CN102945819A - Automatic material handling system - Google Patents
Automatic material handling system Download PDFInfo
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- CN102945819A CN102945819A CN 201210448970 CN201210448970A CN102945819A CN 102945819 A CN102945819 A CN 102945819A CN 201210448970 CN201210448970 CN 201210448970 CN 201210448970 A CN201210448970 A CN 201210448970A CN 102945819 A CN102945819 A CN 102945819A
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- 239000000463 material Substances 0.000 title claims abstract description 27
- 238000004891 communication Methods 0.000 claims abstract description 55
- 230000006854 communication Effects 0.000 claims abstract description 55
- 230000003287 optical effect Effects 0.000 claims abstract description 34
- 230000033001 locomotion Effects 0.000 claims abstract description 11
- 238000005516 engineering process Methods 0.000 abstract description 6
- 239000000969 carrier Substances 0.000 abstract 8
- 238000004519 manufacturing process Methods 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/11—Arrangements specific to free-space transmission, i.e. transmission through air or vacuum
- H04B10/114—Indoor or close-range type systems
- H04B10/1149—Arrangements for indoor wireless networking of information
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- Computing Systems (AREA)
- Electromagnetism (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
- Optical Communication System (AREA)
Abstract
The invention discloses an automatic material handling system based on optical communication. The automatic material handling system comprises a plurality of handling carriers, a plurality of base stations and a server, wherein the handling carriers run on a guide rail; the guide rail is correspondingly divided by the base stations into a plurality of continuous closed regions, and every base station is subject to optical communication with a handling carrier in the corresponding closed region to obtain and transmit information of the handling carrier in the closed region; and the server is coupled with the base stations and is used for receiving the information of the handling carriers and transmitting control commands to the base stations according to the information of the handling carriers, the control commands are received by the base stations and converted into optical signals, the optical signals are transmitted to the handling carriers, and movement states of the handling carriers are changed according to the optical signals. By adopting the automatic material handling system, handling scheduling of the handling carriers is performed based on the optical communication technology, the problem of signal interference generated by radio frequency communication can be solved, and regional management of the handling carriers can be realized.
Description
Technical field
The present invention relates to the semiconductor integrated circuit field, particularly a kind of automatic material handling system.
Background technology
Along with Information technology is maked rapid progress, integrated circuit is played the part of important role in daily life, and its demand relatively also significantly promotes, and therefore promotes the flourish of global semiconductor market.For the wilderness demand in response to integrated circuit, most semiconductor manufacturing enterprise is all to improve production capacity as priority target.In semiconductor manufacturing enterprise, wafer normally adopts mode of transport in batches, yet not only efficient is low by the manpower transport, also easily causes danger, therefore, and automatic material handling system (AutomaticMaterial Handling System; AMHS) be widely used in semiconductor manufacturing enterprise.
Automatic material transport system (AMHS) can not only provide increasingly automated, usefulness for whole manufacturing system produces considerable influence, can also effectively utilize limited production space, clean room, improves the utilance of production equipment, minimizing is shortened cycle time etc. in product amount.Along with the growth of AMHS system carrying amount, how to guarantee handling efficiency, finish as early as possible the carrying of wafer, be a huge challenge.The scheduling of optimizing semiconductor automatic material handling system is most important for the competitiveness that promotes semiconductor manufacturing enterprise.In the present AMHS system, normally by carrying out radio communication between base station and the automatic navigation vehicle, such as by the modes such as RFID label or radio frequency chip are set at automatic navigation vehicle, thereby the motion state of control automatic navigation vehicle is carried scheduling in real time, yet carry out communicating by letter of base station and self-navigation workshop with technology for radio frequency, easily occur to disturb cleanroom facilities and wafer manufacture because of radiofrequency signal, have influence on the situation of the yield of product.
Summary of the invention
Main purpose of the present invention is to overcome the defective of prior art, and a kind of automatic material handling system based on optical communication is provided, and disturbs to avoid radiofrequency signal that wafer manufacture is produced.
For reaching above-mentioned purpose, the invention provides a kind of automatic material handling system based on optical communication, comprise a plurality of conveyance vehicles, motion is on guide rail; N base station, described guide rail correspondence is divided into N continuous closed interval, optical communication is carried out with described conveyance vehicle in each described base station in its corresponding closed interval, to obtain and to send the conveyance vehicle information in the described closed interval, wherein N is the positive integer more than or equal to 2; And server, couple a described N base station, receive also and send control command to described base station according to described conveyance vehicle information, described base station is converted to light signal with described control command and is sent to described conveyance vehicle, so that described conveyance vehicle changes motion state according to described light signal.
