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CN102896061B - Piezoelectric micro-jet device based on bending vibration sandwich transducer - Google Patents

Piezoelectric micro-jet device based on bending vibration sandwich transducer Download PDF

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Publication number
CN102896061B
CN102896061B CN201210389763.0A CN201210389763A CN102896061B CN 102896061 B CN102896061 B CN 102896061B CN 201210389763 A CN201210389763 A CN 201210389763A CN 102896061 B CN102896061 B CN 102896061B
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piezoelectric ceramic
end cover
piezoelectric
bending vibration
sheets
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CN102896061A (en
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刘英想
陈维山
刘军考
石胜君
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Harbin Institute of Technology Shenzhen
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Harbin Institute of Technology Shenzhen
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Abstract

基于弯振夹心换能器的压电微喷装置,涉及压电微喷技术领域。它解决了现有采用贴片结构的压电微喷装置所普遍存在的能量利用率低和喷射量提高受限制等问题。本发明的两片压电陶瓷片均设置在后端盖与前端盖之间,后端盖与一个压电陶瓷片之间、前端盖与另一个压电陶瓷片之间均设置有一个电极片;两片压电陶瓷片之间设置有两个共面且存有间隙的电极片;两片压电陶瓷片均沿厚度方向极化,且极化方向相反;喷嘴上开有圆锥形内腔,圆锥形内腔的底部开有喷射通孔,圆锥形内腔上部的一侧开有进流孔;前端盖末端的底面与振动片的顶面固定连接,振动片的底面将喷嘴中圆锥形内腔的大开口端完全覆盖。本发明适用于药物注射、打印成像、微量润滑等领域。

The invention relates to a piezoelectric micro-spraying device based on a bending-vibration sandwich transducer, and relates to the technical field of piezoelectric micro-spraying. It solves the common problems of low energy utilization rate and limited improvement of spraying quantity in existing piezoelectric micro-spraying devices adopting patch structure. The two piezoelectric ceramic sheets of the present invention are arranged between the rear end cover and the front end cover, and an electrode sheet is arranged between the rear end cover and one piezoelectric ceramic sheet, and between the front end cover and another piezoelectric ceramic sheet ; There are two coplanar electrode sheets with a gap between the two piezoelectric ceramic sheets; the two piezoelectric ceramic sheets are polarized along the thickness direction, and the polarization directions are opposite; the nozzle has a conical inner cavity , the bottom of the conical inner cavity is provided with a spray through hole, and one side of the upper part of the conical inner cavity is provided with an inflow hole; the bottom surface of the end of the front end cover is fixedly connected with the top surface of the vibrating piece, and the bottom surface of the vibrating piece is connected to the conical shape of the nozzle. The large open end of the lumen is completely covered. The invention is applicable to the fields of drug injection, printing and imaging, micro-lubrication and the like.

Description

基于弯振夹心换能器的压电微喷装置Piezoelectric Micro-injection Device Based on Bending Vibration Sandwich Transducer

技术领域technical field

本发明涉及到一种基于弯振夹心换能器的压电微喷装置,属于压电微喷技术领域。The invention relates to a piezoelectric micro-injection device based on a bending-vibration sandwich transducer, and belongs to the technical field of piezoelectric micro-injection.

背景技术Background technique

压电微喷技术是一种利用压电陶瓷的逆压电效应,在弹性体中激励出振动,并与液体腔中液体相互作用,产生的压力波传递到喷嘴处导致液体射流从喷嘴喷出进而雾化为液滴。液滴的大小和速度与驱动电压的幅值和频率有关。压电喷射技术不会造成所喷射液体的物理/化学变化,对液体自身几乎没有损害;此外,压电喷射还具有控制灵活简单、功耗低、体积小和易于集成的突出优点。在药物注射、打印成像、微量润滑等领域都具有十分广阔的应用价值。Piezoelectric micro-spray technology is a kind of inverse piezoelectric effect of piezoelectric ceramics, which excites vibration in the elastic body and interacts with the liquid in the liquid chamber. The pressure wave generated is transmitted to the nozzle to cause the liquid jet to be ejected from the nozzle. And then atomized into droplets. The size and speed of the droplet are related to the amplitude and frequency of the driving voltage. Piezoelectric injection technology does not cause physical/chemical changes in the injected liquid, and has almost no damage to the liquid itself; in addition, piezoelectric injection has the outstanding advantages of flexible and simple control, low power consumption, small size and easy integration. It has very broad application value in the fields of drug injection, printing and imaging, and micro-lubrication.

