CN102981234A - Axial adjustment device for optical element - Google Patents

Abstract

The optical element axial adjustment device belongs to the field of deep ultraviolet projection lithography objective lens adjustment and aberration compensation. The device includes a frame, a lens barrel, a bow shrapnel and three drivers. The optical element and the frame are glued together to form a frame The assembly, lens barrel and frame assembly are connected by bow-shaped shrapnel. When the three drivers move forward or backward, they can push the inner ring of the bow-shaped shrapnel to produce axial displacement. Since the inner and outer rings of the bow-shaped shrapnel are connected by a circle of thin shrapnel, the bow shape can be guaranteed. When the inner ring of the shrapnel moves axially, its displacement is uniform along the circumferential direction, and at the same time, it can restrain the eccentricity and tilt errors introduced by the axial movement, so as to ensure that the axial displacement acts on the frame assembly evenly, and finally realize the axial displacement of the optical element. sports.

Description

Optical element axial adjustment device

technical field

The invention belongs to the field of deep ultraviolet projection lithography objective lens adjustment and aberration compensation, and relates to a device that can be used for axial micro-adjustment of optical elements in a lithography projection objective lens system.

Background technique

Projection lithography equipment is the key equipment in the manufacturing process of large-scale integrated circuits. In recent years, with the continuous improvement of the fineness of the line width of integrated circuits, the resolution of projection optical equipment has gradually improved. At present, the ArF excimer laser with a wavelength of 193.368nm Lithography equipment has become the mainstream equipment for integrated circuit manufacturing at 90nm, 65nm and 45nm nodes.

During the assembly process of projection lithography objective lens, in order to obtain good optical performance, various aberrations of the optical system need to be compensated, and accordingly the axial position of some sensitive optical components needs to be adjusted and compensated. At the same time, during the use of the projection lithography objective lens, due to changes in the environment inside the objective lens, changes in processed products, etc., it is also necessary to adjust the axial position of some sensitive optical elements inside the objective lens accordingly.

Contents of the invention

In order to solve the problem of high-precision axial adjustment of the optical element of the lithography projection objective lens, the present invention proposes a micro-adjustment device for the optical element based on a bow-shaped shrapnel, which is especially suitable for the micro-adjustment of the optical element in the deep ultraviolet projection objective lens.

The optical element axial adjustment device includes a mirror frame, a lens barrel, a bow-shaped shrapnel, and three piezoelectric drivers; it is characterized in that the optical element and the mirror frame are glued to form a mirror frame assembly, and the mirror barrel and mirror frame assembly Connected by bow-shaped shrapnel.

The cross-section of the bow-shaped shrapnel is a bow shape with a thin center and thick ends. The inner side of the bow-shaped shrapnel is connected to the frame through a circle of screws, and the outer side of the bow-shaped shrapnel is connected to the lens barrel through a circle of screws.

The driver can provide forward movement and backward movement in the axial direction, and can adopt piezoelectric, hysteresis telescopic and pneumatic driving methods.

The three drivers are evenly distributed at intervals of 120° along the circumference, and are fixed with the lens barrel by screws.

Description of drawings

FIG. 1 is a top view of an optical element axial adjustment device according to the present invention.

Fig. 2 is a bottom view of the optical element axial adjustment device according to the present invention.

Fig. 3 is a cross-sectional view of the optical element axial adjustment device according to the present invention.

Fig. 4 is a mirror frame assembly according to the present invention.

Fig. 5 shows the structure of the arcuate shrapnel according to the present invention.

Fig. 6 is the lens barrel structure of the present invention.

Detailed ways

The present invention will be described in further detail below in conjunction with the accompanying drawings.

As shown in Figures 1 to 6, the optical element axial adjustment device includes a mirror frame 1-2, a lens barrel 2, a bow-shaped shrapnel 3 and three piezoelectric drivers 4; the optical element 1-1 and the mirror frame 1-2 pass through The lens frame assembly 1 is formed by gluing, and the lens barrel 2 and the lens frame assembly 1 are connected by arcuate elastic pieces 3 .

The cross-section of the bow-shaped shrapnel 3 is a bow shape with a thin middle and thick ends. The inner side of the bow-shaped shrapnel 3 is connected with the frame 1-2 by a circle of screws, and the outside of the bow-shaped shrapnel 3 is connected with the lens barrel 2 by a circle of screws.

The driver 4 can provide forward movement and backward movement in the axial direction, and the driver 4 can adopt piezoelectric, hysteresis telescopic, pneumatic and other driving methods. The three drivers 4 are evenly distributed at intervals of 120o along the circumferential direction, and are fixed with the lens barrel 2 by screws.

When the three drivers 4 move forward or backward, they can push the inner ring of the bow-shaped shrapnel 3 to produce axial displacement. Since the inner and outer rings of the bow-shaped shrapnel 3 are connected by a circle of thin shrapnel, it can ensure that the inner ring of the bow-shaped shrapnel 3 is axially displaced. During movement, its displacement is uniform along the circumferential direction, and at the same time, the eccentricity and tilt errors introduced by axial movement can be restrained, so as to ensure that the axial displacement acts on the mirror frame assembly 1 evenly, and finally realize the axial movement of the optical element 1-1.

Claims (4)

1. The optical element axial adjustment device, including the frame (1-2), lens barrel (2), bow-shaped shrapnel (3) and three piezoelectric drivers (4); the characteristic is that the optical element (1-1) and A picture frame assembly (1) is formed by gluing between the picture frames (1-2), and the lens barrel (2) and the picture frame assembly (1) are connected by a bow-shaped shrapnel (3). 2. The optical element axial adjustment device according to claim 1, characterized in that, the cross-section of the bow-shaped shrapnel (3) is a bow shape with a thin middle and thick ends, and the inner side of the bow-shaped shrapnel (3) passes through a circle The screws are connected to the frame (1-2), and the outer side of the bow-shaped shrapnel (3) is connected to the lens barrel (2) through a circle of screws. 3. The optical element axial adjustment device according to claim 1, characterized in that, the driver (4) can provide forward movement and backward movement in the axial direction, and the driver (4) can adopt piezoelectric, hysteresis Telescopic and pneumatic drive. 4 . The optical element axial adjustment device according to claim 1 , characterized in that, the three drivers ( 4 ) are evenly distributed along the circumferential direction at intervals of 120°, and are fixed to the lens barrel ( 2 ) by screws.

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