Preferably, described conveyance vehicle comprises the first optical communications module, comprises the first transmitter module and the first receiver module, in order to emission and receiving optical signals; The first signal processing module couples described the first receiver module, and the described light signal that receives is converted to control signal; And control module, couple described first signal processing module, control the motion state of described conveyance vehicle according to described control signal.
Preferably, described base station comprises the second optical communications module, comprises the second transmitter module and the second receiver module, in order to emission and receiving optical signals; The secondary signal processing module comprises coding module and decoder module, and described decoder module couples described the second receiver module, and the described light signal that receives is decoded as described conveyance vehicle information; Described coding module couples described the second transmitter module, is light signal with described control command code; And server com-munication module, couple described secondary signal processing module, described conveyance vehicle information is sent to described server, and receives described control command from described server.
Preferably, described server comprises the base station communication module, in order to receiving described conveyance vehicle information from described base station, and launches described control command to described base station; And the 3rd processing module, couple described base station communication module, produce described control command according to described conveyance vehicle information.
Preferably, described closed interval size is determined by light beam angle and the transmitting power of described base station.
Preferably, described conveyance vehicle information comprises that described conveyance vehicle is in the affirmation information of described closed interval.
Preferably, described conveyance vehicle information also comprises described conveyance vehicle identifying information.
Preferably, when described base station communication module received the described conveyance vehicle information that N base station and N-1 base station sends, described the 3rd processing module sent halt instruction to described N-1 base station.
Preferably, when described base station communication module received the described conveyance vehicle information that sends the N-1 base station and do not receive the described conveyance vehicle information that sends the N base station, described the 3rd processing module sent enabled instruction to described N-1 base station.
Preferably, when described base station communication module receives the described conveyance vehicle information that send the M-2 base station, and when no longer receiving the described conveyance vehicle information that sends the M-1 base station or when just receiving the described conveyance vehicle information that sends the M base station afterwards, described the 3rd processing module sends enabled instruction to described M-2 base station, wherein M is greater than 2 and less than or equal to the positive integer of N.
The invention has the advantages that and by the optical communication between conveyance vehicle and the base station conveyance vehicle is carried scheduling, not only solved the signal interference problem that available technology adopting radio communication produces, can also carry out the interval management to the conveyance vehicle.
Description of drawings
Fig. 1 is the schematic diagram of one embodiment of the invention automatic material handling system.
Fig. 2 is the configuration diagram of one embodiment of the invention conveyance vehicle.
Fig. 3 is the configuration diagram of one embodiment of the invention base station.
Fig. 4 is the configuration diagram of one embodiment of the invention server.
Fig. 5 is the schematic diagram that communication is carried out in one embodiment of the invention conveyance vehicle and base station.
Embodiment
For making content of the present invention more clear understandable, below in conjunction with Figure of description, content of the present invention is described further.Certainly the present invention is not limited to this specific embodiment, and the known general replacement of those skilled in the art also is encompassed in protection scope of the present invention.
At first please refer to Fig. 1, it shows the automatic material handling system configuration diagram based on optical communication of one embodiment of the invention.The automatic material handling system comprises a plurality of conveyance vehicles 10, N base station 20 and server 30.Wherein, 10 motions of conveyance vehicle are on guide rail, as the carrier of carrying and loaded material.Conveyance vehicle 10 can be automatic navigation vehicle or industrial conveyance robot etc., the invention is not restricted to this.N base station 20 is divided into N end to end closed interval with the scope that it carries out optical communication with guide rail, and optical communication can be carried out with conveyance vehicle 10 in each base station 20 in its corresponding closed interval.
