CN102879152A - Water drip and leakage monitoring device for cooling pipeline of semiconductor production equipment - Google Patents
Water drip and leakage monitoring device for cooling pipeline of semiconductor production equipment Download PDFInfo
- Publication number
- CN102879152A CN102879152A CN2012103661774A CN201210366177A CN102879152A CN 102879152 A CN102879152 A CN 102879152A CN 2012103661774 A CN2012103661774 A CN 2012103661774A CN 201210366177 A CN201210366177 A CN 201210366177A CN 102879152 A CN102879152 A CN 102879152A
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- production equipment
- water
- monitoring device
- water dripping
- pipeline
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 63
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 35
- 238000001816 cooling Methods 0.000 title claims abstract description 26
- 238000012806 monitoring device Methods 0.000 title claims abstract description 15
- 239000004065 semiconductor Substances 0.000 title claims abstract description 10
- 235000003140 Panax quinquefolius Nutrition 0.000 claims description 8
- 240000005373 Panax quinquefolius Species 0.000 claims description 8
- 239000008367 deionised water Substances 0.000 description 6
- 229910021641 deionized water Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
The invention belongs to the technical field of semiconductor equipment, and particularly relates to a water drip and leakage monitoring device for a cooling pipeline of semiconductor production equipment. The cooling pipeline comprises a cooling dome, an external pipeline, a water tank, a collecting tray and a drain outlet. The cooling dome is positioned at the top of the production equipment and connected with a water inlet pipeline, the external pipeline is connected with the cooling dome, the water tank is connected with the external pipeline, the collecting tray is positioned under the production equipment, the drain outlet is reserved at the bottom of the production equipment and aligns to the collecting tray, and particularly, the water drip and leakage monitoring device comprises a water drip and leakage sensor arranged in the collecting tray. By the aid of the water drip and leakage senor arranged in the collecting tray, water drip and leakage at different positions can be monitored comprehensively, alarm signals can be sent in time, and damages are avoided.
Description
Technical field
The present invention relates to the semiconductor manufacturing equipment technical field, especially a kind of water dripping monitoring device of production equipment cooling line.
Background technology
In field of semiconductor manufacture, deionized water (deionized water) is commonly used for the chilled water of various production equipments.Cooling line example referring to deionized water in the accompanying drawing 1, represent normal water (flow) direction with solid line among the figure, deionized water is delivered to the cooling dome (1) at production equipment top by the entry pipeline, is delivered to water tank (3) by some external pipes (2) again.
Cooling line inevitably can produce the problem of water clock after long-term the use, for example the bottom of external pipe and all kinds of joint location all are the positions of easy corrosion and then generation weeping.For water dripping is monitored, existing method is to contain drain cap (5) in the arranged beneath of production equipment, offer in the bottom of production equipment and aim at the leakage mouth of containing drain cap (5), and at leakage mouth location arrangements water dripping sensor (6).Referring to the dotted line in the accompanying drawing 1, the water (flow) direction of expression water dripping when the inner generation of production equipment deionized water water clock, is contained the deionized water that drain cap can be collected water clock on the one hand, and sensor can monitor water clock on the other hand, and sends alerting signal.Yet, the method has certain limitation, because it can only monitor the water clock of production equipment inside, when the pipeline generation water clock beyond the production equipment, the sensor because water dripping can not flowed through, therefore can the trigger alarm signal, and then the undesirable element that may cause affecting normal production can not in time be found out.
Summary of the invention
Technical matters to be solved by this invention is that the water dripping of semiconductor production equipment cooling line is accomplished omnibearing monitoring.
For achieving the above object, the present invention proposes a kind of water dripping monitoring device of semiconductor production equipment cooling line, this cooling line comprises and is positioned at the cooling dome production equipment top and that be connected with the entry pipeline, the external pipe that is connected with the cooling dome, the water tank that is connected with external pipe, be positioned at the Sheng drain cap of production equipment below, and be opened in the production equipment bottom and aim at the leakage mouth of containing drain cap, especially, described water dripping monitoring device comprises and is arranged on the water dripping sensor of containing in the drain cap.
