Demarcation and the replacing method of laser instrument or displacement transducer in the long-term measuring system
Technical field
The present invention relates to demarcation and the replacing method of photoelectric device in a kind of measuring system, particularly a kind of demarcation and replacing method based on laser instrument or displacement transducer in the long-term measuring system of laser collimation technology.
Background technology
Utilize the collimation laser technology to realize that displacement measurement has application in a lot of fields, for high-precision measurement, the demarcation of displacement transducer is a relatively hard problem.Particularly in the fixing long-term measuring system that is formed by a plurality of sensors, such as the arch dam deformation monitoring system, require the variation of long term monitoring displacement, when certain laser instrument or displacement transducer break down in the measuring system, how guaranteeing to repair the measurement data of rear system and continuity and the consistance of the measurement data before the fault, is a practical problems that needs to be resolved hurrily.
Summary of the invention
In order to improve the demarcation efficient of photoelectric sensor, solve the free replacing problem of laser instrument in the long-term measuring system or displacement transducer, guarantee that replacing laser instrument or sensor do not affect continuity and the consistance of measurement data, the present invention proposes a kind of demarcation of laser instrument or the photoelectric displacement sensor based on laser collimation technology, and the replacing method of laser instrument and sensor.
For reaching above purpose, the present invention takes following technical scheme to be achieved:
The scaling method of laser instrument or displacement transducer in a kind of long-term measuring system, it is characterized in that, comprise the calibration system that is consisted of by laser instrument pedestal, sensor base, two-dimensional stage, control circuit and computing machine, wherein, sensor base is fixed on the two-dimensional stage, between the two distance is consistent in distance between laser instrument pedestal and the sensor base and the actual measuring system, control circuit makes two-dimensional stage move along two mutually orthogonal directions by computer control, and the traverse measurement result returns computing machine again;
In the above system, the scaling method of described laser instrument is:
The photoelectric displacement sensor of a standard is installed on the sensor base, then laser instrument to be calibrated is installed on the laser instrument pedestal, start the laser instrument calibrating procedure in the computing machine, record and the error of centralization of preserving laser instrument are used for the correction of measurement result at last;
The scaling method of described displacement transducer is: the laser instrument of a standard is installed on the laser instrument pedestal, then photoelectric displacement sensor to be calibrated is installed on the installation of sensors pedestal, start the transducer calibration program in the computing machine, record is also preserved nominal data, as computation and measurement result's foundation.
In the such scheme, each moving direction of described two-dimensional stage is respectively installed a platform displacement transducer, and the displacement measurement of two-dimensional stage is gathered to computing machine.
The concrete demarcation flow process of described displacement transducer is:
A, setting calibration range and demarcation step-length;
B, adjustment two-dimensional stage make laser facula be positioned at the center of photoelectric displacement sensor to be calibrated;
C, two displacement transducers will measuring the two-dimensional stage displacement make zero;
D, according to the calibration range of setting with demarcate step-length and carry out that grid is demarcated and the record nominal data.
The replacing method of laser instrument in a kind of long-term measuring system, it is characterized in that, in the measuring system of using laser alignment displacement measurement or deformation measurement, adopt laser instrument pedestal and the sensor base of same structure in the aforementioned calibration system, when having laser instrument or photoelectric displacement sensor to break down, only need the fault part is unloaded from mounting base, reinstall a good laser instrument or photoelectric displacement sensor, simultaneously the nominal data of defective device in the measuring system is replaced with the nominal data of new unit.
Advantage of the present invention is:
1, can be demarcated easily laser instrument and photoelectric sensor by computer controlled automatic.
2, in long-term measuring system, if laser instrument or photoelectric sensor break down, can change at any time and do not affect consistance and the continuity of measurement data.
Description of drawings
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail.
Fig. 1 is laser instrument of the present invention, sensor calibration system theory diagram.Among the figure: 1, platform displacement transducer; 2, control circuit; 3, computing machine; 4, photoelectric displacement sensor (standard or to be calibrated); 5, sensor base; 6, two-dimensional stage; 7, laser instrument pedestal; 8, laser instrument (standard or to be calibrated); 9,10,11, three mutually orthogonal reference fields of laser instrument pedestal; 9 ', 10 ', 11 ', three mutually orthogonal reference fields of laser instrument; 12,13,14, three mutually orthogonal reference fields of sensor base.
