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CN103017890B - Introduced capacitive device for measuring horizontal ground micro-vibration - Google Patents

Introduced capacitive device for measuring horizontal ground micro-vibration Download PDF

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CN103017890B
CN103017890B CN201210556993.1A CN201210556993A CN103017890B CN 103017890 B CN103017890 B CN 103017890B CN 201210556993 A CN201210556993 A CN 201210556993A CN 103017890 B CN103017890 B CN 103017890B
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vibration
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external
steel
column
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CN103017890A (en
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练继建
于通顺
张龑
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Tianjin University
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Abstract

本发明公开了一种外引电容式测量地面微量水平振动的装置,由标准信号发生器(11)、外引电容式传感器(12)、负反馈运算放大器(13)和低通滤波器及显示系统(14)组成;所述外引电容式传感器包括地面上设置的外引铜柱(5),及其顶端设置的电容片(4),在铜柱的外围、方圆2m2处设置有隔振沟(8),隔振沟的外侧设置有钢柱A(6)和钢柱B(10),两钢柱的顶端设置有钢梁(7),钢梁的下面设置有测量电极(1)、屏蔽电极(2)和屏蔽电极壳(3),隔振沟(8)的封闭范围内具有激励源(9);本发明结构简单、使用方便,便于两个垂直方向的水平振动的同时测量,可专门用于精确测试地面微量的水平振动。

The invention discloses an external capacitive measuring device for ground trace horizontal vibration, which consists of a standard signal generator (11), an external capacitive sensor (12), a negative feedback operational amplifier (13), a low-pass filter and a display system (14); the external capacitive sensor includes an external copper column (5) set on the ground, and a capacitive sheet (4) set on the top thereof, and a spacer is set on the periphery of the copper column at a radius of 2m2 . Vibration ditch (8), steel column A (6) and steel column B (10) are set on the outside of the vibration isolation ditch, steel beams (7) are set on the top of the two steel columns, and measuring electrodes (1 ), the shielding electrode (2) and the shielding electrode shell (3), there is an excitation source (9) within the closed range of the vibration isolation ditch (8); the present invention is simple in structure, easy to use, and is convenient for horizontal vibration in two vertical directions at the same time It can be specially used to accurately test the trace horizontal vibration of the ground.

Description

外引电容式测量地面微量水平振动的装置A device for measuring ground micro-horizontal vibration by external capacitance

技术领域technical field

本发明涉及一种水平振动的测量装置,特别涉及一种外引电容式位移传感器及振动测试,适用于地面微量振动的测量。The invention relates to a horizontal vibration measuring device, in particular to an external capacitive displacement sensor and a vibration test, which is suitable for the measurement of ground trace vibrations.

背景技术Background technique

高坝泄流结构在长期泄流荷载作用下极易发生疲劳或振动破坏,严重影响工程的正常运行和效益的发挥。因此必须寻找有效的检测手段,以快速、准确地发现水工结构中存在的隐患及病害,有效预报其安全状况,对其运行的可靠性进行评估。因此,如何精确、便捷地获取结构的振动信息是水工结构运行状态监测的重要前提。现有的振动测试手段均是对振动结构安装位移或加速度传感器,以获取结构的振动参数。有些大体积混凝土微量振动时,水平向振动不能用位移或加速度传感器进行测量。The discharge structure of high dams is prone to fatigue or vibration damage under the long-term discharge load, which seriously affects the normal operation and benefit of the project. Therefore, effective detection methods must be found to quickly and accurately discover hidden dangers and diseases in hydraulic structures, effectively predict their safety conditions, and evaluate their operational reliability. Therefore, how to obtain the vibration information of the structure accurately and conveniently is an important prerequisite for monitoring the operation status of hydraulic structures. The existing vibration testing means are to install displacement or acceleration sensors on the vibrating structure to obtain the vibration parameters of the structure. When some mass concrete vibrates slightly, the horizontal vibration cannot be measured by displacement or acceleration sensors.