但是,出于激励原理的简单性和理论分析方法的简便性,目前成熟的压电微喷装置大多采用金属弹性片粘贴压电陶瓷薄片的方式进行激励,压电陶瓷工作在低机电耦合效率的d31模式,能量利用率较低;此外,该振动模式获得的振动强度偏低,限制了该类装置喷射量的提高。However, due to the simplicity of the excitation principle and the simplicity of the theoretical analysis method, most of the current mature piezoelectric micro-spray devices use metal elastic sheets pasted with piezoelectric ceramic sheets for excitation. Piezoelectric ceramics work at low electromechanical coupling efficiency. In the d 31 mode, the energy utilization rate is low; in addition, the vibration intensity obtained by this vibration mode is low, which limits the improvement of the injection volume of this type of device.

发明内容Contents of the invention

为了解决现有采用贴片结构的压电微喷装置所普遍存在的能量利用率低和喷射量提高受限制的问题,本发明提供了一种基于弯振夹心换能器的压电微喷装置。In order to solve the common problems of low energy utilization rate and limited injection quantity improvement in existing piezoelectric micro-injection devices with a patch structure, the present invention provides a piezoelectric micro-injection device based on a bending vibration sandwich transducer .

本发明的基于弯振夹心换能器的压电微喷装置,它包括弯振夹心换能器1、振动片2和喷嘴3;弯振夹心换能器1包括后端盖1-1、前端盖1-2、两片压电陶瓷片1-3和四片电极片1-4,所述两片压电陶瓷片1-3依次设置在后端盖1-1与前端盖1-2之间,后端盖1-1与一个压电陶瓷片1-3之间设置有一个电极片1-4,前端盖1-2与另一个压电陶瓷片1-3之间设置有一个电极片1-4;两片压电陶瓷片1-3之间设置有两个电极片1-4,该两个电极片1-4位于同一平面上,且该两个电极片1-4之间存有间隙;两片压电陶瓷片1-3均沿厚度方向极化,且两片压电陶瓷片1-3的极化方向相反;喷嘴3上开有圆锥形内腔3-1,圆锥形内腔3-1的底部开有喷射通孔3-3,圆锥形内腔3-1上部的侧壁上开有进流孔3-2;前端盖1-2末端的底面与振动片2的顶面固定连接,所述振动片2的底面与喷嘴3中圆锥形内腔3-1的大开口端边缘固定连接,且将喷嘴3中圆锥形内腔3-1的大开口端完全覆盖。The piezoelectric microspray device based on the bending vibration sandwich transducer of the present invention includes a bending vibration sandwich transducer 1, a vibrating plate 2 and a nozzle 3; the bending vibration sandwich transducer 1 includes a rear end cover 1-1, a front end Cover 1-2, two piezoelectric ceramic sheets 1-3 and four electrode sheets 1-4, the two piezoelectric ceramic sheets 1-3 are sequentially arranged between the rear end cover 1-1 and the front end cover 1-2 An electrode piece 1-4 is arranged between the rear end cover 1-1 and a piezoelectric ceramic piece 1-3, and an electrode piece is arranged between the front end cover 1-2 and another piezoelectric ceramic piece 1-3 1-4; two electrode sheets 1-4 are arranged between two piezoelectric ceramic sheets 1-3, and the two electrode sheets 1-4 are located on the same plane, and there is an electrode sheet between the two electrode sheets 1-4. There is a gap; the two piezoelectric ceramic sheets 1-3 are polarized along the thickness direction, and the polarization directions of the two piezoelectric ceramic sheets 1-3 are opposite; the nozzle 3 has a conical inner cavity 3-1, conical The bottom of the inner chamber 3-1 is provided with a spray through hole 3-3, and the upper side wall of the conical inner chamber 3-1 is provided with an inlet hole 3-2; The top surface is fixedly connected, and the bottom surface of the vibrating piece 2 is fixedly connected to the edge of the large opening end of the conical inner cavity 3-1 in the nozzle 3, and completely covers the large opening end of the conical inner cavity 3-1 in the nozzle 3.

