 5a, 5b mobile respectively along Z-direction with respect to apparatus main body 2.
Trim components 50a, 50b with cutting member 20a, 20b accordingly the mode of 10 adjacent with chuck table (in the present embodiment, clip chuck table 10 opposed along Y direction) be equipped on respectively apparatus main body 2.As shown in Figure 2, trim components 50a, 50b constitute and have respectively finishing board 51a, 51b and retaining member 52a, 52b.
Finishing board 51a, 51b are formed with abradant surface 53a, the 53b as horizontal plane.Abradant surface 53a, 53b form ring-type, and in the present embodiment, the finishing board 51a, the 51b that comprise abradant surface 53a, 53b itself form ring-type, and are formed with peristome 54a, 54b at central portion.Finishing board 51a, 51b combine the bond material that forms by abrasive particles such as the white fused alumina that Abrasive Particle Size is less than the Abrasive Particle Size of cutting tool 21a, 21b (white alundum), green silicon carbides (green carbon) with resin etc. and form.
Retaining member 52a, 52b are used for so that the mode that abradant surface 53a, 53b are provided in the opposition side of retaining member 52a, a 52b side in opposite directions keeps respectively finishing board 51a, 51b.Retaining member 52a, 52b are by aspirating to keep finishing board 51a, 51b from the back side of a side opposite with abradant surface 53a, 53b.The part that consists of the surface (with finishing board 51a, 51b face in opposite directions) of retaining member 52a, 52b is the disc-shape that is formed by porous ceramics etc., and the part of the surface of described formation retaining member 52a, 52b (with finishing board 51a, 51b face in opposite directions) links together by not shown vacuum draw path and not shown vacuum suction source.And as shown in Figure 3, retaining member 52a, 52b are supported to respectively and can rotate centered by the central axis B that is parallel to Z axis at apparatus main body 2.Retaining member 52a, 52b and the not shown finishing drive source that is accommodated in apparatus main body 2 link together.Retaining member 52a, 52b can rotate arbitrarily angle (the label S that represents among this figure) by the revolving force that is produced by the finishing drive source, can make finishing board 51a, 51b with respect to cutting tool 21a, the 21b rotary actuation anglec of rotation arbitrarily centered by central axis B.
Herein, trim components 50a, 50b are adapted to and make the abradant surface 53a, the 53b that are under the state that is kept by retaining member 52a, 52b identical or lower than described height H 2 with respect to the height H 2 of apparatus main body 2 with respect to the surface of the height H 1 of apparatus main body 2 and chuck table 10.That is, be under the non-contacting state on the surface of cutting tool 21a, 21b and chuck table 10, even cutting member 20a, 20b are moved along Y direction, cutting tool 21a, 21b can not contact with the abradant surface 53a, the 53b that are in by under the state of retaining member 52a, 52b maintenance yet.Thereby, even for the machined object W that is kept by chuck table 10 is carried out machining and cutting member 20a, 20b are moved along Y direction, can not interfere with trim components 50a, 50b yet.Thereby, since trim components 50a, 50b can be provided in chuck table 10 near, therefore, amount of movement till can reducing from chuck table 10 to trim components 50a, 50b on Y direction, can shorten and after machining, carry out straight finishing and again transfer to the needed time of machining (below, simply be called " finishing time ").
And trim components 50a, 50b are provided on the cutter mobile route, and described cutter mobile route is the path that cutting tool 21a, 21b move by y-axis shift moving member 30a, 30b.In the present embodiment, trim components 50a, 50b are positioned on the rotation A of main shaft 22a, 22b with its central axis B, that is so that radially parallel with the Y direction mode of finishing board 51a, 51b set.Thereby, when cutting member 20a, 20b are moved with respect to trim components 50a, the 50b direction that the edge approaches on Z-direction, with point in the periphery of cutting tool 21a, 21b, that intersect with following straight line as benchmark, cutting tool 21a, 21b contact with finishing board 51a, 51b, and described straight line is parallel with Z-direction and by the straight line on the rotation A.