在结构的微量位移测试中存在一种非接触式电容型位移传感器,这种传感器一般结构包括测量电极、屏蔽保护电极两部分组成。其进行位移测量的原理方法和仪器也很多。如:电容运算法、电容谐振法等等,通过变换将被测位移转换为电量输出。以电容运算法测量仪为例:该仪器的测量原理是以电容运算法的电压输出其中,Vb为仪器电路的标准信号电压;Cb为仪器电路中的标准电容。由公式可以看出其电压输出与被测位移成正比。非接触式电容型位移传感器具有很多优良的特性,应用十分广泛,但不适用于大体积物体振动的测试。There is a non-contact capacitive displacement sensor in the micro-displacement test of the structure. The general structure of this sensor includes two parts: the measuring electrode and the shielding protection electrode. There are also many principles, methods and instruments for displacement measurement. Such as: capacitance calculation method, capacitance resonance method, etc., the measured displacement is converted into electrical output through transformation. Take the capacitance algorithm measuring instrument as an example: the measurement principle of the instrument is to output the voltage of the capacitance algorithm Among them, V b is the standard signal voltage of the instrument circuit; C b is the standard capacitance in the instrument circuit. It can be seen from the formula that its voltage output is proportional to the measured displacement. The non-contact capacitive displacement sensor has many excellent characteristics and is widely used, but it is not suitable for the vibration test of large-volume objects.

发明内容Contents of the invention

本发明的目的,是针对大坝安全监测中存在的大体积混凝土微量水平振动难以精确测试的的不足,提供一种制作简便,能够便捷、精确地测量水工结构的微量振动的外引电容式测量地面水平振动的装置。The object of the present invention is to provide an external capacitive type that is easy to manufacture and can measure the micro-vibration of hydraulic structures conveniently and accurately, aiming at the problem that the micro-level vibration of large-volume concrete is difficult to accurately test in the dam safety monitoring. A device for measuring horizontal vibrations of the ground.

本发明通过如下技术方案予以实现。The present invention is realized through the following technical solutions.

一种外引电容式测量地面微量水平振动的装置,由标准信号发生器11、外引电容式传感器12、负反馈运算放大器13和低通滤波器及显示系统14组成;所述外引电容式传感器12包括测量电极和屏蔽电极,其特征在于,在振动地面上设置有外引铜柱5,在外引铜柱5顶端两个相互垂直的竖直面分别设置有电容片4,各自作为电容的一个电极;在外引铜柱5的外围、方圆2m2的位置设置有隔振沟8,其深度为1m,宽度为0.2m;所述隔振沟8的外侧的对称位置设置有钢柱A6和钢柱B10,两钢柱的顶端设置有钢梁7,在钢梁7的下面设置有测量电极1、屏蔽电极2和屏蔽电极壳3;屏蔽电极2呈90°对折形状,屏蔽电极壳3的两端垂直位置设置有一对测量电极1,所述一对测量电极1与两个电容片4相对应;在隔振沟8的封闭范围内具有激励源9;所述外引电容式传感器12的前端与标准信号发生器11相连接,外引电容式传感器12的后端依次连接负反馈运算放大器13和低通滤波器及显示系统14。An external capacitive measuring device for ground micro-horizontal vibration is composed of a standard signal generator 11, an external capacitive sensor 12, a negative feedback operational amplifier 13, a low-pass filter, and a display system 14; the external capacitive The sensor 12 includes a measuring electrode and a shielding electrode. It is characterized in that an external lead copper column 5 is arranged on the vibrating ground, and capacitor plates 4 are respectively arranged on two vertical surfaces perpendicular to each other on the top of the external lead copper column 5 , each serving as a capacitor. An electrode; a vibration isolation ditch 8 is provided at the periphery of the outer lead copper column 5, at a position of 2m 2 , the depth is 1m, and the width is 0.2m; the symmetrical position of the outer side of the vibration isolation ditch 8 is provided with steel columns A6 and Steel column B10, steel beams 7 are arranged on the top of the two steel columns, measuring electrodes 1, shielding electrodes 2 and shielding electrode shells 3 are arranged under the steel beams 7; A pair of measuring electrodes 1 are arranged at the vertical positions at both ends, and the pair of measuring electrodes 1 corresponds to two capacitive sheets 4; an excitation source 9 is provided in the closed range of the vibration isolation ditch 8; The front end is connected with the standard signal generator 11, and the back end of the external capacitive sensor 12 is connected with a negative feedback operational amplifier 13, a low-pass filter and a display system 14 in sequence.

