CN102901739A - Electromagnetic ray camera system and method - Google Patents

Abstract

The invention relates to an electromagnetic ray camera system, comprising: the device comprises a rotating platform module, an inclination angle control module, an object to be measured bearing module, a radiation source module and an image capturing module. The rotary platform module comprises a ring-shaped structure on a horizontal plane to rotate relative to a vertical central axis perpendicular to the horizontal plane. The tilt angle control module comprises a rotary half frame, two end points of which are connected with two ends of the horizontal diameter of the annular structure through a rotary pivot so as to rotate relative to the horizontal diameter. The object bearing module bears the object to be tested. The radiation source module provides electromagnetic radiation. The image capturing module is arranged on the rotating half frame, and when the annular rotating platform module rotates to a specific rotating angle and the inclination angle control module rotates to a specific inclination angle, the electromagnetic ray penetrating through the object to be detected is sensed. An electromagnetic radiography method is disclosed.

Description

Electromagnetic ray imaging system and method

technical field

The present invention relates to an electromagnetic ray imaging device, in particular to an electromagnetic ray imaging system and its method.

Background technique

The connection structures of integrated circuit chips often need to be connected by soldering or other techniques. Whether these connection technologies can stabilize the modules of the integrated circuit chip for electrical connection will affect whether the operation is normal or not. Therefore, in the existing technology, the chip is often photographed by means of X-ray development, so as to know the contact condition of the integrated circuit chip.

However, the existing known camera systems are often limited by the angle of the mechanism and cannot take a more comprehensive image of the integrated circuit chip, or when the moving mechanism of the camera module performs back and forth shooting, it is easy to produce the problem of uneven image capture . In some technologies, the camera module is fixed, and the platform carrying the chip is moved to take pictures, which has the disadvantage that it is not easy to fix the position and the center of rotation of the object under test.

Therefore, how to design a new electromagnetic ray imaging system and its method to overcome the above-mentioned problems is an urgent problem to be solved in the industry.

This shows that above-mentioned existing camera system obviously still has inconvenience and defect in method, product structure and use, and urgently needs to be further improved. Therefore, how to create a new electromagnetic ray imaging system and method has also become a goal that needs to be improved in the current industry.

Contents of the invention

The purpose of the present invention is to overcome the defects of the existing imaging system and provide a new electromagnetic radiation imaging system and method. The technical problem to be solved is to provide an electromagnetic radiation imaging system that can In addition to the advantage of achieving a wide range of imaging angles, the electromagnetic ray imaging system 1 of the present invention can achieve the effect of smooth imaging, which is very suitable for practical use.

Another object of the present invention is to overcome the defects existing in the existing imaging system, and provide a new structure of electromagnetic radiation imaging system and method, the technical problem to be solved is to provide an electromagnetic radiation imaging method applied to electromagnetic In the radiography system, it is more suitable for practical use.

The purpose of the present invention and the solution to its technical problems are achieved by adopting the following technical solutions. According to an electromagnetic ray imaging system proposed by the present invention, it includes: a rotating platform module, including a ring-shaped structure located on a horizontal plane, which is rotated relative to a vertical central axis perpendicular to the horizontal plane; a tilt angle control module , including a rotating half frame, the two ends of the rotating half frame are respectively connected to the two ends of a horizontal diameter on the annular structure by a rotating pivot, so as to rotate relative to the horizontal diameter; a test object carrying module, It is arranged in a hollow part surrounded by the annular structure, carrying an object to be tested; a radiation source module is arranged on a first side of the object-carrying module to provide an electromagnetic ray; and an imaging module, It is installed on the rotating half frame, so that when the annular rotating platform module is rotated to a specific rotation angle and the inclination angle control module is rotated to a specific inclination angle, a second side pair of the object carrying module penetrates the The electromagnetic radiation of the object under test is sensed.

The purpose of the present invention and its technical problems can also be further realized by adopting the following technical measures.

In the aforementioned electromagnetic ray imaging system, wherein the object-to-be-measured carrying module performs a horizontal displacement compensation according to the specific rotation angle and the specific tilt angle of the imaging module, and the radiation source module, The object under test and the imaging module are located on a straight line.

