CN102896129A - Slowly lifting air exhaust device for solar photovoltaic cleaning tank - Google Patents
Slowly lifting air exhaust device for solar photovoltaic cleaning tank Download PDFInfo
- Publication number
- CN102896129A CN102896129A CN2012104294202A CN201210429420A CN102896129A CN 102896129 A CN102896129 A CN 102896129A CN 2012104294202 A CN2012104294202 A CN 2012104294202A CN 201210429420 A CN201210429420 A CN 201210429420A CN 102896129 A CN102896129 A CN 102896129A
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- CN
- China
- Prior art keywords
- rinse bath
- slowly
- cleaning tank
- laminar flow
- exhaust device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000004140 cleaning Methods 0.000 title claims abstract description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052710 silicon Inorganic materials 0.000 abstract description 7
- 239000010703 silicon Substances 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 6
- 230000018044 dehydration Effects 0.000 abstract description 2
- 238000006297 dehydration reaction Methods 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000007664 blowing Methods 0.000 description 2
- 230000036461 convulsion Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a slowly lifting air exhaust device for a solar photovoltaic cleaning tank. The slowly lifting air exhaust device comprises a lifting bracket, a laminar flow fan and an air exhaust device, wherein the lifting bracket extends out of the cleaning tank and is used for slowly lifting cleaning baskets from the cleaning tank; the laminar flow fan is arranged above the cleaning tank and is connected with a purified air pipeline; an air outlet of the laminar flow fan corresponds to the lifting bracket; and the air exhaust device is arranged on the top of the cleaning tank. By the device, a cleaned silicon chip can be pre-dehydrated, water vapor is effectively prevented from being attached to the silicon chip in the dehydration process again, and subsequent process manufacturing is guaranteed.
Description
Technical field
The present invention relates to a kind of extractor fan, relate in particular to and a kind ofly carry slowly extractor fan for the photovoltaic rinse bath.
Background technology
In the groove-type cleaning machine in the photovoltaic cleaning equipment, slowly carry groove and carry out predrainage to cleaning complete silicon chip, because in a higher specific range of temperatures, more be conducive to predrainage, so it is higher generally to put forward slowly the temperature of the pure water in the groove, hydrone just evaporates into steam easily like this, the steam that volatilizes can move upward along groove face, will cause like this carrying slowly frame steam in the process of upwards mentioning and again be attached to silicon chip surface, affect follow-up technique and made.
Summary of the invention
The objective of the invention is the defective that exists for above-mentioned prior art, provide a kind of and carry slowly extractor fan for the photovoltaic rinse bath.
The technical solution used in the present invention is, design a kind of for the photovoltaic rinse bath carry slowly extractor fan, comprising: the lifting bracket that stretches out from rinse bath is used for cleaning basket and slowly mentions from rinse bath; Be arranged on the rinse bath top, the laminar flow blower fan that is connected with the pipeline that purifies air, the air outlet of this laminar flow blower fan is corresponding with described lifting bracket; With the extractor fan of being located at the rinse bath top.
In one embodiment, described laminar flow fan outlet is provided with a filter for molten.Described extractor fan comprises suction opeing, air exhauster and the exhaust duct of being located at the rinse bath side, and it is removable directly over the rinse bath overfall in the vertical direction to be installed, and is used for the exhausting baffle plate of control exhausting amount.
Compared with prior art, the present invention can clean the globule of the silicon chip surface of predrainage in the basket and the steam that volatilizes to blowing down, at last by extractor fan, pass through air draft pipe, wind is extracted out from groove face, effectively prevented in the dehydration, steam again adhere to silicon chip, guaranteed that follow-up technique makes.
Description of drawings
Fig. 1 is structural representation of the present invention;
Fig. 2 is groove face structural representation of the present invention.
The specific embodiment
Below in conjunction with drawings and Examples invention is described in detail.
As shown in Figure 1, the extractor fan of carrying slowly that is used for the photovoltaic rinse bath that the present invention proposes comprises: from the lifting bracket 1 that rinse bath 7 stretches out, be used for cleaning basket 7 and slowly mention from rinse bath; Be arranged on rinse bath top, the laminar flow blower fan 2 that is connected with the pipeline that purifies air, the air outlet of this laminar flow blower fan 2 is corresponding with described lifting bracket 1; With do not mark among the extractor fan 3(figure that is located at the rinse bath top), described laminar flow blower fan 1 air outlet is provided with a filter for molten 4.
As shown in Figure 1 and Figure 2, described extractor fan 3 comprises suction opeing 5, air exhauster and the exhaust duct of being located at the rinse bath side.It is removable directly over the rinse bath overfall in the vertical direction to be installed, and is used for the exhausting baffle plate 6 of control exhausting amount.
In the present invention, laminar flow blower fan 2 will be blown down from the equipment top through the purify air air of pipeline of stream, pass through again the filtration of filter 4, blow to the cleaning basket 7 of being carried slowly carriage 1 and slowly holding out, utilize wind-force will clean the globule of basket 7 interior silicon chip surfaces and the steam that volatilizes to blowing down, by the suction opeing 5 of rinse bath side, at last by the air exhauster twitch effect of equipment top, by air draft pipe, wind to be extracted out from groove face, whole process forms flowing of wind.
