CN103018484A - Passive SAW accelerometer and acceleration test method - Google Patents
Passive SAW accelerometer and acceleration test method Download PDFInfo
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- CN103018484A CN103018484A CN2012105741010A CN201210574101A CN103018484A CN 103018484 A CN103018484 A CN 103018484A CN 2012105741010 A CN2012105741010 A CN 2012105741010A CN 201210574101 A CN201210574101 A CN 201210574101A CN 103018484 A CN103018484 A CN 103018484A
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Abstract
The invention discloses a passive SAW accelerometer and an acceleration testing method, wherein the accelerometer is composed of a force conversion device 2, an SAW device 1, an antenna 8 and a signal connecting wire 9, the SAW device 1 comprises a transducer 3, a first reflecting grating 4a and a second reflecting grating 4b, and two electrodes of the transducer are connected with the antenna for receiving and transmitting signals through the signal connecting wire; the force conversion device 2 comprises a cantilever beam 5, a mass block 6 and a fixed block 7, when acceleration is input, the mass block generates inertia force and inertia moment to the fixed block, the moment enables the cantilever beam to be in flexural deformation around the fixed block and changes of transmission time of SAW signals on the surface of the substrate, the value of the input acceleration can be obtained by resolving the variation of the transmission time, the receiving and transmitting of the signals and the transmission of energy are completed through an antenna, and the passive detection of the acceleration is realized.
Description
Technical field
The present invention relates to the SAW device as the sensor field of sensitive element, particularly a kind of SAW accelerometer of realizing that passive detects.
Background technology
From nineteen sixty-five White (R. M.White) and Voltmer (F.M.Voltmer) with interdigital transducer (IDT) since piezoelectric material surface inspires surface acoustic wave (SAW), the SAW technology obtains fast development in a plurality of fields.Realized the detection of multiple physical quantity particularly aspect acceleration detection, having obtained good effect based on the sensor of SAW technology.
The end of the year 1988, doctor Hartemann in France Thomson-CSF research centre waits to develop and draws-the SAW accelerometer of pressure type, non-beam type, two non-beam type and dihedral beam type Four types, wherein aspect resolution, except draw-pressure type, all the other all can reach the requirement of system applies.At home, Northwestern Polytechnical University has carried out years of researches in beam type SAW accelerometer field, and the rapid treating technology of temperature drift suppressing, closed-loop control, signal is the emphasis of its research and has breakthrough.
In existing SAW accelerometer, during accelerometer work corresponding power supply need to be arranged, increased cost and volume, also be not suitable in long-life applications; Secondly, the accelerometer need of work has external circuit, has objectively also increased cost and volume, is unfavorable for the microminiaturization of device; In addition, carry out the signal transmission by signal wire between signal processing terminal and the accelerometer, occasion large in some distances and that accelerometer is layouted more needs very long signal wire could satisfy request for utilization, has increased the complicacy that detects.
Summary of the invention
In view of this, technical matters to be solved by this invention provides a kind of simple in structure and can realize the SAW accelerometer that passive detects.
One of purpose of the present invention is to propose a kind of passive SAW acceleration; Two of purpose of the present invention is to propose this passive SAW accelerometer of a kind of utilization to carry out the acceleration test method.
One of purpose of the present invention is achieved through the following technical solutions:
Passive SAW accelerometer provided by the invention comprises shell, is arranged at on-chip power conversion device and SAW device in the shell;
Described SAW device comprises transducer and is used for that reflection is sent from transducer and along the second reflecting grating of substrate surface transmitting signal;
Described transducer is provided with the electrode for input/output signal;
Described power conversion device comprises semi-girder, mass and the fixed block that is fixedly connected with shell;
Described fixed block is connected with semi-girder, and described semi-girder is connected with mass;
Zone between described the second reflecting grating and the transducer is positioned at the semi-girder upper surface.
Further, described power conversion device also comprises signal connecting line and is used for the antenna of signal transmitting and receiving that the electrode of described transducer links to each other with antenna by signal connecting line.