Furthermore, the size of the optical communication scope of base station 20 is determined by its light beam angle and transmitting power thereof.The base station generally is evenly arranged in a side of guide rail, and on the same plane of guide rail, the present invention does not limit this.As shown in Figure 5, the formed delta-shaped region of light of 20 emissions is its optical communication scope from the base station, and base station 20 intercoms mutually with conveyance vehicle 10 within this scope.Please continue with reference to figure 1, in conveyance vehicle 10 enters the closed interval of base station 20, base station 20 will receive the light signal that sends from conveyance vehicle 10, from this light signal, obtain the information of conveyance vehicle 10, and this conveyance vehicle information is sent to server 30, wherein the conveyance vehicle information comprises conveyance vehicle 10 in the affirmation information of closed interval, and by this confirmation, base station 20 just can be confirmed to have conveyance vehicle 10 in its corresponding closed interval.Server 30 couples all base stations 20, therefore can monitor the positional information of all conveyance vehicles 10 in the whole system, that is to say which closed interval can monitor conveyance vehicle 10 is present in.The conveyance vehicle information that server 30 sends according to base station 20 produces control command, and control command sent it back corresponding base station 20, by base station 20 this control command is converted to light signal again and sends to conveyance vehicle 10, so that conveyance vehicle 10 changes its motion state.As known from the above, the present invention is to the conveyance vehicle information and control command is carried out coded optical signal and light signal decodes to realize optical communication, thereby carries out the carrying scheduling of conveyance vehicle, to avoid the generation of radio frequency interference.
Fig. 2 to Fig. 4 describes conveyance vehicle 10 in the system of the present invention in detail, the formation of base station 20 and server 30.Please refer to Fig. 2, conveyance vehicle 10 comprises the first optical communications module 11, first signal processing module 12 and control module 13.First communication module 11 comprises the first transmitter module 110 and the first receiver module 111, in order to emission and receiving optical signals.First signal processing module 12 couples the first receiver module 111, and the light signal that receives is converted to control signal.Control module 13 coupled with first signal processing modules 12 are according to the motion state of control signal control conveyance vehicle 10.Please continue with reference to figure 3, base station 20 comprises the second optical communications module 21, secondary signal processing module 22, and server com-munication module 23.The second optical communications module 21 comprises the second transmitter module 210 and the second receiver module 211, in order to emission and receiving optical signals; Secondary signal processing module 22 comprises coding module 220 and decoder module 221, and wherein decoder module 221 couples the second receiver module 211, and the light signal that receives is decoded as the conveyance vehicle information; Coding module 220 couples the second transmitter module 210, is light signal with control command code.Server com-munication module 23 couples secondary signal processing module 22, and the conveyance vehicle information that decoder module 221 is decoded is sent to server 30, and exports coding module 220 to from server 30 reception control commands.Server 30 comprises base station communication module 31 and the 3rd place's signal reason module 32, and as shown in Figure 4, the 3rd signal processing module 32 couples base station communication module 31.Base station communication module 31 is in order to the 20 reception conveyance vehicle informations from the base station, and the 3rd processing module 32 produces control command according to these conveyance vehicle informations, sends via base station communication module 31 again.
Describe the specific works mode of automatic material handling system of the present invention in detail below with reference to Fig. 1 to Fig. 4.At first, when X conveyance vehicle 10 enters N closed interval, the second receiver module 211 of N base station 20 will receive the light signal of being launched by the first transmitter module 110 of conveyance vehicle 10, decoder module 221 is decoded as light signal the conveyance vehicle information of conveyance vehicle 10 and sends to server com-munication module 23, by server com-munication module 23 this conveyance vehicle information is sent to server 30.The conveyance vehicle information comprises conveyance vehicle 10 in the affirmation information of certain closed interval, so server 30 can be monitored conveyance vehicle 10 at the existence of each closed interval.Same, when X-1 conveyance vehicle 10 enters N-1 closed interval, N-1 base station 20 also will send the conveyance vehicle information to server 30.After the base station communication module 31 of server 30 receives these two conveyance vehicle informations, discovery is adjacent to all exist in the closed interval conveyance vehicle 10, therefore will send the control command that stops to the server com-munication module 23 of N-1 base station 20, server com-munication module 23 and then this is stopped control command outputing to coding module 222, coding module 222 is encoded into light signal with it, launches via the second transmitter module 212.The first receiver module 111 of the X-1 conveyance vehicle 10 in N-1 closed interval receives this light signal and exports first signal processing module 12 to, first signal processing module 12 is transferred to control module 13 after being converted into control signal, controlling X-1 conveyance vehicle 10 halts, thus N closed interval locking will there will be no the conveyance vehicle to enter.
