CN102953045B - System and technology for chemical vapor deposition coating - Google Patents
System and technology for chemical vapor deposition coating Download PDFInfo
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- CN102953045B CN102953045B CN201110246169.1A CN201110246169A CN102953045B CN 102953045 B CN102953045 B CN 102953045B CN 201110246169 A CN201110246169 A CN 201110246169A CN 102953045 B CN102953045 B CN 102953045B
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- 238000000576 coating method Methods 0.000 title claims abstract description 34
- 239000011248 coating agent Substances 0.000 title claims abstract description 27
- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 26
- 238000005516 engineering process Methods 0.000 title abstract description 6
- 239000007789 gas Substances 0.000 claims abstract description 125
- 239000011159 matrix material Substances 0.000 claims abstract description 22
- 238000010521 absorption reaction Methods 0.000 claims abstract description 16
- 238000002156 mixing Methods 0.000 claims abstract description 14
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 238000006243 chemical reaction Methods 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims description 42
- 239000006096 absorbing agent Substances 0.000 claims description 19
- 239000000376 reactant Substances 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 14
- 239000007921 spray Substances 0.000 claims description 12
- 238000009826 distribution Methods 0.000 claims description 11
- 238000009413 insulation Methods 0.000 claims description 6
- 239000006185 dispersion Substances 0.000 claims description 4
- 238000002955 isolation Methods 0.000 claims description 3
- 238000000746 purification Methods 0.000 claims description 3
- 239000012495 reaction gas Substances 0.000 abstract description 4
- 238000000151 deposition Methods 0.000 abstract 3
- 230000008021 deposition Effects 0.000 abstract 3
- 230000007547 defect Effects 0.000 abstract 1
- 238000006386 neutralization reaction Methods 0.000 abstract 1
- 238000005507 spraying Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000011247 coating layer Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000003245 working effect Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 230000007773 growth pattern Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Abstract
The invention discloses a system and a technology for chemical vapor deposition coating. The technology for chemical vapor deposition coating comprises the following steps that 1, a matrix is put into a tray and the tray with the matrix is put into a deposition zone in a support cylinder; 2, different reaction gas is controlled by a control system to enter into a gas mixing chamber from a gas inlet; 3, mixed reaction gas is fed into a reaction furnace by a gas inlet pipe, is pre-heated in a pre-heating zone, is dispersed by baffles and division plates and enters into the deposition zone; 4, through control of the control system, a heating furnace is heated and a reaction temperature in the deposition zone is in a range of 900 to 2000 DEG C; and matrix coating is carried out under ordinary pressure; and 5, tail gas passes through an exhaust cap, a tail gas inlet I, a pre-heating plate and a tail gas outlet I and then enters into an ignition device; a neutralization solution is sprayed by a spraying device and then absorbs and neutralizes the tail gas; the purified tail gas is discharged from a tail gas outlet II; an absorption solution is collected by an absorption solution outlet and then is subjected to centralized treatment. A matrix coating obtained by the system and the technology has high uniformity and adhesion. The system and the technology improve wear resistance and defect resistance of a product and are environmentally friendly.
Description
Technical field
The invention relates to a kind of system and technique to mould or insert coating, relates to particularly a kind of system and the technique of chemical Vapor deposition process to the surface uniform coating of mould or blade or metal parts that adopts.
Background technology
In machining enterprise, a large amount of steel moulds that use, sintered-carbide die, carbide chip and metallic element, currently available products, is mostly directly to adopt after steel or alloy processing, use, because surface is without coating, its abrasion resistance properties is poor, and work-ing life is short, to enterprise, cause production cost to improve, also there is pair steel mould, sintered-carbide die, the surface coatings such as carbide chip and metallic element, but what mostly adopt is Physical, coating is inhomogeneous, and sticking power is low, therefore affects equally work-ing life.
Summary of the invention
In order to overcome the above problems, the invention provides a kind of coat system and technique that adopts chemical vapour deposition principle, adopts the invention, and basal body coating layer uniformity coefficient is high, and coating has higher sticking power, has improved wearability and the resistance to damaged property of product.