本发明的基于弯振夹心换能器的压电微喷装置在工作时弯振换能器采用两相在时间上具有180度相位差的交流电压信号进行激励,设置于前端盖与压电陶瓷片之间以及设置于后端盖与压电陶瓷片之间的电极片均与激励信号的公共端连接,设置于两片压电陶瓷片之间的两片电极片分别与两相驱动信号连接,进而通过压电陶瓷片两侧交替的伸缩振动实现换能器弯曲振动的激励,进一步带动连接在前端盖末端的振动片产生弯曲振动,振动片会与圆锥形内腔中的液体相互作用,产生的压力波传递到喷嘴处最终实现液体射流从喷嘴喷出。通过控制压电陶瓷上施加的激励电压的幅值,可以实现对喷射量的精确控制。When the piezoelectric micro-spray device based on the bending vibration sandwich transducer of the present invention is in operation, the bending vibration transducer adopts two-phase AC voltage signals with a phase difference of 180 degrees in time for excitation, and is arranged on the front end cover and the piezoelectric ceramic The electrode sheets between the two piezoelectric ceramic sheets and the electrode sheets arranged between the rear end cover and the piezoelectric ceramic sheet are connected to the common terminal of the excitation signal, and the two electrode sheets arranged between the two piezoelectric ceramic sheets are respectively connected to the two-phase drive signal , and then through the alternate stretching vibration on both sides of the piezoelectric ceramic sheet to realize the excitation of the bending vibration of the transducer, and further drive the vibration piece connected to the end of the front cover to generate bending vibration, the vibration piece will interact with the liquid in the conical cavity, The generated pressure wave is transmitted to the nozzle and finally realizes the ejection of the liquid jet from the nozzle. By controlling the magnitude of the excitation voltage applied to the piezoelectric ceramics, precise control of the injection volume can be achieved.

本发明中压电陶瓷工作在高机电耦合效率的d33模式,能量利用率较高,可充分提高能量利用率并有效提高前端盖末端质点的振幅,最终会使该装置喷射量得到有效的提高。In the present invention, the piezoelectric ceramic works in the d33 mode with high electromechanical coupling efficiency, and the energy utilization rate is high, which can fully improve the energy utilization rate and effectively increase the amplitude of the particle at the end of the front cover, and finally effectively increase the injection volume of the device.

本发明的基于弯振夹心换能器的压电微喷装置具有能量利用率高、可实现大剂量喷射、工作稳定性好等优点。The piezoelectric micro-injection device based on the bending-vibration sandwich transducer of the present invention has the advantages of high energy utilization rate, large-dose injection, good working stability and the like.

附图说明Description of drawings

图1是本发明所述的基于弯振夹心换能器的压电微喷装置的剖视图,图2是图1所示基于弯振夹心换能器的压电微喷装置中弯振夹心换能器的立体结构示意图,图3是图2所示弯振夹心换能器的局部视图,图4是图1所示基于弯振夹心换能器的压电微喷装置中的喷嘴的结构示意图,图5是图1所示基于弯振夹心换能器的压电微喷装置工作原理示意图。Fig. 1 is the cross-sectional view of the piezoelectric micro-injection device based on the bending-vibration sandwich transducer according to the present invention, and Fig. 2 is a bending-vibration sandwich transducer in the piezoelectric micro-injection device based on the bending-vibration sandwich transducer shown in Fig. 1 Fig. 3 is a partial view of the bending vibration sandwich transducer shown in Fig. 2, and Fig. 4 is a structural schematic diagram of the nozzle in the piezoelectric micro-injection device based on the bending vibration sandwich transducer shown in Fig. 1, Fig. 5 is a schematic diagram of the working principle of the piezoelectric micro-injection device based on the bending vibration sandwich transducer shown in Fig. 1 .