In the aforementioned electromagnetic ray imaging system, the object-under-test carrying module performs a vertical displacement to adjust an image-capturing magnification of the image-capturing module.

In the aforementioned electromagnetic ray imaging system, the range of the specific tilt angle of the tilt angle control module relative to a central position of the rotary platform module is 0° to ±70°.

In the aforementioned electromagnetic ray imaging system, the said rotating half frame is a square frame or an arc frame.

The aforementioned electromagnetic ray imaging system, wherein the electromagnetic ray is X-ray, the imaging module is an X-ray sensing module, the object under test is an integrated circuit chip, and the imaging module senses the integrated circuit A connection structure image of the chip.

The purpose of the present invention and the solution to its technical problem also adopt the following technical solutions to achieve. An electromagnetic ray imaging method according to the present invention is applied to an electromagnetic ray imaging system, which includes the following steps: rotating a rotating platform module of the electromagnetic ray imaging system to a specific rotation angle relative to a vertical central axis, wherein The rotating platform module includes an annular structure located on a horizontal plane, the vertical central axis is perpendicular to the horizontal plane; an inclination angle control module of the electromagnetic ray imaging system is rotated to a specific inclination angle relative to a horizontal diameter on the annular structure , wherein the inclination angle control module includes a rotating half frame, the two ends of which are respectively connected to the two ends of the horizontal diameter by a rotating pivot; so that a radiation source module of the electromagnetic ray imaging system is arranged in the ring structure A first side of an object-to-be-tested module surrounded by a hollow part provides an electromagnetic ray; The electromagnetic ray penetrating through an object under test on the object under test carrying module is sensed.

The purpose of the present invention and its technical problems can also be further realized by adopting the following technical measures.

The aforementioned electromagnetic ray imaging method further includes a step of making the object-under-test carrying module perform a horizontal displacement compensation according to the specific rotation angle and the specific tilt angle of the imaging module.

In the aforementioned electromagnetic ray imaging method, wherein the object carrying module makes the radiation source module, the object under test and the imaging module on a straight line by means of the horizontal displacement compensation.

The above-mentioned electromagnetic ray imaging method further includes a step of vertically displacing the object carrying module to adjust an imaging magnification of the imaging module.

Compared with the prior art, the present invention has obvious advantages and beneficial effects. It can be seen from the above technical solutions that the main technical content of the present invention is as follows: to provide an electromagnetic ray imaging system, including: a rotating platform module, an inclination angle control module, a test object carrying module, a radiation source module and an imaging module. The rotating platform module includes a ring-shaped structure positioned on a horizontal plane to rotate relative to a vertical central axis perpendicular to the horizontal plane. The inclination angle control module includes a rotating half-frame, and the two ends of the rotating half-frame are respectively connected to the two ends of the horizontal diameter on the ring structure by rotating pivots, and rotate relative to the horizontal diameter. The object-to-be-tested carrying module is arranged in the hollow part surrounded by the ring structure, and carries the object to be tested. The radiation source module is arranged on the first side of the object-carrying module to provide electromagnetic radiation. The imaging module is arranged on the rotating half frame. When the ring-shaped rotating platform module rotates to a specific rotation angle and the inclination angle control module rotates to a specific inclination angle, the second side of the object-carrying module will react to the electromagnetic wave penetrating the object under test. Rays are sensed. Another structure of the content of the present invention is to provide an electromagnetic ray imaging method, which is applied to an electromagnetic ray imaging system, and includes the following steps. The rotating platform module of the electromagnetic ray imaging system is rotated to a specific rotation angle relative to the vertical central axis, wherein the rotating platform module includes a ring structure located on the horizontal plane, and the vertical central axis is perpendicular to the horizontal plane. The inclination angle control module of the electromagnetic ray imaging system is rotated to a specific inclination angle relative to the horizontal diameter on the annular structure, wherein the inclination angle control module includes a rotating half frame, and its two ends are respectively connected to the two ends of the horizontal diameter by rotating pivots. The radiation source module of the electromagnetic radiation imaging system provides electromagnetic radiation on the first side of the object-to-be-tested module disposed in the hollow portion surrounded by the ring structure. The imaging module arranged on the rotating half frame senses the electromagnetic rays penetrating through the object under test on the object under test carrying module at the second side of the object under test carrying module.