The technical scheme that the invention adopts is: chemical Vapor deposition process coat system: be comprised of Controlling System, gas mixing chamber, process furnace, Reaktionsofen and tail gas absorber.
Gas mixing chamber is provided with some gas inletes.
Reaktionsofen is placed in process furnace.
In Reaktionsofen, be provided with support tube, the upper end of support tube connects exhaust cap, is divided into successively from the top down sedimentary province, gas distribution zone and preheating zone in support tube; In sedimentary province: be provided with some pallets, pallet is provided with some ventilating pit I; In gas distribution zone: be provided with baffle plate, at least three layers of dividing plate are installed in baffle plate upper end, and dividing plate is provided with some ventilating pit II; In preheating zone: some layers of preheating table are installed, and the outlet side of inlet pipe communicates with gas distribution zone, and support tube is provided with gas inlet I in the lower end at position, preheating zone, the lower end of preheating zone is provided with tail gas outlet I.
The air outlet of gas mixing chamber is connected with the inlet end of inlet pipe by the road.
Tail gas absorber upper end is provided with tail gas outlet II, tail gas outlet II is connected with induced draft fan by pipeline, tail gas absorber lower end is respectively equipped with gas inlet II and absorption liquid outlet, portfire is arranged on the lower end of gas inlet II, umbrella-shaped baffle is installed in upper end in tail gas absorber inner exhaust gas entrance II, and in tail gas absorber, spray equipment is installed at upper and lower two ends.
Tail gas outlet I is connected with portfire by the road.
Above-mentioned chemical Vapor deposition process coat system: process furnace is divided into some sections of heating zone, every section of heating zone is comprised of terminal stud, heating unit and thermopair; In process furnace, be provided with successively from inside to outside dielectric isolation layer, thermal insulation layer I and thermal insulation layer II.
A chemical Vapor deposition process coating process, adopts above-mentioned chemical Vapor deposition process coat system to carry out coating, and step is as follows:
1) matrix that needs coating is placed in pallet, then by the pallet successively sedimentary province of code in support tube;
2) Controlling System is controlled different reactant gasess and by gas inlet, is introduced in gas mixing chamber respectively;
3) mixed reactant gases enters in Reaktionsofen with inlet pipe by the road, and through preheating zone preheating, the dispersion of baffle plate and dividing plate, enters sedimentary province;
4) Controlling System is controlled process furnace and is heated up, and controls the temperature of reaction of sedimentary province between 700～2000 ℃, under normal pressure to basal body coating layer;
5) tail gas producing is through exhaust cap, gas inlet I, preheating table and tail gas outlet I enter portfire, tail gas after lighting enters in tail gas absorber, neutralizer sprays through spray equipment, in absorption and tail gas, tail gas after purification is discharged through tail gas outlet II, and absorption liquid is collected through absorption liquid outlet, focuses on.
Above-mentioned chemical Vapor deposition process coating process: described reactant gases is to contain to form the gaseous reactant of film element or the steam of liquid reactants.