If server 30 only receives the conveyance vehicle information that sends N-1 base station 20 and does not receive the conveyance vehicle information that sends N base station 20, then mean in N the closed interval and no longer include conveyance vehicle 10, then server 30 will send enabled instruction to the N-1 base station 20, Code And Decode through light signal, restart N-1 the X-1 conveyance vehicle 10 in the closed interval, N closed interval reopens thus, and X-1 conveyance vehicle 10 enters N closed interval.
For fear of causing misoperation because of communication failure, in another embodiment of the present invention, when server 30 receives the conveyance vehicle information that sends M-2 base station 20 and no longer receives the conveyance vehicle information that sends M-1 base station 20 (M for greater than 2 positive integer), can't send immediately the control command of startup, until the conveyance vehicle information that send the M base station 20 that server 30 receives originally not to be had, show that the conveyance vehicle in M-1 closed interval has entered M closed interval, just can send the control command of startup, thus, set up communication by M base station and conveyance vehicle 10, guarantee that further conveyance vehicle 10 has left M-1 closed interval, thus prevent because of the M-1 base station fault will be still the conveyance vehicle in M1 closed interval take for to leave and open M-1 closed interval.On this basis, in another preferred embodiment of the present invention, the conveyance vehicle information also comprises the identifying information of conveyance vehicle 10, that is to say that server 30 can identify different conveyance vehicles 10, thus, when server 30 receives the identifying information that X conveyance vehicle 10 has been sent in M base station 20, determine that X conveyance vehicle 10 has entered M closed interval from M-1 closed interval, just send the startup control command, thereby avoided thinking other conveyance vehicles 10 in M the closed interval by mistake X conveyance vehicle, more promoted fail safe.
To sum up, the automatic material handling system based on optical communication proposed by the invention by the optical communication between conveyance vehicle and the base station, is carried scheduling to the conveyance vehicle, efficiently solves the signal interference problem that available technology adopting radio communication produces.
Although the present invention discloses as above with preferred embodiment; right described many embodiment only give an example for convenience of explanation; be not to limit the present invention; those skilled in the art can do some changes and retouching without departing from the spirit and scope of the present invention, and the protection range that the present invention advocates should be as the criterion so that claims are described.
Claims (10)
1. the automatic material handling system based on optical communication is characterized in that, comprising:
A plurality of conveyance vehicles, motion is on guide rail;
N base station, described guide rail correspondence is divided into N continuous closed interval, optical communication is carried out with described conveyance vehicle in each described base station in its corresponding closed interval, to obtain and to send the conveyance vehicle information in the described closed interval, wherein N is the positive integer more than or equal to 2; And
Server, couple a described N base station, receive also and send control command to described base station according to described conveyance vehicle information, described base station is converted to light signal with described control command and is sent to described conveyance vehicle, so that described conveyance vehicle changes motion state according to described light signal.
2. automatic material handling system according to claim 1 is characterized in that, described conveyance vehicle comprises:
The first optical communications module comprises the first transmitter module and the first receiver module, in order to emission and receiving optical signals;
The first signal processing module couples described the first receiver module, and the described light signal that receives is converted to control signal; And
Control module couples described first signal processing module, controls the motion state of described conveyance vehicle according to described control signal.
3. automatic material handling system according to claim 2 is characterized in that, described base station comprises:
The second optical communications module comprises the second transmitter module and the second receiver module, in order to emission and receiving optical signals;
The secondary signal processing module comprises coding module and decoder module, and described decoder module couples described the second receiver module, and the described light signal that receives is decoded as described conveyance vehicle information; Described coding module couples described the second transmitter module, is light signal with described control command code; And
Server com-munication module couples described secondary signal processing module, described conveyance vehicle information is sent to described server, and receives described control command from described server.
4. automatic material handling system according to claim 3 is characterized in that, described server comprises:
The base station communication module receives described conveyance vehicle information from described base station, and launches described control command to described base station; And
The 3rd processing module couples described base station communication module, produces described control command according to described conveyance vehicle information.
5. automatic material handling system according to claim 4 is characterized in that, the size of described closed interval is determined by light beam angle and the transmitting power of described base station.
6. automatic material handling system according to claim 4 is characterized in that, described conveyance vehicle information comprises that described conveyance vehicle is in the affirmation information of described closed interval.
