CN102922388A - Precise polishing robot system for large-caliber complex optical lenses - Google Patents

Abstract

The invention discloses a precise polishing robot system for large-caliber complex optical lenses. The precise polishing robot system comprises an optical lens polishing robot module, a sensor module, a signal processing computer module and an active compliance control module. The polishing robot integrates a processing part, and the active compliance control module controls the rotation speed of a polishing disc and trajectories of the polishing robot. An error curved surface adaptive trajectory planning module of the signal processing computer module enables removed curved surfaces to be close to error curved surfaces as much as possible, and accordingly, the convergence rate is improved effectively. The precise polishing robot system has the advantages of high integration level and convergence speed.

Description

Large-diameter complex optical mirror precision polishing robot system

technical field

The invention relates to a device in the field of ultra-precision machining, in particular to a precision grinding and polishing robot system suitable for hard, brittle and difficult-to-machine materials such as large-caliber complex optical mirrors.

Background technique

In recent years, large-aperture complex optical mirrors have been widely used in the fields of high-resolution earth observation satellite optical cameras, sky observation satellites, and deep space scientific exploration. However, due to the hard and brittle characteristics of the mirror material, its processing accuracy High, difficult, and long cycle seriously affect its application. In the optical mirror processing process, lapping (grinding, polishing) is an important process connecting grinding and subsequent magnetorheological processes, and its processing efficiency and quality greatly affect the quality and efficiency of mirror processing.

Different from the polishing process in traditional industries, precision polishing of optical mirrors is quantitative polishing, which has extremely high requirements on surface shape, roughness and subsurface damage depth in surface quality.

In the design of large-caliber complex optical mirror processing equipment, on the one hand, the complexity of the machine tool structure with the increase of the mirror diameter should be considered. The increase in the span of the machine tool reduces the rigidity of the structure and increases the area and cost. On the other hand, the convergence efficiency of the mirror surface should be fully considered to improve the processing efficiency of the subsequent process. Existing precision lapping and polishing machine tools for complex optical mirrors use a five-axis machining method. The structure of the machine tool is complex and expensive, and the structural rigidity decreases with the increase of the mirror diameter; The grinding and polishing movement form of this method cannot be adjusted during the processing process, and a fixed removal function is formed. The convergence efficiency of the removal function corresponding to the double-rotor or flat-rotation grinding and polishing movement form is not high, resulting in a roughness of the final mirror surface. It requires a long time to remove the subsequent processing, which greatly affects the processing efficiency; in addition, the existing grinding and polishing machine tools do not have the ability to detect the status of the grinding and polishing process in real time, and cannot perform real-time control on the grinding and polishing process.

After searching the existing technical literature, it is found that the Chinese patent application number 200610151060.9 discloses a five-axis linkage and series CNC polishing machine tool. The movement of the motion platform is driven by four parallel telescopic links, and the grinding wheel on the motion platform The workpiece is processed, but the grinding wheel processing method is not suitable for the grinding and polishing of hard and brittle materials such as optical mirrors.

The Chinese patent application number 91216385.2 discloses a mirror polishing machine tool for surface finishing of ceramics such as polycrystalline diamond, but it can only process optical mirrors with a planar structure, and cannot process mirrors with complex shapes.

The Chinese patent application number 200810051133.6 discloses a CNC polishing machine tool for optical components, which consists of a base system, a column system and a beam system. The base system includes a base, an X-axis feed system, an A-axis flip feed system, and a C-axis Rotary feed system; Beam system includes beam, Y-axis feed system, Z-axis feed system, power planetary polishing head, polishing mold, to realize CNC polishing of medium and large diameter aspheric optical components. The machine tool adjusts the position of the polishing die by adjusting the screw to obtain different revolution radii to meet the polishing requirements of different workpieces. However, this fixed structure makes the removal function always fixed during the processing. This double-rotor form corresponds to the removal The convergence efficiency of the function is not high.

The Chinese patent application number 201010506393.5 discloses a milling and polishing device based on an intelligent numerical control platform, including an industrial robot and its control module, drive module, man-machine interface, working components, etc. This invention overcomes the disadvantages of large floor area and inflexibility of traditional complex optical mirror grinding and polishing precision machine tools, but the rotation speed of the end does not meet the requirement of more than two revolutions per second of the grinding and polishing disc in the grinding and polishing process, and additional working components are required , low integration, poor efficiency, the drive module cannot realize the integrated control of the robot trajectory and working components, it is necessary to realize the control of the robot trajectory through the driving system of the industrial robot, and the control needs to be adjusted according to different brands of industrial robots and working components module.