The beneficial effect of the invention is: chemical Vapor deposition process (CVD) is that various mixed gass are filled with in the reaction tubes of high temperature, with chemical mode, makes matrix surface generate the engineering of superhard particles material.Be from gaseous phase, without liquid, the growth pattern that direct transformation is solid state, forms several microns to the film of tens micron thickness.1. owing to adopting unique structure in gas distribution zone, make mixed gas in uphill process, twice dispersion through baffle plate and dividing plate, has not only reduced flow velocity, and make mixed gas enter sedimentary province with more equally distributed state, and then the matrix in pallet is carried out to uniform coating.2. the invention adopts the principle of chemical Vapor deposition process, adopts atmospheric pressure thermal cvd, matrix surface is carried out to TiC, TiCN, the CVD coating of TiN.By gaseous state, directly in matrix surface coating, coating uniformity coefficient is high.The combination of coating and base material is very tight.Take matrix as Wimet is example, more than sticking power can reach 100N, improved wear resistance and the erosion resistance of product, chemistry adhesive wear while having reduced high temperature, thus extended work-ing life of product, for enterprise has saved production cost.3. to be coated with interval velocity fast in the present invention, and gas flow rate is slow, also very even to the coating of complicated form and large parts.Because evaporation rate is fast, can obtain thicker coating, and owing to being the reaction of carrying out under gas atmosphere, can be coated with the parts of slight void, and obtain uniform coating, can also form different coatings by controlling injecting gas kind simultaneously, thereby realize multilayer evaporation.The invention is applicable to the coating to carbide chip, wortle, nozzle, mould, metal molding die and extrusion mould surface.Can be coated with individual layer to matrix surface, also can be coated with as required multilayer.4. reaction is mainly carried out in sedimentary province, temperature of reaction often reaches 700～2000 ℃, because the invention adopts Segmented heating to process furnace, can be according to the temperature of different zones, control the temperature of different segmentations, make the temperature of sedimentary province high, and for the temperature of gas distribution zone and preheating zone, can reduce the temperature of the corresponding segmentation of process furnace, saved the energy.5. make full use of the waste heat of tail gas.Reacted tail gas imports preheating zone through exhaust cap, the exhaust gas channel being formed by the space between Reaktionsofen and support tube, gas inlet I, and further preheating mixed gas, takes full advantage of the energy, has further saved the energy.6. in Reaktionsofen of the present invention, adopt under normal pressure and carry out cvd coating, its feature is as follows: while there is gas leakage, the equipment in reactor is not oxidized.During leakage, tackle hydrogen and oxygen mixture and do not need explosion-proof equipment.System does not need off-gas pump, and equipment maintenance cost is low, primary equipment less investment, and safety performance is good.7. spray equipment is set in tail gas absorber, by spray equipment, sprays alkaline neutralizer, in absorption and tail gas, purified tail gas, meanwhile, absorption liquid centralized collection is processed, and has therefore reduced the destruction that atmosphere is caused, and has protected environment.
Accompanying drawing explanation
Fig. 1 is the invention chemical Vapor deposition process coat system structural representation.
Embodiment
(1) chemical Vapor deposition process coat system
As shown in Figure 1, chemical Vapor deposition process coat system: formed by Controlling System (1), gas mixing chamber (2), process furnace (4), Reaktionsofen (5) and tail gas absorber (16).
Gas mixing chamber (2) is provided with some gas inletes (3).
Reaktionsofen (5) is placed in process furnace (4).
In Reaktionsofen (5), be provided with support tube (7), the upper end of support tube (7) connects exhaust cap (6), is divided into successively from the top down sedimentary province, gas distribution zone and preheating zone in support tube (7); In sedimentary province: be provided with some pallets (8), pallet (8) is provided with some ventilating pit I; In gas distribution zone: be provided with baffle plate (10), at least three layers of dividing plate (9) are installed in baffle plate (10) upper end, and dividing plate (9) is provided with some ventilating pit II, and from orlop dividing plate to the superiors' dividing plate, the aperture of the ventilating pit II on different layers dividing plate increases successively.The aperture that is the ventilating pit II on orlop dividing plate is minimum, upwards increases successively, and the aperture of the ventilating pit II on the superiors' dividing plate is maximum; In preheating zone: some layers of preheating table (13) are installed, and the outlet side of inlet pipe (11) communicates with gas distribution zone, support tube (7) is provided with gas inlet I (12) in the lower end at position, preheating zone, and the lower end of preheating zone is provided with tail gas outlet I (14).
The air outlet of gas mixing chamber (2) is connected with the inlet end of inlet pipe (11) by the road.
Tail gas absorber (16) upper end is provided with tail gas outlet II (15), tail gas outlet II (15) is connected with induced draft fan (22) by pipeline, tail gas absorber (16) lower end is respectively equipped with gas inlet II (19) and absorption liquid outlet (21), portfire (20) is arranged on the lower end of gas inlet II (19), umbrella-shaped baffle (18) is installed in upper end in tail gas absorber (16) inner exhaust gas entrance II (19), and in tail gas absorber (16), spray equipment (17) is installed at upper and lower two ends.