Fig. 2 is laser instrument pedestal schematic diagram among Fig. 1.
Fig. 3 is laser instrument profile outline among Fig. 1.
Fig. 4 is sensor base schematic diagram among Fig. 1.
Fig. 5 is the demarcation process flow diagram of displacement transducer to be calibrated.
Embodiment
With reference to figure 1, the hardware device of wanting required for the present invention comprises laser instrument pedestal 7, sensor base 5, two-dimensional stage 6, relevant control circuit 2 and computing machine 3.
Two-dimensional stage can move along two mutually orthogonal directions in a plane, and its rotation that moves through computing machine 3 and control circuit 2 Driving Stepping Motors realizes.Each moving direction is installed a platform displacement transducer 1, can measure the displacement of two-dimensional stage, and measurement result is gathered by computing machine 3.Displacement transducer 1 can be comprised of light emitting diode and one dimension CCD device.Also can the person omit platform displacement transducer 1, the step number of directly advancing by stepper motor is come the displacement of Two-dimensional platform.
Scaling method is:
(1) at first laser instrument pedestal, two-dimensional stage are fixed, so that the distance between the two is consistent in the distance between laser instrument pedestal and the sensor base and the practical application.
(2) demarcation of laser instrument: the photoelectric displacement sensor 4 of a standard is installed on the sensor base 5, then laser instrument to be calibrated 8 is installed on the laser instrument pedestal, start the laser instrument calibrating procedure in the computing machine, record and the error of centralization of preserving laser instrument are used for the correction of measurement result.
(3) demarcation of sensor: the laser instrument 8 of a standard is installed on the laser instrument pedestal, then photoelectric displacement sensor to be calibrated 4 is installed on the installation of sensors pedestal, start the transducer calibration program in the computing machine, record is also preserved nominal data, as computation and measurement result's foundation.
With reference to figure 2 Fig. 3, the laser instrument pedestal has three mutually orthogonal reference fields 9,10,11(or two reference fields and a datum line).Laser instrument is the lasing light emitter with collimating optics camera lens, and corresponding three mutually orthogonal reference fields 9 ', 10 ', 11 ' (or two reference fields and a datum line) are also arranged, and the mutual alignment relation during installation as shown in Figure 1.
With reference to figure 4, three mutually orthogonal reference fields 12,13,14(or two reference fields and a datum line are arranged on the sensor base 5); Photoelectric displacement sensor 4(standard or to be calibrated) also have and three precision machined reference fields should be arranged mutually (or two reference fields and a datum line), the mutual alignment relation during installation as shown in Figure 1.
As shown in Figure 5, photoelectric displacement sensor demarcation flow process comprises:
A, setting calibration range and demarcation step-length;
B, adjustment two-dimensional stage make laser facula be positioned at the center of photoelectric displacement sensor to be calibrated;
C, two displacement transducers will measuring the two-dimensional stage displacement make zero;
D, according to the calibration range of setting with demarcate step-length and carry out that grid is demarcated and the record nominal data.
The replacing method of laser instrument or displacement transducer: in the measuring system of using laser alignment displacement measurement or deformation measurement, laser instrument pedestal 7(Fig. 2 of same structure in necessary employing and the calibration system of the present invention) and sensor base 5(Fig. 4).Especially in long-term measuring system, when having laser instrument 8 or photoelectric displacement sensor 4 to break down, only need the fault part is unloaded from mounting base, reinstall a good laser instrument or photoelectric displacement sensor, simultaneously the nominal data of defective device in the measuring system is replaced consistance and the continuity that can guarantee measurement result with the nominal data of new unit.
Photoelectric displacement sensor in demarcation of the present invention and the measuring system comprises: one dimension CCD, one-dimensional PSD (position sensitive detector), two-dimensional CCD, Two-dimensional PSD, two-dimentional CMOS or other be imageing sensor (surveying as realize two-dimension displacement by screen shot) etc. indirectly.