所述隔振沟8也可以是封闭的任意形状。The vibration isolation groove 8 can also be closed in any shape.

所述外引铜柱5的为高度5cm、直径0.5cm的圆柱体。The external copper column 5 is a cylinder with a height of 5 cm and a diameter of 0.5 cm.

所述钢柱A6和钢柱B10为高度10cm、直径1cm的圆柱体。The steel column A6 and the steel column B10 are cylinders with a height of 10 cm and a diameter of 1 cm.

本发明的有益效果是,不仅具备现有的电容型非接触式位移测量方法所具有的无接触测量误差、摩擦热噪声和热损耗;还具备测量速度快、频率响应好、信噪比高和输入能量低的特点。此外本发明结构简单、使用方便,改进了普通电容型位移传感器只能测试一个方向位移的缺点,可以同时测试水平面上两个相互垂直方向的振动,因此可专门用于现有传感器无法精确测试的地面微量的水平振动。The beneficial effect of the present invention is that it not only has the non-contact measurement error, friction thermal noise and heat loss of the existing capacitive non-contact displacement measurement method; it also has the advantages of fast measurement speed, good frequency response, high signal-to-noise ratio and The characteristics of low input energy. In addition, the present invention is simple in structure and easy to use, improves the shortcoming that ordinary capacitive displacement sensors can only test displacement in one direction, and can test vibrations in two mutually perpendicular directions on the horizontal plane at the same time, so it can be specially used for existing sensors that cannot accurately test Tiny horizontal vibrations on the ground.

附图说明Description of drawings

图1为本发明外引电容式传感器的正视图;Fig. 1 is the front view of the external capacitive sensor of the present invention;

图2为图1的外引电容式传感器的俯视图;Fig. 2 is the top view of the external capacitive sensor of Fig. 1;

图3为一种外引电容式测量地面微量水平振动的装置的结构框图。Fig. 3 is a structural block diagram of an external capacitive measuring device for ground trace horizontal vibration.

本发明的附图标记如下:The reference signs of the present invention are as follows:

1———测量电极                 2———屏蔽电极1——Measuring electrode 2——Shield electrode

3———屏蔽电极壳               4———电容片3——shielding electrode shell 4——capacitor sheet

5———外引铜柱                 6———钢柱A5——External copper column 6——Steel column A

7———钢梁                     8———隔振沟7——Steel Beam 8——Vibration Isolation Ditch

9———激励源                   10———钢柱B9——Incentive source 10——Steel column B

11———标准信号发生器          12———外引电容式传感器11———standard signal generator 12———external capacitive sensor

13———负反馈运算放大器        14———低通滤波器及显示系统13——Negative feedback operational amplifier 14——Low-pass filter and display system

具体实施方式Detailed ways

本发明充分利用了结构振动的特点,对于竖直固定在地面上的小质量柱体,当地面的振动频率远小于柱体的自振频率时,柱体的振动情况与地面的振动完全一致。此外本发明的测试装置采用电容式传感器,可以同时测试水平面上两个垂直方向的振动。The invention makes full use of the characteristics of structural vibration. For a small-mass column fixed vertically on the ground, when the vibration frequency of the ground is much lower than the natural frequency of the column, the vibration of the column is completely consistent with the vibration of the ground. In addition, the test device of the present invention adopts a capacitive sensor, which can simultaneously test vibrations in two vertical directions on the horizontal plane.