The present invention is by arranging the water dripping sensor in containing drain cap, water dripping that can each position of comprehensive monitoring in time sends alerting signal, avoids the generation that endangers.
Description of drawings
By the more specifically explanation of the preferred embodiments of the present invention shown in the accompanying drawing, above-mentioned and other purpose of the present invention, Characteristics and advantages will be more clear.Reference numeral identical in whole accompanying drawings is indicated identical part.Deliberately do not draw accompanying drawing by physical size equal proportion convergent-divergent, focus on illustrating purport of the present invention.
Fig. 1 is cooling line and the water dripping monitoring device synoptic diagram of production equipment in the prior art;
Fig. 2 is cooling line and the water dripping monitoring device synoptic diagram that the present invention proposes.
Embodiment
Referring to shown in Figure 2, present embodiment proposes a kind of water dripping monitoring device of semiconductor production equipment cooling line.This cooling line comprises and is positioned at the cooling dome 1 production equipment top and that be connected with the entry pipeline, the some external pipes 2 that are connected with cooling dome 1, the water tank 3 that is connected with external pipe 2, be positioned at the Sheng drain cap 5 of production equipment below, and be opened in the production equipment bottom and aim at the leakage mouth 6 ' of containing drain cap 5.In some occasion, water tank 3 is fixed on ground, and the periphery of water tank 3 is provided with the outside runout 4 of containing.
Especially, in described Sheng drain cap 5, be provided with water dripping sensor 7.When water dripping appearred in production equipment inside, water dripping flowed into from leakage mouth 6 ' and contains drain cap 5; When water dripping appearred in the exterior tube 2 of production equipment periphery, water dripping was directly contained drain cap 5 from flowing into.Regardless of the source of water, when containing that drain cap 5 is interior ponding to occur, water dripping sensor 7 all can monitor, and sends alerting signal, notifies in case of necessity production equipment to shut down, and therefore can monitor by omnibearing water dripping to the optional position.Preferred water dripping sensor 7 is positioned near leakage mouth 6 ' position, therefore can make response to the leakage of production equipment inside faster.In addition, contain drain cap 5 and be connected to Sheng runout 4 by pipeline 8, can in time the ponding of containing in the drain cap 5 be drawn, avoid ponding to overflow the pollution surrounding environment.
Although the present invention with preferred embodiment openly as above; but it is not to limit claim; any those skilled in the art without departing from the spirit and scope of the present invention; can make possible change and modification, so protection scope of the present invention should be as the criterion with the scope that claim of the present invention was defined.
Claims (4)
1. the water dripping monitoring device of a semiconductor production equipment cooling line, this cooling line comprises and is positioned at the cooling dome production equipment top and that be connected with the entry pipeline, the external pipe that is connected with the cooling dome, the water tank that is connected with external pipe, be positioned at the Sheng drain cap of production equipment below, and be opened in the production equipment bottom and aim at the leakage mouth of containing drain cap, it is characterized in that: described water dripping monitoring device comprises the water dripping sensor that is arranged in the Sheng drain cap.
2. water dripping monitoring device as claimed in claim 1, it is characterized in that: described water tank is fixed on ground, and the periphery of water tank is provided with the outside runout of containing.
3. water dripping monitoring device as claimed in claim 1 is characterized in that: described water dripping sensor is positioned at the position near the leakage mouth.