Further, described SAW device also comprises the first reflecting grating, and the zone between described the first reflecting grating and the transducer is positioned at the fixed block upper surface, and described the first reflecting grating and the second reflecting grating are symmetrical about transducer.
Further, described SAW device is resonator type structure or delaying type SAW device, and the first reflecting grating is positioned at the upper surface of semi-girder.
Further, the thickness of described semi-girder, fixed block is identical, and mass, semi-girder bond together after by discrete making.
Further, described SAW device also comprises the 3rd reflecting grating of the upper surface that is arranged at fixed block, and described the 3rd reflecting grating and the first reflecting grating are positioned at the transducer homonymy, and separates fully without stack in short transverse.
Further, described substrate is quartz and/or lithium niobate material.
Two of purpose of the present invention is achieved through the following technical solutions:
Provided by the inventionly utilize described passive SAW accelerometer to carry out the acceleration test method, may further comprise the steps:
S1: obtain the signal propagation time t between transducer and the second reflecting grating
2
S2: the change amount △ t that calculates signal propagation time by the second reflecting grating nominal time
2
S3: according to travel-time change amount △ t
2Calculate the value of input acceleration with the acceleration function relation.
Further, the described value that calculates input acceleration also comprises following correction step:
S31: obtain the travel-time t between transducer and the first reflecting grating
1
S32: by the first reflecting grating travel-time t
1And nominal time calculating travel-time change amount △ t
1
S33: according to the change amount △ t in travel-time
1With the funtcional relationship of temperature and the change amount △ t in travel-time
2Calculate the input acceleration value with the acceleration function relation:
△t 1 =f 1 （
T），
△t 2 =f 2 （
a，T）；
Wherein, described funtcional relationship f
1And f
2By demarcating in advance the function expression that obtains.
Further, the described value that calculates input acceleration also comprises following correction step:
S34: obtain transducer respectively and the first reflecting grating, the second reflecting grating, the 3rd reflecting grating between transmission time be respectively
t 1 ,
t 2 ,
t 3
S35: by the first reflecting grating transmission time
t 1 , the second reflecting grating transmission time
t 2 , the 3rd reflecting grating transmission time
t 3 And the nominal time calculate respectively travel-time change amount
△ t 1 , △ t 2 , △ t 3
S36: obtain passive SAW accelerometer to the transmission range of terminal
S
S37: by travel-time change amount
△ t 1 , △ t 2 , △ t 3 With temperature
T, input acceleration
a, accelerometer is to the transmission range of terminal
SBetween acceleration function relation calculate the input acceleration value:
△t 1 =f 1 （
T，S）
△t 2 =f 2 （
T，S）
△t 3 =f 3 （
a，T，S）
Wherein, described acceleration function relation
f 1 ,
f 2 And
f 3 By to temperature
T, input acceleration
a, accelerometer is to the transmission range of terminal
SThree parameters are demarcated the function expression that obtains in advance.
The invention has the advantages that: the present invention adopts power conversion device, SAW device, antenna and signal connecting line to consist of passive SAW acceleration, fixed block and shell by power conversion device are fixed together, when constant and sensitive axes direction has acceleration a input when external environment condition, the mass of power conversion device produce inertial force so that its semi-girder around the fixed block flexural buckling, the semi-girder surface produces corresponding strain, propagation distance and the travel-time t of SAW between velocity of propagation, transducer and second reflecting grating on semi-girder surface
2All change, by analyzing the change amount △ t in travel-time
2Can calculate the value of input acceleration; Do not produce strain and the fixed block lower surface is fixed in its upper surface of device outer case, namely the distance between transducer and the first reflecting grating is constant, propagation distance and the travel-time t of SAW between velocity of propagation, transducer and first reflecting grating on semi-girder surface
1All constant; If ambient temperature T changes and acceleration a when input, the travel-time t of SAW between transducer and the second reflecting grating is arranged
2, the travel-time t between transducer and the first reflecting grating
1All change, and change amount △ t
1With △ t
2Satisfy funtcional relationship: △ t
1=f
1(T), △ t
2=f
2(a, T) can obtain function f by demarcating in advance
1And f
2, two functions are carried out the value a that data combination can draw input acceleration, can carry out establishment to the interference of temperature signal by this kind method, improve stability and the precision of output.And the transmitting-receiving of signal is all finished by antenna, has realized that the passive of amount of acceleration detects.