Above-described embodiment only is used for explanation the specific embodiment of the present invention.Should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and variation, these distortion and variation all should belong to protection scope of the present invention.
Claims (4)
- One kind be used for the photovoltaic rinse bath carry slowly extractor fan, it is characterized in that comprising: the lifting bracket that stretches out from rinse bath (1) is used for cleaning basket (7) and slowly mentions from rinse bath; Be arranged on the rinse bath top, the laminar flow blower fan (2) that is connected with the pipeline that purifies air, the air outlet of this laminar flow blower fan is corresponding with described lifting bracket; With the extractor fan of being located at the rinse bath top (3).
- 2. the extractor fan of carrying slowly as claimed in claim 1, it is characterized in that: described laminar flow blower fan (1) air outlet is provided with a filter for molten (4).
- 3. the extractor fan of carrying slowly as claimed in claim 1, it is characterized in that: described extractor fan comprises suction opeing (5), air exhauster and the exhaust duct of being located at the rinse bath side.
- 4. the extractor fan of carrying slowly as claimed in claim 1, it is characterized in that: it is removable directly over the rinse bath overfall in the vertical direction to be installed, and is used for the exhausting baffle plate (6) of control exhausting amount.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104294202A CN102896129A (en) | 2012-11-01 | 2012-11-01 | Slowly lifting air exhaust device for solar photovoltaic cleaning tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104294202A CN102896129A (en) | 2012-11-01 | 2012-11-01 | Slowly lifting air exhaust device for solar photovoltaic cleaning tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102896129A true CN102896129A (en) | 2013-01-30 |
Family
ID=47568787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012104294202A Pending CN102896129A (en) | 2012-11-01 | 2012-11-01 | Slowly lifting air exhaust device for solar photovoltaic cleaning tank |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102896129A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107742659A (en) * | 2017-09-25 | 2018-02-27 | 常州捷佳创精密机械有限公司 | A method for controlling the speed of a process tank mechanical arm |
| CN111437671A (en) * | 2019-01-17 | 2020-07-24 | 青岛海尔空调器有限总公司 | air purifier |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999008057A2 (en) * | 1997-08-07 | 1999-02-18 | Applied Materials, Inc. | Method and apparatus for drying substrates |
| US6179930B1 (en) * | 1996-06-14 | 2001-01-30 | Seiko Epson Corporation | Pull-up drying method and apparatus |
| US20010037764A1 (en) * | 2000-05-08 | 2001-11-08 | Satoshi Nakashima | Liquid treatment system and liquid treatment method |
| JP2005079138A (en) * | 2003-08-28 | 2005-03-24 | Tadahiro Omi | Draft chamber and cleaning device |
| JP2009158564A (en) * | 2007-12-25 | 2009-07-16 | Dainippon Screen Mfg Co Ltd | Substrate treatment apparatus and substrate treatment method |
| CN201583107U (en) * | 2009-11-17 | 2010-09-15 | 均豪精密工业股份有限公司 | Improved substrate drying system |
| CN102013388A (en) * | 2009-09-03 | 2011-04-13 | 东京毅力科创株式会社 | Chamber cleaning method |
| US20120000886A1 (en) * | 2010-07-05 | 2012-01-05 | Tokyo Electron Limited | Substrate processing apparatus and substrate processing method |
-
2012
- 2012-11-01 CN CN2012104294202A patent/CN102896129A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6179930B1 (en) * | 1996-06-14 | 2001-01-30 | Seiko Epson Corporation | Pull-up drying method and apparatus |
| WO1999008057A2 (en) * | 1997-08-07 | 1999-02-18 | Applied Materials, Inc. | Method and apparatus for drying substrates |
| US20010037764A1 (en) * | 2000-05-08 | 2001-11-08 | Satoshi Nakashima | Liquid treatment system and liquid treatment method |
| JP2005079138A (en) * | 2003-08-28 | 2005-03-24 | Tadahiro Omi | Draft chamber and cleaning device |
| JP2009158564A (en) * | 2007-12-25 | 2009-07-16 | Dainippon Screen Mfg Co Ltd | Substrate treatment apparatus and substrate treatment method |
| CN102013388A (en) * | 2009-09-03 | 2011-04-13 | 东京毅力科创株式会社 | Chamber cleaning method |
| CN201583107U (en) * | 2009-11-17 | 2010-09-15 | 均豪精密工业股份有限公司 | Improved substrate drying system |
| US20120000886A1 (en) * | 2010-07-05 | 2012-01-05 | Tokyo Electron Limited | Substrate processing apparatus and substrate processing method |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107742659A (en) * | 2017-09-25 | 2018-02-27 | 常州捷佳创精密机械有限公司 | A method for controlling the speed of a process tank mechanical arm |
| CN111437671A (en) * | 2019-01-17 | 2020-07-24 | 青岛海尔空调器有限总公司 | air purifier |
| CN111437671B (en) * | 2019-01-17 | 2023-04-14 | 青岛海尔空调器有限总公司 | air purifier |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20130130 |