具体实施方式Detailed ways

具体实施方式一:结合图1至图4说明本实施方式,本实施方式所述的基于弯振夹心换能器的压电微喷装置,它包括弯振夹心换能器1、振动片2和喷嘴3;弯振夹心换能器1包括后端盖1-1、前端盖1-2、两片压电陶瓷片1-3和四片电极片1-4,所述两片压电陶瓷片1-3依次设置在后端盖1-1与前端盖1-2之间,后端盖1-1与一个压电陶瓷片1-3之间设置有一个电极片1-4,前端盖1-2与另一个压电陶瓷片1-3之间设置有一个电极片1-4;两片压电陶瓷片1-3之间设置有两个电极片1-4,该两个电极片1-4位于同一平面上,且该两个电极片1-4之间存有间隙;两片压电陶瓷片1-3均沿厚度方向极化,且两片压电陶瓷片1-3的极化方向相反;喷嘴3上开有圆锥形内腔3-1,圆锥形内腔3-1的底部开有喷射通孔3-3,圆锥形内腔3-1上部的侧壁上开有进流孔3-2;前端盖1-2末端的底面与振动片2的顶面固定连接,所述振动片2的底面与喷嘴3中圆锥形内腔3-1的大开口端边缘固定连接,且将喷嘴3中圆锥形内腔3-1的大开口端完全覆盖。Specific embodiment 1: This embodiment is described in conjunction with Fig. 1 to Fig. 4, the piezoelectric micro-injection device based on the bending vibration sandwich transducer described in this embodiment includes a bending vibration sandwich transducer 1, a vibrating plate 2 and The nozzle 3; the bending vibration sandwich transducer 1 includes a rear end cover 1-1, a front end cover 1-2, two piezoelectric ceramic sheets 1-3 and four electrode sheets 1-4, the two piezoelectric ceramic sheets 1-3 are sequentially arranged between the rear end cover 1-1 and the front end cover 1-2, an electrode sheet 1-4 is arranged between the rear end cover 1-1 and a piezoelectric ceramic sheet 1-3, and the front end cover 1 An electrode sheet 1-4 is arranged between -2 and another piezoelectric ceramic sheet 1-3; two electrode sheets 1-4 are arranged between two piezoelectric ceramic sheets 1-3, and the two electrode sheets 1 -4 is located on the same plane, and there is a gap between the two electrode sheets 1-4; the two piezoelectric ceramic sheets 1-3 are polarized along the thickness direction, and the poles of the two piezoelectric ceramic sheets 1-3 The spraying direction is opposite; the nozzle 3 has a conical inner cavity 3-1, the bottom of the conical inner cavity 3-1 has a spray through hole 3-3, and the upper side wall of the conical inner cavity 3-1 has an inlet Orifice 3-2; the bottom surface of the end of the front end cover 1-2 is fixedly connected to the top surface of the vibrating piece 2, and the bottom surface of the vibrating piece 2 is fixedly connected to the edge of the large opening end of the conical inner cavity 3-1 in the nozzle 3, And the large opening end of the conical inner cavity 3-1 in the nozzle 3 is completely covered.

本实施方式的基于弯振夹心换能器的压电微喷装置在应用的时候,压电陶瓷片采用两相在时间上具有180度相位差的交流电压信号进行激励,设置于前端盖1-2与压电陶瓷片1-3之间以及设置于后端盖1-1与压电陶瓷片1-3之间的电极片1-4均与激励信号的公共端连接,设置于两片压电陶瓷片1-3之间的两片电极片1-4分别与两相驱动信号连接,进而通过压电陶瓷片两侧交替的伸缩振动实现换能器弯曲振动的激励,进一步带动连接在前端盖末端的振动片产生弯曲振动,振动片会与圆锥形内腔中的液体相互作用,产生的压力波传递到喷嘴处最终实现液体射流从喷嘴喷出;圆锥形内腔3-1通过进流孔3-2与外部流体供给系统连接。When the piezoelectric micro-spray device based on the bending vibration sandwich transducer of this embodiment is applied, the piezoelectric ceramic sheet is excited by two-phase AC voltage signals with a phase difference of 180 degrees in time, and is arranged on the front end cover 1- 2 and the piezoelectric ceramic sheet 1-3 and the electrode sheet 1-4 arranged between the rear end cover 1-1 and the piezoelectric ceramic sheet 1-3 are all connected to the common end of the excitation signal, and are arranged on the two piezoelectric ceramic sheets. The two electrode sheets 1-4 between the electric ceramic sheets 1-3 are respectively connected to the two-phase drive signals, and then the excitation of the bending vibration of the transducer is realized through the alternate stretching vibration on both sides of the piezoelectric ceramic sheet, which further drives the connection at the front end The vibrating piece at the end of the cover produces bending vibration, and the vibrating piece will interact with the liquid in the conical cavity, and the pressure wave generated will be transmitted to the nozzle, and finally the liquid jet will be ejected from the nozzle; the conical cavity 3-1 will pass through the inflow Hole 3-2 is connected to an external fluid supply system.