Overcome weak point of the prior art, be in particular in: at first active accelerated degree meter needs Power supply to work, and has shortened the serviceable life of whole device, is not suitable for the application scenario of long-life work; Secondly the existence of active SAW accelerometer power supply and transducer excitation chain has also increased volume and the cost of device, is unfavorable for further microminiaturization and the cost degradation of device; In addition, the output signal of active SAW accelerometer via signal wire after the arriving signal processing terminal, reach more greatly the accelerometer more application scenario of layouting in some distances, signal wire has too much increased the complicacy that connects up in the testing process, has increased the cost that engineering is used.
Simultaneously, this passive SAW acceleration concrete following advantage also:
One, accelerometer device inside are not subjected to the restriction of electric quantity of power supply serviceable life without power supply, the raising serviceable life that relatively active accelerated degree meter can be by a relatively large margin;
Its two, accelerometer device inside need not power supply and transducer excitation chain, cost is low, volume is little, can realize the microminiaturization of device;
Its three, the output of accelerometer signal realizes by the mode of wireless transmission, has saved tediously long signal wire, the wiring complicacy when greatly having reduced the multiple spot acceleration detection.
Description of drawings
In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention is described in further detail below in conjunction with accompanying drawing, wherein:
Fig. 1 is the passive SAW accelerometer synoptic diagram that uses embodiment of the present invention 1, and wherein the SAW device is that delaying type structure and left end are a reflecting grating;
Fig. 2 is the passive SAW accelerometer synoptic diagram that uses embodiment of the present invention 2, and wherein the SAW device is the resonator type structure;
Fig. 3 is the passive SAW accelerometer synoptic diagram that uses embodiment of the present invention 3, and wherein the SAW device is that delaying type structure and left end are two reflecting gratings;
Fig. 4 is an embodiment synoptic diagram that uses power conversion device of the present invention.
Embodiment
Below with reference to accompanying drawing, the preferred embodiments of the present invention are described in detail; Should be appreciated that preferred embodiment only for the present invention is described, rather than in order to limit protection scope of the present invention.
Fig. 1 is the passive SAW accelerometer synoptic diagram that uses embodiment of the present invention 1, wherein the SAW device is that delaying type structure and left end are a reflecting grating, as shown in the figure: passive SAW accelerometer provided by the invention comprises shell, is arranged at on-chip power conversion device and SAW device in the shell;
Described SAW device comprises transducer and is used for that reflection is sent from transducer and along the second reflecting grating of substrate surface transmitting signal;
Described transducer is provided with the electrode for input/output signal;
Described power conversion device comprises semi-girder, mass and the fixed block that is fixedly connected with shell;
Described fixed block is connected with semi-girder, and described semi-girder is connected with mass;
Zone between described the second reflecting grating and the transducer is positioned at the semi-girder upper surface.
As another preferred version of the embodiment of the invention, also comprise signal connecting line and be used for the antenna of signal transmitting and receiving that the electrode of described transducer links to each other with antenna by signal connecting line.
As another preferred version of the embodiment of the invention, described SAW device also comprises the first reflecting grating, and the zone between described the first reflecting grating and the transducer is positioned at the fixed block upper surface, and described the first reflecting grating and the second reflecting grating are symmetrical about transducer.
As another preferred version of the embodiment of the invention, described SAW device is resonator type structure or delaying type SAW device, and the first reflecting grating is positioned at the upper surface of semi-girder.
As another preferred version of the embodiment of the invention, the thickness of described semi-girder, fixed block is identical, and mass, semi-girder bond together after by discrete making.