4. water dripping monitoring device as claimed in claim 2, it is characterized in that: described Sheng drain cap is connected to the Sheng runout by pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103661774A CN102879152A (en) | 2012-09-27 | 2012-09-27 | Water drip and leakage monitoring device for cooling pipeline of semiconductor production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103661774A CN102879152A (en) | 2012-09-27 | 2012-09-27 | Water drip and leakage monitoring device for cooling pipeline of semiconductor production equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102879152A true CN102879152A (en) | 2013-01-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012103661774A Pending CN102879152A (en) | 2012-09-27 | 2012-09-27 | Water drip and leakage monitoring device for cooling pipeline of semiconductor production equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN102879152A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106197862A (en) * | 2016-07-19 | 2016-12-07 | 洪明 | A kind of pipeline opening that is used for detects alarm set automatically |
| CN111103098A (en) * | 2019-12-23 | 2020-05-05 | 赵敏 | Early warning device for differential pressure transmitter cooling pipe for high-temperature detection |
| CN111799196A (en) * | 2020-07-17 | 2020-10-20 | 中国科学院微电子研究所 | Semiconductor cleaning equipment and emergency drainage method thereof |
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| JP3848948B2 (en) * | 2004-02-17 | 2006-11-22 | 独立行政法人農業・食品産業技術総合研究機構 | Pipeline fluid leakage exploration system and exploration method |
| CN101283257A (en) * | 2005-08-31 | 2008-10-08 | L·凯茨 | Method and apparatus for detecting severity of water leaks |
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| CN201527327U (en) * | 2009-07-10 | 2010-07-14 | 国网运行有限公司上海超高压管理处 | Water leakage detection and alarm system |
| CN201555696U (en) * | 2009-11-27 | 2010-08-18 | 国网运行有限公司惠州超高压管理处 | Leakage warning monitor |
| CN201788058U (en) * | 2010-08-27 | 2011-04-06 | 广州智光电气股份有限公司 | Device for detecting cooling water leakage of sealed water-cooled high-voltage thyristor valve group |
-
2012
- 2012-09-27 CN CN2012103661774A patent/CN102879152A/en active Pending
Patent Citations (6)
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|---|---|---|---|---|
| JP3848948B2 (en) * | 2004-02-17 | 2006-11-22 | 独立行政法人農業・食品産業技術総合研究機構 | Pipeline fluid leakage exploration system and exploration method |
| CN101283257A (en) * | 2005-08-31 | 2008-10-08 | L·凯茨 | Method and apparatus for detecting severity of water leaks |
| CN201302502Y (en) * | 2008-10-27 | 2009-09-02 | 国网运行有限公司宜昌超高压管理处 | Circulating pump leakage monitoring device |
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| CN201555696U (en) * | 2009-11-27 | 2010-08-18 | 国网运行有限公司惠州超高压管理处 | Leakage warning monitor |
| CN201788058U (en) * | 2010-08-27 | 2011-04-06 | 广州智光电气股份有限公司 | Device for detecting cooling water leakage of sealed water-cooled high-voltage thyristor valve group |
Non-Patent Citations (1)
| Title |
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| 杨进等: "自适应供水管网泄漏检测定位仪器系统", 《仪表技术与传感器》, no. 02, 25 February 2005 (2005-02-25), pages 14 - 16 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106197862A (en) * | 2016-07-19 | 2016-12-07 | 洪明 | A kind of pipeline opening that is used for detects alarm set automatically |
| CN106197862B (en) * | 2016-07-19 | 2018-09-28 | 四川恒恩新材料科技有限公司 | One kind detecting alarm set automatically for pipeline opening |
| CN111103098A (en) * | 2019-12-23 | 2020-05-05 | 赵敏 | Early warning device for differential pressure transmitter cooling pipe for high-temperature detection |
| CN111103098B (en) * | 2019-12-23 | 2021-10-15 | 江苏新晖测控科技有限公司 | Early warning device for differential pressure transmitter cooling pipe for high-temperature detection |
| CN111799196A (en) * | 2020-07-17 | 2020-10-20 | 中国科学院微电子研究所 | Semiconductor cleaning equipment and emergency drainage method thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HONGLI SEMICONDUCTOR MANUFACTURE CO LTD, SHANGHAI Effective date: 20140428 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20140428 Address after: 201203 Shanghai Zhangjiang hi tech park Zuchongzhi Road No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201203 Shanghai Guo Shou Jing Road, Pudong New Area Zhangjiang hi tech Park No. 818 Applicant before: Hongli Semiconductor Manufacture Co., Ltd., Shanghai |
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| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20130116 |
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| RJ01 | Rejection of invention patent application after publication |