Tail gas outlet I (14) is connected with portfire (20) by the road.
Above-mentioned chemical Vapor deposition process coat system: process furnace (4) is divided into some sections of heating zone, every section of heating zone is comprised of terminal stud (41), heating unit (43) and thermopair (42); In process furnace (4), be provided with successively from inside to outside dielectric isolation layer (44), thermal insulation layer I (45) and thermal insulation layer II (46).
(2) chemical Vapor deposition process coating process
Take and on matrix, be coated with TiC layer as example, adopt above-mentioned chemical Vapor deposition process coat system to carry out coating, step is as follows:
1) matrix that needs coating is placed in pallet (8), then by the pallet successively sedimentary province of code in support tube (7);
2) Controlling System (1) is controlled the TiCl of gaseous state
4and CH
4(being reactant gases) introduces in gas mixing chamber (2) by gas inlet (3) respectively;
3) mixed reactant gases by the road and inlet pipe (11) enter in Reaktionsofen (5), through preheating zone preheating, the dispersion of baffle plate and dividing plate, enters sedimentary province;
4) Controlling System (1) is controlled process furnace (4) and is heated up, and controls the temperature of reaction of sedimentary province between 700～2000 ℃, under normal pressure to basal body coating layer.TiCl after mixing
4and CH
4gas spreads to matrix surface, is adsorbed in the surface of matrix, at matrix surface generation chemical reaction, at matrix surface, leaves nonvolatile solid reaction product---and be TiC film;
5) gaseous by-products producing at matrix surface, be that HCl gas departs from matrix surface, through exhaust cap (6), the exhaust gas channel being formed by the space between Reaktionsofen and support tube, gas inlet I (12), preheating table (13) and tail gas outlet I (14) enter portfire (20), tail gas after lighting enters in tail gas absorber (16), neutralizer sprays through spray equipment (17), in absorption and tail gas, tail gas after purification exports II (15) through tail gas and discharges, absorption liquid is collected through absorption liquid outlet (21), focuses on.
The present embodiment is that to be coated with TiC layer be that example illustrates the present invention, but does not limit the present invention, and in actual production, the coated substance specifically needing according to matrix, carrys out selective reaction gas.In step 2) according to coated substance selective reaction gas.Reactant gases is to contain to form the gaseous reactant of film element or the steam of liquid reactants.
Claims (4)
1. chemical Vapor deposition process coat system, is characterized in that: Controlling System (1), gas mixing chamber (2), process furnace (4), Reaktionsofen (5) and tail gas absorber (16), consist of;
Gas mixing chamber (2) is provided with some gas inletes (3);
Reaktionsofen (5) is placed in process furnace (4);
In Reaktionsofen (5), be provided with support tube (7), the upper end of support tube (7) connects exhaust cap (6), is divided into successively from the top down sedimentary province, gas distribution zone and preheating zone in support tube (7); In sedimentary province: be provided with some pallets (8), pallet (8) is provided with some ventilating pit I; In gas distribution zone: be provided with baffle plate (10), at least three layers of dividing plate (9) are installed in baffle plate (10) upper end, and dividing plate (9) is provided with some ventilating pit II; In preheating zone: some layers of preheating table (13) are installed, and the outlet side of inlet pipe (11) communicates with gas distribution zone, support tube (7) is provided with gas inlet I (12) in the lower end at position, preheating zone, and the lower end of preheating zone is provided with tail gas outlet I (14);
The air outlet of gas mixing chamber (2) is connected with the inlet end of inlet pipe (11) by the road;
Tail gas absorber (16) upper end is provided with tail gas outlet II (15), tail gas outlet II (15) is connected with induced draft fan (22) by pipeline, tail gas absorber (16) lower end is respectively equipped with gas inlet II (19) and absorption liquid outlet (21), portfire (20) is arranged on the lower end of gas inlet II (19), umbrella-shaped baffle (18) is installed in upper end in tail gas absorber (16) inner exhaust gas entrance II (19), and in tail gas absorber (16), spray equipment (17) is installed at upper and lower two ends;
Tail gas outlet I (14) is connected with portfire (20) by the road.