外引电容式测量地面微量水平振动装置的工作原理是,电压输出通过变换将被测位移转换为电压输出,电压输出与被测位移成正比。竖直固定在地面上的铜柱的振动情况与地面的振动完全一致。因此,通过电压的变化与地面位移成正比,通过电压的输出可以计算出地面位移的变化。The working principle of the external capacitive measurement device for measuring ground trace level vibration is that the voltage output The measured displacement is converted into a voltage output through transformation, and the voltage output is proportional to the measured displacement. The vibration of the copper column fixed vertically on the ground is exactly the same as the vibration of the ground. Therefore, the change of the passing voltage is proportional to the ground displacement, and the change of the ground displacement can be calculated by the output of the voltage.

如图2所示,本发明由标准信号发生器11、外引电容式传感器12、负反馈运算放大器13和低通滤波器及显示系统14组成。As shown in FIG. 2 , the present invention consists of a standard signal generator 11 , an external capacitive sensor 12 , a negative feedback operational amplifier 13 , a low-pass filter and a display system 14 .

图1是本发明外引电容式传感器的结构示意图,图2是图1的俯视图。由图中可以看出,在振动地面上设置有外引铜柱5,在外引铜柱5顶端两个相互垂直的竖直面分别设置有电容片4,各自作为电容的一个电极;在外引铜柱的外围、方圆2m2的位置设置有隔振沟8,隔振沟8为封闭的圆形结构,也可以是封闭的任意形状,其深度为1m,宽度为0.2m;所述隔振沟8的外侧的对称位置设置有钢柱A6和钢柱B10,其高度为10cm、直径1cm的圆柱体;两钢柱的顶端设置有钢梁7,在钢梁7的下面设置有测量电极1、屏蔽电极2和屏蔽电极壳3;屏蔽电极2呈90°对折形状,屏蔽电极壳3的两端垂直位置设置有一对测量电极1,所述一对测量电极1与两个电容片4相对应;在隔振沟8的封闭范围内还设置有激励源9;所述外引电容式传感器12的前端与标准信号发生器11相连接,外引电容式传感器12的后端依次连接负反馈运算放大器13和低通滤波器及显示系统14。FIG. 1 is a schematic structural diagram of an external capacitive sensor of the present invention, and FIG. 2 is a top view of FIG. 1 . As can be seen from the figure, an external lead copper column 5 is arranged on the vibrating ground, and a capacitor sheet 4 is respectively arranged on two mutually perpendicular vertical surfaces at the top of the external lead copper column 5, each serving as an electrode of a capacitor; The periphery of the column, the position of square circle 2m 2 is provided with vibration isolation ditch 8, vibration isolation ditch 8 is a closed circular structure, also can be closed arbitrary shape, its depth is 1m, and width is 0.2m; Said vibration isolation ditch A steel column A6 and a steel column B10 are arranged at the symmetrical position of the outer side of 8, which are cylinders with a height of 10 cm and a diameter of 1 cm; a steel beam 7 is arranged on the top of the two steel columns, and a measuring electrode 1, The shielding electrode 2 and the shielding electrode shell 3; the shielding electrode 2 is in a 90° double-fold shape, and a pair of measuring electrodes 1 are arranged at vertical positions at both ends of the shielding electrode shell 3, and the pair of measuring electrodes 1 correspond to two capacitor sheets 4; Also be provided with excitation source 9 in the closed range of vibration isolation ditch 8; The front end of described externally drawn capacitive sensor 12 is connected with standard signal generator 11, and the rear end of externally drawn capacitive sensor 12 is connected with negative feedback operational amplifier successively 13 and low pass filter and display system 14.

下面以地面存在振幅为0.1μm、频率为1HZ的正弦振动为例说明本发明的使用情况。The use of the present invention will be described below by taking the sinusoidal vibration with an amplitude of 0.1 μm and a frequency of 1 Hz on the ground as an example.