By means of the above-mentioned technical solutions, the electromagnetic ray imaging system and method of the present invention have at least the following advantages and beneficial effects: the imaging module can perform large-angle imaging with a simple mechanical structure by setting the rotating platform module and the tilt angle control module. Moving can carry out continuous and smooth camera process, and easily achieve the above-mentioned purpose.

The above description is only an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention, it can be implemented according to the contents of the description, and in order to make the above and other purposes, features and advantages of the present invention more obvious and understandable , the following preferred embodiments are specifically cited below, and are described in detail as follows in conjunction with the accompanying drawings.

Description of drawings

FIG. 1 is a perspective view of an electromagnetic ray imaging system in an embodiment of the present invention;

Fig. 2A is a schematic diagram of the electromagnetic ray imaging system when the rotating platform module is at different rotation angles in an embodiment of the present invention;

Fig. 2B is a schematic diagram of the electromagnetic ray imaging system when the inclination angle control module is at different rotation angles in an embodiment of the present invention;

FIG. 3A and FIG. 3B are side views of an object-to-be-tested module, a radiation source module, and an imaging module in the electromagnetic ray imaging system, respectively.

FIG. 4 is a flow chart of an electromagnetic ray imaging method in an embodiment of the present invention.

1: Electromagnetic ray camera system 10: Rotary platform module

100: Hollow part 11: Vertical central axis

12: Tilt angle control module 120, 122: Rotation pivot

13: Horizontal diameter 14: DUT carrying module

15: Object to be tested 16: Radiation source module

17: Electromagnetic ray 18: Image acquisition module

401-404: Steps

Detailed ways

In order to further explain the technical means and effects that the present invention adopts to achieve the intended purpose of the invention, below in conjunction with the accompanying drawings and preferred embodiments, the specific implementation methods, methods, steps, Structure, characteristic and effect thereof are as follows in detail.

Please refer to Figure 1. FIG. 1 is a perspective view of an electromagnetic radiation imaging system 1 in an embodiment of the present invention. The electromagnetic imaging system 1 includes: a rotating platform module 10 , an inclination angle control module 12 , an object-to-be-tested module 14 , a radiation source module 16 and an imaging module 18 .

The body of the rotating platform module 10 is an annular structure located on a horizontal plane, and has a rotating mechanism (not shown) to rotate relative to a vertical central axis 11 perpendicular to the horizontal plane. It should be noted that the above-mentioned horizontal plane is only for describing the relative positions of the modules, and is not a specific horizontal plane. Please refer to FIG. 2A at the same time. FIG. 2A is a schematic diagram of the electromagnetic radiation imaging system 1 when the rotating platform module 10 is at different rotation angles in an embodiment of the present invention. It can be seen from FIG. 2A that the annular structure of the rotating platform module 10 can rotate relative to the vertical central axis 11 (direction A as shown in FIG. 1 and FIG. 2A ), so as to achieve a specific rotation angle as required. It should be noted that, in different embodiments, the rotating platform module 10 can rotate clockwise or counterclockwise, which is not limited to the directions shown in the drawings in this specification.

The body of the inclination angle control module 12 is a rotating half frame. In this embodiment, the shape of the rotating half frame is a square frame. However, in different embodiments, the shape of the rotating half frame can be an arc frame or a frame of other shapes. Two ends of the rotating half-frame are respectively connected to two ends of a horizontal diameter 13 on the ring structure of the rotating platform module 10 via rotating pivots 120 and 122 . Therefore, the tilt angle control module 12 can rotate relative to the horizontal diameter 13 . Please refer to Figure 2B. FIG. 2B is a schematic diagram of the electromagnetic radiation imaging system 1 when the inclination angle control module 12 is at different rotation angles in an embodiment of the present invention. It can be seen from FIG. 2B that the rotating half-frame of the inclination angle control module 12 can rotate relative to the horizontal diameter 13 (direction B as shown in FIG. 1 and FIG. 2B ), so as to reach the top of the rotating platform module 10 and the horizontal diameter 13 as required. Aligned center positions differ by a specific angle of inclination. It should be noted that, in different embodiments, the tilt angle control module 12 can rotate clockwise or counterclockwise, which is not limited to the directions shown in the drawings in this specification. In this embodiment, the specific tilt angle ranges from 0° to ±70°.