具体实施方式二:本实施方式与具体实施方式一所述的基于弯振夹心换能器的压电微喷装置的区别在于,所述纵振压电陶瓷片1-3截面为方形或圆形,这样可以简化加工与装配工艺。Embodiment 2: The difference between this embodiment and the piezoelectric micro-injection device based on the flexural vibration sandwich transducer described in Embodiment 1 is that the section of the longitudinal vibration piezoelectric ceramic sheet 1-3 is square or circular , which can simplify the processing and assembly process.

具体实施方式三:本实施方式与具体实施方式一所述的基于弯振夹心换能器的压电微喷装置的区别在于,所述前端盖1-2与振动片2连接位置位于振动片2中心位置,这样可以保证换能器1的弯曲振动有效用于激励振动片2的弯曲振动。Embodiment 3: The difference between this embodiment and the piezoelectric micro-spray device based on the bending vibration sandwich transducer described in Embodiment 1 is that the connection position between the front end cover 1-2 and the vibrating plate 2 is located at the vibrating plate 2 In this way, the bending vibration of the transducer 1 can be effectively used to excite the bending vibration of the vibrating piece 2 .

具体实施方式四:本实施方式与具体实施方式一所述的基于弯振夹心换能器的压电微喷装置的区别在于,前端盖1-2与振动片2之间通过驱动足4连接。Embodiment 4: The difference between this embodiment and the piezoelectric micro-spray device based on the flexural vibration sandwich transducer described in Embodiment 1 is that the front end cover 1 - 2 and the vibrating piece 2 are connected through the driving foot 4 .

具体实施方式五:本实施方式与具体实施方式一所述的基于弯振夹心换能器的压电微喷装置的区别在于,所述圆锥形内腔3-1与喷射通孔3-3同轴,这种设置方式有利于液体喷出。Embodiment 5: The difference between this embodiment and the piezoelectric micro-spray device based on the bending vibration sandwich transducer described in Embodiment 1 is that the conical inner cavity 3-1 is the same as the injection through hole 3-3. Shaft, this arrangement is conducive to liquid ejection.

Claims (5)