Contents of the invention

In view of the above-mentioned defects in the prior art, the technical problem to be solved by the present invention is to provide a complex optical mirror polishing system with high integration, high efficiency and high convergence speed.

In order to achieve the above purpose, the present invention provides a large-caliber complex optical mirror precision polishing robot system, including:

Polishing robot, the polishing robot includes: base, turntable, upper arm, upper joint, forearm, wrist, first to third RV (Rotate Vector) reducer, first to third harmonic reducer, third 1st to 4th bearings, 1st bevel gear, 2nd bevel gear, 1st to 3rd synchronous pulley set, wrist shaft, arm input shaft, spring, pin, grinding and polishing rotating shaft, grinding and polishing outer cylinder, grinding and polishing disc . The first to sixth servo motors, wherein the turntable is connected to the base through the first RV reducer, the first servo motor is connected to the first RV reducer, and the turntable is connected to the base The boom is connected through the second RV reducer, the second servo motor is connected with the second RV reducer, the boom is connected with the upper joint through the third RV reducer, and the The third servo motor is connected to the third RV reducer, the upper joint is connected to the fourth servo motor, and connected to the first harmonic reducer through the first synchronous pulley set. The first harmonic reducer is connected to the input shaft of the small arm, the small arm is connected to the fifth servo motor, and connected to the second harmonic reducer through the second synchronous pulley set, the The second harmonic reducer is connected to the wrist shaft, the wrist shaft is mounted on the wrist through the first and second bearings, the small arm is connected to the sixth servo motor, and the second arm is connected to the sixth servo motor. Three synchronous pulley sets are connected with the first bevel gear, the first bevel gear is installed on the wrist through the third bearing and connected with the second bevel gear, and the second bevel gear is connected with the second bevel gear. The polishing input shaft is connected, the polishing input shaft is installed on the wrist through the fourth bearing, the polishing input shaft is connected with the third harmonic reducer, and the third harmonic reducer The device is connected with the polishing rotating shaft, and the polishing rotating shaft cooperates with the polishing outer cylinder, and the movement of the polishing outer cylinder is limited by the spring and the pin, and the polishing outer cylinder is connected with the polishing outer cylinder. The lapping disc is hinged.

Preferably, the six-dimensional force sensor and the pressure sensor are connected to the signal processing computer module through a data acquisition card. The error surface adaptive trajectory planning module in the signal processing computer module performs error surface adaptive trajectory planning according to the geometric characteristics of the error surface obtained by comparing the surface shape detection result of the processed optical workpiece with the target surface shape model. By comparing different removal functions, the optimized shape and diameter of the polishing disc and removal function are selected, and the corresponding processing trajectory, dwell time and error prediction are obtained.

Multiple polishing robots of the present invention are placed in the processing area, which can realize the processing of large-diameter mirrors, and can quickly adapt to the processing of different-diameter mirrors by changing the number of robots, with low cost and small footprint.

The grinding and polishing trajectory planning of the grinding and polishing robot of the present invention is integrated in the control mechanism, which can directly follow the planned trajectory of the grinding and polishing robot and the rotational speed of the grinding and polishing end without changing the control system according to the changes of the robot and processing components. Therefore, the grinding and polishing of the present invention Robot integration is high. Due to the constraints of the machine tool mechanism, the traditional polishing machine adopts a dual-rotor or flat-rotation movement mode, and the corresponding removal function has a sharp peak, so the convergence efficiency is not high. However, the polishing robot of the present invention has a high degree of freedom in trajectory and can realize eccentricity. Trajectory of changing rate, traditional grinding and polishing adopts the trajectory of scanning line or latitude line, the removal efficiency of complex error surface is not high, the error surface adaptive trajectory planning module of the present invention plans the grinding and polishing trajectory of the grinding and polishing robot according to the geometric characteristics of the error surface , respectively get the processing trajectory, dwell time, removal function and error prediction, which makes the processing surface close to the target surface and improves the processing efficiency.

The idea, specific structure and technical effects of the present invention will be further described below in conjunction with the accompanying drawings, so that those skilled in the art can fully understand the purpose, features and effects of the present invention.