2. according to chemical Vapor deposition process coat system claimed in claim 1, it is characterized in that: process furnace (4) is divided into some sections of heating zone, every section of heating zone is comprised of terminal stud (41), heating unit (43) and thermopair (42); In process furnace (4), be provided with successively from inside to outside dielectric isolation layer (44), thermal insulation layer I (45) and thermal insulation layer II (46).
3. a chemical Vapor deposition process coating process, is characterized in that adopting the chemical Vapor deposition process coat system described in claim 1 or 2 to carry out coating, and step is as follows:
The matrix that needs coating is placed in pallet (8), then by the pallet successively sedimentary province of code in support tube (7);
Controlling System (1) is controlled different reactant gasess and by gas inlet (3), is introduced in gas mixing chamber (2) respectively;
Mixed reactant gases by the road and inlet pipe (11) enter in Reaktionsofen (5), through preheating zone preheating, the dispersion of baffle plate and dividing plate, enters sedimentary province;
Controlling System (1) is controlled process furnace (4) and is heated up, and controls the temperature of reaction of sedimentary province between 700～2000 ℃, under normal pressure, matrix is carried out to coating;
The tail gas producing is through exhaust cap (6), gas inlet I (12), preheating table (13) and tail gas outlet I (14) enter portfire (20), tail gas after lighting enters in tail gas absorber (16), neutralizer sprays through spray equipment (17), in absorption and tail gas, tail gas after purification exports II (15) through tail gas and discharges, and absorption liquid is collected through absorption liquid outlet (21), focuses on.
4. according to chemical Vapor deposition process coating process claimed in claim 3, it is characterized in that: described reactant gases is to contain to form the gaseous reactant of film element or the steam of liquid reactants.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110246169.1A CN102953045B (en) | 2011-08-25 | 2011-08-25 | System and technology for chemical vapor deposition coating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110246169.1A CN102953045B (en) | 2011-08-25 | 2011-08-25 | System and technology for chemical vapor deposition coating |
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| CN102953045A CN102953045A (en) | 2013-03-06 |
| CN102953045B true CN102953045B (en) | 2014-04-09 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109706435B (en) * | 2017-10-25 | 2022-06-17 | 北京北方华创微电子装备有限公司 | Chamber cover assembly, process chamber and semiconductor processing equipment |
| CN107829078B (en) * | 2018-01-03 | 2019-06-21 | 烟台银河新材料有限公司 | A kind of improved gaseous phase deposition stove |
| CN112391611B (en) * | 2019-08-14 | 2023-05-26 | 湖南红太阳光电科技有限公司 | Plasma enhanced atomic layer deposition coating device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2109198C (en) * | 1991-04-25 | 2000-03-28 | Arthur J. Learn | Primary flow cvd apparatus and method |
| US6676804B1 (en) * | 1998-07-16 | 2004-01-13 | Tokyo Electron At Limited | Method and apparatus for plasma processing |
| CN2753743Y (en) * | 2004-11-24 | 2006-01-25 | 中国科学院金属研究所 | Apparatus for preparing isotropic pyrolytic carbon material for big-size mechanical sealing |
| CN2793100Y (en) * | 2004-10-19 | 2006-07-05 | 吉林大学 | Organic chemical vapor-phase depositor with low-pressure metal for zinc oxide |
-
2011
- 2011-08-25 CN CN201110246169.1A patent/CN102953045B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2109198C (en) * | 1991-04-25 | 2000-03-28 | Arthur J. Learn | Primary flow cvd apparatus and method |
| US6676804B1 (en) * | 1998-07-16 | 2004-01-13 | Tokyo Electron At Limited | Method and apparatus for plasma processing |
| CN2793100Y (en) * | 2004-10-19 | 2006-07-05 | 吉林大学 | Organic chemical vapor-phase depositor with low-pressure metal for zinc oxide |
| CN2753743Y (en) * | 2004-11-24 | 2006-01-25 | 中国科学院金属研究所 | Apparatus for preparing isotropic pyrolytic carbon material for big-size mechanical sealing |
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