Box lift 60 is formed with a plurality of incorporating sections along Z-direction, and described incorporating section is used for taking in machined object W singly, and described box lift 60 is taken in a plurality of machined object W together.Box lift 60 constitutes in the apparatus main body 2 inner spatial portions that form along the Z-direction free lifting.Interim placement member 70 has pair of tracks 71, and the machined object W before and after being used for processing is placed on pair of tracks 71 temporarily.Cleaning and dry member 80 have rotary table 81, for the machined object W after the processing being loaded and keeping.Rotary table 81 links together with the rotary table drive source that is accommodated in apparatus main body 2.When machined object W is remained on rotary table 81, cleaning and dry member 80 make machined object W rotation by the revolving force that is produced by the rotary table drive source, never illustrated washer fluid spraying apparatus cleans machined object W jet cleaning liquid, and never illustrated gas injection apparatus makes its drying to the machined object W gas jet after cleaning.
Control member 90 is used for the above-mentioned inscape that consists of topping machanism 1 is controlled respectively.Control member 90 is used for making topping machanism 1 to carry out the processing action that machined object W is processed.And control member 90 is used for the straight finishing to cutting member 20a, 20b that control is undertaken by trim components 50a, 50b.In addition, control member 90 consists of as main body with not shown microprocessor, described not shown microprocessor has arithmetic processing apparatus and ROM, the RAM etc. that consist of such as by CPU etc., and the display member of described control member 90 and the state that shows processing action and the control member when logining processing content information etc. for the operator link together.
The processing action of the topping machanism 1 that then, present embodiment is related to describes.At first, the operator logins processing content information, in the situation that has the processing action sign on, and the beginning processing action.In processing action, take out of member by not shown moving into machined object W is taken out of interim placement member 70 from box lift 60, after on the pair of tracks 71 that machined object W is loaded interim placement member 70, by not shown conveyance member machined object W conveyance is kept to chuck table 10 and by chuck table 10.Keep the chuck table 10 of machined object W to move to the processing starting position along X-direction, carry out along the circumferential periphery of cutting machined object W remove machined object W periphery a part processing (below, referred to as " removing processing "), perhaps carry out for preset lines is cut machined object so that the division processing of a plurality of device difference panelization described later etc. along cutting apart.When removing processing, make a side among cutting tool 21a, the 21b or two sides' cutting tool 21a, 21b be positioned at the periphery of machined object W, and, by making machined object W in the rotation of this position, thus by a side cutting tool in the Z-direction cutting with remove the part of the periphery of machined object W.In division processing, make on one side the relative position of the cutting tool 21a, the 21b that make a side or two sides among cutting tool 21a, the 21b and machined object W along cutting apart the preset lines change, by a side or two sides' cutting tool 21a, 21b cutting machined object W, stay cutting belt T ground each device is divided into fritter (dice) shape on one side.Machined object W after processing by not shown conveyance member from chuck table 10 conveyances to cleaning and dry member 80, after by cleaning and 80 cleanings of dry member and drying,, then take out of member and move into box lift 60 from interim placement member 70 by moving into to interim placement member 70 by not shown conveyance member conveyance.In addition, owing to have two cutting member 20a, 20b, therefore, the machining to machined object W of being undertaken by above-mentioned topping machanism 1 can then make cutting member 20a, 20b alternately by one or more pieces machined objects of every cutting W, after perhaps also can arriving the limit of abrasion (also comprising eccentric wear) at a side cutting tool, be replaced by the opposing party's cutting tool.
The straight finishing of the topping machanism 1 that then, present embodiment is related to describes.Fig. 4 is the flow chart of the straight finishing carried out of the topping machanism that related to by embodiment of expression.In addition, owing to be identical to the straight finishing of cutting member 20a, 20b, therefore, the situation of only cutting member 20a being carried out straight finishing herein describes.Straight finishing to cutting tool 21a is to relatively move to carry out by cutting tool 21a and the trim components 50a that makes rotation.
At first, control member 90 judges whether to be necessary cutting member 20a is carried out straight finishing (step ST1).The eccentric wear that judges whether cutting tool 21a herein, has been exacerbated to and need to have utilized trim components 50a that cutting tool 21a is carried out straight finishing.In addition, preferably, need to judge whether straight finishing based on the processing distance of being removed the machined object W after the processing by cutting member 20a and abrasion loss.Preferably, based on the diameter of the sheet number of removing the machined object W after the processing, machined object W, judge processing distance and abrasion loss with respect at least one item in the radical of cutting apart preset lines of machined object W and distance, the approach of cutting tool 21a, the hardness of cutting tool 21a etc.