将高度为5cm,直径为0.5cm的外引铜柱5竖直固定于地面上,此铜柱自振频率很高,达到几十赫兹以上,远大于地面的振动频率,因此任一时刻铜柱的运动参数(位移、加速度等)与地面的运动参数几乎完全相同。所以地面的振动可以通过测量铜柱的振动得出。选取铜柱时一定要选取自振频率大的铜柱,铜柱的自振频率越大,铜柱反映地面振动的精度越高。在外引铜柱顶端两个相互垂直的竖直面上固定有电容片,各自作为电容传感器的一个极。在激励源9的作用下地面发生振动,振动地面周围有方圆2m2、宽0.2m、深1m的隔振沟8,避免了周围大地振动对激励源作用下地面振动的干扰。钢梁7由竖立在隔振沟8外侧的钢柱A6和钢柱B10支撑,电容型位移传感器12的测量电极1、屏蔽电极2安装在钢梁7上。测量电极1与外引铜柱5上固定的电容片4分别组成电容的两对电极,形成电容传感器。地面发生振动时,打开仪器开关,钢柱的振动导致电容传感器的电极之间距离发生变化,标准信号发生器11产生的信号经过电容型位移传感器发生变化,变化的信号经过负反馈运算放大器13和低通滤波器14后可以在显示系统14中显示出来。Fix the external copper column 5 with a height of 5 cm and a diameter of 0.5 cm vertically on the ground. The natural vibration frequency of this copper column is very high, reaching more than tens of hertz, which is much higher than the vibration frequency of the ground. Therefore, at any time, the copper column The motion parameters (displacement, acceleration, etc.) of the ground are almost identical to those of the ground. So the vibration of the ground can be obtained by measuring the vibration of the copper pillar. When selecting copper pillars, it is necessary to choose copper pillars with high natural vibration frequency. The higher the natural vibration frequency of copper pillars, the higher the accuracy of copper pillars reflecting ground vibration. Capacitive plates are fixed on two vertical surfaces perpendicular to each other on the top of the external lead copper column, each serving as a pole of the capacitive sensor. The ground vibrates under the action of the excitation source 9, and there is a vibration isolation ditch 8 with a radius of 2m 2 , a width of 0.2m, and a depth of 1m around the vibrating ground, which avoids the interference of the surrounding ground vibration on the ground vibration under the action of the excitation source. Steel beam 7 is supported by steel column A6 and steel column B10 erected outside vibration isolation ditch 8 , measuring electrode 1 and shielding electrode 2 of capacitive displacement sensor 12 are installed on steel beam 7 . The measuring electrode 1 and the capacitive sheet 4 fixed on the external copper column 5 form two pairs of electrodes of the capacitance respectively, forming a capacitive sensor. When the ground vibrates, the instrument switch is turned on, the vibration of the steel column causes the distance between the electrodes of the capacitive sensor to change, the signal generated by the standard signal generator 11 changes through the capacitive displacement sensor, and the changed signal passes through the negative feedback operational amplifier 13 and The low-pass filter 14 can then be displayed on the display system 14 .

Claims (3)