Another preferred version as the embodiment of the invention, described SAW device also comprises the 3rd reflecting grating of the upper surface that is arranged at fixed block, described the 3rd reflecting grating and the first reflecting grating are positioned at the transducer homonymy, and separate fully without stack in short transverse, namely two reflecting gratings will separate at the semi-girder Width, and purpose is that reflected signal does not have interference.
As another preferred version of the embodiment of the invention, described substrate is quartz and/or lithium niobate material.
The embodiment of the invention a kind of method of utilizing this passive SAW accelerometer to carry out acceleration test also is provided, may further comprise the steps:
S1: obtain the signal propagation time t between transducer and the second reflecting grating
2
S2: the change amount △ t that calculates signal propagation time by the second reflecting grating nominal time
2
S3: according to travel-time change amount △ t
2Calculate the value of input acceleration with the acceleration function relation.
The described value that calculates input acceleration also comprises following correction step:
S31: obtain the travel-time t between transducer and the first reflecting grating
1
S32: by the first reflecting grating travel-time t
1And nominal time calculating travel-time change amount △ t
1
S33: according to the change amount △ t in travel-time
1With the funtcional relationship of temperature and the change amount △ t in travel-time
2Calculate the input acceleration value with the acceleration function relation:
△t 1 =f 1 （
T），
△t 2 =f 2 （
a，T）；
Wherein, described funtcional relationship f
1And f
2By demarcating in advance the function expression that obtains, adopt two-dimentional standardization can obtain this function expression.
The described value that calculates input acceleration also comprises following correction step:
S34: obtain transducer respectively and the first reflecting grating, the second reflecting grating, the 3rd reflecting grating between transmission time be respectively
t 1 ,
t 2 ,
t 3
S35: by the first reflecting grating transmission time
t 1 , the second reflecting grating transmission time
t 2 , the 3rd reflecting grating transmission time
t 3 And the nominal time calculate respectively travel-time change amount
△ t 1 , △ t 2 , △ t 3
S36: obtain passive SAW accelerometer to the transmission range of terminal
S
S37: by travel-time change amount
△ t 1 , △ t 2 , △ t 3 With temperature
T, input acceleration
a, accelerometer is to the transmission range of terminal
SBetween acceleration function relation calculate the input acceleration value:
△t 1 =f 1 （
T，S）
△t 2 =f 2 （
T，S）
△t 3 =f 3 （
a，T，S）
Wherein, described acceleration function relation
f 1 ,
f 2 And
f 3 By to temperature
T, input acceleration
a, accelerometer is to the transmission range of terminal
SThree parameters are demarcated the function expression that obtains in advance, adopt two-dimentional standardization can obtain this function expression.
Fig. 4 is an embodiment synoptic diagram that uses power conversion device of the present invention, the fixed block 7 of the present embodiment is identical with semi-girder 5 thickness, can obtain by scribing after making the SAW device at substrate surface, mass 6 and semi-girder 5 are secured to together through bonding mode, and power conversion device 2 has advantage simple in structure and that be easy to process in the present embodiment.