Description of drawings

Fig. 1 is a schematic diagram of a preferred embodiment of the present invention;

Fig. 2 is a schematic diagram of a polishing robot of a preferred embodiment of the present invention;

Fig. 3 is a side view of the polishing robot of a preferred embodiment of the present invention;

Fig. 4 is a schematic diagram of a polishing robot wrist in a preferred embodiment of the present invention;

Fig. 5 is a side view of the polishing robot wrist of a preferred embodiment of the present invention;

Fig. 6 is a schematic diagram of the end of the polishing robot in a preferred embodiment of the present invention;

Fig. 7 is a structural block diagram of the grinding and polishing robot system of a preferred embodiment of the present invention;

Fig. 8 is a structural block diagram of the error curved surface adaptive trajectory planning of the polishing robot system of the present invention.

Detailed ways

The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: this embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following the described embodiment.

As shown in FIG. 1 , this embodiment includes a polishing robot 1 .

As shown in Figures 2 to 6, the polishing robot includes: a base 2, a turntable 3, a large arm 4, an upper joint 5, a small arm 6, a wrist 7, the first to third RV reducers 8 to 10, the first To the third harmonic reducer 11-13, the first to the fourth bearing 14-17, the first bevel gear 18, the second bevel gear 19, the first to the third synchronous pulley set 20-22, the wrist shaft 23, Forearm input shaft 24, polishing input shaft 25, first to sixth servo motors 26-31, polishing rotating shaft 32, polishing outer cylinder 33, polishing disc 34, spring 35, pin 36, wherein, the turntable 2 It is connected with the base 3 through the first RV reducer 8, the first servo motor 26 is connected with the first RV reducer 8, the turntable 3 is connected with the boom 4 through the second RV reducer 9, and the second servo motor 27 is connected with the second RV reducer 8. The RV reducer 9 is connected, the boom 4 is connected to the upper joint 5 through the third RV reducer 10, the third servo motor 28 is connected to the third RV reducer 10, the upper joint 5 is connected to the fourth servo motor 29, and the first The synchronous pulley set 20 is connected with the first harmonic reducer 11, the first harmonic reducer 11 is connected with the arm input shaft 24, the arm 6 is connected with the fifth servo motor 30, and the second synchronous pulley set 21 is connected with the The second harmonic reducer 12 is connected, the second harmonic reducer 12 is connected with the wrist shaft 23, the wrist shaft 23 is installed on the wrist 7 through the first bearing 14 and the second bearing 15, and the forearm 6 is connected with the sixth servo motor 31 Connected, connected with the first bevel gear 18 through the third synchronous pulley set 22, the first bevel gear 18 is installed on the wrist 7 through the third bearing 16 and connected with the second bevel gear 19, the second bevel gear 19 is connected with the grinding and polishing The input shaft 25 is connected, the polishing input shaft 25 is installed on the wrist 7 through the fourth bearing 17, the polishing input shaft 25 is connected with the third harmonic speed reducer 13, and the third harmonic speed reducer 13 is connected with the polishing rotating shaft 32 , The polishing rotating shaft 32 cooperates with the polishing outer cylinder 33, the movement of the polishing outer cylinder 33 is restricted by the spring 35 and the pin 36, and the polishing outer cylinder 33 is hinged with the polishing disc 34.

When the polishing robot 1 is working, the first servo motor 26 drives the turntable 3 to rotate through the first RV reducer 8, the second servo motor 27 drives the boom 4 to swing back and forth through the second RV reducer 9, and the third servo motor 28 passes through The third RV reducer 10 drives the upper joint 5 to rotate, the fourth servo motor 29 is connected to the first harmonic reducer 11 through the first synchronous pulley set 20 to drive the forearm input shaft 24 to drive the forearm 6 to rotate, and the fifth servo motor 30 is connected to the second harmonic reducer 12 through the second synchronous pulley set 21 to drive the wrist 7 to rotate, and the sixth servo motor 31 is connected to the first bevel gear 18 through the third synchronous pulley set 22 to drive the second bevel gear set 19 and The polishing input shaft 25 rotates, and the third harmonic reducer 13 drives the polishing rotating shaft 22 to rotate, and the polishing rotating shaft 22 drives the polishing disc 34 to rotate through the pin 36, and the polishing pressure is provided by the spring 35.