1.基于弯振夹心换能器的压电微喷装置,它包括弯振夹心换能器(1)、振动片(2)和喷嘴(3);其特征是:弯振夹心换能器(1)包括后端盖(1-1)、前端盖(1-2)、两片压电陶瓷片(1-3)和四片电极片(1-4),所述两片压电陶瓷片(1-3)依次设置在后端盖(1-1)与前端盖(1-2)之间,后端盖(1-1)与一个压电陶瓷片(1-3)之间设置有一个电极片(1-4),前端盖(1-2)与另一个压电陶瓷片(1-3)之间设置有一个电极片(1-4);两片压电陶瓷片(1-3)之间设置有两个电极片(1-4),该两个电极片(1-4)位于同一平面上,且该两个电极片(1-4)之间存有间隙;两片压电陶瓷片(1-3)均沿厚度方向极化,且两片压电陶瓷片(1-3)的极化方向相反;喷嘴(3)上开有圆锥形内腔(3-1),圆锥形内腔(3-1)的底部开有喷射通孔(3-3),圆锥形内腔(3-1)上部的侧壁上开有进流孔(3-2);前端盖(1-2)末端的底面与振动片(2)的顶面固定连接,所述振动片(2)的底面与喷嘴(3)中圆锥形内腔(3-1)的大开口端边缘固定连接,且将喷嘴(3)中圆锥形内腔(3-1)的大开口端完全覆盖。1. based on the piezoelectric micro-spray device of the bending vibration sandwich transducer, it comprises the bending vibration sandwich transducer (1), vibrating sheet (2) and nozzle (3); It is characterized in that: the bending vibration sandwich transducer ( 1) Including rear end cover (1-1), front end cover (1-2), two piezoelectric ceramic sheets (1-3) and four electrode sheets (1-4), the two piezoelectric ceramic sheets (1-3) are sequentially arranged between the rear end cover (1-1) and the front end cover (1-2), between the rear end cover (1-1) and a piezoelectric ceramic sheet (1-3) is arranged An electrode sheet (1-4), an electrode sheet (1-4) is arranged between the front cover (1-2) and another piezoelectric ceramic sheet (1-3); two piezoelectric ceramic sheets (1- 3) Two electrode sheets (1-4) are arranged between them, the two electrode sheets (1-4) are located on the same plane, and there is a gap between the two electrode sheets (1-4); The piezoelectric ceramic sheets (1-3) are all polarized along the thickness direction, and the polarization directions of the two piezoelectric ceramic sheets (1-3) are opposite; the nozzle (3) has a conical inner cavity (3-1) , the bottom of the conical inner cavity (3-1) has a spray through hole (3-3), and the side wall of the upper part of the conical inner cavity (3-1) has an inlet hole (3-2); the front end cover The bottom surface of the end of (1-2) is fixedly connected to the top surface of the vibrating piece (2), and the bottom surface of the vibrating piece (2) is fixed to the edge of the large opening end of the conical inner cavity (3-1) in the nozzle (3) Connect and completely cover the large open end of the conical cavity (3-1) in the nozzle (3). 2.根据权利要求1所述的基于弯振夹心换能器的压电微喷装置,其特征在于所述压电陶瓷片(1-3)截面为方形或圆形。2. The piezoelectric micro-injection device based on the bending vibration sandwich transducer according to claim 1, characterized in that the cross-section of the piezoelectric ceramic sheet (1-3) is square or circular. 3.根据权利要求1所述的基于弯振夹心换能器的压电微喷装置,其特征在于前端盖(1-2)与振动片(2)的连接位置位于振动片(2)中心位置。3. The piezoelectric microspray device based on the bending vibration sandwich transducer according to claim 1, characterized in that the connection position between the front end cover (1-2) and the vibrating piece (2) is located at the center of the vibrating piece (2) . 4.根据权利要求1所述的基于弯振夹心换能器的压电微喷装置,其特征在于前端盖(1-2)与振动片(2)之间通过驱动足(4)连接。4. The piezoelectric micro-spray device based on a bending vibration sandwich transducer according to claim 1, characterized in that the front end cover (1-2) is connected to the vibrating plate (2) through a driving foot (4). 5.根据权利要求1所述的基于弯振夹心换能器的压电微喷装置,其特征在于所述圆锥形内腔(3-1)与喷射通孔(3-3)同轴。5. The piezoelectric micro-injection device based on a bending vibration sandwich transducer according to claim 1, characterized in that the conical inner cavity (3-1) is coaxial with the injection through hole (3-3).
CN201210389763.0A 2012-10-15 2012-10-15 Piezoelectric micro-jet device based on bending vibration sandwich transducer Expired - Fee Related CN102896061B (en)

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CN106402620A (en) * 2016-11-25 2017-02-15 哈尔滨工业大学 Patting-type piezoelectric driving micro-jet lubrication device
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN86102943A (en) * 1985-04-29 1986-11-19 简·迈克尔·安东尼 Ultrasonic spraying device
CN201075846Y (en) * 2007-08-31 2008-06-18 东南大学 Bending compressional vibration type straight line ultrasound wave electric machine
CN101262187A (en) * 2008-04-29 2008-09-10 哈尔滨工业大学 Bending vibration sandwich transducer type cylindrical stator and ultrasonic motor using the stator
CN202097067U (en) * 2011-05-26 2012-01-04 任保林 Middle-entering ultrasonic strong force resonance pulse jet sprayer device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60175566A (en) * 1984-02-22 1985-09-09 Matsushita Electric Ind Co Ltd Spray apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN86102943A (en) * 1985-04-29 1986-11-19 简·迈克尔·安东尼 Ultrasonic spraying device
CN201075846Y (en) * 2007-08-31 2008-06-18 东南大学 Bending compressional vibration type straight line ultrasound wave electric machine
CN101262187A (en) * 2008-04-29 2008-09-10 哈尔滨工业大学 Bending vibration sandwich transducer type cylindrical stator and ultrasonic motor using the stator
CN202097067U (en) * 2011-05-26 2012-01-04 任保林 Middle-entering ultrasonic strong force resonance pulse jet sprayer device

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