Then, when control member 90 is judged as when being necessary that cutting member 20a carried out straight finishing (step ST1 affirms), judge whether just to carry out (step ST2) in the machining by cutting member 20a.In addition, when being judged as when there is no need that cutting member 20a carried out straight finishing (step ST1 negate), circulation execution in step ST1 is until judge and be necessary to carry out straight finishing.
Then, judge when control member 90 and carry out the straight finishing (step ST3) to cutting member 20a when not being in the machining of being undertaken by cutting member 20a (step ST2 negates).Herein, cutting member 20a in the straight finishing of needs just carries out straight finishing under the current state that is not in the machining, for example, in the processing action of the machined object W that is undertaken by topping machanism 1, be in the machining of being undertaken by cutting member 20b and cutting member 20a is not in the state in the machining, perhaps under the state of the processing action of the machined object W that does not carry out being undertaken by topping machanism 1, just carry out straight finishing.
In the straight finishing to cutting member 20a, at first, control member 90 makes by Z axis mobile member 40a and does not carry out the cutting tool 21a that machining is positioned at position of readiness and move to predetermined cutting into position.Herein, predetermined cutting into position is to make cutting tool 21a in Y direction and finishing board 51a position in opposite directions, that is, be can be in the position that Z-direction makes cutting tool 21a contact with finishing board 51a.And, predetermined cutting into position be exactly cutting tool 21a with respect to the approach of finishing board 51a, it is according to the conditional decision such as following: the eccentric wear degree of cutting tool 21a; With the number of times to the straight finishing of cutting tool 21a, that is cutting tool 21a is with respect to the frequency of exposure (for example increasing by once contacting in the situation of carrying out straight finishing, and reducing in the situation of carrying out straight finishing by repeated multiple times contact) of abradant surface 53a.
Then, control member 90 utilizes the moving member of y-axis shift to make the cutting tool 21a of rotation mobile along Y direction (being to the direction that contacts with abradant surface 53a) from being scheduled to cutting into position herein.Cutting tool 21a moves and contacts with abradant surface 53a by rotating an edge Y direction on one side, thereby utilizes finishing board 51a to be shaped as the end of this cutting tool 21a straight.In addition, control member 90 makes the cutting tool 21a of rotation move until cutting tool 21a and abradant surface 53a become noncontact along Y direction.That is the cutting tool 21a that control member 90 makes rotation at least moves to the other end from the end of abradant surface 53a.Herein, comprise from the end to end of abradant surface 53a: from outer thoughtful radially in opposite directions the periphery of finishing board 51a (from C1 shown in Figure 3 to C2, perhaps from C2 to C1), from outer thoughtful radially in opposite directions the peristome 54a(of finishing board 51a from C1 shown in Figure 3 to D1, perhaps from C2 to D2), from the peristome 54a of finishing board 51a in opposite directions periphery (from D1 shown in Figure 3 to C1, perhaps from D2 to C2) radially.Thereby at predetermined cutting into position, when observing along Z-direction (when observing along the vertical direction of Fig. 3), cutting tool 21a is positioned near the periphery of finishing board 51a or the peristome 54a of finishing board 51a.And in order to carry out straight finishing, cutting tool 21a is along the mobile at least distance that is equivalent to diameter or the radius of finishing board 51a of Y direction.In addition, control member 90 makes cutting tool 21a rotation during making that cutting tool 21a moves along Y direction from predetermined cutting into position, but, and before cutting tool 21a moves to predetermined cutting into position or begin to rotate after mobile can.For example, also can be after carrying out machining by cutting tool 21a, the rotation of the cutting tool 21a that moves to position of readiness to be stopped, and make it move to predetermined cutting into position with maintaining the original state.