As shown in Figure 7 and Figure 8, the six-dimensional force sensor and pressure sensor are connected to the signal processing computer module through a data acquisition card. The error surface adaptive trajectory planning module in the signal processing computer module performs error surface adaptive trajectory planning according to the geometric characteristics of the error surface obtained by comparing the surface shape detection result of the processed optical workpiece with the target surface shape model. By comparing different removal functions, the optimized shape and diameter of the polishing disc and removal function are selected, and the corresponding processing trajectory, dwell time and error prediction are obtained.

The preferred specific embodiments of the present invention have been described in detail above. It should be understood that those skilled in the art can make many modifications and changes according to the concept of the present invention without creative efforts. Therefore, all technical solutions that can be obtained by those skilled in the art based on the concept of the present invention through logical analysis, reasoning or limited experiments on the basis of the prior art shall be within the scope of protection defined by the claims.

Claims (6)

1. A robot system for active and compliant precision polishing of large-caliber complex optical mirrors, comprising: an optical mirror polishing robot module, a sensor module, a signal processing computer module and an active and compliant control module, characterized in that: The optical mirror polishing robot module includes: a base, a turntable, a large arm, an upper joint, a small arm, a wrist, the first to the third RV reducer, the first to the third harmonic reducer, the first to the fourth Bearing, first bevel gear, second bevel gear, first to third synchronous pulley set, wrist shaft, arm input shaft, spring, pin, grinding and polishing rotating shaft, grinding and polishing outer cylinder, grinding and polishing disc, first to Sixth servo motor; The sensor module includes: a six-dimensional force sensor and a pressure sensor; The signal processing computer module is used for signal processing, analysis of grinding and polishing processing conditions, and active compliance control anti-solution; The active compliance control module is used to control the trajectory of the robot, the rotational speed of the polishing disc and the air pressure of the polishing. the 2. The active and compliant precision polishing robot system for large-diameter complex optical mirrors according to claim 1, wherein the turntable is connected to the base through the first RV reducer, and the first servo motor It is connected with the first RV reducer, the turntable is connected with the boom through the second RV reducer, the second servo motor is connected with the second RV reducer, and the boom is connected with the second RV reducer. The upper joint is connected through the third RV reducer, the third servo motor is connected with the third RV reducer, the upper joint is connected with the fourth servo motor, and the first synchronous belt The wheel set is connected to the first harmonic reducer, the first harmonic reducer is connected to the arm input shaft, the arm is connected to the fifth servo motor, and the second synchronous belt The wheel set is connected with the second harmonic reducer, the second harmonic reducer is connected with the wrist shaft, the wrist shaft is mounted on the wrist through the first and second bearings, and the The forearm is connected with the sixth servo motor, connected with the first bevel gear through the third synchronous pulley set, and the first bevel gear is installed on the wrist through the third bearing and connected with the The second bevel gear is connected, the second bevel gear is connected with the polishing input shaft, the polishing input shaft is installed on the wrist through the fourth bearing, and the polishing input shaft is connected with the polishing input shaft. The third harmonic reducer is connected, the third harmonic reducer is connected with the grinding and polishing rotating shaft, the grinding and polishing rotating shaft cooperates with the grinding and polishing outer cylinder, and the grinding and polishing outer cylinder is limited by the spring and the pin. The movement of the polishing outer cylinder, the polishing outer cylinder is hingedly connected with the polishing disc. the 3. The active and compliant precision polishing robot system for large-caliber complex optical mirrors according to claim 1, wherein the signal processing computer module also includes an error surface adaptive trajectory planning module, and the error surface adaptive trajectory planning module The module is used to carry out adaptive trajectory planning of the error surface according to the geometric characteristics of the error surface obtained by comparing the surface shape detection result of the processed optical workpiece with the target surface shape model. the 4. The active and flexible precision polishing robot system for large-diameter complex optical mirrors according to claim 1, wherein the six-dimensional force sensor and pressure sensor are connected to the signal processing computer module through a data acquisition card. the 5. The large-diameter complex optical mirror precision polishing robot system according to claim 1, characterized in that, the end shaft of the polishing robot is connected to the polishing rotating shaft, and the polishing outer cylinder is driven by the cooperation of the polishing rotating shaft The polishing disc rotates. 6. The precision polishing robot system for large-diameter complex optical mirrors according to claim 1, wherein a plurality of said polishing robots can be set in the processing area, and the number of robots can be changed to process mirrors with different diameters. the

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