Fig. 2 is the passive SAW accelerometer synoptic diagram that uses embodiment of the present invention 2, and wherein the SAW device is the resonator type structure, and the difference of present embodiment and embodiment 1 only is:
In this embodiment, the first reflecting grating 4a and and transducer 3 between the zone all be positioned at the upper surface of semi-girder 5, and distribute about transducer 3 left-right symmetric with the second reflecting grating 4b, transducer 3 and the first reflecting grating 4a, the second reflecting grating 4b consist of resonator type SAW device 1. acceleration
aDuring input, semi-girder 5 surfaces produce strain, and the width of the interdigital electrode of transducer 3, spacing change, and SAW also changes in the velocity of propagation on semi-girder 5 surfaces, and then can calculate input acceleration
a
Fig. 3 is the passive SAW accelerometer synoptic diagram that uses embodiment of the present invention 3, and wherein the SAW device is that delaying type structure and left end are two reflecting gratings; The difference of present embodiment and embodiment 1 only is:
In this embodiment, transducer 3 left ends are made the first reflecting grating 4a, the second reflecting grating 4b, right-hand member is made the 3rd reflecting grating 4c, in the acceleration analysis of reality, the transmission time of SAW between transducer 3 and the first reflecting grating 4a, transducer 3 and the second reflecting grating 4b, transducer 3 and the 3rd reflecting grating 4c not only is subject to temperature
TAnd input acceleration
aImpact, it also can be subject to transmission range in being wirelessly transmitted to the terminal processing system process
SImpact, establish three transmission times that terminal obtains to be respectively
t 1 ,
t 2 ,
t 3 , three and temperature
T, input acceleration
a, accelerometer is to the transmission range of terminal
SFuntcional relationship can be expressed as
△t 1 =f 1 （
T，S）
△t 2 =f 2 （
T，S）
△t 3 =f 3 （
a，T，S）
By to temperature
T, input acceleration
a, accelerometer is to the transmission range of terminal
SThree parameters are demarcated in advance and can be obtained function
f 1 ,
f 2 And
f 3 Definite expression formula, adopt two-dimentional standardization can obtain this function expression, above-mentioned three functions are carried out the value that data combination can draw input acceleration
a, with respect to the embodiment among Fig. 1, this embodiment not only can be carried out establishment to the interference of temperature signal, also can eliminate the detection error that the difference of transmission range is brought, and accuracy of detection is higher.
The above is the preferred embodiments of the present invention only, is not limited to the present invention, and obviously, those skilled in the art can carry out various changes and modification and not break away from the spirit and scope of the present invention the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.
Claims (10)
1. passive SAW accelerometer comprises shell, it is characterized in that: also comprise the on-chip power conversion device and the SAW device that are arranged in the shell;
Described SAW device comprises transducer and is used for that reflection is sent from transducer and along the second reflecting grating of substrate surface transmitting signal;
Described transducer is provided with the electrode for input/output signal;
Described power conversion device comprises semi-girder, mass and the fixed block that is fixedly connected with shell;
Described fixed block is connected with semi-girder, and described semi-girder is connected with mass;
Zone between described the second reflecting grating and the transducer is positioned at the semi-girder upper surface.
2. passive SAW accelerometer according to claim 1 is characterized in that: also comprise signal connecting line and be used for the antenna of signal transmitting and receiving, the electrode of described transducer links to each other with antenna by signal connecting line.
3. passive SAW accelerometer according to claim 1, it is characterized in that: described SAW device also comprises the first reflecting grating, zone between described the first reflecting grating and the transducer is positioned at the fixed block upper surface, and described the first reflecting grating and the second reflecting grating are symmetrical about transducer.
4. passive SAW accelerometer according to claim 1, it is characterized in that: described SAW device is resonator type structure or delaying type SAW device, and the first reflecting grating is positioned at the upper surface of semi-girder.
5. passive SAW accelerometer according to claim 1, it is characterized in that: the thickness of described semi-girder, fixed block is identical, and mass, semi-girder bond together after by discrete making.
6. passive SAW accelerometer according to claim 1, it is characterized in that: described SAW device also comprises the 3rd reflecting grating of the upper surface that is arranged at fixed block, described the 3rd reflecting grating and the first reflecting grating are positioned at the transducer homonymy, and separate fully without stack in short transverse.
7. passive SAW accelerometer according to claim 1, it is characterized in that: described substrate is quartz and/or lithium niobate material.
8. utilize passive SAW accelerometer claimed in claim 1 to carry out the acceleration test method, it is characterized in that: may further comprise the steps:
S1: obtain the signal propagation time t between transducer and the second reflecting grating
2
S2: the change amount △ t that calculates signal propagation time by the second reflecting grating nominal time
2
S3: according to travel-time change amount △ t
2Calculate the value of input acceleration with the acceleration function relation.
9. acceleration test method according to claim 8, it is characterized in that: the described value that calculates input acceleration also comprises following correction step:
S31: obtain the travel-time t between transducer and the first reflecting grating
1
S32: by the first reflecting grating travel-time t
1And nominal time calculating travel-time change amount △ t
1
S33: according to the change amount △ t in travel-time
1With the funtcional relationship of temperature and the change amount △ t in travel-time
2Calculate the input acceleration value with the acceleration function relation:
△t 1 =f 1 （
T），
△t 2 =f 2 （
a，T）；
Wherein, described funtcional relationship f
1And f
2By demarcating in advance the function expression that obtains.