Then, control member 90 makes retaining member 52a rotation after cutting tool 21a and abradant surface 53a become noncontact.When the cutting tool 21a that makes rotation moves along Y direction with respect to the abradant surface 53a that contacts, form the cutting trace of linearity at abradant surface 53a herein.The zone that is formed with the cutting trace of abradant surface 53a (below, referred to as " cutting trace zone ") with respect to the zone that does not form the cutting trace (below, referred to as " non-cutting trace zone "), the cutting ability of cutting tool 21a is reduced, therefore, had better not again be used for straight finishing.Thereby, in order when cutting tool 21a contacts abradant surface 53a again, to contact cutting tool 21a with non-cutting trace zone, control member 90 makes retaining member 52a rotation, makes non-cutting trace zone and cutting tool 21a in Z-direction (from the situation of vertical beneath Fig. 3) in opposite directions with the mobile route at cutter.In addition, the anglec of rotation also can be predetermined value, but because the width of cutting trace (in horizontal plane with the direction of the direction quadrature that forms the cutting trace on length) change with predetermined cutting into position, therefore, also can be according to the predetermined cutting into position decision anglec of rotation.And, also can in non-cutting trace zone, comprise part cutting trace zone.For example, also can be that the peristome 54a side on the mobile route of Z-direction (from the situation of vertical beneath Fig. 3) at cutter comprises cutting trace zone.In this case, can reduce the anglec of rotation of finishing board 51a, with in the situation that does not comprise cutting trace zone on the mobile route of Z-direction (from the situation of vertical beneath Fig. 3) at cutter fully, compare, finishing board 51a can be recycled in straight finishing.
As previously discussed, the topping machanism 1 that present embodiment relates to is adapted to finishing board 51a, 51b can be independent of chuck table 10 rotations, and cutting tool 21a, 21b are relatively moved with respect to finishing board 51a, 51b, carry out thus the straight finishing of cutting tool 21a, 21b.Thereby, with in order to carry out straight finishing with pull down the situation that machined object W remains on chuck table with finishing board and carry out straight finishing from chuck table and compare, owing to do not had operator or conveyance member to be used for carrying out the operation of straight finishing, therefore, can realize the simplification of straight dressing operation.
And, can utilize the time that does not have to be carried out the machining of machined object W by cutting tool 21a, 21b to carry out straight finishing.For example, in above-mentioned topping machanism 1, can be in cutting tool 21a, 21b one be carried out in the machining, another cutting tool that does not carry out machining is carried out straight finishing.And in the topping machanism that only has a cutting tool, machined object W that can be after pulling down processing from chuck table 10 keeps new machined object W, until be able to machining state during, cutting tool is carried out straight finishing.Thereby, can interrupt the machining of machined object W, even perhaps interrupt also having shortened the time of interrupting, can realize the raising of productivity ratio.
And, owing to abradant surface 53a, the 53b of finishing board 51a, 51b formed ring-type and can centered by central axis B, rotate, therefore, even formed the cutting trace because cutting tool 21a, 21b are moved at abradant surface 53a, 53b along Y direction, also can when cutting tool 21a, 21b are moved along Y direction, contact with cutting tool 21a, 21b with non-cutting trace zone by making finishing board 51a, 51b rotation.Thereby, owing to can with finishing board 51a, 51b Reusability in straight finishing, therefore, productivity ratio be improved by making finishing board 51a, 51b rotation.If abradant surface is discoid, even be rotated centered by central axis in order repeatedly to carry out straight finishing, the abradant surface of cutting tool on still can the Multiple through then out central axis, and, in order to make cutting tool and abradant surface noncontact, will make cutting tool move the distance that is equivalent to diameter.But, as abradant surface 53a, when 53b is ring-type, by making cutting tool 21a, 21b move the distance that is equivalent to radius with respect to finishing board 51a, 51b, just can make cutting tool 21a, 21b and abradant surface 53a, 53b become noncontact, the distance that cutting tool 21a, 21b are moved be equivalent to diameter is carried out straight finishing.And even make cutting tool 21a, 21b move the distance that is equivalent to diameter, but owing to be formed with peristome 54a, 54b at central axis B, therefore, cutting tool 21a, 21b can Multiple through then out abradant surface 53a, 53b.Thereby, can improve the durability of finishing board 51a, 51b.And, in machining, needn't use be used to the mobile member that relatively moves that carries out cutting member 20a, 20b and machined object W, just can be on the mobile route of Z-direction (from the situation of vertical beneath Fig. 3) at cutter non-cutting trace zone in place.Thereby, because the machining of machined object W is interrupted, therefore, can realize the raising of productivity ratio.
In addition, in the above-described embodiment, finishing board 51a, 51b constitute a member of the ring-type that is formed with abradant surface 53a, 53b, but the present invention is not limited to this, also can gather into folds with the substrate layer that is used to form trim layer by the trim layer that will comprise abradant surface 53a, 53b and consist of, in the case, also can only trim layer be constituted ring-type.