1.一种外引电容式测量地面微量水平振动的装置,由标准信号发生器(11)、外引电容式传感器(12)、负反馈运算放大器(13)和低通滤波器及显示系统(14)组成;所述外引电容式传感器(12)包括测量电极和屏蔽电极,其特征在于,在振动地面上设置有外引铜柱(5),在外引铜柱(5)顶端两个相互垂直的竖直面分别设置有电容片(4),各自作为电容的一个电极;在外引铜柱(5)的外围、方圆2m2的位置设置有隔振沟(8),其深度为1m,宽度为0.2m;所述隔振沟(8)的外侧的对称位置设置有钢柱A(6)和钢柱B(10),两钢柱的顶端设置有钢梁(7),在钢梁(7)的下面设置有测量电极(1)、屏蔽电极(2)和屏蔽电极壳(3);屏蔽电极(2)呈90°对折形状,屏蔽电极壳(3)的两端垂直位置设置有一对测量电极(1),所述一对测量电极(1)与两个电容片(4)相对应;在隔振沟(8)的封闭范围内具有激励源(9);所述外引电容式传感器(12)的前端与标准信号发生器(11)相连接,外引电容式传感器(12)的后端依次连接负反馈运算放大器(13)和低通滤波器及显示系统(14);1. A device for externally leading capacitive measurement of ground trace horizontal vibrations, comprising a standard signal generator (11), an externally leading capacitive sensor (12), a negative feedback operational amplifier (13) and a low-pass filter and a display system ( 14) composition; described external lead capacitive sensor (12) comprises measuring electrode and shielding electrode, it is characterized in that, be provided with external lead copper post (5) on vibrating ground, at the external lead copper post (5) top two mutual The vertical vertical planes are respectively provided with capacitor plates (4), which are respectively used as an electrode of the capacitor; a vibration isolation ditch (8) is provided on the periphery of the external lead copper column (5), at a position of 2m2 , and its depth is 1m. The width is 0.2m; a steel column A (6) and a steel column B (10) are arranged at symmetrical positions on the outside of the vibration isolation ditch (8), and a steel beam (7) is arranged on the top of the two steel columns. The measuring electrode (1), shielding electrode (2) and shielding electrode shell (3) are arranged below (7); the shielding electrode (2) is in the shape of 90° folded in half, and the vertical position of both ends of the shielding electrode shell (3) is provided with a For the measuring electrode (1), the pair of measuring electrodes (1) corresponds to the two capacitor sheets (4); an excitation source (9) is provided within the closed range of the vibration isolation ditch (8); the external capacitance The front end of the type sensor (12) is connected with the standard signal generator (11), and the rear end of the external capacitive sensor (12) is connected with a negative feedback operational amplifier (13) and a low-pass filter and a display system (14) successively; 所述隔振沟(8)是封闭的任意形状。The vibration isolation groove (8) is closed in any shape. 2.根据权利要求1的外引电容式测量地面微量水平振动的装置,其特征在于,所述外引铜柱(5)的为高度5cm、直径0.5cm的圆柱体。2. according to the device of the external lead capacitive measurement ground trace horizontal vibration of claim 1, it is characterized in that, described external lead copper post (5) is the cylinder of height 5cm, diameter 0.5cm. 3.根据权利要求1的外引电容式测量地面微量水平振动的装置,其特征在于,所述钢柱A(6)和钢柱B(10)为高度10cm、直径1cm的圆柱体。3. The device for measuring ground micro-horizontal vibrations by external capacitive measurement according to claim 1, characterized in that, said steel column A (6) and steel column B (10) are cylinders with a height of 10cm and a diameter of 1cm.
CN201210556993.1A 2012-12-18 2012-12-18 Introduced capacitive device for measuring horizontal ground micro-vibration Expired - Fee Related CN103017890B (en)

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Citations (3)

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CN201716103U (en) * 2010-06-13 2011-01-19 重庆市电力建设总公司 Vibration detection device for micro-variation capacitance pole tower
CN102798459A (en) * 2012-08-10 2012-11-28 上海卫星工程研究所 Satellite ground micro-vibration test system
CN203241145U (en) * 2012-12-18 2013-10-16 天津大学 Extrinsic capacitance type device for measuring microscale ground horizontal vibration

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WO2006046938A1 (en) * 2004-10-21 2006-05-04 Societe De Technologie Michelin A miniaturized piezoelectric based vibrational energy harvester

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201716103U (en) * 2010-06-13 2011-01-19 重庆市电力建设总公司 Vibration detection device for micro-variation capacitance pole tower
CN102798459A (en) * 2012-08-10 2012-11-28 上海卫星工程研究所 Satellite ground micro-vibration test system
CN203241145U (en) * 2012-12-18 2013-10-16 天津大学 Extrinsic capacitance type device for measuring microscale ground horizontal vibration

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