10. acceleration test method according to claim 8, it is characterized in that: the described value that calculates input acceleration also comprises following correction step:
S34: obtain transducer respectively and the first reflecting grating, the second reflecting grating, the 3rd reflecting grating between transmission time be respectively
t 1 ,
t 2 ,
t 3
S35: by the first reflecting grating transmission time
t 1 , the second reflecting grating transmission time
t 2 , the 3rd reflecting grating transmission time
t 3 And the nominal time calculate respectively travel-time change amount
△ t 1 , △ t 2 , △ t 3
S36: obtain passive SAW accelerometer to the transmission range of terminal
S
S37: by travel-time change amount
△ t 1 , △ t 2 , △ t 3 With temperature
T, input acceleration
a, accelerometer is to the transmission range of terminal
SBetween acceleration function relation calculate the input acceleration value:
△t 1 =f 1 （
T，S）
△t 2 =f 2 （
T，S）
△t 3 =f 3 （
a，T，S）
Wherein, described acceleration function relation
f 1 ,
f 2 And
f 3 By to temperature
T, input acceleration
a, accelerometer is to the transmission range of terminal
SThree parameters are demarcated the function expression that obtains in advance.
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|---|---|---|---|
| CN2012105741010A CN103018484A (en) | 2012-12-26 | 2012-12-26 | Passive SAW accelerometer and acceleration test method |
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|---|---|---|---|
| CN2012105741010A CN103018484A (en) | 2012-12-26 | 2012-12-26 | Passive SAW accelerometer and acceleration test method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106771356A (en) * | 2017-01-23 | 2017-05-31 | 扬州大学 | A kind of SAW resonator type arrangements of accelerometers and its measuring method |
| CN106918719A (en) * | 2015-12-28 | 2017-07-04 | 软控股份有限公司 | Less radio-frequency acceleration transducer based on surface acoustic wave techniques |
| CN106918718A (en) * | 2015-12-28 | 2017-07-04 | 软控股份有限公司 | The acceleration detection method of surface acoustic wave acceleration transducer, apparatus and system |
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| US20060283247A1 (en) * | 2005-06-16 | 2006-12-21 | Honeywell International, Inc. | Passive and wireless acoustic wave accelerometer |
| CN101008586A (en) * | 2007-01-29 | 2007-08-01 | 北京交通大学 | Wireless accessed surface acoustic wave sensors |
| CN101326111A (en) * | 2005-10-14 | 2008-12-17 | R·P·舍勒科技公司 | Child resistant and senior friendly medicament storage and distribution package |
| CN101793531A (en) * | 2008-12-23 | 2010-08-04 | 霍尼韦尔国际公司 | The micro-sensor apparatus and the method based on surface acoustic wave of while monitoring multiple conditions |
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| US4306456A (en) * | 1979-03-30 | 1981-12-22 | Thomson-Csf | Elastic wave accelerometer |
| US20060283247A1 (en) * | 2005-06-16 | 2006-12-21 | Honeywell International, Inc. | Passive and wireless acoustic wave accelerometer |
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| CN106918719A (en) * | 2015-12-28 | 2017-07-04 | 软控股份有限公司 | Less radio-frequency acceleration transducer based on surface acoustic wave techniques |
| CN106918718A (en) * | 2015-12-28 | 2017-07-04 | 软控股份有限公司 | The acceleration detection method of surface acoustic wave acceleration transducer, apparatus and system |
| CN106771356A (en) * | 2017-01-23 | 2017-05-31 | 扬州大学 | A kind of SAW resonator type arrangements of accelerometers and its measuring method |
| CN106771356B (en) * | 2017-01-23 | 2019-05-21 | 扬州大学 | A kind of SAW resonator type arrangements of accelerometers and its measurement method |
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Application publication date: 20130403 |