The object carrying module 14 is disposed in the hollow portion 100 surrounded by the ring structure of the rotating platform module 10 . The UUT carrying module 14 can be used to carry the UUT 15 . In one embodiment, the object under test 15 is an integrated circuit chip. Please refer to FIG. 3A and FIG. 3B at the same time. FIG. 3A and FIG. 3B are side views of the object carrying module 14 , the radiation source module 16 and the imaging module 18 in the electromagnetic radiation imaging system 1 . In one embodiment, the object carrying module 14 includes a movable movement mechanism for displacement in the horizontal direction C as shown in FIG. 3A or in the vertical direction D as shown in FIG. 3B .

The radiation source module 16 is disposed on the first side of the object carrying module 14 to provide electromagnetic radiation 17 (shown in FIG. 3A and FIG. 3B ). In one embodiment, the electromagnetic rays 17 can be X-rays. The image capturing module 18 is disposed on the rotating half frame of the tilt angle control module 12 . In this embodiment, the image capturing module 18 is fixed at approximately the middle of the rotating half-frame. Therefore, when the annular rotating platform module 10 rotates to a specific rotation angle, and the inclination angle control module 12 rotates to a specific inclination angle, the imaging module 18 is formed from the second side opposite to the first side of the object-carrying module 14. After the radiation source module 16 is emitted, the electromagnetic radiation 17 that penetrates the object under test 15 is sensed.

In one embodiment, the movement of the object-to-be-tested module 14 in the horizontal direction C as shown in FIG. In a straight line to achieve the best imaging effect. The displacement of the object bearing module 14 in the vertical direction D as shown in FIG. 3B can adjust the imaging magnification of the imaging module 18 . For example, when the object-to-be-tested module 14 moves toward the direction approaching the imaging module 18, the magnification can be reduced to obtain a larger field of view, and when it moves away from the imaging module 18, a smaller magnification will be obtained. The field of view can increase the magnification.

Therefore, when the object under test 15 is an integrated circuit chip, the imaging module 18 can achieve a large angle range of imaging by controlling the angle of the annular rotating platform module 10 and the tilt angle control module 12 to sense the integrated circuit chip The image of the connection structure of the integrated circuit chip is used to further judge whether the connection structure of the integrated circuit chip is well bonded. In addition to the advantage of being able to achieve a wide range of imaging angles with a simple mechanism, the electromagnetic ray imaging system 1 of the present invention can also achieve the effect of smooth imaging.

Please refer to Figure 4. FIG. 4 is a flow chart of an electromagnetic ray imaging method in an embodiment of the present invention. The electromagnetic radiography method can be applied to the electromagnetic radiography system 1 shown in FIG. 1 . The electromagnetic ray imaging method includes the following steps (it should be understood that the steps mentioned in this embodiment, except those whose order is specifically stated, can be adjusted according to actual needs, and can even be executed simultaneously or partially simultaneously) .

Step 401, rotate the rotating platform module 10 of the electromagnetic ray imaging system 1 to a specific rotation angle relative to the vertical central axis 11, wherein the rotating platform module 10 includes a ring structure located on the horizontal plane, and the vertical central axis 11 is perpendicular to the horizontal plane. Step 402, rotate the inclination angle control module 12 of the electromagnetic ray imaging system 1 to a specific inclination angle relative to the horizontal diameter 13 of the annular structure, wherein the inclination angle control module 12 includes a rotating half frame, and its two ends are respectively rotated by the rotation pivot 120 and 122 are connected to the two ends of the horizontal diameter 13 on the annular structure. Step 403 , make the radiation source module 16 of the electromagnetic radiation imaging system 1 provide electromagnetic radiation 17 on the first side of the object-to-be-tested module 14 disposed in the hollow portion surrounded by the ring structure. Step 404 , make the imaging module 18 disposed on the rotating half-frame sense the electromagnetic rays 17 penetrating the object under test 15 on the object under test carrying module 14 on the second side of the object under test carrying module 14 .