7. automatic material handling system according to claim 6 is characterized in that, described conveyance vehicle information also comprises described conveyance vehicle identifying information.
8. automatic material handling system according to claim 6, it is characterized in that, when described base station communication module received the described conveyance vehicle information that N base station and N-1 base station sends, described the 3rd processing module sent halt instruction to described N-1 base station.
9. automatic material handling system according to claim 8, it is characterized in that, when described base station communication module does not receive the described conveyance vehicle information that sends the N base station, and receive the described conveyance vehicle information that send the N-1 base station, described the 3rd processing module sends enabled instruction to described N-1 base station.
10. according to claim 6 or 7 described automatic material handling systems, it is characterized in that, when described base station communication module receives the described conveyance vehicle information that send the M-2 base station, and when no longer receiving the described conveyance vehicle information that sends the M-1 base station or when just receiving the described conveyance vehicle information that sends the M base station afterwards, described the 3rd processing module sends enabled instruction to described M-2 base station, wherein M is greater than 2 and less than or equal to the positive integer of N.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210448970.9A CN102945819B (en) | 2012-11-12 | 2012-11-12 | A kind of automatic material handling system |
| PCT/CN2013/084245 WO2014071783A1 (en) | 2012-11-12 | 2013-09-26 | Automatic material handling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210448970.9A CN102945819B (en) | 2012-11-12 | 2012-11-12 | A kind of automatic material handling system |
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| Publication Number | Publication Date |
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| CN102945819A true CN102945819A (en) | 2013-02-27 |
| CN102945819B CN102945819B (en) | 2018-08-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210448970.9A Active CN102945819B (en) | 2012-11-12 | 2012-11-12 | A kind of automatic material handling system |
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| CN (1) | CN102945819B (en) |
| WO (1) | WO2014071783A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014071783A1 (en) * | 2012-11-12 | 2014-05-15 | 上海集成电路研发中心有限公司 | Automatic material handling system |
| CN105023409A (en) * | 2014-05-02 | 2015-11-04 | 吴学瑞 | Data transmission system for automated material handling system |
| CN105460328A (en) * | 2015-12-17 | 2016-04-06 | 上海集成电路研发中心有限公司 | Automatic laying device for automatic material handling system (AMHS) track bar codes |
| CN110942265A (en) * | 2018-09-25 | 2020-03-31 | 北京外号信息技术有限公司 | Goods cooperative distribution system and method |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07112175B2 (en) * | 1990-12-26 | 1995-11-29 | 八木アンテナ株式会社 | Light diffusion communication system |
| JP4321631B2 (en) * | 2007-07-05 | 2009-08-26 | 村田機械株式会社 | Transport system, transport method, and transport vehicle |
| CN101955093B (en) * | 2009-07-20 | 2013-02-27 | 杭州优迈科技有限公司 | Operation and control system of multi-base-station wireless remote elevator calling and control method |
| CN202121612U (en) * | 2011-05-18 | 2012-01-18 | 华中科技大学 | Real time traffic communication system |
| CN102945819B (en) * | 2012-11-12 | 2018-08-10 | 上海集成电路研发中心有限公司 | A kind of automatic material handling system |
| CN203095048U (en) * | 2012-12-28 | 2013-07-31 | 上海集成电路研发中心有限公司 | Automatic material handling device |
-
2012
- 2012-11-12 CN CN201210448970.9A patent/CN102945819B/en active Active
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2013
- 2013-09-26 WO PCT/CN2013/084245 patent/WO2014071783A1/en active Application Filing
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014071783A1 (en) * | 2012-11-12 | 2014-05-15 | 上海集成电路研发中心有限公司 | Automatic material handling system |
| CN105023409A (en) * | 2014-05-02 | 2015-11-04 | 吴学瑞 | Data transmission system for automated material handling system |
| CN105023409B (en) * | 2014-05-02 | 2019-11-29 | 吴学瑞 | Automatic handing system data transmission system |
| CN105460328A (en) * | 2015-12-17 | 2016-04-06 | 上海集成电路研发中心有限公司 | Automatic laying device for automatic material handling system (AMHS) track bar codes |
| CN110942265A (en) * | 2018-09-25 | 2020-03-31 | 北京外号信息技术有限公司 | Goods cooperative distribution system and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102945819B (en) | 2018-08-10 |
| WO2014071783A1 (en) | 2014-05-15 |
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