The advantage of applying the content of the present invention is that the imaging module can be moved at a large angle with a simple mechanical structure through the arrangement of the rotating platform module and the tilt angle control module, and can carry out a continuous and smooth imaging process, thereby easily achieving the above-mentioned Purpose.

The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any form. Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Anyone familiar with this field Those skilled in the art, without departing from the scope of the technical solution of the present invention, may use the technical content disclosed above to make some changes or modify them into equivalent embodiments with equivalent changes, but as long as they do not depart from the technical solution of the present invention, the Technical Essence Any simple modifications, equivalent changes and modifications made to the above embodiments still fall within the scope of the technical solution of the present invention.

Claims (10)

1. electromagnetic radiation camera system is characterized in that comprising:

One rotation platform module comprises a ring texture that is positioned on the surface level, is rotated with a relative vertical center axis perpendicular to this surface level;

One pitch angle control module comprises a rotation half frame, and this two-end-point that rotates half frame is connected in respectively the two ends of a horizontal diameter on this ring texture by a rotating hinge, and making relatively, this horizontal diameter is rotated;

One determinand carrier module, be arranged at this ring texture around a hollow space, carry a determinand;

One penetrates source module, is arranged at one first side of this determinand carrier module, so that an electromagnetic radiation to be provided; And

One image extraction module, being arranged at this rotates on half frame, make the rotation of this ring-type rotation platform module to a specific anglec of rotation and this pitch angle control module rotation during to a certain tilt angle, one second side of this determinand carrier module is carried out sensing to this electromagnetic radiation that penetrates this determinand.

2. electromagnetic radiation camera system as claimed in claim 1, it is characterized in that this determinand carrier module carries out horizontal shift compensation according to this specific anglec of rotation and this certain tilt angle of this image extraction module, makes this penetrate source module, this determinand and this image extraction module by this horizontal shift compensation and is positioned on the straight line.

3. electromagnetic radiation camera system as claimed in claim 1 is characterized in that this determinand carrier module carries out a perpendicular displacement, adjusts a capture multiplying power of this image extraction module.

4. electromagnetic radiation camera system as claimed in claim 1, this certain tilt angle that it is characterized in that this pitch angle control module relatively scope of a middle position of this rotation platform module is that 0 degree is to ± 70 degree.

5. electromagnetic radiation camera system as claimed in claim 1 is characterized in that this rotates half frame is a square box or an arc frame.

6. electromagnetic radiation camera system as claimed in claim 1, it is characterized in that this electromagnetic radiation is X ray, this image extraction module is an X ray sensing module, and this determinand is an integrated circuit (IC) chip, and this image extraction module is a syndeton image of this integrated circuit (IC) chip of sensing.

7. electromagnetic radiation image capture method is applied to it is characterized in that comprising the following step in the electromagnetic radiation camera system:

Make the relative vertical center axis rotation of a rotation platform module of this electromagnetic radiation camera system to a specific anglec of rotation, wherein the rotation platform module comprises a ring texture that is positioned on the surface level, and this vertical center axis is perpendicular to this surface level;

A pitch angle control module that makes this electromagnetic radiation camera system relatively on this ring texture horizontal diameter rotation to a certain tilt angle, wherein this pitch angle control module comprises a rotation half frame, and its two-end-point is connected in respectively the two ends of this horizontal diameter by a rotating hinge;

Make one of this electromagnetic radiation camera system penetrate source module in be arranged at this ring texture around one first side of a determinand carrier module of a hollow space one electromagnetic radiation is provided; And

Make to be arranged at this and to rotate a image extraction module on half frame, in one second side of this determinand carrier module this electromagnetic radiation that penetrates the determinand on this determinand carrier module is carried out sensing.

8. electromagnetic radiation image capture method as claimed in claim 7 is characterized in that more comprising a step: make this determinand carrier module carry out horizontal shift compensation according to this specific anglec of rotation and this certain tilt angle of this image extraction module.

9. electromagnetic radiation image capture method as claimed in claim 8 is characterized in that this determinand carrier module makes this penetrate source module, this determinand and this image extraction module by this horizontal shift compensation and is positioned on the straight line.

10. electromagnetic radiation image capture method as claimed in claim 7 is characterized in that more comprising a step: make this determinand carrier module carry out a perpendicular displacement, adjust a capture multiplying power of this image extraction module.

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